Automatic commit. Wed Oct 3 00:00:07 WST 2012
[matches/honours.git] / research / ellipsometry / WVASE32 / DAT / 200309 calibration.dat
1 \r
2 VASEmethod[EllipsometerType=0, Isotropic, AutoRetarder=0, TrackPol=1, Pol>=0, Revs=10, AutoSlit=2000, WVASE=3.698, HardVer=6.256, Fri Mar 20 12:52:21 2009]\r
3 Original[200309 calibration.dat]\r
4 nm\r
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6 310.000000      65.000000       37.012939       106.24937       0.354392        0.767596\r
7 320.000000      65.000000       36.408531       108.2618        0.354361        0.780213\r
8 330.000000      65.000000       35.498158       110.48534       0.394257        0.889799\r
9 340.000000      65.000000       35.229389       109.45363       0.430926        0.969056\r
10 350.000000      65.000000       34.707474       112.65421       0.453593        1.04987\r
11 360.000000      65.000000       35.468773       114.87025       0.464156        1.08248\r
12 370.000000      65.000000       34.042278       121.90384       0.461368        1.1707\r
13 380.000000      65.000000       32.389095       125.00015       0.121924        0.328596\r
14 390.000000      65.000000       30.979715       125.99662       0.0896466       0.250817\r
15 400.000000      65.000000       29.545334       127.47459       0.0676572       0.198504\r
16 410.000000      65.000000       28.499798       128.52176       0.0547028       0.166631\r
17 420.000000      65.000000       27.674088       128.87872       0.0510086       0.159234\r
18 430.000000      65.000000       26.909964       129.56807       0.0440118       0.141266\r
19 440.000000      65.000000       26.170881       130.41005       0.0383355       0.127143\r
20 450.000000      65.000000       25.747746       130.97693       0.0317251       0.107306\r
21 460.000000      65.000000       24.994385       132.02618       0.0291199       0.102321\r
22 470.000000      65.000000       24.535061       132.32008       0.0241621       0.0864269\r
23 480.000000      65.000000       24.161587       133.12219       0.0281167       0.103131\r
24 490.000000      65.000000       23.697189       133.51541       0.0266411       0.0997737\r
25 500.000000      65.000000       23.332775       134.28128       0.0258097       0.0990372\r
26 510.000000      65.000000       22.95937        135.02333       0.0256685       0.101089\r
27 520.000000      65.000000       22.562248       135.36763       0.0247919       0.0995491\r
28 530.000000      65.000000       22.128733       135.5708        0.0242581       0.0992141\r
29 540.000000      65.000000       21.968805       136.33252       0.0248497       0.103722\r
30 550.000000      65.000000       21.68445        136.84262       0.0245736       0.104611\r
31 560.000000      65.000000       21.429188       137.28864       0.0244921       0.106128\r
32 570.000000      65.000000       21.162088       137.92865       0.024517        0.108612\r
33 580.000000      65.000000       20.955164       138.18001       0.024738        0.110982\r
34 590.000000      65.000000       20.70068        138.93044       0.0257988       0.118739\r
35 600.000000      65.000000       20.487354       139.56783       0.0274541       0.129082\r
36 610.000000      65.000000       20.258278       139.70659       0.0268785       0.127898\r
37 620.000000      65.000000       20.089788       140.32703       0.027038        0.131215\r
38 630.000000      65.000000       19.861359       140.67993       0.0278596       0.137484\r
39 640.000000      65.000000       19.773659       141.33867       0.0306695       0.154188\r
40 650.000000      65.000000       19.672394       141.59518       0.031655        0.160726\r
41 660.000000      65.000000       19.265381       142.51921       0.0331871       0.175047\r
42 670.000000      65.000000       19.288908       142.28564       0.0331476       0.173739\r
43 680.000000      65.000000       19.063673       142.49889       0.0332381       0.176774\r
44 690.000000      65.000000       18.991964       143.34854       0.0329833       0.179458\r
45 700.000000      65.000000       18.807739       144.11867       0.0368158       0.205675\r
46 710.000000      65.000000       18.730345       143.84785       0.039752        0.221547\r
47 720.000000      65.000000       18.643919       144.24936       0.0404942       0.228773\r
48 730.000000      65.000000       18.572039       144.39351       0.0423867       0.241097\r
49 740.000000      65.000000       18.431059       145.16653       0.044599        0.260257\r
50 750.000000      65.000000       18.191067       146.01108       0.0476105       0.287056\r
51 760.000000      65.000000       18.190691       145.94479       0.0528515       0.318114\r
52 770.000000      65.000000       18.079489       145.85513       0.0567508       0.342576\r
53 780.000000      65.000000       17.865234       145.99344       0.0735645       0.450193\r
54 790.000000      65.000000       17.972448       147.94475       0.0683776       0.43874\r
55 800.000000      65.000000       17.892422       147.71941       0.0747785       0.478631\r
56 810.000000      65.000000       17.722172       147.52493       0.0891944       0.572818\r
57 820.000000      65.000000       17.646784       148.12816       0.0526664       0.345214\r
58 830.000000      65.000000       17.593708       148.68057       0.0246011       0.16423\r
59 840.000000      65.000000       17.650358       148.44598       0.0594956       0.393424\r
60 850.000000      65.000000       17.531597       146.78551       0.204885        1.30193\r
61 860.000000      65.000000       17.468166       149.18262       0.173473        1.18235\r
62 870.000000      65.000000       17.405762       150.17241       0.0995849       0.701269\r
63 880.000000      65.000000       17.254637       149.79092       0.0245511       0.172205\r
64 890.000000      65.000000       17.200626       149.63416       0.026796        0.187584\r
65 900.000000      65.000000       17.13929        149.94412       0.0226583       0.160596\r
66 910.000000      65.000000       17.164499       150.1657        0.0239968       0.17101\r
67 920.000000      65.000000       17.028393       151.00945       0.0138228       0.101816\r
68 930.000000      65.000000       16.90793        151.55621       0.0281683       0.212435\r
69 940.000000      65.000000       16.921442       151.46736       0.0190963       0.143506\r
70 950.000000      65.000000       16.862715       151.58423       0.0189003       0.143\r
71 960.000000      65.000000       16.828993       152.0829        0.0299407       0.230647\r
72 970.000000      65.000000       16.810112       151.91223       0.02929 0.224592\r
73 980.000000      65.000000       16.698383       152.3221        0.0129529       0.101259\r
74 990.000000      65.000000       16.62587        152.60986       0.0191514       0.151814\r
75 1000.000000     65.000000       16.621939       152.49522       0.0276873       0.21868\r
76 300.000000      70.000000       38.245701       91.371368       2.38627 4.62845\r
77 310.000000      70.000000       36.226662       91.916428       1.31648 2.75559\r
78 320.000000      70.000000       35.915401       91.439713       0.832895        1.75363\r
79 330.000000      70.000000       35.066319       94.271309       0.569944        1.21428\r
80 340.000000      70.000000       34.98708        94.832329       0.399226        0.85285\r
81 350.000000      70.000000       34.788876       96.536613       0.284541        0.611182\r
82 360.000000      70.000000       34.440437       98.27607        0.210242        0.455374\r
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84 380.000000      70.000000       31.063128       108.69357       0.117715        0.280024\r
85 390.000000      70.000000       29.09749        110.13833       0.0873358       0.218306\r
86 400.000000      70.000000       27.418058       110.57281       0.0663256       0.172934\r
87 410.000000      70.000000       26.236969       110.80885       0.0538191       0.145021\r
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89 430.000000      70.000000       24.332159       111.77073       0.0435598       0.124535\r
90 440.000000      70.000000       23.512402       112.11612       0.0381661       0.112537\r
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92 460.000000      70.000000       22.077993       112.84069       0.0290595       0.0904718\r
93 470.000000      70.000000       21.510506       113.23542       0.0238327       0.0758873\r
94 480.000000      70.000000       20.884485       113.55436       0.0280586       0.0918551\r
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96 500.000000      70.000000       19.909584       114.24429       0.0263172       0.0901119\r
97 510.000000      70.000000       19.410147       114.70806       0.0253856       0.0890374\r
98 520.000000      70.000000       19.076059       115.34271       0.0253796       0.0908984\r
99 530.000000      70.000000       18.69227        115.56177       0.0247733       0.0903912\r
100 540.000000      70.000000       18.299736       115.92731       0.0245325       0.0913492\r
101 550.000000      70.000000       17.963753       116.13773       0.0250969       0.0952673\r
102 560.000000      70.000000       17.51944        116.6283        0.0248878       0.0968942\r
103 570.000000      70.000000       17.223402       117.15387       0.0249812       0.0991003\r
104 580.000000      70.000000       17.034824       117.45456       0.0264003       0.106203\r
105 590.000000      70.000000       16.637815       117.74017       0.0265199       0.109159\r
106 600.000000      70.000000       16.313896       118.11952       0.0282478       0.118643\r
107 610.000000      70.000000       16.101849       118.61246       0.0277282       0.118296\r
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109 630.000000      70.000000       15.616579       119.00352       0.0301916       0.133089\r
110 640.000000      70.000000       15.296479       119.46255       0.0319053       0.143834\r
111 650.000000      70.000000       15.126873       119.84875       0.0331064       0.151262\r
112 660.000000      70.000000       14.983418       120.3122        0.0353038       0.163382\r
113 670.000000      70.000000       14.747875       120.44263       0.0370405       0.17449\r
114 680.000000      70.000000       14.51644        120.8138        0.0371207       0.178035\r
115 690.000000      70.000000       14.424338       121.45683       0.0369715       0.179536\r
116 700.000000      70.000000       14.188544       121.81809       0.0415035       0.205282\r
117 710.000000      70.000000       14.030908       122.0467        0.0431078       0.21584\r
118 720.000000      70.000000       13.892106       122.56139       0.0439905       0.223432\r
119 730.000000      70.000000       13.714857       122.83214       0.048782        0.252016\r
120 740.000000      70.000000       13.55266        122.79467       0.0514666       0.268663\r
121 750.000000      70.000000       13.464818       123.38715       0.0556007       0.293929\r
122 760.000000      70.000000       13.220644       123.57529       0.0609823       0.328424\r
123 770.000000      70.000000       13.104208       124.24695       0.0658351       0.360191\r
124 780.000000      70.000000       12.92081        123.83149       0.08641 0.476327\r
125 790.000000      70.000000       12.922812       124.83305       0.0797872       0.445061\r
126 800.000000      70.000000       12.693616       125.04355       0.0870975       0.494772\r
127 810.000000      70.000000       12.716724       127.99628       0.323836        1.86734\r
128 820.000000      70.000000       12.368945       125.02634       0.101483        0.592073\r
129 830.000000      70.000000       12.295691       126.07673       0.0738579       0.43897\r
130 840.000000      70.000000       12.506002       125.49854       0.137706        0.799943\r
131 850.000000      70.000000       12.152958       127.54151       0.262656        1.60829\r
132 860.000000      70.000000       12.332942       128.18347       0.22921 1.3969\r
133 870.000000      70.000000       11.959177       127.68213       0.127071        0.790973\r
134 880.000000      70.000000       11.850806       127.28991       0.0297371       0.185643\r
135 890.000000      70.000000       11.724416       128.06912       0.0328113       0.208996\r
136 900.000000      70.000000       11.647614       128.24506       0.0272519       0.175025\r
137 910.000000      70.000000       11.59122        128.2486        0.031389        0.20304\r
138 920.000000      70.000000       11.476048       128.83995       0.0151229       0.0995597\r
139 930.000000      70.000000       11.318684       129.24554       0.0372418       0.249785\r
140 940.000000      70.000000       11.271938       129.54042       0.0237988       0.160915\r
141 950.000000      70.000000       11.219491       129.70987       0.0235667       0.160428\r
142 960.000000      70.000000       11.066045       129.68419       0.040067        0.276133\r
143 970.000000      70.000000       10.998028       130.62659       0.0392782       0.276041\r
144 980.000000      70.000000       10.951096       130.49699       0.0136107       0.0958426\r
145 990.000000      70.000000       10.8336 130.78432       0.0226351       0.16166\r
146 1000.000000     70.000000       10.784783       130.92349       0.0350263       0.251716\r
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148 310.000000      75.000000       37.110138       69.446404       1.1505  2.55002\r
149 320.000000      75.000000       36.201027       70.957832       0.764129        1.69531\r
150 330.000000      75.000000       36.085796       73.067947       0.507318        1.11343\r
151 340.000000      75.000000       34.855686       73.722458       0.36394 0.807679\r
152 350.000000      75.000000       34.407501       75.952759       0.264764        0.585346\r
153 360.000000      75.000000       34.217049       78.417542       0.195604        0.429287\r
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155 380.000000      75.000000       30.404612       86.66143        0.110707        0.252933\r
156 390.000000      75.000000       28.350475       87.494614       0.0818363       0.195325\r
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158 410.000000      75.000000       25.408632       86.728317       0.0506822       0.130768\r
159 420.000000      75.000000       24.252468       86.432953       0.0474466       0.126759\r
160 430.000000      75.000000       23.367455       86.402466       0.0419194       0.115259\r
161 440.000000      75.000000       22.518972       85.913918       0.0351959       0.0993948\r
162 450.000000      75.000000       21.783003       85.536049       0.0301639       0.0877413\r
163 460.000000      75.000000       21.018061       85.075111       0.0269445       0.0805461\r
164 470.000000      75.000000       20.433996       84.874687       0.0230244       0.0706255\r
165 480.000000      75.000000       19.8025 84.708588       0.0261415       0.0821925\r
166 490.000000      75.000000       19.287519       84.418793       0.025585        0.0824208\r
167 500.000000      75.000000       18.807037       84.161964       0.0246439       0.0810506\r
168 510.000000      75.000000       18.260469       83.854095       0.0237012       0.0798112\r
169 520.000000      75.000000       17.838982       83.422989       0.0240263       0.0829098\r
170 530.000000      75.000000       17.393816       83.336601       0.0234648       0.0827034\r
171 540.000000      75.000000       17.002623       82.984848       0.023209        0.0833845\r
172 550.000000      75.000000       16.626856       82.657082       0.023963        0.0880981\r
173 560.000000      75.000000       16.287931       82.379005       0.023844        0.0892686\r
174 570.000000      75.000000       15.960867       82.203026       0.0238807       0.0909695\r
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176 590.000000      75.000000       15.28272        81.64534        0.0253694       0.100743\r
177 600.000000      75.000000       14.993265       81.43705        0.027097        0.109422\r
178 610.000000      75.000000       14.652594       81.205109       0.0264375       0.108882\r
179 620.000000      75.000000       14.408806       80.968834       0.0282682       0.118743\r
180 630.000000      75.000000       14.125786       80.731819       0.0292541       0.125151\r
181 640.000000      75.000000       13.931471       80.653488       0.0311918       0.135094\r
182 650.000000      75.000000       13.6083 80.012108       0.0322165       0.142638\r
183 660.000000      75.000000       13.430552       80.04805        0.0362868       0.163058\r
184 670.000000      75.000000       13.173094       79.766754       0.0358998       0.164309\r
185 680.000000      75.000000       12.928904       79.50206        0.0361731       0.168471\r
186 690.000000      75.000000       12.800816       79.314117       0.0357706       0.168156\r
187 700.000000      75.000000       12.559834       79.120911       0.0403393       0.192887\r
188 710.000000      75.000000       12.393524       79.034027       0.0448335       0.21783\r
189 720.000000      75.000000       12.160849       79.00235        0.045264        0.223791\r
190 730.000000      75.000000       12.038267       78.769394       0.0475708       0.237543\r
191 740.000000      75.000000       11.852643       78.301941       0.0502012       0.254592\r
192 750.000000      75.000000       11.673183       77.84256        0.0540234       0.278138\r
193 760.000000      75.000000       11.55363        77.892494       0.0599815       0.311517\r
194 770.000000      75.000000       11.27059        77.33989        0.0694211       0.371089\r
195 780.000000      75.000000       11.185266       77.123093       0.0902722       0.48635\r
196 790.000000      75.000000       11.115338       76.792496       0.083519        0.453158\r
197 800.000000      75.000000       10.803584       77.626678       0.0897857       0.498112\r
198 810.000000      75.000000       10.716261       78.268036       0.39789 2.21647\r
199 820.000000      75.000000       10.717045       76.998123       0.0984361       0.551\r
200 830.000000      75.000000       10.573862       76.374908       0.0723103       0.410558\r
201 840.000000      75.000000       10.240362       77.131897       0.141136        0.827085\r
202 850.000000      75.000000       10.468226       73.684479       0.283298        1.65206\r
203 860.000000      75.000000       10.288066       77.854065       0.240291        1.39818\r
204 870.000000      75.000000       9.8781214       75.391594       0.133754        0.815986\r
205 880.000000      75.000000       9.9390869       75.610374       0.030523        0.185001\r
206 890.000000      75.000000       9.8243256       75.19088        0.0348013       0.213544\r
207 900.000000      75.000000       9.6688776       74.923538       0.0285148       0.177671\r
208 910.000000      75.000000       9.5634708       74.873489       0.0303213       0.190785\r
209 920.000000      75.000000       9.4590597       74.545303       0.0143485       0.0912844\r
210 930.000000      75.000000       9.4019194       73.805389       0.0364418       0.233909\r
211 940.000000      75.000000       9.2512331       74.132538       0.0229887       0.149337\r
212 950.000000      75.000000       9.1042128       73.796303       0.0227741       0.150184\r
213 960.000000      75.000000       9.137454        73.640488       0.0396259       0.260739\r
214 970.000000      75.000000       8.9386549       73.50486        0.0382928       0.256728\r
215 980.000000      75.000000       8.8753357       73.275307       0.0129894       0.0876942\r
216 990.000000      75.000000       8.8170862       73.031212       0.0219581       0.149226\r
217 1000.000000     75.000000       8.6929321       72.957352       0.0347555       0.238965

UCC git Repository :: git.ucc.asn.au