1 Fri Feb 03 14:33:46 2012 VASE File c:\windows\desktop\3-2-12\data_files\au_si.dat Au on Si (3.2A 1.5min 1e-6mbar) - Note: Couldn't align sample precisely
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2 Fri Feb 03 14:57:48 2012 VASE File c:\windows\desktop\3-2-12\data_files\black-au_si.dat Black-Au on Si (3.7A 0.5min 0.18mbar) - Note: Low intensity
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3 Fri Feb 03 15:35:35 2012 VASE File c:\windows\desktop\3-2-12\data_files\au_si_(thick).dat Gold on Si (Unknown preparation, thick yellow colour)
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5 Mon Feb 06 09:32:26 2012 Init User: Sam (v3.698, 6.256 DLL)
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7 Mon Feb 06 09:39:23 2012
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8 Mon Feb 06 09:39:23 2012 Calib: rvs=5, pts=100, span=180.0, aoi=80.000, t=0, d=3
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9 Mon Feb 06 09:43:52 2012 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
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10 Mon Feb 06 09:43:56 2012 Coarse Calib: Wvl1=5000.0 Ps=2.0221±0.0072 Attn=1.0126±0.0003 As=136.224±0.008 Psi=9.266±0.015 Del=24.328±0.200 <I>=22.106, MSE=2.24 (1.71)
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11 Mon Feb 06 09:43:56 2012 Coarse Calib: MSE=2.236 (1.709) AzOffset=0.037±0.029202 ElOffset=-0.002±0.009671
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12 Mon Feb 06 09:45:46 2012
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13 Mon Feb 06 09:45:46 2012 Calib: rvs=30, pts=60, span=60.0, aoi=80.000, t=1, d=3
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14 Mon Feb 06 09:55:05 2012 Calib: Wvl1=5000.0 Ps=2.0213±0.0020 Attn=1.0132±0.0002 As=136.163±0.005 Psi=9.266±0.007 Del=24.258±0.091 <I>=10.815, MSE=1.33 (0.756) Synch=-31.539±0.018 [-31.578,-31.494] M1=0.0026±0.0012 [0.00077,0.0047]
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15 Mon Feb 06 09:55:05 2012 Calib: Wvl2=11770.0 Ps=2.0213±0.0020 IrAttn=0.9713±0.0003 IrAs=133.882±0.006 IrPsi=13.806±0.002 IrDel=4.815±0.222 <I>=16.576 MSE=1.33 (0.756) Synch=-34.425±0.015 [-34.462,-34.403] M1=0.03±0.0094 [0.015,0.044]
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16 Mon Feb 06 09:55:05 2012 Calib: MSE=1.326 (0.756) AzOffset=-0.055±0.013130 ElOffset=0.013±0.004345 DP=-0.006±0.016
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17 Mon Feb 06 10:38:30 2012 VASE File c:\windows\desktop\6-2-12\si.dat Si (control)
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18 Mon Feb 06 10:53:37 2012
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19 Mon Feb 06 10:53:37 2012 Calib: rvs=5, pts=100, span=180.0, aoi=80.000, t=0, d=3
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20 Mon Feb 06 10:58:07 2012 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
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21 Mon Feb 06 10:58:09 2012 Coarse Calib: Wvl1=5000.0 Ps=2.0237±0.0047 Attn=1.0146±0.0002 As=136.022±0.005 Psi=9.298±0.010 Del=23.828±0.136 <I>=23.692, MSE=1.51 (1.19)
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22 Mon Feb 06 10:58:09 2012 Coarse Calib: MSE=1.515 (1.191) AzOffset=-0.023±0.019400 ElOffset=0.019±0.006588
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23 Mon Feb 06 10:59:57 2012
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24 Mon Feb 06 10:59:57 2012 Calib: rvs=30, pts=60, span=60.0, aoi=80.000, t=1, d=3
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25 Mon Feb 06 11:09:19 2012 Calib: Wvl1=5000.0 Ps=2.0195±0.0016 Attn=1.0151±0.0001 As=136.016±0.004 Psi=9.295±0.005 Del=23.785±0.074 <I>=11.735, MSE=1.08 (0.62) Synch=-31.086±0.024 [-31.122,-31.039] M1=0.0048±0.002 [0.0019,0.0079]
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26 Mon Feb 06 11:09:19 2012 Calib: Wvl2=11770.0 Ps=2.0195±0.0016 IrAttn=0.9721±0.0002 IrAs=133.806±0.005 IrPsi=13.871±0.002 IrDel=5.613±0.155 <I>=17.441 MSE=1.08 (0.62) Synch=-34.039±0.045 [-34.152,-33.984] M1=0.014±0.0029 [0.0082,0.019]
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27 Mon Feb 06 11:09:19 2012 Calib: MSE=1.078 (0.620) AzOffset=-0.014±0.010550 ElOffset=0.009±0.003583 DP=0.167±0.013
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28 Mon Feb 06 12:00:07 2012 VASE File c:\windows\desktop\6-2-12\ag_si.dat Ag on Si (1e-6mbar 3.2A 1.5min)
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29 Mon Feb 06 12:48:41 2012 VASE File c:\windows\desktop\6-2-12\black-ag_si.dat Black-Ag on Si (0.18mbar 3.7A 0.5min)
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30 Mon Feb 06 15:04:31 2012
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31 Mon Feb 06 15:04:31 2012 Calib: rvs=5, pts=100, span=180.0, aoi=80.000, t=0, d=3
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32 Mon Feb 06 15:09:00 2012 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
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33 Mon Feb 06 15:09:03 2012 Coarse Calib: Wvl1=5000.0 Ps=2.0208±0.0073 Attn=1.0157±0.0003 As=135.942±0.008 Psi=9.286±0.015 Del=24.363±0.209 <I>=23.569, MSE=2.34 (1.74)
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34 Mon Feb 06 15:09:04 2012 Coarse Calib: MSE=2.340 (1.737) AzOffset=0.013±0.030592 ElOffset=-0.005±0.010140
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35 Mon Feb 06 15:17:01 2012
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36 Mon Feb 06 15:17:01 2012 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
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37 Mon Feb 06 15:26:29 2012 Calib: Wvl1=5000.0 Ps=2.0308±0.0033 Attn=1.0163±0.0003 As=135.942±0.007 Psi=5.593±0.017 Del=135.800±0.185 <I>=10.096, MSE=2.08 (3.21) Synch=-30.797±0.031 [-30.841,-30.702] M1=0.0026±0.00095 [0.0011,0.0082]
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38 Mon Feb 06 15:26:29 2012 Calib: Wvl2=11770.0 Ps=2.0308±0.0033 IrAttn=0.9731±0.0003 IrAs=133.760±0.008 IrPsi=2.158±0.004 IrDel=36.044±0.159 <I>=9.676 MSE=2.08 (3.21) Synch=-33.810±0.080 [-33.887,-33.459] M1=0.023±0.0039 [0.0015,0.026]
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39 Mon Feb 06 15:26:29 2012 Calib: MSE=2.082 (3.206) AzOffset=-0.053±0.008960 ElOffset=0.101±0.022757 DP=0.004±0.024
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40 Mon Feb 06 15:47:40 2012 VASE File c:\windows\desktop\6-2-12\calibration_si.dat Calibration Wafer
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42 Wed Feb 08 12:13:13 2012 Init User: Sam (v3.698, 6.256 DLL)
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44 Wed Feb 08 12:15:26 2012 Low-level data acquisition timed out. #2
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45 Try re-initializing hardware.
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46 If problem returns, contact J.A.Woollam Co. or a representative.
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48 Wed Feb 08 12:21:55 2012 Init User: Sam (v3.698, 6.256 DLL)
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51 Wed Feb 08 14:44:36 2012 Init User: Sam (v3.698, 6.256 DLL)
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54 Thu Feb 09 11:09:36 2012 Init User: Sam (v3.698, 6.256 DLL)
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56 Thu Feb 09 11:09:58 2012
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57 Thu Feb 09 11:09:58 2012 Calib: rvs=5, pts=100, span=180.0, aoi=65.000, t=0, d=3
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58 Thu Feb 09 11:22:17 2012
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59 Thu Feb 09 11:22:17 2012 Calib: rvs=5, pts=100, span=180.0, aoi=65.000, t=0, d=3
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60 Thu Feb 09 11:26:45 2012 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
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61 Thu Feb 09 11:26:48 2012 Coarse Calib: Wvl1=5000.0 Ps=2.0442±0.0113 Attn=1.0132±0.0002 As=177.532±0.009 Psi=20.263±0.006 Del=171.001±0.066 <I>=2.121, MSE=1.12 (1.22)
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62 Thu Feb 09 11:26:48 2012 Coarse Calib: MSE=1.119 (1.224) AzOffset=-0.019±0.003632 ElOffset=0.005±0.005371
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64 Mon Feb 13 15:09:44 2012 Init User: Sam (v3.698, 6.256 DLL)
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66 Mon Feb 13 15:16:34 2012
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67 Mon Feb 13 15:16:34 2012 Calib: rvs=5, pts=100, span=180.0, aoi=65.000, t=0, d=3
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68 Mon Feb 13 15:21:02 2012 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
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69 Mon Feb 13 15:21:05 2012 Coarse Calib: Wvl1=5000.0 Ps=2.0825±0.0076 Attn=1.0128±0.0002 As=162.133±0.008 Psi=20.255±0.006 Del=171.189±0.077 <I>=19.164, MSE=1.63 (1.16)
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70 Mon Feb 13 15:21:06 2012 Coarse Calib: MSE=1.626 (1.158) AzOffset=-0.011±0.004271 ElOffset=0.006±0.006250
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71 Mon Feb 13 15:24:57 2012
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72 Mon Feb 13 15:24:57 2012 Calib: rvs=30, pts=60, span=60.0, aoi=65.000, t=1, d=3
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73 Mon Feb 13 15:34:15 2012 Calib: Wvl1=5000.0 Ps=2.0819±0.0025 Attn=1.0133±0.0001 As=162.079±0.005 Psi=20.259±0.003 Del=171.177±0.035 <I>=11.378, MSE=0.974 (0.529) Synch=-174.591±0.012 [-174.623,-174.554] M1=0.0081±0.0022 [0.004,0.012]
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74 Mon Feb 13 15:34:15 2012 Calib: Wvl2=11770.0 Ps=2.0819±0.0025 IrAttn=0.9716±0.0002 IrAs=159.811±0.006 IrPsi=15.349±0.002 IrDel=175.940±0.195 <I>=12.546 MSE=0.974 (0.529) Synch=-177.434±0.017 [-177.476,-177.396] M1=0.013±0.0057 [0.0045,0.022]
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75 Mon Feb 13 15:34:15 2012 Calib: MSE=0.974 (0.529) AzOffset=-0.001±0.001950 ElOffset=-0.007±0.002855 DP=0.010±0.018
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76 Mon Feb 13 15:50:28 2012 RT File c:\windows\desktop\13-2-12\glass.dat Microscope slide glass. R&T Scan
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77 Mon Feb 13 16:05:59 2012 RT File c:\windows\desktop\13-2-12\glass.dat Microscope slide glass. R&T Scan
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78 Mon Feb 13 16:36:55 2012 VASE File c:\windows\desktop\13-2-12\glass-spectroscopic.dat Microscope slide glass. Spectroscopic Scan
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80 Tue Feb 14 09:35:43 2012 Init User: Sam (v3.698, 6.256 DLL)
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82 Tue Feb 14 09:41:38 2012
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83 Tue Feb 14 09:41:38 2012 Calib: rvs=5, pts=100, span=180.0, aoi=65.000, t=0, d=3
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84 Tue Feb 14 09:46:06 2012 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
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85 Tue Feb 14 09:46:08 2012 Coarse Calib: Wvl1=5000.0 Ps=2.1203±0.0069 Attn=1.0129±0.0002 As=50.471±0.008 Psi=20.256±0.006 Del=171.178±0.070 <I>=19.423, MSE=1.48 (1.06)
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86 Tue Feb 14 09:46:08 2012 Coarse Calib: MSE=1.484 (1.059) AzOffset=-0.004±0.003895 ElOffset=-0.007±0.005705
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87 Tue Feb 14 09:48:55 2012
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88 Tue Feb 14 09:48:55 2012 Calib: rvs=30, pts=60, span=60.0, aoi=65.000, t=1, d=3
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89 Tue Feb 14 09:58:14 2012 Calib: Wvl1=5000.0 Ps=2.1190±0.0022 Attn=1.0135±0.0001 As=50.396±0.004 Psi=20.261±0.003 Del=171.172±0.031 <I>=11.585, MSE=0.862 (0.468) Synch=-175.422±0.010 [-175.441,-175.398] M1=0.0073±0.0025 [0.0028,0.01]
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90 Tue Feb 14 09:58:15 2012 Calib: Wvl2=11770.0 Ps=2.1190±0.0022 IrAttn=0.9714±0.0002 IrAs=48.123±0.005 IrPsi=15.346±0.002 IrDel=175.947±0.172 <I>=12.419 MSE=0.862 (0.468) Synch=-178.324±0.023 [-178.376,-178.289] M1=0.013±0.0033 [0.0069,0.018]
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91 Tue Feb 14 09:58:15 2012 Calib: MSE=0.862 (0.468) AzOffset=0.003±0.001724 ElOffset=-0.010±0.002526 DP=-0.005±0.016
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92 Tue Feb 14 10:44:11 2012 RT File c:\windows\desktop\14-2-12\au-glass-r&t.dat Au on Glass (1e-5 mbar, 3.2A, 9min) R&T
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93 Tue Feb 14 11:19:24 2012 VASE File c:\windows\desktop\14-2-12\au-glass-spectro.dat Au on Glass (1e-5 mbar, 3.2A, 9min) Spectroscopic Scan
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94 Tue Feb 14 11:48:29 2012 VASE File c:\windows\desktop\14-2-12\black-au_glass.dat Black-Au on Glass (0.18 mbar, 3.3A, 4min) Spectroscopic Scan
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95 Tue Feb 14 11:51:25 2012 VASE File c:\windows\desktop\14-2-12\black-au_glass.dat Black-Au on Glass (0.18 mbar, 3.3A, 4min) Spectroscopic Scan
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96 Tue Feb 14 12:20:55 2012 VASE File c:\windows\desktop\14-2-12\black-au_glass.dat Black-Au on Glass (0.18 mbar, 3.3A, 4min) Spectroscopic Scan
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98 Tue Feb 14 14:51:21 2012 Init User: Sam (v3.698, 6.256 DLL)
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101 Tue Feb 14 15:07:30 2012 Init User: Sam (v3.698, 6.256 DLL)
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103 Tue Feb 14 15:09:32 2012
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104 Tue Feb 14 15:09:32 2012 Calib: rvs=30, pts=60, span=60.0, aoi=65.000, t=1, d=3
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105 Tue Feb 14 15:20:43 2012 Calib: Wvl1=5000.0 Ps=2.1521±0.0027 Attn=1.0151±0.0002 As=154.916±0.005 Psi=20.257±0.004 Del=171.113±0.038 <I>=10.622, MSE=1.05 (0.572) Synch=-117.299±0.028 [-117.353,-117.240] M1=0.0028±0.0018 [0.00026,0.0054]
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106 Tue Feb 14 15:20:44 2012 Calib: Wvl2=11770.0 Ps=2.1521±0.0027 IrAttn=0.9723±0.0002 IrAs=152.680±0.007 IrPsi=15.343±0.002 IrDel=175.786±0.202 <I>=12.389 MSE=1.05 (0.572) Synch=-120.104±0.024 [-120.159,-120.041] M1=0.021±0.0055 [0.01,0.028]
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107 Tue Feb 14 15:20:44 2012 Calib: MSE=1.050 (0.572) AzOffset=-0.007±0.002104 ElOffset=-0.004±0.003090 DP=0.012±0.020
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108 Tue Feb 14 16:07:30 2012 VASE File c:\windows\desktop\14-2-12\black-au_si.dat Black-Au (3.2A 1min 0.18mbar He) Spectroscopic
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110 Thu Feb 16 09:26:57 2012 Init User: Sam (v3.698, 6.256 DLL)
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112 Thu Feb 16 09:33:05 2012
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113 Thu Feb 16 09:33:05 2012 Calib: rvs=5, pts=100, span=180.0, aoi=65.000, t=0, d=3
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114 Thu Feb 16 09:37:33 2012 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
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115 Thu Feb 16 09:37:37 2012 Coarse Calib: Wvl1=5000.0 Ps=2.1779±0.0067 Attn=1.0132±0.0002 As=108.171±0.007 Psi=20.259±0.006 Del=171.161±0.068 <I>=18.910, MSE=1.43 (1.02)
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116 Thu Feb 16 09:37:37 2012 Coarse Calib: MSE=1.432 (1.023) AzOffset=-0.007±0.003759 ElOffset=-0.009±0.005509
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117 Thu Feb 16 09:37:55 2012
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118 Thu Feb 16 09:37:55 2012 Calib: rvs=30, pts=60, span=60.0, aoi=65.000, t=1, d=3
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119 Thu Feb 16 09:47:14 2012 Calib: Wvl1=5000.0 Ps=2.1851±0.0025 Attn=1.0133±0.0001 As=108.140±0.005 Psi=20.255±0.003 Del=171.166±0.035 <I>=11.141, MSE=0.965 (0.524) Synch=-31.424±0.015 [-31.460,-31.385] M1=0.0089±0.0017 [0.0052,0.012]
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120 Thu Feb 16 09:47:14 2012 Calib: Wvl2=11770.0 Ps=2.1851±0.0025 IrAttn=0.9715±0.0002 IrAs=105.881±0.006 IrPsi=15.341±0.002 IrDel=175.944±0.193 <I>=12.322 MSE=0.965 (0.524) Synch=-34.310±0.028 [-34.378,-34.264] M1=0.014±0.0049 [0.0065,0.022]
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121 Thu Feb 16 09:47:14 2012 Calib: MSE=0.965 (0.524) AzOffset=0.003±0.001931 ElOffset=0.003±0.002830 DP=0.000±0.018
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122 Thu Feb 16 10:04:30 2012 RT File c:\windows\desktop\16-2-12\calibration_test.dat Testing Reflection Measurements on Calibration Wafer
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123 Thu Feb 16 10:57:56 2012 RT File c:\windows\desktop\16-2-12\calibration_test.dat Testing Reflection Measurements on Calibration Wafer
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124 Thu Feb 16 15:20:42 2012 RT File c:\windows\desktop\16-2-12\black-au_si.dat Black-Au on Si (0.18mbar He, 3.2A, 1min)
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126 Fri Feb 17 09:55:20 2012 Init User: Sam (v3.698, 6.256 DLL)
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129 Fri Feb 17 10:33:18 2012 Init User: Sam (v3.698, 6.256 DLL)
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131 Fri Feb 17 10:38:34 2012
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132 Fri Feb 17 10:38:34 2012 Calib: rvs=5, pts=100, span=180.0, aoi=65.000, t=0, d=3
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133 Fri Feb 17 10:43:03 2012 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
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134 Fri Feb 17 10:43:06 2012 Coarse Calib: Wvl1=5000.0 Ps=2.2090±0.0060 Attn=1.0142±0.0002 As=92.606±0.007 Psi=20.257±0.005 Del=171.375±0.061 <I>=17.366, MSE=1.29 (0.925)
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135 Fri Feb 17 10:43:06 2012 Coarse Calib: MSE=1.289 (0.925) AzOffset=-0.000±0.003403 ElOffset=-0.001±0.004942
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136 Fri Feb 17 10:43:17 2012
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137 Fri Feb 17 10:43:17 2012 Calib: rvs=30, pts=60, span=60.0, aoi=65.000, t=1, d=3
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138 Fri Feb 17 10:52:36 2012 Calib: Wvl1=5000.0 Ps=2.2224±0.0025 Attn=1.0143±0.0001 As=92.562±0.004 Psi=20.246±0.003 Del=171.333±0.035 <I>=10.265, MSE=0.96 (0.524) Synch=169.248±0.010 [169.225,169.278] M1=0.0044±0.0021 [0.00044,0.0072]
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139 Fri Feb 17 10:52:36 2012 Calib: Wvl2=11770.0 Ps=2.2224±0.0025 IrAttn=0.9712±0.0002 IrAs=90.295±0.006 IrPsi=15.341±0.002 IrDel=175.778±0.185 <I>=11.974 MSE=0.96 (0.524) Synch=166.439±0.018 [166.414,166.474] M1=0.013±0.004 [0.006,0.019]
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140 Fri Feb 17 10:52:36 2012 Calib: MSE=0.960 (0.524) AzOffset=0.003±0.001931 ElOffset=0.002±0.002809 DP=0.030±0.018
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141 Fri Feb 17 11:28:50 2012 VASE File c:\windows\desktop\17-2-12\black-au_si.dat Black-Au on Si (3.2A 1min 0.18mbar He) NOTE: Surface has been scratched slightly after accidentally being dropped
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142 Fri Feb 17 12:10:48 2012 VASE File c:\windows\desktop\17-2-12\black-ag_si.dat Black-Ag on Si (3.2A 0.5min 0.18mbar He)
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143 Fri Feb 17 12:53:04 2012 VASE File c:\windows\desktop\17-2-12\black-au_si.dat Black-Au on Si (3.2A 1min 0.18mbar He)
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145 Mon Feb 20 10:38:53 2012 Init User: Sam (v3.698, 6.256 DLL)
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148 Mon Feb 20 11:31:00 2012 Init User: Sam (v3.698, 6.256 DLL)
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150 Mon Feb 20 11:33:39 2012
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151 Mon Feb 20 11:33:39 2012 Calib: rvs=5, pts=100, span=180.0, aoi=65.000, t=0, d=3
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152 Mon Feb 20 11:38:13 2012 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
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153 Mon Feb 20 11:38:15 2012 Coarse Calib: Wvl1=5000.0 Ps=2.2607±0.0057 Attn=1.0125±0.0002 As=143.578±0.006 Psi=20.248±0.005 Del=171.035±0.058 <I>=17.298, MSE=1.22 (0.873)
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154 Mon Feb 20 11:38:15 2012 Coarse Calib: MSE=1.224 (0.873) AzOffset=0.007±0.003207 ElOffset=-0.002±0.004726
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155 Mon Feb 20 11:38:56 2012
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156 Mon Feb 20 11:38:56 2012 Calib: rvs=30, pts=60, span=60.0, aoi=65.000, t=1, d=3
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157 Mon Feb 20 11:48:13 2012 Calib: Wvl1=5000.0 Ps=2.2594±0.0023 Attn=1.0133±0.0001 As=143.511±0.004 Psi=20.251±0.003 Del=171.073±0.032 <I>=10.343, MSE=0.882 (0.479) Synch=47.971±0.006 [47.957,47.986] M1=0.0071±0.0018 [0.0036,0.0091]
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158 Mon Feb 20 11:48:14 2012 Calib: Wvl2=11770.0 Ps=2.2594±0.0023 IrAttn=0.9707±0.0002 IrAs=141.213±0.006 IrPsi=15.341±0.002 IrDel=175.941±0.176 <I>=12.034 MSE=0.882 (0.479) Synch=45.257±0.012 [45.237,45.285] M1=0.012±0.004 [0.006,0.016]
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159 Mon Feb 20 11:48:14 2012 Calib: MSE=0.882 (0.479) AzOffset=-0.004±0.001763 ElOffset=0.005±0.002594 DP=-0.011±0.016
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160 Mon Feb 20 14:39:23 2012 RT File c:\windows\desktop\20-2-12\au_glass.dat Au on Glass (3.2A 1e-5mbar 6min)
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161 Mon Feb 20 15:08:59 2012 VASE File c:\windows\desktop\20-2-12\au_glass_spectro.dat Au on Glass (3.2A 1e-5mbar 6min) Spectroscopic
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163 Tue Mar 06 15:15:07 2012 Init User: Sam (v3.698, 6.256 DLL)
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165 Tue Mar 06 15:19:34 2012
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166 Tue Mar 06 15:19:34 2012 Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=3
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167 Tue Mar 06 15:24:04 2012 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
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168 Tue Mar 06 15:24:07 2012 Coarse Calib: Wvl1=5000.0 Ps=2.2769±0.0064 Attn=1.0152±0.0002 As=144.408±0.005 Psi=5.439±0.014 Del=137.905±0.171 <I>=20.087, MSE=1.39 (1.73)
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169 Tue Mar 06 15:24:08 2012 Coarse Calib: MSE=1.387 (1.727) AzOffset=0.002±0.008823 ElOffset=0.031±0.028284
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170 Tue Mar 06 15:24:17 2012
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171 Tue Mar 06 15:24:17 2012 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
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172 Tue Mar 06 15:33:52 2012 Calib: Wvl1=5000.0 Ps=2.2807±0.0026 Attn=1.0155±0.0002 As=144.317±0.005 Psi=5.439±0.013 Del=137.835±0.150 <I>=9.378, MSE=1.6 (2.71) Synch=112.702±0.036 [112.624,112.792] M1=0.0058±0.00099 [0.002,0.0076]
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173 Tue Mar 06 15:33:52 2012 Calib: Wvl2=11770.0 Ps=2.2807±0.0026 IrAttn=0.9721±0.0002 IrAs=142.103±0.006 IrPsi=2.130±0.003 IrDel=34.966±0.136 <I>=8.869 MSE=1.6 (2.71) Synch=109.633±0.064 [109.555,109.902] M1=0.018±0.0018 [0.01,0.024]
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174 Tue Mar 06 15:33:52 2012 Calib: MSE=1.598 (2.707) AzOffset=0.020±0.007457 ElOffset=-0.056±0.023467 DP=0.016±0.017
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175 Tue Mar 06 15:43:36 2012 VASE File c:\windows\desktop\6-3-12\data_files\calibration_scan.dat "Standard Scan" of Calibration Wafer
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176 Tue Mar 06 15:44:14 2012 VASE File c:\windows\desktop\6-3-12\data_files\calibration_scan.dat uv scan Si)2 Wafer 250nm to 1000nm
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177 Tue Mar 06 15:53:23 2012 VASE File c:\windows\desktop\6-3-12\data_files\calibration_scan.dat uv scan Si)2 Wafer 250nm to 1000nm
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178 Tue Mar 06 16:16:58 2012 VASE File c:\windows\desktop\6-3-12\data_files\glass.dat Angular Scan of Microscope Slide Glass
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179 Tue Mar 06 16:17:49 2012 VASE File c:\windows\desktop\6-3-12\data_files\glass.dat Angular Scan of Microscope Slide Glass
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180 Tue Mar 06 16:39:47 2012 Goniometer limit switch error. #1
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181 Tue Mar 06 16:43:31 2012 VASE File c:\windows\desktop\6-3-12\data_files\glass.dat Angular Scan of Microscope Slide Glass
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182 Tue Mar 06 16:43:41 2012 Goniometer limit switch error. #1
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183 Tue Mar 06 17:02:52 2012 Goniometer limit switch error. #1
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184 Tue Mar 06 17:16:40 2012 VASE File c:\windows\desktop\6-3-12\data_files\si.dat Angular Scan of Si Calibration Wafer
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185 Tue Mar 06 17:23:12 2012 Low-level data acquisition timed out. #2
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186 Try re-initializing hardware.
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187 If problem returns, contact J.A.Woollam Co. or a representative.
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188 Tue Mar 06 17:23:22 2012 VASE File c:\windows\desktop\6-3-12\data_files\si.dat Angular Scan of Si Calibration Wafer
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190 Tue Mar 06 17:27:04 2012 Init User: Sam (v3.698, 6.256 DLL)
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193 Tue Mar 06 17:42:35 2012 Init User: Sam (v3.698, 6.256 DLL)
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196 Tue Mar 06 17:44:06 2012 Init User: Sam (v3.698, 6.256 DLL)
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199 Tue Mar 06 17:46:22 2012 Init User: Sam (v3.698, 6.256 DLL)
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202 Wed Mar 07 09:38:13 2012 Init User: Sam (v3.698, 6.256 DLL)
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204 Wed Mar 07 09:43:31 2012
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205 Wed Mar 07 09:43:31 2012 Calib: rvs=5, pts=100, span=180.0, aoi=65.000, t=0, d=3
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206 Wed Mar 07 09:48:00 2012 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
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207 Wed Mar 07 09:48:04 2012 Coarse Calib: Wvl1=5000.0 Ps=2.2352±0.0084 Attn=1.0134±0.0003 As=102.594±0.009 Psi=20.187±0.007 Del=171.632±0.085 <I>=16.500, MSE=1.79 (1.29)
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208 Wed Mar 07 09:48:04 2012 Coarse Calib: MSE=1.785 (1.288) AzOffset=-0.000±0.004746 ElOffset=-0.018±0.006817
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209 Wed Mar 07 09:57:13 2012
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210 Wed Mar 07 09:57:13 2012 Calib: rvs=30, pts=60, span=60.0, aoi=65.000, t=1, d=3
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211 Wed Mar 07 10:06:32 2012 Calib: Wvl1=5000.0 Ps=2.2332±0.0023 Attn=1.0138±0.0001 As=102.535±0.004 Psi=20.194±0.003 Del=171.808±0.032 <I>=9.613, MSE=0.88 (0.479) Synch=-45.365±0.020 [-45.387,-45.313] M1=0.0089±0.0026 [0.0044,0.012]
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212 Wed Mar 07 10:06:32 2012 Calib: Wvl2=11770.0 Ps=2.2332±0.0023 IrAttn=0.9718±0.0002 IrAs=100.300±0.006 IrPsi=15.329±0.002 IrDel=175.914±0.176 <I>=11.013 MSE=0.88 (0.479) Synch=-48.038±0.014 [-48.059,-48.012] M1=0.014±0.0057 [0.0055,0.023]
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213 Wed Mar 07 10:06:32 2012 Calib: MSE=0.880 (0.479) AzOffset=0.001±0.001787 ElOffset=0.004±0.002547 DP=-0.001±0.016
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214 Wed Mar 07 10:27:56 2012 VASE File c:\windows\desktop\7-3-12\data_files\si.dat Angular scan of Si Calibration Wafer 20 -> 80 degrees
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215 Wed Mar 07 11:03:50 2012 VASE File c:\windows\desktop\7-3-12\data_files\si.dat Angular scan of Si Calibration Wafer 20 -> 80 degrees
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216 Wed Mar 07 14:19:00 2012
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217 Wed Mar 07 14:19:00 2012 Calib: rvs=30, pts=60, span=60.0, aoi=80.000, t=1, d=3
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218 Wed Mar 07 14:30:05 2012 Calib: Wvl1=5000.0 Ps=2.2330±0.0017 Attn=1.0147±0.0001 As=102.405±0.004 Psi=9.063±0.005 Del=20.992±0.078 <I>=9.054, MSE=1.09 (0.643) Synch=-45.348±0.027 [-45.382,-45.278] M1=0.0076±0.0013 [0.0046,0.0098]
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219 Wed Mar 07 14:30:05 2012 Calib: Wvl2=11770.0 Ps=2.2330±0.0017 IrAttn=0.9725±0.0002 IrAs=100.228±0.005 IrPsi=13.851±0.002 IrDel=4.389±0.202 <I>=14.020 MSE=1.09 (0.643) Synch=-48.064±0.014 [-48.082,-48.031] M1=0.014±0.0045 [0.0062,0.02]
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220 Wed Mar 07 14:30:06 2012 Calib: MSE=1.089 (0.643) AzOffset=-0.001±0.010101 ElOffset=0.005±0.003830 DP=0.036±0.011
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221 Wed Mar 07 15:26:04 2012 VASE File c:\windows\desktop\7-3-12\data_files\au.dat Angular scan of Au on Glass 20 -> 80 degrees
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223 Tue Mar 13 11:24:44 2012 Init User: Sam (v3.698, 6.256 DLL)
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226 Tue Mar 13 11:34:42 2012 Init User: Sam (v3.698, 6.256 DLL)
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229 Tue Mar 13 16:17:14 2012 Init User: Sam (v3.698, 6.256 DLL)
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231 Tue Mar 13 16:26:59 2012
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232 Tue Mar 13 16:26:59 2012 Calib: rvs=5, pts=100, span=180.0, aoi=65.000, t=0, d=3
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233 Tue Mar 13 16:31:34 2012 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
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234 Tue Mar 13 16:31:37 2012 Coarse Calib: Wvl1=5000.0 Ps=2.2459±0.0070 Attn=1.0133±0.0002 As=53.437±0.008 Psi=20.229±0.006 Del=172.826±0.070 <I>=14.426, MSE=1.48 (1.06)
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235 Tue Mar 13 16:31:38 2012 Coarse Calib: MSE=1.477 (1.064) AzOffset=-0.015±0.004007 ElOffset=-0.020±0.005464
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236 Tue Mar 13 16:32:20 2012
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237 Tue Mar 13 16:32:20 2012 Calib: rvs=30, pts=60, span=60.0, aoi=65.000, t=1, d=3
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238 Tue Mar 13 16:41:38 2012 Calib: Wvl1=5000.0 Ps=2.2540±0.0024 Attn=1.0137±0.0001 As=53.410±0.004 Psi=20.237±0.003 Del=172.852±0.033 <I>=8.507, MSE=0.913 (0.498) Synch=-47.398±0.020 [-47.424,-47.349] M1=0.0047±0.0016 [0.0019,0.0071]
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239 Tue Mar 13 16:41:38 2012 Calib: Wvl2=11770.0 Ps=2.2540±0.0024 IrAttn=0.9712±0.0002 IrAs=51.133±0.006 IrPsi=15.332±0.002 IrDel=176.551±0.217 <I>=9.571 MSE=0.913 (0.498) Synch=-50.023±0.030 [-50.068,-49.976] M1=0.027±0.0073 [0.014,0.037]
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240 Tue Mar 13 16:41:39 2012 Calib: MSE=0.913 (0.498) AzOffset=0.001±0.001887 ElOffset=-0.012±0.002570 DP=-0.005±0.016
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241 Tue Mar 13 17:06:59 2012 RT File c:\windows\desktop\13-03-12\baseline.dat Baseline for rP and rS scan of Black-Au on Glass
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242 Tue Mar 13 18:30:55 2012 RT File c:\windows\desktop\13-03-12\black-au_glass.dat Black-Au on Glass (0.18mbar, 3.5A, 1min)
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244 Thu Mar 15 10:57:59 2012 Init User: Sam (v3.698, 6.256 DLL)
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246 Thu Mar 15 11:02:52 2012
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247 Thu Mar 15 11:02:52 2012 Calib: rvs=5, pts=100, span=180.0, aoi=70.000, t=0, d=3
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248 Thu Mar 15 11:07:21 2012 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
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249 Thu Mar 15 11:07:24 2012 Coarse Calib: Wvl1=5000.0 Ps=2.2123±0.0060 Attn=1.0123±0.0002 As=35.196±0.007 Psi=13.516±0.007 Del=168.154±0.108 <I>=14.457, MSE=1.6 (1.21)
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250 Thu Mar 15 11:07:25 2012 Coarse Calib: MSE=1.603 (1.208) AzOffset=-0.002±0.005757 ElOffset=-0.020±0.009823
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251 Thu Mar 15 11:07:31 2012
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252 Thu Mar 15 11:07:31 2012 Calib: rvs=30, pts=60, span=60.0, aoi=70.000, t=1, d=3
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253 Thu Mar 15 11:16:49 2012 Calib: Wvl1=5000.0 Ps=2.2175±0.0036 Attn=1.0122±0.0003 As=35.140±0.009 Psi=13.517±0.008 Del=168.074±0.119 <I>=7.393, MSE=2.33 (1.37) Synch=-47.125±0.154 [-47.269,-46.634] M1=0.0022±0.00078 [0.00036,0.0041]
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254 Thu Mar 15 11:16:49 2012 Calib: Wvl2=11770.0 Ps=2.2175±0.0036 IrAttn=0.9714±0.0005 IrAs=32.842±0.011 IrPsi=7.807±0.004 IrDel=172.853±0.320 <I>=7.021 MSE=2.33 (1.37) Synch=-49.757±0.052 [-49.860,-49.676] M1=0.023±0.005 [0.0087,0.029]
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255 Thu Mar 15 11:16:50 2012 Calib: MSE=2.335 (1.366) AzOffset=-0.006±0.006366 ElOffset=0.023±0.010903 DP=0.055±0.027
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256 Thu Mar 15 11:29:55 2012 RT File c:\windows\desktop\15-03-12\data_files\baseline.dat Baseline data for Transmission scan of Black-Au on Glass
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257 Thu Mar 15 12:22:50 2012 RT File c:\windows\desktop\15-03-12\data_files\black-au_glass.dat Black-Au on Glass (0.18mbar 3.5A 1min)
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258 Thu Mar 15 15:10:01 2012 RT File c:\windows\desktop\15-03-12\data_files\baseline_glass.dat Basline scan for glass
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259 Thu Mar 15 15:54:57 2012 RT File c:\windows\desktop\15-03-12\data_files\glass.dat Glass Transmission scan
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261 Fri Mar 16 10:41:28 2012 Init User: Sam (v3.698, 6.256 DLL)
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264 Fri Mar 16 11:43:01 2012 Init User: Sam (v3.698, 6.256 DLL)
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266 Fri Mar 16 11:49:42 2012
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267 Fri Mar 16 11:49:42 2012 Calib: rvs=5, pts=100, span=180.0, aoi=65.000, t=0, d=3
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268 Fri Mar 16 11:54:10 2012 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
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269 Fri Mar 16 11:54:14 2012 Coarse Calib: Wvl1=5000.0 Ps=2.2240±0.0055 Attn=1.0124±0.0002 As=116.821±0.006 Psi=20.231±0.004 Del=172.762±0.055 <I>=14.912, MSE=1.16 (0.828)
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270 Fri Mar 16 11:54:14 2012 Coarse Calib: MSE=1.157 (0.828) AzOffset=0.003±0.003132 ElOffset=0.009±0.004283
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271 Fri Mar 16 11:57:13 2012
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272 Fri Mar 16 11:57:13 2012 Calib: rvs=30, pts=60, span=60.0, aoi=65.000, t=1, d=3
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273 Fri Mar 16 12:06:31 2012 Calib: Wvl1=5000.0 Ps=2.2299±0.0023 Attn=1.0126±0.0001 As=116.783±0.004 Psi=20.234±0.003 Del=172.714±0.033 <I>=8.727, MSE=0.905 (0.494) Synch=98.284±0.021 [98.255,98.335] M1=0.0078±0.0031 [0.0035,0.013]
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274 Fri Mar 16 12:06:31 2012 Calib: Wvl2=11770.0 Ps=2.2299±0.0023 IrAttn=0.9712±0.0002 IrAs=114.523±0.006 IrPsi=15.324±0.002 IrDel=176.777±0.233 <I>=8.439 MSE=0.905 (0.494) Synch=95.797±0.023 [95.755,95.854] M1=0.013±0.0068 [0.0044,0.021]
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275 Fri Mar 16 12:06:31 2012 Calib: MSE=0.905 (0.494) AzOffset=0.005±0.001862 ElOffset=0.019±0.002551 DP=-0.012±0.016
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276 Fri Mar 16 13:33:30 2012 VASE File c:\windows\desktop\16-03-12\black-au_glass.dat Black-Au on glass Spectro Scan (0.18mbar, 3.5A, 1min)
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278 Wed Sep 19 12:42:38 2012 Init User: Sam (v3.698, 6.256 DLL)
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280 Wed Sep 19 12:48:15 2012
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281 Wed Sep 19 12:48:15 2012 Calib: rvs=5, pts=100, span=180.0, aoi=80.000, t=0, d=3
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282 Wed Sep 19 12:52:44 2012 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
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283 Wed Sep 19 12:52:47 2012 Coarse Calib: Wvl1=5000.0 Ps=2.1894±0.0060 Attn=1.0112±0.0002 As=102.669±0.006 Psi=8.936±0.009 Del=19.874±0.157 <I>=17.121, MSE=1.64 (1.51)
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284 Wed Sep 19 12:52:47 2012 Coarse Calib: MSE=1.644 (1.506) AzOffset=-0.031±0.019458 ElOffset=-0.028±0.007767
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285 Wed Sep 19 12:58:23 2012
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286 Wed Sep 19 12:58:23 2012 Calib: rvs=30, pts=60, span=60.0, aoi=80.000, t=1, d=3
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287 Wed Sep 19 13:07:41 2012 Calib: Wvl1=5000.0 Ps=2.1948±0.0021 Attn=1.0118±0.0002 As=102.524±0.005 Psi=8.942±0.006 Del=20.022±0.097 <I>=8.155, MSE=1.34 (0.759) Synch=114.008±0.019 [113.973,114.048] M1=0.0055±0.0022 [0.00031,0.0089]
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288 Wed Sep 19 13:07:41 2012 Calib: Wvl2=11770.0 Ps=2.1948±0.0021 IrAttn=0.9691±0.0003 IrAs=100.117±0.006 IrPsi=13.845±0.002 IrDel=4.566±0.239 <I>=11.603 MSE=1.34 (0.759) Synch=110.980±0.013 [110.958,111.022] M1=0.013±0.0033 [0.0066,0.017]
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289 Wed Sep 19 13:07:42 2012 Calib: MSE=1.335 (0.759) AzOffset=0.025±0.012142 ElOffset=0.006±0.004793 DP=-0.025±0.013
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290 Wed Sep 19 13:20:24 2012 RT File c:\windows\desktop\19-09-12\control.dat Si calibration wafer Rp and Rs scan
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291 Wed Sep 19 13:31:16 2012
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292 Wed Sep 19 13:31:16 2012 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
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293 Wed Sep 19 13:42:24 2012 Calib: Wvl1=5000.0 Ps=2.2192±0.0019 Attn=1.0128±0.0002 As=102.288±0.004 Psi=6.689±0.011 Del=120.031±0.059 <I>=6.805, MSE=1.12 (2.02) Synch=114.116±0.025 [114.075,114.163] M1=0.004±0.0014 [0.00056,0.0061]
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294 Wed Sep 19 13:42:25 2012 Calib: Wvl2=11770.0 Ps=2.2192±0.0019 IrAttn=0.9703±0.0002 IrAs=99.982±0.005 IrPsi=3.208±0.002 IrDel=52.666±0.041 <I>=6.183 MSE=1.12 (2.02) Synch=111.003±0.069 [110.905,111.386] M1=0.014±0.0027 [0.004,0.017]
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295 Wed Sep 19 13:42:25 2012 Calib: MSE=1.121 (2.015) AzOffset=0.020±0.004272 ElOffset=0.025±0.008055 DP=1.421±0.019
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296 Wed Sep 19 14:43:19 2012 RT File c:\windows\desktop\19-09-12\control.dat Si calibration wafer Rp and Rs scan
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297 Wed Sep 19 16:36:31 2012 RT File c:\windows\desktop\19-09-12\au+black_au+au_si.dat Au (30min 4.0A e-6mbar) + BlackAu (30min 3.1A 0.2mbar) + Au (125min 3.5A e-8mbar) Rp and Rs scan
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298 Wed Sep 19 16:54:38 2012 VASE File c:\windows\desktop\19-09-12\au+black_au+au_si_ellipso.dat Au (30min 4.0A e-6mbar) + BlackAu (30min 3.1A 0.2mbar) + Au (125min 3.5A e-8mbar) Ellipsometric scans
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300 Thu Sep 20 09:55:31 2012 Init User: Sam (v3.698, 6.256 DLL)
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302 Thu Sep 20 10:11:31 2012
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303 Thu Sep 20 10:11:31 2012 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
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304 Thu Sep 20 10:22:40 2012 Calib: Wvl1=5000.0 Ps=2.2385±0.0029 Attn=1.0106±0.0002 As=52.651±0.004 Psi=5.114±0.009 Del=142.152±0.134 <I>=5.817, MSE=1.27 (3.41) Synch=113.959±0.049 [113.848,114.209] M1=0.0035±0.00083 [0.00064,0.005]
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305 Thu Sep 20 10:22:40 2012 Calib: Wvl2=11770.0 Ps=2.2385±0.0029 IrAttn=0.9686±0.0002 IrAs=50.302±0.005 IrPsi=2.078±0.004 IrDel=31.462±0.170 <I>=5.961 MSE=1.27 (3.41) Synch=111.123±0.103 [110.915,111.683] M1=0.039±0.0057 [0.0081,0.043]
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306 Thu Sep 20 10:22:41 2012 Calib: MSE=1.265 (3.406) AzOffset=0.012±0.006674 ElOffset=0.014±0.023358 DP=0.071±0.012
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307 Thu Sep 20 11:15:29 2012 VASE File c:\windows\desktop\2012-09-20\au+blackau+au_si_ellipso.dat Au (30min 4A e-6mbar) + BlackAu (30min 3.2A 0.2mbar) + Au (125min 3.5A e-8mbar) on Si Ellipsometric scan
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308 Thu Sep 20 12:43:09 2012 VASE File c:\windows\desktop\2012-09-20\jeremy.dat Jeremy's sample (Ta/Py/Ni/Ta/Si Fe20Ni80)
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309 Thu Sep 20 15:18:20 2012 VASE File c:\windows\desktop\2012-09-20\au_glass_ellipso.dat Au on Glass (6min 3.2A e-5mbar)
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310 Thu Sep 20 15:48:20 2012 VASE File c:\windows\desktop\2012-09-20\ni+au_si.dat Ni on Au/Si provided by Mikhail Kostylev
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311 Thu Sep 20 16:10:52 2012 VASE File c:\windows\desktop\2012-09-20\whiteni+au_si.dat "White" Ni on Au/Si provided by Mikhail Kostylev
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312 Thu Sep 20 16:31:15 2012 VASE File c:\windows\desktop\2012-09-20\ni+au_si(2).dat Ni on Au/Si provided by Mikhail Kostylev (this time I removed the alignment detector)
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313 Thu Sep 20 16:38:52 2012 SendMonoCmd Error: Monochromator Command Return Failed 31. DK
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314 Thu Sep 20 16:39:27 2012 GetMonoStatus Error: Mono Return Failed 27. rtn=1. DK
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315 Thu Sep 20 16:39:27 2012 d=01 cmd=255 00 86 A2 00 18 00 00 18 00 00
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316 Thu Sep 20 16:39:27 2012 MonoCheck Error: Monochromator Communication Failed. DK
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317 Thu Sep 20 16:39:27 2012 Could Not Adjust Slit Width. DK