research/ellipsometry/WVASE32/DAT/300611_nick_si-r1-d.dat

   1 SiO2-sample1E\r
   2 RTmethod[PolRT=90.00, RevsRT=10, SlitRT=2000, AutoSlitMin=100, Interleave=Off, WVASE=3.698, HardVer=6.256, Thu Jun 30 14:07:10 2011]\r
   3 Original[300611_nick_si-r1-d.dat]\r
   4 nm\r
   5 sR      300.000000      60.000000       0.531373        0.0206275\r
   6 sR      310.000000      60.000000       0.561606        0.0212321\r
   7 sR      320.000000      60.000000       0.569627        0.0213925\r
   8 sR      330.000000      60.000000       0.581445        0.0216289\r
   9 sR      340.000000      60.000000       0.588998        0.02178\r
  10 sR      350.000000      60.000000       0.600789        0.0220158\r
  11 sR      360.000000      60.000000       0.60968 0.0221936\r
  12 sR      370.000000      60.000000       0.620441        0.0224088\r
  13 sR      380.000000      60.000000       0.628429        0.0225686\r
  14 sR      390.000000      60.000000       0.639694        0.0227939\r
  15 sR      400.000000      60.000000       0.648838        0.0229768\r
  16 sR      410.000000      60.000000       0.658242        0.0231648\r
  17 sR      420.000000      60.000000       0.666436        0.0233287\r
  18 sR      430.000000      60.000000       0.673104        0.0234621\r
  19 sR      440.000000      60.000000       0.679252        0.023585\r
  20 sR      450.000000      60.000000       0.687246        0.0237449\r
  21 sR      460.000000      60.000000       0.691927        0.0238385\r
  22 sR      470.000000      60.000000       0.698852        0.023977\r
  23 sR      480.000000      60.000000       0.704257        0.0240851\r
  24 sR      490.000000      60.000000       0.706956        0.0241391\r
  25 sR      500.000000      60.000000       0.712582        0.0242516\r
  26 sR      510.000000      60.000000       0.717645        0.0243529\r
  27 sR      520.000000      60.000000       0.721508        0.0244302\r
  28 sR      530.000000      60.000000       0.726019        0.0245204\r
  29 sR      540.000000      60.000000       0.730126        0.0246025\r
  30 sR      550.000000      60.000000       0.732397        0.0246479\r
  31 sR      560.000000      60.000000       0.737437        0.0247487\r
  32 sR      570.000000      60.000000       0.737874        0.0247575\r
  33 sR      580.000000      60.000000       0.738653        0.0247731\r
  34 sR      590.000000      60.000000       0.742991        0.0248598\r
  35 sR      600.000000      60.000000       0.747255        0.0249451\r
  36 sR      610.000000      60.000000       0.751851        0.025037\r
  37 sR      620.000000      60.000000       0.75401 0.0250802\r
  38 sR      630.000000      60.000000       0.756684        0.0251337\r
  39 sR      640.000000      60.000000       0.760711        0.0252142\r
  40 sR      650.000000      60.000000       0.764009        0.0252802\r
  41 sR      660.000000      60.000000       0.765527        0.0253105\r
  42 sR      670.000000      60.000000       0.769052        0.025381\r
  43 sR      680.000000      60.000000       0.770347        0.0254069\r
  44 sR      690.000000      60.000000       0.773321        0.0254664\r
  45 sR      700.000000      60.000000       0.774943        0.0254989\r
  46 sR      710.000000      60.000000       0.77693 0.0255386\r
  47 sR      720.000000      60.000000       0.778862        0.0255772\r
  48 sR      730.000000      60.000000       0.782531        0.0256506\r
  49 sR      740.000000      60.000000       0.782717        0.0256543\r
  50 sR      750.000000      60.000000       0.78532 0.0257064\r
  51 sR      760.000000      60.000000       0.786548        0.025731\r
  52 sR      770.000000      60.000000       0.790583        0.0258117\r
  53 sR      780.000000      60.000000       0.796359        0.0259272\r
  54 sR      790.000000      60.000000       0.800679        0.0260136\r
  55 sR      800.000000      60.000000       0.801021        0.0260204\r
  56 sR      300.000000      65.000000       0.57903 0.0215806\r
  57 sR      310.000000      65.000000       0.583827        0.0216765\r
  58 sR      320.000000      65.000000       0.586073        0.0217215\r
  59 sR      330.000000      65.000000       0.601234        0.0220247\r
  60 sR      340.000000      65.000000       0.604755        0.0220951\r
  61 sR      350.000000      65.000000       0.612747        0.0222549\r
  62 sR      360.000000      65.000000       0.621556        0.0224311\r
  63 sR      370.000000      65.000000       0.630256        0.0226051\r
  64 sR      380.000000      65.000000       0.636603        0.0227321\r
  65 sR      390.000000      65.000000       0.645212        0.0229042\r
  66 sR      400.000000      65.000000       0.653224        0.0230645\r
  67 sR      410.000000      65.000000       0.662421        0.0232484\r
  68 sR      420.000000      65.000000       0.669024        0.0233805\r
  69 sR      430.000000      65.000000       0.675132        0.0235026\r
  70 sR      440.000000      65.000000       0.679969        0.0235994\r
  71 sR      450.000000      65.000000       0.685355        0.0237071\r
  72 sR      460.000000      65.000000       0.69083 0.0238166\r
  73 sR      470.000000      65.000000       0.698782        0.0239756\r
  74 sR      480.000000      65.000000       0.702124        0.0240425\r
  75 sR      490.000000      65.000000       0.706311        0.0241262\r
  76 sR      500.000000      65.000000       0.71132 0.0242264\r
  77 sR      510.000000      65.000000       0.715826        0.0243165\r
  78 sR      520.000000      65.000000       0.719041        0.0243808\r
  79 sR      530.000000      65.000000       0.722384        0.0244477\r
  80 sR      540.000000      65.000000       0.726527        0.0245305\r
  81 sR      550.000000      65.000000       0.728423        0.0245685\r
  82 sR      560.000000      65.000000       0.731956        0.0246391\r
  83 sR      570.000000      65.000000       0.732017        0.0246403\r
  84 sR      580.000000      65.000000       0.731248        0.024625\r
  85 sR      590.000000      65.000000       0.735561        0.0247112\r
  86 sR      600.000000      65.000000       0.737732        0.0247546\r
  87 sR      610.000000      65.000000       0.741874        0.0248375\r
  88 sR      620.000000      65.000000       0.74474 0.0248948\r
  89 sR      630.000000      65.000000       0.746287        0.0249257\r
  90 sR      640.000000      65.000000       0.750727        0.0250145\r
  91 sR      650.000000      65.000000       0.753308        0.0250662\r
  92 sR      660.000000      65.000000       0.755468        0.0251094\r
  93 sR      670.000000      65.000000       0.75712 0.0251424\r
  94 sR      680.000000      65.000000       0.759104        0.0251821\r
  95 sR      690.000000      65.000000       0.761484        0.0252297\r
  96 sR      700.000000      65.000000       0.762979        0.0252596\r
  97 sR      710.000000      65.000000       0.765045        0.0253009\r
  98 sR      720.000000      65.000000       0.766225        0.0253245\r
  99 sR      730.000000      65.000000       0.769056        0.0253811\r
 100 sR      740.000000      65.000000       0.769871        0.0253974\r
 101 sR      750.000000      65.000000       0.772054        0.0254411\r
 102 sR      760.000000      65.000000       0.774034        0.0254807\r
 103 sR      770.000000      65.000000       0.776521        0.0255304\r
 104 sR      780.000000      65.000000       0.779711        0.0255942\r
 105 sR      790.000000      65.000000       0.785226        0.0257045\r
 106 sR      800.000000      65.000000       0.783832        0.0256766\r
 107 sR      300.000000      70.000000       0.569426        0.0213885\r
 108 sR      310.000000      70.000000       0.569037        0.0213807\r
 109 sR      320.000000      70.000000       0.572246        0.0214449\r
 110 sR      330.000000      70.000000       0.577343        0.0215469\r
 111 sR      340.000000      70.000000       0.584902        0.021698\r
 112 sR      350.000000      70.000000       0.590406        0.0218081\r
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 114 sR      370.000000      70.000000       0.603554        0.0220711\r
 115 sR      380.000000      70.000000       0.608319        0.0221664\r
 116 sR      390.000000      70.000000       0.615185        0.0223037\r
 117 sR      400.000000      70.000000       0.621239        0.0224248\r
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 119 sR      420.000000      70.000000       0.634291        0.0226858\r
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 121 sR      440.000000      70.000000       0.643278        0.0228656\r
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 131 sR      540.000000      70.000000       0.679993        0.0235999\r
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 147 sR      700.000000      70.000000       0.710205        0.0242041\r
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 153 sR      760.000000      70.000000       0.72115 0.024423\r
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