1 uv scan Si)2 Wafer 250nm to 1000nm
\r
2 VASEmethod[EllipsometerType=0, Isotropic, AutoRetarder=0, TrackPol=1, Pol>=0, Revs=10, AutoSlit=2000, WVASE=3.698, HardVer=6.256, Tue Mar 06 15:53:23 2012]
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