--- /dev/null
+Complex Poly-Si structure: OX NIT OX POLY OX\r
+nm\r
+250.000000 65.000000 45.884544 108.974983 0.104222 0.183441\r
+260.000000 65.000000 51.114838 119.702484 0.064308 0.160218\r
+270.000000 65.000000 57.434525 141.810165 0.057084 0.261471\r
+280.000000 65.000000 62.145283 169.383606 0.061512 1.072140\r
+290.000000 65.000000 61.633743 143.763107 0.052058 0.254957\r
+300.000000 65.000000 58.379578 120.914551 0.044633 0.129917\r
+310.000000 65.000000 54.442814 109.294655 0.040291 0.110841\r
+320.000000 65.000000 50.346142 103.309242 0.044241 0.100087\r
+330.000000 65.000000 47.307529 100.507149 0.035260 0.118601\r
+340.000000 65.000000 44.655022 99.113457 0.031210 0.097928\r
+350.000000 65.000000 42.757011 99.140106 0.041075 0.062568\r
+360.000000 65.000000 40.817089 100.209908 0.032428 0.093794\r
+370.000000 65.000000 38.928047 101.318512 0.050018 0.061954\r
+380.000000 65.000000 36.855942 102.313576 0.039328 0.091242\r
+390.000000 65.000000 35.060661 102.827423 0.032965 0.090750\r
+400.000000 65.000000 33.794342 103.348343 0.032535 0.100666\r
+410.000000 65.000000 32.081169 104.029488 0.036490 0.110226\r
+420.000000 65.000000 31.789480 103.277840 0.040742 0.079552\r
+430.000000 65.000000 30.991796 106.662292 0.034654 0.085658\r
+440.000000 65.000000 28.480364 107.313812 0.038377 0.105234\r
+450.000000 65.000000 28.205582 102.672363 0.039611 0.091689\r
+460.000000 65.000000 29.801050 105.147873 0.041696 0.091333\r
+470.000000 65.000000 29.176939 110.497292 0.033805 0.102550\r
+480.000000 65.000000 27.031851 114.315178 0.030059 0.111465\r
+490.000000 65.000000 24.090578 113.705635 0.038053 0.106475\r
+500.000000 65.000000 23.043501 107.154480 0.031204 0.116947\r
+510.000000 65.000000 25.066790 102.864220 0.029375 0.102770\r
+520.000000 65.000000 26.885296 105.894775 0.032470 0.098040\r
+530.000000 65.000000 27.377510 110.846909 0.035823 0.113758\r
+540.000000 65.000000 26.942469 115.929756 0.041837 0.120208\r
+550.000000 65.000000 25.705677 120.201538 0.035463 0.133806\r
+560.000000 65.000000 23.865799 123.446625 0.040364 0.144913\r
+570.000000 65.000000 21.739088 124.585991 0.037193 0.149659\r
+580.000000 65.000000 19.846085 121.856850 0.036793 0.144390\r
+590.000000 65.000000 18.809731 116.565643 0.032218 0.159718\r
+600.000000 65.000000 19.216305 110.900337 0.033971 0.103631\r
+610.000000 65.000000 20.381477 107.838577 0.032757 0.116603\r
+620.000000 65.000000 22.105663 108.586922 0.034122 0.095773\r
+630.000000 65.000000 23.417887 111.316650 0.033661 0.141344\r
+640.000000 65.000000 23.860912 113.451584 0.034874 0.113152\r
+650.000000 65.000000 23.746128 116.797073 0.036378 0.106713\r
+660.000000 65.000000 23.839853 120.321495 0.034896 0.142396\r
+670.000000 65.000000 23.622648 122.931206 0.036091 0.144471\r
+680.000000 65.000000 23.330782 125.544724 0.039859 0.154485\r
+690.000000 65.000000 22.718189 129.274689 0.038813 0.167376\r
+700.000000 65.000000 22.021164 131.127945 0.039037 0.172199\r
+710.000000 65.000000 21.256641 132.759048 0.047425 0.208523\r
+720.000000 65.000000 20.019890 135.910568 0.038186 0.224605\r
+730.000000 65.000000 19.561100 134.612350 0.048631 0.219333\r
+740.000000 65.000000 18.341026 135.161545 0.035149 0.199758\r
+750.000000 65.000000 17.466991 134.599564 0.035239 0.194312\r
+760.000000 65.000000 16.743515 133.148819 0.034010 0.199184\r
+770.000000 65.000000 16.255707 131.319580 0.033863 0.182563\r
+780.000000 65.000000 15.920009 128.999207 0.035173 0.186022\r
+790.000000 65.000000 15.841523 126.284958 0.030583 0.153531\r
+800.000000 65.000000 15.982224 124.230957 0.032511 0.166113\r
+810.000000 65.000000 16.365946 122.719849 0.033924 0.146415\r
+820.000000 65.000000 16.787457 121.504295 0.031977 0.146990\r
+830.000000 65.000000 17.272249 121.145996 0.030563 0.156757\r
+840.000000 65.000000 17.723843 121.309937 0.032176 0.132259\r
+850.000000 65.000000 18.206636 121.716896 0.038367 0.150692\r
+860.000000 65.000000 18.592224 122.663284 0.033676 0.146397\r
+870.000000 65.000000 19.002676 123.597069 0.035566 0.152887\r
+880.000000 65.000000 19.267580 124.717331 0.032427 0.146929\r
+890.000000 65.000000 19.423790 126.326096 0.036889 0.149369\r
+900.000000 65.000000 19.606878 127.046974 0.037686 0.202950\r
+910.000000 65.000000 19.848772 128.519897 0.038057 0.181269\r
+920.000000 65.000000 19.975088 130.134949 0.038448 0.175798\r
+930.000000 65.000000 19.898405 131.232697 0.037454 0.174027\r
+940.000000 65.000000 19.914537 132.728287 0.037271 0.186253\r
+950.000000 65.000000 19.881035 134.081772 0.035796 0.199740\r
+960.000000 65.000000 19.820175 135.459290 0.037882 0.197286\r
+970.000000 65.000000 19.678503 136.710938 0.040948 0.214749\r
+980.000000 65.000000 19.584246 137.883255 0.037241 0.214233\r
+990.000000 65.000000 19.474430 139.164154 0.039586 0.224952\r
+1000.000000 65.000000 19.548693 140.427078 0.041667 0.230309\r
+250.000000 70.000000 47.521103 92.923363 0.072668 0.168725\r
+260.000000 70.000000 53.594902 105.347626 0.049836 0.139079\r
+270.000000 70.000000 62.506794 133.520294 0.056278 0.224986\r
+280.000000 70.000000 68.420212 163.128845 0.051521 0.660278\r
+290.000000 70.000000 64.254959 121.463585 0.042829 0.155865\r
+300.000000 70.000000 58.527306 98.899902 0.036293 0.096961\r
+310.000000 70.000000 53.872509 89.127335 0.033543 0.078392\r
+320.000000 70.000000 49.857647 84.631401 0.040051 0.082303\r
+330.000000 70.000000 46.819401 82.230377 0.039489 0.074572\r
+340.000000 70.000000 44.317513 81.609467 0.038815 0.085310\r
+350.000000 70.000000 42.655453 81.545227 0.039888 0.090822\r
+360.000000 70.000000 40.602016 82.506966 0.037101 0.089777\r
+370.000000 70.000000 38.685825 83.994408 0.037816 0.084446\r
+380.000000 70.000000 36.739956 84.778305 0.030970 0.074592\r
+390.000000 70.000000 34.834759 85.013840 0.035081 0.072896\r
+400.000000 70.000000 33.548103 85.362633 0.033657 0.104028\r
+410.000000 70.000000 31.837069 85.501846 0.031636 0.087067\r
+420.000000 70.000000 31.529581 84.740143 0.026873 0.077598\r
+430.000000 70.000000 30.460443 88.120773 0.033132 0.090930\r
+440.000000 70.000000 27.932039 87.541214 0.035065 0.100583\r
+450.000000 70.000000 28.147219 83.008621 0.030624 0.084449\r
+460.000000 70.000000 29.345497 86.077972 0.034618 0.099798\r
+470.000000 70.000000 28.333887 91.438423 0.031751 0.085289\r
+480.000000 70.000000 25.722492 94.432045 0.025941 0.082290\r
+490.000000 70.000000 22.970398 91.091682 0.027573 0.059813\r
+500.000000 70.000000 22.702843 83.910187 0.026275 0.090402\r
+510.000000 70.000000 24.986832 81.420578 0.036869 0.086009\r
+520.000000 70.000000 26.509466 85.774826 0.032187 0.086322\r
+530.000000 70.000000 26.495758 90.799835 0.031992 0.077265\r
+540.000000 70.000000 25.552883 95.948219 0.031742 0.078810\r
+550.000000 70.000000 23.847366 100.057983 0.031592 0.068017\r
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\ No newline at end of file