research/ellipsometry/WVASE32/EXAMPLES/OX-ETCH.DAT

   1 6500Å SiO2 on Si, ECR etching\r
   2 nm\r
   3 500.000000      70.199997       18.282539       122.655945      0.240426        1.160977        0.190400\r
   4 600.000000      70.199997       51.069641       81.103455       0.183011        0.605849        0.243500\r
   5 800.000000      70.199997       24.302416       89.381668       0.194219        0.671723        0.334117\r
   6 500.000000      70.199997       18.291504       122.676659      0.241429        1.160040        0.648100\r
   7 600.000000      70.199997       51.132801       81.200638       0.182120        0.604055        0.700283\r
   8 800.000000      70.199997       24.336679       89.359360       0.197483        0.664947        0.792750\r
   9 500.000000      70.199997       18.433270       122.312874      0.243133        1.149216        1.095750\r
  10 600.000000      70.199997       51.162167       81.084229       0.183268        0.600829        1.149750\r
  11 800.000000      70.199997       24.294397       89.434708       0.195622        0.680093        1.241300\r
  12 500.000000      70.199997       18.353628       122.602859      0.239134        1.159448        1.551617\r
  13 600.000000      70.199997       51.111481       81.173912       0.180538        0.604087        1.605633\r
  14 800.000000      70.199997       24.371965       89.289299       0.193316        0.645914        1.696267\r
  15 500.000000      70.199997       18.351282       122.627075      0.239478        1.144068        2.006583\r
  16 600.000000      70.199997       51.166485       81.175781       0.186008        0.595848        2.060600\r
  17 800.000000      70.199997       24.352896       89.493370       0.198706        0.672788        2.152133\r
  18 500.000000      70.199997       18.340328       122.587151      0.237349        1.169959        2.464300\r
  19 600.000000      70.199997       51.169983       81.242722       0.183712        0.591900        2.518300\r
  20 800.000000      70.199997       24.333315       89.350441       0.191871        0.675589        2.609850\r
  21 500.000000      70.199997       18.305017       122.613876      0.245846        1.175034        2.921083\r
  22 600.000000      70.199997       51.170879       81.219254       0.182096        0.592280        2.975100\r
  23 800.000000      70.199997       24.175865       89.355431       0.202536        0.663502        3.065717\r
  24 500.000000      70.199997       18.321264       122.649017      0.244524        1.161355        3.378800\r
  25 600.000000      70.199997       51.204987       81.172493       0.181897        0.598752        3.431883\r
  26 800.000000      70.199997       24.325809       89.375175       0.195445        0.665349        3.525267\r
  27 500.000000      70.199997       18.352348       122.722336      0.247034        1.181162        3.832833\r
  28 600.000000      70.199997       51.105972       81.067810       0.187004        0.600790        3.886850\r
  29 800.000000      70.199997       24.397038       89.288322       0.210573        0.748929        3.978400\r
  30 500.000000      70.199997       18.397614       122.442711      0.250460        1.175453        4.289633\r
  31 600.000000      70.199997       51.100510       81.032921       0.191358        0.600207        4.343650\r
  32 800.000000      70.199997       24.392702       89.314751       0.185485        0.715825        4.435184\r
  33 500.000000      70.199997       18.343552       122.527824      0.245110        1.167799        4.747350\r
  34 600.000000      70.199997       51.056469       80.996574       0.189030        0.586270        4.800433\r
  35 800.000000      70.199997       24.384617       89.180397       0.185012        0.683003        4.892900\r
  36 500.000000      70.199997       18.352566       122.404144      0.246985        1.172639        5.205050\r
  37 600.000000      70.199997       51.086189       81.029396       0.189803        0.584315        5.259067\r
  38 800.000000      70.199997       24.374531       89.222092       0.187917        0.712350        5.348767\r
  39 500.000000      70.199997       18.331841       122.380524      0.247963        1.169545        5.660933\r
  40 600.000000      70.199997       51.093616       80.934837       0.183705        0.603257        5.714933\r
  41 800.000000      70.199997       24.394148       89.240822       0.188210        0.663080        5.805567\r
  42 500.000000      70.199997       18.354393       122.372810      0.243944        1.167968        6.118633\r
  43 600.000000      70.199997       51.063057       81.159065       0.185986        0.588488        6.171733\r
  44 800.000000      70.199997       24.342161       89.139000       0.185377        0.684059        6.263267\r
  45 500.000000      70.199997       18.321999       122.392578      0.252057        1.177608        6.570850\r
  46 600.000000      70.199997       50.931141       80.874062       0.204226        0.622040        6.623950\r
  47 800.000000      70.199997       24.495726       89.153496       0.198186        0.726318        6.715483\r
  48 500.000000      70.199997       18.465948       121.701759      0.246947        1.143006        7.024900\r
  49 600.000000      70.199997       50.712112       81.069260       0.184755        0.602625        7.078917\r
  50 800.000000      70.199997       24.468414       88.881416       0.191376        0.686139        7.170450\r
  51 500.000000      70.199997       18.689257       120.631012      0.242890        1.111848        7.481700\r
  52 600.000000      70.199997       49.902218       80.817612       0.208911        0.626993        7.535700\r
  53 800.000000      70.199997       24.679277       88.377960       0.190829        0.710894        7.627250\r
  54 500.000000      70.199997       19.041994       119.030396      0.248858        1.081411        7.937567\r
  55 600.000000      70.199997       48.797688       80.323723       0.201450        0.600285        7.991583\r
  56 800.000000      70.199997       24.936743       88.103531       0.193086        0.667221        8.083117\r
  57 500.000000      70.199997       19.560759       117.239624      0.251124        1.006927        8.393450\r
  58 600.000000      70.199997       47.970798       80.190506       0.173577        0.574632        8.447450\r
  59 800.000000      70.199997       25.319002       87.595680       0.175114        0.598304        8.539917\r
  60 500.000000      70.199997       20.035074       115.811516      0.236812        0.946980        8.851150\r
  61 600.000000      70.199997       46.889320       80.384872       0.173034        0.553022        8.904250\r
  62 800.000000      70.199997       25.723202       87.070938       0.196611        0.624358        8.995784\r
  63 500.000000      70.199997       20.498110       113.432373      0.216133        0.960826        9.306117\r
  64 600.000000      70.199997       45.842438       79.914009       0.172400        0.559415        9.360133\r
  65 800.000000      70.199997       26.059410       86.574852       0.204009        0.597391        9.451667\r
  66 500.000000      70.199997       20.944986       111.597580      0.216238        0.921728        9.762000\r
  67 600.000000      70.199997       44.816376       79.483620       0.159959        0.552610        9.816000\r
  68 800.000000      70.199997       26.318321       86.149345       0.210396        0.664443        9.907550\r
  69 500.000000      70.199997       21.537004       109.661385      0.233024        0.924407        10.219700\r
  70 600.000000      70.199997       43.977249       79.353767       0.171240        0.556977        10.273717\r
  71 800.000000      70.199997       26.709660       85.947159       0.212688        0.639609        10.364333\r
  72 500.000000      70.199997       22.026674       107.976059      0.226611        0.869196        10.676500\r
  73 600.000000      70.199997       43.114731       79.098366       0.168088        0.506869        10.730500\r
  74 800.000000      70.199997       27.050774       85.346169       0.201837        0.639345        10.821134\r
  75 500.000000      70.199997       22.553911       106.806961      0.223640        0.831979        11.130550\r
  76 600.000000      70.199997       42.325787       79.154961       0.186696        0.558529        11.183634\r
  77 800.000000      70.199997       27.517122       84.523407       0.243371        0.709746        11.277017\r
  78 500.000000      70.199997       22.935976       105.134628      0.260378        0.712108        11.589167\r
  79 600.000000      70.199997       41.478607       78.687988       0.194038        0.582340        11.643184\r
  80 800.000000      70.199997       27.626322       84.266830       0.327493        0.760239        11.734716\r
  81 500.000000      70.199997       23.575340       102.923927      0.211489        0.810408        12.045050\r
  82 600.000000      70.199997       40.484650       78.961670       0.173173        0.570884        12.099050\r
  83 800.000000      70.199997       27.770336       84.237022       0.361625        0.816631        12.190600\r
  84 500.000000      70.199997       24.225475       101.467331      0.198958        0.759130        12.501833\r
  85 600.000000      70.199997       40.110420       79.278961       0.190263        0.638691        12.555850\r
  86 800.000000      70.199997       28.626280       83.401733       0.232557        0.695508        12.647384\r
  87 500.000000      70.199997       24.796864       100.541573      0.202487        0.719718        12.957717\r
  88 600.000000      70.199997       39.128281       78.825226       0.198973        0.600417        13.011717\r
  89 800.000000      70.199997       29.086454       83.870934       0.319047        0.817927        13.103267\r
  90 500.000000      70.199997       25.322680       99.006760       0.211455        0.764024        13.413600\r
  91 600.000000      70.199997       38.288273       79.353958       0.184002        0.567458        13.467600\r
  92 800.000000      70.199997       29.722017       83.454124       0.236936        0.663089        13.559150\r
  93 500.000000      70.199997       25.995764       97.492928       0.221414        0.737011        13.869467\r
  94 600.000000      70.199997       37.578907       79.340828       0.178766        0.590649        13.923483\r
  95 800.000000      70.199997       29.626835       82.585129       0.225481        0.700835        14.015017\r
  96 500.000000      70.199997       26.538025       95.928802       0.199421        0.699371        14.326266\r
  97 600.000000      70.199997       36.865078       79.042374       0.189416        0.604754        14.380267\r
  98 800.000000      70.199997       30.255959       82.214043       0.251366        0.695744        14.471817\r
  99 500.000000      70.199997       27.106567       94.843445       0.221889        0.680598        14.781217\r
 100 600.000000      70.199997       36.242245       79.388626       0.175832        0.576893        14.835234\r
 101 800.000000      70.199997       30.563538       81.891380       0.204179        0.609141        14.926784\r
 102 500.000000      70.199997       27.662685       93.725258       0.192874        0.729601        15.237100\r
 103 600.000000      70.199997       35.603600       79.590683       0.179657        0.553102        15.291117\r
 104 800.000000      70.199997       31.405352       81.213776       0.265154        0.749095        15.383567\r
 105 500.000000      70.199997       28.322987       92.568474       0.185922        0.652583        15.694817\r
 106 600.000000      70.199997       35.064907       79.978378       0.170459        0.597187        15.748816\r
 107 800.000000      70.199997       31.264996       81.040703       0.218238        0.554090        15.840366\r
 108 500.000000      70.199997       28.861261       91.784966       0.186092        0.640072        16.150682\r
 109 600.000000      70.199997       34.388897       80.080872       0.170923        0.548387        16.204700\r
 110 800.000000      70.199997       31.724932       80.693367       0.209097        0.687234        16.296234\r
 111 500.000000      70.199997       29.534769       90.642548       0.186860        0.645699        16.608400\r
 112 600.000000      70.199997       33.575665       80.419601       0.169036        0.550485        16.661484\r
 113 800.000000      70.199997       32.273979       80.836380       0.233419        0.736384        16.752117\r
 114 500.000000      70.199997       30.326431       89.848175       0.171086        0.605517        17.063366\r
 115 600.000000      70.199997       33.166588       80.786491       0.168807        0.602496        17.117367\r
 116 800.000000      70.199997       32.869972       80.351112       0.227870        0.636410        17.208918\r
 117 500.000000      70.199997       30.862984       89.184525       0.177327        0.614375        17.515566\r
 118 600.000000      70.199997       32.507870       81.470810       0.178960        0.580649        17.569584\r
 119 800.000000      70.199997       33.496403       80.334702       0.234722        0.695877        17.661133\r
 120 500.000000      70.199997       31.517717       88.432266       0.174433        0.659038        17.975117\r
 121 600.000000      70.199997       32.048779       81.642471       0.152527        0.558455        18.029118\r
 122 800.000000      70.199997       33.980083       79.763657       0.193986        0.594255        18.120667\r
 123 500.000000      70.199997       32.218941       87.620239       0.187342        0.581315        18.426416\r
 124 600.000000      70.199997       31.491695       82.219070       0.168306        0.600490        18.480417\r
 125 800.000000      70.199997       34.381107       79.461418       0.186950        0.583910        18.571051\r
 126 500.000000      70.199997       32.685715       86.783661       0.170143        0.606421        18.881384\r
 127 600.000000      70.199997       30.841846       82.883598       0.159840        0.594154        18.934467\r
 128 800.000000      70.199997       34.742210       79.276291       0.211340        0.699513        19.026934\r
 129 500.000000      70.199997       33.410263       86.391388       0.169942        0.616878        19.338167\r
 130 600.000000      70.199997       30.355099       83.537376       0.165741        0.619693        19.392183\r
 131 800.000000      70.199997       35.360939       79.278404       0.227180        0.652072        19.483717\r
 132 500.000000      70.199997       34.151924       86.135124       0.172686        0.564723        19.793133\r
 133 600.000000      70.199997       29.791485       84.337120       0.187693        0.650307        19.845316\r
 134 800.000000      70.199997       35.815090       79.391251       0.166325        0.598610        19.936850\r
 135 500.000000      70.199997       34.900227       85.657387       0.174205        0.600390        20.249916\r
 136 600.000000      70.199997       29.325256       84.754524       0.175693        0.621328        20.303017\r
 137 800.000000      70.199997       36.790798       79.067253       0.214295        0.600190        20.395483\r
 138 500.000000      70.199997       35.596573       85.272148       0.159852        0.588949        20.706717\r
 139 600.000000      70.199997       28.780849       85.328804       0.180259        0.613952        20.760733\r
 140 800.000000      70.199997       37.262283       79.473442       0.186839        0.537472        20.852266\r
 141 500.000000      70.199997       36.431496       85.154678       0.164527        0.557547        21.164433\r
 142 600.000000      70.199997       28.170368       86.151955       0.187921        0.612098        21.218433\r
 143 800.000000      70.199997       37.759155       79.107323       0.181551        0.611330        21.309067\r
 144 500.000000      70.199997       37.207272       84.745720       0.165935        0.557696        21.619383\r
 145 600.000000      70.199997       27.627497       86.970947       0.198114        0.644014        21.673401\r
 146 800.000000      70.199997       38.384769       78.706894       0.204168        0.623798        21.764933\r
 147 500.000000      70.199997       38.072567       84.651772       0.153003        0.560179        22.076183\r
 148 600.000000      70.199997       27.323185       87.929939       0.182189        0.629034        22.127451\r
 149 800.000000      70.199997       39.225277       78.679436       0.173857        0.549552        22.218067\r
 150 500.000000      70.199997       39.103428       85.707954       5.520249        4.300807        22.522900\r
 151 600.000000      70.199997       26.710173       88.723228       0.188480        0.657669        22.576916\r
 152 800.000000      70.199997       39.638107       78.285858       0.157513        0.507776        22.668449\r
 153 500.000000      70.199997       39.091900       84.565643       0.157453        0.572137        22.979700\r
 154 600.000000      70.199997       26.618959       88.833755       0.181685        0.642237        23.033701\r
 155 800.000000      70.199997       39.707172       78.550163       0.136902        0.483014        23.124332