--- /dev/null
+\r
+VASEmethod[EllipsometerType=5, Isotropic+Depolarization, AutoRetarder=1, TrackPol=1, Pol>=0, Revs=100, AutoSlit=2000, WVASE=3.698, HardVer=6.256, Wed Jul 08 17:35:49 2009]\r
+Original[080709 2nd si wafer.dat]\r
+Angstroms\r
+4000.000000 65.000000 25.803213 172.6666 0.076284 0.36041\r
+4100.000000 65.000000 24.76445 173.18895 0.0880482 0.401484\r
+4200.000000 65.000000 23.926418 173.55295 0.069456 0.332318\r
+4300.000000 65.000000 23.234842 173.88277 0.0675913 0.336906\r
+4400.000000 65.000000 22.632418 174.08626 0.0649496 0.338063\r
+4500.000000 65.000000 22.091293 174.28938 0.0589916 0.319057\r
+4600.000000 65.000000 21.633795 174.49394 0.0611182 0.311699\r
+4700.000000 65.000000 21.214994 174.65082 0.0581316 0.306629\r
+4800.000000 65.000000 20.838076 174.81027 0.0555254 0.302373\r
+4900.000000 65.000000 20.493713 174.93752 0.0554927 0.312606\r
+5000.000000 65.000000 20.186539 175.04417 0.0464247 0.269519\r
+5100.000000 65.000000 19.898598 175.18001 0.0526579 0.28711\r
+5200.000000 65.000000 19.63413 175.29607 0.0448358 0.251156\r
+5300.000000 65.000000 19.396561 175.38458 0.0432842 0.249624\r
+5400.000000 65.000000 19.177874 175.49913 0.0418563 0.247627\r
+5500.000000 65.000000 18.973701 175.58821 0.0406712 0.246605\r
+5600.000000 65.000000 18.783176 175.61993 0.0360176 0.22377\r
+5700.000000 65.000000 18.602867 175.75484 0.0399349 0.232713\r
+5800.000000 65.000000 18.431658 175.79718 0.0378296 0.225859\r
+5900.000000 65.000000 18.278004 175.89958 0.0351925 0.214873\r
+6000.000000 65.000000 18.133389 175.96143 0.0349648 0.218036\r
+6100.000000 65.000000 17.99865 176.03726 0.0325356 0.20712\r
+6200.000000 65.000000 17.870163 176.08531 0.0356301 0.213167\r
+6300.000000 65.000000 17.738596 176.1606 0.031774 0.193864\r
+6400.000000 65.000000 17.624344 176.21014 0.0310253 0.192826\r
+6500.000000 65.000000 17.515749 176.29192 0.0305699 0.193575\r
+6600.000000 65.000000 17.414751 176.34572 0.0291542 0.188443\r
+6700.000000 65.000000 17.319555 176.38889 0.0249515 0.164192\r
+6800.000000 65.000000 17.227953 176.46028 0.0275342 0.170392\r
+6900.000000 65.000000 17.13752 176.51959 0.0278181 0.175134\r
+7000.000000 65.000000 17.052145 176.55467 0.0264677 0.16939\r
+7100.000000 65.000000 16.976944 176.59552 0.0214327 0.139406\r
+7200.000000 65.000000 16.90197 176.63737 0.0255464 0.168792\r
+7300.000000 65.000000 16.827095 176.70537 0.0213956 0.143629\r
+7400.000000 65.000000 16.757488 176.73509 0.0208078 0.131608\r
+7500.000000 65.000000 16.694065 176.80318 0.0206635 0.132599\r
+7600.000000 65.000000 16.633427 176.86061 0.0216249 0.140784\r
+7700.000000 65.000000 16.576128 176.8969 0.0199215 0.131536\r
+7800.000000 65.000000 16.514923 176.92982 0.0190069 0.127251\r
+7900.000000 65.000000 16.464024 176.98135 0.0186541 0.126858\r
+8000.000000 65.000000 16.4123 176.99568 0.0179916 0.12404\r
+8100.000000 65.000000 16.348026 177.09842 0.0209192 0.136129\r
+8200.000000 65.000000 16.303167 177.14461 0.0196083 0.129355\r
+8300.000000 65.000000 16.253485 177.18153 0.0187776 0.12557\r
+8400.000000 65.000000 16.209414 177.19919 0.0218236 0.147771\r
+8500.000000 65.000000 16.174059 177.08368 0.0338195 0.230982\r
+8600.000000 65.000000 16.127581 177.34824 0.0201821 0.139707\r
+8700.000000 65.000000 16.078783 177.29671 0.0276917 0.181472\r
+8800.000000 65.000000 16.046896 177.34215 0.0223697 0.148455\r
+8900.000000 65.000000 16.016104 177.38123 0.0200589 0.134766\r
+9000.000000 65.000000 15.981284 177.40074 0.0180749 0.122837\r
+9100.000000 65.000000 15.933868 177.39525 0.0171749 0.118162\r
+9200.000000 65.000000 15.906078 177.47437 0.017531 0.121881\r
+9300.000000 65.000000 15.873706 177.52768 0.0160653 0.112902\r
+9400.000000 65.000000 15.838793 177.52916 0.0190873 0.126988\r
+9500.000000 65.000000 15.80435 177.54739 0.0196213 0.131985\r
+9600.000000 65.000000 15.777124 177.63383 0.0181076 0.123055\r
+9700.000000 65.000000 15.749682 177.62242 0.0166585 0.114372\r
+9800.000000 65.000000 15.718168 177.65549 0.0181711 0.126101\r
+9900.000000 65.000000 15.692513 177.66422 0.0191906 0.134553\r
+10000.000000 65.000000 15.670657 177.68217 0.0149675 0.10603\r
+4000.000000 70.000000 20.179846 169.06548 0.0998176 0.56297\r
+4100.000000 70.000000 18.95878 169.67657 0.088842 0.49866\r
+4200.000000 70.000000 17.939888 170.0925 0.0810549 0.487594\r
+4300.000000 70.000000 17.104656 170.3651 0.0678064 0.434499\r
+4400.000000 70.000000 16.374855 170.65921 0.0637341 0.431946\r
+4500.000000 70.000000 15.742887 170.85109 0.0637093 0.458644\r
+4600.000000 70.000000 15.178991 171.07208 0.0628655 0.432247\r
+4700.000000 70.000000 14.680811 171.24329 0.0612889 0.443881\r
+4800.000000 70.000000 14.227516 171.35442 0.0536538 0.406378\r
+4900.000000 70.000000 13.82915 171.52008 0.0504555 0.398483\r
+5000.000000 70.000000 13.464796 171.62863 0.049931 0.413521\r
+5100.000000 70.000000 13.130174 171.77548 0.050303 0.396032\r
+5200.000000 70.000000 12.818378 171.90746 0.0474366 0.387479\r
+5300.000000 70.000000 12.530059 172.02449 0.045182 0.384627\r
+5400.000000 70.000000 12.266661 172.09561 0.0430547 0.379723\r
+5500.000000 70.000000 12.031781 172.2063 0.0381232 0.347593\r
+5600.000000 70.000000 11.802759 172.29893 0.0392902 0.369968\r
+5700.000000 70.000000 11.592967 172.38359 0.0399697 0.358138\r
+5800.000000 70.000000 11.395163 172.48729 0.0391078 0.361224\r
+5900.000000 70.000000 11.216733 172.56491 0.035344 0.335995\r
+6000.000000 70.000000 11.049712 172.60077 0.0339488 0.331773\r
+6100.000000 70.000000 10.889616 172.69933 0.0321339 0.322653\r
+6200.000000 70.000000 10.73533 172.8116 0.0317348 0.301537\r
+6300.000000 70.000000 10.598957 172.82489 0.0322502 0.316063\r
+6400.000000 70.000000 10.465642 172.99786 0.0334614 0.336285\r
+6500.000000 70.000000 10.340774 173.03596 0.0304212 0.31334\r
+6600.000000 70.000000 10.223302 173.11432 0.0279987 0.2952\r
+6700.000000 70.000000 10.11079 173.18744 0.026708 0.288117\r
+6800.000000 70.000000 10.007002 173.2807 0.0287646 0.293354\r
+6900.000000 70.000000 9.9086714 173.32275 0.0268669 0.279743\r
+7000.000000 70.000000 9.807579 173.37352 0.0245284 0.260826\r
+7100.000000 70.000000 9.7151957 173.47717 0.0248978 0.270122\r
+7200.000000 70.000000 9.6285839 173.52051 0.022327 0.247079\r
+7300.000000 70.000000 9.5482759 173.59572 0.0231813 0.261459\r
+7400.000000 70.000000 9.4679823 173.70525 0.0237044 0.252765\r
+7500.000000 70.000000 9.3917933 173.79465 0.0219895 0.238749\r
+7600.000000 70.000000 9.3222904 173.83737 0.0197033 0.217636\r
+7700.000000 70.000000 9.2517529 173.91287 0.0187652 0.210966\r
+7800.000000 70.000000 9.1840343 173.92046 0.0206607 0.235882\r
+7900.000000 70.000000 9.1208782 174.03281 0.0234383 0.272129\r
+8000.000000 70.000000 9.0595055 174.07768 0.0212651 0.250882\r
+8100.000000 70.000000 9.0053825 174.09492 0.0268884 0.300997\r
+8200.000000 70.000000 8.9393988 174.21643 0.0198676 0.227461\r
+8300.000000 70.000000 8.9053631 174.28482 0.0188982 0.220002\r
+8400.000000 70.000000 8.8429136 174.24825 0.024031 0.283436\r
+8500.000000 70.000000 8.7968788 174.33809 0.0213585 0.255142\r
+8600.000000 70.000000 8.7510452 174.47626 0.0182528 0.22146\r
+8700.000000 70.000000 8.7086039 174.42415 0.0183643 0.21123\r
+8800.000000 70.000000 8.6573133 174.59724 0.0194597 0.228255\r
+8900.000000 70.000000 8.6179619 174.61591 0.0175244 0.208424\r
+9000.000000 70.000000 8.5768871 174.68237 0.0201013 0.24241\r
+9100.000000 70.000000 8.5357428 174.73337 0.0178984 0.218607\r
+9200.000000 70.000000 8.4964409 174.77895 0.0161259 0.199673\r
+9300.000000 70.000000 8.456111 174.80971 0.0171696 0.215219\r
+9400.000000 70.000000 8.4188223 174.88107 0.0197121 0.234455\r
+9500.000000 70.000000 8.38239 174.90092 0.0158797 0.191409\r
+9600.000000 70.000000 8.3509293 174.96104 0.0149453 0.182095\r
+9700.000000 70.000000 8.315815 175.05321 0.0145265 0.179163\r
+9800.000000 70.000000 8.282649 175.07838 0.0157561 0.196727\r
+9900.000000 70.000000 8.2479019 175.11938 0.0150733 0.190463\r
+10000.000000 70.000000 8.2281952 175.16183 0.0173446 0.22152\r
+4000.000000 75.000000 12.420615 159.49965 0.109408 0.931529\r
+4100.000000 75.000000 10.96883 159.67207 0.0923509 0.821632\r
+4200.000000 75.000000 9.7853861 159.28214 0.0875935 0.886332\r
+4300.000000 75.000000 8.7882833 158.97301 0.0721738 0.810685\r
+4400.000000 75.000000 7.9670353 158.39195 0.0619933 0.759408\r
+4500.000000 75.000000 7.2369218 157.77374 0.0542811 0.717784\r
+4600.000000 75.000000 6.6007185 157.12085 0.0576726 0.746471\r
+4700.000000 75.000000 6.0398278 156.28416 0.0492462 0.674551\r
+4800.000000 75.000000 5.5466733 155.38449 0.044035 0.665881\r
+4900.000000 75.000000 5.1029439 154.44456 0.040539 0.642813\r
+5000.000000 75.000000 4.7088389 153.40402 0.0342548 0.566162\r
+5100.000000 75.000000 4.3438592 152.39909 0.0353624 0.560891\r
+5200.000000 75.000000 4.0059385 151.07933 0.0346628 0.567156\r
+5300.000000 75.000000 3.7023821 149.70967 0.0250941 0.420925\r
+5400.000000 75.000000 3.4348783 148.37927 0.0290772 0.500529\r
+5500.000000 75.000000 3.1814349 146.82292 0.0239295 0.418783\r
+5600.000000 75.000000 2.9544744 145.22423 0.0190844 0.339667\r
+5700.000000 75.000000 2.7437379 143.49692 0.0281233 0.47511\r
+5800.000000 75.000000 2.543541 141.6051 0.024969 0.424494\r
+5900.000000 75.000000 2.3797679 139.63077 0.0208585 0.359208\r
+6000.000000 75.000000 2.2134271 137.30042 0.0212542 0.365538\r
+6100.000000 75.000000 2.0700107 135.01653 0.0207274 0.356475\r
+6200.000000 75.000000 1.9198351 132.2888 0.0122217 0.198583\r
+6300.000000 75.000000 1.808605 129.56647 0.0186233 0.302817\r
+6400.000000 75.000000 1.6933564 126.57462 0.0181195 0.291421\r
+6500.000000 75.000000 1.5868874 123.52419 0.0234819 0.371396\r
+6600.000000 75.000000 1.5106335 120.18702 0.0129975 0.203406\r
+6700.000000 75.000000 1.426402 116.6246 0.00963254 0.146845\r
+6800.000000 75.000000 1.3564574 112.88551 0.0175381 0.261549\r
+6900.000000 75.000000 1.2978437 108.98833 0.00757322 0.110657\r
+7000.000000 75.000000 1.2338624 105.0603 0.0248446 0.351866\r
+7100.000000 75.000000 1.168875 100.84482 0.0152273 0.209236\r
+7200.000000 75.000000 1.1560867 96.655792 0.0161086 0.220384\r
+7300.000000 75.000000 1.1202763 92.305054 0.0132163 0.178616\r
+7400.000000 75.000000 1.0982221 88.036766 0.0244604 0.341615\r
+7500.000000 75.000000 1.0877199 83.750618 0.0116747 0.163561\r
+7600.000000 75.000000 1.0756209 79.516747 0.0168416 0.23573\r
+7700.000000 75.000000 1.0814756 75.799591 0.0481196 0.696899\r
+7800.000000 75.000000 1.0517994 71.511063 0.020227 0.289548\r
+7900.000000 75.000000 1.0622488 67.735283 0.0523408 0.774471\r
+8000.000000 75.000000 1.0812352 64.695747 0.0280098 0.423164\r
+8100.000000 75.000000 1.0977303 60.786526 0.0660079 1.02735\r
+8200.000000 75.000000 1.1102817 58.132469 0.0300534 0.473167\r
+8300.000000 75.000000 1.1377859 55.560997 0.0221113 0.358718\r
+8400.000000 75.000000 1.134552 52.878258 0.0517133 0.849343\r
+8500.000000 75.000000 1.2596463 51.19772 0.0528681 0.940275\r
+8600.000000 75.000000 1.205163 47.854053 0.0344195 0.604689\r
+8700.000000 75.000000 1.2064612 45.733292 0.0282729 0.476052\r
+8800.000000 75.000000 1.2460701 43.891415 0.0124214 0.21682\r
+8900.000000 75.000000 1.2656523 42.310329 0.0108114 0.191662\r
+9000.000000 75.000000 1.2871377 40.521797 0.0146471 0.263217\r
+9100.000000 75.000000 1.3182809 38.807842 0.0145306 0.267006\r
+9200.000000 75.000000 1.3329229 37.446941 0.00934298 0.172476\r
+9300.000000 75.000000 1.3551461 35.845058 0.0116547 0.217923\r
+9400.000000 75.000000 1.3815869 34.597034 0.0132479 0.238778\r
+9500.000000 75.000000 1.4090348 33.301109 0.0100188 0.183463\r
+9600.000000 75.000000 1.4344893 32.361931 0.013275 0.246298\r
+9700.000000 75.000000 1.4416785 31.20454 0.0120826 0.224782\r
+9800.000000 75.000000 1.4724602 30.234545 0.00994669 0.18795\r
+9900.000000 75.000000 1.4959561 29.237513 0.0109164 0.208621\r
+10000.000000 75.000000 1.5204939 28.696301 0.011331 0.219026\r
+dpolE 4000.000000 65.000000 -0.0199539 0.497054\r
+dpolE 4100.000000 65.000000 -0.158551 0.577101\r
+dpolE 4200.000000 65.000000 -0.0734349 0.438982\r
+dpolE 4300.000000 65.000000 -0.138869 0.41377\r
+dpolE 4400.000000 65.000000 -0.127399 0.386571\r
+dpolE 4500.000000 65.000000 -0.0936235 0.341502\r
+dpolE 4600.000000 65.000000 -0.117589 0.359172\r
+dpolE 4700.000000 65.000000 -0.110538 0.333252\r
+dpolE 4800.000000 65.000000 -0.0962691 0.311024\r
+dpolE 4900.000000 65.000000 -0.093496 0.304551\r
+dpolE 5000.000000 65.000000 -0.0670359 0.249743\r
+dpolE 5100.000000 65.000000 -0.101864 0.288654\r
+dpolE 5200.000000 65.000000 -0.0968818 0.241059\r
+dpolE 5300.000000 65.000000 -0.0836825 0.228832\r
+dpolE 5400.000000 65.000000 -0.0864389 0.217638\r
+dpolE 5500.000000 65.000000 -0.0963816 0.208199\r
+dpolE 5600.000000 65.000000 -0.0647197 0.181594\r
+dpolE 5700.000000 65.000000 -0.103474 0.205657\r
+dpolE 5800.000000 65.000000 -0.132288 0.192197\r
+dpolE 5900.000000 65.000000 -0.0874199 0.176243\r
+dpolE 6000.000000 65.000000 -0.0931202 0.172846\r
+dpolE 6100.000000 65.000000 -0.0897617 0.158851\r
+dpolE 6200.000000 65.000000 -0.0860511 0.177967\r
+dpolE 6300.000000 65.000000 -0.0852061 0.156652\r
+dpolE 6400.000000 65.000000 -0.0976381 0.151184\r
+dpolE 6500.000000 65.000000 -0.0757461 0.14723\r
+dpolE 6600.000000 65.000000 -0.0753517 0.139055\r
+dpolE 6700.000000 65.000000 -0.0696648 0.1178\r
+dpolE 6800.000000 65.000000 -0.0989617 0.133151\r
+dpolE 6900.000000 65.000000 -0.0809584 0.13307\r
+dpolE 7000.000000 65.000000 -0.0822468 0.125351\r
+dpolE 7100.000000 65.000000 -0.0630151 0.100535\r
+dpolE 7200.000000 65.000000 -0.0689073 0.118756\r
+dpolE 7300.000000 65.000000 -0.0564809 0.0985563\r
+dpolE 7400.000000 65.000000 -0.0513137 0.0981568\r
+dpolE 7500.000000 65.000000 -0.0516735 0.0966149\r
+dpolE 7600.000000 65.000000 -0.0394327 0.100235\r
+dpolE 7700.000000 65.000000 -0.0317437 0.0915822\r
+dpolE 7800.000000 65.000000 -0.0269127 0.086675\r
+dpolE 7900.000000 65.000000 -0.0492092 0.0845341\r
+dpolE 8000.000000 65.000000 -0.042573 0.0809386\r
+dpolE 8100.000000 65.000000 -0.0286628 0.0962999\r
+dpolE 8200.000000 65.000000 -0.0316161 0.0895616\r
+dpolE 8300.000000 65.000000 -0.0297374 0.0851015\r
+dpolE 8400.000000 65.000000 -0.00307653 0.0982044\r
+dpolE 8500.000000 65.000000 0.0256316 0.151472\r
+dpolE 8600.000000 65.000000 0.00976077 0.0897221\r
+dpolE 8700.000000 65.000000 -0.0200337 0.126003\r
+dpolE 8800.000000 65.000000 -0.0533379 0.101089\r
+dpolE 8900.000000 65.000000 0.00548141 0.0899898\r
+dpolE 9000.000000 65.000000 0.00443401 0.0805767\r
+dpolE 9100.000000 65.000000 0.0190611 0.0760215\r
+dpolE 9200.000000 65.000000 -0.0127961 0.0771951\r
+dpolE 9300.000000 65.000000 -0.0235231 0.0703481\r
+dpolE 9400.000000 65.000000 -0.0278224 0.0855576\r
+dpolE 9500.000000 65.000000 -0.0183546 0.0873833\r
+dpolE 9600.000000 65.000000 -0.0204342 0.0801822\r
+dpolE 9700.000000 65.000000 -0.0276575 0.0733592\r
+dpolE 9800.000000 65.000000 -0.0239197 0.0795495\r
+dpolE 9900.000000 65.000000 -0.0135787 0.0835549\r
+dpolE 10000.000000 65.000000 0.0136212 0.0648158\r
+dpolE 4000.000000 70.000000 -0.0823599 0.547138\r
+dpolE 4100.000000 70.000000 -0.056024 0.475096\r
+dpolE 4200.000000 70.000000 -0.0726509 0.409624\r
+dpolE 4300.000000 70.000000 -0.0804192 0.325989\r
+dpolE 4400.000000 70.000000 -0.0625167 0.291908\r
+dpolE 4500.000000 70.000000 -0.0271442 0.279963\r
+dpolE 4600.000000 70.000000 -0.0664766 0.274531\r
+dpolE 4700.000000 70.000000 -0.069516 0.257896\r
+dpolE 4800.000000 70.000000 -0.0666888 0.21767\r
+dpolE 4900.000000 70.000000 -0.053593 0.197788\r
+dpolE 5000.000000 70.000000 -0.0519822 0.190123\r
+dpolE 5100.000000 70.000000 -0.053113 0.192208\r
+dpolE 5200.000000 70.000000 -0.0648717 0.175873\r
+dpolE 5300.000000 70.000000 -0.0532045 0.163083\r
+dpolE 5400.000000 70.000000 -0.0429207 0.151279\r
+dpolE 5500.000000 70.000000 -0.0318675 0.130641\r
+dpolE 5600.000000 70.000000 -0.0328965 0.131408\r
+dpolE 5700.000000 70.000000 -0.0426419 0.135243\r
+dpolE 5800.000000 70.000000 -0.0435359 0.129318\r
+dpolE 5900.000000 70.000000 -0.0418854 0.114395\r
+dpolE 6000.000000 70.000000 -0.0365117 0.107672\r
+dpolE 6100.000000 70.000000 -0.0364337 0.0999127\r
+dpolE 6200.000000 70.000000 -0.0391907 0.0999019\r
+dpolE 6300.000000 70.000000 -0.0454765 0.0999937\r
+dpolE 6400.000000 70.000000 -0.0430966 0.101863\r
+dpolE 6500.000000 70.000000 -0.0298131 0.0909933\r
+dpolE 6600.000000 70.000000 -0.0296831 0.0823872\r
+dpolE 6700.000000 70.000000 -0.0301843 0.0773456\r
+dpolE 6800.000000 70.000000 -0.0346864 0.0846532\r
+dpolE 6900.000000 70.000000 -0.0320404 0.0778566\r
+dpolE 7000.000000 70.000000 -0.0344085 0.0699972\r
+dpolE 7100.000000 70.000000 -0.0341295 0.0700189\r
+dpolE 7200.000000 70.000000 -0.0271028 0.0619103\r
+dpolE 7300.000000 70.000000 -0.0255282 0.0634404\r
+dpolE 7400.000000 70.000000 -0.0308162 0.0660052\r
+dpolE 7500.000000 70.000000 -0.0279878 0.0604098\r
+dpolE 7600.000000 70.000000 -0.0149243 0.0534442\r
+dpolE 7700.000000 70.000000 -0.00859418 0.0502538\r
+dpolE 7800.000000 70.000000 -0.0120743 0.0547302\r
+dpolE 7900.000000 70.000000 -0.0205141 0.061366\r
+dpolE 8000.000000 70.000000 -0.0131856 0.0550589\r
+dpolE 8100.000000 70.000000 -0.0738469 0.0716569\r
+dpolE 8200.000000 70.000000 -0.0289042 0.0520332\r
+dpolE 8300.000000 70.000000 -0.00578322 0.0489556\r
+dpolE 8400.000000 70.000000 -0.00792033 0.0616755\r
+dpolE 8500.000000 70.000000 -0.00487232 0.0543604\r
+dpolE 8600.000000 70.000000 0.00162146 0.0459787\r
+dpolE 8700.000000 70.000000 -0.000301237 0.0471478\r
+dpolE 8800.000000 70.000000 -0.0113839 0.0492611\r
+dpolE 8900.000000 70.000000 0.00361194 0.0439415\r
+dpolE 9000.000000 70.000000 0.00502606 0.0499283\r
+dpolE 9100.000000 70.000000 -0.00130253 0.0440773\r
+dpolE 9200.000000 70.000000 -0.00140642 0.039356\r
+dpolE 9300.000000 70.000000 -0.000419724 0.0415622\r
+dpolE 9400.000000 70.000000 -0.00629368 0.0486308\r
+dpolE 9500.000000 70.000000 0.0103394 0.0388081\r
+dpolE 9600.000000 70.000000 0.00514919 0.0362611\r
+dpolE 9700.000000 70.000000 0.004434 0.0349498\r
+dpolE 9800.000000 70.000000 -0.00318663 0.0376048\r
+dpolE 9900.000000 70.000000 -0.000313834 0.0356878\r
+dpolE 10000.000000 70.000000 0.0103139 0.0408086\r
+dpolE 4000.000000 75.000000 -0.0258474 0.422258\r
+dpolE 4100.000000 75.000000 -0.0490634 0.317583\r
+dpolE 4200.000000 75.000000 -0.0548561 0.270831\r
+dpolE 4300.000000 75.000000 -0.0299574 0.198792\r
+dpolE 4400.000000 75.000000 -0.016231 0.153307\r
+dpolE 4500.000000 75.000000 -0.0229811 0.120658\r
+dpolE 4600.000000 75.000000 -0.00840674 0.115641\r
+dpolE 4700.000000 75.000000 -0.0119189 0.0890142\r
+dpolE 4800.000000 75.000000 -0.0118994 0.0738619\r
+dpolE 4900.000000 75.000000 -0.010728 0.0618077\r
+dpolE 5000.000000 75.000000 -0.00572769 0.0476687\r
+dpolE 5100.000000 75.000000 -0.00310301 0.0445167\r
+dpolE 5200.000000 75.000000 -0.00369407 0.0397177\r
+dpolE 5300.000000 75.000000 -0.00792361 0.0262764\r
+dpolE 5400.000000 75.000000 0.00247491 0.0279034\r
+dpolE 5500.000000 75.000000 -0.00296453 0.0210645\r
+dpolE 5600.000000 75.000000 0.00124411 0.0154382\r
+dpolE 5700.000000 75.000000 0.0027066 0.0206241\r
+dpolE 5800.000000 75.000000 -0.00186313 0.0167936\r
+dpolE 5900.000000 75.000000 0.00910151 0.0129731\r
+dpolE 6000.000000 75.000000 0.00573435 0.0121709\r
+dpolE 6100.000000 75.000000 0.00702588 0.010978\r
+dpolE 6200.000000 75.000000 -0.000331455 0.00585343\r
+dpolE 6300.000000 75.000000 0.00660206 0.00828912\r
+dpolE 6400.000000 75.000000 0.0066002 0.00744239\r
+dpolE 6500.000000 75.000000 0.00444008 0.00890144\r
+dpolE 6600.000000 75.000000 0.00947242 0.00461539\r
+dpolE 6700.000000 75.000000 0.0073302 0.00317541\r
+dpolE 6800.000000 75.000000 0.00831902 0.00532298\r
+dpolE 6900.000000 75.000000 0.00823331 0.00215812\r
+dpolE 7000.000000 75.000000 0.00399928 0.00660146\r
+dpolE 7100.000000 75.000000 0.000520346 0.00373691\r
+dpolE 7200.000000 75.000000 0.00494536 0.00385062\r
+dpolE 7300.000000 75.000000 0.00474575 0.0029913\r
+dpolE 7400.000000 75.000000 0.00570427 0.00526675\r
+dpolE 7500.000000 75.000000 0.00626539 0.00246375\r
+dpolE 7600.000000 75.000000 0.00370887 0.003509\r
+dpolE 7700.000000 75.000000 0.00970274 0.00991075\r
+dpolE 7800.000000 75.000000 0.000448384 0.00407652\r
+dpolE 7900.000000 75.000000 0.00284651 0.0106606\r
+dpolE 8000.000000 75.000000 0.00211774 0.0059261\r
+dpolE 8100.000000 75.000000 0.00495539 0.014134\r
+dpolE 8200.000000 75.000000 0.00280583 0.00661511\r
+dpolE 8300.000000 75.000000 0.0055996 0.00504779\r
+dpolE 8400.000000 75.000000 0.0024532 0.0118276\r
+dpolE 8500.000000 75.000000 0.0268824 0.0137762\r
+dpolE 8600.000000 75.000000 0.0101391 0.00857251\r
+dpolE 8700.000000 75.000000 0.00112683 0.00712982\r
+dpolE 8800.000000 75.000000 0.00831737 0.00325639\r
+dpolE 8900.000000 75.000000 0.00867446 0.00290109\r
+dpolE 9000.000000 75.000000 0.00796478 0.00403369\r
+dpolE 9100.000000 75.000000 0.0108644 0.00412968\r
+dpolE 9200.000000 75.000000 0.0067677 0.0027096\r
+dpolE 9300.000000 75.000000 0.00619803 0.00346048\r
+dpolE 9400.000000 75.000000 0.00523308 0.00403229\r
+dpolE 9500.000000 75.000000 0.00708993 0.003127\r
+dpolE 9600.000000 75.000000 0.00868388 0.00423979\r
+dpolE 9700.000000 75.000000 0.00389129 0.00389616\r
+dpolE 9800.000000 75.000000 0.00611348 0.00329282\r
+dpolE 9900.000000 75.000000 0.00631714 0.003688\r
+dpolE 10000.000000 75.000000 0.00786649 0.00390692
\ No newline at end of file