research/ellipsometry/WVASE32/EXAMPLES/THERMAL3.DAT

   1 50 nm of thermal silicon dioxide on silicon\r
   2 nm\r
   3 1000.000000     73.000000       14.8855 86.2187 0.0123516       0.0462686\r
   4 1010.000000     73.000000       14.7389 86.377  0.0120711       0.0453718\r
   5 1020.000000     73.000000       14.5976 86.4618 0.0111633       0.0416969\r
   6 1030.000000     73.000000       14.4478 86.5952 0.0111759       0.0421442\r
   7 1040.000000     73.000000       14.331  86.6998 0.0109985       0.0416287\r
   8 1050.000000     73.000000       14.1855 86.8655 0.0103404       0.0389218\r
   9 1060.000000     73.000000       14.0658 86.9947 0.0101656       0.0383824\r
  10 1070.000000     73.000000       13.9325 87.1304 0.0101234       0.0385362\r
  11 1080.000000     73.000000       13.8008 87.2525 0.00983362      0.0374338\r
  12 1090.000000     73.000000       13.6774 87.3757 0.00980145      0.0376016\r
  13 1100.000000     73.000000       13.5592 87.4973 0.00993421      0.0385333\r
  14 1110.000000     73.000000       13.4402 87.6142 0.0096974       0.03766\r
  15 1120.000000     73.000000       13.328  87.7211 0.00964514      0.0377014\r
  16 1130.000000     73.000000       13.2068 87.8645 0.00982663      0.0389318\r
  17 1140.000000     73.000000       13.0905 87.995  0.00981121      0.0391826\r
  18 1150.000000     73.000000       12.9814 88.0947 0.00979064      0.0393494\r
  19 1160.000000     73.000000       12.8731 88.2016 0.00974033      0.0394103\r
  20 1170.000000     73.000000       12.7687 88.3221 0.00943751      0.038121\r
  21 1180.000000     73.000000       12.6625 88.4448 0.00919869      0.0371008\r
  22 1190.000000     73.000000       12.559  88.5456 0.00927881      0.037848\r
  23 1200.000000     73.000000       12.4618 88.6648 0.00940428      0.0387731\r
  24 1210.000000     73.000000       12.3556 88.783  0.00956866      0.040001\r
  25 1220.000000     73.000000       12.2529 88.8907 0.00963829      0.0407234\r
  26 1230.000000     73.000000       12.1553 89.0045 0.00948471      0.0401382\r
  27 1240.000000     73.000000       12.0608 89.1127 0.00960662      0.041145\r
  28 1250.000000     73.000000       11.9635 89.2109 0.00958241      0.041289\r
  29 1260.000000     73.000000       11.8681 89.3257 0.00930341      0.0400276\r
  30 1270.000000     73.000000       11.7839 89.4325 0.00886662      0.0377565\r
  31 1280.000000     73.000000       11.6927 89.5503 0.00922145      0.0400978\r
  32 1290.000000     73.000000       11.6029 89.6558 0.00959036      0.0425619\r
  33 1300.000000     73.000000       11.5119 89.7701 0.00966801      0.0433069\r
  34 1310.000000     73.000000       11.4282 89.8503 0.00982927      0.0445616\r
  35 1320.000000     73.000000       11.3426 89.9636 0.00983002      0.0449012\r
  36 1330.000000     73.000000       11.2585 90.0817 0.00994055      0.045856\r
  37 1340.000000     73.000000       11.175  90.1763 0.00983263      0.045558\r
  38 1350.000000     73.000000       11.0978 90.2794 0.0100579       0.0471891\r
  39 1360.000000     73.000000       11.0247 90.3956 0.010117        0.0478452\r
  40 1370.000000     73.000000       10.9387 90.487  0.00887175      0.0405534\r
  41 1380.000000     73.000000       10.8645 90.5658 0.0096787       0.0458394\r
  42 1390.000000     73.000000       10.798  90.6789 0.0106582       0.0521693\r
  43 1400.000000     73.000000       10.7064 90.738  0.0106677       0.0525639\r
  44 1410.000000     73.000000       10.6429 90.8913 0.0102214       0.050115\r
  45 1420.000000     73.000000       10.5706 90.9534 0.0092475       0.0443295\r
  46 1430.000000     73.000000       10.4908 91.0358 0.00945112      0.0459371\r
  47 1440.000000     73.000000       10.4142 91.1419 0.00982642      0.0487146\r
  48 1450.000000     73.000000       10.3492 91.2352 0.0103768       0.0523996\r
  49 1460.000000     73.000000       10.2711 91.3219 0.0105831       0.0541992\r
  50 1470.000000     73.000000       10.2023 91.4558 0.0102932       0.0526869\r
  51 1480.000000     73.000000       10.1417 91.534  0.00835681      0.0400219\r
  52 1490.000000     73.000000       10.0677 91.5624 0.00915757      0.0458805\r
  53 1500.000000     73.000000       10.0104 91.7221 0.00824819      0.0398178\r
  54 1510.000000     73.000000       9.95084 91.8064 0.00846328      0.0416294\r
  55 1520.000000     73.000000       9.87418 91.9027 0.00856084      0.0427574\r
  56 1530.000000     73.000000       9.82005 91.9757 0.00868048      0.0439131\r
  57 1540.000000     73.000000       9.75983 92.0726 0.00849391      0.0429519\r
  58 1550.000000     73.000000       9.69083 92.1665 0.00799596      0.0397665\r
  59 1560.000000     73.000000       9.63136 92.2594 0.00819686      0.041569\r
  60 1570.000000     73.000000       9.57159 92.3279 0.00857445      0.044635\r
  61 1580.000000     73.000000       9.51168 92.4314 0.00877491      0.0464246\r
  62 1590.000000     73.000000       9.46193 92.4459 0.00912339      0.0491946\r
  63 1600.000000     73.000000       9.39497 92.5786 0.00912422      0.0496221\r
  64 1610.000000     73.000000       9.34378 92.6245 0.00858156      0.0460542\r
  65 1620.000000     73.000000       9.27588 92.7823 0.00880797      0.0481089\r
  66 1630.000000     73.000000       9.2208  92.7997 0.00944535      0.0530113\r
  67 1640.000000     73.000000       9.16864 92.893  0.00978465      0.0557577\r
  68 1650.000000     73.000000       9.12689 92.9548 0.00989361      0.0568094\r
  69 1660.000000     73.000000       9.06821 93.0431 0.0103078       0.0601328\r
  70 1670.000000     73.000000       8.99526 93.1203 0.0112703       0.0673908\r
  71 1680.000000     73.000000       8.93608 93.2384 0.0107674       0.0643204\r
  72 1690.000000     73.000000       8.85098 93.1726 0.0174282       0.110646\r
  73 1700.000000     73.000000       8.87895 93.6267 0.0153387       0.0962928\r
  74 1000.000000     76.000000       16.3525 62.8944 0.0132395       0.0525942\r
  75 1010.000000     76.000000       16.1898 62.8035 0.0129593       0.0518263\r
  76 1020.000000     76.000000       16.0731 62.7254 0.012347        0.0494675\r
  77 1030.000000     76.000000       15.9351 62.6279 0.0123259       0.0497622\r
  78 1040.000000     76.000000       15.8079 62.5585 0.0121284       0.0492514\r
  79 1050.000000     76.000000       15.673  62.4637 0.0116957       0.0476906\r
  80 1060.000000     76.000000       15.5477 62.3887 0.0115659       0.0474444\r
  81 1070.000000     76.000000       15.4214 62.3233 0.0115272       0.0476272\r
  82 1080.000000     76.000000       15.2893 62.2416 0.0113048       0.0469522\r
  83 1090.000000     76.000000       15.1721 62.1568 0.0112578       0.0471052\r
  84 1100.000000     76.000000       15.0537 62.0812 0.0113115       0.0477156\r
  85 1110.000000     76.000000       14.9276 62.0098 0.0111354       0.0472252\r
  86 1120.000000     76.000000       14.8245 61.9367 0.0110924       0.0473485\r
  87 1130.000000     76.000000       14.7037 61.8507 0.0111774       0.0481455\r
  88 1140.000000     76.000000       14.5948 61.7619 0.0111494       0.0483596\r
  89 1150.000000     76.000000       14.4847 61.6945 0.011104        0.0485043\r
  90 1160.000000     76.000000       14.3777 61.6014 0.0110352       0.0485103\r
  91 1170.000000     76.000000       14.282  61.5119 0.010847        0.0478779\r
  92 1180.000000     76.000000       14.1742 61.4382 0.0106791       0.0473457\r
  93 1190.000000     76.000000       14.0737 61.3506 0.0106898       0.0477592\r
  94 1200.000000     76.000000       13.9719 61.2475 0.0107684       0.04855\r
  95 1210.000000     76.000000       13.8726 61.1702 0.010846        0.049278\r
  96 1220.000000     76.000000       13.7704 61.0945 0.0108513       0.0496875\r
  97 1230.000000     76.000000       13.6732 60.9988 0.0107626       0.0495462\r
  98 1240.000000     76.000000       13.5761 60.9038 0.0107982       0.0501199\r
  99 1250.000000     76.000000       13.481  60.8242 0.0107634       0.0502897\r
 100 1260.000000     76.000000       13.3931 60.7494 0.0105764       0.0495989\r
 101 1270.000000     76.000000       13.3053 60.6462 0.0103027       0.048406\r
 102 1280.000000     76.000000       13.2214 60.5301 0.0104745       0.0497214\r
 103 1290.000000     76.000000       13.1274 60.4603 0.0106942       0.0512964\r
 104 1300.000000     76.000000       13.0409 60.3489 0.0107152       0.0517996\r
 105 1310.000000     76.000000       12.9581 60.2633 0.0108197       0.0527207\r
 106 1320.000000     76.000000       12.8734 60.1815 0.0108054       0.0529963\r
 107 1330.000000     76.000000       12.7979 60.0872 0.0108269       0.0534684\r
 108 1340.000000     76.000000       12.7127 60.0127 0.0107435       0.0533738\r
 109 1350.000000     76.000000       12.6369 59.8864 0.0108937       0.0545699\r
 110 1360.000000     76.000000       12.5523 59.7904 0.0108895       0.0549511\r
 111 1370.000000     76.000000       12.4779 59.712  0.0101075       0.0506359\r
 112 1380.000000     76.000000       12.4109 59.5901 0.0105893       0.0538383\r
 113 1390.000000     76.000000       12.3432 59.4963 0.011184        0.0578063\r
 114 1400.000000     76.000000       12.2529 59.4189 0.0112051       0.0583129\r
 115 1410.000000     76.000000       12.1944 59.3113 0.0108797       0.0566589\r
 116 1420.000000     76.000000       12.1127 59.2192 0.0102604       0.0532195\r
 117 1430.000000     76.000000       12.0498 59.0998 0.0103812       0.0542686\r
 118 1440.000000     76.000000       11.973  59.0023 0.0105893       0.0560047\r
 119 1450.000000     76.000000       11.9146 58.8732 0.0109023       0.0583075\r
 120 1460.000000     76.000000       11.8446 58.7826 0.0110709       0.0597173\r
 121 1470.000000     76.000000       11.7714 58.7052 0.0108361       0.0586132\r
 122 1480.000000     76.000000       11.7083 58.5999 0.00962418      0.0511176\r
 123 1490.000000     76.000000       11.6495 58.5069 0.0101575       0.0549284\r
 124 1500.000000     76.000000       11.5876 58.4268 0.0109148       0.0602034\r
 125 1510.000000     76.000000       11.5172 58.2578 0.0116161       0.0651608\r
 126 1520.000000     76.000000       11.4644 58.1899 0.012082        0.068473\r
 127 1530.000000     76.000000       11.3857 58.0908 0.0124732       0.0715086\r
 128 1540.000000     76.000000       11.3459 57.932  0.0122186       0.0702557\r
 129 1550.000000     76.000000       11.2732 57.8626 0.0106478       0.0603217\r
 130 1560.000000     76.000000       11.2206 57.7673 0.011605        0.067035\r
 131 1570.000000     76.000000       11.1775 57.685  0.0128583       0.075589\r
 132 1580.000000     76.000000       11.1063 57.5611 0.0098953       0.0561994\r
 133 1590.000000     76.000000       11.0382 57.5034 0.0100267       0.0575023\r
 134 1600.000000     76.000000       10.9895 57.3399 0.0100636       0.0580876\r
 135 1610.000000     76.000000       10.9361 57.2826 0.00978729      0.0563841\r
 136 1620.000000     76.000000       10.8841 57.1426 0.00995286      0.0579055\r
 137 1630.000000     76.000000       10.8279 57.0313 0.010269        0.0605332\r
 138 1640.000000     76.000000       10.7761 56.882  0.0106017       0.0633208\r
 139 1650.000000     76.000000       10.7208 56.8177 0.0107212       0.0644501\r
 140 1660.000000     76.000000       10.666  56.6771 0.0110333       0.0671007\r
 141 1670.000000     76.000000       10.6034 56.5529 0.0117797       0.0728148\r
 142 1680.000000     76.000000       10.5513 56.5161 0.0113924       0.0705597\r
 143 1690.000000     76.000000       10.4961 56.3145 0.0169419       0.110184\r
 144 1700.000000     76.000000       10.4924 55.8018 0.01505 0.0975049\r
 145 225.454541      73.000000       46.6135 98.0025 0.971693        1.96538\r
 146 226.484009      73.000000       44.9481 106.049 0.809405        1.67985\r
 147 227.522925      73.000000       47.8318 100.158 0.71983 1.46812\r
 148 228.571436      73.000000       45.0227 104.63  0.58619 1.20727\r
 149 229.629639      73.000000       46.6391 100.483 0.485704        0.985703\r
 150 230.697681      73.000000       46.4237 102.167 0.421629        0.859165\r
 151 231.775708      73.000000       46.4496 101.612 0.387515        0.791098\r
 152 232.863843      73.000000       48.7341 103.025 0.332454        0.687974\r
 153 233.962256      73.000000       47.3711 106.217 0.290576        0.607145\r
 154 235.071094      73.000000       48.9453 106.414 0.257927        0.542532\r
 155 236.190479      73.000000       49.1248 105.059 0.228699        0.477422\r
 156 237.320581      73.000000       49.4855 107.332 0.202955        0.43044\r
 157 238.461548      73.000000       50.0233 108.637 0.180903        0.387733\r
 158 239.613525      73.000000       50.1328 110.055 0.167558        0.362448\r
 159 240.776709      73.000000       50.8491 111.107 0.152056        0.332834\r
 160 241.951221      73.000000       51.2149 111.984 0.13932 0.307644\r
 161 243.137256      73.000000       51.7172 114.128 0.133754        0.301005\r
 162 244.334985      73.000000       52.386  115.173 0.11291 0.25793\r
 163 245.544556      73.000000       53.0571 117.253 0.111166        0.260152\r
 164 246.766162      73.000000       53.3684 119.609 0.100478        0.241274\r
 165 248.000000      73.000000       54.046  122.201 0.0912169       0.22664\r
 166 249.246240      73.000000       54.7279 125.084 0.0927192       0.240192\r
 167 250.505054      73.000000       55.3028 127.771 0.0907457       0.245084\r
 168 251.776660      73.000000       55.7156 130.049 0.0809912       0.22718\r
 169 253.061230      73.000000       56.6382 132.548 0.071089        0.2099\r
 170 254.358984      73.000000       57.0255 136.535 0.0661971       0.210541\r
 171 255.670093      73.000000       57.4616 141.467 0.0656431       0.232113\r
 172 256.994824      73.000000       57.97   144.299 0.0628928       0.239415\r
 173 258.333325      73.000000       58.4893 148.7   0.0631738       0.272557\r
 174 259.685864      73.000000       58.7272 152.603 0.057161        0.279546\r
 175 261.052637      73.000000       59.4037 156.907 0.0527103       0.306175\r
 176 262.433862      73.000000       59.6291 161.386 0.0544439       0.39035\r
 177 263.829785      73.000000       59.7373 167.889 0.0508598       0.555768\r
 178 265.240649      73.000000       59.7867 171.382 0.0495838       0.759291\r
 179 266.666675      73.000000       59.9053 180     0.045793        90\r
 180 268.108105      73.000000       59.7566 177.284 0.0440921       2.13261\r
 181 269.565210      73.000000       59.4871 170.008 0.0387457       0.508684\r
 182 271.038257      73.000000       59.3497 163.072 0.037517        0.292709\r
 183 272.527466      73.000000       59.1694 156.867 0.0357088       0.205719\r
 184 274.033154      73.000000       58.8763 151.349 0.0336837       0.158079\r
 185 275.555566      73.000000       58.6314 145.77  0.0310247       0.123485\r
 186 277.094971      73.000000       58.2133 140.325 0.029663        0.103235\r
 187 278.651685      73.000000       57.8243 134.99  0.0278119       0.0867615\r
 188 280.225977      73.000000       57.3831 130.637 0.0580018       0.168143\r
 189 281.818188      73.000000       56.9142 126.146 0.0519078       0.140325\r
 190 283.428564      73.000000       56.4935 122.041 0.0454441       0.116255\r
 191 285.057471      73.000000       56.0103 118.106 0.0450439       0.109969\r
 192 286.705200      73.000000       55.3966 114.057 0.0410111       0.0958809\r
 193 288.372095      73.000000       54.9311 110.537 0.0365004       0.082673\r
 194 290.058472      73.000000       54.5443 107.01  0.0335688       0.0740747\r
 195 291.764697      73.000000       54.2294 103.833 0.0307846       0.0666182\r
 196 293.491113      73.000000       53.8889 100.975 0.0292323       0.0623065\r
 197 295.238086      73.000000       53.6116 98.5927 0.0252961       0.053304\r
 198 297.005981      73.000000       53.2896 96.3755 0.0245922       0.0513696\r
 199 298.795190      73.000000       52.9871 94.4888 0.0225588       0.0467859\r
 200 300.606055      73.000000       52.6535 92.6971 0.0215573       0.0444505\r
 201 302.439014      73.000000       52.2933 91.1641 0.0215878       0.0443257\r
 202 304.294482      73.000000       51.9548 89.7154 0.0203393       0.0415938\r
 203 306.172852      73.000000       51.5639 88.3823 0.0204453       0.0416925\r
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 398 837.837793      76.000000       19.1029 63.7411 0.0119335       0.0420238\r
 399 861.111133      76.000000       18.6462 63.6992 0.0116519       0.0418434\r
 400 885.714258      76.000000       18.1821 63.591  0.0110277       0.0403904\r
 401 911.764746      76.000000       17.7043 63.4568 0.0108704       0.040764\r
 402 939.393945      76.000000       17.2461 63.3087 0.0106613       0.0409033\r
 403 968.750000      76.000000       16.773  63.1556 0.0104121       0.0409419\r
 404 1000.000000     76.000000       16.3003 62.9884 0.0101361       0.0408665