research/ellipsometry/WVASE32/EXAMPLES/THERMAL4.DAT

   1 100 nm thermal silicon dioxide on silicon\r
   2 nm\r
   3 225.454541      73.000000       39.8079 76.7581 1.3775  2.78255\r
   4 226.484009      73.000000       38.2511 84.1472 0.973454        1.94601\r
   5 227.522925      73.000000       34.598  84.584  1.12276 2.25003\r
   6 228.571436      73.000000       36.2399 92.6077 0.728938        1.52476\r
   7 229.629639      73.000000       36.7239 84.5473 0.616023        1.2909\r
   8 230.697681      73.000000       35.06   87.8377 0.487655        1.03661\r
   9 231.775708      73.000000       33.7284 94.4641 0.47376 1.02751\r
  10 232.863843      73.000000       34.2855 92.8176 0.401501        0.847551\r
  11 233.962256      73.000000       34.4297 96.4487 0.351119        0.757436\r
  12 235.071094      73.000000       33.8807 97.5447 0.319768        0.69683\r
  13 236.190479      73.000000       33.9307 98.0142 0.282034        0.6149\r
  14 237.320581      73.000000       34.5344 102.277 0.266856        0.58019\r
  15 238.461548      73.000000       33.2108 102.963 0.22228 0.497509\r
  16 239.613525      73.000000       32.6337 103.457 0.211542        0.476861\r
  17 240.776709      73.000000       32.8972 107.698 0.189563        0.435462\r
  18 241.951221      73.000000       32.2403 110.403 0.165878        0.391846\r
  19 243.137256      73.000000       32.4304 112.033 0.15848 0.377605\r
  20 244.334985      73.000000       31.6306 114.633 0.136828        0.336935\r
  21 245.544556      73.000000       31.7541 117.083 0.129201        0.324152\r
  22 246.766162      73.000000       31.7028 119.697 0.117505        0.302468\r
  23 248.000000      73.000000       31.2852 121.601 0.107455        0.284192\r
  24 249.246240      73.000000       31.4375 126.454 0.110678        0.309091\r
  25 250.505054      73.000000       31.3338 129.672 0.102729        0.300297\r
  26 251.776660      73.000000       31.1749 133.323 0.0943207       0.292595\r
  27 253.061230      73.000000       30.6301 137.019 0.0821021       0.274489\r
  28 254.358984      73.000000       31.078  139.439 0.0724529       0.251792\r
  29 255.670093      73.000000       30.9689 143.919 0.0747469       0.287404\r
  30 256.994824      73.000000       30.9857 146.993 0.0697271       0.289734\r
  31 258.333325      73.000000       31.0562 151.498 0.068497        0.324465\r
  32 259.685864      73.000000       31.1941 155.342 0.060941        0.329238\r
  33 261.052637      73.000000       30.9926 160.426 0.0559081       0.377422\r
  34 262.433862      73.000000       31.0577 164.748 0.0586946       0.504092\r
  35 263.829785      73.000000       31.3404 167.915 0.0536846       0.576146\r
  36 265.240649      73.000000       31.3804 172.793 0.0512119       0.916394\r
  37 266.666675      73.000000       31.5979 176.637 0.0474647       1.80851\r
  38 268.108105      73.000000       31.8339 173.65  0.0458296       0.922301\r
  39 269.565210      73.000000       31.9336 171.145 0.0401272       0.578723\r
  40 271.038257      73.000000       32.299  167.551 0.0391222       0.400389\r
  41 272.527466      73.000000       32.4121 162.959 0.0372982       0.280192\r
  42 274.033154      73.000000       32.6583 157.863 0.0357206       0.207804\r
  43 275.555566      73.000000       32.8063 153.819 0.0336348       0.166647\r
  44 277.094971      73.000000       32.9946 149.09  0.0319067       0.135331\r
  45 278.651685      73.000000       33.0496 144.556 0.029841        0.111971\r
  46 280.225977      73.000000       33.2115 140.877 0.0280616       0.096478\r
  47 281.818188      73.000000       33.2559 137.127 0.0586929       0.187866\r
  48 283.428564      73.000000       33.4351 133.072 0.0510258       0.151664\r
  49 285.057471      73.000000       33.5257 129.54  0.0517616       0.145555\r
  50 286.705200      73.000000       33.6947 125.669 0.0474319       0.126269\r
  51 288.372095      73.000000       33.743  122.178 0.0421427       0.107565\r
  52 290.058472      73.000000       33.7574 118.701 0.0386059       0.0950338\r
  53 291.764697      73.000000       33.6099 115.59  0.0350255       0.0839955\r
  54 293.491113      73.000000       33.5289 112.789 0.03382 0.0794276\r
  55 295.238086      73.000000       33.4895 110.164 0.0287392       0.0662554\r
  56 297.005981      73.000000       33.4213 107.934 0.0278709       0.0634493\r
  57 298.795190      73.000000       33.3825 105.993 0.0250815       0.0564917\r
  58 300.606055      73.000000       33.4546 104.028 0.0234674       0.0522806\r
  59 302.439014      73.000000       33.5268 102.339 0.0233781       0.0516688\r
  60 304.294482      73.000000       33.6257 100.702 0.0218138       0.0478226\r
  61 306.172852      73.000000       33.8103 99.2041 0.0219838       0.0478531\r
  62 308.074536      73.000000       33.9632 97.8276 0.0209444       0.0452998\r
  63 310.000000      73.000000       34.1483 96.4766 0.0203161       0.0436793\r
  64 311.949683      73.000000       34.4092 95.2312 0.0197477       0.0421932\r
  65 313.924048      73.000000       34.6231 94.0741 0.0191368       0.040684\r
  66 315.923560      73.000000       34.8729 92.9702 0.0188658       0.0399206\r
  67 317.948706      73.000000       35.1596 91.9163 0.0182448       0.0384132\r
  68 320.000000      73.000000       35.4287 90.9817 0.0183737       0.0385463\r
  69 322.077930      73.000000       35.7198 90.0678 0.0180838       0.0377899\r
  70 324.183008      73.000000       36.0592 89.1853 0.0178807       0.0372152\r
  71 326.315796      73.000000       36.3627 88.4307 0.0177408       0.0368047\r
  72 328.476831      73.000000       36.7359 87.682  0.017578        0.0363317\r
  73 330.666675      73.000000       37.1185 87.0333 0.0246202       0.0509699\r
  74 332.885913      73.000000       37.4679 86.4377 0.0243211       0.0502046\r
  75 335.135132      73.000000       37.8395 85.8446 0.0239554       0.0493073\r
  76 337.414966      73.000000       38.1932 85.4331 0.0236039       0.048454\r
  77 339.726025      73.000000       38.5862 85.0031 0.0221845       0.045388\r
  78 342.068970      73.000000       38.9435 84.6219 0.0224917       0.0459255\r
  79 344.444434      73.000000       39.4185 84.4293 0.0227195       0.0462526\r
  80 346.853149      73.000000       39.8576 84.2323 0.0224204       0.0455191\r
  81 349.295776      73.000000       40.341  84.1722 0.0221364       0.0448094\r
  82 351.773047      73.000000       40.8197 84.1487 0.0215107       0.0434152\r
  83 354.285718      73.000000       41.3614 84.2178 0.0217074       0.0436985\r
  84 356.834521      73.000000       41.9336 84.4235 0.0214581       0.0430736\r
  85 359.420288      73.000000       42.5653 84.6849 0.0222781       0.0446275\r
  86 362.043799      73.000000       43.2819 85.0334 0.0226623       0.0452999\r
  87 364.705884      73.000000       44.0185 85.4605 0.0224817       0.0448522\r
  88 367.407397      73.000000       44.9245 85.9134 0.0176547       0.0350446\r
  89 372.932324      73.000000       46.8216 86.9578 0.0175596       0.0348834\r
  90 378.625952      73.000000       48.9517 87.9975 0.0172308       0.0344484\r
  91 384.496118      73.000000       51.3095 89.1612 0.0169675       0.0344031\r
  92 390.551172      73.000000       53.9732 90.5887 0.016688        0.0346926\r
  93 396.800000      73.000000       56.9428 92.2965 0.0161672       0.0349685\r
  94 403.252026      73.000000       60.2681 94.3233 0.0154746       0.0355657\r
  95 409.917334      73.000000       63.9671 96.7146 0.0147406       0.0370913\r
  96 416.806738      73.000000       67.9621 99.5299 0.0142077       0.0407755\r
  97 423.931641      73.000000       72.2934 103.139 0.0142948       0.0498751\r
  98 431.304346      73.000000       76.9186 108.237 0.00981134      0.0452972\r
  99 438.938037      73.000000       81.6486 117.362 0.009245        0.0696023\r
 100 446.846826      73.000000       85.615  137.886 0.0121558       0.210604\r
 101 455.045850      73.000000       85.3401 120.456 0.0108385       0.128091\r
 102 463.551416      73.000000       81.3214 97.5698 0.00798639      0.0514535\r
 103 472.380957      73.000000       76.8928 89.0275 0.00898544      0.0390925\r
 104 481.553418      73.000000       72.5313 84.1843 0.0140584       0.0485719\r
 105 491.089111      73.000000       68.4413 80.8336 0.0148305       0.0433289\r
 106 501.010107      73.000000       64.6723 78.3112 0.0151001       0.0393205\r
 107 511.340186      73.000000       61.2392 76.264  0.0159535       0.038442\r
 108 522.105273      73.000000       58.1698 74.5518 0.0169764       0.0388572\r
 109 533.333350      73.000000       55.4037 73.1407 0.0179266       0.0396619\r
 110 545.054932      73.000000       52.8718 71.8665 0.0180388       0.0390335\r
 111 557.303369      73.000000       50.5772 70.7878 0.0183485       0.0392069\r
 112 570.114941      73.000000       48.5168 69.8689 0.0186456       0.0396209\r
 113 583.529395      73.000000       46.6406 69.1243 0.0190834       0.0405236\r
 114 597.590381      73.000000       44.9317 68.4794 0.0193992       0.0413171\r
 115 612.345703      73.000000       43.3377 67.9624 0.0197625       0.0423267\r
 116 627.848096      73.000000       41.8605 67.5875 0.0199112       0.04295\r
 117 644.155859      73.000000       40.5297 67.2872 0.0209348       0.0455767\r
 118 661.333350      73.000000       39.2496 67.0676 0.0205961       0.0452628\r
 119 679.452051      73.000000       38.0535 66.967  0.0201752       0.0447744\r
 120 698.591553      73.000000       36.927  66.9395 0.0207704       0.0466183\r
 121 718.840576      73.000000       35.8501 66.9498 0.0209791       0.0476441\r
 122 740.298486      73.000000       34.8215 67.0877 0.0241552       0.0556066\r
 123 763.076904      73.000000       33.7999 67.294  0.0235169       0.0547995\r
 124 787.301611      73.000000       32.843  67.5794 0.0197961       0.0465832\r
 125 813.114746      73.000000       31.8531 67.9302 0.019189        0.0457599\r
 126 837.837793      73.000000       30.9863 68.2408 0.0160487       0.0386286\r
 127 861.111133      73.000000       30.2384 68.605  0.0158311       0.0385475\r
 128 885.714258      73.000000       29.495  68.9905 0.0153326       0.037774\r
 129 911.764746      73.000000       28.7521 69.4187 0.0151033       0.0376895\r
 130 939.393945      73.000000       28.0173 69.8671 0.014829        0.0375063\r
 131 968.750000      73.000000       27.2736 70.3591 0.0145404       0.0373063\r
 132 1000.000000     73.000000       26.5071 70.89   0.0142371       0.0371076\r
 133 225.454541      76.000000       38.7102 68.4553 1.22497 2.61783\r
 134 226.484009      76.000000       34.4537 68.8178 0.990627        2.25469\r
 135 227.522925      76.000000       39.3612 71.4309 1.42296 2.67014\r
 136 228.571436      76.000000       36.1694 70.5626 0.74375 1.64591\r
 137 229.629639      76.000000       38.7945 79.133  0.700294        1.41375\r
 138 230.697681      76.000000       35.8383 82.0521 0.497332        1.05603\r
 139 231.775708      76.000000       33.9294 82.7445 0.453262        0.983623\r
 140 232.863843      76.000000       33.8223 82.511  0.401877        0.875451\r
 141 233.962256      76.000000       33.028  86.5264 0.342221        0.750131\r
 142 235.071094      76.000000       32.1411 86.0176 0.307887        0.68069\r
 143 236.190479      76.000000       32.7451 87.8661 0.280392        0.616719\r
 144 237.320581      76.000000       31.5999 88.8852 0.240413        0.536616\r
 145 238.461548      76.000000       30.2427 93.5242 0.220717        0.508188\r
 146 239.613525      76.000000       31.8108 95.7226 0.198665        0.443807\r
 147 240.776709      76.000000       31.7358 96.3037 0.186438        0.418834\r
 148 241.951221      76.000000       31.5313 99.8094 0.177595        0.40314\r
 149 243.137256      76.000000       30.2738 103.276 0.155897        0.366996\r
 150 244.334985      76.000000       29.9631 105.872 0.140686        0.337869\r
 151 245.544556      76.000000       29.8367 109.276 0.132592        0.325333\r
 152 246.766162      76.000000       29.9434 111.83  0.123989        0.308562\r
 153 248.000000      76.000000       29.2913 115.769 0.113974        0.296491\r
 154 249.246240      76.000000       29.263  119.414 0.118372        0.318095\r
 155 250.505054      76.000000       28.9121 123.922 0.114491        0.325557\r
 156 251.776660      76.000000       28.6138 126.722 0.0984642       0.29204\r
 157 253.061230      76.000000       28.4352 131.582 0.0891015       0.284327\r
 158 254.358984      76.000000       28.2506 136.52  0.0783947       0.27304\r
 159 255.670093      76.000000       27.7357 141.34  0.079687        0.309459\r
 160 256.994824      76.000000       27.723  146.452 0.075207        0.330147\r
 161 258.333325      76.000000       27.7573 151.275 0.0748947       0.377796\r
 162 259.685864      76.000000       27.8566 156.357 0.0668961       0.403356\r
 163 261.052637      76.000000       27.9817 160.494 0.0612131       0.441861\r
 164 262.433862      76.000000       27.858  165.856 0.0635342       0.628587\r
 165 263.829785      76.000000       28.0055 172.527 0.0584669       1.08272\r
 166 265.240649      76.000000       28.4235 172.163 0.0561209       0.981612\r
 167 266.666675      76.000000       28.7539 172.767 0.0509063       0.956773\r
 168 268.108105      76.000000       29.0823 166.918 0.0481918       0.500127\r
 169 269.565210      76.000000       29.5082 161.848 0.0414799       0.309691\r
 170 271.038257      76.000000       29.7785 156.089 0.0397189       0.226619\r
 171 272.527466      76.000000       30.2602 151.486 0.0381338       0.182909\r
 172 274.033154      76.000000       30.7348 145.265 0.0356643       0.141969\r
 173 275.555566      76.000000       31.0441 139.866 0.0326903       0.114306\r
 174 277.094971      76.000000       31.3159 134.631 0.031255        0.0984788\r
 175 278.651685      76.000000       31.7027 129.847 0.0285655       0.0827938\r
 176 280.225977      76.000000       32.0618 125.623 0.0269861       0.0733998\r
 177 281.818188      76.000000       32.2804 121.272 0.0253452       0.0652913\r
 178 283.428564      76.000000       32.7069 117.045 0.0231657       0.0568211\r
 179 285.057471      76.000000       32.8564 113.137 0.0495134       0.117977\r
 180 286.705200      76.000000       33.2626 109.142 0.045408        0.104634\r
 181 288.372095      76.000000       33.462  105.532 0.0399968       0.0900618\r
 182 290.058472      76.000000       33.6014 102.078 0.0369996       0.0818947\r
 183 291.764697      76.000000       33.6445 98.9717 0.0340853       0.074612\r
 184 293.491113      76.000000       33.6579 96.1097 0.0320516       0.0696611\r
 185 295.238086      76.000000       33.7065 93.6091 0.0274345       0.0592994\r
 186 297.005981      76.000000       33.8048 91.487  0.0262602       0.0565665\r
 187 298.795190      76.000000       33.8619 89.4675 0.0239486       0.0514824\r
 188 300.606055      76.000000       33.9953 87.6736 0.0226562       0.0486182\r
 189 302.439014      76.000000       34.1479 86.1077 0.0226429       0.0485577\r
 190 304.294482      76.000000       34.32   84.6093 0.0213189       0.04567\r
 191 306.172852      76.000000       34.5068 83.1873 0.0213191       0.0456748\r
 192 308.074536      76.000000       34.7606 82.0005 0.020565        0.0440056\r
 193 310.000000      76.000000       35.0125 80.7747 0.0199171       0.0425958\r
 194 311.949683      76.000000       35.2577 79.7067 0.019569        0.0418434\r
 195 313.924048      76.000000       35.5535 78.655  0.019162        0.0409519\r
 196 315.923560      76.000000       35.8289 77.7729 0.0189867       0.040568\r
 197 317.948706      76.000000       36.1287 76.8553 0.018414        0.0393276\r
 198 320.000000      76.000000       36.4295 76.012  0.0185937       0.0397265\r
 199 322.077930      76.000000       36.7909 75.2907 0.0259145       0.0555883\r
 200 324.183008      76.000000       37.0592 74.5228 0.0251876       0.0540628\r
 201 326.315796      76.000000       37.4818 73.8788 0.0241554       0.0517753\r
 202 328.476831      76.000000       37.7898 73.3565 0.0231686       0.0496269\r
 203 330.666675      76.000000       38.1414 72.7819 0.0241192       0.0516853\r
 204 332.885913      76.000000       38.5086 72.3633 0.0237678       0.0508842\r
 205 335.135132      76.000000       38.879  71.9418 0.0234363       0.0501383\r
 206 337.414966      76.000000       39.2299 71.6862 0.0233031       0.0497935\r
 207 339.726025      76.000000       39.6363 71.3685 0.0220698       0.0470788\r
 208 342.068970      76.000000       40.0605 71.1631 0.0223813       0.0476813\r
 209 344.444434      76.000000       40.4368 71.0879 0.0224419       0.0477282\r
 210 346.853149      76.000000       40.8795 70.9568 0.0222957       0.0473379\r
 211 349.295776      76.000000       41.3289 70.9508 0.022097        0.0468111\r
 212 351.773047      76.000000       41.8303 71.0616 0.0214179       0.0452264\r
 213 354.285718      76.000000       42.3288 71.2721 0.0215819       0.0454404\r
 214 356.834521      76.000000       42.8931 71.5759 0.0214338       0.0449707\r
 215 359.420288      76.000000       43.4862 71.9172 0.0219963       0.0460182\r
 216 362.043799      76.000000       44.1948 72.4303 0.0225308       0.0469708\r
 217 364.705884      76.000000       44.9279 72.9125 0.0222859       0.0463147\r
 218 367.407397      76.000000       45.9136 73.6139 0.0180248       0.0372075\r
 219 372.932324      76.000000       47.934  74.9171 0.0178329       0.0367464\r
 220 378.625952      76.000000       50.2151 76.0123 0.0174027       0.0360768\r
 221 384.496118      76.000000       52.8083 77.02   0.0170003       0.0358224\r
 222 390.551172      76.000000       55.6964 78.0507 0.016543        0.0358933\r
 223 396.800000      76.000000       58.9341 79.0751 0.0158197       0.0359842\r
 224 403.252026      76.000000       62.5558 79.9596 0.0149129       0.0364978\r
 225 409.917334      76.000000       66.5618 80.5052 0.0138581       0.0378674\r
 226 416.806738      76.000000       70.8455 80.308  0.0133108       0.0427858\r
 227 423.931641      76.000000       75.4567 78.5681 0.0137728       0.0568452\r
 228 431.304346      76.000000       80.1525 72.7998 0.00908626      0.0543278\r
 229 438.938037      76.000000       84.3532 53.6812 0.00931016      0.105815\r
 230 446.846826      76.000000       85.2309 30.1315 0.010555        0.238984\r
 231 455.045850      76.000000       81.771  50.3877 0.008479        0.0744079\r
 232 463.551416      76.000000       77.3459 58.3406 0.0131393       0.0708506\r
 233 472.380957      76.000000       73.0679 61.1767 0.013103        0.0526387\r
 234 481.553418      76.000000       68.9716 62.0209 0.0142949       0.0475232\r
 235 491.089111      76.000000       65.2218 62.0025 0.0156139       0.0458073\r
 236 501.010107      76.000000       61.8349 61.5556 0.0162647       0.0438516\r
 237 511.340186      76.000000       58.7773 60.9353 0.017087        0.0435458\r
 238 522.105273      76.000000       56.0878 60.2237 0.0179072       0.0440386\r
 239 533.333350      76.000000       53.6615 59.5404 0.0186682       0.0448765\r
 240 545.054932      76.000000       51.4882 58.7985 0.0188121       0.0446452\r
 241 557.303369      76.000000       49.5112 58.1421 0.0190924       0.0450308\r
 242 570.114941      76.000000       47.7355 57.5437 0.0193412       0.0455649\r
 243 583.529395      76.000000       46.1194 57.0254 0.0196579       0.0464166\r
 244 597.590381      76.000000       44.6425 56.5703 0.0199191       0.0472562\r
 245 612.345703      76.000000       43.2834 56.1609 0.0201912       0.0482242\r
 246 627.848096      76.000000       42.0073 55.8269 0.0202785       0.0488054\r
 247 644.155859      76.000000       40.8396 55.5865 0.0209712       0.0509093\r
 248 661.333350      76.000000       39.7283 55.3722 0.0207664       0.05086\r
 249 679.452051      76.000000       38.6901 55.2692 0.0204635       0.050541\r
 250 698.591553      76.000000       37.6717 55.1913 0.020807        0.0519023\r
 251 718.840576      76.000000       36.7184 55.184  0.0209506       0.0527617\r
 252 740.298486      76.000000       35.7785 55.1504 0.0233544       0.0595592\r
 253 763.076904      76.000000       34.8716 55.2735 0.0227848       0.0586507\r
 254 787.301611      76.000000       33.9609 55.4723 0.0308554       0.0805001\r
 255 813.114746      76.000000       33.0949 55.5655 0.0295261       0.0779097\r
 256 837.837793      76.000000       32.3026 55.7341 0.0174158       0.0460581\r
 257 861.111133      76.000000       31.6449 55.8862 0.0176046       0.0470138\r
 258 885.714258      76.000000       30.9475 56.113  0.0167727       0.0451873\r
 259 911.764746      76.000000       30.2612 56.3213 0.0166661       0.045381\r
 260 939.393945      76.000000       29.5727 56.5461 0.0163994       0.0451488\r
 261 968.750000      76.000000       28.8809 56.7997 0.0161618       0.0450139\r
 262 1000.000000     76.000000       28.16   57.0873 0.0158081       0.0445824