-Energy-resolved methods of Secondary Electron Spectroscopy are based upon observation of the secondary electron energy distribution at a fixed primary electron energy. The primary electron energy determines which processes are possible, whilst the observed distribution can be related to the probability distribution for the possible processes.
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-In contrast to Energy-resolved methods, Total Current (or Yield) methods are based on observation of the total current of secondary electrons as a function of primary electron energy. As the primary electron energy is increased, the threshold energies for particular processes are passed. This
+Energy-resolved methods of Secondary Electron Spectroscopy are based upon observation of the secondary electron energy distribution at a fixed primary electron energy. The primary electron energy determines which processes are possible, whilst the observed secondary electron energy distribution can be related to the probability distribution for the possible processes. Figure \ref{} shows a typical distribution of secondary electron energy, taken from \cite{}. The spectrum shows a narrow peak centred upon the primary electron energy; this corresponds to elastic scattering. At the low energy end of the spectrum, a broad maximum results from inelastic processes. Fine structure on this part of the spectrum is due to the energy structure of empty states in the sample. Fine structure due to Augur electron emission and interaction with core electrons is visible in the high energy part of the spectrum. Typically the aim of a energy resolved secondary electron spectroscopy experiment is to study the properties of secondary electrons in a small energy interval.