2 VASEmethod[EllipsometerType=0, Isotropic, AutoRetarder=0, TrackPol=1, Pol>=0, Revs=100, MaxRevs=100, I_Threshold=0.40, I_MinUsable=0.005, AutoSlit=2000, WVASE=3.698, HardVer=6.256, Sat Apr 04 15:03:39 2009]
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