Merge branch 'master' of mussel.ucc.asn.au:matches/honours

[matches/honours.git] / research / ellipsometry / WVASE32 / Wvase.cnt

:Base Wvase.hlp>main\r
1 Introduction\r
2 WVASE32\99 as a Windows\99 application=WVASE32TasaWindowsTapplication\r
2 Organization of this manual=Organizationofthismanual\r
2 How to use this manual\r
3 How to use this manual=Howtousethismanual\r
3 All users=Allusers\r
3 VASE? users=VASE.users\r
3 M-44? users=M.44.users\r
1 A Short Course in Ellipsometry\r
2 Short course overview=Shortcourseoverview\r
2 What is ellipsometry?\r
3 What is ellipsometry?=Whatisellipsometry.\r
3 Why variable angle spectroscopic ellipsometry (VASE?)?=Whyvariableanglespectroscopicellipsometry.VASE...\r
3 What does an ellipsometer measure?=Whatdoesanellipsometermeasure.\r
3 What parameters can be determined?=Whatparameterscanbedetermined.\r
3 What are the regimes of applicability?=Whataretheregimesofapplicability.\r
3 Accuracy and precision of ellipsometric experiments=Accuracyandprecisionofellipsometricexperiments\r
2 General procedure for optical experiments\r
3 General procedure for optical experiments=Generalprocedureforopticalexperiments\r
3 Measurement=Measurement\r
3 Development of a model=Developmentofamodel\r
3 Fit model to measured data=Fitmodeltomeasureddata\r
3 Evaluate the best-fit model=Evaluatethebest.fitmodel\r
2 Polarized light\r
3 Polarized light=Polarizedlight\r
3 Maxwell's equations and the electromagnetic plane wave=Maxwell.sequationsandtheelectromagneticplanewave\r
3 Jones vectors and matrices=Jonesvectorsandmatrices\r
3 Light polarization states=Lightpolarizationstates\r
3 Unpolarized (randomly polarized) light=Unpolarized.randomlypolarized.light\r
3 Partially polarized light=Partiallypolarizedlight\r
2 Optical components used in ellipsometers\r
3 Optical components used in ellipsometers=Opticalcomponentsusedinellipsometers\r
3 Light sources=Lightsources\r
3 Optical fibers=Opticalfibers\r
3 Beam modulators=Beammodulators\r
3 Polarizers=Polarizers\r
3 Retarders=Retarders\r
3 Detectors=Detectors\r
2 Ellipsometer principles and configurations\r
3 Ellipsometer principles and configurations=Ellipsometerprinciplesandconfigurations\r
3 Principles of ellipsometer design=Principlesofellipsometerdesign\r
3 Null ellipsometry=Nullellipsometry\r
3 Polarization modulation ellipsometers=Polarizationmodulationellipsometers\r
3 Rotating element ellipsometers=Rotatingelementellipsometers\r
3 Rotating analyzer vs. rotating polarizer ellipsometers=Rotatinganalyzervs.rotatingpolarizerellipsometers\r
3 Rotating analyzer with variable retarder ellipsometry=Rotatinganalyzerwithvariableretarderellipsometry\r
3 Variable vs. fixed angle of incidence=Variablevs.fixedangleofincidence\r
2 The rotating analyzer ellipsometer\r
3 The rotating analyzer ellipsometer=Therotatinganalyzerellipsometer\r
3 Configuration=Configuration\r
3 Measurement of the reflected beam polarization state=Measurementofthereflectedbeampolarizationstate\r
3 Jones matrix analysis of the rotating analyzer ellipsometer=Jonesmatrixanalysisoftherotatinganalyzerellipsometer\r
3 Anisotropic or depolarizing samples=Anisotropicordepolarizingsamples\r
3 Calibration of the polarizer angles=Calibrationofthepolarizerangles\r
3 Error (sensitivity) analysis - polarizer tracking=Error.sensitivity.analysis.polarizertracking\r
2 The J. A. Woollam Co., Inc. VASE? instrument\r
3 The J. A. Woollam Co., Inc. VASE? instrument=TheJ.A.WoollamCo..Inc.VASE.instrument\r
2 Reflection of polarized light from planar structures\r
3 Reflection of polarized light from planar structures=Reflectionofpolarizedlightfromplanarstructures\r
3 Measurement geometry=Measurementgeometry\r
3 Optical constants and what they mean=Opticalconstantsandwhattheymean\r
3 Bulk materials=Bulkmaterials\r
3 Single films on thick substrates=Singlefilmsonthicksubstrates\r
3 Multilayer formalisms=Multilayerformalisms\r
3 Superlattices=Superlattices\r
3 Grading=Grading\r
3 Composite materials and roughness - EMA models=Compositematerialsandroughness.EMAmodels\r
2 Regression analysis of optical data\r
3 Regression analysis of optical data=Regressionanalysisofopticaldata\r
3 Description of the problem=Descriptionoftheproblem\r
3 The gradient method=Thegradientmethod\r
3 The inverse Hessian method=TheinverseHessianmethod\r
3 The Levenberg-Marquardt algorithm=TheLevenberg.Marquardtalgorithm\r
3 Evaluating the best-fit results=Evaluatingthebest.fitresults\r
3 Interpretation of confidence limits=Interpretationofconfidencelimits1\r
2 Optical properties of materials and thin films\r
3 Optical properties of materials and thin films=Opticalpropertiesofmaterialsandthinfilms\r
3 Optical constants - what are they?=Opticalconstants.whatarethey.\r
3 Kramers-Kronig relations=Kramers.Kronigrelations\r
3 Interband absorption=Interbandabsorption\r
3 Intraband absorption=Intrabandabsorption\r
3 Free carrier absorption=Freecarrierabsorption\r
3 Dielectric materials and semiconductors=Dielectricmaterialsandsemiconductors\r
3 Metals=Metals\r
3 Bulk vs. thin film optical constants=Bulkvs.thinfilmopticalconstants\r
1 Navigating WVASE32\99\r
2 Working in the Windows\99 operating system\r
3 Working in the Windows\99 operating system=WorkingintheWindowsToperatingsystem\r
3 Starting Windows?=StartingWindows.\r
3 Windows\99 basics=WindowsTbasics\r
3 Working with windows and menus\r
4 Working with windows and menus=Workingwithwindowsandmenus\r
4 Menus=Menus\r
4 Minimizing and maximizing windows=Minimizingandmaximizingwindows\r
3 Dialog boxes\r
4 Dialog boxes=Dialogboxes\r
4 Drives=Drives\r
4 Directories=Directories\r
4 List files of type=Listfilesoftype\r
4 File name=Filename\r
4 Ok button=Okbutton1\r
4 Cancel button=Cancelbutton1\r
3 Summary of Windows\99 functions\r
4 Summary of Windows\99 functions=SummaryofWindowsTfunctions\r
2 Starting WVASE32\99\r
3 Starting WVASE32\99=StartingWVASE32T\r
2 The "V.A.S.E. for Windows" frame\r
3 The "V.A.S.E. for Windows" frame=The.V.A.S.E.forWindows.frame\r
2 Summary of main window functions\r
3 Summary of main window functions=Summaryofmainwindowfunctions\r
3 Experimental Data window=ExperimentalDatawindow\r
3 Model window=Modelwindow\r
3 Generated Data window=GeneratedDatawindow\r
3 Graph window=Graphwindow\r
3 Fit window=Fitwindow\r
3 Hardware window=Hardwarewindow\r
2 The menubar and menu naming convention\r
3 The menubar and menu naming convention=Themenubarandmenunamingconvention\r
2 |Window menu\r
3 |Window menu=.Windowmenu\r
2 |Global menu\r
3 |Global menu=.Globalmenu\r
3 |Global|Help item=.Global.Helpitem\r
3 |Global|Defaults item=.Global.Defaultsitem\r
3 |Global|Save_Current_Environment item=.Global.Save.Current.Environmentitem\r
3 |Global|Load_New_Environment item=.Global.Load.New.Environmentitem\r
3 |Global|Run_WVASE_Tools item=.Global.Run.WVASE.Toolsitem\r
3 |Global|About item=.Global.Aboutitem\r
2 |File|Exit_WVASE item\r
3 |File|Exit_WVASE item=.File.Exit.WVASEitem\r
1 Hardware Window:  VASE®\r
2 Hardware window overview for VASE® systems\r
3 Hardware window overview for VASE® systems=HardwarewindowoverviewforVASErsystems\r
3 Features displayed in the Hardware window\r
4 Features displayed in the Hardware window=FeaturesdisplayedintheHardwarewindow1\r
4 Title bar=Titlebar1\r
4 Motor position=Motorposition1\r
4 Calibration constants=Calibrationconstants1\r
4 Translator position=Translatorposition\r
3 Hardware window menubar\r
4 Hardware window menubar=Hardwarewindowmenubar1\r
3 Summary of VASE® system options\r
4 Summary of VASE® system options=SummaryofVASErsystemoptions\r
4 Translator equipped systems=Translatorequippedsystems\r
4 Infrared extended system=Infraredextendedsystem\r
4 PTI monochromator=PTImonochromator\r
4 CVI monochromator=CVImonochromator\r
3 Common Hardware window message boxes\r
4 Common Hardware window message boxes=CommonHardwarewindowmessageboxes1\r
2 Hardware|File menu\r
3 Hardware|File menu=Hardware.Filemenu1\r
3 Hardware|File|View_Log_File item=Hardware.File.View.Log.Fileitem1\r
2 Hardware|Initialize command\r
3 Hardware|Initialize command=Hardware.Initializecommand1\r
2 Hardware|Acquire_Data menu\r
3 Hardware|Acquire_Data menu=Hardware.Acquire.Datamenu\r
2 Hardware|Acquire_Data|Align item\r
3 Hardware|Acquire_Data|Align item=Hardware.Acquire.Data.Alignitem\r
2 Hardware|Acquire_Data|Calibrate item\r
3 Hardware|Acquire_Data|Calibrate item=Hardware.Acquire.Data.Calibrateitem\r
3 When and why to calibrate=Whenandwhytocalibrate\r
3 Overview of calibration procedure=Overviewofcalibrationprocedure\r
3 What happens during the calibration=Whathappensduringthecalibration\r
3 The calibration dialog box\r
4 The calibration dialog box=Thecalibrationdialogbox1\r
4 Calibration mode=Calibrationmode\r
4 Revs per measurement=Revspermeasurement1\r
4 # of points=.ofpoints1\r
4 Degree span=Degreespan\r
3 Evaluating the calibration results\r
4 Evaluating the calibration results=Evaluatingthecalibrationresults\r
4 Bad calibration=Badcalibration\r
4 Calibration error, but calibration OK=Calibrationerror.butcalibrationOK\r
4 Check for polarizer off by 90°=Checkforpolarizeroffby90.\r
4 Check the log file=Checkthelogfile\r
3 Choice of calibration sample\r
4 Choice of calibration sample=Choiceofcalibrationsample\r
2 Hardware|Acquire_Data|Spectroscopic_Scan item\r
3 Hardware|Acquire_Data|Spectroscopic_Scan item=Hardware.Acquire.Data.Spectroscopic.Scanitem\r
3 The spectroscopic scan dialog box\r
4 The spectroscopic scan dialog box=Thespectroscopicscandialogbox\r
4 Wavelength range boxes=Wavelengthrangeboxes1\r
4 Angle range boxes=Anglerangeboxes1\r
4 Revs per measurement=Revspermeasurement2\r
4 Acquisition settings list=Acquisitionsettingslist\r
4 Change settings button=Changesettingsbutton\r
4 Cancel button=Cancelbutton2\r
4 Ok button=Okbutton2\r
3 Ellipsometric data acquisition options\r
4 Ellipsometric data acquisition options=Ellipsometricdataacquisitionoptions\r
4 Optical components box=Opticalcomponentsbox\r
4 Track polarizer option=Trackpolarizeroption\r
4 Fixed polarizer setting option=Fixedpolarizersettingoption\r
4 Zone average polarizer checkbox=Zoneaveragepolarizercheckbox\r
4 Use auto retarder=Useautoretarder\r
4 Revs/Measurement=Revs.Measurement\r
4 Sample type box=Sampletypebox\r
4 Isotropic Jones matrix option=IsotropicJonesmatrixoption\r
4 Anisotropic Jones matrix option=AnisotropicJonesmatrixoption\r
4 Dynamic averaging box=Dynamicaveragingbox\r
4 Dynamic averaging enabled check box=Dynamicaveragingenabledcheckbox\r
4 Maximum # of revs=Maximum.ofrevs\r
4 Threshold intensity=Thresholdintensity\r
4 Monochromator slit width box=Monochromatorslitwidthbox\r
4 Max. slit width box=Max.slitwidthbox\r
4 Auto slit adjustment check box=Autoslitadjustmentcheckbox\r
4 Reset to defaults button=Resettodefaultsbutton\r
4 Cancel button=Cancelbutton3\r
4 Ok button=Okbutton3\r
2 Hardware|Acquire_Data|Dynamic_Scan item\r
3 Hardware|Acquire_Data|Dynamic_Scan item=Hardware.Acquire.Data.Dynamic.Scanitem\r
3 The dynamic scan dialog box\r
4 The dynamic scan dialog box=Thedynamicscandialogbox\r
4 # of wavelengths=.ofwavelengths\r
4 Wavelength list=Wavelengthlist\r
4 Revs/meas=Revs.meas1\r
4 Ellipsometric data acquisition settings=Ellipsometricdataacquisitionsettings\r
4 Change settings=Changesettings\r
4 Dynamic fit=Dynamicfit\r
2 Hardware|Acquire_Data|R&T_Data item\r
3 Hardware|Acquire_Data|R&T_Data item=Hardware.Acquire.Data.R.T.Dataitem\r
3 The R&T scan dialog box\r
4 The R&T scan dialog box=TheR.Tscandialogbox\r
4 Data acquisition mode=Dataacquisitionmode\r
4 Data type=Datatype1\r
4 Polarizer angle=Polarizerangle\r
4 Wavelength range boxes=Wavelengthrangeboxes2\r
4 Angle range boxes=Anglerangeboxes2\r
4 Revs per measurement=Revspermeasurement3\r
4 Go to white light for alignment=Gotowhitelightforalignment\r
4 Use auxiliary detector=Useauxiliarydetector\r
4 Acquire baseline from reference sample=Acquirebaselinefromreferencesample\r
2 Hardware|Acquire_Data|Translation_Scan item\r
3 Hardware|Acquire_Data|Translation_Scan item=Hardware.Acquire.Data.Translation.Scanitem\r
3 The translation scan dialog box\r
4 The translation scan dialog box=Thetranslationscandialogbox\r
4 Discrete wavelengths=Discretewavelengths\r
4 VASE?  data=VASE.data\r
4 Reflection/Transmission data=Reflection.Transmissiondata\r
4 Angles=Angles1\r
4 Translator scan parameters=Translatorscanparameters\r
4 Revs/meas=Revs.meas2\r
4 Polarizer=Polarizer1\r
2 Hardware|Move menu\r
3 Hardware|Move menu=Hardware.Movemenu\r
3 Hardware|Move|Monochromator item\r
4 Hardware|Move|Monochromator item=Hardware.Move.Monochromatoritem\r
4 Enter new position=Enternewposition1\r
4 White light button=Whitelightbutton\r
3 Hardware|Move|Angle_of_Incidence item\r
4 Hardware|Move|Angle_of_Incidence item=Hardware.Move.Angle.of.Incidenceitem\r
4 Enter new angle=Enternewangle\r
3 Hardware|Move|Polarizer item\r
4 Hardware|Move|Polarizer item=Hardware.Move.Polarizeritem\r
4 Enter new position=Enternewposition2\r
3 Hardware|Move|Translator item\r
4 Hardware|Move|Translator item=Hardware.Move.Translatoritem\r
4 X in cm=Xincm\r
4 Y in cm=Yincm\r
4 Home stages button=Homestagesbutton\r
2 Hardware|Setup menu\r
3 Hardware|Setup menu=Hardware.Setupmenu\r
3 Hardware|Setup|Current_Motor_Settings item\r
4 Hardware|Setup|Current_Motor_Settings item=Hardware.Setup.Current.Motor.Settingsitem\r
4 Monochromator=Monochromator\r
4 Sample stage=Samplestage\r
4 Detector stage=Detectorstage\r
4 Auto home goniometers button=Autohomegoniometersbutton\r
4 Jog buttons=Jogbuttons\r
4 Grating position=Gratingposition\r
4 Slit width=Slitwidth\r
4 Enable auto slit adjustment=Enableautoslitadjustment\r
4 Detector system=Detectorsystem\r
3 Hardware|Setup|Display_Signal item\r
4 Hardware|Setup|Display_Signal item=Hardware.Setup.Display.Signalitem\r
4 <Esc> exits=.Esc.exits1\r
4 nRevs=nRevs\r
4 Gain=Gain1\r
4 Slit=Slit\r
4 Chop=Chop\r
4 Chop +2A=Chop.2A\r
4 alpha and beta=alphaandbeta\r
4 Psi and Delta=PsiandDelta\r
3 Hardware|Setup|Home_Filter item\r
4 Hardware|Setup|Home_Filter item=Hardware.Setup.Home.Filteritem\r
4 Enter home filter constant=Enterhomefilterconstant\r
1 Hardware Window:  M-44®\r
2 Hardware window overview, M-44® system\r
3 Hardware window overview, M-44® system=Hardwarewindowoverview.M.44rsystem\r
3 Features displayed in the Hardware window\r
4 Features displayed in the Hardware window=FeaturesdisplayedintheHardwarewindow2\r
4 Title bar=Titlebar2\r
4 Motor position=Motorposition2\r
4 Calibration constants=Calibrationconstants2\r
3 Hardware window menubar\r
4 Hardware window menubar=Hardwarewindowmenubar2\r
3 Common Hardware window message boxes\r
4 Common Hardware window message boxes=CommonHardwarewindowmessageboxes2\r
2 Hardware|File menu\r
3 Hardware|File menu=Hardware.Filemenu2\r
3 Hardware|File|View_Log_File item=Hardware.File.View.Log.Fileitem2\r
2 Hardware|Initialize command\r
3 Hardware|Initialize command=Hardware.Initializecommand2\r
2 Hardware|Align command\r
3 Hardware|Align command=Hardware.Aligncommand\r
2 Hardware|Calibrate command\r
3 Hardware|Calibrate command=Hardware.Calibratecommand\r
3 The calibration dialog box\r
4 The calibration dialog box=Thecalibrationdialogbox2\r
4 Normal=Normal\r
4 Coarse=Coarse\r
4 Straight-through=Straight.through\r
4 Revs per measurement=Revspermeasurement4\r
4 # of points=.ofpoints2\r
4 Degree span (of polarizer)=Degreespan.ofpolarizer.\r
4 Short wavelength / Long wavelength=Shortwavelength.Longwavelength\r
3 Effect on other windows\r
4 Effect on other windows=Effectonotherwindows1\r
2 Hardware|Ellipsometric_Data command\r
3 Hardware|Ellipsometric_Data command=Hardware.Ellipsometric.Datacommand\r
3 The ellipsometric data dialog box\r
4 The ellipsometric data dialog box=Theellipsometricdatadialogbox\r
4 Revs/meas=Revs.meas3\r
4 Polarizer setting=Polarizersetting\r
4 Current angle of incidence=Currentangleofincidence\r
4 Fit data to model in real-time=Fitdatatomodelinreal.time\r
4 Don't save dynamic data=Don.tsavedynamicdata\r
4 Data type=Datatype2\r
4 Acquire single scan=Acquiresinglescan\r
4 Update graph, every n points=Updategraph.everynpoints\r
4 Selected channels=Selectedchannels\r
3 Effect on other windows\r
4 Effect on other windows=Effectonotherwindows2\r
2 Hardware|Signal command\r
3 Hardware|Signal command=Hardware.Signalcommand\r
3 Signal display options\r
4 Signal display options=Signaldisplayoptions\r
4 Channel #=Channel.\r
4 All channels=Allchannels\r
4 Revs per measurement=Revspermeasurement5\r
4 Gain=Gain2\r
4 Auto switching=Autoswitching\r
4 Calc. DC offset=Calc.DCoffset\r
4 Polarizer=Polarizer2\r
4 Angle of incidence=Angleofincidence\r
1 The Experimental Data Window\r
2 Experimental data window overview\r
3 Experimental data window overview=Experimentaldatawindowoverview\r
3 Features displayed in the Experimental Data window\r
4 Features displayed in the Experimental Data window=FeaturesdisplayedintheExperimentalDatawindow\r
4 Title bar=Titlebar3\r
4 Comment line=Commentline1\r
4 Scroll bar=Scrollbar1\r
4 Selected column=Selectedcolumn\r
4 Type column=Typecolumn1\r
4 Wavelength column=Wavelengthcolumn1\r
4 Angle column=Anglecolumn1\r
4 Data columns=Datacolumns1\r
4 Time column=Timecolumn1\r
3 The Experimental Data window menubar\r
4 The Experimental Data window menubar=TheExperimentalDatawindowmenubar\r
3 Data from samples with transparent substrates\r
4 Data from samples with transparent substrates=Datafromsampleswithtransparentsubstrates\r
3 The experimental data types\r
4 The experimental data types=Theexperimentaldatatypes\r
3 Ellipsometric data types\r
4 Ellipsometric data types=Ellipsometricdatatypes\r
4 E - Ellipsometry, standard=E.Ellipsometry.standard\r
4 Eb - Ellipsometry, back-side corrected=Eb.Ellipsometry.back.sidecorrected\r
4 Er - Ellipsometry, reverse side=Er.Ellipsometry.reverseside\r
4 Et - Ellipsometry, transmission=Et.Ellipsometry.transmission\r
4 aEp - Ellipsometry, special anisotropic=aEp.Ellipsometry.specialanisotropic\r
4 aEs - Ellipsometry, special anisotropic=aEs.Ellipsometry.specialanisotropic\r
4 aEpb - Ellipsometry, special anisotropic and backside corrected=aEpb.Ellipsometry.specialanisotropicandbacksidecorrected\r
4 aEsb - Ellipsometry, special anisotropic and backside corrected=aEsb.Ellipsometry.specialanisotropicandbacksidecorrected\r
3 Reflected intensity data types\r
4 Reflected intensity data types=Reflectedintensitydatatypes\r
4 pR - Reflection, p-polarized=pR.Reflection.p.polarized\r
4 sR - Reflection, s-polarized=sR.Reflection.s.polarized\r
4 uR - Reflection, unpolarized=uR.Reflection.unpolarized\r
4 pRb - Reflection, p-polarized and backside corrected=pRb.Reflection.p.polarizedandbacksidecorrected\r
4 sRb - Reflection, s-polarized and backside corrected=sRb.Reflection.s.polarizedandbacksidecorrected\r
4 uRb - Reflection, unpolarized and backside corrected=uRb.Reflection.unpolarizedandbacksidecorrected\r
3 Transmitted intensity data types\r
4 Transmitted intensity data types=Transmittedintensitydatatypes\r
4 pT - Transmission, p-polarized=pT.Transmission.p.polarized\r
4 sT - Transmission, s-polarized=sT.Transmission.s.polarized\r
4 uT - Transmission, unpolarized=uT.Transmission.unpolarized\r
3 Generalized anisotropic ellipsometric data types\r
4 Generalized anisotropic ellipsometric data types=Generalizedanisotropicellipsometricdatatypes\r
4 Ane - Anisotropic Ellipsometry, normal component=Ane.AnisotropicEllipsometry.normalcomponent\r
4 Aps - Anisotropic Ellipsometry, p into s component=Aps.AnisotropicEllipsometry.pintoscomponent\r
4 Asp - Anisotropic Ellipsometry, s into p component=Asp.AnisotropicEllipsometry.sintopcomponent\r
3 Other data types recognized by WVASE32?\r
4 Other data types recognized by WVASE32?=OtherdatatypesrecognizedbyWVASE32.\r
4 N - Neutron reflection=N.Neutronreflection\r
4 Tph - Transmitted phase=Tph.Transmittedphase\r
2 Exp_Data|File menu\r
3 Exp_Data|File menu=Exp.Data.Filemenu\r
3 Exp_Data|File|Open_Exp_File item=Exp.Data.File.Open.Exp.Fileitem\r
3 Exp_Data|File|Append_Exp_File item=Exp.Data.File.Append.Exp.Fileitem\r
3 Exp_Data|File|Merge_Exp_Data item=Exp.Data.File.Merge.Exp.Dataitem\r
3 Exp_Data|File|Save_Exp_Data item=Exp.Data.File.Save.Exp.Dataitem\r
3 Exp_Data|File|Comment_Data item=Exp.Data.File.Comment.Dataitem\r
3 Exp_Data|File|Copy_to_Clipboard item=Exp.Data.File.Copy.to.Clipboarditem\r
2 Exp_Data|Range_Select item\r
3 Exp_Data|Range_Select item=Exp.Data.Range.Selectitem\r
3 Range select for static spectroscopic data\r
4 Range select for static spectroscopic data=Rangeselectforstaticspectroscopicdata\r
4 Angles=Angles2\r
4 Wavelengths=Wavelengths\r
4 Selected data types=Selecteddatatypes\r
4 All data button=Alldatabutton1\r
4 Add to button=Addtobutton\r
4 Remove from button=Removefrombutton\r
4 OK button=OKbutton1\r
4 Global select box=Globalselectbox\r
3 Range select for dynamic data\r
4 Range select for dynamic data=Rangeselectfordynamicdata\r
4 Time boxes=Timeboxes\r
4 # to skip=.toskip\r
4 Selected wavelengths list=Selectedwavelengthslist\r
4 OK button=OKbutton2\r
4 All data button=Alldatabutton2\r
4 Spectroscopic mode=Spectroscopicmode\r
4 Select all wavelengths=Selectallwavelengths\r
4 Time slice list=Timeslicelist\r
4 Add to list button=Addtolistbutton\r
4 Delete button=Deletebutton1\r
4 Delete all button=Deleteallbutton\r
2 Exp_Data|Angles item\r
3 Exp_Data|Angles item=Exp.Data.Anglesitem\r
3 The angles of incidence dialog box\r
4 The angles of incidence dialog box=Theanglesofincidencedialogbox\r
4 Nominal angles=Nominalangles\r
4 Actual angles=Actualangles\r
2 Exp_Data|Delete_Data command\r
3 Exp_Data|Delete_Data command=Exp.Data.Delete.Datacommand\r
2 Exp_Data|Change_Data_Type command\r
3 Exp_Data|Change_Data_Type command=Exp.Data.Change.Data.Typecommand\r
3 The change data type dialog box\r
4 The change data type dialog box=Thechangedatatypedialogbox\r
4 Current data type=Currentdatatype\r
4 Change to=Changeto\r
1 The Model Window\r
2 Model window overview\r
3 Model window overview=Modelwindowoverview\r
3 Features displayed in the Model window\r
4 Features displayed in the Model window=FeaturesdisplayedintheModelwindow\r
4 Title bar=Titlebar4\r
4 Comment line=Commentline2\r
4 Layers=Layers\r
4 Current layer=Currentlayer\r
3 The Model window menubar\r
4 The Model window menubar=TheModelwindowmenubar\r
3 Layers and optical constants\r
4 Layers and optical constants=Layersandopticalconstants\r
3 Special properties of the substrate\r
4 Special properties of the substrate=Specialpropertiesofthesubstrate\r
3 Ideal and non-ideal models\r
4 Ideal and non-ideal models=Idealandnon.idealmodels\r
3 Multiple models\r
4 Multiple models=Multiplemodels\r
2 Model|File menu\r
3 Model|File menu=Model.Filemenu\r
3 Model|File|Open_Model item=Model.File.Open.Modelitem\r
3 Model|File|Save_Model item=Model.File.Save.Modelitem\r
3 Model|File|Comment_Model item=Model.File.Comment.Modelitem\r
3 Model|File|Copy_to_Clipboard item=Model.File.Copy.to.Clipboarditem\r
2 Model|AddLayer command\r
3 Model|AddLayer command=Model.AddLayercommand\r
3 File searching pattern for Model|AddLayer=FilesearchingpatternforModel.AddLayer\r
3 Coupling of layers=Couplingoflayers\r
2 Tabulated layers\r
3 Tabulated layers=Tabulatedlayers\r
3 Standard layers\r
4 Standard layers=Standardlayers\r
4 Layer name=Layername\r
4 Comment=Comment\r
4 Spectral range=Spectralrange\r
4 Thickness=Thickness1\r
4 Thickness fit box=Thicknessfitbox\r
4 Opt. con. fit boxes=Opt.con.fitboxes1\r
4 Reset n&k button=Resetn.kbutton\r
4 OK button=OKbutton3\r
4 Cancel button=Cancelbutton4\r
4 Replace layer button=Replacelayerbutton\r
4 Delete layer button=Deletelayerbutton1\r
4 Optical constants>> button=Opticalconstants..button1\r
4 Edit n&k button=Editn.kbutton\r
4 Smooth opt. const. button=Smoothopt.const.button\r
4 Revert to previous button=Reverttopreviousbutton\r
4 Save button=Savebutton\r
4 Cancel button=Cancelbutton5\r
3 Alloy layers\r
4 Alloy layers=Alloylayers\r
4 Alloy fraction=Alloyfraction\r
4 Alloy fraction fit box=Alloyfractionfitbox\r
4 Opt. con. fit boxes=Opt.con.fitboxes2\r
4 Optical constants>> button=Opticalconstants..button2\r
3 Temp layers\r
4 Temp layers=Templayers\r
4 Temperature=Temperature\r
4 Temperature fit box=Temperaturefitbox\r
3 Alloy-temp layers\r
4 Alloy-temp layers=Alloy.templayers\r
2 Function based layers\r
3 Function based layers=Functionbasedlayers\r
3 Cauchy layer\r
4 Cauchy layer=Cauchylayer\r
4 Opt. con. fit boxes=Opt.con.fitboxes3\r
4 Optical constants>> button=Opticalconstants..button3\r
3 Lorentz oscillator layer\r
4 Lorentz oscillator layer=Lorentzoscillatorlayer\r
4 # of terms=.ofterms\r
4 Am=Am\r
4 Br=Br\r
4 En=En\r
4 e1inf=e1inf\r
3 User-defined dispersion model layer\r
4 User-defined dispersion model layer=User.defineddispersionmodellayer\r
4 Wvl units=Wvlunits\r
4 In terms of=Intermsof\r
4 Operators list>>=Operatorslist..1\r
4 n\==n.\r
4 k\==k.\r
4 Parameter name=Parametername1\r
4 Parameter value=Parametervalue1\r
4 Value button=Valuebutton1\r
4 Parameter fit box=Parameterfitbox\r
4 Fit button=Fitbutton1\r
4 Delete button=Deletebutton2\r
3 Parametric semiconductor layer\r
4 Parametric semiconductor layer=Parametricsemiconductorlayer\r
2 Composite layers\r
3 Composite layers=Compositelayers\r
3 Effective Medium Approximation (EMA) layer\r
4 Effective Medium Approximation (EMA) layer=EffectiveMediumApproximation.EMA.layer\r
4 # of constituents box=.ofconstituentsbox\r
4 Material #1 button=Material.1button1\r
4 Material #2 button=Material.2button1\r
4 Fraction #2 box=Fraction.2box\r
4 Material #3 button=Material.3button\r
4 Fraction #3 box=Fraction.3box\r
4 EMA type setting=EMAtypesetting\r
4 Depolarization factor box=Depolarizationfactorbox\r
3 EMA layer applications\r
4 EMA layer applications=EMAlayerapplications\r
4 Simulate interfacial intermixing=Simulateinterfacialintermixing\r
4 Simulate surface roughness=Simulatesurfaceroughness\r
4 Simulate oxidized surface roughness=Simulateoxidizedsurfaceroughness\r
4 Simulate index shifts=Simulateindexshifts\r
4 Model partially crystallized silicon (polysilicon)=Modelpartiallycrystallizedsilicon.polysilicon.\r
3 Graded layer\r
4 Graded layer=Gradedlayer\r
4 Opt. const. calc.=Opt.const.calc.1\r
4 Material #1 button=Material.1button2\r
4 Material #2 button=Material.2button2\r
4 EMA type=EMAtype\r
4 Profile definition=Profiledefinition1\r
4 # of nodes box=.ofnodesbox\r
4 Node position % box=Nodeposition.box\r
4 Value % box=Value.box\r
4 Slices per node box=Slicespernodebox\r
4 Opt. const. calc.=Opt.const.calc.2\r
4 Material button=Materialbutton1\r
4 Profile definition=Profiledefinition2\r
4 Operators list>>=Operatorslist..2\r
4 %\= box=..box\r
4 Parameter name=Parametername2\r
4 Parameter value=Parametervalue2\r
4 Parameter fit=Parameterfit\r
4 Fit button=Fitbutton2\r
4 Value button=Valuebutton2\r
4 Delete button=Deletebutton3\r
4 Slices per layer=Slicesperlayer\r
2 Anisotropic layers\r
3 Anisotropic layers=Anisotropiclayers\r
3 Standard anisotropic layers=Standardanisotropiclayers\r
3 Anisotropic Cauchy layer=AnisotropicCauchylayer\r
2 Specialty layers\r
3 Specialty layers=Specialtylayers\r
3 Kramers-Kronig layer\r
4 Kramers-Kronig layer=Kramers.Kroniglayer\r
4 Material button=Materialbutton2\r
4 Integration range boxes=Integrationrangeboxes\r
4 Step size box=Stepsizebox\r
4 e1 offset box=e1offsetbox\r
4 Pole #1 position=Pole.1position\r
4 Pole #1 magnitude=Pole.1magnitude\r
4 Pole #2 position=Pole.2position\r
4 Pole #2 magnitude=Pole.2magnitude\r
3 Delay layer\r
4 Delay layer=Delaylayer\r
4 Delay time box=Delaytimebox\r
4 Ok button=Okbutton4\r
4 Delete layer button=Deletelayerbutton2\r
3 Virtual interface layer\r
4 Virtual interface layer=Virtualinterfacelayer\r
4 Virtual type setting=Virtualtypesetting\r
4 Fixed at time box=Fixedattimebox\r
4 # of pts to average box=.ofptstoaveragebox\r
4 Running separation box=Runningseparationbox\r
4 Opt. const. fit boxes=Opt.const.fitboxes\r
4 Pseudo opt. constants=Pseudoopt.constants\r
3 Surface roughness layer\r
4 Surface roughness layer=Surfaceroughnesslayer\r
2 Model|DeleteMod command\r
3 Model|DeleteMod command=Model.DeleteModcommand\r
2 Model|Superlattice item\r
3 Model|Superlattice item=Model.Superlatticeitem\r
4 Superlattice #1/#2 enabled=Superlattice.1..2enabled\r
4 Start layer=Startlayer\r
4 End layer=Endlayer\r
4 # of periods=.ofperiods\r
2 Model|Growth item\r
3 Model|Growth item=Model.Growthitem\r
2 Model|Select item\r
3 Model|Select item=Model.Selectitem\r
3 Select model in standard mode\r
4 Select model in standard mode=Selectmodelinstandardmode\r
4 Current model=Currentmodel\r
4 Active in fit=Activeinfit\r
4 Model present=Modelpresent\r
4 Exp. data present=Exp.datapresent\r
3 Multiple models in dynamic-spectroscopic mode\r
4 Multiple models in dynamic-spectroscopic mode=Multiplemodelsindynamic.spectroscopicmode\r
2 Model|Options item\r
3 Model|Options item=Model.Optionsitem\r
3 The model options dialog box\r
4 The model options dialog box=Themodeloptionsdialogbox\r
4 Top layer is ambient=Toplayerisambient\r
4 # of backside reflections box=.ofbacksidereflectionsbox\r
4 % of first reflection collected box=.offirstreflectioncollectedbox\r
4 Polarizer angle for polarized refl./trans. box=Polarizerangleforpolarizedrefl..trans.box\r
4 Window effects retardation box=Windoweffectsretardationbox\r
4 Window effects azimuth box=Windoweffectsazimuthbox\r
4 Wavelength shift box=Wavelengthshiftbox\r
4 Thickness non-uniformity option=Thicknessnon.uniformityoption\r
4 Patterned layer option=Patternedlayeroption\r
4 Light bandwidth option=Lightbandwidthoption\r
4 Angular spread option=Angularspreadoption\r
4 Convolution profile shape setting=Convolutionprofileshapesetting\r
4 Convolution # of points box=Convolution.ofpointsbox\r
4 Fit profile width box=Fitprofilewidthbox\r
1 The Generated Data Window\r
2 Generated Data window overview\r
3 Generated Data window overview=GeneratedDatawindowoverview\r
3 Features displayed in the Generated Data window\r
4 Features displayed in the Generated Data window=FeaturesdisplayedintheGeneratedDatawindow\r
4 Title bar=Titlebar5\r
4 Comment line=Commentline3\r
4 Scroll bar=Scrollbar2\r
4 Type column=Typecolumn2\r
4 Wavelength column=Wavelengthcolumn2\r
4 Angle column=Anglecolumn2\r
4 Data columns=Datacolumns2\r
4 Time column=Timecolumn2\r
3 The Generated Data window menubar\r
4 The Generated Data window menubar=TheGeneratedDatawindowmenubar\r
3 Calculations performed for the different data types\r
4 Calculations performed for the different data types=Calculationsperformedforthedifferentdatatypes\r
3 Simulated data\r
4 Simulated data=Simulateddata\r
3 Simulated data standard deviations\r
4 Simulated data standard deviations=Simulateddatastandarddeviations\r
2 Gen_Data|File menu\r
3 Gen_Data|File menu=Gen.Data.Filemenu\r
3 Gen_Data|File|Open_Gen_File item=Gen.Data.File.Open.Gen.Fileitem\r
3 Gen_Data|File|Append_Gen_File item=Gen.Data.File.Append.Gen.Fileitem\r
3 Gen_Data|File|Save_Gen_Data item=Gen.Data.File.Save.Gen.Dataitem\r
3 Gen_Data|File|Comment_Data item=Gen.Data.File.Comment.Dataitem\r
3 Gen_Data|File|Copy_to_Clipboard item=Gen.Data.File.Copy.to.Clipboarditem\r
2 Gen_Data|Range item\r
3 Gen_Data|Range item=Gen.Data.Rangeitem\r
3 The generation range dialog box\r
4 The generation range dialog box=Thegenerationrangedialogbox\r
4 Range setting=Rangesetting\r
4 Angle range=Anglerange\r
4 Wavelength range=Wavelengthrange\r
4 Data type=Datatype3\r
4 Dynamic data=Dynamicdata\r
4 Time increment box=Timeincrementbox\r
4 Random noise box=Randomnoisebox\r
4 Generation mode setting=Generationmodesetting\r
2 Gen_Data|Generate_Data command\r
3 Gen_Data|Generate_Data command=Gen.Data.Generate.Datacommand\r
3 Normal generation mode=Normalgenerationmode\r
3 Sensitivity generation mode\r
4 Sensitivity generation mode=Sensitivitygenerationmode\r
4 Parameter name=Parametername3\r
4 Increment value box=Incrementvaluebox\r
3 Vary parameter generation mode\r
4 Vary parameter generation mode=Varyparametergenerationmode\r
4 Parameter name=Parametername4\r
4 Start box=Startbox\r
4 End box=Endbox\r
4 Incr box=Incrbox\r
2 Gen_Data|Copy_to_Exp command\r
3 Gen_Data|Copy_to_Exp command=Gen.Data.Copy.to.Expcommand\r
2 Gen_Data|Delete_Data command\r
3 Gen_Data|Delete_Data command=Gen.Data.Delete.Datacommand\r
1 The Graph Window\r
2 Graph window overview\r
3 Graph window overview=Graphwindowoverview\r
3 Features of a 2-D graph\r
4 Features of a 2-D graph=Featuresofa2.Dgraph\r
4 Title=Title1\r
4 X axis=Xaxis1\r
4 X-axis label=X.axislabel1\r
4 Y1 axis=Y1axis\r
4 Y1-axis label=Y1.axislabel\r
4 Legend=Legend1\r
4 Data curves=Datacurves\r
3 Features of a 3-D graph\r
4 Features of a 3-D graph=Featuresofa3.Dgraph\r
4 Title=Title2\r
4 X axis=Xaxis2\r
4 X-axis label=X.axislabel2\r
4 Y axis=Yaxis\r
4 Y-axis label=Y.axislabel\r
4 Z axis=Zaxis\r
4 Z-axis label=Z.axislabel\r
3 The Graph window menubar\r
4 The Graph window menubar=TheGraphwindowmenubar\r
3 Preparing formatted graphs\r
4 Preparing formatted graphs=Preparingformattedgraphs\r
2 Graph|File menu\r
3 Graph|File menu=Graph.Filemenu\r
3 Graph|File|Print item=Graph.File.Printitem\r
3 Graph|File|Copy_Graph_to_Clipboard item=Graph.File.Copy.Graph.to.Clipboarditem\r
3 Graph|File|Copy_Data_Points_to_Clipboard item\r
4 Graph|File|Copy_Data_Points_to_Clipboard item=Graph.File.Copy.Data.Points.to.Clipboarditem\r
4 Data format #1=Dataformat.1\r
4 Data format #2=Dataformat.2\r
3 Graph|File|Output_Data_Points_to_Text_File item\r
4 Graph|File|Output_Data_Points_to_Text_File item=Graph.File.Output.Data.Points.to.Text.Fileitem\r
2 Graph|Edit menu\r
3 Graph|Edit menu=Graph.Editmenu\r
3 Graph|Edit|Titles item\r
4 Graph|Edit|Titles item=Graph.Edit.Titlesitem\r
4 Title=Title3\r
4 X axis=Xaxis3\r
4 Y1-axis=Y1.axis\r
4 Y2-axis=Y2.axis\r
4 Scale=Scale1\r
3 Graph|Edit|Legends item\r
4 Graph|Edit|Legends item=Graph.Edit.Legendsitem\r
4 Legend=Legend2\r
4 Legend text=Legendtext\r
4 Color=Color\r
4 Style=Style\r
4 Scale=Scale2\r
4 Black default legends=Blackdefaultlegends\r
4 Suppress legend display=Suppresslegenddisplay\r
3 Graph|Edit|Font item\r
4 Graph|Edit|Font item=Graph.Edit.Fontitem\r
3 Graph|Edit|Scale item\r
4 Graph|Edit|Scale item=Graph.Edit.Scaleitem\r
4 X column=Xcolumn\r
4 Y1 column=Y1column\r
4 Y2 column=Y2column\r
4 Automatic=Automatic\r
4 Manual=Manual\r
4 Reset=Reset\r
4 Minimum=Minimum\r
4 Maximum=Maximum\r
4 # of divisions=.ofdivisions\r
4 Precision box=Precisionbox\r
4 Scale box=Scalebox\r
4 Grid lines vertical=Gridlinesvertical\r
4 Grid lines horizontal=Gridlineshorizontal\r
4 Tick marks=Tickmarks\r
4 Log scale on Y axis=LogscaleonYaxis\r
2 Graph|Data menu\r
3 Graph|Data menu=Graph.Datamenu\r
3 Generated and/or experimental data types\r
4 Generated and/or experimental data types=Generatedand.orexperimentaldatatypes\r
4 Generated and experimental=Generatedandexperimental\r
4 Difference between gen. and exp.=Differencebetweengen.andexp.\r
4 Generated only=Generatedonly\r
4 Experimental only=Experimentalonly\r
3 Optical constant data types\r
4 Optical constant data types=Opticalconstantdatatypes\r
4 Current layer (opt. const.)=Currentlayer.opt.const..\r
4 All layers (opt. const.)=Alllayers.opt.const..\r
4 Depth profile (opt. const.)=Depthprofile.opt.const..\r
3 Point by point fit parameters data type\r
4 Point by point fit parameters data type=Pointbypointfitparametersdatatype\r
3 Calibration data type\r
4 Calibration data type=Calibrationdatatype\r
2 Graph|Type menu\r
3 Graph|Type menu=Graph.Typemenu\r
3 Displayable data types\r
4 Displayable data types=Displayabledatatypes\r
4 Psi=Psi\r
4 Delta=Delta\r
4 Tan(Psi)=Tan.Psi.\r
4 Cos(Delta)=Cos.Delta.\r
4 <?1>=..1.\r
4 <?2>=..2.\r
4 <n>=.n.\r
4 <k>=.k.\r
4 Re(rho)=Re.rho.\r
4 Im(rho)=Im.rho.\r
4 Transmission=Transmission\r
4 Reflection=Reflection\r
4 Absorption=Absorption\r
4 Transmitted phase=Transmittedphase\r
4 Neutron reflectivity=Neutronreflectivity\r
4 R*k^4=R.k.4\r
2 Graph|Style menu\r
3 Graph|Style menu=Graph.Stylemenu\r
3 Graph|Style|2D item\r
4 Graph|Style|2D item=Graph.Style.2Ditem\r
4 Double Y-axis=DoubleY.axis\r
4 Graph as a function of angle=Graphasafunctionofangle\r
4 Trajectory plot=Trajectoryplot\r
4 Plot derivatives=Plotderivatives\r
3 Graph|Style|3D item\r
4 Graph|Style|3D item=Graph.Style.3Ditem\r
4 Elevation=Elevation\r
4 Reverse axis=Reverseaxis\r
4 Color surface=Colorsurface\r
1 The Fit Window\r
2 Fit window overview\r
3 Fit window overview=Fitwindowoverview\r
3 Features displayed in the Fit window\r
4 Features displayed in the Fit window=FeaturesdisplayedintheFitwindow\r
4 Title bar=Titlebar6\r
4 Final=Final\r
4 MSE=MSE\r
4 Parameter names and values=Parameternamesandvalues\r
4 Init=Init\r
4 Iter=Iter\r
4 <Esc> exits=.Esc.exits2\r
3 The Fit window menubar\r
4 The Fit window menubar=TheFitwindowmenubar\r
3 Fit parameter naming conventions\r
4 Fit parameter naming conventions=Fitparameternamingconventions\r
4 Thickness=Thickness2\r
4 Optical constants=Opticalconstants\r
4 Cauchy parameters=Cauchyparameters\r
4 EMA layer fraction=EMAlayerfraction\r
3 Fitting optical constants at every wavelength\r
4 Fitting optical constants at every wavelength=Fittingopticalconstantsateverywavelength\r
2 Fit|File menu\r
3 Fit|File menu=Fit.Filemenu\r
3 Fit|File|Copy_to_Clipboard item=Fit.File.Copy.to.Clipboarditem\r
2 Fit|Normal_Fit command\r
3 Fit|Normal_Fit command=Fit.Normal.Fitcommand\r
2 Fit|Pt_by_Pt command\r
3 Fit|Pt_by_Pt command=Fit.Pt.by.Ptcommand\r
3 Point by point fitting of static spectroscopic data\r
4 Point by point fitting of static spectroscopic data=Pointbypointfittingofstaticspectroscopicdata\r
4 Starting position=Startingposition\r
4 # pts to ave.=.ptstoave.1\r
4 Show iterations=Showiterations\r
4 Fit parameter boxes=Fitparameterboxes1\r
4 Cancel=Cancel\r
4 Ok=Ok\r
3 Point by point fitting of dynamic data\r
4 Point by point fitting of dynamic data=Pointbypointfittingofdynamicdata\r
4 # pts to ave.=.ptstoave.2\r
4 Fit parameter boxes=Fitparameterboxes2\r
2 Fit|Reset command\r
3 Fit|Reset command=Fit.Resetcommand\r
2 Fit|MSE command\r
3 Fit|MSE command=Fit.MSEcommand\r
2 Fit|Edit_Parms item\r
3 Fit|Edit_Parms item=Fit.Edit.Parmsitem\r
3 The edit fit parameters dialog box\r
4 The edit fit parameters dialog box=Theeditfitparametersdialogbox\r
4 Parameter list=Parameterlist\r
4 Change selected parms=Changeselectedparms\r
4 Parameter limits=Parameterlimits\r
4 Coupled parameter=Coupledparameter\r
4 Do not fit all parameters option=Donotfitallparametersoption1\r
4 Delete all parms=Deleteallparms\r
3 Range limits on fit parameters\r
4 Range limits on fit parameters=Rangelimitsonfitparameters\r
3 Coupling fit parameters\r
4 Coupling fit parameters=Couplingfitparameters\r
3 Do not fit all parameters option\r
4 Do not fit all parameters option=Donotfitallparametersoption2\r
4 Parameter names=Parameternames\r
4 Total # of parms=Total.ofparms\r
4 Selected parms=Selectedparms\r
4 Select all=Selectall\r
2 Fit|Stats command\r
3 Fit|Stats command=Fit.Statscommand\r
3 The fit statistics dialog box\r
4 The fit statistics dialog box=Thefitstatisticsdialogbox\r
4 Confidence limits=Confidencelimits\r
4 Correlation matrix=Correlationmatrix\r
2 Fit|Defaults item\r
3 Fit|Defaults item=Fit.Defaultsitem\r
3 The fit defaults dialog box\r
4 The fit defaults dialog box=Thefitdefaultsdialogbox\r
4 Fit weighting=Fitweighting\r
4 R&T weighting=R.Tweighting\r
4 Maximum iterations=Maximumiterations\r
4 Minimum MSE=MinimumMSE\r
4 Change in MSE=ChangeinMSE\r
4 Derivative increment=Derivativeincrement\r
3 Weighting of ellipsometric data\r
4 Weighting of ellipsometric data=Weightingofellipsometricdata\r
4 Psi and delta=Psianddelta\r
4 Tan(Psi) and cos(Delta)=Tan.Psi.andcos.Delta.\r
4 Psi only=Psionly\r
4 Cos(Delta) only=Cos.Delta.only\r
4 <?1> and <?2>=..1.and..2.\r
4 <?1> only=..1.only\r
4 <?2> only=..2.only\r
4 Rho=Rho\r
3 Weighting of reflection / transmission data\r
4 Weighting of reflection / transmission data=Weightingofreflection.transmissiondata\r
1 Quick Start:  VASE®\r
2 Overview of the VASE? quick start=OverviewoftheVASE.quickstart\r
2 Power-up and hardware initialization=Power.upandhardwareinitialization\r
2 Initial inspection of the system\r
3 Initial inspection of the system=Initialinspectionofthesystem\r
3 Goniometer settings, vertical VASE? systems=Goniometersettings.verticalVASE.systems\r
3 Goniometer settings, horizontal VASE? systems=Goniometersettings.horizontalVASE.systems\r
3 Detector and monochromator settings=Detectorandmonochromatorsettings\r
3 Correct fiber type=Correctfibertype\r
3 Beam alignment, vertical VASE? instrument=Beamalignment.verticalVASE.instrument\r
3 Beam alignment, horizontal VASE? instrument=Beamalignment.horizontalVASE.instrument\r
2 Sample alignment\r
3 Sample alignment=Samplealignment1\r
3 Vertical VASE? sample alignment=VerticalVASE.samplealignment\r
3 Horizontal VASE? sample alignment=HorizontalVASE.samplealignment\r
2 Calibration of the VASE?\r
3 Calibration of the VASE?=CalibrationoftheVASE.\r
2 Acquisition of VASE? data\r
3 Acquisition of VASE? data=AcquisitionofVASE.data\r
2 Analysis of data\r
3 Analysis of data=Analysisofdata\r
2 Summary\r
3 Summary=Summary\r
1 VASE? Data Acquisition Procedures and Strategies\r
2 Overview=Overview1\r
2 General principles of VASE? data acquisition=GeneralprinciplesofVASE.dataacquisition\r
2 Sample preparation\r
3 Sample preparation=Samplepreparation\r
3 Sample cleaning=Samplecleaning\r
3 Roughening transparent substrates=Rougheningtransparentsubstrates\r
3 Very thin transparent substrates=Verythintransparentsubstrates\r
2 Choice of data type and acquisition parameters\r
3 Choice of data type and acquisition parameters=Choiceofdatatypeandacquisitionparameters\r
3 Choice of spectral range=Choiceofspectralrange\r
3 Choice of angles of incidence=Choiceofanglesofincidence\r
3 Choice of data types=Choiceofdatatypes\r
2 Simulation of optical experiments with WVASE32?\r
3 Simulation of optical experiments with WVASE32?=SimulationofopticalexperimentswithWVASE32.\r
2 Ellipsometric data acquisition\r
3 Ellipsometric data acquisition=Ellipsometricdataacquisition1\r
3 Reflection from the top of the sample=Reflectionfromthetopofthesample\r
3 Reflection from the bottom of the film, beam incident through the substrate=Reflectionfromthebottomofthefilm.beamincidentthroughthesubstrate\r
3 Transmission ellipsometry=Transmissionellipsometry\r
2 Advanced spectroscopic scans\r
3 Advanced spectroscopic scans=Advancedspectroscopicscans\r
2 Acquisition of dynamic data\r
3 Acquisition of dynamic data=Acquisitionofdynamicdata\r
2 Acquisition of intensity transmittance data\r
3 Acquisition of intensity transmittance data=Acquisitionofintensitytransmittancedata\r
2 Acquisition of intensity reflectance data\r
3 Acquisition of intensity reflectance data=Acquisitionofintensityreflectancedata\r
1 VASE? Data Analysis\r
2 Introduction=Introduction2\r
2 Modeling of experimental optical data\r
3 Modeling of experimental optical data=Modelingofexperimentalopticaldata\r
3 Building the 'most physical' model=Buildingthe.mostphysical.model\r
3 Correlation and uniquenes=Correlationanduniquenes\r
3 Interpretation of confidence limits=Interpretationofconfidencelimits2\r
3 Errors due to random noise=Errorsduetorandomnoise\r
3 Systematic errors due to model deficiencies=Systematicerrorsduetomodeldeficiencies\r
3 Assessing the quality of a fit=Assessingthequalityofafit\r
3 Assessing the quality of a best-fit model=Assessingthequalityofabest.fitmodel\r
2 Bare substrates\r
3 Bare substrates=Baresubstrates\r
3 Opaque bulk samples=Opaquebulksamples\r
3 Transparent bulk samples\r
4 Transparent bulk samples=Transparentbulksamples\r
4 Glass=Glass\r
4 Glass with UV absorption edge=GlasswithUVabsorptionedge\r
4 Float glass=Floatglass\r
4 Plastics=Plastics\r
4 Semiconductors below the bandgap energy=Semiconductorsbelowthebandgapenergy\r
3 Very thin transparent bulk samples\r
4 Very thin transparent bulk samples=Verythintransparentbulksamples\r
3 Anisotropic bulk samples\r
4 Anisotropic bulk samples=Anisotropicbulksamples\r
4 c-oriented=c.oriented\r
4 a- or b-oriented=a.orb.oriented\r
3 Modeling surface oxidation and roughness\r
4 Modeling surface oxidation and roughness=Modelingsurfaceoxidationandroughness\r
2 Single films - general principles\r
3 Single films - general principles=Singlefilms.generalprinciples\r
3 What do we want to measure?=Whatdowewanttomeasure.\r
3 Opaque vs. transparent substrates=Opaquevs.transparentsubstrates1\r
3 Substrate characterization=Substratecharacterization\r
3 Quick analysis with reference optical constants=Quickanalysiswithreferenceopticalconstants\r
3 Optical constant determination with the film thickness known=Opticalconstantdeterminationwiththefilmthicknessknown\r
3 Parameterization of the film optical constants=Parameterizationofthefilmopticalconstants\r
3 EMA models and surface roughness=EMAmodelsandsurfaceroughness\r
3 Film inhomogeneity=Filminhomogeneity\r
2 Single transparent or partially transparent films\r
3 Single transparent or partially transparent films=Singletransparentorpartiallytransparentfilms\r
3 Analysis with standard optical constants=Analysiswithstandardopticalconstants\r
3 Direct fit for n and t=Directfitfornandt\r
3 Cauchy parameterization to determine film thickness=Cauchyparameterizationtodeterminefilmthickness\r
3 Lorentz oscillators - Drude model for free electron absorption=Lorentzoscillators.Drudemodelforfreeelectronabsorption\r
3 User-defined dispersion models=User.defineddispersionmodels\r
3 Surface roughness=Surfaceroughness1\r
3 Index grading=Indexgrading\r
3 Anisotropic films\r
4 Anisotropic films=Anisotropicfilms\r
4 c-axis perpendicular to the film plane=c.axisperpendiculartothefilmplane\r
4 c-axis in the film plane=c.axisinthefilmplane\r
3 Very thin transparent films\r
4 Very thin transparent films=Verythintransparentfilms\r
3 Very thick transparent films\r
4 Very thick transparent films=Verythicktransparentfilms\r
2 Single absorbing films\r
3 Single absorbing films=Singleabsorbingfilms\r
3 Opaque substrates vs. transparent substrates=Opaquesubstratesvs.transparentsubstrates\r
3 Analysis of VASE? and T data for films on transparent substrates=AnalysisofVASE.andTdataforfilmsontransparentsubstrates\r
3 Lorentz oscillator models=Lorentzoscillatormodels\r
3 Surface oxidation of the film=Surfaceoxidationofthefilm\r
3 Surface roughness=Surfaceroughness2\r
2 Single films - special\r
3 Single films - special=Singlefilms.special\r
3 Alloy models=Alloymodels\r
3 Transparent conducting oxides=Transparentconductingoxides\r
3 Polycrystalline silicon=Polycrystallinesilicon\r
2 Single films - advanced modeling techniques\r
3 Single films - advanced modeling techniques=Singlefilms.advancedmodelingtechniques\r
3 Optical constant parameterization=Opticalconstantparameterization\r
3 Non-ideal films\r
4 Non-ideal films=Non.idealfilms\r
4 Graded dielectric films=Gradeddielectricfilms\r
4 Graded absorbing films=Gradedabsorbingfilms\r
2 Two layer systems\r
3 Two layer systems=Twolayersystems\r
3 General principles\r
4 General principles=Generalprinciples1\r
4 Opaque vs. transparent substrates=Opaquevs.transparentsubstrates2\r
4 Characterization of reference films=Characterizationofreferencefilms\r
4 Surface and interfacial roughness=Surfaceandinterfacialroughness\r
4 Indistinct interfaces between the films=Indistinctinterfacesbetweenthefilms\r
3 Dielectric / dielectric / substrate\r
4 Dielectric / dielectric / substrate=Dielectric.dielectric.substrate\r
3 Dielectric / metal / substrate\r
4 Dielectric / metal / substrate=Dielectric.metal.substrate\r
3 Metal / dielectric / substrate\r
4 Metal / dielectric / substrate=Metal.dielectric.substrate\r
3 Metal / metal / substrate\r
4 Metal / metal / substrate=Metal.metal.substrate\r
2 Multilayer structures\r
3 Multilayer structures=Multilayerstructures\r
3 Opaque vs. transparent substrates=Opaquevs.transparentsubstrates3\r
3 Choice of optimal experimental data=Choiceofoptimalexperimentaldata\r
3 Transparent layers=Transparentlayers\r
3 Superlattices and other periodic structures=Superlatticesandotherperiodicstructures\r
3 Use of parametric models to suppress correlation=Useofparametricmodelstosuppresscorrelation\r
2 Advanced modeling techniques\r
3 Advanced modeling techniques=Advancedmodelingtechniques\r
3 Partial polarization effects and other non-idealities\r
4 Partial polarization effects and other non-idealities=Partialpolarizationeffectsandothernon.idealities\r
4 Back-surface reflection=Back.surfacereflection\r
4 Film thickness non-uniformity=Filmthicknessnon.uniformity\r
4 Patterned films and structures=Patternedfilmsandstructures\r
4 Monochromator bandwidth effects=Monochromatorbandwidtheffects\r
4 Angular spread of the beam entering the detector=Angularspreadofthebeamenteringthedetector\r
3 Use of multiple optical data types\r
4 Use of multiple optical data types=Useofmultipleopticaldatatypes\r
3 Fit parameter coupling and limiting\r
4 Fit parameter coupling and limiting=Fitparametercouplingandlimiting\r
3 Multiple sample analysis\r
4 Multiple sample analysis=Multiplesampleanalysis\r
2 The parametric semiconductor model\r
3 The parametric semiconductor model=Theparametricsemiconductormodel\r
3 Mathematical description=Mathematicaldescription\r
3 Parametric semiconductor model for GaAs=ParametricsemiconductormodelforGaAs\r
3 Parametric semiconductor model fits to other materials=Parametricsemiconductormodelfitstoothermaterials\r
3 Using the parametric semiconductor layer within WVASE32?=UsingtheparametricsemiconductorlayerwithinWVASE32.\r
3 Fitting the silicon dielectric function with the parametric semiconductor model=Fittingthesilicondielectricfunctionwiththeparametricsemiconductormodel\r
1 VASE? Data Analysis Examples\r
2 Overview=Overview2\r
2 Important WVASE32? procedures\r
3 Important WVASE32? procedures=ImportantWVASE32.procedures\r
3 Activate a WVASE32? window=ActivateaWVASE32.window\r
3 Loading an experimental data file=Loadinganexperimentaldatafile\r
3 Saving an experimental data file=Savinganexperimentaldatafile\r
3 Adding a substrate to the model=Addingasubstratetothemodel\r
3 Adding a layer to the model=Addingalayertothemodel\r
3 Viewing the optical constants of a layer=Viewingtheopticalconstantsofalayer\r
3 Saving the optical constants of a layer=Savingtheopticalconstantsofalayer\r
3 Saving a model=Savingamodel\r
3 Loading a model=Loadingamodel\r
3 Changing data types=Changingdatatypes\r
3 Setting the range of active data=Settingtherangeofactivedata\r
3 Defining layer thicknesses as fit variables=Defininglayerthicknessesasfitvariables\r
3 Fitting for the optical constants of a layer=Fittingfortheopticalconstantsofalayer\r
3 Fitting for parameters in a function-based layer dispersion model=Fittingforparametersinafunction.basedlayerdispersionmodel\r
3 Setting the fit weighting=Settingthefitweighting\r
3 Performing a normal fit=Performinganormalfit\r
3 Performing a point-by-point fit=Performingapoint.by.pointfit\r
3 Viewing the fit statistics after a fit=Viewingthefitstatisticsafterafit\r
3 Generating data from the model=Generatingdatafromthemodel\r
3 Choosing the set of data to be graphed=Choosingthesetofdatatobegraphed\r
3 Choosing the type of data to be graphed=Choosingthetypeofdatatobegraphed\r
3 Comparing different sets of optical constants=Comparingdifferentsetsofopticalconstants\r
3 Deleting all existing fit parameters=Deletingallexistingfitparameters\r
2 Troubleshooting\r
3 Troubleshooting=Troubleshooting\r
3 Singular matrix error=Singularmatrixerror\r
3 Obviously incorrect layer thicknesses=Obviouslyincorrectlayerthicknesses\r
3 Unphysical optical constants=Unphysicalopticalconstants\r
3 Tiny MSE values=TinyMSEvalues\r
3 Huge MSE values=HugeMSEvalues\r
3 Huge 90% confidence limits=Huge90.confidencelimits\r
3 'NAN' displayed for correlation matrix element=.NAN.displayedforcorrelationmatrixelement\r
3 Can't reproduce example analysis results=Can.treproduceexampleanalysisresults\r
3 Abrupt discontinuity in optical constants=Abruptdiscontinuityinopticalconstants\r
3 Abrupt discontinuity in EMA optical constants=AbruptdiscontinuityinEMAopticalconstants\r
3 Strange behaviour using anisotropic Cauchy layer=StrangebehaviourusinganisotropicCauchylayer\r
3 Very large roughness thickness=Verylargeroughnessthickness\r
2 WVASE32? settings for the examples\r
3 WVASE32? settings for the examples=WVASE32.settingsfortheexamples\r
3 Memory allocation=Memoryallocation\r
3 Fit defaults=Fitdefaults\r
3 Global units=Globalunits\r
2 Example 1:  Bare silicon wafer (?)\r
3 Example 1:  Bare silicon wafer (?)=Example1.Baresiliconwafer...\r
3 Determination of native oxide thickness=Determinationofnativeoxidethickness\r
3 Optical constant determination with no native oxide=Opticalconstantdeterminationwithnonativeoxide\r
3 Optical constant determination with native oxide=Opticalconstantdeterminationwithnativeoxide\r
3 Further experiments=Furtherexperiments1\r
2 Example 2:  Optically thick chromium film (?)\r
3 Example 2:  Optically thick chromium film (?)=Example2.Opticallythickchromiumfilm...\r
3 Determination of optical constants with no native oxide=Determinationofopticalconstantswithnonativeoxide\r
3 Determination of optical constants with native oxide=Determinationofopticalconstantswithnativeoxide\r
3 Further experiments=Furtherexperiments2\r
2 Example 3:  Bulk HgCdTe (??)\r
3 Example 3:  Bulk HgCdTe (??)=Example3.BulkHgCdTe....\r
3 Determination of alloy fraction and surface roughness=Determinationofalloyfractionandsurfaceroughness\r
3 Further experiments=Furtherexperiments3\r
2 Example 4:  Uncoated glass cover slip (???)\r
3 Example 4:  Uncoated glass cover slip (???)=Example4.Uncoatedglasscoverslip.....\r
3 General principles=Generalprinciples2\r
3 Analysis of psi to obtain the glass index=Analysisofpsitoobtaintheglassindex\r
3 Analysis of transmission to obtain the extinction coefficient=Analysisoftransmissiontoobtaintheextinctioncoefficient\r
3 Further experiments=Furtherexperiments4\r
2 Example 5:  Organic film on silicon (??)\r
3 Example 5:  Organic film on silicon (??)=Example5.Organicfilmonsilicon....\r
3 General information=Generalinformation\r
3 Cauchy fit for thickness and index=Cauchyfitforthicknessandindex\r
3 Determination of optical constants with thickness fixed=Determinationofopticalconstantswiththicknessfixed\r
3 Further experiments=Furtherexperiments5\r
2 Example 6:  Anisotropic organic film on silicon (???)\r
3 Example 6:  Anisotropic organic film on silicon (???)=Example6.Anisotropicorganicfilmonsilicon.....\r
3 Anisotropic Cauchy fit for thickness and index=AnisotropicCauchyfitforthicknessandindex\r
3 Direct fit for isotropic optical constants in the UV=DirectfitforisotropicopticalconstantsintheUV\r
3 Further experiments=Furtherexperiments6\r
2 Example 7:  Silver film on fused silica (??)\r
3 Example 7:  Silver film on fused silica (??)=Example7.Silverfilmonfusedsilica....\r
3 Determination of film thickness and optical constants=Determinationoffilmthicknessandopticalconstants1\r
3 Further experiments=Furtherexperiments7\r
2 Example 8:  Indium tin oxide (ITO) on glass (?????)\r
3 Example 8:  Indium tin oxide (ITO) on glass (?????)=Example8.Indiumtinoxide.ITO.onglass.......\r
3 Uniform Lorentz oscillator layer model=UniformLorentzoscillatorlayermodel\r
3 Graded Lorentz oscillator layer model=GradedLorentzoscillatorlayermodel\r
3 Further experiments=Furtherexperiments8\r
2 Example 9:  Diamond-like carbon (DLC) on glass (??)\r
3 Example 9:  Diamond-like carbon (DLC) on glass (??)=Example9.Diamond.likecarbon.DLC.onglass....\r
3 Determination of film thickness and optical constants=Determinationoffilmthicknessandopticalconstants2\r
3 Further experiments=Furtherexperiments9\r
2 Example 10:  GaAs / AlGaAs / GaAs (?)\r
3 Example 10:  GaAs / AlGaAs / GaAs (?)=Example10.GaAs.AlGaAs.GaAs...\r
3 Determination of AlGaAs alloy fraction and thickness=DeterminationofAlGaAsalloyfractionandthickness\r
3 Further experiments=Furtherexperiments10\r
2 Example 11:  Polycrystalline silicon / SiO2 / silicon (????)\r
3 Example 11:  Polycrystalline silicon / SiO2 / silicon (????)=Example11.Polycrystallinesilicon.SiO2.silicon......\r
3 EMA model for poly-Si=EMAmodelforpoly.Si1\r
3 Parametric semiconductor model for poly-Si=Parametricsemiconductormodelforpoly.Si\r
3 Further experiments=Furtherexperiments11\r
2 Example 12:  TiN / SiO2 / silicon (??)\r
3 Example 12:  TiN / SiO2 / silicon (??)=Example12.TiN.SiO2.silicon....\r
3 Determination of both film thicknesses and the TiN optical constants=DeterminationofbothfilmthicknessesandtheTiNopticalconstants\r
3 Further experiments=Furtherexperiments12\r
2 Example 13:  Five layer high-low stack on silicon (???)\r
3 Example 13:  Five layer high-low stack on silicon (???)=Example13.Fivelayerhigh.lowstackonsilicon.....\r
3 Determination of layer thicknesses and index spectra=Determinationoflayerthicknessesandindexspectra\r
3 Further experiments=Furtherexperiments13\r
2 Example 14:  SiO2 / Si3N4 / SiO2 / poly-Si / SiO2 / Si (???)\r
3 Example 14:  SiO2 / Si3N4 / SiO2 / poly-Si / SiO2 / Si (???)=Example14.SiO2.Si3N4.SiO2.poly.Si.SiO2.Si.....\r
3 EMA model for poly-Si=EMAmodelforpoly.Si2\r
3 Further experiments=Furtherexperiments14\r
2 Example 15:  Thermal oxides on silicon - multiple sample analysis (?????)\r
3 Example 15:  Thermal oxides on silicon - multiple sample analysis (?????)=Example15.Thermaloxidesonsilicon.multiplesampleanalysis.......\r
3 Direct fit for silicon optical constants=Directfitforsiliconopticalconstants\r
3 Parametric semiconductor model for silicon=Parametricsemiconductormodelforsilicon\r
3 Inclusion of thin interfacial layer\r
4 Inclusion of thin interfacial layer=Inclusionofthininterfaciallayer\r
4 Further experiments=Furtherexperiments15\r
1 Quick Start:  M-44®\r
2 Quick start overview for M-44® systems\r
3 Quick start overview for M-44® systems=QuickstartoverviewforM.44rsystems\r
3 System alignment=Systemalignment1\r
3 System calibration=Systemcalibration1\r
3 Sample alignment=Samplealignment2\r
3 Sample calibration=Samplecalibration1\r
2 Basic setup\r
3 Basic setup=Basicsetup\r
2 Basic system alignment\r
3 Basic system alignment=Basicsystemalignment\r
2 Fundamental system calibration\r
3 Fundamental system calibration=Fundamentalsystemcalibration\r
2 Sample alignment\r
3 Sample alignment=Samplealignment3\r
2 Normal system calibration\r
3 Normal system calibration=Normalsystemcalibration\r
2 Ex-situ data acquisition\r
3 Ex-situ data acquisition=Ex.situdataacquisition\r
2 Ex-situ data analysis\r
3 Ex-situ data analysis=Ex.situdataanalysis\r
2 In-situ data acquisition\r
3 In-situ data acquisition=In.situdataacquisition\r
1 M-44? Data Acquisition Procedures and Strategies\r
2 Overview=Overview3\r
2 Ex-situ operation\r
3 Ex-situ operation=Ex.situoperation\r
3 Powering up the system=Poweringupthesystem\r
3 Calibration and alignment procedures\r
4 Calibration and alignment procedures=Calibrationandalignmentprocedures\r
4 System alignment=Systemalignment2\r
4 System calibration=Systemcalibration2\r
4 Sample alignment=Samplealignment4\r
4 Sample calibration=Samplecalibration2\r
3 System alignment\r
4 System alignment=Systemalignment3\r
3 System calibration\r
4 System calibration=Systemcalibration3\r
3 Sample alignment\r
4 Sample alignment=Samplealignment5\r
3 Sample calibration\r
4 Sample calibration=Samplecalibration3\r
3 Ellipsometric data acquisition\r
4 Ellipsometric data acquisition=Ellipsometricdataacquisition2\r
3 Turning off the M-44? system after data acquisition\r
4 Turning off the M-44? system after data acquisition=TurningofftheM.44.systemafterdataacquisition\r
2 In-situ operation\r
3 In-situ operation=In.situoperation\r
3 Removal of the M-44? from the multiple angle base=RemovaloftheM.44.fromthemultipleanglebase\r
3 Window hardware requirements for a UHV chamber=WindowhardwarerequirementsforaUHVchamber\r
3 Installation of the window mounts on the process chamber=Installationofthewindowmountsontheprocesschamber\r
3 Installation of the M-44? on the window hardware=InstallationoftheM.44.onthewindowhardware\r
3 In-situ sample alignment=In.situsamplealignment\r
3 In-situ sample calibration=In.situsamplecalibration\r
3 Ellipsometric data acquisition=Ellipsometricdataacquisition3\r
3 Real-time feedback control of processes=Real.timefeedbackcontrolofprocesses\r
1 Dynamic Data Analysis\r
2 In-situ, real-time VASE? data\r
3 In-situ, real-time VASE? data=In.situ.real.timeVASE.data\r
3 Etching of SiO2 on silicon=EtchingofSiO2onsilicon\r
3 MBE growth of III-V film=MBEgrowthofIII.Vfilm\r
3 MBE growth of 2-layer AlGaAs structure=MBEgrowthof2.layerAlGaAsstructure\r
2 In-situ, real-time M-44? data\r
3 In-situ, real-time M-44? data=In.situ.real.timeM.44.data\r
3 DLC etching by electron cyclotron resonance (ECR)=DLCetchingbyelectroncyclotronresonance.ECR.\r
3 GaAs and AlGaAs growth at 600°C\r
4 GaAs and AlGaAs growth at 600°C=GaAsandAlGaAsgrowthat600.C\r
4 Determination of the substrate optical constants at 600°C=Determinationofthesubstrateopticalconstantsat600.C\r
4 Growth of  Al0.1Ga0.9As on GaAs at 600°C=GrowthofAl0.1Ga0.9AsonGaAsat600.C\r
4 GaAs layer=GaAslayer\r
3 Growth of  AlGaAs/GaAs/AlGaAs quantum wells\r
4 Growth of  AlGaAs/GaAs/AlGaAs quantum wells=GrowthofAlGaAs.GaAs.AlGaAsquantumwells\r
4 500 Angstrom AlGaAs layer=500AngstromAlGaAslayer\r
4 100 Angstrom GaAs Layer=100AngstromGaAsLayer\r
3 Growth of ZnS/cryolite multilayer stack on BK7 glass\r
4 Growth of ZnS/cryolite multilayer stack on BK7 glass=GrowthofZnS.cryolitemultilayerstackonBK7glass\r
4 Stage 1:  Determination of the angle of incidence=Stage1.Determinationoftheangleofincidence\r
4 Stage 2:  Determination of the film optical constants and the first six layer thicknesses=Stage2.Determinationofthefilmopticalconstantsandthefirstsixlayerthicknesses\r
4 Stage 3:  Determination of the remaining layer thicknesses=Stage3.Determinationoftheremaininglayerthicknesses\r
1 Appendix A:  Installation of WVASE32?\r
2 System requirements=Systemrequirements\r
2 Installation of WVASE32? and Win32s\r
3 Installation of WVASE32? and Win32s=InstallationofWVASE32.andWin32s\r
3 Win32s installation=Win32sinstallation\r
3 WVASE32? installation=WVASE32.installation\r
3 Special instructions for upgrade customers=Specialinstructionsforupgradecustomers\r
3 Special instructions for hardware customers=Specialinstructionsforhardwarecustomers\r
1 Appendix B:  Analysis File Formats\r
2 Experimental and generated data files\r
3 Experimental and generated data files=Experimentalandgenerateddatafiles\r
3 Ellipsometric data=Ellipsometricdata\r
3 Reflection and transmission data=Reflectionandtransmissiondata\r
3 Neutron reflection data=Neutronreflectiondata\r
3 Experimental data file examples=Experimentaldatafileexamples\r
2 Optical constant files (material files)\r
3 Optical constant files (material files)=Opticalconstantfiles.materialfiles.\r
3 Interpolation table=Interpolationtable\r
3 Semiconductor alloy=Semiconductoralloy\r
3 Temperature dependent=Temperaturedependent\r
1 Appendix C:  Configuration File Formats\r
2 Overview=Overview4\r
2 WVASE.CNF=WVASE.CNF\r
2 HARDWARE.CNF=HARDWARE.CNF\r
1 Glossary of Terms\r
2 Glossary of Terms=GlossaryOfTerms.D2H\r