2 RTmethod[PolRT=0.00, RevsRT=100, SlitRT=2000, AutoSlitMin=100, Interleave=Off, WVASE=3.698, HardVer=6.256, Mon Jul 06 17:37:37 2009]
\r
3 Original[060709 si wafer rt.dat]
\r
5 pT 3000.000000 0.000000 0.00199384 0.00501994
\r
6 pT 3100.000000 0.000000 0.000315331 0.00500315
\r
7 pT 3200.000000 0.000000 0.000623137 0.00500623
\r
8 pT 3300.000000 0.000000 0.000502382 0.00500502
\r
9 pT 3400.000000 0.000000 0.000313495 0.00500314
\r
10 pT 3500.000000 0.000000 0.00031361 0.00500314
\r
11 pT 3600.000000 0.000000 0.000197183 0.00500197
\r
12 pT 3700.000000 0.000000 9.09835e-005 0.00500091
\r
13 pT 3800.000000 0.000000 2.19726e-005 0.00500022
\r
14 pT 3900.000000 0.000000 2.25318e-005 0.00500023
\r
15 pT 4000.000000 0.000000 2.05016e-005 0.00500021
\r
16 pT 4100.000000 0.000000 3.08301e-005 0.00500031
\r
17 pT 4200.000000 0.000000 1.22567e-005 0.00500012
\r
18 pT 4300.000000 0.000000 2.57207e-005 0.00500026
\r
19 pT 4400.000000 0.000000 1.05182e-005 0.00500011
\r
20 pT 4500.000000 0.000000 1.28159e-005 0.00500013
\r
21 pT 4600.000000 0.000000 9.16099e-006 0.00500009
\r
22 pT 4700.000000 0.000000 4.1392e-006 0.00500004
\r
23 pT 4800.000000 0.000000 1.586e-006 0.00500002
\r
24 pT 4900.000000 0.000000 4.28017e-006 0.00500004
\r
25 pT 5000.000000 0.000000 4.57963e-007 0.005
\r
26 pT 5100.000000 0.000000 4.84312e-006 0.00500005
\r
27 pT 5200.000000 0.000000 3.23345e-006 0.00500003
\r
28 pT 5300.000000 0.000000 5.69689e-007 0.00500001
\r
29 pT 5400.000000 0.000000 6.09955e-006 0.00500006
\r
30 pT 5500.000000 0.000000 5.96093e-006 0.00500006
\r
31 pT 5600.000000 0.000000 6.02366e-006 0.00500006
\r
32 pT 5700.000000 0.000000 4.89252e-006 0.00500005
\r
33 pT 5800.000000 0.000000 3.29733e-006 0.00500003
\r
34 pT 5900.000000 0.000000 2.87214e-006 0.00500003
\r
35 pT 6000.000000 0.000000 5.63801e-006 0.00500006
\r
36 pT 6100.000000 0.000000 7.25916e-006 0.00500007
\r
37 pT 6200.000000 0.000000 3.1092e-006 0.00500003
\r
38 pT 6300.000000 0.000000 4.76853e-006 0.00500005
\r
39 pT 6400.000000 0.000000 1.27738e-006 0.00500001
\r
40 pT 6500.000000 0.000000 1.97912e-006 0.00500002
\r
41 pT 6600.000000 0.000000 9.92083e-006 0.0050001
\r
42 pT 6700.000000 0.000000 2.78049e-006 0.00500003
\r
43 pT 6800.000000 0.000000 5.03617e-006 0.00500005
\r
44 pT 6900.000000 0.000000 6.29429e-006 0.00500006
\r
45 pT 7000.000000 0.000000 8.76142e-006 0.00500009
\r
46 pT 7100.000000 0.000000 3.45525e-007 0.005
\r
47 pT 7200.000000 0.000000 5.88164e-006 0.00500006
\r
48 pT 7300.000000 0.000000 5.83234e-006 0.00500006
\r
49 pT 7400.000000 0.000000 7.07024e-006 0.00500007
\r
50 pT 7500.000000 0.000000 5.93852e-006 0.00500006
\r
51 pT 7600.000000 0.000000 9.35692e-006 0.00500009
\r
52 pT 7700.000000 0.000000 6.18475e-006 0.00500006
\r
53 pT 7800.000000 0.000000 8.81219e-006 0.00500009
\r
54 pT 7900.000000 0.000000 1.35274e-005 0.00500014
\r
55 pT 8000.000000 0.000000 9.668e-006 0.0050001
\r
56 pT 8100.000000 0.000000 2.54044e-005 0.00500025
\r
57 pT 8200.000000 0.000000 5.49895e-006 0.00500005
\r
58 pT 8300.000000 0.000000 6.86439e-006 0.00500007
\r
59 pT 8400.000000 0.000000 1.45772e-005 0.00500015
\r
60 pT 8500.000000 0.000000 3.90832e-005 0.00500039
\r
61 pT 8600.000000 0.000000 1.05401e-005 0.00500011
\r
62 pT 8700.000000 0.000000 7.59395e-006 0.00500008
\r
63 pT 8800.000000 0.000000 5.31146e-006 0.00500005
\r
64 pT 8900.000000 0.000000 4.70143e-006 0.00500005
\r
65 pT 9000.000000 0.000000 1.97474e-006 0.00500002
\r
66 pT 9100.000000 0.000000 4.1037e-006 0.00500004
\r
67 pT 9200.000000 0.000000 6.22889e-007 0.00500001
\r
68 pT 9300.000000 0.000000 2.75432e-006 0.00500003
\r
69 pT 9400.000000 0.000000 4.72998e-006 0.00500005
\r
70 pT 9500.000000 0.000000 7.18576e-006 0.00500007
\r
71 pT 9600.000000 0.000000 1.04057e-005 0.0050001
\r
72 pT 9700.000000 0.000000 1.8564e-005 0.00500019
\r
73 pT 9800.000000 0.000000 2.69616e-005 0.00500027
\r
74 pT 9900.000000 0.000000 4.84696e-005 0.00500048
\r
75 pT 10000.000000 0.000000 8.77441e-005 0.00500088