research/ellipsometry/6-2-12/calibration_si.dat

   1 Calibration Wafer\r
   2 VASEmethod[EllipsometerType=0, Isotropic, AutoRetarder=0, TrackPol=1, Pol>=0, Revs=10, AutoSlit=2000, WVASE=3.698, HardVer=6.256, Mon Feb 06 15:47:40 2012]\r
   3 Original[calibration_si.dat]\r
   4 Angstroms\r
   5 3000.000000     75.000000       28.549303       117.28966       0.430163        1.15135\r
   6 3050.000000     75.000000       26.126379       117.17491       0.309719        0.876811\r
   7 3100.000000     75.000000       25.701864       115.44431       0.247675        0.701738\r
   8 3150.000000     75.000000       24.474777       115.76173       0.183936        0.540398\r
   9 3200.000000     75.000000       24.156651       115.89487       0.152335        0.453438\r
  10 3250.000000     75.000000       23.783367       116.34887       0.120628        0.364601\r
  11 3300.000000     75.000000       23.245188       117.3326        0.0980612       0.303981\r
  12 3350.000000     75.000000       23.026472       117.73214       0.0826686       0.259416\r
  13 3400.000000     75.000000       22.671682       119.40088       0.0681286       0.219792\r
  14 3450.000000     75.000000       22.558371       120.1098        0.0564887       0.184232\r
  15 3500.000000     75.000000       22.445713       121.12538       0.0475148       0.157194\r
  16 3550.000000     75.000000       22.642271       123.60079       0.0405269       0.136893\r
  17 3600.000000     75.000000       22.853458       126.96262       0.0353092       0.123451\r
  18 3650.000000     75.000000       22.628443       132.62883       0.0310903       0.118947\r
  19 3700.000000     75.000000       21.578161       139.00424       0.0272173       0.121125\r
  20 3750.000000     75.000000       19.885717       142.32521       0.0243626       0.12442\r
  21 3800.000000     75.000000       18.142447       145.37878       0.0216961       0.128834\r
  22 3850.000000     75.000000       16.535406       147.12115       0.0190912       0.128691\r
  23 3900.000000     75.000000       15.282735       147.08716       0.0170321       0.123138\r
  24 3950.000000     75.000000       14.266438       147.25352       0.0152384       0.117846\r
  25 4000.000000     75.000000       13.308693       147.28548       0.0136506       0.112646\r
  26 4050.000000     75.000000       12.539703       146.92683       0.012242        0.105553\r
  27 4100.000000     75.000000       11.783708       147.27222       0.0115041       0.106357\r
  28 4150.000000     75.000000       11.156564       146.6358        0.0103091       0.0985154\r
  29 4200.000000     75.000000       10.578347       145.67133       0.0106491       0.104575\r
  30 4250.000000     75.000000       10.082393       145.29361       0.00985724      0.100255\r
  31 4300.000000     75.000000       9.6430092       144.59552       0.00957877      0.100068\r
  32 4350.000000     75.000000       9.2360249       143.68483       0.00884792      0.0941601\r
  33 4400.000000     75.000000       8.7885971       143.39709       0.00808762      0.0895062\r
  34 4450.000000     75.000000       8.4515181       142.96419       0.00765761      0.0869375\r
  35 4500.000000     75.000000       8.0687008       142.63054       0.00689581      0.08099\r
  36 4550.000000     75.000000       7.7218361       141.9724        0.00673376      0.080985\r
  37 4600.000000     75.000000       7.4414859       141.39764       0.00629067      0.0771204\r
  38 4650.000000     75.000000       7.1586919       140.35165       0.00590052      0.0730566\r
  39 4700.000000     75.000000       6.9185824       139.75745       0.00558129      0.0702045\r
  40 4750.000000     75.000000       6.6519108       139.26457       0.00566412      0.0728329\r
  41 4800.000000     75.000000       6.4230871       138.4789        0.00576956      0.0750685\r
  42 4850.000000     75.000000       6.1986117       137.97017       0.00555832      0.0736272\r
  43 4900.000000     75.000000       5.9795313       137.52026       0.00556144      0.0750935\r
  44 4950.000000     75.000000       5.7917142       136.60928       0.00537526      0.0730062\r
  45 5000.000000     75.000000       5.6103511       135.85153       0.00545165      0.0747018\r
  46 5050.000000     75.000000       5.4280925       134.69389       0.00539938      0.0740839\r
  47 5100.000000     75.000000       5.2593031       134.50923       0.00536491      0.0751\r
  48 5150.000000     75.000000       5.0777035       133.24477       0.00533126      0.0746482\r
  49 5200.000000     75.000000       4.9261479       132.65565       0.00531492      0.0751851\r
  50 5250.000000     75.000000       4.7937326       131.99419       0.00530897      0.0755777\r
  51 5300.000000     75.000000       4.6467223       130.84805       0.00532647      0.075764\r
  52 5350.000000     75.000000       4.5380754       129.91966       0.00534696      0.0759126\r
  53 5400.000000     75.000000       4.3983274       128.7886        0.00538481      0.0763935\r
  54 5450.000000     75.000000       4.2784128       128.09538       0.0054042       0.0770637\r
  55 5500.000000     75.000000       4.1461825       127.49039       0.00544232      0.0783206\r
  56 5550.000000     75.000000       4.0523567       126.58267       0.00549232      0.0788267\r
  57 5600.000000     75.000000       3.9303472       125.52081       0.0055646       0.0797919\r
  58 5650.000000     75.000000       3.8242803       124.49376       0.00564446      0.0807292\r
  59 5700.000000     75.000000       3.6952479       123.85548       0.00571535      0.0824916\r
  60 5750.000000     75.000000       3.6400232       122.50233       0.00581276      0.0824747\r
  61 5800.000000     75.000000       3.5539153       121.6181        0.00590675      0.083587\r
  62 5850.000000     75.000000       3.4265497       120.97737       0.00601468      0.0859063\r
  63 5900.000000     75.000000       3.4453428       118.98569       0.00615114      0.0842995\r
  64 5950.000000     75.000000       3.3179293       118.85745       0.0062723       0.0875862\r
  65 6000.000000     75.000000       3.2386012       117.66785       0.00661454      0.0915006\r
  66 6050.000000     75.000000       3.1796122       116.94576       0.00664566      0.0915764\r
  67 6100.000000     75.000000       3.107759        115.62932       0.00677976      0.0922126\r
  68 6150.000000     75.000000       3.0317245       114.54662       0.00691483      0.0933081\r
  69 6200.000000     75.000000       2.9775805       113.51713       0.00707263      0.0944358\r
  70 6250.000000     75.000000       2.9319923       112.51187       0.00726544      0.0959043\r
  71 6300.000000     75.000000       2.8794537       111.61867       0.00748918      0.0980441\r
  72 6350.000000     75.000000       2.8222919       109.85087       0.0078317       0.100142\r
  73 6400.000000     75.000000       2.7709272       109.21078       0.00811797      0.1034\r
  74 6450.000000     75.000000       2.6686714       108.42262       0.00851764      0.108588\r
  75 6500.000000     75.000000       2.681392        106.76665       0.00868264      0.107283\r
  76 6550.000000     75.000000       2.6479535       105.50875       0.00911077      0.11069\r
  77 6600.000000     75.000000       2.5128276       104.9517        0.00962152      0.117839\r
  78 6650.000000     75.000000       2.5624721       103.45406       0.00972623      0.1155\r
  79 6700.000000     75.000000       2.5500016       102.25524       0.00989701      0.115562\r
  80 6750.000000     75.000000       2.4977834       101.84543       0.0101403       0.118336\r
  81 6800.000000     75.000000       2.418339        100.553 0.0105961       0.122334\r
  82 6850.000000     75.000000       2.4282506       98.988373       0.0104715       0.118301\r
  83 6900.000000     75.000000       2.388341        98.373581       0.0109272       0.122927\r
  84 6950.000000     75.000000       2.3506131       97.16465        0.0115784       0.128843\r
  85 7000.000000     75.000000       2.2882867       95.867821       0.0125402       0.13831\r
  86 7050.000000     75.000000       2.3171115       94.698029       0.0128905       0.140547\r
  87 7100.000000     75.000000       2.2944198       93.612755       0.0131875       0.142916\r
  88 7150.000000     75.000000       2.2493937       92.696228       0.013153        0.142159\r
  89 7200.000000     75.000000       2.1901474       91.447449       0.0139857       0.150862\r
  90 7250.000000     75.000000       2.2028439       90.475906       0.0148396       0.159723\r
  91 7300.000000     75.000000       2.1716094       89.703468       0.0147689       0.159138\r
  92 7350.000000     75.000000       2.1224172       88.656693       0.0143091       0.15473\r
  93 7400.000000     75.000000       2.1629908       87.479744       0.0154873       0.167898\r
  94 7450.000000     75.000000       2.1206119       86.020996       0.0159641       0.174938\r
  95 7500.000000     75.000000       2.1066377       84.920486       0.0165326       0.182999\r
  96 7550.000000     75.000000       2.0929744       83.102631       0.0172934       0.19548\r
  97 7600.000000     75.000000       2.1008039       83.466743       0.0177701       0.199859\r
  98 7650.000000     75.000000       2.0629132       82.142311       0.0128646       0.147674\r
  99 7700.000000     75.000000       2.0085824       81.695549       0.0192401       0.223454\r
 100 7750.000000     75.000000       2.0088184       79.37381        0.0217292       0.262736\r
 101 7800.000000     75.000000       2.02161 79.938713       0.0239258       0.28585\r
 102 7850.000000     75.000000       2.1678159       78.552574       0.0232261       0.27951\r
 103 7900.000000     75.000000       1.9742153       76.994522       0.0216042       0.275668\r
 104 7950.000000     75.000000       2.0276327       75.875969       0.0235861       0.305712\r
 105 8000.000000     75.000000       2.0663972       75.237701       0.022294        0.291106