research/ellipsometry/WVASE32/DAT/040409 calibration.dat

   1 \r
   2 VASEmethod[EllipsometerType=5, Isotropic, AutoRetarder=1, TrackPol=1, ZoneAve=1, Revs=100, MaxRevs=100, I_Threshold=0.40, I_MinUsable=0.005, AutoSlit=2000, WVASE=3.698, HardVer=6.256, Fri Apr 03 16:06:29 2009]\r
   3 Original[040409 calibration.dat]\r
   4 nm\r
   5 300.000000      65.000000       38.269272       105.73276       0.0947388       0.241452\r
   6 310.000000      65.000000       37.041508       106.73617       0.0880722       0.227056\r
   7 320.000000      65.000000       36.227055       107.8297        0.0818904       0.213546\r
   8 330.000000      65.000000       35.655521       109.19736       0.0704762       0.188174\r
   9 340.000000      65.000000       35.241875       110.72928       0.0769174       0.207458\r
  10 350.000000      65.000000       34.988682       112.6065        0.0715895       0.19483\r
  11 360.000000      65.000000       35.155975       115.65102       0.0553064       0.154245\r
  12 370.000000      65.000000       34.453239       120.86811       0.0799437       0.229977\r
  13 380.000000      65.000000       32.680763       124.37993       0.0574072       0.177058\r
  14 390.000000      65.000000       31.00102        125.98117       0.0549079       0.178806\r
  15 400.000000      65.000000       29.698009       127.02789       0.0550023       0.187899\r
  16 410.000000      65.000000       28.654669       127.89477       0.0559036       0.191056\r
  17 420.000000      65.000000       27.760326       128.65768       0.0518838       0.183533\r
  18 430.000000      65.000000       26.997103       129.27199       0.0527519       0.192204\r
  19 440.000000      65.000000       26.323807       130.05783       0.0546916       0.206825\r
  20 450.000000      65.000000       25.722879       130.67534       0.0516479       0.201369\r
  21 460.000000      65.000000       25.16404        131.36726       0.0528954       0.203207\r
  22 470.000000      65.000000       24.656725       131.98933       0.0513068       0.202375\r
  23 480.000000      65.000000       24.184631       132.65938       0.0538966       0.218901\r
  24 490.000000      65.000000       23.769474       133.24388       0.051055        0.2128\r
  25 500.000000      65.000000       23.377695       133.77834       0.0490899       0.209913\r
  26 510.000000      65.000000       23.007557       134.45148       0.049915        0.209013\r
  27 520.000000      65.000000       22.663012       135.05276       0.0528023       0.226551\r
  28 530.000000      65.000000       22.33687        135.5585        0.0498506       0.218757\r
  29 540.000000      65.000000       22.038145       136.11633       0.0470153       0.211557\r
  30 550.000000      65.000000       21.764162       136.65906       0.0457951       0.210992\r
  31 560.000000      65.000000       21.492697       137.14503       0.0418816       0.19746\r
  32 570.000000      65.000000       21.236546       137.70155       0.0441592       0.201679\r
  33 580.000000      65.000000       21.002316       138.21912       0.0446145       0.208496\r
  34 590.000000      65.000000       20.783451       138.71986       0.0439227       0.209532\r
  35 600.000000      65.000000       20.5751 139.17235       0.0456861       0.222469\r
  36 610.000000      65.000000       20.372976       139.6602        0.0391558       0.194703\r
  37 620.000000      65.000000       20.186695       140.11284       0.040612        0.194957\r
  38 630.000000      65.000000       20.00297        140.63611       0.0404621       0.198259\r
  39 640.000000      65.000000       19.829613       141.06367       0.0412502       0.205844\r
  40 650.000000      65.000000       19.668253       141.45175       0.0406263       0.206368\r
  41 660.000000      65.000000       19.516956       141.9416        0.039746        0.205761\r
  42 670.000000      65.000000       19.36697        142.33102       0.0378449       0.199343\r
  43 680.000000      65.000000       19.222891       142.74303       0.0386724       0.196097\r
  44 690.000000      65.000000       19.099667       143.19701       0.0394014       0.20309\r
  45 700.000000      65.000000       18.958618       143.57899       0.0387337       0.203361\r
  46 710.000000      65.000000       18.834173       143.97563       0.0387519       0.20677\r
  47 720.000000      65.000000       18.72117        144.35242       0.0399055       0.216509\r
  48 730.000000      65.000000       18.592886       144.71339       0.0372714       0.20553\r
  49 740.000000      65.000000       18.48806        145.12654       0.0329093       0.17438\r
  50 750.000000      65.000000       18.391859       145.47009       0.0372852       0.200261\r
  51 760.000000      65.000000       18.288237       145.81137       0.0384486       0.20929\r
  52 770.000000      65.000000       18.19372        146.21159       0.0382302       0.211183\r
  53 780.000000      65.000000       18.090433       146.55951       0.038468        0.215071\r
  54 790.000000      65.000000       18.008959       146.8739        0.0367901       0.2093\r
  55 800.000000      65.000000       17.920382       147.17114       0.0373033       0.215003\r
  56 810.000000      65.000000       17.834656       147.56627       0.0419209       0.231131\r
  57 820.000000      65.000000       17.755806       147.89999       0.0389482       0.219121\r
  58 830.000000      65.000000       17.680498       148.19899       0.0374693       0.21423\r
  59 840.000000      65.000000       17.592434       148.57544       0.0372983       0.215514\r
  60 850.000000      65.000000       17.549065       148.72142       0.0346945       0.199668\r
  61 860.000000      65.000000       17.467693       149.16257       0.0397549       0.233288\r
  62 870.000000      65.000000       17.389482       149.46765       0.0320333       0.181544\r
  63 880.000000      65.000000       17.321095       149.81892       0.0364288       0.210628\r
  64 890.000000      65.000000       17.26754        149.96053       0.0366732       0.214403\r
  65 900.000000      65.000000       17.205692       150.23749       0.0334383       0.197902\r
  66 910.000000      65.000000       17.153841       150.56686       0.0354779       0.21255\r
  67 920.000000      65.000000       17.087687       150.8055        0.0318097       0.192847\r
  68 930.000000      65.000000       17.030653       151.15761       0.0337862       0.207134\r
  69 940.000000      65.000000       16.975431       151.33192       0.0289749       0.17026\r
  70 950.000000      65.000000       16.920773       151.65532       0.0327578       0.194744\r
  71 960.000000      65.000000       16.877556       151.8576        0.0324642       0.194901\r
  72 970.000000      65.000000       16.817268       152.17473       0.0347705       0.211722\r
  73 980.000000      65.000000       16.769073       152.37465       0.0349953       0.215502\r
  74 990.000000      65.000000       16.717691       152.63962       0.0299157       0.186319\r
  75 1000.000000     65.000000       16.682758       152.81804       0.0340348       0.21405\r
  76 300.000000      70.000000       38.045708       88.580284       0.111198        0.274637\r
  77 310.000000      70.000000       36.894691       89.508461       0.155758        0.382581\r
  78 320.000000      70.000000       35.87635        90.581665       0.0956954       0.233986\r
  79 330.000000      70.000000       35.21386        92.083679       0.0904016       0.232262\r
  80 340.000000      70.000000       34.703415       93.64994        0.104401        0.267617\r
  81 350.000000      70.000000       34.352684       95.553047       0.0822618       0.211007\r
  82 360.000000      70.000000       34.323563       98.729736       0.0640328       0.163933\r
  83 370.000000      70.000000       33.419167       104.24776       0.0607359       0.165051\r
  84 380.000000      70.000000       31.116693       107.99953       0.0661029       0.1884\r
  85 390.000000      70.000000       29.134403       109.32812       0.0608469       0.181813\r
  86 400.000000      70.000000       27.647758       109.97625       0.0611846       0.190469\r
  87 410.000000      70.000000       26.40522        110.48728       0.0521381       0.1697\r
  88 420.000000      70.000000       25.363413       110.8957        0.0523179       0.175341\r
  89 430.000000      70.000000       24.464199       111.28902       0.050214        0.173038\r
  90 440.000000      70.000000       23.676947       111.66291       0.0508645       0.179724\r
  91 450.000000      70.000000       22.940865       112.03096       0.047504        0.172855\r
  92 460.000000      70.000000       22.271271       112.44804       0.051821        0.193849\r
  93 470.000000      70.000000       21.662947       112.89388       0.0479496       0.183988\r
  94 480.000000      70.000000       21.087761       113.25927       0.0455192       0.178709\r
  95 490.000000      70.000000       20.566658       113.6854        0.0455498       0.183495\r
  96 500.000000      70.000000       20.080643       113.99602       0.045013        0.185101\r
  97 510.000000      70.000000       19.642601       114.44837       0.0488091       0.205255\r
  98 520.000000      70.000000       19.190529       114.86172       0.0466782       0.200455\r
  99 530.000000      70.000000       18.779278       115.20352       0.042335        0.185314\r
 100 540.000000      70.000000       18.403664       115.61934       0.0457291       0.205163\r
 101 550.000000      70.000000       18.041656       115.96532       0.0453118       0.207333\r
 102 560.000000      70.000000       17.720392       116.3281        0.0420101       0.195882\r
 103 570.000000      70.000000       17.389013       116.75542       0.0426977       0.201853\r
 104 580.000000      70.000000       17.085512       117.10374       0.0420172       0.202315\r
 105 590.000000      70.000000       16.785353       117.49012       0.0382297       0.187624\r
 106 600.000000      70.000000       16.513618       117.89677       0.0383942       0.191786\r
 107 610.000000      70.000000       16.250177       118.19791       0.0393845       0.201118\r
 108 620.000000      70.000000       15.990517       118.59949       0.039696        0.204355\r
 109 630.000000      70.000000       15.749962       118.99998       0.0405263       0.212171\r
 110 640.000000      70.000000       15.520956       119.36867       0.036906        0.196389\r
 111 650.000000      70.000000       15.297334       119.72433       0.0378432       0.204425\r
 112 660.000000      70.000000       15.085538       120.09734       0.0359453       0.19834\r
 113 670.000000      70.000000       14.887763       120.45547       0.0388855       0.218536\r
 114 680.000000      70.000000       14.674568       120.83349       0.0351712       0.197898\r
 115 690.000000      70.000000       14.500594       121.15018       0.0335021       0.191139\r
 116 700.000000      70.000000       14.313156       121.49102       0.0345742       0.200155\r
 117 710.000000      70.000000       14.138526       121.839 0.0324188       0.190621\r
 118 720.000000      70.000000       13.974668       122.20883       0.0344013       0.205871\r
 119 730.000000      70.000000       13.805737       122.59376       0.0372679       0.227196\r
 120 740.000000      70.000000       13.650086       122.91909       0.0368111       0.223466\r
 121 750.000000      70.000000       13.500754       123.2304        0.0329508       0.202199\r
 122 760.000000      70.000000       13.349442       123.50718       0.0333207       0.207016\r
 123 770.000000      70.000000       13.228203       123.87577       0.0333839       0.210206\r
 124 780.000000      70.000000       13.077242       124.30944       0.0355629       0.226653\r
 125 790.000000      70.000000       12.934566       124.62531       0.0313886       0.204118\r
 126 800.000000      70.000000       12.820485       124.90517       0.0310779       0.204742\r
 127 810.000000      70.000000       12.702296       125.43643       0.0326444       0.202711\r
 128 820.000000      70.000000       12.54827        125.74118       0.0302204       0.201244\r
 129 830.000000      70.000000       12.46114        125.89333       0.0281052       0.190032\r
 130 840.000000      70.000000       12.33452        126.24393       0.0240791       0.163141\r
 131 850.000000      70.000000       12.22355        126.64812       0.0296138       0.202035\r
 132 860.000000      70.000000       12.128697       126.8877        0.0259102       0.179041\r
 133 870.000000      70.000000       12.026973       127.23686       0.0236138       0.163173\r
 134 880.000000      70.000000       11.911776       127.55788       0.0264316       0.18888\r
 135 890.000000      70.000000       11.831413       127.7608        0.0263625       0.190039\r
 136 900.000000      70.000000       11.737819       128.09923       0.0258281       0.188982\r
 137 910.000000      70.000000       11.648998       128.35896       0.0277679       0.205407\r
 138 920.000000      70.000000       11.553323       128.66093       0.0249424       0.188457\r
 139 930.000000      70.000000       11.456622       129.00197       0.0257115       0.196146\r
 140 940.000000      70.000000       11.371799       129.31638       0.026102        0.196885\r
 141 950.000000      70.000000       11.291584       129.6149        0.0263097       0.20073\r
 142 960.000000      70.000000       11.208106       129.88913       0.0250591       0.192812\r
 143 970.000000      70.000000       11.14167        130.17989       0.0198956       0.155061\r
 144 980.000000      70.000000       11.054983       130.44759       0.0203402       0.161148\r
 145 990.000000      70.000000       10.980982       130.74315       0.021637        0.173411\r
 146 1000.000000     70.000000       10.918332       130.95093       0.0209598       0.169343\r
 147 300.000000      75.000000       38.476513       69.471306       0.155382        0.402327\r
 148 310.000000      75.000000       37.330921       70.224907       0.195296        0.509266\r
 149 320.000000      75.000000       36.353245       70.982597       0.103881        0.273074\r
 150 330.000000      75.000000       35.704357       71.881409       0.104885        0.277804\r
 151 340.000000      75.000000       35.039207       73.325531       0.0667371       0.177016\r
 152 350.000000      75.000000       34.578056       75.214088       0.100013        0.263752\r
 153 360.000000      75.000000       34.462677       78.183411       0.0895943       0.232699\r
 154 370.000000      75.000000       33.197514       83.437798       0.0609772       0.162642\r
 155 380.000000      75.000000       30.59268        86.351059       0.0759782       0.208449\r
 156 390.000000      75.000000       28.429218       86.742302       0.0495909       0.141361\r
 157 400.000000      75.000000       26.875961       86.595238       0.0497635       0.14621\r
 158 410.000000      75.000000       25.571291       86.340706       0.0542249       0.171046\r
 159 420.000000      75.000000       24.479174       85.999283       0.0471352       0.152167\r
 160 430.000000      75.000000       23.546268       85.622536       0.0459186       0.15135\r
 161 440.000000      75.000000       22.709984       85.356461       0.0439986       0.147737\r
 162 450.000000      75.000000       21.955435       85.066734       0.0464741       0.15947\r
 163 460.000000      75.000000       21.240643       84.79007        0.043545        0.1582\r
 164 470.000000      75.000000       20.598803       84.494385       0.0483731       0.179267\r
 165 480.000000      75.000000       20.000689       84.20961        0.0439616       0.165516\r
 166 490.000000      75.000000       19.460825       83.989807       0.0440031       0.168773\r
 167 500.000000      75.000000       18.950357       83.726082       0.0383904       0.149425\r
 168 510.000000      75.000000       18.467136       83.480927       0.0444714       0.182722\r
 169 520.000000      75.000000       18.006857       83.197105       0.0388486       0.161918\r
 170 530.000000      75.000000       17.569864       82.902138       0.0353005       0.148979\r
 171 540.000000      75.000000       17.165461       82.644814       0.0401639       0.172804\r
 172 550.000000      75.000000       16.777309       82.429306       0.0310896       0.135659\r
 173 560.000000      75.000000       16.427618       82.183197       0.0366508       0.161713\r
 174 570.000000      75.000000       16.067598       82.00428        0.0363379       0.168576\r
 175 580.000000      75.000000       15.755409       81.783508       0.0367275       0.17239\r
 176 590.000000      75.000000       15.432391       81.485565       0.0298212       0.141815\r
 177 600.000000      75.000000       15.13518        81.251099       0.0355499       0.170993\r
 178 610.000000      75.000000       14.855609       81.062637       0.0351937       0.171999\r
 179 620.000000      75.000000       14.575798       80.82444        0.0370417       0.188866\r
 180 630.000000      75.000000       14.314411       80.584236       0.0315835       0.162755\r
 181 640.000000      75.000000       14.057679       80.390251       0.0321354       0.167404\r
 182 650.000000      75.000000       13.814635       80.134209       0.0287941       0.152189\r
 183 660.000000      75.000000       13.573496       79.935593       0.0308922       0.165232\r
 184 670.000000      75.000000       13.350784       79.760078       0.0275585       0.14918\r
 185 680.000000      75.000000       13.14264        79.468536       0.0300655       0.168966\r
 186 690.000000      75.000000       12.918896       79.315735       0.0287633       0.163155\r
 187 700.000000      75.000000       12.730634       79.134224       0.0260481       0.149646\r
 188 710.000000      75.000000       12.534142       78.885849       0.0315001       0.183105\r
 189 720.000000      75.000000       12.348103       78.717583       0.0277063       0.162558\r
 190 730.000000      75.000000       12.15908        78.483833       0.0264311       0.156853\r
 191 740.000000      75.000000       11.985844       78.24662        0.0266354       0.1633\r
 192 750.000000      75.000000       11.820689       78.046089       0.0288038       0.177909\r
 193 760.000000      75.000000       11.646724       77.824394       0.0305364       0.191577\r
 194 770.000000      75.000000       11.490605       77.569443       0.0285128       0.180719\r
 195 780.000000      75.000000       11.338382       77.445694       0.023681        0.151482\r
 196 790.000000      75.000000       11.181501       77.093758       0.0302278       0.195726\r
 197 800.000000      75.000000       11.028892       77.013893       0.0279731       0.182151\r
 198 810.000000      75.000000       10.886596       76.825615       0.0252122       0.168061\r
 199 820.000000      75.000000       10.712634       76.568596       0.0255984       0.174422\r
 200 830.000000      75.000000       10.624168       76.481995       0.0240462       0.164375\r
 201 840.000000      75.000000       10.484648       76.270714       0.0283004       0.194885\r
 202 850.000000      75.000000       10.367595       76.085114       0.0223149       0.154938\r
 203 860.000000      75.000000       10.226795       75.877022       0.0211212       0.148548\r
 204 870.000000      75.000000       10.111827       75.564606       0.0223561       0.162165\r
 205 880.000000      75.000000       9.988081        75.422211       0.0243679       0.179938\r
 206 890.000000      75.000000       9.8921261       75.306816       0.0221026       0.163797\r
 207 900.000000      75.000000       9.7861547       75.079163       0.0242746       0.181507\r
 208 910.000000      75.000000       9.6737328       74.91996        0.0227488       0.1715\r
 209 920.000000      75.000000       9.5668306       74.725861       0.0217446       0.165538\r
 210 930.000000      75.000000       9.4547291       74.481361       0.0215954       0.165591\r
 211 940.000000      75.000000       9.3561516       74.257187       0.0229525       0.180554\r
 212 950.000000      75.000000       9.2582474       74.060768       0.0206361       0.163524\r
 213 960.000000      75.000000       9.1611834       73.903145       0.0213305       0.16985\r
 214 970.000000      75.000000       9.0670853       73.69281        0.0209968       0.168388\r
 215 980.000000      75.000000       8.9798946       73.467888       0.019841        0.160878\r
 216 990.000000      75.000000       8.8844223       73.26696        0.0191241       0.156199\r
 217 1000.000000     75.000000       8.8113861       73.129959       0.0200498       0.164153