research/ellipsometry/6-3-12/data_files/calibration_scan.dat

   1 uv scan Si)2 Wafer 250nm to 1000nm\r
   2 VASEmethod[EllipsometerType=0, Isotropic, AutoRetarder=0, TrackPol=1, Pol>=0, Revs=10, AutoSlit=2000, WVASE=3.698, HardVer=6.256, Tue Mar 06 15:53:23 2012]\r
   3 Original[calibration_scan.dat]\r
   4 nm\r
   5 250.000000      65.000000       7.2770953       0       69.8761 6.3597e+006\r
   6 260.000000      65.000000       0.0024569929    126.4302        40919.6 7.04246e+008\r
   7 270.000000      65.000000       1.3990574       0       46.1543 2.16305e+007\r
   8 280.000000      65.000000       34.28569        128.64342       3.47733 9.42129\r
   9 290.000000      65.000000       35.781521       139.46199       1.0872  3.52379\r
  10 300.000000      65.000000       33.403152       146.49736       0.476101        1.87427\r
  11 310.000000      65.000000       31.502018       147.13795       0.258198        1.06706\r
  12 320.000000      65.000000       30.445364       148.03783       0.156238        0.675361\r
  13 330.000000      65.000000       30.650116       149.67561       0.104761        0.473023\r
  14 340.000000      65.000000       30.013414       150.06903       0.0690731       0.319553\r
  15 350.000000      65.000000       30.061705       152.41333       0.0482472       0.240259\r
  16 360.000000      65.000000       30.822891       154.43567       0.0356967       0.187959\r
  17 370.000000      65.000000       30.805529       160.94113       0.0276801       0.192659\r
  18 380.000000      65.000000       28.941488       166.44263       0.0217112       0.2186\r
  19 390.000000      65.000000       27.100256       167.07361       0.0179369       0.197616\r
  20 400.000000      65.000000       25.843859       168.27025       0.0158722       0.198908\r
  21 410.000000      65.000000       24.782259       168.30307       0.0147113       0.190581\r
  22 420.000000      65.000000       23.962437       169.40465       0.0141367       0.207055\r
  23 430.000000      65.000000       23.22154        170.27994       0.013568        0.221652\r
  24 440.000000      65.000000       22.677277       170.05351       0.0131247       0.213489\r
  25 450.000000      65.000000       22.133902       170.30951       0.0127244       0.216475\r
  26 460.000000      65.000000       21.680548       170.73271       0.0124534       0.225133\r
  27 470.000000      65.000000       21.21755        170.92453       0.012155        0.228273\r
  28 480.000000      65.000000       20.860931       171.0777        0.0120541       0.23342\r
  29 490.000000      65.000000       20.491751       170.31659       0.0118504       0.214731\r
  30 500.000000      65.000000       20.198423       170.88792       0.0117028       0.227919\r
  31 510.000000      65.000000       19.918058       171.78511       0.0115649       0.252532\r
  32 520.000000      65.000000       19.647264       171.65785       0.0114333       0.248703\r
  33 530.000000      65.000000       19.374296       171.65868       0.0112861       0.248439\r
  34 540.000000      65.000000       19.145382       172.01866       0.0111756       0.25961\r
  35 550.000000      65.000000       18.986998       172.07381       0.0110994       0.261455\r
  36 560.000000      65.000000       18.7614 172.60501       0.0109948       0.280302\r
  37 570.000000      65.000000       18.601295       172.45793       0.0109235       0.275091\r
  38 580.000000      65.000000       18.410816       171.99077       0.0108285       0.259182\r
  39 590.000000      65.000000       18.251308       171.68825       0.0107571       0.250032\r
  40 600.000000      65.000000       18.115299       172.15491       0.0107283       0.265792\r
  41 610.000000      65.000000       18.005463       172.39598       0.0106659       0.274001\r
  42 620.000000      65.000000       17.87661        173.28682       0.0106066       0.310332\r
  43 630.000000      65.000000       17.726721       172.59171       0.0105537       0.282022\r
  44 640.000000      65.000000       17.629824       172.57243       0.0105426       0.282339\r
  45 650.000000      65.000000       17.508682       172.96413       0.0105054       0.298696\r
  46 660.000000      65.000000       17.450281       172.84712       0.0105398       0.295672\r
  47 670.000000      65.000000       17.329451       173.57899       0.010482        0.329367\r
  48 680.000000      65.000000       17.211502       173.5627        0.0104376       0.329108\r
  49 690.000000      65.000000       17.119329       173.11243       0.0103845       0.307583\r
  50 700.000000      65.000000       17.0488 172.59883       0.0104691       0.289739\r
  51 710.000000      65.000000       16.978798       173.76366       0.0104899       0.345468\r
  52 720.000000      65.000000       16.909399       174.0883        0.0104681       0.364906\r
  53 730.000000      65.000000       16.819778       174.12602       0.0105043       0.370239\r
  54 740.000000      65.000000       16.740332       174.09267       0.0105494       0.371285\r
  55 750.000000      65.000000       16.655045       174.44844       0.010618        0.399345\r
  56 760.000000      65.000000       16.613245       173.86497       0.010797        0.368433\r
  57 770.000000      65.000000       16.54015        173.9234        0.0109192       0.377639\r
  58 780.000000      65.000000       16.505322       173.45815       0.0117585       0.378584\r
  59 790.000000      65.000000       16.443007       174.5573        0.0115966       0.449925\r
  60 800.000000      65.000000       16.370691       175.11974       0.0119669       0.519623\r
  61 810.000000      65.000000       16.302109       175.86005       0.0128601       0.660376\r
  62 820.000000      65.000000       16.27363        175.83397       0.0108022       0.552099\r
  63 830.000000      65.000000       16.202271       173.6012        0.00978918      0.327548\r
  64 840.000000      65.000000       16.203316       175.32849       0.0110721       0.506791\r
  65 850.000000      65.000000       16.132179       174.57257       0.0113222       0.448054\r
  66 860.000000      65.000000       16.126211       173.94385       0.0108162       0.383895\r
  67 870.000000      65.000000       16.076897       174.56825       0.00989838      0.392598\r
  68 880.000000      65.000000       16.027473       174.3273        0.00947372      0.360848\r
  69 890.000000      65.000000       16.001501       174.28127       0.00946856      0.358279\r
  70 900.000000      65.000000       15.959162       175.06334       0.00943775      0.414436\r
  71 910.000000      65.000000       15.922361       175.06694       0.00942188      0.414896\r
  72 920.000000      65.000000       15.877103       175.42139       0.00938148      0.446121\r
  73 930.000000      65.000000       15.843402       174.64532       0.00939422      0.38292\r
  74 940.000000      65.000000       15.80225        175.01608       0.00935073      0.410348\r
  75 950.000000      65.000000       15.783232       174.62805       0.00933838      0.38072\r
  76 960.000000      65.000000       15.759781       174.92781       0.0093425       0.403851\r
  77 970.000000      65.000000       15.732325       174.70441       0.00932634      0.386811\r
  78 980.000000      65.000000       15.692245       175.38377       0.00928865      0.442744\r
  79 990.000000      65.000000       15.656824       175.39139       0.00927115      0.443536\r
  80 1000.000000     65.000000       15.648756       175.90228       0.00927596      0.499145\r
  81 250.000000      70.000000       12.579757       173.5507        37.5677 1571.66\r
  82 260.000000      70.000000       7.951251        0       43.4295 3.6257e+006\r
  83 270.000000      70.000000       18.546143       110.42294       8.40477 29.2983\r
  84 280.000000      70.000000       21.773722       144.33752       3.01561 14.937\r
  85 290.000000      70.000000       33.527012       132.48389       1.12968 3.29856\r
  86 300.000000      70.000000       30.808937       133.27495       0.48725 1.51675\r
  87 310.000000      70.000000       28.604958       134.95242       0.269192        0.903064\r
  88 320.000000      70.000000       27.06778        137.3916        0.164946        0.600658\r
  89 330.000000      70.000000       26.764362       138.75639       0.11083 0.418046\r
  90 340.000000      70.000000       26.404264       139.83194       0.0741097       0.288368\r
  91 350.000000      70.000000       26.584635       141.61751       0.0516279       0.207723\r
  92 360.000000      70.000000       27.11692        144.95445       0.0377534       0.162033\r
  93 370.000000      70.000000       26.826292       153.18649       0.0288615       0.158844\r
  94 380.000000      70.000000       24.319538       159.44374       0.021784        0.165124\r
  95 390.000000      70.000000       22.054958       161.82359       0.0173906       0.160053\r
  96 400.000000      70.000000       20.432741       162.53796       0.0146367       0.149009\r
  97 410.000000      70.000000       19.151951       163.33922       0.0130068       0.146309\r
  98 420.000000      70.000000       18.129681       163.80579       0.0122003       0.14786\r
  99 430.000000      70.000000       17.287743       163.85938       0.01139 0.144335\r
 100 440.000000      70.000000       16.547007       164.55368       0.0106116       0.145843\r
 101 450.000000      70.000000       15.90412        164.72458       0.0100059       0.144054\r
 102 460.000000      70.000000       15.321588       164.7402        0.0095728       0.142638\r
 103 470.000000      70.000000       14.816608       165.18578       0.00911337      0.144116\r
 104 480.000000      70.000000       14.372539       164.87903       0.00901428      0.143639\r
 105 490.000000      70.000000       13.97548        165.2713        0.00876632      0.14703\r
 106 500.000000      70.000000       13.598036       165.00815       0.00855489      0.144664\r
 107 510.000000      70.000000       13.253013       165.51396       0.00834437      0.149422\r
 108 520.000000      70.000000       12.928979       165.87172       0.0081513       0.153048\r
 109 530.000000      70.000000       12.650406       166.28554       0.00801458      0.158136\r
 110 540.000000      70.000000       12.362059       165.99332       0.0078536       0.155093\r
 111 550.000000      70.000000       12.120034       165.88507       0.00772077      0.154148\r
 112 560.000000      70.000000       11.929187       165.71558       0.00762862      0.152791\r
 113 570.000000      70.000000       11.682596       166.54626       0.00754062      0.163378\r
 114 580.000000      70.000000       11.500575       165.98105       0.00745768      0.157507\r
 115 590.000000      70.000000       11.314171       165.88335       0.00738373      0.157295\r
 116 600.000000      70.000000       11.154671       166.45865       0.00742056      0.166884\r
 117 610.000000      70.000000       10.991405       166.60039       0.00730646      0.168354\r
 118 620.000000      70.000000       10.814034       166.74991       0.00722556      0.170947\r
 119 630.000000      70.000000       10.691931       166.52142       0.0073285       0.172396\r
 120 640.000000      70.000000       10.545556       166.9957        0.00738002      0.182199\r
 121 650.000000      70.000000       10.395825       167.25531       0.0073776       0.188335\r
 122 660.000000      70.000000       10.289392       168.03407       0.00750367      0.205827\r
 123 670.000000      70.000000       10.180517       167.13992       0.00746452      0.192682\r
 124 680.000000      70.000000       10.084693       166.74527       0.00747899      0.189106\r
 125 690.000000      70.000000       9.9964161       167.54889       0.00742109      0.201224\r
 126 700.000000      70.000000       9.8610153       168.2168        0.0077519       0.224836\r
 127 710.000000      70.000000       9.7743235       168.48172       0.00790108      0.236347\r
 128 720.000000      70.000000       9.6814928       168.38008       0.00790202      0.236486\r
 129 730.000000      70.000000       9.6128502       167.83911       0.00813069      0.234245\r
 130 740.000000      70.000000       9.5242653       168.3401        0.00835962      0.253273\r
 131 750.000000      70.000000       9.4519005       167.38744       0.00866414      0.244731\r
 132 760.000000      70.000000       9.3590612       167.69356       0.00921191      0.269107\r
 133 770.000000      70.000000       9.2640533       166.48976       0.00959257      0.258153\r
 134 780.000000      70.000000       9.2356386       168.34413       0.0118713       0.370556\r
 135 790.000000      70.000000       9.161438        170.07773       0.0110369       0.407102\r
 136 800.000000      70.000000       9.0761738       169.4364        0.0119248       0.417143\r
 137 810.000000      70.000000       8.9987726       167.29095       0.0148861       0.43768\r
 138 820.000000      70.000000       8.9708099       168.81325       0.00610919      0.2043\r
 139 830.000000      70.000000       8.9385014       169.25957       0.00598973      0.20925\r
 140 840.000000      70.000000       8.8811007       169.27654       0.0069801       0.245751\r
 141 850.000000      70.000000       8.8048248       169.23384       0.0103175       0.364846\r
 142 860.000000      70.000000       8.77742 169.07747       0.00915184      0.320009\r
 143 870.000000      70.000000       8.7187881       169.03592       0.00675927      0.23699\r
 144 880.000000      70.000000       8.6797857       169.20343       0.00544388      0.194636\r
 145 890.000000      70.000000       8.6515808       169.03418       0.00545405      0.192629\r
 146 900.000000      70.000000       8.605134        169.32703       0.00539896      0.196873\r
 147 910.000000      70.000000       8.5704212       169.45068       0.00539322      0.19972\r
 148 920.000000      70.000000       8.5222292       169.65593       0.00530727      0.201488\r
 149 930.000000      70.000000       8.4759331       169.92279       0.00539289      0.211212\r
 150 940.000000      70.000000       8.4416676       170.12582       0.0052943       0.212401\r
 151 950.000000      70.000000       8.3997164       170.13579       0.00526361      0.212401\r
 152 960.000000      70.000000       8.3666487       170.42769       0.00530475      0.22137\r
 153 970.000000      70.000000       8.3312893       170.06963       0.00527982      0.213328\r
 154 980.000000      70.000000       8.2986612       170.20486       0.00518853      0.213314\r
 155 990.000000      70.000000       8.2621632       170.36734       0.00518394      0.217612\r
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 158 260.000000      75.000000       0.11816531      0       107.442 5.96001e+008\r
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 162 300.000000      75.000000       26.105986       117.36649       0.503077        1.41035\r
 163 310.000000      75.000000       24.971535       116.29475       0.288191        0.839039\r
 164 320.000000      75.000000       24.271727       118.71316       0.182158        0.554008\r
 165 330.000000      75.000000       22.924635       118.24861       0.114638        0.361428\r
 166 340.000000      75.000000       22.527145       119.98894       0.0816168       0.266222\r
 167 350.000000      75.000000       22.170969       122.64626       0.0558583       0.189721\r
 168 360.000000      75.000000       22.668509       128.25307       0.0412068       0.147534\r
 169 370.000000      75.000000       21.41823        139.53615       0.0310563       0.140585\r
 170 380.000000      75.000000       17.99124        147.3896        0.0234344       0.147247\r
 171 390.000000      75.000000       15.126356       148.73502       0.0180339       0.137304\r
 172 400.000000      75.000000       13.169113       149.18391       0.0144864       0.127109\r
 173 410.000000      75.000000       11.634665       148.51434       0.0122026       0.118001\r
 174 420.000000      75.000000       10.451925       147.51959       0.0113284       0.118023\r
 175 430.000000      75.000000       9.4468269       146.28384       0.0101315       0.112531\r
 176 440.000000      75.000000       8.6215935       145.29184       0.00851574      0.100274\r
 177 450.000000      75.000000       7.9145155       143.95921       0.00721127      0.0886639\r
 178 460.000000      75.000000       7.2735324       143.10927       0.00655451      0.0849589\r
 179 470.000000      75.000000       6.7129469       141.80948       0.00572751      0.0770263\r
 180 480.000000      75.000000       6.2520585       140.20076       0.00602927      0.0828142\r
 181 490.000000      75.000000       5.828546        139.2179        0.00580461      0.0824862\r
 182 500.000000      75.000000       5.4426308       137.4313        0.00564499      0.0820724\r
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