2 VASEmethod[EllipsometerType=5, Isotropic+Depolarization, AutoRetarder=1, TrackPol=1, Pol>=0, Revs=100, AutoSlit=2000, WVASE=3.698, HardVer=6.256, Tue Mar 30 12:50:56 2010]
\r
3 Original[300310 si.dat]
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