research/ellipsometry/WVASE32/DAT/010711-c3-r3-t.dat

   1 Nanodot sample C3 - Reflection 20-26d +=3d\r
   2 RTmethod[PolRT=0.00, RevsRT=10, SlitRT=2000, AutoSlitMin=100, Interleave=Off, WVASE=3.698, HardVer=6.256, Fri Jul 01 14:19:58 2011]\r
   3 Original[010711-c3-r3-t.dat]\r
   4 nm\r
   5 pR      300.000000      20.000000       0.0627558       0.0112551\r
   6 pR      310.000000      20.000000       0.0653211       0.0113064\r
   7 pR      320.000000      20.000000       0.080244        0.0116049\r
   8 pR      330.000000      20.000000       0.090312        0.0118062\r
   9 pR      340.000000      20.000000       0.104109        0.0120822\r
  10 pR      350.000000      20.000000       0.117565        0.0123513\r
  11 pR      360.000000      20.000000       0.13469 0.0126938\r
  12 pR      370.000000      20.000000       0.145568        0.0129114\r
  13 pR      380.000000      20.000000       0.14975 0.012995\r
  14 pR      390.000000      20.000000       0.149445        0.0129889\r
  15 pR      400.000000      20.000000       0.151473        0.0130295\r
  16 pR      410.000000      20.000000       0.150127        0.0130025\r
  17 pR      420.000000      20.000000       0.147501        0.01295\r
  18 pR      430.000000      20.000000       0.1439  0.012878\r
  19 pR      440.000000      20.000000       0.138488        0.0127698\r
  20 pR      450.000000      20.000000       0.133118        0.0126624\r
  21 pR      460.000000      20.000000       0.125986        0.0125197\r
  22 pR      470.000000      20.000000       0.119332        0.0123866\r
  23 pR      480.000000      20.000000       0.109827        0.0121965\r
  24 pR      490.000000      20.000000       0.100862        0.0120172\r
  25 pR      500.000000      20.000000       0.091072        0.0118214\r
  26 pR      510.000000      20.000000       0.0792304       0.0115846\r
  27 pR      520.000000      20.000000       0.0847249       0.0116945\r
  28 pR      530.000000      20.000000       0.12487 0.0124974\r
  29 pR      540.000000      20.000000       0.148323        0.0129665\r
  30 pR      550.000000      20.000000       0.159431        0.0131886\r
  31 pR      560.000000      20.000000       0.163775        0.0132755\r
  32 pR      570.000000      20.000000       0.162512        0.0132502\r
  33 pR      580.000000      20.000000       0.158397        0.0131679\r
  34 pR      590.000000      20.000000       0.151541        0.0130308\r
  35 pR      600.000000      20.000000       0.143156        0.0128631\r
  36 pR      610.000000      20.000000       0.134904        0.0126981\r
  37 pR      620.000000      20.000000       0.126379        0.0125276\r
  38 pR      630.000000      20.000000       0.117509        0.0123502\r
  39 pR      640.000000      20.000000       0.109482        0.0121896\r
  40 pR      650.000000      20.000000       0.101853        0.0120371\r
  41 pR      660.000000      20.000000       0.0942304       0.0118846\r
  42 pR      670.000000      20.000000       0.0874929       0.0117499\r
  43 pR      680.000000      20.000000       0.0805064       0.0116101\r
  44 pR      690.000000      20.000000       0.0747285       0.0114946\r
  45 pR      700.000000      20.000000       0.0684887       0.0113698\r
  46 pR      710.000000      20.000000       0.0636716       0.0112734\r
  47 pR      720.000000      20.000000       0.0594717       0.0111894\r
  48 pR      730.000000      20.000000       0.0561821       0.0111236\r
  49 pR      740.000000      20.000000       0.0538578       0.0110772\r
  50 pR      750.000000      20.000000       0.052325        0.0110465\r
  51 pR      760.000000      20.000000       0.0515633       0.0110313\r
  52 pR      770.000000      20.000000       0.0513506       0.011027\r
  53 pR      780.000000      20.000000       0.0531749       0.0110635\r
  54 pR      790.000000      20.000000       0.0557816       0.0111156\r
  55 pR      800.000000      20.000000       0.0570637       0.0111413\r
  56 pR      300.000000      22.000000       0.0654843       0.0113097\r
  57 pR      310.000000      22.000000       0.0683061       0.0113661\r
  58 pR      320.000000      22.000000       0.0782296       0.0115646\r
  59 pR      330.000000      22.000000       0.0896851       0.0117937\r
  60 pR      340.000000      22.000000       0.102769        0.0120554\r
  61 pR      350.000000      22.000000       0.116742        0.0123348\r
  62 pR      360.000000      22.000000       0.132206        0.0126441\r
  63 pR      370.000000      22.000000       0.14268 0.0128536\r
  64 pR      380.000000      22.000000       0.146176        0.0129235\r
  65 pR      390.000000      22.000000       0.146254        0.0129251\r
  66 pR      400.000000      22.000000       0.147454        0.0129491\r
  67 pR      410.000000      22.000000       0.146007        0.0129201\r
  68 pR      420.000000      22.000000       0.143627        0.0128725\r
  69 pR      430.000000      22.000000       0.139447        0.0127889\r
  70 pR      440.000000      22.000000       0.134403        0.0126881\r
  71 pR      450.000000      22.000000       0.129357        0.0125871\r
  72 pR      460.000000      22.000000       0.12266 0.0124532\r
  73 pR      470.000000      22.000000       0.116558        0.0123312\r
  74 pR      480.000000      22.000000       0.108146        0.0121629\r
  75 pR      490.000000      22.000000       0.100032        0.0120006\r
  76 pR      500.000000      22.000000       0.0922021       0.011844\r
  77 pR      510.000000      22.000000       0.0838572       0.0116771\r
  78 pR      520.000000      22.000000       0.0753462       0.0115069\r
  79 pR      530.000000      22.000000       0.0706311       0.0114126\r
  80 pR      540.000000      22.000000       0.12354 0.0124708\r
  81 pR      550.000000      22.000000       0.1481  0.012962\r
  82 pR      560.000000      22.000000       0.15931 0.0131862\r
  83 pR      570.000000      22.000000       0.162272        0.0132454\r
  84 pR      580.000000      22.000000       0.160061        0.0132012\r
  85 pR      590.000000      22.000000       0.154551        0.013091\r
  86 pR      600.000000      22.000000       0.146557        0.0129311\r
  87 pR      610.000000      22.000000       0.138688        0.0127738\r
  88 pR      620.000000      22.000000       0.130428        0.0126086\r
  89 pR      630.000000      22.000000       0.121446        0.0124289\r
  90 pR      640.000000      22.000000       0.112933        0.0122587\r
  91 pR      650.000000      22.000000       0.104887        0.0120977\r
  92 pR      660.000000      22.000000       0.0971086       0.0119422\r
  93 pR      670.000000      22.000000       0.0901043       0.0118021\r
  94 pR      680.000000      22.000000       0.0826372       0.0116527\r
  95 pR      690.000000      22.000000       0.0760685       0.0115214\r
  96 pR      700.000000      22.000000       0.0693526       0.0113871\r
  97 pR      710.000000      22.000000       0.0641733       0.0112835\r
  98 pR      720.000000      22.000000       0.0597699       0.0111954\r
  99 pR      730.000000      22.000000       0.0559922       0.0111198\r
 100 pR      740.000000      22.000000       0.0533115       0.0110662\r
 101 pR      750.000000      22.000000       0.0516622       0.0110332\r
 102 pR      760.000000      22.000000       0.0505489       0.011011\r
 103 pR      770.000000      22.000000       0.0500542       0.0110011\r
 104 pR      780.000000      22.000000       0.0510868       0.0110217\r
 105 pR      790.000000      22.000000       0.054185        0.0110837\r
 106 pR      800.000000      22.000000       0.0558726       0.0111175\r
 107 pR      300.000000      24.000000       0.0682369       0.0113647\r
 108 pR      310.000000      24.000000       0.0704141       0.0114083\r
 109 pR      320.000000      24.000000       0.0785438       0.0115709\r
 110 pR      330.000000      24.000000       0.0889476       0.011779\r
 111 pR      340.000000      24.000000       0.10239 0.0120478\r
 112 pR      350.000000      24.000000       0.115931        0.0123186\r
 113 pR      360.000000      24.000000       0.131461        0.0126292\r
 114 pR      370.000000      24.000000       0.140607        0.0128121\r
 115 pR      380.000000      24.000000       0.144362        0.0128872\r
 116 pR      390.000000      24.000000       0.143595        0.0128719\r
 117 pR      400.000000      24.000000       0.144979        0.0128996\r
 118 pR      410.000000      24.000000       0.143668        0.0128734\r
 119 pR      420.000000      24.000000       0.141223        0.0128245\r
 120 pR      430.000000      24.000000       0.137033        0.0127407\r
 121 pR      440.000000      24.000000       0.13251 0.0126502\r
 122 pR      450.000000      24.000000       0.127487        0.0125497\r
 123 pR      460.000000      24.000000       0.120598        0.012412\r
 124 pR      470.000000      24.000000       0.115015        0.0123003\r
 125 pR      480.000000      24.000000       0.106886        0.0121377\r
 126 pR      490.000000      24.000000       0.0995296       0.0119906\r
 127 pR      500.000000      24.000000       0.092248        0.011845\r
 128 pR      510.000000      24.000000       0.0854675       0.0117094\r
 129 pR      520.000000      24.000000       0.0791517       0.011583\r
 130 pR      530.000000      24.000000       0.072912        0.0114582\r
 131 pR      540.000000      24.000000       0.0669207       0.0113384\r
 132 pR      550.000000      24.000000       0.123802        0.012476\r
 133 pR      560.000000      24.000000       0.15127 0.0130254\r
 134 pR      570.000000      24.000000       0.16262 0.0132524\r
 135 pR      580.000000      24.000000       0.164068        0.0132814\r
 136 pR      590.000000      24.000000       0.160411        0.0132082\r
 137 pR      600.000000      24.000000       0.153269        0.0130654\r
 138 pR      610.000000      24.000000       0.14554 0.0129108\r
 139 pR      620.000000      24.000000       0.136145        0.0127229\r
 140 pR      630.000000      24.000000       0.126615        0.0125323\r
 141 pR      640.000000      24.000000       0.117613        0.0123523\r
 142 pR      650.000000      24.000000       0.109065        0.0121813\r
 143 pR      660.000000      24.000000       0.100863        0.0120173\r
 144 pR      670.000000      24.000000       0.0928593       0.0118572\r
 145 pR      680.000000      24.000000       0.0848147       0.0116963\r
 146 pR      690.000000      24.000000       0.0777724       0.0115554\r
 147 pR      700.000000      24.000000       0.0706193       0.0114124\r
 148 pR      710.000000      24.000000       0.0650405       0.0113008\r
 149 pR      720.000000      24.000000       0.0602416       0.0112048\r
 150 pR      730.000000      24.000000       0.0562397       0.0111248\r
 151 pR      740.000000      24.000000       0.053136        0.0110627\r
 152 pR      750.000000      24.000000       0.0510546       0.0110211\r
 153 pR      760.000000      24.000000       0.0497091       0.0109942\r
 154 pR      770.000000      24.000000       0.0489672       0.0109793\r
 155 pR      780.000000      24.000000       0.049794        0.0109959\r
 156 pR      790.000000      24.000000       0.0526112       0.0110522\r
 157 pR      800.000000      24.000000       0.0544997       0.01109\r
 158 pR      300.000000      26.000000       0.0720296       0.0114406\r
 159 pR      310.000000      26.000000       0.0723894       0.0114478\r
 160 pR      320.000000      26.000000       0.0766742       0.0115335\r
 161 pR      330.000000      26.000000       0.0897255       0.0117945\r
 162 pR      340.000000      26.000000       0.102192        0.0120438\r
 163 pR      350.000000      26.000000       0.115261        0.0123052\r
 164 pR      360.000000      26.000000       0.130081        0.0126016\r
 165 pR      370.000000      26.000000       0.139775        0.0127955\r
 166 pR      380.000000      26.000000       0.14229 0.0128458\r
 167 pR      390.000000      26.000000       0.141364        0.0128273\r
 168 pR      400.000000      26.000000       0.142213        0.0128443\r
 169 pR      410.000000      26.000000       0.140198        0.012804\r
 170 pR      420.000000      26.000000       0.137655        0.0127531\r
 171 pR      430.000000      26.000000       0.133443        0.0126689\r
 172 pR      440.000000      26.000000       0.128517        0.0125703\r
 173 pR      450.000000      26.000000       0.123688        0.0124738\r
 174 pR      460.000000      26.000000       0.117146        0.0123429\r
 175 pR      470.000000      26.000000       0.112029        0.0122406\r
 176 pR      480.000000      26.000000       0.104442        0.0120888\r
 177 pR      490.000000      26.000000       0.0976923       0.0119538\r
 178 pR      500.000000      26.000000       0.09115 0.011823\r
 179 pR      510.000000      26.000000       0.0852506       0.011705\r
 180 pR      520.000000      26.000000       0.0796469       0.0115929\r
 181 pR      530.000000      26.000000       0.0746357       0.0114927\r
 182 pR      540.000000      26.000000       0.0710215       0.0114204\r
 183 pR      550.000000      26.000000       0.069059        0.0113812\r
 184 pR      560.000000      26.000000       0.123088        0.0124618\r
 185 pR      570.000000      26.000000       0.153665        0.0130733\r
 186 pR      580.000000      26.000000       0.163891        0.0132778\r
 187 pR      590.000000      26.000000       0.164355        0.0132871\r
 188 pR      600.000000      26.000000       0.158547        0.0131709\r
 189 pR      610.000000      26.000000       0.151094        0.0130219\r
 190 pR      620.000000      26.000000       0.141963        0.0128393\r
 191 pR      630.000000      26.000000       0.132139        0.0126428\r
 192 pR      640.000000      26.000000       0.122752        0.012455\r
 193 pR      650.000000      26.000000       0.113837        0.0122768\r
 194 pR      660.000000      26.000000       0.104917        0.0120983\r
 195 pR      670.000000      26.000000       0.0961703       0.0119234\r
 196 pR      680.000000      26.000000       0.087475        0.0117495\r
 197 pR      690.000000      26.000000       0.079858        0.0115972\r
 198 pR      700.000000      26.000000       0.0721272       0.0114425\r
 199 pR      710.000000      26.000000       0.065806        0.0113161\r
 200 pR      720.000000      26.000000       0.06057 0.0112114\r
 201 pR      730.000000      26.000000       0.0562586       0.0111252\r
 202 pR      740.000000      26.000000       0.0528335       0.0110567\r
 203 pR      750.000000      26.000000       0.0504934       0.0110099\r
 204 pR      760.000000      26.000000       0.0490022       0.01098\r
 205 pR      770.000000      26.000000       0.0482489       0.010965\r
 206 pR      780.000000      26.000000       0.0483955       0.0109679\r
 207 pR      790.000000      26.000000       0.0503926       0.0110079\r
 208 pR      800.000000      26.000000       0.0529121       0.0110582