1 Testing Ellipsometer with calibration wafer
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2 VASEmethod[EllipsometerType=0, Isotropic, AutoRetarder=0, TrackPol=1, Pol>=0, Revs=10, AutoSlit=2000, WVASE=3.698, HardVer=6.256, Thu Feb 02 10:33:33 2012]
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3 Original[si_test.dat]
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5 4000.000000 65.000000 25.842506 167.0533 0.0155809 0.177065
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6 5000.000000 65.000000 20.235922 170.56262 0.0116777 0.219329
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7 6000.000000 65.000000 18.132879 171.83423 0.0107136 0.254831
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8 7000.000000 65.000000 17.059975 172.11714 0.0102658 0.266702
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9 4000.000000 70.000000 20.312319 160.75272 0.0154761 0.143902
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10 5000.000000 70.000000 13.630883 163.81598 0.00851043 0.133274
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11 6000.000000 70.000000 11.182261 165.36273 0.0072666 0.150898
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12 7000.000000 70.000000 9.9043617 165.54015 0.00706528 0.166848
\r
13 4000.000000 75.000000 13.141752 145.59216 0.0183561 0.144931
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14 5000.000000 75.000000 5.6647544 133.53009 0.00551169 0.0716936
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15 6000.000000 75.000000 3.3658845 115.49657 0.00639433 0.083641
\r
16 7000.000000 75.000000 2.4735098 94.62114 0.0106218 0.115605