research/ellipsometry/WVASE32/DAT/021210 nick si.dat

   1 Spectroscopic Scan - Test on Si\r
   2 VASEmethod[EllipsometerType=0, Isotropic, AutoRetarder=0, TrackPol=1, Pol>=0, Revs=10, AutoSlit=2000, WVASE=3.698, HardVer=6.256, Thu Dec 02 12:54:44 2010]\r
   3 Original[021210 nick si.dat]\r
   4 nm\r
   5 300.000000      65.000000       33.994041       151.68646       0.780621        3.54043\r
   6 310.000000      65.000000       31.594711       150.99149       0.372199        1.71794\r
   7 320.000000      65.000000       30.37096        149.4348        0.227787        1.02642\r
   8 330.000000      65.000000       30.176195       151.27986       0.153209        0.733594\r
   9 340.000000      65.000000       30.096066       152.89154       0.103786        0.52488\r
  10 350.000000      65.000000       30.267073       154.98099       0.0724917       0.39367\r
  11 360.000000      65.000000       30.824764       158.28825       0.0526305       0.323235\r
  12 370.000000      65.000000       30.713722       163.5369        0.0390995       0.314102\r
  13 380.000000      65.000000       28.902493       169.58473       0.0291309       0.38063\r
  14 390.000000      65.000000       27.177462       169.71048       0.0226144       0.311409\r
  15 400.000000      65.000000       25.809721       171.29762       0.0186263       0.313893\r
  16 410.000000      65.000000       24.801975       171.57579       0.0166267       0.297858\r
  17 420.000000      65.000000       23.997162       172.46933       0.0157081       0.322376\r
  18 430.000000      65.000000       23.250698       173.07089       0.0147125       0.335983\r
  19 440.000000      65.000000       22.673855       172.5303        0.0139293       0.301029\r
  20 450.000000      65.000000       22.139507       173.35281       0.0132023       0.326475\r
  21 460.000000      65.000000       21.652313       172.98605       0.0128276       0.306098\r
  22 470.000000      65.000000       21.244453       173.53108       0.0123455       0.324202\r
  23 480.000000      65.000000       20.850016       174.11232       0.0123708       0.362255\r
  24 490.000000      65.000000       20.531076       173.35091       0.0121662       0.319673\r
  25 500.000000      65.000000       20.226995       173.91252       0.0119736       0.347743\r
  26 510.000000      65.000000       19.924379       173.44739       0.0117883       0.322179\r
  27 520.000000      65.000000       19.669729       174.35471       0.011635        0.372828\r
  28 530.000000      65.000000       19.38426        173.83292       0.0114876       0.341261\r
  29 540.000000      65.000000       19.186098       173.56102       0.0113758       0.326558\r
  30 550.000000      65.000000       18.993137       173.50471       0.0112754       0.323643\r
  31 560.000000      65.000000       18.809414       174.48146       0.0111892       0.38087\r
  32 570.000000      65.000000       18.615326       174.23875       0.0110979       0.365128\r
  33 580.000000      65.000000       18.433537       174.05693       0.011027        0.354719\r
  34 590.000000      65.000000       18.289368       174.40755       0.0109642       0.377248\r
  35 600.000000      65.000000       18.147921       175.11356       0.0109767       0.434931\r
  36 610.000000      65.000000       17.997169       175.39313       0.0108831       0.460603\r
  37 620.000000      65.000000       17.868437       175.26755       0.0108064       0.448036\r
  38 630.000000      65.000000       17.74338        174.86115       0.0107924       0.414704\r
  39 640.000000      65.000000       17.644785       175.60422       0.0108272       0.488478\r
  40 650.000000      65.000000       17.523012       175.0712        0.0107929       0.437059\r
  41 660.000000      65.000000       17.419415       174.61302       0.0109218       0.406901\r
  42 670.000000      65.000000       17.334204       174.56325       0.0108438       0.402032\r
  43 680.000000      65.000000       17.24192        174.77467       0.0108296       0.419643\r
  44 690.000000      65.000000       17.149738       175.78317       0.0106904       0.515373\r
  45 700.000000      65.000000       17.040937       175.64923       0.0109409       0.514124\r
  46 710.000000      65.000000       16.982199       175.79036       0.010991        0.535365\r
  47 720.000000      65.000000       16.883394       176.00671       0.0109478       0.564963\r
  48 730.000000      65.000000       16.820311       174.96957       0.0110424       0.454185\r
  49 740.000000      65.000000       16.764814       175.0182        0.0112083       0.46685\r
  50 750.000000      65.000000       16.697771       175.01663       0.0113616       0.474763\r
  51 760.000000      65.000000       16.635332       174.72739       0.0116575       0.462028\r
  52 770.000000      65.000000       16.581215       174.78539       0.0119016       0.478307\r
  53 780.000000      65.000000       16.501141       174.89165       0.0135367       0.557679\r
  54 790.000000      65.000000       16.453056       176.00461       0.0128323       0.677153\r
  55 800.000000      65.000000       16.413532       176.02284       0.0135968       0.722318\r
  56 810.000000      65.000000       16.334785       174.75754       0.015207        0.616052\r
  57 820.000000      65.000000       16.274643       175.46095       0.0118926       0.557994\r
  58 830.000000      65.000000       16.242807       175.41022       0.00993409      0.461771\r
  59 840.000000      65.000000       16.186335       176.57315       0.0123884       0.773024\r
  60 850.000000      65.000000       16.156155       179.99913       0.0188871       984.856\r
  61 860.000000      65.000000       16.089434       179.24551       0.0159977       4.53238\r
  62 870.000000      65.000000       16.057352       174.7253        0.011651        0.476333\r
  63 880.000000      65.000000       16.01689        175.84708       0.00950876      0.494483\r
  64 890.000000      65.000000       15.975212       175.502 0.00954874      0.459648\r
  65 900.000000      65.000000       15.942911       176.8804        0.00946503      0.657454\r
  66 910.000000      65.000000       15.917706       176.30583       0.00948557      0.557438\r
  67 920.000000      65.000000       15.889108       176.50839       0.00936907      0.583383\r
  68 930.000000      65.000000       15.850423       175.48732       0.00952761      0.460363\r
  69 940.000000      65.000000       15.811296       175.8938        0.00936182      0.49809\r
  70 950.000000      65.000000       15.772105       175.9471        0.00933391      0.504237\r
  71 960.000000      65.000000       15.749515       176.41974       0.00944253      0.57799\r
  72 970.000000      65.000000       15.715625       177.40985       0.00938548      0.794975\r
  73 980.000000      65.000000       15.692449       176.48697       0.0092617       0.579625\r
  74 990.000000      65.000000       15.66902        175.83289       0.00927011      0.489978\r
  75 1000.000000     65.000000       15.640765       175.62393       0.00931722      0.469784\r
  76 300.000000      70.000000       30.859047       139.27477       0.729956        2.54026\r
  77 310.000000      70.000000       28.406599       140.5594        0.392366        1.47432\r
  78 320.000000      70.000000       27.476318       140.08336       0.243302        0.925898\r
  79 330.000000      70.000000       26.451265       141.62878       0.158571        0.639602\r
  80 340.000000      70.000000       26.040339       143.73169       0.112702        0.482909\r
  81 350.000000      70.000000       26.349072       144.97136       0.0785995       0.344249\r
  82 360.000000      70.000000       26.976156       149.60497       0.0572173       0.279672\r
  83 370.000000      70.000000       26.646479       157.68727       0.042393        0.278494\r
  84 380.000000      70.000000       24.103197       163.50635       0.0306131       0.289037\r
  85 390.000000      70.000000       21.81888        165.66299       0.023371        0.273329\r
  86 400.000000      70.000000       20.246645       167.23007       0.0186553       0.2598\r
  87 410.000000      70.000000       18.960466       167.3519        0.0159878       0.23749\r
  88 420.000000      70.000000       17.999723       168.88147       0.014839        0.261698\r
  89 430.000000      70.000000       17.123327       168.59288       0.013289        0.238631\r
  90 440.000000      70.000000       16.392868       168.8638        0.0121922       0.233033\r
  91 450.000000      70.000000       15.773048       168.94971       0.0109448       0.218155\r
  92 460.000000      70.000000       15.186138       168.93636       0.0104203       0.214685\r
  93 470.000000      70.000000       14.678907       169.33121       0.00950983      0.209432\r
  94 480.000000      70.000000       14.247296       169.26913       0.009843        0.221504\r
  95 490.000000      70.000000       13.84284        169.49075       0.00945358      0.222985\r
  96 500.000000      70.000000       13.482148       169.69962       0.00915849      0.225776\r
  97 510.000000      70.000000       13.110812       169.80867       0.00897627      0.229516\r
  98 520.000000      70.000000       12.806112       169.70935       0.0087138       0.225555\r
  99 530.000000      70.000000       12.529678       169.72775       0.00852078      0.225488\r
 100 540.000000      70.000000       12.280512       169.91682       0.00836223      0.229665\r
 101 550.000000      70.000000       12.020915       169.8542        0.0083262       0.231917\r
 102 560.000000      70.000000       11.818844       170.69809       0.00822064      0.253542\r
 103 570.000000      70.000000       11.586029       170.1812        0.00810056      0.241293\r
 104 580.000000      70.000000       11.411372       170.20204       0.00802736      0.243075\r
 105 590.000000      70.000000       11.203205       170.35535       0.00794038      0.248512\r
 106 600.000000      70.000000       11.050305       170.68974       0.00830924      0.272873\r
 107 610.000000      70.000000       10.905523       170.43604       0.00817518      0.264712\r
 108 620.000000      70.000000       10.749909       170.69228       0.00805116      0.271489\r
 109 630.000000      70.000000       10.604679       170.82213       0.00811646      0.281144\r
 110 640.000000      70.000000       10.4567 170.71738       0.00831351      0.288588\r
 111 650.000000      70.000000       10.35192        171.03477       0.00834551      0.302756\r
 112 660.000000      70.000000       10.213247       171.03058       0.00866362      0.318221\r
 113 670.000000      70.000000       10.107064       171.21916       0.0085413       0.323624\r
 114 680.000000      70.000000       10.018345       171.70943       0.0090467       0.366001\r
 115 690.000000      70.000000       9.9087257       170.88203       0.00867657      0.322813\r
 116 700.000000      70.000000       9.7890778       172.14308       0.00963475      0.420381\r
 117 710.000000      70.000000       9.7423906       170.56981       0.00988223      0.361432\r
 118 720.000000      70.000000       9.6389046       171.0593        0.0098521       0.38379\r
 119 730.000000      70.000000       9.5247555       171.56404       0.0101861       0.425182\r
 120 740.000000      70.000000       9.4515238       171.45314       0.0107014       0.444226\r
 121 750.000000      70.000000       9.3768854       171.29643       0.0112262       0.461195\r
 122 760.000000      70.000000       9.3118954       171.68536       0.012115        0.524299\r
 123 770.000000      70.000000       9.2149401       171.90981       0.0128316       0.576387\r
 124 780.000000      70.000000       9.1590528       171.28473       0.0168643       0.707729\r
 125 790.000000      70.000000       9.1595831       170.6104        0.0146392       0.570565\r
 126 800.000000      70.000000       9.0524349       170.72668       0.0162531       0.648651\r
 127 810.000000      70.000000       8.9702663       169.29546       0.0329073       1.14948\r
 128 820.000000      70.000000       8.9160242       171.27269       0.00778688      0.334918\r
 129 830.000000      70.000000       8.8948708       171.53996       0.00740632      0.329288\r
 130 840.000000      70.000000       8.8131008       172.38979       0.0112179       0.559007\r
 131 850.000000      70.000000       8.7546511       172.56642       0.0229777       1.17962\r
 132 860.000000      70.000000       8.7043362       173.34904       0.0185526       1.06981\r
 133 870.000000      70.000000       8.6584845       172.83943       0.0107841       0.580778\r
 134 880.000000      70.000000       8.6395435       172.31009       0.00561288      0.282191\r
 135 890.000000      70.000000       8.6048365       172.52031       0.00580984      0.301423\r
 136 900.000000      70.000000       8.5595751       172.22049       0.00557383      0.279523\r
 137 910.000000      70.000000       8.5183678       172.45399       0.0056629       0.294092\r
 138 920.000000      70.000000       8.4719896       172.20711       0.00530115      0.268049\r
 139 930.000000      70.000000       8.4431419       172.50188       0.00586832      0.309339\r
 140 940.000000      70.000000       8.4129448       172.45612       0.00537948      0.28284\r
 141 950.000000      70.000000       8.356967        172.91965       0.00532367      0.300058\r
 142 960.000000      70.000000       8.3320265       172.89633       0.00569137      0.320662\r
 143 970.000000      70.000000       8.2936583       173.08696       0.00554673      0.322525\r
 144 980.000000      70.000000       8.2588892       173.12045       0.00516867      0.30323\r
 145 990.000000      70.000000       8.2288971       173.3461        0.00522072      0.317738\r
 146 1000.000000     70.000000       8.2020826       173.41513       0.00540462      0.333415\r
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 148 310.000000      75.000000       23.928795       122.16529       0.431891        1.37516\r
 149 320.000000      75.000000       23.072758       122.60537       0.265034        0.870368\r
 150 330.000000      75.000000       22.129684       123.56149       0.181674        0.62427\r
 151 340.000000      75.000000       21.339108       125.27381       0.121998        0.43976\r
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 153 360.000000      75.000000       21.881535       133.70383       0.0661378       0.264457\r
 154 370.000000      75.000000       20.776533       145.40579       0.049338        0.261943\r
 155 380.000000      75.000000       17.493862       153.77625       0.035218        0.276725\r
 156 390.000000      75.000000       14.642323       155.51935       0.0278214       0.273645\r
 157 400.000000      75.000000       12.644785       156.43034       0.0221974       0.25936\r
 158 410.000000      75.000000       11.075486       155.88887       0.018861        0.244475\r
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 160 430.000000      75.000000       8.880352        155.27879       0.0161497       0.252812\r
 161 440.000000      75.000000       8.0826225       154.46664       0.0130352       0.216279\r
 162 450.000000      75.000000       7.3504877       153.45879       0.0103439       0.180721\r
 163 460.000000      75.000000       6.7313967       152.55756       0.00911928      0.167308\r
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 165 480.000000      75.000000       5.6834254       150.8205        0.00824831      0.166105\r
 166 490.000000      75.000000       5.2502952       149.48224       0.00775485      0.160313\r
 167 500.000000      75.000000       4.8660035       148.18622       0.00743406      0.157599\r
 168 510.000000      75.000000       4.5213833       146.79645       0.00715366      0.154785\r
 169 520.000000      75.000000       4.1911292       145.2151        0.00693531      0.152656\r
 170 530.000000      75.000000       3.8434112       144.25339       0.00681142      0.156859\r
 171 540.000000      75.000000       3.6065238       142.84383       0.00679056      0.158321\r
 172 550.000000      75.000000       3.3837714       140.34489       0.00684562      0.156672\r
 173 560.000000      75.000000       3.1461403       138.50406       0.00695451      0.160546\r
 174 570.000000      75.000000       2.9452214       136.75122       0.00708733      0.164529\r
 175 580.000000      75.000000       2.7562475       134.33015       0.0073351       0.168145\r
 176 590.000000      75.000000       2.5881097       132.80133       0.0075446       0.174518\r
 177 600.000000      75.000000       2.4529557       130.07362       0.00841355      0.188535\r
 178 610.000000      75.000000       2.3086796       127.9203        0.00859519      0.190476\r
 179 620.000000      75.000000       2.1733992       125.43182       0.00889365      0.192866\r
 180 630.000000      75.000000       2.0583255       122.44914       0.00974845      0.202767\r
 181 640.000000      75.000000       1.9571623       120.52979       0.0108346       0.221587\r
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