research/ellipsometry/WVASE32/DAT/040409513888-23pg si edge align in.dat

   1 \r
   2 VASEmethod[EllipsometerType=0, Isotropic, AutoRetarder=0, TrackPol=1, Pol>=0, Revs=100, MaxRevs=100, I_Threshold=0.40, I_MinUsable=0.005, AutoSlit=2000, WVASE=3.698, HardVer=6.256, Sat Apr 04 15:03:39 2009]\r
   3 Original[040409513888-23pg si edge align in.dat]\r
   4 nm\r
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   7 320.000000      65.000000       30.956291       150.71754       0.232709        1.0784\r
   8 330.000000      65.000000       30.117218       151.90347       0.23902 1.16895\r
   9 340.000000      65.000000       29.911091       153.06894       0.245262        1.25235\r
  10 350.000000      65.000000       30.305014       154.09276       0.247489        1.29996\r
  11 360.000000      65.000000       31.189644       157.03236       0.238925        1.38153\r
  12 370.000000      65.000000       30.575813       162.72978       0.218551        1.6804\r
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  14 390.000000      65.000000       26.961531       171.39973       0.0403746       0.667674\r
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