research/ellipsometry/WVASE32/EXAMPLES/TIN.DAT

   1 TiN on thick SiO2 on Si\r
   2 nm\r
   3 250.000000      50.000000       31.244097       160.474121      0.363219        2.446202\r
   4 260.000000      50.000000       30.859385       156.815384      0.161394        0.923581\r
   5 270.000000      50.000000       30.793026       158.808716      0.091403        0.595781\r
   6 280.000000      50.000000       29.307564       160.393417      0.052220        0.357649\r
   7 290.000000      50.000000       29.277798       157.678894      0.050204        0.302361\r
   8 300.000000      50.000000       29.827269       157.539825      0.040888        0.237905\r
   9 310.000000      50.000000       30.270954       158.562683      0.034774        0.212997\r
  10 320.000000      50.000000       29.260780       159.826736      0.034148        0.226172\r
  11 330.000000      50.000000       27.983164       157.113510      0.035520        0.214282\r
  12 340.000000      50.000000       28.832479       153.883759      0.035327        0.185121\r
  13 350.000000      50.000000       30.010130       154.311172      0.034982        0.176440\r
  14 360.000000      50.000000       30.592796       156.458221      0.032850        0.180047\r
  15 370.000000      50.000000       30.182190       159.335480      0.034018        0.213934\r
  16 380.000000      50.000000       28.528122       160.563782      0.032514        0.224391\r
  17 390.000000      50.000000       26.662491       156.924484      0.031272        0.190634\r
  18 400.000000      50.000000       27.120068       150.394196      0.031768        0.151321\r
  19 410.000000      50.000000       29.336182       148.419144      0.035223        0.149769\r
  20 420.000000      50.000000       30.964977       150.492096      0.036226        0.158718\r
  21 430.000000      50.000000       31.429525       153.501801      0.035014        0.169769\r
  22 440.000000      50.000000       31.062481       155.827087      0.033636        0.178908\r
  23 450.000000      50.000000       30.189047       157.139847      0.032577        0.186941\r
  24 460.000000      50.000000       29.095270       157.000534      0.031568        0.181945\r
  25 470.000000      50.000000       28.028315       155.000031      0.031874        0.174458\r
  26 480.000000      50.000000       27.634441       151.331345      0.030999        0.150216\r
  27 490.000000      50.000000       28.212328       147.412354      0.034103        0.144604\r
  28 500.000000      50.000000       29.566864       144.986618      0.035681        0.137405\r
  29 510.000000      50.000000       31.060450       144.668732      0.036248        0.135062\r
  30 520.000000      50.000000       32.134533       145.419189      0.036535        0.136026\r
  31 530.000000      50.000000       32.873482       146.375565      0.037562        0.141724\r
  32 540.000000      50.000000       33.437893       147.448959      0.036373        0.140181\r
  33 550.000000      50.000000       33.793808       148.691895      0.037154        0.148022\r
  34 560.000000      50.000000       33.872486       149.963181      0.036897        0.152123\r
  35 570.000000      50.000000       33.654217       150.914047      0.036133        0.154252\r
  36 580.000000      50.000000       33.301620       151.103943      0.036835        0.159631\r
  37 590.000000      50.000000       33.015099       150.573380      0.035409        0.150431\r
  38 600.000000      50.000000       32.978001       149.565140      0.036226        0.149119\r
  39 610.000000      50.000000       33.191338       148.394867      0.036204        0.143683\r
  40 620.000000      50.000000       33.621971       147.479691      0.036961        0.142299\r
  41 630.000000      50.000000       34.167324       146.843628      0.037395        0.139457\r
  42 640.000000      50.000000       34.769920       146.517624      0.037532        0.139172\r
  43 650.000000      50.000000       35.359047       146.485886      0.036221        0.132522\r
  44 660.000000      50.000000       35.967888       146.622925      0.038049        0.138997\r
  45 670.000000      50.000000       36.567936       146.999969      0.039269        0.143438\r
  46 680.000000      50.000000       37.069538       147.435379      0.038386        0.141916\r
  47 690.000000      50.000000       37.537067       147.994217      0.038753        0.144287\r
  48 700.000000      50.000000       37.945786       148.582306      0.039172        0.148187\r
  49 710.000000      50.000000       38.307388       149.219910      0.038043        0.146279\r
  50 720.000000      50.000000       38.618053       149.849258      0.037953        0.148067\r
  51 730.000000      50.000000       38.896629       150.496506      0.038358        0.152188\r
  52 740.000000      50.000000       39.137566       151.139679      0.037816        0.152991\r
  53 750.000000      50.000000       39.344086       151.756577      0.038289        0.158544\r
  54 760.000000      50.000000       39.504730       152.381531      0.037596        0.158397\r
  55 770.000000      50.000000       39.655106       152.977676      0.039139        0.168786\r
  56 780.000000      50.000000       39.785069       153.597305      0.038350        0.168075\r
  57 790.000000      50.000000       39.899532       154.140717      0.038178        0.170715\r
  58 800.000000      50.000000       39.989410       154.700195      0.037275        0.170062\r
  59 810.000000      50.000000       40.054989       155.240021      0.037633        0.176165\r
  60 820.000000      50.000000       40.096256       155.864120      0.036868        0.175310\r
  61 830.000000      50.000000       40.068062       156.249771      0.038043        0.185605\r
  62 840.000000      50.000000       40.023865       156.719971      0.037682        0.185753\r
  63 850.000000      50.000000       39.982342       156.962234      0.037456        0.186932\r
  64 860.000000      50.000000       39.956059       157.146881      0.036828        0.184412\r
  65 870.000000      50.000000       39.958618       157.341537      0.037466        0.191045\r
  66 880.000000      50.000000       39.953934       157.514587      0.036638        0.186591\r
  67 890.000000      50.000000       40.000839       157.657410      0.038033        0.195514\r
  68 900.000000      50.000000       40.058510       157.773361      0.038256        0.196882\r
  69 910.000000      50.000000       40.098995       157.940292      0.037423        0.195031\r
  70 920.000000      50.000000       40.169327       158.033539      0.038045        0.199265\r
  71 930.000000      50.000000       40.262211       158.136642      0.037000        0.193834\r
  72 940.000000      50.000000       40.348072       158.353027      0.037917        0.201755\r
  73 950.000000      50.000000       40.421497       158.452347      0.037120        0.196520\r
  74 960.000000      50.000000       40.521103       158.622238      0.036950        0.198680\r
  75 970.000000      50.000000       40.598648       158.892609      0.037728        0.204722\r
  76 980.000000      50.000000       40.686970       159.001038      0.037644        0.205674\r
  77 990.000000      50.000000       40.780479       159.196167      0.036300        0.198480\r
  78 1000.000000     50.000000       40.839424       159.340805      0.037449        0.206648\r
  79 250.000000      60.000000       25.009886       138.092804      0.409647        1.657276\r
  80 260.000000      60.000000       23.945190       142.459824      0.195393        0.876284\r
  81 270.000000      60.000000       22.302521       140.657242      0.135362        0.622916\r
  82 280.000000      60.000000       22.445339       138.662033      0.071290        0.310169\r
  83 290.000000      60.000000       22.777218       139.643005      0.051476        0.218175\r
  84 300.000000      60.000000       22.180489       142.489777      0.034907        0.157766\r
  85 310.000000      60.000000       21.052504       139.989822      0.030046        0.130689\r
  86 320.000000      60.000000       21.138765       134.058395      0.031259        0.122553\r
  87 330.000000      60.000000       22.536724       133.476166      0.032845        0.121078\r
  88 340.000000      60.000000       23.327623       135.867462      0.031956        0.118981\r
  89 350.000000      60.000000       23.280949       139.176849      0.032989        0.131189\r
  90 360.000000      60.000000       22.114210       142.281372      0.030531        0.135903\r
  91 370.000000      60.000000       19.407516       140.338272      0.026988        0.126912\r
  92 380.000000      60.000000       19.082613       128.472626      0.029391        0.113539\r
  93 390.000000      60.000000       22.058460       124.643852      0.034445        0.113893\r
  94 400.000000      60.000000       24.246553       128.372055      0.035081        0.111723\r
  95 410.000000      60.000000       24.798098       133.300644      0.033945        0.115578\r
  96 420.000000      60.000000       24.207561       137.194199      0.031511        0.117068\r
  97 430.000000      60.000000       22.966869       139.134995      0.031448        0.127521\r
  98 440.000000      60.000000       21.436674       138.568024      0.028699        0.119671\r
  99 450.000000      60.000000       20.136372       134.872208      0.028970        0.119133\r
 100 460.000000      60.000000       19.771515       128.479050      0.030246        0.114165\r
 101 470.000000      60.000000       20.940676       121.861832      0.032046        0.105485\r
 102 480.000000      60.000000       23.274281       119.143959      0.037187        0.109199\r
 103 490.000000      60.000000       25.352362       120.202980      0.038682        0.107599\r
 104 500.000000      60.000000       26.696951       122.569672      0.039705        0.109438\r
 105 510.000000      60.000000       27.531439       125.036804      0.040186        0.112103\r
 106 520.000000      60.000000       27.947136       127.480522      0.038936        0.110732\r
 107 530.000000      60.000000       27.914064       129.691025      0.039189        0.115930\r
 108 540.000000      60.000000       27.507610       131.155975      0.037086        0.112560\r
 109 550.000000      60.000000       26.937679       131.549988      0.037252        0.116085\r
 110 560.000000      60.000000       26.443924       130.755661      0.036275        0.112644\r
 111 570.000000      60.000000       26.222019       129.017273      0.037103        0.113232\r
 112 580.000000      60.000000       26.472847       126.918808      0.037534        0.109963\r
 113 590.000000      60.000000       27.055523       125.052155      0.039678        0.111706\r
 114 600.000000      60.000000       27.957764       123.779831      0.039980        0.108732\r
 115 610.000000      60.000000       28.969185       123.166588      0.041757        0.110068\r
 116 620.000000      60.000000       29.964029       123.106903      0.042067        0.108403\r
 117 630.000000      60.000000       30.910845       123.466240      0.043676        0.111080\r
 118 640.000000      60.000000       31.778996       124.120956      0.043678        0.110368\r
 119 650.000000      60.000000       32.550438       124.947563      0.043745        0.110202\r
 120 660.000000      60.000000       33.267181       125.962120      0.043904        0.111226\r
 121 670.000000      60.000000       33.944092       127.149612      0.043316        0.110167\r
 122 680.000000      60.000000       34.480896       128.258728      0.043612        0.111740\r
 123 690.000000      60.000000       34.970760       129.474670      0.043268        0.112001\r
 124 700.000000      60.000000       35.376209       130.646744      0.043266        0.113567\r
 125 710.000000      60.000000       35.702747       131.781708      0.043208        0.114665\r
 126 720.000000      60.000000       35.969181       132.845139      0.043180        0.117034\r
 127 730.000000      60.000000       36.206909       133.919006      0.042534        0.116393\r
 128 740.000000      60.000000       36.390373       134.901550      0.042237        0.117789\r
 129 750.000000      60.000000       36.536880       135.814316      0.041809        0.117948\r
 130 760.000000      60.000000       36.690727       136.765213      0.041518        0.119479\r
 131 770.000000      60.000000       36.788250       137.718872      0.040897        0.119760\r
 132 780.000000      60.000000       36.802700       138.598419      0.041533        0.123887\r
 133 790.000000      60.000000       36.780075       139.383759      0.041550        0.126328\r
 134 800.000000      60.000000       36.714352       140.017822      0.041579        0.127755\r
 135 810.000000      60.000000       36.669632       140.496902      0.040452        0.126077\r
 136 820.000000      60.000000       36.650925       140.879196      0.039018        0.122641\r
 137 830.000000      60.000000       36.644444       141.118332      0.040850        0.128915\r
 138 840.000000      60.000000       36.698071       141.315979      0.040839        0.128980\r
 139 850.000000      60.000000       36.781151       141.507706      0.040538        0.129305\r
 140 860.000000      60.000000       36.893776       141.721878      0.040558        0.129572\r
 141 870.000000      60.000000       37.012653       141.964188      0.040304        0.128755\r
 142 880.000000      60.000000       37.158394       142.250961      0.039696        0.127364\r
 143 890.000000      60.000000       37.292290       142.527847      0.039907        0.128970\r
 144 900.000000      60.000000       37.428284       142.840622      0.039295        0.127933\r
 145 910.000000      60.000000       37.566994       143.139511      0.039496        0.129633\r
 146 920.000000      60.000000       37.705811       143.469208      0.040053        0.132839\r
 147 930.000000      60.000000       37.858532       143.773575      0.038995        0.129751\r
 148 940.000000      60.000000       37.993412       144.147034      0.040528        0.136133\r
 149 950.000000      60.000000       38.113518       144.483658      0.040194        0.135100\r
 150 960.000000      60.000000       38.244556       144.802429      0.038958        0.132630\r
 151 970.000000      60.000000       38.385231       145.262405      0.039446        0.135337\r
 152 980.000000      60.000000       38.484928       145.541550      0.039812        0.137859\r
 153 990.000000      60.000000       38.632225       145.924225      0.039061        0.136100\r
 154 1000.000000     60.000000       38.719940       146.229233      0.039275        0.138324\r
 155 250.000000      70.000000       18.606033       100.394325      0.519998        1.736431\r
 156 260.000000      70.000000       17.407429       98.826843       0.202998        0.723530\r
 157 270.000000      70.000000       17.204700       96.209267       0.103441        0.373328\r
 158 280.000000      70.000000       17.300873       97.531158       0.074976        0.266252\r
 159 290.000000      70.000000       15.863896       99.472168       0.053041        0.194493\r
 160 300.000000      70.000000       14.692114       91.022255       0.048715        0.186440\r
 161 310.000000      70.000000       17.252693       88.300095       0.037115        0.121677\r
 162 320.000000      70.000000       18.139835       90.828094       0.038842        0.121318\r
 163 330.000000      70.000000       18.060190       94.481705       0.037173        0.116821\r
 164 340.000000      70.000000       17.049849       97.429680       0.035086        0.117838\r
 165 350.000000      70.000000       15.266356       96.252457       0.032413        0.118546\r
 166 360.000000      70.000000       14.386981       85.265198       0.031361        0.120900\r
 167 370.000000      70.000000       17.657532       76.994133       0.041117        0.134145\r
 168 380.000000      70.000000       20.109871       83.195709       0.043154        0.123829\r
 169 390.000000      70.000000       20.369488       90.261482       0.041573        0.117418\r
 170 400.000000      70.000000       19.353226       95.353699       0.039505        0.116766\r
 171 410.000000      70.000000       17.716442       97.236526       0.035360        0.113450\r
 172 420.000000      70.000000       16.088846       94.740364       0.034482        0.120057\r
 173 430.000000      70.000000       15.247602       87.838776       0.032913        0.119691\r
 174 440.000000      70.000000       15.871657       79.209946       0.037060        0.131833\r
 175 450.000000      70.000000       17.976009       73.828026       0.041734        0.135850\r
 176 460.000000      70.000000       20.687244       74.062325       0.048559        0.140877\r
 177 470.000000      70.000000       22.801138       78.279015       0.049999        0.131213\r
 178 480.000000      70.000000       23.823389       83.209229       0.050055        0.125486\r
 179 490.000000      70.000000       24.138714       87.517471       0.049213        0.121463\r
 180 500.000000      70.000000       23.912079       91.140259       0.047933        0.119080\r
 181 510.000000      70.000000       23.225897       93.587822       0.046203        0.117613\r
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 183 530.000000      70.000000       21.683775       93.302574       0.043164        0.116189\r
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