research/ellipsometry/2-2-12/data_files/si_test.dat

   1 Testing Ellipsometer with calibration wafer\r
   2 VASEmethod[EllipsometerType=0, Isotropic, AutoRetarder=0, TrackPol=1, Pol>=0, Revs=10, AutoSlit=2000, WVASE=3.698, HardVer=6.256, Thu Feb 02 10:33:33 2012]\r
   3 Original[si_test.dat]\r
   4 Angstroms\r
   5 4000.000000     65.000000       25.842506       167.0533        0.0155809       0.177065\r
   6 5000.000000     65.000000       20.235922       170.56262       0.0116777       0.219329\r
   7 6000.000000     65.000000       18.132879       171.83423       0.0107136       0.254831\r
   8 7000.000000     65.000000       17.059975       172.11714       0.0102658       0.266702\r
   9 4000.000000     70.000000       20.312319       160.75272       0.0154761       0.143902\r
  10 5000.000000     70.000000       13.630883       163.81598       0.00851043      0.133274\r
  11 6000.000000     70.000000       11.182261       165.36273       0.0072666       0.150898\r
  12 7000.000000     70.000000       9.9043617       165.54015       0.00706528      0.166848\r
  13 4000.000000     75.000000       13.141752       145.59216       0.0183561       0.144931\r
  14 5000.000000     75.000000       5.6647544       133.53009       0.00551169      0.0716936\r
  15 6000.000000     75.000000       3.3658845       115.49657       0.00639433      0.083641\r
  16 7000.000000     75.000000       2.4735098       94.62114        0.0106218       0.115605