research/ellipsometry/WVASE32/DAT/300611_nick_si.dat

   1 SiO2-sample1\r
   2 VASEmethod[EllipsometerType=0, Isotropic, AutoRetarder=0, TrackPol=1, Pol>=0, Revs=10, AutoSlit=2000, WVASE=3.698, HardVer=6.256, Thu Jun 30 13:37:47 2011]\r
   3 Original[300611_nick_si.dat]\r
   4 nm\r
   5 300.000000      55.000000       32.798191       124.47561       2.20389 5.84708\r
   6 310.000000      55.000000       34.358509       126.38223       1.13679 3.02711\r
   7 320.000000      55.000000       32.698654       125.80379       0.612837        1.65988\r
   8 330.000000      55.000000       33.233742       125.52552       0.405186        1.08582\r
   9 340.000000      55.000000       32.874393       128.22578       0.267019        0.745532\r
  10 350.000000      55.000000       33.015282       128.68456       0.182749        0.512356\r
  11 360.000000      55.000000       33.711075       129.80992       0.133715        0.37684\r
  12 370.000000      55.000000       33.655403       130.11797       0.092331        0.261711\r
  13 380.000000      55.000000       33.984913       131.3226        0.0602949       0.173199\r
  14 390.000000      55.000000       34.219406       132.00104       0.0396595       0.114745\r
  15 400.000000      55.000000       34.479362       132.81081       0.0284924       0.0832014\r
  16 410.000000      55.000000       34.680767       133.70532       0.0234415       0.069271\r
  17 420.000000      55.000000       34.85218        134.50284       0.0214383       0.0640609\r
  18 430.000000      55.000000       35.040211       135.33311       0.0197567       0.0597787\r
  19 440.000000      55.000000       35.185642       136.17303       0.018556        0.0568914\r
  20 450.000000      55.000000       35.323616       136.74391       0.0177698       0.0549594\r
  21 460.000000      55.000000       35.491077       137.41945       0.0174917       0.0546751\r
  22 470.000000      55.000000       35.610218       138.28938       0.0171338       0.0543824\r
  23 480.000000      55.000000       35.71368        138.8782        0.0173413       0.0556155\r
  24 490.000000      55.000000       35.811874       139.56097       0.0172548       0.0560412\r
  25 500.000000      55.000000       35.957951       140.04726       0.0172178       0.0563862\r
  26 510.000000      55.000000       36.023674       140.78424       0.0171446       0.0570035\r
  27 520.000000      55.000000       36.146976       141.28287       0.017123        0.0574676\r
  28 530.000000      55.000000       36.237568       141.80605       0.0171131       0.0580395\r
  29 540.000000      55.000000       36.352726       142.42226       0.0171173       0.0587861\r
  30 550.000000      55.000000       36.419296       142.97862       0.017115        0.0594886\r
  31 560.000000      55.000000       36.474865       143.45674       0.0171166       0.0601252\r
  32 570.000000      55.000000       36.548443       143.86206       0.0171244       0.060685\r
  33 580.000000      55.000000       36.669079       144.34224       0.0171437       0.0613807\r
  34 590.000000      55.000000       36.745033       144.89398       0.0171562       0.0622133\r
  35 600.000000      55.000000       36.770241       145.41806       0.0171913       0.0631482\r
  36 610.000000      55.000000       36.858089       145.6256        0.0171951       0.0634372\r
  37 620.000000      55.000000       36.929405       146.0378        0.0171977       0.0640748\r
  38 630.000000      55.000000       37.049103       146.66335       0.0172353       0.0651954\r
  39 640.000000      55.000000       37.039303       146.87813       0.0172379       0.0656015\r
  40 650.000000      55.000000       37.119617       147.2084        0.0172561       0.0662046\r
  41 660.000000      55.000000       37.195286       147.49911       0.0173104       0.0668909\r
  42 670.000000      55.000000       37.289772       147.71231       0.0173086       0.0672152\r
  43 680.000000      55.000000       37.31496        148.38173       0.0173166       0.0685009\r
  44 690.000000      55.000000       37.340405       148.7305        0.0172831       0.0690354\r
  45 700.000000      55.000000       37.393559       148.90617       0.0173873       0.0697686\r
  46 710.000000      55.000000       37.459541       149.1461        0.0174177       0.0703352\r
  47 720.000000      55.000000       37.530533       149.48506       0.017424        0.0710176\r
  48 730.000000      55.000000       37.605618       149.84955       0.0174693       0.0719294\r
  49 740.000000      55.000000       37.644707       150.19072       0.017523        0.0728723\r
  50 750.000000      55.000000       37.681366       150.47046       0.0175782       0.073706\r
  51 760.000000      55.000000       37.693428       150.87219       0.0176673       0.0750014\r
  52 770.000000      55.000000       37.752285       151.01463       0.0177466       0.0756345\r
  53 780.000000      55.000000       37.860821       151.08084       0.0182959       0.0780608\r
  54 790.000000      55.000000       37.88575        151.51497       0.017974        0.0777381\r
  55 800.000000      55.000000       37.915867       151.81024       0.0181868       0.0793921\r
  56 300.000000      60.000000       27.383663       108.76785       1.84237 4.69695\r
  57 310.000000      60.000000       32.317204       109.37043       1.22439 2.82238\r
  58 320.000000      60.000000       32.058605       110.49076       0.606869        1.44007\r
  59 330.000000      60.000000       32.00869        114.35149       0.396249        0.967595\r
  60 340.000000      60.000000       31.95064        114.215 0.260231        0.635384\r
  61 350.000000      60.000000       32.105297       115.80436       0.180083        0.444278\r
  62 360.000000      60.000000       31.934288       117.44304       0.129275        0.324458\r
  63 370.000000      60.000000       32.48093        117.54774       0.0922696       0.229709\r
  64 380.000000      60.000000       32.648514       118.46957       0.0603297       0.151067\r
  65 390.000000      60.000000       32.859795       119.56488       0.0396942       0.100107\r
  66 400.000000      60.000000       33.012054       120.70355       0.0283357       0.0721115\r
  67 410.000000      60.000000       33.206825       121.60646       0.02326 0.0595728\r
  68 420.000000      60.000000       33.383007       122.50401       0.0212593       0.0548296\r
  69 430.000000      60.000000       33.561451       123.54365       0.0195354       0.0508755\r
  70 440.000000      60.000000       33.724728       124.54408       0.0182949       0.0480934\r
  71 450.000000      60.000000       33.82032        125.30747       0.0174806       0.0463169\r
  72 460.000000      60.000000       33.948933       126.18388       0.0171907       0.0459657\r
  73 470.000000      60.000000       34.092083       126.95122       0.0168262       0.0453452\r
  74 480.000000      60.000000       34.23204        127.82349       0.0170585       0.0464146\r
  75 490.000000      60.000000       34.326298       128.71704       0.0169685       0.0466777\r
  76 500.000000      60.000000       34.383434       129.4761        0.0169104       0.0469832\r
  77 510.000000      60.000000       34.507652       130.19208       0.0168814       0.0473099\r
  78 520.000000      60.000000       34.618317       130.74342       0.0168246       0.0474939\r
  79 530.000000      60.000000       34.674927       131.61032       0.0168105       0.0480501\r
  80 540.000000      60.000000       34.749195       132.2038        0.0168081       0.0484441\r
  81 550.000000      60.000000       34.860607       132.80394       0.0168169       0.0488651\r
  82 560.000000      60.000000       34.91626        133.54506       0.0168201       0.049435\r
  83 570.000000      60.000000       34.989418       134.05725       0.0168297       0.0498412\r
  84 580.000000      60.000000       35.097057       134.64265       0.0168495       0.0503301\r
  85 590.000000      60.000000       35.126968       135.25726       0.016854        0.0508659\r
  86 600.000000      60.000000       35.189911       135.69521       0.0169009       0.0513638\r
  87 610.000000      60.000000       35.305187       136.18231       0.0169136       0.051779\r
  88 620.000000      60.000000       35.357906       136.87416       0.0169133       0.052407\r
  89 630.000000      60.000000       35.389877       137.23878       0.0169354       0.052814\r
  90 640.000000      60.000000       35.483711       137.74948       0.0169883       0.0534331\r
  91 650.000000      60.000000       35.556271       138.28992       0.017011        0.0540193\r
  92 660.000000      60.000000       35.595478       138.60414       0.0170374       0.0544315\r
  93 670.000000      60.000000       35.680027       139.27869       0.0170372       0.0551161\r
  94 680.000000      60.000000       35.715431       139.53654       0.0170496       0.0554234\r
  95 690.000000      60.000000       35.754475       139.84016       0.0170169       0.0556379\r
  96 700.000000      60.000000       35.853172       140.41518       0.0171414       0.0566566\r
  97 710.000000      60.000000       35.886642       140.81198       0.0171694       0.0572076\r
  98 720.000000      60.000000       35.962818       140.90956       0.0171797       0.0573108\r
  99 730.000000      60.000000       36.036671       141.51672       0.0172285       0.0581867\r
 100 740.000000      60.000000       36.062859       142.0182        0.0172872       0.0590192\r
 101 750.000000      60.000000       36.096661       142.23456       0.0173519       0.0595053\r
 102 760.000000      60.000000       36.187241       142.46153       0.0174727       0.0601658\r
 103 770.000000      60.000000       36.224567       142.96452       0.0175606       0.0611438\r
 104 780.000000      60.000000       36.249573       143.12756       0.0181528       0.063427\r
 105 790.000000      60.000000       36.340805       143.62758       0.0178034       0.0628764\r
 106 800.000000      60.000000       36.325462       143.91301       0.0180397       0.0641564\r
 107 300.000000      65.000000       27.897659       94.783379       2.07372 4.99799\r
 108 310.000000      65.000000       31.248695       95.458649       1.14763 2.57569\r
 109 320.000000      65.000000       30.378189       97.12294        0.59061 1.36346\r
 110 330.000000      65.000000       30.839884       97.161613       0.38619 0.884164\r
 111 340.000000      65.000000       31.192028       99.010086       0.259778        0.593668\r
 112 350.000000      65.000000       31.270197       99.634499       0.179195        0.409662\r
 113 360.000000      65.000000       31.192602       100.48555       0.129323        0.296847\r
 114 370.000000      65.000000       31.584414       102.16212       0.0928657       0.212895\r
 115 380.000000      65.000000       31.56702        103.10912       0.060415        0.13906\r
 116 390.000000      65.000000       31.835007       104.18925       0.0397703       0.0915151\r
 117 400.000000      65.000000       31.900137       105.61153       0.0283952       0.0656957\r
 118 410.000000      65.000000       32.064819       106.66499       0.023208        0.0538204\r
 119 420.000000      65.000000       32.224979       107.66935       0.021127        0.0491187\r
 120 430.000000      65.000000       32.326279       108.77403       0.0194853       0.0455075\r
 121 440.000000      65.000000       32.417549       109.80616       0.0180638       0.0424239\r
 122 450.000000      65.000000       32.509224       110.85254       0.0172152       0.0406438\r
 123 460.000000      65.000000       32.616863       111.80674       0.016906        0.040103\r
 124 470.000000      65.000000       32.728951       112.88618       0.0165118       0.0393996\r
 125 480.000000      65.000000       32.804817       113.89511       0.0167447       0.0402106\r
 126 490.000000      65.000000       32.863976       114.84773       0.0166407       0.040224\r
 127 500.000000      65.000000       32.91766        115.71425       0.0165791       0.0403268\r
 128 510.000000      65.000000       33.000381       116.5009        0.0165397       0.0404481\r
 129 520.000000      65.000000       33.089931       117.38139       0.016515        0.0406449\r
 130 530.000000      65.000000       33.15625        118.24761       0.0165049       0.0409015\r
 131 540.000000      65.000000       33.189018       119.00732       0.0164933       0.0411478\r
 132 550.000000      65.000000       33.268948       119.71526       0.0164986       0.0413946\r
 133 560.000000      65.000000       33.346687       120.48705       0.0165113       0.0416993\r
 134 570.000000      65.000000       33.407593       121.30621       0.0164898       0.0419882\r
 135 580.000000      65.000000       33.419895       121.94576       0.0164872       0.0422633\r
 136 590.000000      65.000000       33.474354       122.57173       0.0164966       0.0425451\r
 137 600.000000      65.000000       33.566994       123.27689       0.016557        0.0429828\r
 138 610.000000      65.000000       33.597233       123.9136        0.0165482       0.0432587\r
 139 620.000000      65.000000       33.647816       124.55554       0.0165473       0.0435545\r
 140 630.000000      65.000000       33.697678       125.13747       0.0165783       0.0439132\r
 141 640.000000      65.000000       33.764324       125.72324       0.0166305       0.0443292\r
 142 650.000000      65.000000       33.820377       126.34393       0.0166526       0.044702\r
 143 660.000000      65.000000       33.882263       126.8914        0.0167205       0.0451629\r
 144 670.000000      65.000000       33.952831       127.48042       0.0167202       0.0454684\r
 145 680.000000      65.000000       34.013287       127.97099       0.0167419       0.0457895\r
 146 690.000000      65.000000       34.067024       128.336 0.0167102       0.0458959\r
 147 700.000000      65.000000       34.119003       128.86438       0.0168477       0.04658\r
 148 710.000000      65.000000       34.147335       129.30966       0.0168814       0.0469495\r
 149 720.000000      65.000000       34.161884       129.82024       0.0168778       0.0472766\r
 150 730.000000      65.000000       34.25185        130.2538        0.0169472       0.0477113\r
 151 740.000000      65.000000       34.259659       130.85167       0.0170166       0.0483312\r
 152 750.000000      65.000000       34.375618       131.10147       0.0171165       0.0487179\r
 153 760.000000      65.000000       34.43243        131.71609       0.0172061       0.0494216\r
 154 770.000000      65.000000       34.462063       132.02966       0.0173041       0.0499274\r
 155 780.000000      65.000000       34.524151       132.46104       0.0180051       0.0522625\r
 156 790.000000      65.000000       34.555027       132.83264       0.0175905       0.0513437\r
 157 800.000000      65.000000       34.585384       133.2789        0.017881        0.0525514\r
 158 300.000000      70.000000       31.95001        74.977249       1.83355 4.2113\r
 159 310.000000      70.000000       30.935226       81.297646       0.97342 2.23159\r
 160 320.000000      70.000000       30.324726       78.477158       0.599557        1.40362\r
 161 330.000000      70.000000       31.245617       78.096481       0.395062        0.910363\r
 162 340.000000      70.000000       31.193918       78.912689       0.261348        0.601074\r
 163 350.000000      70.000000       30.989164       81.000237       0.183397        0.420685\r
 164 360.000000      70.000000       31.236345       81.710838       0.133219        0.303603\r
 165 370.000000      70.000000       31.362635       82.901619       0.0952408       0.215934\r
 166 380.000000      70.000000       31.397537       84.347923       0.0618094       0.139651\r
 167 390.000000      70.000000       31.415264       85.311584       0.0406493       0.091672\r
 168 400.000000      70.000000       31.522902       86.503983       0.0289229       0.0649989\r
 169 410.000000      70.000000       31.528593       87.780457       0.0234984       0.0527438\r
 170 420.000000      70.000000       31.604103       88.990662       0.0213411       0.0478055\r
 171 430.000000      70.000000       31.647106       90.156532       0.0195678       0.0437915\r
 172 440.000000      70.000000       31.717937       91.292236       0.0181548       0.0405857\r
 173 450.000000      70.000000       31.756714       92.383774       0.0171882       0.0384204\r
 174 460.000000      70.000000       31.771669       93.403252       0.0168098       0.037598\r
 175 470.000000      70.000000       31.795685       94.511833       0.0163411       0.0365821\r
 176 480.000000      70.000000       31.766068       95.512764       0.0165741       0.0371812\r
 177 490.000000      70.000000       31.794323       96.532295       0.0164483       0.0369488\r
 178 500.000000      70.000000       31.8451 97.541733       0.0163801       0.036841\r
 179 510.000000      70.000000       31.866449       98.555679       0.0163163       0.0367748\r
 180 520.000000      70.000000       31.911812       99.441216       0.0162734       0.0367371\r
 181 530.000000      70.000000       31.919966       100.27959       0.0162417       0.0367534\r
 182 540.000000      70.000000       31.910311       101.11481       0.0162159       0.0368029\r
 183 550.000000      70.000000       31.91263        101.98801       0.0161967       0.0368726\r
 184 560.000000      70.000000       31.944714       102.88005       0.016197        0.0369781\r
 185 570.000000      70.000000       31.95553        103.68288       0.0161568       0.0370293\r
 186 580.000000      70.000000       32.01292        104.49059       0.0161682       0.0371502\r
 187 590.000000      70.000000       32.046482       105.18873       0.016175        0.0372645\r
 188 600.000000      70.000000       32.027615       105.8809        0.0162128       0.0374894\r
 189 610.000000      70.000000       32.074165       106.62405       0.0162086       0.0375917\r
 190 620.000000      70.000000       32.068024       107.35641       0.0161919       0.0377037\r
 191 630.000000      70.000000       32.095074       108.1284        0.0162205       0.037916\r
 192 640.000000      70.000000       32.142937       108.79023       0.0162795       0.0381697\r
 193 650.000000      70.000000       32.186161       109.45202       0.0163002       0.0383431\r
 194 660.000000      70.000000       32.226269       110.0664        0.0163777       0.0386476\r
 195 670.000000      70.000000       32.258759       110.64388       0.0163646       0.0387399\r
 196 680.000000      70.000000       32.274326       111.25461       0.0163777       0.0389192\r
 197 690.000000      70.000000       32.317116       111.8521        0.0163342       0.0389477\r
 198 700.000000      70.000000       32.30859        112.43233       0.0164855       0.0394765\r
 199 710.000000      70.000000       32.330193       112.98019       0.0165272       0.0397204\r
 200 720.000000      70.000000       32.311012       113.57104       0.0165163       0.0398835\r
 201 730.000000      70.000000       32.36018        114.09245       0.0165862       0.0401801\r
 202 740.000000      70.000000       32.386353       114.74419       0.0166771       0.0405915\r
 203 750.000000      70.000000       32.480709       115.25856       0.0167933       0.0409801\r
 204 760.000000      70.000000       32.515152       115.70327       0.0169633       0.041524\r
 205 770.000000      70.000000       32.536274       116.18458       0.0170891       0.0419882\r
 206 780.000000      70.000000       32.544086       116.6992        0.0179845       0.0443804\r
 207 790.000000      70.000000       32.563972       117.22332       0.0174432       0.0432309\r
 208 800.000000      70.000000       32.553772       117.66622       0.0177936       0.0442844\r
 209 300.000000      75.000000       32.820557       59.556931       1.93823 4.93385\r
 210 310.000000      75.000000       33.726936       55.239613       1.07703 2.83463\r
 211 320.000000      75.000000       32.989594       56.059437       0.601552        1.58734\r
 212 330.000000      75.000000       32.40728        57.522053       0.392625        1.02774\r
 213 340.000000      75.000000       32.775818       58.044647       0.268498        0.695229\r
 214 350.000000      75.000000       32.493073       58.910587       0.186827        0.481509\r
 215 360.000000      75.000000       32.485836       59.182491       0.135945        0.349415\r
 216 370.000000      75.000000       32.263416       60.583366       0.0972432       0.247322\r
 217 380.000000      75.000000       32.36985        61.411545       0.0637874       0.160656\r
 218 390.000000      75.000000       32.391808       62.524212       0.0418739       0.104342\r
 219 400.000000      75.000000       32.448574       63.99398        0.0297588       0.0731325\r
 220 410.000000      75.000000       32.386326       64.811554       0.0241711       0.0590564\r
 221 420.000000      75.000000       32.277042       65.761589       0.0218724       0.0531288\r
 222 430.000000      75.000000       32.261372       66.729805       0.0199969       0.0482257\r
 223 440.000000      75.000000       32.268562       67.678947       0.0184727       0.0442355\r
 224 450.000000      75.000000       32.19149        68.878357       0.0174054       0.0413859\r
 225 460.000000      75.000000       32.116322       69.767151       0.0169777       0.0401827\r
 226 470.000000      75.000000       32.079365       70.750267       0.0164474       0.0387121\r
 227 480.000000      75.000000       32.002422       71.6549 0.0166979       0.0391406\r
 228 490.000000      75.000000       32.014259       72.596901       0.0165533       0.0385887\r
 229 500.000000      75.000000       31.944645       73.58699        0.0164426       0.0381735\r
 230 510.000000      75.000000       31.865892       74.450401       0.0163467       0.0378363\r
 231 520.000000      75.000000       31.827528       75.234612       0.0162745       0.0375535\r
 232 530.000000      75.000000       31.804567       76.097183       0.0162332       0.0373283\r
 233 540.000000      75.000000       31.768066       76.965691       0.0161996       0.0371383\r
 234 550.000000      75.000000       31.69993        77.790215       0.0161612       0.0369724\r
 235 560.000000      75.000000       31.649288       78.57177        0.0161378       0.036844\r
 236 570.000000      75.000000       31.62439        79.302231       0.0161242       0.0367364\r
 237 580.000000      75.000000       31.570398       80.055977       0.0161068       0.0366413\r
 238 590.000000      75.000000       31.55879        80.795868       0.0161018       0.036557\r
 239 600.000000      75.000000       31.532389       81.478424       0.0161498       0.0366136\r
 240 610.000000      75.000000       31.485432       82.181206       0.016119        0.0365076\r
 241 620.000000      75.000000       31.489491       82.908287       0.0161029       0.0364082\r
 242 630.000000      75.000000       31.4601 83.649742       0.0161222       0.0364137\r
 243 640.000000      75.000000       31.450644       84.307175       0.0161738       0.0364917\r
 244 650.000000      75.000000       31.430645       84.987236       0.0161806       0.0364781\r
 245 660.000000      75.000000       31.398115       85.651947       0.0162522       0.0366244\r
 246 670.000000      75.000000       31.342409       86.274231       0.0162047       0.0365538\r
 247 680.000000      75.000000       31.314209       86.918449       0.0162097       0.036559\r
 248 690.000000      75.000000       31.314007       87.484123       0.0161403       0.036385\r
 249 700.000000      75.000000       31.315903       88.127968       0.0163342       0.0368051\r
 250 710.000000      75.000000       31.317244       88.69574        0.0163774       0.0368914\r
 251 720.000000      75.000000       31.291147       89.311722       0.0163637       0.0368708\r
 252 730.000000      75.000000       31.249601       89.966217       0.0164246       0.0370329\r
 253 740.000000      75.000000       31.258934       90.497673       0.0165326       0.0372715\r
 254 750.000000      75.000000       31.234795       90.976204       0.0166388       0.0375312\r
 255 760.000000      75.000000       31.235952       91.486641       0.0168358       0.037982\r
 256 770.000000      75.000000       31.265673       92.097435       0.0170024       0.0383503\r
 257 780.000000      75.000000       31.234266       92.709808       0.0181032       0.0408745\r
 258 790.000000      75.000000       31.24472        93.109848       0.0174363       0.0393752\r
 259 800.000000      75.000000       31.234156       93.559204       0.0178867       0.0404185