2 VASEmethod[EllipsometerType=5, Isotropic+Depolarization, AutoRetarder=1, TrackPol=1, ZoneAve=1, Revs=100, MaxRevs=200, I_Threshold=0.40, I_MinUsable=0.005, AutoSlit=2000, WVASE=3.632, HardVer=6.256, Wed Feb 04 14:58:53 2009]
\r
3 Original[2009.02.04.ps1.dat]
\r
5 2.226670 65.000000 33.847004 123.75099 1.00655 3.11999
\r
6 2.176670 65.000000 32.797073 121.22191 0.664781 2.00682
\r
7 2.126670 65.000000 32.286823 122.22387 1.22387 3.83795
\r
8 2.076670 65.000000 33.167488 124.54338 0.958557 2.91993
\r
9 2.026670 65.000000 32.756382 126.09803 0.900165 3.17176
\r
10 1.976670 65.000000 32.273407 126.34437 0.625682 2.09557
\r
11 1.926670 65.000000 31.565969 126.49715 0.843309 2.68865
\r
12 1.876670 65.000000 32.300064 129.31825 1.23046 4.21249
\r
13 1.776670 65.000000 32.548576 129.91548 0.706404 2.42873
\r
14 1.726670 65.000000 33.879677 129.71642 0.816453 2.68988
\r
15 1.676670 65.000000 32.149529 132.85548 0.837425 2.90724
\r
16 1.626670 65.000000 31.769554 131.75871 0.741573 2.60949
\r
17 1.526670 65.000000 32.40765 132.26173 1.18009 3.813
\r
18 1.476670 65.000000 32.102818 137.28647 0.948629 3.51499
\r
19 1.426670 65.000000 32.621548 133.1665 0.525028 1.92697
\r
20 1.376670 65.000000 32.387707 134.66545 0.216371 0.789749
\r
21 1.326670 65.000000 32.342014 135.6086 0.222637 0.806015
\r
22 1.276670 65.000000 32.763687 136.59583 0.251393 0.952172
\r
23 1.226670 65.000000 32.653 137.01543 0.202372 0.757044
\r
24 1.176670 65.000000 33.686604 135.35805 0.86113 2.82754
\r
25 1.126670 65.000000 32.415424 136.53212 0.659692 2.25947
\r
26 1.076670 65.000000 33.296513 139.68422 1.19331 4.34069
\r
27 1.026670 65.000000 33.102146 139.95377 0.809983 2.94346
\r
28 0.976670 65.000000 33.511272 140.85161 0.419645 1.46334
\r
29 0.926670 65.000000 33.8419 142.85185 0.624443 2.319
\r
30 0.876670 65.000000 33.392708 143.22075 0.613613 2.21008
\r
31 0.826670 65.000000 33.841366 144.7878 0.60684 2.32955
\r
32 2.876670 70.000000 31.308437 91.28167 1.27426 3.66185
\r
33 2.826670 70.000000 31.320625 91.893074 1.28417 3.52906
\r
34 2.776670 70.000000 32.172821 93.634262 0.737602 1.99521
\r
35 2.726670 70.000000 31.286594 92.471779 0.61519 1.64819
\r
36 2.676670 70.000000 31.737062 97.180786 0.455196 1.28923
\r
37 2.626670 70.000000 31.721561 96.410187 0.545995 1.53317
\r
38 2.576670 70.000000 31.739899 98.436897 0.366887 1.02835
\r
39 2.526670 70.000000 31.241234 99.013351 0.471823 1.35044
\r
40 2.476670 70.000000 31.589544 99.662994 0.259602 0.703241
\r
41 2.426670 70.000000 31.210335 99.960732 0.312134 0.885323
\r
42 2.376670 70.000000 31.369291 101.3704 0.319123 0.916063
\r
43 2.326670 70.000000 31.106922 102.28564 0.321734 0.920359
\r
44 2.276670 70.000000 30.761595 102.69726 0.381145 1.08162
\r
45 2.226670 70.000000 30.940565 103.62845 0.330282 0.928962
\r
46 2.176670 70.000000 30.699295 104.46592 0.317648 0.931862
\r
47 2.126670 70.000000 30.819511 105.74262 0.370975 1.07642
\r
48 2.076670 70.000000 30.688656 106.8796 0.310751 0.906828
\r
49 2.026670 70.000000 30.599382 107.25543 0.275893 0.812097
\r
50 1.976670 70.000000 30.357151 108.22855 0.275256 0.825
\r
51 1.926670 70.000000 30.509935 108.94832 0.324171 0.969224
\r
52 1.876670 70.000000 30.342607 110.76012 0.278869 0.846644
\r
53 1.826670 70.000000 30.141706 111.20798 0.313191 0.962434
\r
54 1.776670 70.000000 30.476131 112.1601 0.199116 0.630479
\r
55 1.726670 70.000000 30.278788 112.25616 0.300294 0.921517
\r
56 1.676670 70.000000 30.044905 114.33727 0.319556 1.04911
\r
57 1.626670 70.000000 30.400618 114.47429 0.278243 0.863891
\r
58 1.576670 70.000000 30.258745 115.11227 0.365716 1.17612
\r
59 1.526670 70.000000 30.073843 116.79395 0.571348 1.83085
\r
60 1.476670 70.000000 30.259676 116.52027 0.344535 1.1423
\r
61 1.426670 70.000000 30.532892 117.87929 0.280219 0.932748
\r
62 1.376670 70.000000 30.500063 118.76593 0.166558 0.569303
\r
63 1.326670 70.000000 30.434858 119.57703 0.190801 0.567807
\r
64 1.276670 70.000000 30.538076 119.96886 0.171439 0.586378
\r
65 1.226670 70.000000 30.686417 120.74664 0.179468 0.641566
\r
66 1.176670 70.000000 30.868603 124.65762 0.309515 1.01295
\r
67 1.126670 70.000000 30.855375 126.48773 0.269876 0.901115
\r
68 1.076670 70.000000 31.065905 127.15695 0.376241 1.29225
\r
69 1.026670 70.000000 31.021004 127.83373 0.284502 0.969853
\r
70 0.976670 70.000000 31.121901 130.00558 0.145216 0.490558
\r
71 0.926670 70.000000 30.948618 131.71713 0.290652 1.01163
\r
72 0.876670 70.000000 31.427298 131.93779 0.219603 0.751246
\r
73 0.826670 70.000000 31.723328 133.15776 0.275511 0.997038
\r
74 3.226670 75.000000 33.723637 65.060211 1.14608 3.64964
\r
75 3.176670 75.000000 32.874783 65.246521 0.780037 2.22597
\r
76 3.126670 75.000000 32.781891 66.379738 0.585793 1.68298
\r
77 3.076670 75.000000 32.977982 66.960815 0.59528 1.67244
\r
78 3.026670 75.000000 32.796944 67.930069 0.41297 1.13926
\r
79 2.976670 75.000000 33.082493 68.067238 0.314066 0.900567
\r
80 2.926670 75.000000 32.4207 69.479889 0.305559 0.872003
\r
81 2.876670 75.000000 32.455158 70.141174 0.295838 0.83816
\r
82 2.826670 75.000000 32.292667 70.742455 0.236351 0.670884
\r
83 2.776670 75.000000 32.173729 71.597672 0.198562 0.555729
\r
84 2.726670 75.000000 32.007652 72.480957 0.211815 0.590197
\r
85 2.676670 75.000000 31.981497 73.061913 0.184138 0.522734
\r
86 2.626670 75.000000 31.928326 73.433792 0.146413 0.412263
\r
87 2.576670 75.000000 31.684303 74.495087 0.178622 0.5056
\r
88 2.526670 75.000000 31.578629 75.575233 0.172966 0.483358
\r
89 2.476670 75.000000 31.424248 75.921646 0.160291 0.44704
\r
90 2.426670 75.000000 31.336527 76.809387 0.156908 0.447653
\r
91 2.376670 75.000000 31.242428 77.279228 0.148722 0.414426
\r
92 2.326670 75.000000 31.039305 78.420692 0.153587 0.436602
\r
93 2.276670 75.000000 30.898069 79.369209 0.126185 0.355194
\r
94 2.226670 75.000000 30.70822 80.206856 0.163024 0.460199
\r
95 2.176670 75.000000 30.629305 81.43689 0.173336 0.496739
\r
96 2.126670 75.000000 30.456467 81.853111 0.150566 0.433621
\r
97 2.076670 75.000000 30.332874 82.890549 0.178183 0.509845
\r
98 2.026670 75.000000 30.264387 83.848228 0.110942 0.313873
\r
99 1.976670 75.000000 30.066324 84.449226 0.151288 0.443257
\r
100 1.926670 75.000000 29.987268 85.395264 0.146911 0.4261
\r
101 1.876670 75.000000 29.856495 86.535103 0.125899 0.36235
\r
102 1.826670 75.000000 29.84041 87.240601 0.157535 0.464074
\r
103 1.776670 75.000000 29.722572 88.403419 0.145964 0.433615
\r
104 1.726670 75.000000 29.56391 89.095924 0.158865 0.468197
\r
105 1.676670 75.000000 29.494534 90.145798 0.0975365 0.294947
\r
106 1.626670 75.000000 29.407406 90.95005 0.153927 0.467554
\r
107 1.576670 75.000000 29.281891 92.194618 0.22296 0.668076
\r
108 1.526670 75.000000 29.268127 93.456223 0.265934 0.822002
\r
109 1.476670 75.000000 29.09215 94.698357 0.118097 0.349858
\r
110 1.426670 75.000000 28.994297 95.645691 0.0992464 0.294749
\r
111 1.376670 75.000000 29.060913 96.389198 0.0949784 0.295394
\r
112 1.326670 75.000000 29.014046 97.769173 0.112087 0.358436
\r
113 1.276670 75.000000 28.995998 98.593521 0.0970957 0.301709
\r
114 1.226670 75.000000 29.072367 99.608994 0.117781 0.388606
\r
115 1.176670 75.000000 28.57929 105.29064 0.196306 0.603634
\r
116 1.126670 75.000000 28.737915 106.18324 0.100136 0.307538
\r
117 1.076670 75.000000 28.721769 107.5806 0.157582 0.490123
\r
118 1.026670 75.000000 28.756525 108.77923 0.13582 0.424837
\r
119 0.976670 75.000000 28.81255 110.53515 0.128978 0.411193
\r
120 0.926670 75.000000 28.886719 112.25406 0.141695 0.45807
\r
121 0.876670 75.000000 29.165188 113.6628 0.113292 0.369991
\r
122 0.826670 75.000000 29.400518 115.03814 0.168139 0.553269
\r
123 dpolE 2.226670 65.000000 5.33323 10.8235
\r
124 dpolE 2.176670 65.000000 2.8163 7.33653
\r
125 dpolE 2.126670 65.000000 6.84666 12.8273
\r
126 dpolE 2.076670 65.000000 2.00333 10.8949
\r
127 dpolE 2.026670 65.000000 13.058 9.39113
\r
128 dpolE 1.976670 65.000000 10.7828 6.09557
\r
129 dpolE 1.926670 65.000000 2.71378 8.79744
\r
130 dpolE 1.876670 65.000000 8.30134 12.5361
\r
131 dpolE 1.776670 65.000000 12.3204 6.86116
\r
132 dpolE 1.726670 65.000000 5.25238 8.85043
\r
133 dpolE 1.676670 65.000000 7.34366 8.18099
\r
134 dpolE 1.626670 65.000000 9.85212 7.23071
\r
135 dpolE 1.526670 65.000000 1.71444 11.8615
\r
136 dpolE 1.476670 65.000000 11.5635 8.6778
\r
137 dpolE 1.426670 65.000000 17.5353 4.66483
\r
138 dpolE 1.376670 65.000000 14.1529 1.98632
\r
139 dpolE 1.326670 65.000000 16.7432 1.97376
\r
140 dpolE 1.276670 65.000000 18.4849 2.26317
\r
141 dpolE 1.226670 65.000000 19.8575 1.76098
\r
142 dpolE 1.176670 65.000000 -1.49981 9.31859
\r
143 dpolE 1.126670 65.000000 6.69128 6.55501
\r
144 dpolE 1.076670 65.000000 4.31903 12.052
\r
145 dpolE 1.026670 65.000000 6.07846 8.00377
\r
146 dpolE 0.976670 65.000000 5.68479 4.07691
\r
147 dpolE 0.926670 65.000000 13.907 5.6168
\r
148 dpolE 0.876670 65.000000 5.81561 5.69238
\r
149 dpolE 0.826670 65.000000 16.801 5.25903
\r
150 dpolE 2.876670 70.000000 8.7611 13.4479
\r
151 dpolE 2.826670 70.000000 2.87931 14.273
\r
152 dpolE 2.776670 70.000000 4.08661 8.41531
\r
153 dpolE 2.726670 70.000000 1.23671 7.17608
\r
154 dpolE 2.676670 70.000000 5.77464 4.80786
\r
155 dpolE 2.626670 70.000000 5.39818 5.92644
\r
156 dpolE 2.576670 70.000000 6.30682 4.01241
\r
157 dpolE 2.526670 70.000000 7.90895 5.11446
\r
158 dpolE 2.476670 70.000000 1.83697 3.02453
\r
159 dpolE 2.426670 70.000000 3.72864 3.32163
\r
160 dpolE 2.376670 70.000000 6.60612 3.40833
\r
161 dpolE 2.326670 70.000000 4.33315 3.45807
\r
162 dpolE 2.276670 70.000000 4.09136 4.17825
\r
163 dpolE 2.226670 70.000000 3.42699 3.7471
\r
164 dpolE 2.176670 70.000000 5.73592 3.27523
\r
165 dpolE 2.126670 70.000000 4.18177 3.95558
\r
166 dpolE 2.076670 70.000000 4.74195 3.3356
\r
167 dpolE 2.026670 70.000000 6.77862 3.01952
\r
168 dpolE 1.976670 70.000000 5.23216 2.80468
\r
169 dpolE 1.926670 70.000000 5.97758 3.37032
\r
170 dpolE 1.876670 70.000000 6.76378 2.91427
\r
171 dpolE 1.826670 70.000000 6.99407 3.09568
\r
172 dpolE 1.776670 70.000000 12.4532 1.95277
\r
173 dpolE 1.726670 70.000000 7.59004 3.1088
\r
174 dpolE 1.676670 70.000000 13.2209 3.01639
\r
175 dpolE 1.626670 70.000000 7.02436 2.81429
\r
176 dpolE 1.576670 70.000000 11.9186 3.63411
\r
177 dpolE 1.526670 70.000000 10.0128 5.60089
\r
178 dpolE 1.476670 70.000000 12.962 3.32584
\r
179 dpolE 1.426670 70.000000 14.2033 2.58911
\r
180 dpolE 1.376670 70.000000 15.4764 1.5812
\r
181 dpolE 1.326670 70.000000 16.0785 2.0875
\r
182 dpolE 1.276670 70.000000 17.0266 1.54417
\r
183 dpolE 1.226670 70.000000 20.5897 1.597
\r
184 dpolE 1.176670 70.000000 8.35333 3.12416
\r
185 dpolE 1.126670 70.000000 9.45336 2.63534
\r
186 dpolE 1.076670 70.000000 7.08018 3.85734
\r
187 dpolE 1.026670 70.000000 8.74279 2.82488
\r
188 dpolE 0.976670 70.000000 8.02017 1.41658
\r
189 dpolE 0.926670 70.000000 10.02 2.72875
\r
190 dpolE 0.876670 70.000000 12.8044 1.91279
\r
191 dpolE 0.826670 70.000000 13.4329 2.50662
\r
192 dpolE 3.226670 75.000000 18.0635 11.2395
\r
193 dpolE 3.176670 75.000000 3.49753 8.52785
\r
194 dpolE 3.126670 75.000000 3.37752 6.48042
\r
195 dpolE 3.076670 75.000000 0.710085 6.83222
\r
196 dpolE 3.026670 75.000000 -2.35305 4.4945
\r
197 dpolE 2.976670 75.000000 4.29203 3.3145
\r
198 dpolE 2.926670 75.000000 3.01507 3.28043
\r
199 dpolE 2.876670 75.000000 3.52101 3.21555
\r
200 dpolE 2.826670 75.000000 3.65423 2.59376
\r
201 dpolE 2.776670 75.000000 1.64309 2.24202
\r
202 dpolE 2.726670 75.000000 2.45679 2.4121
\r
203 dpolE 2.676670 75.000000 3.23218 1.95613
\r
204 dpolE 2.626670 75.000000 3.03293 1.58181
\r
205 dpolE 2.576670 75.000000 4.1067 1.94496
\r
206 dpolE 2.526670 75.000000 3.23044 1.94598
\r
207 dpolE 2.476670 75.000000 3.80824 1.82439
\r
208 dpolE 2.426670 75.000000 4.09913 1.65901
\r
209 dpolE 2.376670 75.000000 4.90125 2.39938
\r
210 dpolE 2.326670 75.000000 4.78324 1.67088
\r
211 dpolE 2.276670 75.000000 4.42957 1.40101
\r
212 dpolE 2.226670 75.000000 5.5507 1.83274
\r
213 dpolE 2.176670 75.000000 4.57816 1.83236
\r
214 dpolE 2.126670 75.000000 5.74957 1.59649
\r
215 dpolE 2.076670 75.000000 5.99809 1.93209
\r
216 dpolE 2.026670 75.000000 5.49632 1.22953
\r
217 dpolE 1.976670 75.000000 6.48467 1.55576
\r
218 dpolE 1.926670 75.000000 6.49111 1.54787
\r
219 dpolE 1.876670 75.000000 6.28506 1.3505
\r
220 dpolE 1.826670 75.000000 6.26377 1.60216
\r
221 dpolE 1.776670 75.000000 8.66504 1.49114
\r
222 dpolE 1.726670 75.000000 8.41564 1.65491
\r
223 dpolE 1.676670 75.000000 9.09094 1.02595
\r
224 dpolE 1.626670 75.000000 9.75069 1.52903
\r
225 dpolE 1.576670 75.000000 8.58106 2.26431
\r
226 dpolE 1.526670 75.000000 12.1499 2.59877
\r
227 dpolE 1.476670 75.000000 12.3772 1.38068
\r
228 dpolE 1.426670 75.000000 12.6876 1.15122
\r
229 dpolE 1.376670 75.000000 12.7861 0.943495
\r
230 dpolE 1.326670 75.000000 13.6986 1.05385
\r
231 dpolE 1.276670 75.000000 14.7924 1.01808
\r
232 dpolE 1.226670 75.000000 16.9652 1.07701
\r
233 dpolE 1.176670 75.000000 6.88865 1.99917
\r
234 dpolE 1.126670 75.000000 7.62474 1.08721
\r
235 dpolE 1.076670 75.000000 7.71257 1.61031
\r
236 dpolE 1.026670 75.000000 7.56374 1.36173
\r
237 dpolE 0.976670 75.000000 9.519 1.25254
\r
238 dpolE 0.926670 75.000000 9.5571 1.36478
\r
239 dpolE 0.876670 75.000000 10.5829 1.07249
\r
240 dpolE 0.826670 75.000000 11.6695 1.60613