research/ellipsometry/WVASE32/DAT/011210 nick si.dat

   1 fi\r
   2 VASEmethod[EllipsometerType=0, Isotropic, AutoRetarder=0, TrackPol=1, Pol>=0, Revs=10, AutoSlit=2000, WVASE=3.698, HardVer=6.256, Thu Jun 30 18:49:45 2011]\r
   3 Original[011210 nick si.dat]\r
   4 nm\r
   5 500.000000      65.000000       20.194006       174.33911       0.011653        0.364314\r
   6 510.000000      65.000000       19.951635       174.38928       0.0115258       0.367208\r
   7 520.000000      65.000000       19.66077        173.70792       0.0113784       0.327413\r
   8 530.000000      65.000000       19.418938       173.82315       0.0112605       0.333482\r
   9 540.000000      65.000000       19.140234       173.04245       0.0111312       0.296434\r
  10 550.000000      65.000000       18.991276       174.71024       0.0110496       0.389124\r
  11 560.000000      65.000000       18.793444       172.9977        0.0109545       0.294417\r
  12 570.000000      65.000000       18.600565       173.75716       0.0108648       0.330229\r
  13 580.000000      65.000000       18.435396       173.17863       0.0107905       0.302592\r
  14 590.000000      65.000000       18.27669        174.17366       0.010723        0.354407\r
  15 600.000000      65.000000       18.110155       174.33231       0.0106732       0.365465\r
  16 610.000000      65.000000       17.989761       175.04604       0.010607        0.417719\r
  17 620.000000      65.000000       17.890814       174.09126       0.0105641       0.350714\r
  18 630.000000      65.000000       17.739435       175.41847       0.0105101       0.4529\r
  19 640.000000      65.000000       17.631756       174.81058       0.0104907       0.401399\r
  20 650.000000      65.000000       17.467562       174.21449       0.0104332       0.361155\r
  21 660.000000      65.000000       17.412836       175.85419       0.0104516       0.505679\r
  22 670.000000      65.000000       17.310225       175.02397       0.0104075       0.421949\r
  23 680.000000      65.000000       17.229292       174.28563       0.010383        0.368267\r
  24 690.000000      65.000000       17.141705       175.705 0.0103445       0.489845\r
  25 700.000000      65.000000       17.023031       178.47568       0.0103901       1.3907\r
  26 710.000000      65.000000       16.935493       174.64883       0.0104385       0.401284\r
  27 720.000000      65.000000       16.869287       175.06302       0.0104377       0.436291\r
  28 730.000000      65.000000       16.797504       176.23361       0.0104814       0.57597\r
  29 740.000000      65.000000       16.747194       174.8847        0.0105505       0.428422\r
  30 750.000000      65.000000       16.674484       174.5746        0.0106487       0.409357\r
  31 760.000000      65.000000       16.576551       176.2276        0.0108169       0.60045\r
  32 770.000000      65.000000       16.55378        175.56757       0.0109975       0.520444\r
  33 780.000000      65.000000       16.475492       174.42854       0.0118962       0.450134\r
  34 790.000000      65.000000       16.454714       175.13879       0.0116214       0.504291\r
  35 800.000000      65.000000       16.352262       174.79478       0.0119747       0.488098\r
  36 500.000000      70.000000       13.473255       169.18201       0.00857641      0.20137\r
  37 510.000000      70.000000       13.128844       169.87404       0.00826079      0.212299\r
  38 520.000000      70.000000       12.823443       169.86807       0.00806704      0.211781\r
  39 530.000000      70.000000       12.529144       170.18742       0.00789866      0.218719\r
  40 540.000000      70.000000       12.299702       170.174 0.00777955      0.218875\r
  41 550.000000      70.000000       12.032143       169.63605       0.00765781      0.208676\r
  42 560.000000      70.000000       11.80053        170.08934       0.00753789      0.218659\r
  43 570.000000      70.000000       11.592952       170.22603       0.00743629      0.222385\r
  44 580.000000      70.000000       11.404377       170.31969       0.00735479      0.225518\r
  45 590.000000      70.000000       11.227838       170.62447       0.00728976      0.234147\r
  46 600.000000      70.000000       11.061769       170.25467       0.00736764      0.231024\r
  47 610.000000      70.000000       10.88015        170.40273       0.00725156      0.234516\r
  48 620.000000      70.000000       10.756668       170.09816       0.00720978      0.228531\r
  49 630.000000      70.000000       10.598473       170.45299       0.00719784      0.239905\r
  50 640.000000      70.000000       10.469839       171.16699       0.00725383      0.264187\r
  51 650.000000      70.000000       10.318908       170.7345        0.00725025      0.255348\r
  52 660.000000      70.000000       10.241956       170.76343       0.0073736       0.262366\r
  53 670.000000      70.000000       10.107764       170.81119       0.00733371      0.265615\r
  54 680.000000      70.000000       10.018291       172.31317       0.00757795      0.330483\r
  55 690.000000      70.000000       9.9157114       170.22873       0.00754735      0.262022\r
  56 700.000000      70.000000       9.8161783       170.87407       0.00791931      0.297047\r
  57 710.000000      70.000000       9.7009172       171.03828       0.00807361      0.31185\r
  58 720.000000      70.000000       9.6164846       172.0657        0.00815972      0.35865\r
  59 730.000000      70.000000       9.5200586       172.28593       0.00839924      0.383341\r
  60 740.000000      70.000000       9.4799538       170.60551       0.00869819      0.327813\r
  61 750.000000      70.000000       9.4228077       171.69228       0.00913322      0.3911\r
  62 760.000000      70.000000       9.3287878       172.11827       0.00978422      0.445738\r
  63 770.000000      70.000000       9.2255583       173.88657       0.0103162       0.611578\r
  64 780.000000      70.000000       9.1786747       171.98036       0.012849        0.584424\r
  65 790.000000      70.000000       9.1266727       173.7075        0.0121618       0.707883\r
  66 800.000000      70.000000       9.077548        173.78139       0.0132093       0.782011\r
  67 500.000000      75.000000       4.8896828       147.09946       0.0054461       0.111017\r
  68 510.000000      75.000000       4.5302482       146.53987       0.00531613      0.113777\r
  69 520.000000      75.000000       4.1983223       144.77077       0.00522453      0.113153\r
  70 530.000000      75.000000       3.8938973       143.83246       0.00518044      0.116338\r
  71 540.000000      75.000000       3.6122971       141.59909       0.00521931      0.117019\r
  72 550.000000      75.000000       3.3832986       139.68562       0.00527606      0.118332\r
  73 560.000000      75.000000       3.1610525       138.15198       0.00535833      0.121791\r
  74 570.000000      75.000000       2.976352        136.05595       0.00549356      0.123795\r
  75 580.000000      75.000000       2.8167031       134.21579       0.00565461      0.126714\r
  76 590.000000      75.000000       2.6234837       131.48346       0.00592921      0.130598\r
  77 600.000000      75.000000       2.4826841       129.16006       0.00639102      0.138077\r
  78 610.000000      75.000000       2.3008595       127.3439        0.00656587      0.143274\r
  79 620.000000      75.000000       2.1849616       124.95212       0.0069165       0.147053\r
  80 630.000000      75.000000       2.1064694       120.936 0.00762428      0.149092\r
  81 640.000000      75.000000       1.9774752       119.05212       0.00832624      0.161608\r
  82 650.000000      75.000000       1.9316026       116.19276       0.00907143      0.165008\r
  83 660.000000      75.000000       1.8412834       112.77776       0.0103293       0.175704\r
  84 670.000000      75.000000       1.7090958       110.91924       0.0111319       0.187534\r
  85 680.000000      75.000000       1.6997372       107.34252       0.012333        0.187208\r
  86 690.000000      75.000000       1.5320286       104.19504       0.0140998       0.204445\r
  87 700.000000      75.000000       1.5608835       100.17301       0.0168594       0.215845\r
  88 710.000000      75.000000       1.4571308       97.986412       0.0194544       0.23956\r
  89 720.000000      75.000000       1.4236609       94.297356       0.0217565       0.248581\r
  90 730.000000      75.000000       1.4671783       90.238487       0.0229654       0.252764\r
  91 740.000000      75.000000       1.4122036       87.471809       0.0248031       0.27695\r
  92 750.000000      75.000000       1.4598771       84.256508       0.0246367       0.28811\r
  93 760.000000      75.000000       1.3286693       79.544151       0.0257942       0.351179\r
  94 770.000000      75.000000       1.4089531       77.387489       0.0251001       0.358811\r
  95 780.000000      75.000000       1.4292406       75.681442       0.0307753       0.462808\r
  96 790.000000      75.000000       1.3780253       71.161285       0.0255581       0.459395\r
  97 800.000000      75.000000       1.4022627       68.591446       0.0259571       0.50492