2 VASEmethod[EllipsometerType=5, Aniso=Highly+Regressed, AutoRetarder=1, Revs=30, AutoSlit=2000, WVASE=3.698, HardVer=6.256, Tue Jul 12 13:45:10 2011]
\r
3 Original[12-07-11-spectr-35d+1.dat]
\r
5 AnE 4000.000000 35.000000 53.6193 199.228 0.560958 2.10469
\r
6 AnE 4100.000000 35.000000 51.3949 204.798 0.586724 1.95388
\r
7 AnE 4200.000000 35.000000 48.5766 209.434 0.580745 1.84728
\r
8 AnE 4300.000000 35.000000 45.6699 212.215 0.577327 1.79205
\r
9 AnE 4400.000000 35.000000 42.792 213.698 0.565936 1.74814
\r
10 AnE 4500.000000 35.000000 40.068 214.07 0.544316 1.70387
\r
11 AnE 4600.000000 35.000000 37.6034 212.781 0.56036 1.77306
\r
12 AnE 4700.000000 35.000000 35.3895 211.479 0.540902 1.78117
\r
13 AnE 4800.000000 35.000000 33.5231 209.431 0.521609 1.80155
\r
14 AnE 4900.000000 35.000000 31.9831 206.972 0.495411 1.81183
\r
15 AnE 5000.000000 35.000000 30.8583 204.094 0.463133 1.80209
\r
16 AnE 5100.000000 35.000000 29.9682 200.301 0.445398 1.75945
\r
17 AnE 5200.000000 35.000000 29.3966 197.116 0.40535 1.69059
\r
18 AnE 5300.000000 35.000000 29.113 194.104 0.370242 1.61898
\r
19 AnE 5400.000000 35.000000 29.024 191.23 0.332057 1.51216
\r
20 AnE 5500.000000 35.000000 29.1624 188.573 0.29419 1.38289
\r
21 AnE 5600.000000 35.000000 29.512 186.29 0.258421 1.24121
\r
22 AnE 5700.000000 35.000000 30.0571 184.164 0.236509 1.05205
\r
23 AnE 5800.000000 35.000000 30.8465 182.47 0.206219 0.920467
\r
24 AnE 5900.000000 35.000000 31.9729 181.017 0.177536 0.789492
\r
25 AnE 6000.000000 35.000000 33.9339 179.597 0.153141 0.669804
\r
26 Aps 4000.000000 35.000000 0.602459 176.754 0.823131 160.344
\r
27 Aps 4100.000000 35.000000 0.595978 209.124 1.03497 168.694
\r
28 Aps 4200.000000 35.000000 0.54513 191.06 0.909075 210.902
\r
29 Aps 4300.000000 35.000000 0.619073 217.749 1.36316 179.467
\r
30 Aps 4400.000000 35.000000 0.620373 214.898 1.39242 191.314
\r
31 Aps 4500.000000 35.000000 0.530904 214.201 1.43562 228.711
\r
32 Aps 4600.000000 35.000000 0.60539 229.2 1.92346 188.772
\r
33 Aps 4700.000000 35.000000 0.524619 218.691 1.72283 242.654
\r
34 Aps 4800.000000 35.000000 0.520518 225.163 1.93256 234.635
\r
35 Aps 4900.000000 35.000000 0.470601 229.569 2.04426 244.624
\r
36 Aps 5000.000000 35.000000 0.496214 226.917 1.94893 231.227
\r
37 Aps 5100.000000 35.000000 0.380739 232.925 2.03341 271.321
\r
38 Aps 5200.000000 35.000000 0.416674 232.358 1.90498 232.12
\r
39 Aps 5300.000000 35.000000 0.345535 234.109 1.81393 253.272
\r
40 Aps 5400.000000 35.000000 0.352735 234.072 1.65265 224.162
\r
41 Aps 5500.000000 35.000000 0.278872 224.1 1.32034 283.85
\r
42 Aps 5600.000000 35.000000 0.28517 224.969 1.16453 238.771
\r
43 Aps 5700.000000 35.000000 0.284255 218.094 0.92187 220.52
\r
44 Aps 5800.000000 35.000000 0.285338 221.536 0.816147 178.955
\r
45 Aps 5900.000000 35.000000 0.252086 207.231 0.559875 186.856
\r
46 Aps 6000.000000 35.000000 0.272235 206.001 0.448186 138.376
\r
47 Asp 4000.000000 35.000000 0.154001 -65.131 2.28765 705.043
\r
48 Asp 4100.000000 35.000000 0.373069 -47.8139 1.89165 334.825
\r
49 Asp 4200.000000 35.000000 0.310667 -53.1695 1.87971 351.79
\r
50 Asp 4300.000000 35.000000 0.282058 -14.7241 1.05022 452.086
\r
51 Asp 4400.000000 35.000000 0.348608 -27.8018 1.11257 317.917
\r
52 Asp 4500.000000 35.000000 0.371072 -39.0604 1.18675 249.359
\r
53 Asp 4600.000000 35.000000 0.328047 -13.5963 0.825419 305.591
\r
54 Asp 4700.000000 35.000000 0.339795 -26.6292 0.899609 260.608
\r
55 Asp 4800.000000 35.000000 0.35064 -23.8416 0.818134 238.814
\r
56 Asp 4900.000000 35.000000 0.372757 -25.0733 0.787726 208.149
\r
57 Asp 5000.000000 35.000000 0.368793 -25.2048 0.743703 195.571
\r
58 Asp 5100.000000 35.000000 0.366603 -14.962 0.607951 190.14
\r
59 Asp 5200.000000 35.000000 0.378785 -23.1225 0.623518 163.543
\r
60 Asp 5300.000000 35.000000 0.346353 -12.0288 0.497966 172.205
\r
61 Asp 5400.000000 35.000000 0.368394 -16.5473 0.477605 145.271
\r
62 Asp 5500.000000 35.000000 0.360852 -14.3694 0.416176 134.224
\r
63 Asp 5600.000000 35.000000 0.370972 -12.4532 0.36147 116.766
\r
64 Asp 5700.000000 35.000000 0.368189 -25.3879 0.38941 95.5746
\r
65 Asp 5800.000000 35.000000 0.321291 -14.4942 0.296417 101.204
\r
66 Asp 5900.000000 35.000000 0.338409 -14.7643 0.262561 83.2305
\r
67 Asp 6000.000000 35.000000 0.3154 -10.2323 0.225178 78.7784
\r
68 qJ 4000.000000 35.000000 0.0374707 0.0190683
\r
69 qJ 4100.000000 35.000000 0.0383819 0.0254978
\r
70 qJ 4200.000000 35.000000 0.041282 0.0240242
\r
71 qJ 4300.000000 35.000000 0.0428362 0.0245553
\r
72 qJ 4400.000000 35.000000 0.0432576 0.024217
\r
73 qJ 4500.000000 35.000000 0.0424109 0.0229644
\r
74 qJ 4600.000000 35.000000 0.0394953 0.0235406
\r
75 qJ 4700.000000 35.000000 0.038223 0.0222902
\r
76 qJ 4800.000000 35.000000 0.0366147 0.0212794
\r
77 qJ 4900.000000 35.000000 0.0343217 0.0202632
\r
78 qJ 5000.000000 35.000000 0.0316349 0.0181602
\r
79 qJ 5100.000000 35.000000 0.0265763 0.0189234
\r
80 qJ 5200.000000 35.000000 0.0233572 0.0173012
\r
81 qJ 5300.000000 35.000000 0.0203701 0.0165934
\r
82 qJ 5400.000000 35.000000 0.0174087 0.0156319
\r
83 qJ 5500.000000 35.000000 0.0145863 0.0148993
\r
84 qJ 5600.000000 35.000000 0.0121395 0.0141899
\r
85 qJ 5700.000000 35.000000 0.0100577 0.0152766
\r
86 qJ 5800.000000 35.000000 0.0081609 0.0146682
\r
87 qJ 5900.000000 35.000000 0.00644921 0.0138944
\r
88 qJ 6000.000000 35.000000 0.00432854 0.0138176