research/ellipsometry/WVASE32/DAT/080711-spectr_-1.85.dat

   1 spectroscopic_-1.85A\r
   2 VASEmethod[EllipsometerType=0, Isotropic, AutoRetarder=0, TrackPol=1, Pol<0, Revs=10, AutoSlit=2000, WVASE=3.698, HardVer=6.256, Fri Jul 08 14:50:12 2011]\r
   3 Original[080711-spectr_-1.85.dat]\r
   4 Angstroms\r
   5 3000.000000     25.000000       38.40313        179.73914       2.59444 1193.56\r
   6 3100.000000     25.000000       36.94886        163.7318        1.27382 9.46185\r
   7 3200.000000     25.000000       39.164806       152.98827       0.726363        3.26343\r
   8 3300.000000     25.000000       39.695641       150.66464       0.425561        1.76712\r
   9 3400.000000     25.000000       41.040367       149.10138       0.274068        1.0769\r
  10 3500.000000     25.000000       43.37756        144.19441       0.182403        0.62377\r
  11 3600.000000     25.000000       45.475311       142.2829        0.128089        0.418345\r
  12 3700.000000     25.000000       48.355526       140.77759       0.0949876       0.301865\r
  13 3800.000000     25.000000       51.36327        139.64081       0.0680608       0.214963\r
  14 3900.000000     25.000000       54.454155       139.5457        0.0494831       0.160787\r
  15 4000.000000     25.000000       57.112743       139.30785       0.0374942       0.125841\r
  16 4100.000000     25.000000       59.843178       139.98703       0.0313859       0.112103\r
  17 4200.000000     25.000000       61.940708       140.75647       0.0300344       0.114192\r
  18 4300.000000     25.000000       63.585823       140.82278       0.0274638       0.108998\r
  19 4400.000000     25.000000       64.222862       139.75984       0.024595        0.0971975\r
  20 4500.000000     25.000000       64.066971       137.39828       0.0213445       0.0801611\r
  21 4600.000000     25.000000       62.866955       134.18826       0.0200474       0.0688603\r
  22 4700.000000     25.000000       60.961033       131.05576       0.0175219       0.0545568\r
  23 4800.000000     25.000000       58.586941       128.20038       0.0195631       0.0558047\r
  24 4900.000000     25.000000       55.904503       126.40141       0.0193628       0.0516421\r
  25 5000.000000     25.000000       53.026634       125.38298       0.0193542       0.0492162\r
  26 5100.000000     25.000000       50.10096        125.35055       0.0193283       0.0479777\r
  27 5200.000000     25.000000       47.132706       126.414 0.0192377       0.0477715\r
  28 5300.000000     25.000000       44.366508       128.67387       0.0190747       0.0487346\r
  29 5400.000000     25.000000       41.731575       133.01802       0.0188514       0.051783\r
  30 5500.000000     25.000000       42.107178       145.80309       0.0184386       0.0659389\r
  31 5600.000000     25.000000       45.3265 139.56041       0.018336        0.0563478\r
  32 5700.000000     25.000000       45.380589       135.45265       0.0180259       0.0513926\r
  33 5800.000000     25.000000       44.516144       132.26033       0.0179923       0.048614\r
  34 5900.000000     25.000000       43.297241       130.09044       0.0180065       0.0470849\r
  35 6000.000000     25.000000       41.893085       128.39752       0.0179348       0.0460017\r
  36 6100.000000     25.000000       40.434345       127.36346       0.0177999       0.0453248\r
  37 6200.000000     25.000000       38.930744       126.57423       0.0176358       0.0448803\r
  38 6300.000000     25.000000       37.479141       126.11245       0.0174662       0.0447322\r
  39 6400.000000     25.000000       36.109371       125.96758       0.0172929       0.044837\r
  40 6500.000000     25.000000       34.743767       125.84019       0.0170601       0.0448985\r
  41 6600.000000     25.000000       33.39492        125.84317       0.0168546       0.0452049\r
  42 6700.000000     25.000000       31.966602       126.0196        0.0165271       0.0454471\r
  43 6800.000000     25.000000       30.56665        126.55823       0.0161989       0.0460078\r
  44 6900.000000     25.000000       29.238817       127.4031        0.0158142       0.0466616\r
  45 7000.000000     25.000000       27.981031       128.55591       0.01571 0.0484419\r
  46 7100.000000     25.000000       26.854694       129.9453        0.0155135       0.0501717\r
  47 7200.000000     25.000000       25.837112       131.68661       0.0152697       0.0520941\r
  48 7300.000000     25.000000       24.946079       133.76288       0.0152254       0.0550994\r
  49 7400.000000     25.000000       24.209648       136.11511       0.0152235       0.0586337\r
  50 7500.000000     25.000000       23.619207       138.34505       0.0154639       0.0633622\r
  51 7600.000000     25.000000       23.126955       140.81903       0.0158764       0.0695272\r
  52 7700.000000     25.000000       22.823584       143.13609       0.0163903       0.076404\r
  53 7800.000000     25.000000       22.661219       145.56529       0.0188468       0.0937233\r
  54 7900.000000     25.000000       22.722704       148.42697       0.0178692       0.0957681\r
  55 8000.000000     25.000000       22.924751       150.53467       0.0188595       0.106851\r
  56 3000.000000     27.000000       35.159569       149.25246       2.5157  10.3586\r
  57 3100.000000     27.000000       38.2178 161.66176       1.37031 8.95278\r
  58 3200.000000     27.000000       39.039219       157.2859        0.737624        3.90371\r
  59 3300.000000     27.000000       40.206257       151.3791        0.448003        1.89563\r
  60 3400.000000     27.000000       42.23885        146.94278       0.2794  1.02828\r
  61 3500.000000     27.000000       43.741581       146.31078       0.188094        0.678474\r
  62 3600.000000     27.000000       45.843048       142.29024       0.130571        0.426647\r
  63 3700.000000     27.000000       48.48111        141.23065       0.0969141       0.311285\r
  64 3800.000000     27.000000       51.406208       140.47345       0.0696566       0.223975\r
  65 3900.000000     27.000000       54.25251        140.99477       0.0506961       0.169503\r
  66 4000.000000     27.000000       56.829048       141.40189       0.0382885       0.133754\r
  67 4100.000000     27.000000       59.29443        142.25339       0.0319535       0.118672\r
  68 4200.000000     27.000000       61.32563        143.14774       0.0303373       0.119992\r
  69 4300.000000     27.000000       62.648792       143.51895       0.0277397       0.114253\r
  70 4400.000000     27.000000       63.02729        142.68404       0.0247515       0.100989\r
  71 4500.000000     27.000000       62.58979        140.18593       0.0216075       0.0825642\r
  72 4600.000000     27.000000       61.29781        137.28989       0.0203324       0.0710995\r
  73 4700.000000     27.000000       59.406212       134.02332       0.018398        0.0583081\r
  74 4800.000000     27.000000       57.016716       131.59665       0.0196878       0.0575062\r
  75 4900.000000     27.000000       54.465576       129.63264       0.0194407       0.053224\r
  76 5000.000000     27.000000       51.705799       128.73669       0.0194004       0.0509775\r
  77 5100.000000     27.000000       48.94907        128.60213       0.0193131       0.0497501\r
  78 5200.000000     27.000000       46.243874       129.3604        0.0191671       0.0494904\r
  79 5300.000000     27.000000       43.700096       131.08008       0.0189667       0.050259\r
  80 5400.000000     27.000000       41.471367       133.81163       0.0187208       0.0521944\r
  81 5500.000000     27.000000       39.547169       138.34717       0.0184325       0.0564253\r
  82 5600.000000     27.000000       38.97023        150.34511       0.0181941       0.0751892\r
  83 5700.000000     27.000000       44.100422       145.10957       0.0184104       0.0641283\r
  84 5800.000000     27.000000       44.291737       139.76749       0.0180077       0.0557714\r
  85 5900.000000     27.000000       43.459251       136.04042       0.0179618       0.051816\r
  86 6000.000000     27.000000       42.229568       133.43573       0.017985        0.0497079\r
  87 6100.000000     27.000000       40.855648       131.4957        0.0178363       0.048094\r
  88 6200.000000     27.000000       39.350643       130.13921       0.0176865       0.0471426\r
  89 6300.000000     27.000000       37.90062        129.14426       0.0175217       0.0465674\r
  90 6400.000000     27.000000       36.439507       128.42276       0.0173445       0.0462873\r
  91 6500.000000     27.000000       35.060162       128.07332       0.0171116       0.0461879\r
  92 6600.000000     27.000000       33.674496       127.63158       0.0169034       0.0462133\r
  93 6700.000000     27.000000       32.193668       127.6245        0.0165694       0.0463497\r
  94 6800.000000     27.000000       30.792345       127.83548       0.0162443       0.0467238\r
  95 6900.000000     27.000000       29.370396       128.44403       0.0158415       0.0472712\r
  96 7000.000000     27.000000       28.090235       129.54352       0.0157281       0.0490546\r
  97 7100.000000     27.000000       26.90403        130.74898       0.0155093       0.0506925\r
  98 7200.000000     27.000000       25.825199       132.27046       0.0152413       0.0524901\r
  99 7300.000000     27.000000       24.897762       134.26935       0.0151874       0.0555104\r
 100 7400.000000     27.000000       24.093407       136.2917        0.0151616       0.0587856\r
 101 7500.000000     27.000000       23.460064       138.33696       0.0154032       0.0634288\r
 102 7600.000000     27.000000       22.962124       140.65352       0.0158169       0.0694018\r
 103 7700.000000     27.000000       22.597515       142.87314       0.0163203       0.0762045\r
 104 7800.000000     27.000000       22.39731        145.29128       0.0187766       0.0935808\r
 105 7900.000000     27.000000       22.376863       148.12866       0.0177768       0.0956115\r
 106 8000.000000     27.000000       22.553988       150.48592       0.0187782       0.107587\r
 107 3000.000000     29.000000       37.472805       150.99585       2.58132 11.0239\r
 108 3100.000000     29.000000       38.719975       143.96719       1.28568 4.47557\r
 109 3200.000000     29.000000       38.725407       153.15897       0.723434        3.28231\r
 110 3300.000000     29.000000       40.132744       149.85069       0.446842        1.80448\r
 111 3400.000000     29.000000       41.063572       148.69771       0.281955        1.09538\r
 112 3500.000000     29.000000       43.519695       145.88913       0.192058        0.68426\r
 113 3600.000000     29.000000       45.613129       143.87512       0.133436        0.452303\r
 114 3700.000000     29.000000       48.299488       142.2123        0.0988273       0.324156\r
 115 3800.000000     29.000000       51.085262       141.79401       0.0709163       0.234133\r
 116 3900.000000     29.000000       53.895752       142.43004       0.0514243       0.176793\r
 117 4000.000000     29.000000       56.240837       143.43416       0.0388193       0.140834\r
 118 4100.000000     29.000000       58.660805       144.67104       0.0323695       0.125812\r
 119 4200.000000     29.000000       60.319233       146.09904       0.0307885       0.128208\r
 120 4300.000000     29.000000       61.356831       146.10823       0.0279242       0.118985\r
 121 4400.000000     29.000000       61.638855       145.24983       0.0246993       0.103646\r
 122 4500.000000     29.000000       60.958855       143.3387        0.0217244       0.0857149\r
 123 4600.000000     29.000000       59.621918       140.03874       0.0204752       0.0729887\r
 124 4700.000000     29.000000       57.737923       136.97397       0.0185785       0.0602383\r
 125 4800.000000     29.000000       55.371132       134.4406        0.0197361       0.0589899\r
 126 4900.000000     29.000000       52.852314       132.85208       0.019496        0.055118\r
 127 5000.000000     29.000000       50.302277       131.90079       0.0193797       0.0528531\r
 128 5100.000000     29.000000       47.596657       131.62289       0.0192721       0.0516395\r
 129 5200.000000     29.000000       45.135094       132.27934       0.0190581       0.0514097\r
 130 5300.000000     29.000000       42.813679       133.78127       0.0188435       0.0522576\r
 131 5400.000000     29.000000       40.778645       135.63048       0.0185815       0.0536547\r
 132 5500.000000     29.000000       39.025787       138.87558       0.0182916       0.0568016\r
 133 5600.000000     29.000000       37.654301       143.27953       0.0180299       0.0623137\r
 134 5700.000000     29.000000       37.064487       152.53294       0.0178494       0.0804472\r
 135 5800.000000     29.000000       42.966572       150.73685       0.0180325       0.073954\r
 136 5900.000000     29.000000       43.27721        143.96613       0.0179696       0.0611953\r
 137 6000.000000     29.000000       42.43911        139.67691       0.0179487       0.0556875\r
 138 6100.000000     29.000000       41.204842       136.66002       0.0178743       0.052497\r
 139 6200.000000     29.000000       39.842491       134.27602       0.0177259       0.0502937\r
 140 6300.000000     29.000000       38.313263       132.63199       0.0175722       0.0490569\r
 141 6400.000000     29.000000       36.873909       131.46474       0.0174023       0.0483381\r
 142 6500.000000     29.000000       35.432686       130.46857       0.017173        0.0477446\r
 143 6600.000000     29.000000       33.950447       129.79524       0.0169505       0.0475743\r
 144 6700.000000     29.000000       32.454533       129.36125       0.0166155       0.0474093\r
 145 6800.000000     29.000000       30.904951       129.4091        0.0162589       0.047695\r
 146 6900.000000     29.000000       29.528139       129.68509       0.0158646       0.0480246\r
 147 7000.000000     29.000000       28.158831       130.49158       0.015722        0.0496374\r
 148 7100.000000     29.000000       26.935307       131.52019       0.0154876       0.0511778\r
 149 7200.000000     29.000000       25.78805        132.88704       0.0152048       0.0529356\r
 150 7300.000000     29.000000       24.780651       134.57208       0.0151128       0.055713\r
 151 7400.000000     29.000000       23.945562       136.57817       0.0151339       0.0593288\r
 152 7500.000000     29.000000       23.291729       138.59106       0.0152533       0.0634219\r
 153 7600.000000     29.000000       22.694305       140.72307       0.0157888       0.0700473\r
 154 7700.000000     29.000000       22.333105       142.93452       0.0161147       0.0760258\r
 155 7800.000000     29.000000       22.066648       145.1875        0.0185056       0.0930353\r
 156 7900.000000     29.000000       21.980379       147.64223       0.0178548       0.0961021\r
 157 8000.000000     29.000000       22.086168       149.5058        0.0189093       0.106935\r
 158 3000.000000     31.000000       37.154625       179.59828       5.25564 1538\r
 159 3100.000000     31.000000       40.447216       154.79637       1.34863 6.40566\r
 160 3200.000000     31.000000       39.237228       155.20923       0.711856        3.46405\r
 161 3300.000000     31.000000       39.830597       147.99995       0.44552 1.70886\r
 162 3400.000000     31.000000       41.565781       146.76447       0.286115        1.05039\r
 163 3500.000000     31.000000       43.309029       144.51614       0.189852        0.654774\r
 164 3600.000000     31.000000       45.39629        143.77985       0.134181        0.453736\r
 165 3700.000000     31.000000       48.109818       142.83975       0.0995959       0.331134\r
 166 3800.000000     31.000000       50.803299       142.7319        0.0714471       0.240476\r
 167 3900.000000     31.000000       53.462196       144.35834       0.0519681       0.186129\r
 168 4000.000000     31.000000       55.742767       145.93974       0.0391298       0.149981\r
 169 4100.000000     31.000000       57.829544       146.89317       0.032538        0.132035\r
 170 4200.000000     31.000000       59.319332       148.79868       0.0308009       0.135405\r
 171 4300.000000     31.000000       59.98127        149.43405       0.0280341       0.127233\r
 172 4400.000000     31.000000       60.147526       147.88553       0.0243598       0.106107\r
 173 4500.000000     31.000000       59.356789       145.44164       0.0215161       0.0864865\r
 174 4600.000000     31.000000       57.859535       142.6183        0.0203961       0.0745234\r
 175 4700.000000     31.000000       55.940903       139.81654       0.0187616       0.0625924\r
 176 4800.000000     31.000000       53.641956       137.4827        0.019771        0.0611698\r
 177 4900.000000     31.000000       51.230064       135.82124       0.0195154       0.0572466\r
 178 5000.000000     31.000000       48.757973       134.96129       0.0193833       0.055151\r
 179 5100.000000     31.000000       46.291302       134.67375       0.019204        0.0539585\r
 180 5200.000000     31.000000       43.888081       135.18875       0.0189663       0.0537645\r
 181 5300.000000     31.000000       41.746956       136.16328       0.0187081       0.0542944\r
 182 5400.000000     31.000000       39.869038       138.08948       0.0184343       0.056032\r
 183 5500.000000     31.000000       38.160801       140.46446       0.0181253       0.0585598\r
 184 5600.000000     31.000000       36.906784       143.48213       0.01786 0.0624737\r
 185 5700.000000     31.000000       35.993877       147.95403       0.0176371       0.0698849\r
 186 5800.000000     31.000000       35.930962       155.31963       0.017552        0.0884392\r
 187 5900.000000     31.000000       41.850113       155.10991       0.0182956       0.0872155\r
 188 6000.000000     31.000000       42.27393        147.84238       0.017953        0.0677556\r
 189 6100.000000     31.000000       41.469788       142.93721       0.0178505       0.0596798\r
 190 6200.000000     31.000000       40.166271       139.46194       0.0177632       0.0554003\r
 191 6300.000000     31.000000       38.730366       136.86635       0.0176096       0.0527341\r
 192 6400.000000     31.000000       37.304649       134.98119       0.0174534       0.0511467\r
 193 6500.000000     31.000000       35.794167       133.40271       0.0172237       0.0499263\r
 194 6600.000000     31.000000       34.283554       132.35973       0.0170017       0.049389\r
 195 6700.000000     31.000000       32.701092       131.49126       0.0166598       0.048868\r
 196 6800.000000     31.000000       31.161663       131.12422       0.0163063       0.0488338\r
 197 6900.000000     31.000000       29.628477       131.21628       0.0158789       0.0490652\r
 198 7000.000000     31.000000       28.231283       131.55904       0.0157158       0.0503439\r
 199 7100.000000     31.000000       26.910892       132.599 0.0154479       0.0519486\r
 200 7200.000000     31.000000       25.753847       133.57893       0.0151497       0.0533966\r
 201 7300.000000     31.000000       24.66869        135.11833       0.0150338       0.056133\r
 202 7400.000000     31.000000       23.736408       136.69594       0.0150164       0.0593842\r
 203 7500.000000     31.000000       23.030186       138.80418       0.015126        0.0636976\r
 204 7600.000000     31.000000       22.412231       140.6552        0.0156854       0.0701718\r
 205 7700.000000     31.000000       21.967052       142.87808       0.0159669       0.076214\r
 206 7800.000000     31.000000       21.69784        144.98891       0.0187072       0.0949022\r
 207 7900.000000     31.000000       21.631283       146.87848       0.0176479       0.094234\r
 208 8000.000000     31.000000       21.618427       149.3477        0.0186719       0.106907