research/ellipsometry/WVASE32/EXAMPLES/SI-OXIDE.DAT

   1 Si wafer with nominal 250Å thermal oxide\r
   2 eV\r
   3 1.500000        70.000000       12.095001       127.777084      0.013940        0.142811\r
   4 1.550000        70.000000       12.420878       126.883995      0.012507        0.151809\r
   5 1.600000        70.000000       12.737990       126.079453      0.018004        0.137874\r
   6 1.650000        70.000000       13.049063       125.289764      0.016257        0.135923\r
   7 1.700000        70.000000       13.368964       124.542358      0.016411        0.143183\r
   8 1.750000        70.000000       13.711089       123.853539      0.016436        0.136899\r
   9 1.800000        70.000000       14.032390       123.183426      0.015754        0.131855\r
  10 1.850000        70.000000       14.377975       122.547699      0.015512        0.132608\r
  11 1.900000        70.000000       14.725460       121.854996      0.015770        0.128991\r
  12 1.950000        70.000000       15.083792       121.320648      0.016797        0.128677\r
  13 2.000000        70.000000       15.450092       120.763794      0.017680        0.118126\r
  14 2.050000        70.000000       15.820785       120.140327      0.017417        0.135290\r
  15 2.100000        70.000000       16.205252       119.654495      0.017588        0.127129\r
  16 2.150000        70.000000       16.597717       119.172302      0.018463        0.120097\r
  17 2.200000        70.000000       16.988247       118.706062      0.018845        0.121440\r
  18 2.250000        70.000000       17.403227       118.240837      0.019016        0.122889\r
  19 2.300000        70.000000       17.810740       117.827988      0.019218        0.120730\r
  20 2.350000        70.000000       18.247223       117.414536      0.019119        0.120064\r
  21 2.400000        70.000000       18.687630       117.028526      0.019354        0.118642\r
  22 2.450000        70.000000       19.155418       116.702950      0.020925        0.114050\r
  23 2.500000        70.000000       19.613722       116.270287      0.020744        0.118911\r
  24 2.550000        70.000000       20.091167       115.951012      0.021522        0.110325\r
  25 2.600000        70.000000       20.580477       115.609535      0.021668        0.118919\r
  26 2.650000        70.000000       21.088753       115.258385      0.022099        0.115850\r
  27 2.700000        70.000000       21.628654       115.009048      0.023321        0.112862\r
  28 2.750000        70.000000       22.157904       114.669952      0.022932        0.109701\r
  29 2.800000        70.000000       22.746235       114.348083      0.023619        0.116362\r
  30 2.850000        70.000000       23.355604       114.063431      0.023447        0.113669\r
  31 2.900000        70.000000       23.985088       113.779678      0.024240        0.115555\r
  32 2.950000        70.000000       24.638615       113.508240      0.024601        0.114897\r
  33 3.000000        70.000000       25.370333       113.244087      0.025400        0.108337\r
  34 3.050000        70.000000       26.145943       112.930046      0.026664        0.117502\r
  35 3.100000        70.000000       26.958372       112.590538      0.026443        0.113219\r
  36 3.150000        70.000000       27.844379       112.223335      0.027493        0.113959\r
  37 3.200000        70.000000       28.916122       111.782501      0.028876        0.109800\r
  38 3.250000        70.000000       30.134838       110.946838      0.029418        0.113457\r
  39 3.300000        70.000000       31.475746       109.467316      0.028915        0.115544\r
  40 3.350000        70.000000       32.729408       107.082611      0.028947        0.105800\r
  41 3.400000        70.000000       33.567860       103.795700      0.029811        0.101921\r
  42 3.450000        70.000000       33.773869       100.883705      0.029538        0.098031\r
  43 3.500000        70.000000       33.710110       98.964615       0.029806        0.093132\r
  44 3.550000        70.000000       33.698048       97.632683       0.028993        0.094361\r
  45 3.600000        70.000000       33.812428       96.684235       0.029138        0.093510\r
  46 3.650000        70.000000       33.987480       95.864899       0.029339        0.092707\r
  47 3.700000        70.000000       34.202885       95.118690       0.027103        0.091052\r
  48 3.750000        70.000000       34.457256       94.457901       0.028913        0.091926\r
  49 3.800000        70.000000       34.755276       93.837143       0.029802        0.092652\r
  50 3.850000        70.000000       35.040836       93.256607       0.028997        0.090684\r
  51 3.900000        70.000000       35.345318       92.798805       0.028880        0.091782\r
  52 3.950000        70.000000       35.676811       92.406853       0.029889        0.085430\r
  53 4.000000        70.000000       36.083511       92.072762       0.030216        0.087867\r
  54 4.050000        70.000000       36.611893       91.609222       0.029596        0.089697\r
  55 4.100000        70.000000       37.140026       91.317154       0.028524        0.084643\r
  56 4.150000        70.000000       37.720131       90.972198       0.028691        0.085463\r
  57 4.200000        70.000000       38.450356       90.609962       0.030006        0.083447\r
  58 4.250000        70.000000       39.238373       89.827560       0.029276        0.087228\r
  59 4.300000        70.000000       39.991287       88.616997       0.028437        0.084818\r
  60 4.350000        70.000000       40.523865       87.243607       0.029313        0.090920\r
  61 4.400000        70.000000       40.927803       86.024353       0.029723        0.085790\r
  62 4.450000        70.000000       41.248905       84.954819       0.028609        0.082958\r
  63 4.500000        70.000000       41.584240       83.800186       0.031414        0.078350\r
  64 4.550000        70.000000       41.858627       82.784744       0.030187        0.085468\r
  65 4.600000        70.000000       42.071377       81.725601       0.031719        0.086619\r
  66 4.650000        70.000000       42.193035       80.902351       0.033143        0.085626\r
  67 4.700000        70.000000       42.324318       80.153206       0.028607        0.079456\r
  68 4.750000        70.000000       42.479034       79.485924       0.031417        0.088770\r
  69 4.800000        70.000000       42.561581       79.007874       0.035585        0.088584\r
  70 4.850000        70.000000       42.685093       78.617523       0.030791        0.077672\r
  71 4.900000        70.000000       42.824398       78.230850       0.031706        0.080348\r
  72 4.950000        70.000000       42.950680       77.930542       0.040553        0.105209\r
  73 5.000000        70.000000       43.144310       77.791374       0.046147        0.115239\r
  74 5.050000        70.000000       43.247608       77.837303       0.048711        0.106857\r
  75 5.100000        70.000000       43.324070       77.722618       0.058942        0.103400\r
  76 5.150000        70.000000       43.495140       77.447998       0.067751        0.123673\r
  77 5.200000        70.000000       43.497429       77.560806       0.112642        0.221862\r
  78 1.500000        75.000000       10.050196       76.848747       0.010312        0.081665\r
  79 1.550000        75.000000       10.410665       77.351532       0.012291        0.087069\r
  80 1.600000        75.000000       10.780742       77.922791       0.013535        0.104438\r
  81 1.650000        75.000000       11.123212       78.529068       0.012494        0.087612\r
  82 1.700000        75.000000       11.490732       78.986572       0.012998        0.080578\r
  83 1.750000        75.000000       11.857210       79.543663       0.012812        0.088524\r
  84 1.800000        75.000000       12.219193       80.002106       0.011980        0.081667\r
  85 1.850000        75.000000       12.603370       80.459351       0.011619        0.081295\r
  86 1.900000        75.000000       12.993450       80.907219       0.013313        0.083498\r
  87 1.950000        75.000000       13.386780       81.307281       0.013496        0.087798\r
  88 2.000000        75.000000       13.779125       81.766075       0.014004        0.081520\r
  89 2.050000        75.000000       14.176918       82.150459       0.014133        0.083065\r
  90 2.100000        75.000000       14.595049       82.565674       0.014491        0.080852\r
  91 2.150000        75.000000       15.011123       82.959473       0.014743        0.081567\r
  92 2.200000        75.000000       15.432656       83.327751       0.014604        0.080412\r
  93 2.250000        75.000000       15.867311       83.699493       0.016066        0.083830\r
  94 2.300000        75.000000       16.301853       84.063942       0.015762        0.085009\r
  95 2.350000        75.000000       16.761160       84.427681       0.016255        0.083822\r
  96 2.400000        75.000000       17.221317       84.746643       0.015570        0.081397\r
  97 2.450000        75.000000       17.710827       85.109741       0.017422        0.083965\r
  98 2.500000        75.000000       18.202375       85.442322       0.018101        0.084992\r
  99 2.550000        75.000000       18.712494       85.775955       0.017706        0.082985\r
 100 2.600000        75.000000       19.223085       86.102219       0.018234        0.082383\r
 101 2.650000        75.000000       19.754208       86.405861       0.019534        0.085116\r
 102 2.700000        75.000000       20.307085       86.750732       0.020003        0.080046\r
 103 2.750000        75.000000       20.880016       87.001457       0.019874        0.087612\r
 104 2.800000        75.000000       21.494646       87.354614       0.020411        0.084449\r
 105 2.850000        75.000000       22.129099       87.700737       0.021515        0.083761\r
 106 2.900000        75.000000       22.786951       87.947098       0.021260        0.087840\r
 107 2.950000        75.000000       23.486368       88.287354       0.023157        0.082418\r
 108 3.000000        75.000000       24.262178       88.513885       0.022216        0.086588\r
 109 3.050000        75.000000       25.066954       88.784233       0.023358        0.087400\r
 110 3.100000        75.000000       25.945196       89.035034       0.023716        0.088487\r
 111 3.150000        75.000000       26.885242       89.174599       0.023084        0.085074\r
 112 3.200000        75.000000       28.030035       89.299217       0.025418        0.082844\r
 113 3.250000        75.000000       29.362194       88.988373       0.025971        0.095544\r
 114 3.300000        75.000000       30.884398       88.148834       0.026356        0.086995\r
 115 3.350000        75.000000       32.367455       86.070702       0.026830        0.084670\r
 116 3.400000        75.000000       33.425804       83.040207       0.027503        0.084516\r
 117 3.450000        75.000000       33.814247       80.161858       0.026850        0.082013\r
 118 3.500000        75.000000       33.887066       78.230247       0.027644        0.083710\r
 119 3.550000        75.000000       33.953568       76.985237       0.027231        0.081267\r
 120 3.600000        75.000000       34.108112       76.095085       0.027030        0.080693\r
 121 3.650000        75.000000       34.322613       75.380180       0.026563        0.075788\r
 122 3.700000        75.000000       34.591473       74.711845       0.026901        0.079007\r
 123 3.750000        75.000000       34.872372       74.135277       0.026652        0.080238\r
 124 3.800000        75.000000       35.169731       73.562698       0.026604        0.078083\r
 125 3.850000        75.000000       35.497383       73.166039       0.027522        0.078351\r
 126 3.900000        75.000000       35.815891       72.745522       0.026596        0.079914\r
 127 3.950000        75.000000       36.163002       72.432388       0.025711        0.079757\r
 128 4.000000        75.000000       36.549446       72.173500       0.026320        0.079260\r
 129 4.050000        75.000000       37.109337       71.887512       0.026766        0.080757\r
 130 4.100000        75.000000       37.602028       71.689827       0.027667        0.078752\r
 131 4.150000        75.000000       38.189781       71.462448       0.026183        0.077294\r
 132 4.200000        75.000000       38.883667       71.148224       0.027356        0.084809\r
 133 4.250000        75.000000       39.655815       70.571388       0.026340        0.077397\r
 134 4.300000        75.000000       40.397194       69.476631       0.026495        0.080058\r
 135 4.350000        75.000000       40.908173       68.256607       0.026986        0.076095\r
 136 4.400000        75.000000       41.288666       67.155052       0.026709        0.078994\r
 137 4.450000        75.000000       41.623287       66.180573       0.027037        0.082069\r
 138 4.500000        75.000000       41.937275       65.188293       0.026036        0.081363\r
 139 4.550000        75.000000       42.187439       64.192818       0.026143        0.078035\r
 140 4.600000        75.000000       42.390789       63.292850       0.029096        0.079530\r
 141 4.650000        75.000000       42.534477       62.570614       0.029058        0.077186\r
 142 4.700000        75.000000       42.663738       61.875488       0.027849        0.086961\r
 143 4.750000        75.000000       42.791988       61.340744       0.029237        0.082208\r
 144 4.800000        75.000000       42.882645       60.819042       0.032513        0.080196\r
 145 4.850000        75.000000       42.967915       60.465046       0.031121        0.090360\r
 146 4.900000        75.000000       43.123260       60.162842       0.031787        0.085880\r
 147 4.950000        75.000000       43.263069       59.912182       0.033502        0.090817\r
 148 5.000000        75.000000       43.375771       59.808609       0.040126        0.089216\r
 149 5.050000        75.000000       43.491974       59.762684       0.046110        0.108265\r
 150 5.100000        75.000000       43.517593       59.574188       0.053742        0.155383\r
 151 5.150000        75.000000       43.584476       59.472687       0.053313        0.196757\r
 152 5.200000        75.000000       43.719807       59.996944       0.120400        0.207081\r
 153 1.500000        80.000000       17.070427       31.814280       0.012592        0.115161\r
 154 1.550000        80.000000       17.238710       32.735573       0.015497        0.122499\r
 155 1.600000        80.000000       17.430677       33.690529       0.014525        0.106358\r
 156 1.650000        80.000000       17.618763       34.645004       0.014203        0.106022\r
 157 1.700000        80.000000       17.806488       35.606922       0.014164        0.105668\r
 158 1.750000        80.000000       18.013815       36.505341       0.014076        0.103994\r
 159 1.800000        80.000000       18.216871       37.361923       0.013394        0.104198\r
 160 1.850000        80.000000       18.434711       38.339207       0.014172        0.101498\r
 161 1.900000        80.000000       18.656326       39.234592       0.014421        0.101232\r
 162 1.950000        80.000000       18.886669       40.143841       0.014568        0.100311\r
 163 2.000000        80.000000       19.130402       41.016453       0.015177        0.095400\r
 164 2.050000        80.000000       19.374790       41.884956       0.015060        0.091291\r
 165 2.100000        80.000000       19.625702       42.801449       0.014692        0.086381\r
 166 2.150000        80.000000       19.891148       43.687466       0.015111        0.088472\r
 167 2.200000        80.000000       20.168154       44.476814       0.015436        0.090428\r
 168 2.250000        80.000000       20.457315       45.349888       0.015897        0.087189\r
 169 2.300000        80.000000       20.744209       46.186565       0.016300        0.088250\r
 170 2.350000        80.000000       21.055561       47.052570       0.016217        0.087989\r
 171 2.400000        80.000000       21.373249       47.888050       0.016303        0.086571\r
 172 2.450000        80.000000       21.704994       48.734493       0.016900        0.086806\r
 173 2.500000        80.000000       22.054327       49.548634       0.017178        0.084548\r
 174 2.550000        80.000000       22.414484       50.351772       0.017582        0.088862\r
 175 2.600000        80.000000       22.782463       51.175503       0.018093        0.084748\r
 176 2.650000        80.000000       23.169998       51.972080       0.018312        0.078258\r
 177 2.700000        80.000000       23.602140       52.803581       0.018069        0.081979\r
 178 2.750000        80.000000       24.028896       53.608414       0.019111        0.083902\r
 179 2.800000        80.000000       24.491909       54.431767       0.019549        0.082341\r
 180 2.850000        80.000000       24.978016       55.253231       0.019917        0.083031\r
 181 2.900000        80.000000       25.498999       56.053280       0.019983        0.081014\r
 182 2.950000        80.000000       26.048162       56.866562       0.020879        0.081931\r
 183 3.000000        80.000000       26.674210       57.690929       0.020767        0.081207\r
 184 3.050000        80.000000       27.337334       58.507328       0.021700        0.082145\r
 185 3.100000        80.000000       28.067020       59.310204       0.021787        0.082799\r
 186 3.150000        80.000000       28.866711       60.043629       0.022344        0.079618\r
 187 3.200000        80.000000       29.881796       60.770191       0.022465        0.085306\r
 188 3.250000        80.000000       31.057110       61.299862       0.022916        0.080387\r
 189 3.300000        80.000000       32.478416       61.213284       0.023756        0.079857\r
 190 3.350000        80.000000       33.958069       60.018883       0.025214        0.078287\r
 191 3.400000        80.000000       35.064709       57.740635       0.024214        0.080464\r
 192 3.450000        80.000000       35.559116       55.472878       0.024336        0.081688\r
 193 3.500000        80.000000       35.746479       53.850197       0.023122        0.090564\r
 194 3.550000        80.000000       35.883255       52.914749       0.023566        0.087229\r
 195 3.600000        80.000000       36.052494       52.266685       0.023852        0.085098\r
 196 3.650000        80.000000       36.269310       51.722301       0.023926        0.086207\r
 197 3.700000        80.000000       36.521286       51.260014       0.023325        0.084265\r
 198 3.750000        80.000000       36.783875       50.849247       0.023999        0.084168\r
 199 3.800000        80.000000       37.063206       50.485176       0.025142        0.085046\r
 200 3.850000        80.000000       37.331062       50.173264       0.024500        0.087478\r
 201 3.900000        80.000000       37.606056       49.948235       0.023349        0.087752\r
 202 3.950000        80.000000       37.899250       49.760578       0.024483        0.085069\r
 203 4.000000        80.000000       38.220146       49.648235       0.025223        0.080842\r
 204 4.050000        80.000000       38.709515       49.462837       0.023392        0.094969\r
 205 4.100000        80.000000       39.104694       49.402683       0.024900        0.084624\r
 206 4.150000        80.000000       39.598099       49.295395       0.025738        0.089800\r
 207 4.200000        80.000000       40.150906       49.148113       0.026639        0.088996\r
 208 4.250000        80.000000       40.772930       48.701305       0.024692        0.086667\r
 209 4.300000        80.000000       41.397518       47.925846       0.023882        0.087505\r
 210 4.350000        80.000000       41.832825       47.008461       0.023504        0.087357\r
 211 4.400000        80.000000       42.119808       46.144386       0.023307        0.084777\r
 212 4.450000        80.000000       42.424549       45.433052       0.026063        0.096152\r
 213 4.500000        80.000000       42.686264       44.660782       0.023698        0.090728\r
 214 4.550000        80.000000       42.888535       43.936768       0.025084        0.086842\r
 215 4.600000        80.000000       43.048473       43.238457       0.023459        0.095954\r
 216 4.650000        80.000000       43.176697       42.674118       0.024519        0.095697\r
 217 4.700000        80.000000       43.292686       42.105545       0.023772        0.104053\r
 218 4.750000        80.000000       43.366337       41.720028       0.025017        0.099566\r
 219 4.800000        80.000000       43.448849       41.344910       0.025482        0.103878\r
 220 4.850000        80.000000       43.550068       41.057392       0.026842        0.097596\r
 221 4.900000        80.000000       43.634186       40.824608       0.028637        0.119278\r
 222 4.950000        80.000000       43.732746       40.749531       0.031767        0.124854\r
 223 5.000000        80.000000       43.784321       40.444698       0.036531        0.108725\r
 224 5.050000        80.000000       43.932480       40.326374       0.049048        0.168091\r
 225 5.100000        80.000000       44.093010       40.455544       0.057845        0.153364\r
 226 5.150000        80.000000       44.114887       40.553772       0.094715        0.267655\r
 227 5.200000        80.000000       44.020786       40.131805       0.118618        0.326949