2 VASEmethod[EllipsometerType=5, Aniso=Highly+Regressed, AutoRetarder=1, Revs=30, AutoSlit=2000, WVASE=3.698, HardVer=6.256, Tue Jul 12 13:05:43 2011]
\r
3 Original[12-07-11-spectr-35d-nob.dat]
\r
5 AnE 3000.000000 35.000000 46.1699 164.22 0.988447 3.65516
\r
6 AnE 3100.000000 35.000000 44.3654 164.358 0.538238 2.00875
\r
7 AnE 3200.000000 35.000000 44.4052 162.498 0.319089 1.19144
\r
8 AnE 3300.000000 35.000000 45.5484 162.764 0.351838 1.24019
\r
9 AnE 3400.000000 35.000000 47.1444 162.171 0.319194 1.14012
\r
10 AnE 3500.000000 35.000000 49.3311 163.462 0.377126 1.40304
\r
11 AnE 3600.000000 35.000000 51.5723 165.265 0.428643 1.67326
\r
12 AnE 3700.000000 35.000000 53.856 171.951 0.481829 1.87115
\r
13 AnE 3800.000000 35.000000 55.0775 180.989 0.565276 2.32311
\r
14 AnE 3900.000000 35.000000 54.6918 190.191 0.563627 2.27681
\r
15 AnE 4000.000000 35.000000 53.4501 198.304 0.570428 2.16185
\r
16 AnE 4100.000000 35.000000 51.2184 204.001 0.586782 1.97112
\r
17 AnE 4200.000000 35.000000 48.5302 208.581 0.585739 1.87993
\r
18 AnE 4300.000000 35.000000 45.7126 211.447 0.573963 1.79758
\r
19 AnE 4400.000000 35.000000 42.9283 212.933 0.570705 1.77855
\r
20 AnE 4500.000000 35.000000 40.2206 213.358 0.557981 1.76085
\r
21 AnE 4600.000000 35.000000 37.7801 212.158 0.569274 1.81107
\r
22 AnE 4700.000000 35.000000 35.6193 210.892 0.552308 1.82651
\r
23 AnE 4800.000000 35.000000 33.7608 208.898 0.529948 1.83666
\r
24 AnE 4900.000000 35.000000 32.2409 206.428 0.51143 1.87618
\r
25 AnE 5000.000000 35.000000 31.101 203.636 0.47823 1.86472
\r
26 AnE 5100.000000 35.000000 30.2461 199.939 0.453299 1.78822
\r
27 AnE 5200.000000 35.000000 29.66 196.887 0.421205 1.75182
\r
28 AnE 5300.000000 35.000000 29.3416 193.811 0.378168 1.65026
\r
29 AnE 5400.000000 35.000000 29.2664 190.946 0.338999 1.53937
\r
30 AnE 5500.000000 35.000000 29.3812 188.437 0.305538 1.43092
\r
31 AnE 5600.000000 35.000000 29.7027 186.129 0.262603 1.25743
\r
32 AnE 5700.000000 35.000000 30.2468 184.02 0.238983 1.0595
\r
33 AnE 5800.000000 35.000000 31.0099 182.353 0.206328 0.918428
\r
34 AnE 5900.000000 35.000000 32.1189 180.916 0.179384 0.795796
\r
35 AnE 6000.000000 35.000000 34.0442 179.407 0.152307 0.665123
\r
36 AnE 6100.000000 35.000000 39.3208 186.5 0.166757 0.688305
\r
37 AnE 6200.000000 35.000000 38.0823 197.19 0.229138 0.839705
\r
38 AnE 6300.000000 35.000000 35.7625 203.525 0.262492 0.936056
\r
39 AnE 6400.000000 35.000000 33.1377 207.195 0.297833 1.06043
\r
40 AnE 6500.000000 35.000000 30.519 208.923 0.329177 1.20134
\r
41 AnE 6600.000000 35.000000 28.083 208.822 0.367425 1.41246
\r
42 AnE 6700.000000 35.000000 25.9472 207.079 0.396581 1.64813
\r
43 AnE 6800.000000 35.000000 24.1879 203.342 0.436537 1.93117
\r
44 AnE 6900.000000 35.000000 22.9666 199.068 0.455403 2.21947
\r
45 AnE 7000.000000 35.000000 22.1414 193.959 0.455935 2.43409
\r
46 AnE 7100.000000 35.000000 21.757 188.469 0.445178 2.55386
\r
47 AnE 7200.000000 35.000000 21.7224 182.937 0.423268 2.52965
\r
48 AnE 7300.000000 35.000000 21.9725 178.133 0.388001 2.32666
\r
49 AnE 7400.000000 35.000000 22.4242 174.447 0.352894 1.91367
\r
50 AnE 7500.000000 35.000000 22.97 171.487 0.317683 1.67948
\r
51 AnE 7600.000000 35.000000 23.6162 169.256 0.288058 1.47853
\r
52 AnE 7700.000000 35.000000 24.2724 167.523 0.257252 1.28606
\r
53 AnE 7800.000000 35.000000 24.9494 166.213 0.230386 1.11481
\r
54 AnE 7900.000000 35.000000 25.6477 165.242 0.208354 0.9933
\r
55 AnE 8000.000000 35.000000 26.3305 164.44 0.19071 0.890989
\r
56 Aps 3000.000000 35.000000 2.97877 158.038 1.88176 62.6549
\r
57 Aps 3100.000000 35.000000 1.54122 223.203 1.61525 53.1105
\r
58 Aps 3200.000000 35.000000 1.46853 260.33 1.15653 23.62
\r
59 Aps 3300.000000 35.000000 0.416268 75.1198 1.19207 86.9773
\r
60 Aps 3400.000000 35.000000 0.403668 117.929 0.916294 107.917
\r
61 Aps 3500.000000 35.000000 0.350383 164.393 0.613976 195.498
\r
62 Aps 3600.000000 35.000000 0.378641 189.421 0.702745 194.78
\r
63 Aps 3700.000000 35.000000 0.395718 180.16 0.648845 192.848
\r
64 Aps 3800.000000 35.000000 0.537484 154.186 0.953 152.999
\r
65 Aps 3900.000000 35.000000 0.499052 193.436 0.792683 182.799
\r
66 Aps 4000.000000 35.000000 0.469222 180.677 0.815262 210.819
\r
67 Aps 4100.000000 35.000000 0.451558 208.267 1.02708 223.316
\r
68 Aps 4200.000000 35.000000 0.549321 216.754 1.25348 191.251
\r
69 Aps 4300.000000 35.000000 0.488006 204.4 1.10884 243.946
\r
70 Aps 4400.000000 35.000000 0.620268 238.282 1.88387 153.567
\r
71 Aps 4500.000000 35.000000 0.510457 225.049 1.70353 223.127
\r
72 Aps 4600.000000 35.000000 0.519286 226.721 1.88413 229.103
\r
73 Aps 4700.000000 35.000000 0.626166 239.449 2.21972 164.33
\r
74 Aps 4800.000000 35.000000 0.466744 234.277 2.1562 238.863
\r
75 Aps 4900.000000 35.000000 0.646858 249.855 2.48039 138.944
\r
76 Aps 5000.000000 35.000000 0.436989 239.111 2.25278 231.31
\r
77 Aps 5100.000000 35.000000 0.417153 244.923 2.25931 211.637
\r
78 Aps 5200.000000 35.000000 0.405058 248.96 2.22631 193.878
\r
79 Aps 5300.000000 35.000000 0.420479 251.085 2.07224 163.919
\r
80 Aps 5400.000000 35.000000 0.349741 245.491 1.8249 193.049
\r
81 Aps 5500.000000 35.000000 0.317145 241.911 1.61293 202.131
\r
82 Aps 5600.000000 35.000000 0.267689 235.77 1.31128 222.93
\r
83 Aps 5700.000000 35.000000 0.321469 244.126 1.19237 141.33
\r
84 Aps 5800.000000 35.000000 0.276789 233.702 0.92135 159.042
\r
85 Aps 5900.000000 35.000000 0.262361 244.518 0.831364 120.713
\r
86 Aps 6000.000000 35.000000 0.286797 224.729 0.556459 111.415
\r
87 Aps 6100.000000 35.000000 0.366132 218.477 0.467491 87.8782
\r
88 Aps 6200.000000 35.000000 0.384517 223.478 0.684583 119.645
\r
89 Aps 6300.000000 35.000000 0.368103 227.814 0.912061 150.902
\r
90 Aps 6400.000000 35.000000 0.469317 237.067 1.25497 127.031
\r
91 Aps 6500.000000 35.000000 0.444635 241.225 1.56452 146.007
\r
92 Aps 6600.000000 35.000000 0.443939 244.906 1.96027 163.196
\r
93 Aps 6700.000000 35.000000 0.56488 260.378 2.49856 118.681
\r
94 Aps 6800.000000 35.000000 0.45461 261.298 3.04537 170.537
\r
95 Aps 6900.000000 35.000000 0.478337 267.842 3.58785 171.346
\r
96 Aps 7000.000000 35.000000 0.411615 -85.4732 4.00191 219.467
\r
97 Aps 7100.000000 35.000000 0.3116 -70.9653 4.03773 377.977
\r
98 Aps 7200.000000 35.000000 0.361548 -59.3034 3.67958 397.75
\r
99 Aps 7300.000000 35.000000 0.16636 -7.93925 1.45383 1296.15
\r
100 Aps 7400.000000 35.000000 0.218141 -31.6702 1.97675 725.53
\r
101 Aps 7500.000000 35.000000 0.147831 -61.3831 2.44667 616.461
\r
102 Aps 7600.000000 35.000000 0.209482 -44.8582 1.79046 485.637
\r
103 Aps 7700.000000 35.000000 0.101223 1.33277 0.8549 1120.1
\r
104 Aps 7800.000000 35.000000 0.047614 -3.36436 0.799136 2035.13
\r
105 Aps 7900.000000 35.000000 0.0552311 8.00286 0.704064 1512.95
\r
106 Aps 8000.000000 35.000000 0.0387744 171.119 0.632826 1906.45
\r
107 Asp 3000.000000 35.000000 1.9579 214.722 2.30745 95.1706
\r
108 Asp 3100.000000 35.000000 2.16524 85.5919 1.8068 27.1809
\r
109 Asp 3200.000000 35.000000 0.892397 107.249 1.11489 38.4186
\r
110 Asp 3300.000000 35.000000 0.769031 -60.0293 1.17093 56.0536
\r
111 Asp 3400.000000 35.000000 0.317263 -7.98813 0.698237 206.759
\r
112 Asp 3500.000000 35.000000 0.150805 48.919 1.13813 477.721
\r
113 Asp 3600.000000 35.000000 0.142115 -53.5274 1.66662 498.668
\r
114 Asp 3700.000000 35.000000 0.170619 1.79392 1.28109 669.535
\r
115 Asp 3800.000000 35.000000 0.186737 53.1487 2.17802 591.018
\r
116 Asp 3900.000000 35.000000 0.119531 -70.064 2.33405 861.388
\r
117 Asp 4000.000000 35.000000 0.26329 268.373 2.59317 321.648
\r
118 Asp 4100.000000 35.000000 0.0975947 9.44803 1.47046 1435.53
\r
119 Asp 4200.000000 35.000000 0.163309 -5.58533 1.15587 852.251
\r
120 Asp 4300.000000 35.000000 0.206015 -55.6802 1.77564 469.256
\r
121 Asp 4400.000000 35.000000 0.211354 11.9456 1.13431 530.607
\r
122 Asp 4500.000000 35.000000 0.253148 -32.8142 1.11679 393.7
\r
123 Asp 4600.000000 35.000000 0.278401 -34.1905 1.09487 338.435
\r
124 Asp 4700.000000 35.000000 0.313563 -14.0682 0.800517 302.058
\r
125 Asp 4800.000000 35.000000 0.278131 -24.018 0.837398 307.313
\r
126 Asp 4900.000000 35.000000 0.292572 -9.62132 0.698922 287.313
\r
127 Asp 5000.000000 35.000000 0.297469 -30.5532 0.833482 243.778
\r
128 Asp 5100.000000 35.000000 0.289836 -19.8943 0.659846 241.198
\r
129 Asp 5200.000000 35.000000 0.309248 -23.1835 0.650206 208.254
\r
130 Asp 5300.000000 35.000000 0.293698 -14.7286 0.526316 205.881
\r
131 Asp 5400.000000 35.000000 0.29877 -17.5692 0.496184 182.038
\r
132 Asp 5500.000000 35.000000 0.295176 -18.7065 0.461305 167.46
\r
133 Asp 5600.000000 35.000000 0.308466 -15.7097 0.384883 141.047
\r
134 Asp 5700.000000 35.000000 0.290546 -9.74992 0.320708 130.366
\r
135 Asp 5800.000000 35.000000 0.28732 -14.7486 0.29831 113.073
\r
136 Asp 5900.000000 35.000000 0.26801 -14.3635 0.264708 106.301
\r
137 Asp 6000.000000 35.000000 0.264637 -12.4124 0.229309 92.8521
\r
138 Asp 6100.000000 35.000000 0.265143 -27.3939 0.320285 101.761
\r
139 Asp 6200.000000 35.000000 0.306545 -32.135 0.432554 118.589
\r
140 Asp 6300.000000 35.000000 0.34057 -27.9031 0.453264 124.988
\r
141 Asp 6400.000000 35.000000 0.327574 -24.8746 0.477237 143.962
\r
142 Asp 6500.000000 35.000000 0.36811 -20.9608 0.488039 138.197
\r
143 Asp 6600.000000 35.000000 0.384709 -23.2632 0.555101 143.021
\r
144 Asp 6700.000000 35.000000 0.389822 -18.5359 0.561451 156.523
\r
145 Asp 6800.000000 35.000000 0.388033 -16.8337 0.589948 175.304
\r
146 Asp 6900.000000 35.000000 0.351935 -18.3553 0.644254 209.615
\r
147 Asp 7000.000000 35.000000 0.370946 -10.5111 0.569739 215.624
\r
148 Asp 7100.000000 35.000000 0.378569 -14.6539 0.607717 213.153
\r
149 Asp 7200.000000 35.000000 0.370316 -8.28729 0.516357 217.358
\r
150 Asp 7300.000000 35.000000 0.379332 -14.5148 0.538993 191.406
\r
151 Asp 7400.000000 35.000000 0.368548 -12.1677 0.454264 166.343
\r
152 Asp 7500.000000 35.000000 0.348497 9.22997 0.38657 157.946
\r
153 Asp 7600.000000 35.000000 0.333341 4.41526 0.335514 148.731
\r
154 Asp 7700.000000 35.000000 0.342024 -0.292287 0.300334 128.228
\r
155 Asp 7800.000000 35.000000 0.356348 7.63894 0.277455 107.884
\r
156 Asp 7900.000000 35.000000 0.355445 2.94526 0.249256 98.2963
\r
157 Asp 8000.000000 35.000000 0.335319 7.47578 0.23578 94.5644
\r
158 qJ 3000.000000 35.000000 0.0146252 0.105157
\r
159 qJ 3100.000000 35.000000 0.0266008 0.0438934
\r
160 qJ 3200.000000 35.000000 0.0172648 0.0242811
\r
161 qJ 3300.000000 35.000000 0.0179475 0.0254912
\r
162 qJ 3400.000000 35.000000 0.0175832 0.0211586
\r
163 qJ 3500.000000 35.000000 0.023467 0.0178313
\r
164 qJ 3600.000000 35.000000 0.0272292 0.0145869
\r
165 qJ 3700.000000 35.000000 0.0271165 0.0158802
\r
166 qJ 3800.000000 35.000000 0.0298583 0.0178423
\r
167 qJ 3900.000000 35.000000 0.0320266 0.0208756
\r
168 qJ 4000.000000 35.000000 0.037585 0.0193595
\r
169 qJ 4100.000000 35.000000 0.0385434 0.023863
\r
170 qJ 4200.000000 35.000000 0.0412816 0.024084
\r
171 qJ 4300.000000 35.000000 0.0423834 0.0239637
\r
172 qJ 4400.000000 35.000000 0.0435761 0.0234555
\r
173 qJ 4500.000000 35.000000 0.0433309 0.0231637
\r
174 qJ 4600.000000 35.000000 0.0400036 0.0235657
\r
175 qJ 4700.000000 35.000000 0.0391168 0.0217258
\r
176 qJ 4800.000000 35.000000 0.0371414 0.0212347
\r
177 qJ 4900.000000 35.000000 0.0355121 0.0196716
\r
178 qJ 5000.000000 35.000000 0.0325835 0.0184529
\r
179 qJ 5100.000000 35.000000 0.027145 0.0184728
\r
180 qJ 5200.000000 35.000000 0.0242216 0.0179533
\r
181 qJ 5300.000000 35.000000 0.0208066 0.0166021
\r
182 qJ 5400.000000 35.000000 0.0176843 0.0159083
\r
183 qJ 5500.000000 35.000000 0.0152929 0.0147924
\r
184 qJ 5600.000000 35.000000 0.0123897 0.014038
\r
185 qJ 5700.000000 35.000000 0.0101282 0.0153493
\r
186 qJ 5800.000000 35.000000 0.00818094 0.0145724
\r
187 qJ 5900.000000 35.000000 0.00605241 0.0147623
\r
188 qJ 6000.000000 35.000000 0.00419395 0.0138867
\r
189 qJ 6100.000000 35.000000 0.00378686 0.0162729
\r
190 qJ 6200.000000 35.000000 0.00807704 0.0202948
\r
191 qJ 6300.000000 35.000000 0.0126252 0.0204517
\r
192 qJ 6400.000000 35.000000 0.0170874 0.0201548
\r
193 qJ 6500.000000 35.000000 0.0211069 0.0187616
\r
194 qJ 6600.000000 35.000000 0.0247671 0.0181846
\r
195 qJ 6700.000000 35.000000 0.0272947 0.0167542
\r
196 qJ 6800.000000 35.000000 0.0270196 0.0163472
\r
197 qJ 6900.000000 35.000000 0.0269548 0.015447
\r
198 qJ 7000.000000 35.000000 0.0251404 0.0131711
\r
199 qJ 7100.000000 35.000000 0.0223719 0.0122805
\r
200 qJ 7200.000000 35.000000 0.0198251 0.0117042
\r
201 qJ 7300.000000 35.000000 0.0181163 0.010519
\r
202 qJ 7400.000000 35.000000 0.0168742 0.0107551
\r
203 qJ 7500.000000 35.000000 0.0158126 0.0103556
\r
204 qJ 7600.000000 35.000000 0.0149477 0.00979028
\r
205 qJ 7700.000000 35.000000 0.0137787 0.00945141
\r
206 qJ 7800.000000 35.000000 0.0125893 0.00887522
\r
207 qJ 7900.000000 35.000000 0.0115758 0.00899437
\r
208 qJ 8000.000000 35.000000 0.0108166 0.00827471