research/ellipsometry/WVASE32/DAT/300611_nick_si-r4-d.dat

   1 SiO2-sample1D-Full\r
   2 RTmethod[PolRT=90.00, RevsRT=10, SlitRT=2000, AutoSlitMin=100, Interleave=Off, WVASE=3.698, HardVer=6.256, Thu Jun 30 15:39:00 2011]\r
   3 Original[300611_nick_si-r4-d.dat]\r
   4 nm\r
   5 sR      300.000000      55.000000       0.260523        0.0152105\r
   6 sR      310.000000      55.000000       0.256236        0.0151247\r
   7 sR      320.000000      55.000000       0.247288        0.0149458\r
   8 sR      330.000000      55.000000       0.237718        0.0147544\r
   9 sR      340.000000      55.000000       0.23272 0.0146544\r
  10 sR      350.000000      55.000000       0.228469        0.0145694\r
  11 sR      360.000000      55.000000       0.223955        0.0144791\r
  12 sR      370.000000      55.000000       0.217532        0.0143506\r
  13 sR      380.000000      55.000000       0.211014        0.0142203\r
  14 sR      390.000000      55.000000       0.205855        0.0141171\r
  15 sR      400.000000      55.000000       0.201439        0.0140288\r
  16 sR      410.000000      55.000000       0.197712        0.0139542\r
  17 sR      420.000000      55.000000       0.193459        0.0138692\r
  18 sR      430.000000      55.000000       0.188639        0.0137728\r
  19 sR      440.000000      55.000000       0.18504 0.0137008\r
  20 sR      450.000000      55.000000       0.18131 0.0136262\r
  21 sR      460.000000      55.000000       0.177843        0.0135569\r
  22 sR      470.000000      55.000000       0.174247        0.0134849\r
  23 sR      480.000000      55.000000       0.172693        0.0134539\r
  24 sR      490.000000      55.000000       0.170609        0.0134122\r
  25 sR      500.000000      55.000000       0.16853 0.0133706\r
  26 sR      510.000000      55.000000       0.167283        0.0133457\r
  27 sR      520.000000      55.000000       0.16681 0.0133362\r
  28 sR      530.000000      55.000000       0.167364        0.0133473\r
  29 sR      540.000000      55.000000       0.168208        0.0133642\r
  30 sR      550.000000      55.000000       0.170264        0.0134053\r
  31 sR      560.000000      55.000000       0.173307        0.0134661\r
  32 sR      570.000000      55.000000       0.177466        0.0135493\r
  33 sR      580.000000      55.000000       0.181571        0.0136314\r
  34 sR      590.000000      55.000000       0.185775        0.0137155\r
  35 sR      600.000000      55.000000       0.190548        0.013811\r
  36 sR      610.000000      55.000000       0.195813        0.0139163\r
  37 sR      620.000000      55.000000       0.200671        0.0140134\r
  38 sR      630.000000      55.000000       0.20589 0.0141178\r
  39 sR      640.000000      55.000000       0.210599        0.014212\r
  40 sR      650.000000      55.000000       0.215424        0.0143085\r
  41 sR      660.000000      55.000000       0.21965 0.014393\r
  42 sR      670.000000      55.000000       0.224145        0.0144829\r
  43 sR      680.000000      55.000000       0.228953        0.0145791\r
  44 sR      690.000000      55.000000       0.234404        0.0146881\r
  45 sR      700.000000      55.000000       0.238065        0.0147613\r
  46 sR      710.000000      55.000000       0.242334        0.0148467\r
  47 sR      720.000000      55.000000       0.246081        0.0149216\r
  48 sR      730.000000      55.000000       0.25004 0.0150008\r
  49 sR      740.000000      55.000000       0.252922        0.0150584\r
  50 sR      750.000000      55.000000       0.255289        0.0151058\r
  51 sR      760.000000      55.000000       0.258998        0.01518\r
  52 sR      770.000000      55.000000       0.263292        0.0152658\r
  53 sR      780.000000      55.000000       0.266214        0.0153243\r
  54 sR      790.000000      55.000000       0.268602        0.015372\r
  55 sR      800.000000      55.000000       0.272038        0.0154408\r
  56 sR      810.000000      55.000000       0.273298        0.015466\r
  57 sR      820.000000      55.000000       0.276223        0.0155245\r
  58 sR      830.000000      55.000000       0.278929        0.0155786\r
  59 sR      840.000000      55.000000       0.283175        0.0156635\r
  60 sR      850.000000      55.000000       0.286735        0.0157347\r
  61 sR      860.000000      55.000000       0.292802        0.015856\r
  62 sR      870.000000      55.000000       0.295339        0.0159068\r
  63 sR      880.000000      55.000000       0.311353        0.0162271\r
  64 sR      890.000000      55.000000       0.296246        0.0159249\r
  65 sR      900.000000      55.000000       0.300713        0.0160143\r
  66 sR      910.000000      55.000000       0.301979        0.0160396\r
  67 sR      920.000000      55.000000       0.305229        0.0161046\r
  68 sR      930.000000      55.000000       0.312467        0.0162493\r
  69 sR      940.000000      55.000000       0.314659        0.0162932\r
  70 sR      950.000000      55.000000       0.317435        0.0163487\r
  71 sR      960.000000      55.000000       0.318883        0.0163777\r
  72 sR      970.000000      55.000000       0.321841        0.0164368\r
  73 sR      980.000000      55.000000       0.317076        0.0163415\r
  74 sR      990.000000      55.000000       0.326163        0.0165233\r
  75 sR      1000.000000     55.000000       0.32653 0.0165306\r
  76 sR      300.000000      60.000000       0.301594        0.0160319\r
  77 sR      310.000000      60.000000       0.276849        0.015537\r
  78 sR      320.000000      60.000000       0.262141        0.0152428\r
  79 sR      330.000000      60.000000       0.252101        0.015042\r
  80 sR      340.000000      60.000000       0.243949        0.014879\r
  81 sR      350.000000      60.000000       0.238412        0.0147682\r
  82 sR      360.000000      60.000000       0.23525 0.014705\r
  83 sR      370.000000      60.000000       0.230415        0.0146083\r
  84 sR      380.000000      60.000000       0.225362        0.0145072\r
  85 sR      390.000000      60.000000       0.220308        0.0144062\r
  86 sR      400.000000      60.000000       0.217502        0.01435\r
  87 sR      410.000000      60.000000       0.214891        0.0142978\r
  88 sR      420.000000      60.000000       0.212174        0.0142435\r
  89 sR      430.000000      60.000000       0.209703        0.0141941\r
  90 sR      440.000000      60.000000       0.207609        0.0141522\r
  91 sR      450.000000      60.000000       0.205604        0.0141121\r
  92 sR      460.000000      60.000000       0.203142        0.0140628\r
  93 sR      470.000000      60.000000       0.201058        0.0140212\r
  94 sR      480.000000      60.000000       0.200783        0.0140157\r
  95 sR      490.000000      60.000000       0.199953        0.0139991\r
  96 sR      500.000000      60.000000       0.199591        0.0139918\r
  97 sR      510.000000      60.000000       0.199698        0.013994\r
  98 sR      520.000000      60.000000       0.200357        0.0140071\r
  99 sR      530.000000      60.000000       0.202251        0.014045\r
 100 sR      540.000000      60.000000       0.203989        0.0140798\r
 101 sR      550.000000      60.000000       0.206845        0.0141369\r
 102 sR      560.000000      60.000000       0.210987        0.0142197\r
 103 sR      570.000000      60.000000       0.21544 0.0143088\r
 104 sR      580.000000      60.000000       0.219936        0.0143987\r
 105 sR      590.000000      60.000000       0.224309        0.0144862\r
 106 sR      600.000000      60.000000       0.22901 0.0145802\r
 107 sR      610.000000      60.000000       0.23371 0.0146742\r
 108 sR      620.000000      60.000000       0.238351        0.014767\r
 109 sR      630.000000      60.000000       0.243571        0.0148714\r
 110 sR      640.000000      60.000000       0.247631        0.0149526\r
 111 sR      650.000000      60.000000       0.251328        0.0150266\r
 112 sR      660.000000      60.000000       0.255483        0.0151097\r
 113 sR      670.000000      60.000000       0.260526        0.0152105\r
 114 sR      680.000000      60.000000       0.264978        0.0152996\r
 115 sR      690.000000      60.000000       0.269786        0.0153957\r
 116 sR      700.000000      60.000000       0.27275 0.015455\r
 117 sR      710.000000      60.000000       0.276801        0.015536\r
 118 sR      720.000000      60.000000       0.28043 0.0156086\r
 119 sR      730.000000      60.000000       0.284079        0.0156816\r
 120 sR      740.000000      60.000000       0.286565        0.0157313\r
 121 sR      750.000000      60.000000       0.288953        0.0157791\r
 122 sR      760.000000      60.000000       0.291481        0.0158296\r
 123 sR      770.000000      60.000000       0.295398        0.015908\r
 124 sR      780.000000      60.000000       0.298717        0.0159743\r
 125 sR      790.000000      60.000000       0.301043        0.0160209\r
 126 sR      800.000000      60.000000       0.303694        0.0160739\r
 127 sR      810.000000      60.000000       0.303162        0.0160632\r
 128 sR      820.000000      60.000000       0.304632        0.0160926\r
 129 sR      830.000000      60.000000       0.308166        0.0161633\r
 130 sR      840.000000      60.000000       0.311963        0.0162393\r
 131 sR      850.000000      60.000000       0.315444        0.0163089\r
 132 sR      860.000000      60.000000       0.318831        0.0163766\r
 133 sR      870.000000      60.000000       0.321678        0.0164336\r
 134 sR      880.000000      60.000000       0.332055        0.0166411\r
 135 sR      890.000000      60.000000       0.326959        0.0165392\r
 136 sR      900.000000      60.000000       0.332105        0.0166421\r
 137 sR      910.000000      60.000000       0.331931        0.0166386\r
 138 sR      920.000000      60.000000       0.336491        0.0167298\r
 139 sR      930.000000      60.000000       0.337715        0.0167543\r
 140 sR      940.000000      60.000000       0.341873        0.0168375\r
 141 sR      950.000000      60.000000       0.343126        0.0168625\r
 142 sR      960.000000      60.000000       0.343092        0.0168618\r
 143 sR      970.000000      60.000000       0.344479        0.0168896\r
 144 sR      980.000000      60.000000       0.357839        0.0171568\r
 145 sR      990.000000      60.000000       0.35847 0.0171694\r
 146 sR      1000.000000     60.000000       0.350639        0.0170128\r
 147 sR      300.000000      65.000000       0.317435        0.0163487\r
 148 sR      310.000000      65.000000       0.286759        0.0157352\r
 149 sR      320.000000      65.000000       0.269469        0.0153894\r
 150 sR      330.000000      65.000000       0.255014        0.0151003\r
 151 sR      340.000000      65.000000       0.245918        0.0149184\r
 152 sR      350.000000      65.000000       0.238687        0.0147737\r
 153 sR      360.000000      65.000000       0.236912        0.0147382\r
 154 sR      370.000000      65.000000       0.234837        0.0146967\r
 155 sR      380.000000      65.000000       0.234008        0.0146802\r
 156 sR      390.000000      65.000000       0.231391        0.0146278\r
 157 sR      400.000000      65.000000       0.230909        0.0146182\r
 158 sR      410.000000      65.000000       0.230518        0.0146104\r
 159 sR      420.000000      65.000000       0.230033        0.0146007\r
 160 sR      430.000000      65.000000       0.229043        0.0145809\r
 161 sR      440.000000      65.000000       0.228593        0.0145719\r
 162 sR      450.000000      65.000000       0.229045        0.0145809\r
 163 sR      460.000000      65.000000       0.228037        0.0145607\r
 164 sR      470.000000      65.000000       0.226908        0.0145382\r
 165 sR      480.000000      65.000000       0.228232        0.0145646\r
 166 sR      490.000000      65.000000       0.228421        0.0145684\r
 167 sR      500.000000      65.000000       0.229124        0.0145825\r
 168 sR      510.000000      65.000000       0.230442        0.0146088\r
 169 sR      520.000000      65.000000       0.232429        0.0146486\r
 170 sR      530.000000      65.000000       0.234792        0.0146958\r
 171 sR      540.000000      65.000000       0.237209        0.0147442\r
 172 sR      550.000000      65.000000       0.240199        0.014804\r
 173 sR      560.000000      65.000000       0.244279        0.0148856\r
 174 sR      570.000000      65.000000       0.248888        0.0149778\r
 175 sR      580.000000      65.000000       0.252727        0.0150545\r
 176 sR      590.000000      65.000000       0.256919        0.0151384\r
 177 sR      600.000000      65.000000       0.261157        0.0152231\r
 178 sR      610.000000      65.000000       0.265473        0.0153095\r
 179 sR      620.000000      65.000000       0.269926        0.0153985\r
 180 sR      630.000000      65.000000       0.274512        0.0154902\r
 181 sR      640.000000      65.000000       0.278351        0.015567\r
 182 sR      650.000000      65.000000       0.281837        0.0156367\r
 183 sR      660.000000      65.000000       0.285484        0.0157097\r
 184 sR      670.000000      65.000000       0.289271        0.0157854\r
 185 sR      680.000000      65.000000       0.293583        0.0158717\r
 186 sR      690.000000      65.000000       0.297752        0.015955\r
 187 sR      700.000000      65.000000       0.29969 0.0159938\r
 188 sR      710.000000      65.000000       0.303198        0.016064\r
 189 sR      720.000000      65.000000       0.306362        0.0161272\r
 190 sR      730.000000      65.000000       0.309565        0.0161913\r
 191 sR      740.000000      65.000000       0.311788        0.0162358\r
 192 sR      750.000000      65.000000       0.314735        0.0162947\r
 193 sR      760.000000      65.000000       0.316561        0.0163312\r
 194 sR      770.000000      65.000000       0.320227        0.0164045\r
 195 sR      780.000000      65.000000       0.32238 0.0164476\r
 196 sR      790.000000      65.000000       0.325204        0.0165041\r
 197 sR      800.000000      65.000000       0.328678        0.0165736\r
 198 sR      810.000000      65.000000       0.325591        0.0165118\r
 199 sR      820.000000      65.000000       0.32815 0.016563\r
 200 sR      830.000000      65.000000       0.329336        0.0165867\r
 201 sR      840.000000      65.000000       0.332444        0.0166489\r
 202 sR      850.000000      65.000000       0.338075        0.0167615\r
 203 sR      860.000000      65.000000       0.341133        0.0168227\r
 204 sR      870.000000      65.000000       0.344454        0.0168891\r
 205 sR      880.000000      65.000000       0.362202        0.017244\r
 206 sR      890.000000      65.000000       0.347984        0.0169597\r
 207 sR      900.000000      65.000000       0.349906        0.0169981\r
 208 sR      910.000000      65.000000       0.350696        0.0170139\r
 209 sR      920.000000      65.000000       0.352819        0.0170564\r
 210 sR      930.000000      65.000000       0.356054        0.0171211\r
 211 sR      940.000000      65.000000       0.359283        0.0171857\r
 212 sR      950.000000      65.000000       0.36039 0.0172078\r
 213 sR      960.000000      65.000000       0.359761        0.0171952\r
 214 sR      970.000000      65.000000       0.359421        0.0171884\r
 215 sR      980.000000      65.000000       0.374985        0.0174997\r
 216 sR      990.000000      65.000000       0.373064        0.0174613\r
 217 sR      1000.000000     65.000000       0.366187        0.0173237\r
 218 sR      300.000000      70.000000       0.314629        0.0162926\r
 219 sR      310.000000      70.000000       0.281002        0.01562\r
 220 sR      320.000000      70.000000       0.25813 0.0151626\r
 221 sR      330.000000      70.000000       0.245931        0.0149186\r
 222 sR      340.000000      70.000000       0.234776        0.0146955\r
 223 sR      350.000000      70.000000       0.22794 0.0145588\r
 224 sR      360.000000      70.000000       0.229242        0.0145848\r
 225 sR      370.000000      70.000000       0.230801        0.014616\r
 226 sR      380.000000      70.000000       0.232847        0.0146569\r
 227 sR      390.000000      70.000000       0.234419        0.0146884\r
 228 sR      400.000000      70.000000       0.235785        0.0147157\r
 229 sR      410.000000      70.000000       0.236603        0.0147321\r
 230 sR      420.000000      70.000000       0.238074        0.0147615\r
 231 sR      430.000000      70.000000       0.238659        0.0147732\r
 232 sR      440.000000      70.000000       0.238787        0.0147757\r
 233 sR      450.000000      70.000000       0.239689        0.0147938\r
 234 sR      460.000000      70.000000       0.239983        0.0147997\r
 235 sR      470.000000      70.000000       0.239758        0.0147952\r
 236 sR      480.000000      70.000000       0.241786        0.0148357\r
 237 sR      490.000000      70.000000       0.242706        0.0148541\r
 238 sR      500.000000      70.000000       0.244085        0.0148817\r
 239 sR      510.000000      70.000000       0.24581 0.0149162\r
 240 sR      520.000000      70.000000       0.248054        0.0149611\r
 241 sR      530.000000      70.000000       0.250291        0.0150058\r
 242 sR      540.000000      70.000000       0.252839        0.0150568\r
 243 sR      550.000000      70.000000       0.256365        0.0151273\r
 244 sR      560.000000      70.000000       0.259375        0.0151875\r
 245 sR      570.000000      70.000000       0.263179        0.0152636\r
 246 sR      580.000000      70.000000       0.267022        0.0153404\r
 247 sR      590.000000      70.000000       0.270354        0.0154071\r
 248 sR      600.000000      70.000000       0.273837        0.0154767\r
 249 sR      610.000000      70.000000       0.277486        0.0155497\r
 250 sR      620.000000      70.000000       0.281631        0.0156326\r
 251 sR      630.000000      70.000000       0.285388        0.0157078\r
 252 sR      640.000000      70.000000       0.288334        0.0157667\r
 253 sR      650.000000      70.000000       0.291318        0.0158264\r
 254 sR      660.000000      70.000000       0.294823        0.0158965\r
 255 sR      670.000000      70.000000       0.297151        0.015943\r
 256 sR      680.000000      70.000000       0.300703        0.0160141\r
 257 sR      690.000000      70.000000       0.30441 0.0160882\r
 258 sR      700.000000      70.000000       0.306276        0.0161255\r
 259 sR      710.000000      70.000000       0.309614        0.0161923\r
 260 sR      720.000000      70.000000       0.311689        0.0162338\r
 261 sR      730.000000      70.000000       0.314023        0.0162805\r
 262 sR      740.000000      70.000000       0.315661        0.0163132\r
 263 sR      750.000000      70.000000       0.317811        0.0163562\r
 264 sR      760.000000      70.000000       0.319385        0.0163877\r
 265 sR      770.000000      70.000000       0.321597        0.0164319\r
 266 sR      780.000000      70.000000       0.323806        0.0164761\r
 267 sR      790.000000      70.000000       0.324163        0.0164833\r
 268 sR      800.000000      70.000000       0.326446        0.0165289\r
 269 sR      810.000000      70.000000       0.323928        0.0164786\r
 270 sR      820.000000      70.000000       0.32947 0.0165894\r
 271 sR      830.000000      70.000000       0.325428        0.0165086\r
 272 sR      840.000000      70.000000       0.328423        0.0165685\r
 273 sR      850.000000      70.000000       0.330981        0.0166196\r
 274 sR      860.000000      70.000000       0.336361        0.0167272\r
 275 sR      870.000000      70.000000       0.335218        0.0167044\r
 276 sR      880.000000      70.000000       0.336734        0.0167347\r
 277 sR      890.000000      70.000000       0.340147        0.0168029\r
 278 sR      900.000000      70.000000       0.341387        0.0168277\r
 279 sR      910.000000      70.000000       0.339156        0.0167831\r
 280 sR      920.000000      70.000000       0.344496        0.0168899\r
 281 sR      930.000000      70.000000       0.348086        0.0169617\r
 282 sR      940.000000      70.000000       0.347213        0.0169443\r
 283 sR      950.000000      70.000000       0.348935        0.0169787\r
 284 sR      960.000000      70.000000       0.346177        0.0169235\r
 285 sR      970.000000      70.000000       0.349873        0.0169975\r
 286 sR      980.000000      70.000000       0.35867 0.0171734\r
 287 sR      990.000000      70.000000       0.360465        0.0172093\r
 288 sR      1000.000000     70.000000       0.349604        0.0169921