2 VASEmethod[EllipsometerType=0, Isotropic, AutoRetarder=0, TrackPol=1, Pol>=0, Revs=10, AutoSlit=2000, WVASE=3.698, HardVer=6.256, Fri Mar 20 12:52:21 2009]
\r
3 Original[200309 calibration.dat]
\r
5 300.000000 65.000000 37.832623 107.44125 0.346894 0.749617
\r
6 310.000000 65.000000 37.012939 106.24937 0.354392 0.767596
\r
7 320.000000 65.000000 36.408531 108.2618 0.354361 0.780213
\r
8 330.000000 65.000000 35.498158 110.48534 0.394257 0.889799
\r
9 340.000000 65.000000 35.229389 109.45363 0.430926 0.969056
\r
10 350.000000 65.000000 34.707474 112.65421 0.453593 1.04987
\r
11 360.000000 65.000000 35.468773 114.87025 0.464156 1.08248
\r
12 370.000000 65.000000 34.042278 121.90384 0.461368 1.1707
\r
13 380.000000 65.000000 32.389095 125.00015 0.121924 0.328596
\r
14 390.000000 65.000000 30.979715 125.99662 0.0896466 0.250817
\r
15 400.000000 65.000000 29.545334 127.47459 0.0676572 0.198504
\r
16 410.000000 65.000000 28.499798 128.52176 0.0547028 0.166631
\r
17 420.000000 65.000000 27.674088 128.87872 0.0510086 0.159234
\r
18 430.000000 65.000000 26.909964 129.56807 0.0440118 0.141266
\r
19 440.000000 65.000000 26.170881 130.41005 0.0383355 0.127143
\r
20 450.000000 65.000000 25.747746 130.97693 0.0317251 0.107306
\r
21 460.000000 65.000000 24.994385 132.02618 0.0291199 0.102321
\r
22 470.000000 65.000000 24.535061 132.32008 0.0241621 0.0864269
\r
23 480.000000 65.000000 24.161587 133.12219 0.0281167 0.103131
\r
24 490.000000 65.000000 23.697189 133.51541 0.0266411 0.0997737
\r
25 500.000000 65.000000 23.332775 134.28128 0.0258097 0.0990372
\r
26 510.000000 65.000000 22.95937 135.02333 0.0256685 0.101089
\r
27 520.000000 65.000000 22.562248 135.36763 0.0247919 0.0995491
\r
28 530.000000 65.000000 22.128733 135.5708 0.0242581 0.0992141
\r
29 540.000000 65.000000 21.968805 136.33252 0.0248497 0.103722
\r
30 550.000000 65.000000 21.68445 136.84262 0.0245736 0.104611
\r
31 560.000000 65.000000 21.429188 137.28864 0.0244921 0.106128
\r
32 570.000000 65.000000 21.162088 137.92865 0.024517 0.108612
\r
33 580.000000 65.000000 20.955164 138.18001 0.024738 0.110982
\r
34 590.000000 65.000000 20.70068 138.93044 0.0257988 0.118739
\r
35 600.000000 65.000000 20.487354 139.56783 0.0274541 0.129082
\r
36 610.000000 65.000000 20.258278 139.70659 0.0268785 0.127898
\r
37 620.000000 65.000000 20.089788 140.32703 0.027038 0.131215
\r
38 630.000000 65.000000 19.861359 140.67993 0.0278596 0.137484
\r
39 640.000000 65.000000 19.773659 141.33867 0.0306695 0.154188
\r
40 650.000000 65.000000 19.672394 141.59518 0.031655 0.160726
\r
41 660.000000 65.000000 19.265381 142.51921 0.0331871 0.175047
\r
42 670.000000 65.000000 19.288908 142.28564 0.0331476 0.173739
\r
43 680.000000 65.000000 19.063673 142.49889 0.0332381 0.176774
\r
44 690.000000 65.000000 18.991964 143.34854 0.0329833 0.179458
\r
45 700.000000 65.000000 18.807739 144.11867 0.0368158 0.205675
\r
46 710.000000 65.000000 18.730345 143.84785 0.039752 0.221547
\r
47 720.000000 65.000000 18.643919 144.24936 0.0404942 0.228773
\r
48 730.000000 65.000000 18.572039 144.39351 0.0423867 0.241097
\r
49 740.000000 65.000000 18.431059 145.16653 0.044599 0.260257
\r
50 750.000000 65.000000 18.191067 146.01108 0.0476105 0.287056
\r
51 760.000000 65.000000 18.190691 145.94479 0.0528515 0.318114
\r
52 770.000000 65.000000 18.079489 145.85513 0.0567508 0.342576
\r
53 780.000000 65.000000 17.865234 145.99344 0.0735645 0.450193
\r
54 790.000000 65.000000 17.972448 147.94475 0.0683776 0.43874
\r
55 800.000000 65.000000 17.892422 147.71941 0.0747785 0.478631
\r
56 810.000000 65.000000 17.722172 147.52493 0.0891944 0.572818
\r
57 820.000000 65.000000 17.646784 148.12816 0.0526664 0.345214
\r
58 830.000000 65.000000 17.593708 148.68057 0.0246011 0.16423
\r
59 840.000000 65.000000 17.650358 148.44598 0.0594956 0.393424
\r
60 850.000000 65.000000 17.531597 146.78551 0.204885 1.30193
\r
61 860.000000 65.000000 17.468166 149.18262 0.173473 1.18235
\r
62 870.000000 65.000000 17.405762 150.17241 0.0995849 0.701269
\r
63 880.000000 65.000000 17.254637 149.79092 0.0245511 0.172205
\r
64 890.000000 65.000000 17.200626 149.63416 0.026796 0.187584
\r
65 900.000000 65.000000 17.13929 149.94412 0.0226583 0.160596
\r
66 910.000000 65.000000 17.164499 150.1657 0.0239968 0.17101
\r
67 920.000000 65.000000 17.028393 151.00945 0.0138228 0.101816
\r
68 930.000000 65.000000 16.90793 151.55621 0.0281683 0.212435
\r
69 940.000000 65.000000 16.921442 151.46736 0.0190963 0.143506
\r
70 950.000000 65.000000 16.862715 151.58423 0.0189003 0.143
\r
71 960.000000 65.000000 16.828993 152.0829 0.0299407 0.230647
\r
72 970.000000 65.000000 16.810112 151.91223 0.02929 0.224592
\r
73 980.000000 65.000000 16.698383 152.3221 0.0129529 0.101259
\r
74 990.000000 65.000000 16.62587 152.60986 0.0191514 0.151814
\r
75 1000.000000 65.000000 16.621939 152.49522 0.0276873 0.21868
\r
76 300.000000 70.000000 38.245701 91.371368 2.38627 4.62845
\r
77 310.000000 70.000000 36.226662 91.916428 1.31648 2.75559
\r
78 320.000000 70.000000 35.915401 91.439713 0.832895 1.75363
\r
79 330.000000 70.000000 35.066319 94.271309 0.569944 1.21428
\r
80 340.000000 70.000000 34.98708 94.832329 0.399226 0.85285
\r
81 350.000000 70.000000 34.788876 96.536613 0.284541 0.611182
\r
82 360.000000 70.000000 34.440437 98.27607 0.210242 0.455374
\r
83 370.000000 70.000000 33.512672 104.42198 0.15789 0.353572
\r
84 380.000000 70.000000 31.063128 108.69357 0.117715 0.280024
\r
85 390.000000 70.000000 29.09749 110.13833 0.0873358 0.218306
\r
86 400.000000 70.000000 27.418058 110.57281 0.0663256 0.172934
\r
87 410.000000 70.000000 26.236969 110.80885 0.0538191 0.145021
\r
88 420.000000 70.000000 25.274313 111.47454 0.0506814 0.140945
\r
89 430.000000 70.000000 24.332159 111.77073 0.0435598 0.124535
\r
90 440.000000 70.000000 23.512402 112.11612 0.0381661 0.112537
\r
91 450.000000 70.000000 22.827631 112.5629 0.031283 0.0945267
\r
92 460.000000 70.000000 22.077993 112.84069 0.0290595 0.0904718
\r
93 470.000000 70.000000 21.510506 113.23542 0.0238327 0.0758873
\r
94 480.000000 70.000000 20.884485 113.55436 0.0280586 0.0918551
\r
95 490.000000 70.000000 20.411526 113.94158 0.0265112 0.0886165
\r
96 500.000000 70.000000 19.909584 114.24429 0.0263172 0.0901119
\r
97 510.000000 70.000000 19.410147 114.70806 0.0253856 0.0890374
\r
98 520.000000 70.000000 19.076059 115.34271 0.0253796 0.0908984
\r
99 530.000000 70.000000 18.69227 115.56177 0.0247733 0.0903912
\r
100 540.000000 70.000000 18.299736 115.92731 0.0245325 0.0913492
\r
101 550.000000 70.000000 17.963753 116.13773 0.0250969 0.0952673
\r
102 560.000000 70.000000 17.51944 116.6283 0.0248878 0.0968942
\r
103 570.000000 70.000000 17.223402 117.15387 0.0249812 0.0991003
\r
104 580.000000 70.000000 17.034824 117.45456 0.0264003 0.106203
\r
105 590.000000 70.000000 16.637815 117.74017 0.0265199 0.109159
\r
106 600.000000 70.000000 16.313896 118.11952 0.0282478 0.118643
\r
107 610.000000 70.000000 16.101849 118.61246 0.0277282 0.118296
\r
108 620.000000 70.000000 15.872621 118.90603 0.0292091 0.126812
\r
109 630.000000 70.000000 15.616579 119.00352 0.0301916 0.133089
\r
110 640.000000 70.000000 15.296479 119.46255 0.0319053 0.143834
\r
111 650.000000 70.000000 15.126873 119.84875 0.0331064 0.151262
\r
112 660.000000 70.000000 14.983418 120.3122 0.0353038 0.163382
\r
113 670.000000 70.000000 14.747875 120.44263 0.0370405 0.17449
\r
114 680.000000 70.000000 14.51644 120.8138 0.0371207 0.178035
\r
115 690.000000 70.000000 14.424338 121.45683 0.0369715 0.179536
\r
116 700.000000 70.000000 14.188544 121.81809 0.0415035 0.205282
\r
117 710.000000 70.000000 14.030908 122.0467 0.0431078 0.21584
\r
118 720.000000 70.000000 13.892106 122.56139 0.0439905 0.223432
\r
119 730.000000 70.000000 13.714857 122.83214 0.048782 0.252016
\r
120 740.000000 70.000000 13.55266 122.79467 0.0514666 0.268663
\r
121 750.000000 70.000000 13.464818 123.38715 0.0556007 0.293929
\r
122 760.000000 70.000000 13.220644 123.57529 0.0609823 0.328424
\r
123 770.000000 70.000000 13.104208 124.24695 0.0658351 0.360191
\r
124 780.000000 70.000000 12.92081 123.83149 0.08641 0.476327
\r
125 790.000000 70.000000 12.922812 124.83305 0.0797872 0.445061
\r
126 800.000000 70.000000 12.693616 125.04355 0.0870975 0.494772
\r
127 810.000000 70.000000 12.716724 127.99628 0.323836 1.86734
\r
128 820.000000 70.000000 12.368945 125.02634 0.101483 0.592073
\r
129 830.000000 70.000000 12.295691 126.07673 0.0738579 0.43897
\r
130 840.000000 70.000000 12.506002 125.49854 0.137706 0.799943
\r
131 850.000000 70.000000 12.152958 127.54151 0.262656 1.60829
\r
132 860.000000 70.000000 12.332942 128.18347 0.22921 1.3969
\r
133 870.000000 70.000000 11.959177 127.68213 0.127071 0.790973
\r
134 880.000000 70.000000 11.850806 127.28991 0.0297371 0.185643
\r
135 890.000000 70.000000 11.724416 128.06912 0.0328113 0.208996
\r
136 900.000000 70.000000 11.647614 128.24506 0.0272519 0.175025
\r
137 910.000000 70.000000 11.59122 128.2486 0.031389 0.20304
\r
138 920.000000 70.000000 11.476048 128.83995 0.0151229 0.0995597
\r
139 930.000000 70.000000 11.318684 129.24554 0.0372418 0.249785
\r
140 940.000000 70.000000 11.271938 129.54042 0.0237988 0.160915
\r
141 950.000000 70.000000 11.219491 129.70987 0.0235667 0.160428
\r
142 960.000000 70.000000 11.066045 129.68419 0.040067 0.276133
\r
143 970.000000 70.000000 10.998028 130.62659 0.0392782 0.276041
\r
144 980.000000 70.000000 10.951096 130.49699 0.0136107 0.0958426
\r
145 990.000000 70.000000 10.8336 130.78432 0.0226351 0.16166
\r
146 1000.000000 70.000000 10.784783 130.92349 0.0350263 0.251716
\r
147 300.000000 75.000000 38.709957 61.858543 2.60764 5.39463
\r
148 310.000000 75.000000 37.110138 69.446404 1.1505 2.55002
\r
149 320.000000 75.000000 36.201027 70.957832 0.764129 1.69531
\r
150 330.000000 75.000000 36.085796 73.067947 0.507318 1.11343
\r
151 340.000000 75.000000 34.855686 73.722458 0.36394 0.807679
\r
152 350.000000 75.000000 34.407501 75.952759 0.264764 0.585346
\r
153 360.000000 75.000000 34.217049 78.417542 0.195604 0.429287
\r
154 370.000000 75.000000 32.816723 84.341827 0.146358 0.321968
\r
155 380.000000 75.000000 30.404612 86.66143 0.110707 0.252933
\r
156 390.000000 75.000000 28.350475 87.494614 0.0818363 0.195325
\r
157 400.000000 75.000000 26.708239 87.402939 0.0625294 0.15552
\r
158 410.000000 75.000000 25.408632 86.728317 0.0506822 0.130768
\r
159 420.000000 75.000000 24.252468 86.432953 0.0474466 0.126759
\r
160 430.000000 75.000000 23.367455 86.402466 0.0419194 0.115259
\r
161 440.000000 75.000000 22.518972 85.913918 0.0351959 0.0993948
\r
162 450.000000 75.000000 21.783003 85.536049 0.0301639 0.0877413
\r
163 460.000000 75.000000 21.018061 85.075111 0.0269445 0.0805461
\r
164 470.000000 75.000000 20.433996 84.874687 0.0230244 0.0706255
\r
165 480.000000 75.000000 19.8025 84.708588 0.0261415 0.0821925
\r
166 490.000000 75.000000 19.287519 84.418793 0.025585 0.0824208
\r
167 500.000000 75.000000 18.807037 84.161964 0.0246439 0.0810506
\r
168 510.000000 75.000000 18.260469 83.854095 0.0237012 0.0798112
\r
169 520.000000 75.000000 17.838982 83.422989 0.0240263 0.0829098
\r
170 530.000000 75.000000 17.393816 83.336601 0.0234648 0.0827034
\r
171 540.000000 75.000000 17.002623 82.984848 0.023209 0.0833845
\r
172 550.000000 75.000000 16.626856 82.657082 0.023963 0.0880981
\r
173 560.000000 75.000000 16.287931 82.379005 0.023844 0.0892686
\r
174 570.000000 75.000000 15.960867 82.203026 0.0238807 0.0909695
\r
175 580.000000 75.000000 15.549028 81.890907 0.0249588 0.0975834
\r
176 590.000000 75.000000 15.28272 81.64534 0.0253694 0.100743
\r
177 600.000000 75.000000 14.993265 81.43705 0.027097 0.109422
\r
178 610.000000 75.000000 14.652594 81.205109 0.0264375 0.108882
\r
179 620.000000 75.000000 14.408806 80.968834 0.0282682 0.118743
\r
180 630.000000 75.000000 14.125786 80.731819 0.0292541 0.125151
\r
181 640.000000 75.000000 13.931471 80.653488 0.0311918 0.135094
\r
182 650.000000 75.000000 13.6083 80.012108 0.0322165 0.142638
\r
183 660.000000 75.000000 13.430552 80.04805 0.0362868 0.163058
\r
184 670.000000 75.000000 13.173094 79.766754 0.0358998 0.164309
\r
185 680.000000 75.000000 12.928904 79.50206 0.0361731 0.168471
\r
186 690.000000 75.000000 12.800816 79.314117 0.0357706 0.168156
\r
187 700.000000 75.000000 12.559834 79.120911 0.0403393 0.192887
\r
188 710.000000 75.000000 12.393524 79.034027 0.0448335 0.21783
\r
189 720.000000 75.000000 12.160849 79.00235 0.045264 0.223791
\r
190 730.000000 75.000000 12.038267 78.769394 0.0475708 0.237543
\r
191 740.000000 75.000000 11.852643 78.301941 0.0502012 0.254592
\r
192 750.000000 75.000000 11.673183 77.84256 0.0540234 0.278138
\r
193 760.000000 75.000000 11.55363 77.892494 0.0599815 0.311517
\r
194 770.000000 75.000000 11.27059 77.33989 0.0694211 0.371089
\r
195 780.000000 75.000000 11.185266 77.123093 0.0902722 0.48635
\r
196 790.000000 75.000000 11.115338 76.792496 0.083519 0.453158
\r
197 800.000000 75.000000 10.803584 77.626678 0.0897857 0.498112
\r
198 810.000000 75.000000 10.716261 78.268036 0.39789 2.21647
\r
199 820.000000 75.000000 10.717045 76.998123 0.0984361 0.551
\r
200 830.000000 75.000000 10.573862 76.374908 0.0723103 0.410558
\r
201 840.000000 75.000000 10.240362 77.131897 0.141136 0.827085
\r
202 850.000000 75.000000 10.468226 73.684479 0.283298 1.65206
\r
203 860.000000 75.000000 10.288066 77.854065 0.240291 1.39818
\r
204 870.000000 75.000000 9.8781214 75.391594 0.133754 0.815986
\r
205 880.000000 75.000000 9.9390869 75.610374 0.030523 0.185001
\r
206 890.000000 75.000000 9.8243256 75.19088 0.0348013 0.213544
\r
207 900.000000 75.000000 9.6688776 74.923538 0.0285148 0.177671
\r
208 910.000000 75.000000 9.5634708 74.873489 0.0303213 0.190785
\r
209 920.000000 75.000000 9.4590597 74.545303 0.0143485 0.0912844
\r
210 930.000000 75.000000 9.4019194 73.805389 0.0364418 0.233909
\r
211 940.000000 75.000000 9.2512331 74.132538 0.0229887 0.149337
\r
212 950.000000 75.000000 9.1042128 73.796303 0.0227741 0.150184
\r
213 960.000000 75.000000 9.137454 73.640488 0.0396259 0.260739
\r
214 970.000000 75.000000 8.9386549 73.50486 0.0382928 0.256728
\r
215 980.000000 75.000000 8.8753357 73.275307 0.0129894 0.0876942
\r
216 990.000000 75.000000 8.8170862 73.031212 0.0219581 0.149226
\r
217 1000.000000 75.000000 8.6929321 72.957352 0.0347555 0.238965