research/ellipsometry/WVASE32/EXAMPLES/POLY-SI.DAT

   1 Complex Poly-Si structure: OX NIT OX POLY OX\r
   2 nm\r
   3 250.000000      65.000000       45.884544       108.974983      0.104222        0.183441\r
   4 260.000000      65.000000       51.114838       119.702484      0.064308        0.160218\r
   5 270.000000      65.000000       57.434525       141.810165      0.057084        0.261471\r
   6 280.000000      65.000000       62.145283       169.383606      0.061512        1.072140\r
   7 290.000000      65.000000       61.633743       143.763107      0.052058        0.254957\r
   8 300.000000      65.000000       58.379578       120.914551      0.044633        0.129917\r
   9 310.000000      65.000000       54.442814       109.294655      0.040291        0.110841\r
  10 320.000000      65.000000       50.346142       103.309242      0.044241        0.100087\r
  11 330.000000      65.000000       47.307529       100.507149      0.035260        0.118601\r
  12 340.000000      65.000000       44.655022       99.113457       0.031210        0.097928\r
  13 350.000000      65.000000       42.757011       99.140106       0.041075        0.062568\r
  14 360.000000      65.000000       40.817089       100.209908      0.032428        0.093794\r
  15 370.000000      65.000000       38.928047       101.318512      0.050018        0.061954\r
  16 380.000000      65.000000       36.855942       102.313576      0.039328        0.091242\r
  17 390.000000      65.000000       35.060661       102.827423      0.032965        0.090750\r
  18 400.000000      65.000000       33.794342       103.348343      0.032535        0.100666\r
  19 410.000000      65.000000       32.081169       104.029488      0.036490        0.110226\r
  20 420.000000      65.000000       31.789480       103.277840      0.040742        0.079552\r
  21 430.000000      65.000000       30.991796       106.662292      0.034654        0.085658\r
  22 440.000000      65.000000       28.480364       107.313812      0.038377        0.105234\r
  23 450.000000      65.000000       28.205582       102.672363      0.039611        0.091689\r
  24 460.000000      65.000000       29.801050       105.147873      0.041696        0.091333\r
  25 470.000000      65.000000       29.176939       110.497292      0.033805        0.102550\r
  26 480.000000      65.000000       27.031851       114.315178      0.030059        0.111465\r
  27 490.000000      65.000000       24.090578       113.705635      0.038053        0.106475\r
  28 500.000000      65.000000       23.043501       107.154480      0.031204        0.116947\r
  29 510.000000      65.000000       25.066790       102.864220      0.029375        0.102770\r
  30 520.000000      65.000000       26.885296       105.894775      0.032470        0.098040\r
  31 530.000000      65.000000       27.377510       110.846909      0.035823        0.113758\r
  32 540.000000      65.000000       26.942469       115.929756      0.041837        0.120208\r
  33 550.000000      65.000000       25.705677       120.201538      0.035463        0.133806\r
  34 560.000000      65.000000       23.865799       123.446625      0.040364        0.144913\r
  35 570.000000      65.000000       21.739088       124.585991      0.037193        0.149659\r
  36 580.000000      65.000000       19.846085       121.856850      0.036793        0.144390\r
  37 590.000000      65.000000       18.809731       116.565643      0.032218        0.159718\r
  38 600.000000      65.000000       19.216305       110.900337      0.033971        0.103631\r
  39 610.000000      65.000000       20.381477       107.838577      0.032757        0.116603\r
  40 620.000000      65.000000       22.105663       108.586922      0.034122        0.095773\r
  41 630.000000      65.000000       23.417887       111.316650      0.033661        0.141344\r
  42 640.000000      65.000000       23.860912       113.451584      0.034874        0.113152\r
  43 650.000000      65.000000       23.746128       116.797073      0.036378        0.106713\r
  44 660.000000      65.000000       23.839853       120.321495      0.034896        0.142396\r
  45 670.000000      65.000000       23.622648       122.931206      0.036091        0.144471\r
  46 680.000000      65.000000       23.330782       125.544724      0.039859        0.154485\r
  47 690.000000      65.000000       22.718189       129.274689      0.038813        0.167376\r
  48 700.000000      65.000000       22.021164       131.127945      0.039037        0.172199\r
  49 710.000000      65.000000       21.256641       132.759048      0.047425        0.208523\r
  50 720.000000      65.000000       20.019890       135.910568      0.038186        0.224605\r
  51 730.000000      65.000000       19.561100       134.612350      0.048631        0.219333\r
  52 740.000000      65.000000       18.341026       135.161545      0.035149        0.199758\r
  53 750.000000      65.000000       17.466991       134.599564      0.035239        0.194312\r
  54 760.000000      65.000000       16.743515       133.148819      0.034010        0.199184\r
  55 770.000000      65.000000       16.255707       131.319580      0.033863        0.182563\r
  56 780.000000      65.000000       15.920009       128.999207      0.035173        0.186022\r
  57 790.000000      65.000000       15.841523       126.284958      0.030583        0.153531\r
  58 800.000000      65.000000       15.982224       124.230957      0.032511        0.166113\r
  59 810.000000      65.000000       16.365946       122.719849      0.033924        0.146415\r
  60 820.000000      65.000000       16.787457       121.504295      0.031977        0.146990\r
  61 830.000000      65.000000       17.272249       121.145996      0.030563        0.156757\r
  62 840.000000      65.000000       17.723843       121.309937      0.032176        0.132259\r
  63 850.000000      65.000000       18.206636       121.716896      0.038367        0.150692\r
  64 860.000000      65.000000       18.592224       122.663284      0.033676        0.146397\r
  65 870.000000      65.000000       19.002676       123.597069      0.035566        0.152887\r
  66 880.000000      65.000000       19.267580       124.717331      0.032427        0.146929\r
  67 890.000000      65.000000       19.423790       126.326096      0.036889        0.149369\r
  68 900.000000      65.000000       19.606878       127.046974      0.037686        0.202950\r
  69 910.000000      65.000000       19.848772       128.519897      0.038057        0.181269\r
  70 920.000000      65.000000       19.975088       130.134949      0.038448        0.175798\r
  71 930.000000      65.000000       19.898405       131.232697      0.037454        0.174027\r
  72 940.000000      65.000000       19.914537       132.728287      0.037271        0.186253\r
  73 950.000000      65.000000       19.881035       134.081772      0.035796        0.199740\r
  74 960.000000      65.000000       19.820175       135.459290      0.037882        0.197286\r
  75 970.000000      65.000000       19.678503       136.710938      0.040948        0.214749\r
  76 980.000000      65.000000       19.584246       137.883255      0.037241        0.214233\r
  77 990.000000      65.000000       19.474430       139.164154      0.039586        0.224952\r
  78 1000.000000     65.000000       19.548693       140.427078      0.041667        0.230309\r
  79 250.000000      70.000000       47.521103       92.923363       0.072668        0.168725\r
  80 260.000000      70.000000       53.594902       105.347626      0.049836        0.139079\r
  81 270.000000      70.000000       62.506794       133.520294      0.056278        0.224986\r
  82 280.000000      70.000000       68.420212       163.128845      0.051521        0.660278\r
  83 290.000000      70.000000       64.254959       121.463585      0.042829        0.155865\r
  84 300.000000      70.000000       58.527306       98.899902       0.036293        0.096961\r
  85 310.000000      70.000000       53.872509       89.127335       0.033543        0.078392\r
  86 320.000000      70.000000       49.857647       84.631401       0.040051        0.082303\r
  87 330.000000      70.000000       46.819401       82.230377       0.039489        0.074572\r
  88 340.000000      70.000000       44.317513       81.609467       0.038815        0.085310\r
  89 350.000000      70.000000       42.655453       81.545227       0.039888        0.090822\r
  90 360.000000      70.000000       40.602016       82.506966       0.037101        0.089777\r
  91 370.000000      70.000000       38.685825       83.994408       0.037816        0.084446\r
  92 380.000000      70.000000       36.739956       84.778305       0.030970        0.074592\r
  93 390.000000      70.000000       34.834759       85.013840       0.035081        0.072896\r
  94 400.000000      70.000000       33.548103       85.362633       0.033657        0.104028\r
  95 410.000000      70.000000       31.837069       85.501846       0.031636        0.087067\r
  96 420.000000      70.000000       31.529581       84.740143       0.026873        0.077598\r
  97 430.000000      70.000000       30.460443       88.120773       0.033132        0.090930\r
  98 440.000000      70.000000       27.932039       87.541214       0.035065        0.100583\r
  99 450.000000      70.000000       28.147219       83.008621       0.030624        0.084449\r
 100 460.000000      70.000000       29.345497       86.077972       0.034618        0.099798\r
 101 470.000000      70.000000       28.333887       91.438423       0.031751        0.085289\r
 102 480.000000      70.000000       25.722492       94.432045       0.025941        0.082290\r
 103 490.000000      70.000000       22.970398       91.091682       0.027573        0.059813\r
 104 500.000000      70.000000       22.702843       83.910187       0.026275        0.090402\r
 105 510.000000      70.000000       24.986832       81.420578       0.036869        0.086009\r
 106 520.000000      70.000000       26.509466       85.774826       0.032187        0.086322\r
 107 530.000000      70.000000       26.495758       90.799835       0.031992        0.077265\r
 108 540.000000      70.000000       25.552883       95.948219       0.031742        0.078810\r
 109 550.000000      70.000000       23.847366       100.057983      0.031592        0.068017\r
 110 560.000000      70.000000       21.645203       102.094673      0.034293        0.112583\r
 111 570.000000      70.000000       19.463133       100.967964      0.025218        0.084165\r
 112 580.000000      70.000000       17.764183       95.911819       0.023317        0.098434\r
 113 590.000000      70.000000       17.453247       89.525818       0.028415        0.100693\r
 114 600.000000      70.000000       18.433170       84.422043       0.028153        0.105639\r
 115 610.000000      70.000000       19.811533       83.455116       0.027223        0.085129\r
 116 620.000000      70.000000       21.193655       85.248451       0.022538        0.099412\r
 117 630.000000      70.000000       22.237095       87.543968       0.036859        0.047523\r
 118 640.000000      70.000000       22.440744       91.203110       0.031159        0.055474\r
 119 650.000000      70.000000       22.468254       94.557007       0.033450        0.094021\r
 120 660.000000      70.000000       21.953695       98.735718       0.027258        0.084773\r
 121 670.000000      70.000000       21.585674       101.817703      0.036228        0.062024\r
 122 680.000000      70.000000       20.853516       105.494934      0.028532        0.079942\r
 123 690.000000      70.000000       19.639748       107.373184      0.033566        0.099296\r
 124 700.000000      70.000000       18.833000       109.945389      0.032042        0.099428\r
 125 710.000000      70.000000       17.772699       112.076508      0.028936        0.126318\r
 126 720.000000      70.000000       16.590162       111.227814      0.027123        0.104244\r
 127 730.000000      70.000000       15.466926       110.892105      0.024366        0.100305\r
 128 740.000000      70.000000       14.529805       109.476242      0.025535        0.105169\r
 129 750.000000      70.000000       13.748540       107.049294      0.024121        0.096632\r
 130 760.000000      70.000000       13.251670       103.764328      0.025113        0.091743\r
 131 770.000000      70.000000       13.032474       100.607697      0.026264        0.085210\r
 132 780.000000      70.000000       13.053882       97.284676       0.028269        0.119522\r
 133 790.000000      70.000000       13.447674       94.286003       0.028482        0.143274\r
 134 800.000000      70.000000       13.834887       92.588242       0.026337        0.090290\r
 135 810.000000      70.000000       14.332765       91.725288       0.027409        0.097956\r
 136 820.000000      70.000000       14.933579       91.297768       0.025539        0.078895\r
 137 830.000000      70.000000       15.450523       91.081276       0.026609        0.085588\r
 138 840.000000      70.000000       15.810467       92.711937       0.025324        0.083274\r
 139 850.000000      70.000000       16.210766       94.245995       0.027988        0.109970\r
 140 860.000000      70.000000       16.512524       95.660393       0.032808        0.082618\r
 141 870.000000      70.000000       16.668243       97.175209       0.024863        0.106472\r
 142 880.000000      70.000000       16.853773       99.115395       0.024377        0.081623\r
 143 890.000000      70.000000       16.788021       100.118965      0.025368        0.115103\r
 144 900.000000      70.000000       17.003672       102.373375      0.023387        0.098881\r
 145 910.000000      70.000000       16.876617       103.834236      0.027899        0.102264\r
 146 920.000000      70.000000       17.038206       106.479820      0.038185        0.124129\r
 147 930.000000      70.000000       16.690540       107.555305      0.025548        0.089443\r
 148 940.000000      70.000000       16.511005       109.341156      0.028743        0.090063\r
 149 950.000000      70.000000       16.282763       110.954330      0.026624        0.114226\r
 150 960.000000      70.000000       16.080486       112.332474      0.026466        0.114596\r
 151 970.000000      70.000000       15.858859       113.903870      0.034654        0.127136\r
 152 980.000000      70.000000       15.504950       115.262688      0.028524        0.115544\r
 153 990.000000      70.000000       15.254248       116.540253      0.028246        0.120332\r
 154 1000.000000     70.000000       15.124290       116.841270      0.035752        0.142595\r
 155 250.000000      75.000000       48.124508       73.332634       0.079443        0.176113\r
 156 260.000000      75.000000       55.901058       86.129059       0.043478        0.141859\r
 157 270.000000      75.000000       68.633087       116.811615      0.054261        0.209260\r
 158 280.000000      75.000000       75.518684       139.282150      0.053563        0.396675\r
 159 290.000000      75.000000       64.686646       91.549850       0.036170        0.104036\r
 160 300.000000      75.000000       57.090599       74.225456       0.034448        0.100646\r
 161 310.000000      75.000000       52.203896       67.068016       0.054675        0.133746\r
 162 320.000000      75.000000       48.753605       64.355179       0.060317        0.115148\r
 163 330.000000      75.000000       46.243637       63.138000       0.043460        0.152654\r
 164 340.000000      75.000000       44.242840       62.556221       0.045862        0.163851\r
 165 350.000000      75.000000       42.549706       62.519932       0.042378        0.125543\r
 166 360.000000      75.000000       41.025303       63.486412       0.044399        0.137009\r
 167 370.000000      75.000000       39.204552       64.451202       0.035691        0.165419\r
 168 380.000000      75.000000       37.306507       65.170532       0.039922        0.124159\r
 169 390.000000      75.000000       35.668102       65.035439       0.039308        0.133592\r
 170 400.000000      75.000000       34.483944       65.067490       0.037501        0.153560\r
 171 410.000000      75.000000       32.864704       64.849670       0.035740        0.138245\r
 172 420.000000      75.000000       32.682980       64.150032       0.040051        0.140564\r
 173 430.000000      75.000000       31.470606       66.776665       0.040262        0.130774\r
 174 440.000000      75.000000       29.229881       65.045372       0.033967        0.132028\r
 175 450.000000      75.000000       29.744417       61.285011       0.042923        0.146533\r
 176 460.000000      75.000000       30.663725       64.689285       0.038869        0.122123\r
 177 470.000000      75.000000       29.290777       69.096054       0.037462        0.118285\r
 178 480.000000      75.000000       26.531008       70.218628       0.033384        0.108190\r
 179 490.000000      75.000000       24.364578       65.415100       0.031098        0.117540\r
 180 500.000000      75.000000       24.945312       59.148705       0.039276        0.145513\r
 181 510.000000      75.000000       27.054348       58.879471       0.038523        0.145563\r
 182 520.000000      75.000000       28.022142       63.258896       0.040320        0.134133\r
 183 530.000000      75.000000       27.552010       67.810410       0.039526        0.098295\r
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