2 VASEmethod[EllipsometerType=5, Aniso=Highly+Regressed, AutoRetarder=1, Revs=30, AutoSlit=2000, WVASE=3.698, HardVer=6.256, Tue Jul 12 13:21:52 2011]
\r
3 Original[12-07-11-spectr-35d-1.5a.dat]
\r
5 AnE 4000.000000 35.000000 53.374 198.65 0.564298 2.12679
\r
6 AnE 4100.000000 35.000000 51.306 204.248 0.61372 2.06011
\r
7 AnE 4200.000000 35.000000 48.5546 208.861 0.584742 1.86995
\r
8 AnE 4300.000000 35.000000 45.6936 211.67 0.581807 1.81771
\r
9 AnE 4400.000000 35.000000 42.8847 213.166 0.573327 1.78213
\r
10 AnE 4500.000000 35.000000 40.1953 213.567 0.558359 1.75759
\r
11 AnE 4600.000000 35.000000 37.7243 212.336 0.568304 1.80522
\r
12 AnE 4700.000000 35.000000 35.5503 211.08 0.553341 1.82734
\r
13 AnE 4800.000000 35.000000 33.6929 209.125 0.52879 1.82905
\r
14 AnE 4900.000000 35.000000 32.1838 206.565 0.504745 1.85012
\r
15 AnE 5000.000000 35.000000 31.0105 203.801 0.476249 1.85554
\r
16 AnE 5100.000000 35.000000 30.1571 200.056 0.452843 1.78734
\r
17 AnE 5200.000000 35.000000 29.5849 196.867 0.41967 1.74808
\r
18 AnE 5300.000000 35.000000 29.2668 193.904 0.375447 1.63912
\r
19 AnE 5400.000000 35.000000 29.1826 191.046 0.335328 1.52404
\r
20 AnE 5500.000000 35.000000 29.3136 188.51 0.301694 1.41385
\r
21 AnE 5600.000000 35.000000 29.6411 186.252 0.263948 1.26448
\r
22 AnE 5700.000000 35.000000 30.1919 184.093 0.237387 1.05323
\r
23 AnE 5800.000000 35.000000 30.9551 182.383 0.206257 0.918857
\r
24 AnE 5900.000000 35.000000 32.0656 180.903 0.178744 0.793624
\r
25 AnE 6000.000000 35.000000 34.0114 179.531 0.154261 0.673944
\r
26 Aps 4000.000000 35.000000 0.518369 226.13 1.25554 156.421
\r
27 Aps 4100.000000 35.000000 0.683855 215.899 1.20205 147.227
\r
28 Aps 4200.000000 35.000000 0.525176 192.351 0.923232 220.109
\r
29 Aps 4300.000000 35.000000 0.529906 215.961 1.33587 214.109
\r
30 Aps 4400.000000 35.000000 0.494534 215.629 1.42156 241.775
\r
31 Aps 4500.000000 35.000000 0.562901 223.421 1.67013 205.546
\r
32 Aps 4600.000000 35.000000 0.526953 219.552 1.71287 241.234
\r
33 Aps 4700.000000 35.000000 0.615732 236.964 2.17808 173.225
\r
34 Aps 4800.000000 35.000000 0.542856 230.408 2.07042 214.864
\r
35 Aps 4900.000000 35.000000 0.484285 233.154 2.14759 231.082
\r
36 Aps 5000.000000 35.000000 0.470182 235.254 2.17506 226.14
\r
37 Aps 5100.000000 35.000000 0.399709 233.974 2.07116 257.607
\r
38 Aps 5200.000000 35.000000 0.479758 243.253 2.14605 178.238
\r
39 Aps 5300.000000 35.000000 0.450628 238.911 1.90448 183.114
\r
40 Aps 5400.000000 35.000000 0.310211 233.33 1.64373 258.255
\r
41 Aps 5500.000000 35.000000 0.320888 238.77 1.55955 207.527
\r
42 Aps 5600.000000 35.000000 0.313571 231.139 1.2647 204.392
\r
43 Aps 5700.000000 35.000000 0.312818 232.134 1.07859 170.971
\r
44 Aps 5800.000000 35.000000 0.282251 231.536 0.905039 160.703
\r
45 Aps 5900.000000 35.000000 0.272226 212.979 0.607567 166.445
\r
46 Aps 6000.000000 35.000000 0.298331 219.136 0.530458 114.76
\r
47 Asp 4000.000000 35.000000 0.612533 49.7 2.34134 167.974
\r
48 Asp 4100.000000 35.000000 0.452934 1.7626 1.42043 333.582
\r
49 Asp 4200.000000 35.000000 0.237656 -57.0428 1.96754 442.599
\r
50 Asp 4300.000000 35.000000 0.232377 -11.0443 1.04014 555.792
\r
51 Asp 4400.000000 35.000000 0.311858 -26.7745 1.11299 363.121
\r
52 Asp 4500.000000 35.000000 0.291403 -25.7473 1.00921 354.432
\r
53 Asp 4600.000000 35.000000 0.319642 -29.0331 1.01059 302.908
\r
54 Asp 4700.000000 35.000000 0.298902 -1.68357 0.791127 317.786
\r
55 Asp 4800.000000 35.000000 0.322516 -23.7555 0.831162 264.303
\r
56 Asp 4900.000000 35.000000 0.324338 -15.7046 0.71908 252.919
\r
57 Asp 5000.000000 35.000000 0.338235 -12.115 0.657032 229.757
\r
58 Asp 5100.000000 35.000000 0.333568 -18.9079 0.649877 210.052
\r
59 Asp 5200.000000 35.000000 0.35204 -15.2619 0.581216 188.039
\r
60 Asp 5300.000000 35.000000 0.355789 -15.0056 0.523583 168.561
\r
61 Asp 5400.000000 35.000000 0.324285 -18.0959 0.493988 165.575
\r
62 Asp 5500.000000 35.000000 0.340954 -14.8161 0.430067 145.322
\r
63 Asp 5600.000000 35.000000 0.328049 -20.0599 0.412859 130.888
\r
64 Asp 5700.000000 35.000000 0.325362 -20.8659 0.365772 111.208
\r
65 Asp 5800.000000 35.000000 0.327098 -9.39265 0.281099 100.786
\r
66 Asp 5900.000000 35.000000 0.315965 -15.9963 0.268864 89.3232
\r
67 Asp 6000.000000 35.000000 0.327695 -15.1705 0.239087 75.2668
\r
68 qJ 4000.000000 35.000000 0.0370677 0.0198352
\r
69 qJ 4100.000000 35.000000 0.0405791 0.0239331
\r
70 qJ 4200.000000 35.000000 0.04139 0.0240226
\r
71 qJ 4300.000000 35.000000 0.0432407 0.0235671
\r
72 qJ 4400.000000 35.000000 0.0436192 0.0244575
\r
73 qJ 4500.000000 35.000000 0.0436374 0.0224593
\r
74 qJ 4600.000000 35.000000 0.0398363 0.0240357
\r
75 qJ 4700.000000 35.000000 0.0392119 0.0219622
\r
76 qJ 4800.000000 35.000000 0.037274 0.0206708
\r
77 qJ 4900.000000 35.000000 0.0351009 0.0196545
\r
78 qJ 5000.000000 35.000000 0.0324009 0.0185825
\r
79 qJ 5100.000000 35.000000 0.0270239 0.0189463
\r
80 qJ 5200.000000 35.000000 0.0241956 0.0176372
\r
81 qJ 5300.000000 35.000000 0.0207118 0.0164
\r
82 qJ 5400.000000 35.000000 0.0175929 0.0154262
\r
83 qJ 5500.000000 35.000000 0.015043 0.0149195
\r
84 qJ 5600.000000 35.000000 0.012575 0.0138749
\r
85 qJ 5700.000000 35.000000 0.0102696 0.0147756
\r
86 qJ 5800.000000 35.000000 0.00817149 0.0146084
\r
87 qJ 5900.000000 35.000000 0.0061805 0.0145242
\r
88 qJ 6000.000000 35.000000 0.00445286 0.0139079