2 VASEmethod[EllipsometerType=5, Isotropic+Depolarization, AutoRetarder=1, TrackPol=1, ZoneAve=1, Revs=100, MaxRevs=200, I_Threshold=0.40, I_MinUsable=0.005, AutoSlit=2000, WVASE=3.632, HardVer=6.256, Wed Feb 04 17:53:57 2009]
\r
3 Original[2009.02.04.ps1.2.dat]
\r
5 980.000000 45.000000 41.571487 168.98195 2.50488 10.3588
\r
6 1475.000000 55.000000 35.38525 164.2146 3.74202 17.022
\r
7 885.000000 60.000000 33.885788 146.95258 1.40487 5.47193
\r
8 980.000000 60.000000 33.896297 143.71684 0.86867 3.18045
\r
9 985.000000 60.000000 33.880795 143.92688 1.63773 5.56191
\r
10 1485.000000 60.000000 38.220013 160.05177 3.96468 16.0013
\r
11 885.000000 65.000000 32.099506 130.6452 1.1967 4.2482
\r
12 995.000000 65.000000 31.276415 134.31642 0.974493 3.75051
\r
13 885.000000 70.000000 29.447079 103.63595 0.973174 3.61013
\r
14 980.000000 70.000000 28.23245 108.49057 0.63847 2.63037
\r
15 985.000000 70.000000 29.37966 107.81089 1.44814 6.68356
\r
16 995.000000 70.000000 29.109356 110.67876 0.645304 2.76928
\r
17 880.000000 75.000000 31.085859 50.478096 1.85873 8.05766
\r
18 980.000000 75.000000 30.060087 59.842224 0.936234 4.81974
\r
19 985.000000 75.000000 30.00868 60.748051 1.23134 5.47145
\r
20 995.000000 75.000000 30.366653 57.163521 0.51299 2.55127
\r
21 dpolE 980.000000 45.000000 26.1971 18.3119
\r
22 dpolE 1475.000000 55.000000 22.758 26.5139
\r
23 dpolE 885.000000 60.000000 19.7962 11.5441
\r
24 dpolE 980.000000 60.000000 13.4749 7.7923
\r
25 dpolE 985.000000 60.000000 0.192682 15.9491
\r
26 dpolE 1485.000000 60.000000 25.4232 30.412
\r
27 dpolE 885.000000 65.000000 18.4212 10.9239
\r
28 dpolE 995.000000 65.000000 24.8581 7.59377
\r
29 dpolE 885.000000 70.000000 28.4978 8.17544
\r
30 dpolE 980.000000 70.000000 32.2552 4.87151
\r
31 dpolE 985.000000 70.000000 42.8977 10.1805
\r
32 dpolE 995.000000 70.000000 37.1444 4.8221
\r
33 dpolE 880.000000 75.000000 37.2915 14.0314
\r
34 dpolE 980.000000 75.000000 48.8879 5.84622
\r
35 dpolE 985.000000 75.000000 39.4845 9.02976
\r
36 dpolE 995.000000 75.000000 45.4843 3.40931