2 Thu Jan 29 13:14:43 2009 Could not Home Filter, Error #1
\r
3 Thu Jan 29 13:14:52 2009 Init User: (v3.632, 6.256 DLL)
\r
4 Thu Jan 29 13:24:30 2009 Could not Home Filter, Error #1
\r
5 Thu Jan 29 13:24:32 2009 Init User: (v3.632, 6.256 DLL)
\r
6 Thu Jan 29 13:25:34 2009 Could not Home Filter, Error #1
\r
7 Thu Jan 29 13:25:49 2009 Init User: (v3.632, 6.256 DLL)
\r
8 Thu Jan 29 13:28:17 2009 Could not Home Filter, Error #1
\r
9 Thu Jan 29 13:28:21 2009 Init User: (v3.632, 6.256 DLL)
\r
10 Thu Jan 29 13:30:52 2009 Could not Home Filter, Error #1
\r
11 Thu Jan 29 13:31:02 2009 Init User: (v3.632, 6.256 DLL)
\r
12 Thu Jan 29 13:46:16 2009
\r
14 Thu Jan 29 13:46:16 2009 **************************************************
\r
15 Thu Jan 29 13:46:16 2009 Start of HardWare.CNF <C:\WVASE32\hardware.cnf>
\r
16 Thu Jan 29 13:46:16 2009 **************************************************
\r
17 Thu Jan 29 13:46:16 2009 [Hardware]
\r
18 Thu Jan 29 13:46:16 2009 Type=Spectroscopic
\r
19 Thu Jan 29 13:46:16 2009 Base=Vert
\r
20 Thu Jan 29 13:46:16 2009 AutoRetarder=yes
\r
21 Thu Jan 29 13:46:16 2009 IRDet=yes
\r
22 Thu Jan 29 13:46:16 2009 CalWvls=5000 11770
\r
23 Thu Jan 29 13:46:16 2009 ;CalConfig=30 40 60 4 50 180
\r
24 Thu Jan 29 13:46:16 2009 ;AlignPolarizer=0
\r
25 Thu Jan 29 13:46:16 2009 NoOverloadMsg=1
\r
26 Thu Jan 29 13:46:16 2009 ;next line was commented out - Tony
\r
27 Thu Jan 29 13:46:16 2009 ;diagnose=1
\r
28 Thu Jan 29 13:46:16 2009
\r
29 Thu Jan 29 13:46:16 2009 ;Computer Configuration
\r
30 Thu Jan 29 13:46:16 2009 Dash16BASE=768
\r
31 Thu Jan 29 13:46:16 2009 Dash16Clk=1
\r
32 Thu Jan 29 13:46:16 2009 DMA_Channel=3
\r
33 Thu Jan 29 13:46:16 2009 DMA_AllocSize=16
\r
34 Thu Jan 29 13:46:16 2009 IntrNum=0
\r
35 Thu Jan 29 13:46:16 2009 PIO24=784
\r
36 Thu Jan 29 13:46:16 2009 ;136
\r
37 Thu Jan 29 13:46:16 2009 PIO24#2=800
\r
38 Thu Jan 29 13:46:16 2009 ;139
\r
39 Thu Jan 29 13:46:16 2009
\r
40 Thu Jan 29 13:46:16 2009 ;Monochromator Configuration
\r
41 Thu Jan 29 13:46:16 2009 Monochromator=dk242
\r
42 Thu Jan 29 13:46:16 2009 DK242=1800 3700 2900 8400 7800 18000 1 2000 2000
\r
43 Thu Jan 29 13:46:16 2009 DKComPort=1 9600
\r
44 Thu Jan 29 13:46:16 2009 FilterWvls=4200 6000 10400
\r
45 Thu Jan 29 13:46:16 2009 solarblind=0 0
\r
46 Thu Jan 29 13:46:16 2009 HomeFilter=70
\r
47 Thu Jan 29 13:46:16 2009 IRDetSwitchWvl=10500
\r
48 Thu Jan 29 13:46:16 2009
\r
49 Thu Jan 29 13:46:16 2009 [Motors]
\r
50 Thu Jan 29 13:46:16 2009 Filter=100 .024 1 2
\r
51 Thu Jan 29 13:46:16 2009 Polarizer=200 .002 5 1500 80
\r
52 Thu Jan 29 13:46:16 2009 Sample=400 .005 5 1800
\r
53 Thu Jan 29 13:46:16 2009 Detector=400 .005 5 1800
\r
54 Thu Jan 29 13:46:16 2009 comp1=200 .005 4 1200 80
\r
55 Thu Jan 29 13:46:16 2009 comp2=200 .005 4 1200 80
\r
56 Thu Jan 29 13:46:16 2009 ;comp1=200 .02 1 800 80
\r
57 Thu Jan 29 13:46:16 2009 ;comp2=200 .02 1 800 80
\r
58 Thu Jan 29 13:46:16 2009 ;ComputerSpeed=3120761.000000
\r
59 Thu Jan 29 13:46:16 2009 ;ComputerSpeed=3071999.000000
\r
60 Thu Jan 29 13:46:16 2009 ;ComputerSpeed=3120761.000000
\r
61 Thu Jan 29 13:46:16 2009 ;Computerspeed4=4153690.000000
\r
62 Thu Jan 29 13:46:16 2009 Computerspeed4=7513681.000000
\r
63 Thu Jan 29 13:46:16 2009 Computerspeed5=37154267.000000
\r
64 Thu Jan 29 13:46:16 2009
\r
65 Thu Jan 29 13:46:16 2009
\r
66 Thu Jan 29 13:46:16 2009 [Retarder]
\r
67 Thu Jan 29 13:46:16 2009 ;Calibration=2070.20069 0.0 0.0 0.0 0.0 0.0 0.0 0.0 0.0 0.0 0.0 0.0
\r
68 Thu Jan 29 13:46:16 2009 Calibration=2082.69800 0.00000 0.00000 0.00000 0.00000 0.00000 0.00000 0.00000 0.00000 0.00000 0.00000 6.47379 32.28361 0.00000 0.00000 -0.41653 0.43077 0.61764 0.00000
\r
69 Thu Jan 29 13:46:16 2009 motports=32 33 -1
\r
70 Thu Jan 29 13:46:16 2009 motports=34 35 -1
\r
71 Thu Jan 29 13:46:16 2009 limits1=40 42 1
\r
72 Thu Jan 29 13:46:16 2009 limits2=43 45 1
\r
73 Thu Jan 29 13:46:16 2009 range1=-13.36 14.00
\r
74 Thu Jan 29 13:46:16 2009 range2=-13.57 14.00
\r
75 Thu Jan 29 13:46:16 2009 OldCalibration=2100.944002 0.0 0.0 0.0 0.0 0.719739 0.014047 -2013.982171 -1072.769975
\r
76 Thu Jan 29 13:46:16 2009
\r
77 Thu Jan 29 13:46:16 2009 [Mono]
\r
78 Thu Jan 29 13:46:16 2009 Calibration11=0.0000 5000.0000 17.7177 5000.0000 17.7177
\r
79 Thu Jan 29 13:46:16 2009 Calibration12=0.0000 5000.0000 17.7177 5000.0000 17.7177
\r
80 Thu Jan 29 13:46:16 2009 Calibration21=0.0000 5000.0000 17.7303 5000.0000 17.7303
\r
81 Thu Jan 29 13:46:16 2009 Calibration22=0.0000 5000.0000 17.7303 5000.0000 17.7303
\r
82 Thu Jan 29 13:46:16 2009 Calibration31=0.0000 5000.0000 8.7545 5000.0000 8.7545
\r
83 Thu Jan 29 13:46:16 2009 Calibration32=0.0000 5000.0000 8.7545 5000.0000 8.7545
\r
84 Thu Jan 29 13:46:16 2009 **************************************************
\r
85 Thu Jan 29 13:46:16 2009 End of HardWare.CNF <C:\WVASE32\hardware.cnf>
\r
86 Thu Jan 29 13:46:16 2009 **************************************************
\r
88 Thu Jan 29 13:47:24 2009 Could not Home Filter, Error #1
\r
89 Thu Jan 29 13:47:25 2009 Special Test Init
\r
90 Thu Jan 29 14:48:46 2009 Could not Home Filter, Error #1
\r
91 Thu Jan 29 14:49:02 2009 Init User: mrg (v3.632, 6.256 DLL)
\r
92 Thu Jan 29 14:58:09 2009 Could not Home Filter, Error #1
\r
93 Thu Jan 29 14:58:21 2009 Init User: (v3.632, 6.256 DLL)
\r
94 Thu Jan 29 14:59:01 2009 Could not Home Filter, Error #1
\r
95 Thu Jan 29 14:59:10 2009 Init User: (v3.632, 6.256 DLL)
\r
96 Thu Jan 29 15:00:58 2009 Could not Home Filter, Error #1
\r
97 Thu Jan 29 15:02:00 2009 Init User: (v3.632, 6.256 DLL)
\r
98 Thu Jan 29 15:07:05 2009 Could not Home Filter, Error #1
\r
99 Thu Jan 29 15:07:08 2009 Init User: (v3.632, 6.256 DLL)
\r
100 Thu Jan 29 15:16:20 2009 Could not Home Filter, Error #1
\r
101 Thu Jan 29 15:16:25 2009 Init User: (v3.632, 6.256 DLL)
\r
102 Thu Jan 29 15:16:56 2009 Could not Home Filter, Error #1
\r
103 Thu Jan 29 15:17:01 2009 Init User: (v3.632, 6.256 DLL)
\r
104 Thu Jan 29 15:27:04 2009 Could not Home Filter, Error #2
\r
105 Thu Jan 29 15:27:08 2009 Init User: (v3.632, 6.256 DLL)
\r
106 Thu Jan 29 15:27:51 2009 Could not Home Filter, Error #1
\r
107 Thu Jan 29 15:27:53 2009 Init User: (v3.632, 6.256 DLL)
\r
108 Thu Jan 29 15:43:12 2009 Could not Home Filter, Error #1
\r
109 Thu Jan 29 15:43:23 2009 Init User: (v3.632, 6.256 DLL)
\r
110 Thu Jan 29 15:48:13 2009 Could not Home Filter, Error #1
\r
111 Thu Jan 29 15:49:20 2009 Init User: (v3.632, 6.256 DLL)
\r
112 Thu Jan 29 15:53:54 2009 Could not Home Filter, Error #1
\r
113 Thu Jan 29 15:53:57 2009 Init User: (v3.632, 6.256 DLL)
\r
114 Thu Jan 29 16:06:37 2009 Could not Home Filter, Error #1
\r
115 Thu Jan 29 16:06:44 2009 Init User: (v3.632, 6.256 DLL)
\r
116 Thu Jan 29 16:09:22 2009 Could not Home Filter, Error #1
\r
117 Thu Jan 29 16:14:38 2009 Init User: (v3.632, 6.256 DLL)
\r
118 Thu Jan 29 16:36:38 2009 Could not Home Filter, Error #1
\r
119 Thu Jan 29 16:36:52 2009 Init User: mrg (v3.632, 6.256 DLL)
\r
120 Thu Jan 29 16:37:42 2009 Could not Home Filter, Error #1
\r
121 Thu Jan 29 16:37:49 2009 Init User: mrg (v3.632, 6.256 DLL)
\r
122 Thu Jan 29 16:43:11 2009 Could not Home Filter, Error #1
\r
123 Thu Jan 29 16:43:23 2009 Init User: (v3.632, 6.256 DLL)
\r
124 Thu Jan 29 16:45:36 2009 Could not Home Filter, Error #1
\r
125 Thu Jan 29 16:45:51 2009 Could not Home Filter, Error #1
\r
126 Thu Jan 29 17:47:38 2009 Could not Home Filter, Error #1
\r
127 Thu Jan 29 17:47:38 2009 Init User: (DDE link) (v3.632, 6.256 DLL)
\r
128 Thu Jan 29 17:48:13 2009 Could not Home Filter, Error #1
\r
129 Thu Jan 29 17:48:13 2009 Init User: (DDE link) (v3.632, 6.256 DLL)
\r
130 Thu Jan 29 17:49:00 2009 Could not Home Filter, Error #1
\r
131 Thu Jan 29 17:49:00 2009 Special Test Init
\r
132 Thu Jan 29 17:51:49 2009 Could not Home Filter, Error #1
\r
133 Thu Jan 29 17:52:24 2009 Could not Home Filter, Error #1
\r
134 Thu Jan 29 17:52:24 2009 Init User: (DDE link) (v3.632, 6.256 DLL)
\r
135 Thu Jan 29 17:53:34 2009 Could not Home Filter, Error #1
\r
136 Thu Jan 29 17:53:34 2009 Init User: (DDE link) (v3.632, 6.256 DLL)
\r
137 Thu Jan 29 17:54:51 2009 Could not Home Filter, Error #1
\r
138 Thu Jan 29 17:54:55 2009 Init User: (v3.632, 6.256 DLL)
\r
139 Fri Jan 30 09:27:46 2009 Could not Home Filter, Error #1
\r
140 Fri Jan 30 09:27:48 2009 Init User: (v3.632, 6.256 DLL)
\r
141 Fri Jan 30 09:33:21 2009 Could not Home Filter, Error #2
\r
142 Fri Jan 30 09:33:24 2009 Init User: (v3.632, 6.256 DLL)
\r
143 Fri Jan 30 09:49:19 2009 Could not Home Filter, Error #1
\r
144 Fri Jan 30 09:49:33 2009 Init User: mrg (v3.632, 6.256 DLL)
\r
145 Fri Jan 30 09:50:43 2009 Could not Home Filter, Error #2
\r
146 Fri Jan 30 09:50:54 2009 Init User: mrg (v3.632, 6.256 DLL)
\r
147 Fri Jan 30 09:52:08 2009 Could not Home Filter, Error #2
\r
148 Fri Jan 30 09:52:19 2009 Init User: mrg (v3.632, 6.256 DLL)
\r
149 Fri Jan 30 10:03:52 2009 Could not Home Filter, Error #2
\r
150 Fri Jan 30 10:03:56 2009 Init User: mrg (v3.632, 6.256 DLL)
\r
151 Fri Jan 30 10:08:54 2009 Could not Home Filter, Error #2
\r
152 Fri Jan 30 10:09:01 2009 Init User: mrg (v3.632, 6.256 DLL)
\r
153 Fri Jan 30 10:58:03 2009 Could not Home Filter, Error #1
\r
154 Fri Jan 30 10:58:05 2009 Init User: mrg (v3.632, 6.256 DLL)
\r
155 Fri Jan 30 10:58:33 2009 Could not Home Filter, Error #2
\r
156 Fri Jan 30 10:58:36 2009 Init User: (v3.632, 6.256 DLL)
\r
157 Fri Jan 30 11:00:38 2009 Could not Home Filter, Error #2
\r
158 Fri Jan 30 11:01:06 2009 Init User: (v3.632, 6.256 DLL)
\r
159 Fri Jan 30 11:01:23 2009 Could not Home Filter, Error #2
\r
160 Fri Jan 30 11:01:25 2009 Init User: (v3.632, 6.256 DLL)
\r
161 Fri Jan 30 11:25:43 2009 Could not Home Filter, Error #2
\r
162 Fri Jan 30 11:25:52 2009 Init User: (v3.632, 6.256 DLL)
\r
163 Fri Jan 30 11:28:12 2009 Could not Home Filter, Error #1
\r
164 Fri Jan 30 11:28:15 2009 Init User: (v3.632, 6.256 DLL)
\r
165 Fri Jan 30 11:48:31 2009 Could not Home Filter, Error #2
\r
166 Fri Jan 30 11:48:36 2009 Init User: (v3.632, 6.256 DLL)
\r
167 Fri Jan 30 11:58:04 2009 Could not Home Filter, Error #2
\r
168 Fri Jan 30 11:58:09 2009 Init User: (v3.632, 6.256 DLL)
\r
169 Fri Jan 30 11:59:43 2009 Could not Home Filter, Error #1
\r
170 Fri Jan 30 11:59:47 2009 Init User: (v3.632, 6.256 DLL)
\r
171 Fri Jan 30 12:22:27 2009 Could not Home Filter, Error #2
\r
172 Fri Jan 30 12:22:30 2009 Init User: (v3.632, 6.256 DLL)
\r
173 Fri Jan 30 12:24:38 2009 Could not Home Filter, Error #1
\r
174 Fri Jan 30 12:25:59 2009 Init User: (v3.632, 6.256 DLL)
\r
175 Fri Jan 30 12:35:24 2009 Could not Home Filter, Error #2
\r
176 Fri Jan 30 12:35:26 2009 Init User: (v3.632, 6.256 DLL)
\r
177 Fri Jan 30 12:38:03 2009 Could not Home Filter, Error #1
\r
178 Fri Jan 30 12:38:05 2009 Init User: (v3.632, 6.256 DLL)
\r
179 Fri Jan 30 12:40:34 2009 Could not Home Filter, Error #1
\r
180 Fri Jan 30 12:41:10 2009 Could not Home Filter, Error #2
\r
181 Fri Jan 30 12:41:13 2009 Init User: (v3.632, 6.256 DLL)
\r
182 Fri Jan 30 12:42:09 2009 Could not Home Filter, Error #1
\r
183 Fri Jan 30 12:43:34 2009 Could not Home Filter, Error #2
\r
184 Fri Jan 30 12:44:00 2009 Init User: (v3.632, 6.256 DLL)
\r
185 Fri Jan 30 12:51:53 2009 Initializing Error: User Canceled Initialization.
\r
186 Fri Jan 30 12:51:54 2009 Initializing Error: MonoInitWait()
\r
187 Fri Jan 30 12:53:38 2009 Could not Home Filter, Error #2
\r
188 Fri Jan 30 12:53:42 2009 Init User: (v3.632, 6.256 DLL)
\r
189 Fri Jan 30 12:57:26 2009 Could not Home Filter, Error #1
\r
190 Fri Jan 30 12:57:29 2009 Init User: (v3.632, 6.256 DLL)
\r
191 Fri Jan 30 13:48:53 2009 Could not Home Filter, Error #2
\r
192 Fri Jan 30 13:49:49 2009 Init User: (v3.632, 6.256 DLL)
\r
193 Fri Jan 30 13:50:20 2009 Could not Home Filter, Error #2
\r
194 Fri Jan 30 13:50:23 2009 Init User: (v3.632, 6.256 DLL)
\r
195 Fri Jan 30 13:55:17 2009 Could not Home Filter, Error #1
\r
196 Fri Jan 30 13:56:04 2009 Init User: (v3.632, 6.256 DLL)
\r
197 Fri Jan 30 14:09:22 2009 Initializing Error: User Canceled Initialization.
\r
198 Fri Jan 30 14:09:30 2009 Initializing Error: MonoInitWait()
\r
199 Fri Jan 30 14:12:03 2009 Initializing Error: User Canceled Initialization.
\r
200 Fri Jan 30 14:12:03 2009 Initializing Error: MonoInitWait()
\r
201 Fri Jan 30 14:22:57 2009 Initializing Error: Could not communication with the monochromator.
\r
202 Fri Jan 30 14:23:14 2009 Initializing Error: MonoInitWait()
\r
203 Fri Jan 30 14:28:39 2009 Initializing Error: User Canceled Initialization.
\r
204 Fri Jan 30 14:28:39 2009 Initializing Error: MonoInitWait()
\r
205 Fri Jan 30 14:31:56 2009 Initializing Error: User Canceled Initialization.
\r
206 Fri Jan 30 14:31:56 2009 Initializing Error: MonoInitWait()
\r
207 Fri Jan 30 14:36:47 2009 Could not Home Filter, Error #1
\r
208 Fri Jan 30 14:36:56 2009 Init User: (v3.632, 6.256 DLL)
\r
209 Fri Jan 30 14:39:06 2009 Could not Home Filter, Error #2
\r
210 Fri Jan 30 14:41:56 2009 Init User: (v3.632, 6.256 DLL)
\r
211 Fri Jan 30 14:43:22 2009 Could not Home Filter, Error #1
\r
212 Fri Jan 30 15:20:59 2009 Could not Home Filter, Error #1
\r
213 Fri Jan 30 15:21:02 2009 Init User: (v3.632, 6.256 DLL)
\r
214 Fri Jan 30 15:22:05 2009 SendMonoCmd Error: Monochromator Command Return Failed 31
\r
215 Fri Jan 30 15:22:40 2009 GetMonoStatus Error: Mono Return Failed 27
\r
216 Fri Jan 30 15:22:40 2009 d=01 cmd=-1 00 71 45 00 18 D0 00 18 00 00
\r
217 Fri Jan 30 15:22:40 2009 MonoCheck Error: Monochromator Communication Failed.
\r
218 Fri Jan 30 15:22:40 2009 Could Not Adjust Slit Width
\r
219 Fri Jan 30 15:40:38 2009 Could not Home Filter, Error #1
\r
220 Fri Jan 30 15:40:41 2009 Init User: (v3.632, 6.256 DLL)
\r
221 Fri Jan 30 15:42:20 2009 SendMonoCmd Error: Monochromator Command Return Failed 31
\r
222 Fri Jan 30 15:42:55 2009 GetMonoStatus Error: Mono Return Failed 27
\r
223 Fri Jan 30 15:42:55 2009 d=01 cmd=-1 00 71 45 00 18 D0 00 18 00 00
\r
224 Fri Jan 30 15:42:55 2009 MonoCheck Error: Monochromator Communication Failed.
\r
225 Fri Jan 30 15:42:55 2009 Could Not Adjust Slit Width
\r
226 Fri Jan 30 15:54:55 2009 Initializing Error: Could not communication with the monochromator.
\r
227 Fri Jan 30 15:54:56 2009 Initializing Error: MonoInitWait()
\r
228 Fri Jan 30 16:09:00 2009 Initializing Error: Could not communication with the monochromator.
\r
229 Fri Jan 30 16:09:01 2009 Initializing Error: MonoInitWait()
\r
230 Fri Jan 30 16:14:11 2009 Initializing Error: User Canceled Initialization.
\r
231 Fri Jan 30 16:14:12 2009 Initializing Error: MonoInitWait()
\r
232 Fri Jan 30 16:22:27 2009 Initializing Error: Could not communication with the monochromator.
\r
233 Fri Jan 30 16:22:27 2009 Initializing Error: MonoInitWait()
\r
234 Fri Jan 30 16:28:23 2009 Could not Home Filter, Error #1
\r
235 Fri Jan 30 16:28:25 2009 Init User: (v3.632, 6.256 DLL)
\r
236 Fri Jan 30 16:29:26 2009 WVASE32 lost communication with remote hardware, ending data collection.
\r
237 Fri Jan 30 16:29:31 2009 HardComInit failure. Hardware NOT intialized.
\r
238 Fri Jan 30 16:29:35 2009 HardComInit failure. Hardware NOT intialized.
\r
239 Fri Jan 30 16:39:35 2009 Initializing Error: Could not communication with the monochromator.
\r
240 Fri Jan 30 16:39:35 2009 Initializing Error: MonoInitWait()
\r
241 Fri Jan 30 16:47:45 2009 Could not Home Filter, Error #1
\r
242 Fri Jan 30 16:47:47 2009 Init User: (v3.632, 6.256 DLL)
\r
243 Sat Jan 31 08:16:51 2009 Could not Home Filter, Error #1
\r
244 Sat Jan 31 08:17:06 2009 Init User: (v3.632, 6.256 DLL)
\r
245 Sat Jan 31 08:21:26 2009 Could not Home Filter, Error #1
\r
246 Sat Jan 31 08:21:36 2009 Init User: (v3.632, 6.256 DLL)
\r
247 Sat Jan 31 08:23:00 2009 Could not Home Filter, Error #1
\r
248 Sat Jan 31 08:23:03 2009 Init User: (v3.632, 6.256 DLL)
\r
249 Sat Jan 31 08:24:53 2009 Could not Home Filter, Error #1
\r
250 Sat Jan 31 08:25:13 2009 Init User: (v3.632, 6.256 DLL)
\r
251 Sat Jan 31 08:31:38 2009 Could not Home Filter, Error #1
\r
252 Sat Jan 31 08:31:40 2009 Init User: (v3.632, 6.256 DLL)
\r
253 Sat Jan 31 08:47:36 2009 Could not Home Filter, Error #1
\r
254 Sat Jan 31 08:47:38 2009 Init User: (v3.632, 6.256 DLL)
\r
255 Sat Jan 31 08:52:46 2009 Could not Home Filter, Error #1
\r
256 Sat Jan 31 08:53:29 2009 Init User: (v3.632, 6.256 DLL)
\r
257 Sat Jan 31 08:54:08 2009 Could not Home Filter, Error #1
\r
258 Sat Jan 31 08:54:11 2009 Init User: (v3.632, 6.256 DLL)
\r
259 Sat Jan 31 08:56:07 2009 Could not Home Filter, Error #1
\r
260 Sat Jan 31 08:56:11 2009 Init User: (v3.632, 6.256 DLL)
\r
261 Sat Jan 31 09:04:19 2009 Could not Home Filter, Error #2
\r
262 Sat Jan 31 09:04:23 2009 Init User: (v3.632, 6.256 DLL)
\r
263 Sat Jan 31 09:04:51 2009 Could not Home Filter, Error #2
\r
264 Sat Jan 31 09:04:55 2009 Special Test Init
\r
265 Sat Jan 31 09:10:36 2009 Init User: (v3.632, 6.256 DLL)
\r
266 Sat Jan 31 09:22:16 2009 Init User: (v3.632, 6.256 DLL)
\r
267 Sat Jan 31 09:29:50 2009
\r
268 Sat Jan 31 09:29:50 2009 Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=1
\r
269 Sat Jan 31 09:34:12 2009 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
270 Sat Jan 31 09:34:14 2009 Coarse Calib: Ps=-30.3830±0.0066 Attn=1.0107±0.0003 As=99.101±0.007 Psi=18.607±0.024 Del=84.229±0.020 <I>=6.662 MSE=0.304 (1.34)
\r
271 Sat Jan 31 09:34:14 2009 Coarse Calib: AzOffset=-0.014±0.004375 ElOffset=0.036±0.003919
\r
272 Sat Jan 31 09:35:14 2009
\r
273 Sat Jan 31 09:35:14 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=1
\r
274 Sat Jan 31 09:39:43 2009 Calib: Wvl1=5000.0 Ps=-30.3831±0.0043 Attn=1.0110±0.0003 As=99.095±0.008 Psi=18.580±0.019 Del=84.216±0.015 <I>=3.799, MSE=0.586 (1.12) Synch=45.424±0.056 [45.340,45.509]
\r
275 Sat Jan 31 09:39:43 2009 Calib: MSE=0.586 (1.119) AzOffset=-0.006±0.003480 ElOffset=-0.007±0.003112 DP=0.144±0.102
\r
276 Sat Jan 31 09:44:19 2009 VASE File c:\wvase32\dat\2009.01.31.cw.1.dat
\r
277 Sat Jan 31 09:57:45 2009 VASE File c:\wvase32\dat\2009.01.31.cw.1.dat
\r
278 Sat Jan 31 22:14:45 2009 Init User: mrg (v3.632, 6.256 DLL)
\r
279 Sat Jan 31 22:15:08 2009 Init User: mrg (v3.632, 6.256 DLL)
\r
280 Sat Jan 31 22:15:39 2009 Init User: mrg (v3.632, 6.256 DLL)
\r
281 Sat Jan 31 22:25:06 2009 Init User: mrg (v3.632, 6.256 DLL)
\r
282 Sat Jan 31 22:30:35 2009 Init User: mrg (v3.632, 6.256 DLL)
\r
283 Sat Jan 31 22:38:49 2009
\r
284 Sat Jan 31 22:38:49 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=1
\r
285 Sat Jan 31 22:41:00 2009 Insufficient intensity at too many points to perform calibration. 5000.0Å, det=0 (4, 3) (0.0073, 0.01)
\r
286 Sat Jan 31 22:42:46 2009
\r
287 Sat Jan 31 22:42:46 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=1
\r
288 Sat Jan 31 22:47:11 2009 Calib: Diagnose bd:176, 8, 0, 0, 0, 0, 0, 0, 0, 0, pxy67=1.6,14.80,3.80,0.00 (50, 32, 26, 25, 23, 13, 2, 6, 3, 4)
\r
289 Sat Jan 31 22:47:11 2009 The error bar on the Calibration Parameter Ps is too large (check the Log File for details). Repeat the Coarse and Fine Calibration procedures on a thin SiO2/Si standard sample.
\r
290 Sun Feb 01 00:22:30 2009 Calib: Wvl1=5000.0 Ps=-30.1888±0.0513 Attn=1.0125±0.0011 As=51.940±0.062 Psi=38.396±0.029 Del=41.850±0.120 <I>=0.118, MSE=0.508 (3.7) Synch=-172.379±0.094 [-172.563,-172.133]
\r
291 Sun Feb 01 00:22:30 2009 Calib: MSE=0.508 (3.702) AzOffset=0.026±0.014328 ElOffset=-0.011±0.005825 DP=10.343±0.381
\r
292 Mon Feb 02 09:15:07 2009 Init User: mrg (v3.632, 6.256 DLL)
\r
293 Mon Feb 02 09:30:08 2009
\r
294 Mon Feb 02 09:30:08 2009 Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=1
\r
295 Mon Feb 02 09:34:28 2009 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
296 Mon Feb 02 09:34:31 2009 Coarse Calib: Ps=-30.3871±0.0151 Attn=1.0115±0.0005 As=90.401±0.013 Psi=18.568±0.051 Del=84.351±0.042 <I>=0.743 MSE=0.368 (3.16)
\r
297 Mon Feb 02 09:34:31 2009 Coarse Calib: AzOffset=-0.001±0.009478 ElOffset=-0.028±0.008508
\r
298 Mon Feb 02 09:48:00 2009
\r
299 Mon Feb 02 09:48:00 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=1
\r
300 Mon Feb 02 09:52:29 2009 Calib: Wvl1=5000.0 Ps=-30.3824±0.0089 Attn=1.0119±0.0007 As=90.365±0.018 Psi=18.550±0.038 Del=84.405±0.030 <I>=0.400, MSE=0.615 (2.54) Synch=-122.342±0.071 [-122.493,-122.174]
\r
301 Mon Feb 02 09:52:30 2009 Calib: MSE=0.615 (2.543) AzOffset=-0.007±0.006994 ElOffset=0.004±0.006278 DP=-0.012±0.207
\r
302 Mon Feb 02 10:37:34 2009
\r
303 Mon Feb 02 10:37:34 2009 Calib: rvs=30, pts=60, span=60.0, aoi=45.000, t=1, d=1
\r
304 Mon Feb 02 10:43:50 2009 Calib: Wvl1=5000.0 Ps=-30.3867±0.0212 Attn=1.0127±0.0002 As=90.266±0.026 Psi=35.726±0.005 Del=165.624±0.029 <I>=3.991, MSE=0.369 (0.648) Synch=-122.085±0.010 [-122.105,-122.058]
\r
305 Mon Feb 02 10:43:50 2009 Calib: MSE=0.369 (0.648) AzOffset=0.002±0.001436 ElOffset=0.011±0.002599 DP=-0.009±0.051
\r
306 Mon Feb 02 11:02:37 2009 Init User: mrg (v3.632, 6.256 DLL)
\r
307 Mon Feb 02 11:07:44 2009
\r
308 Mon Feb 02 11:07:44 2009 Calib: rvs=30, pts=60, span=60.0, aoi=65.000, t=1, d=1
\r
309 Mon Feb 02 11:14:00 2009 Calib: Wvl1=5000.0 Ps=-30.3791±0.0073 Attn=1.0127±0.0003 As=163.638±0.011 Psi=23.244±0.011 Del=134.456±0.038 <I>=3.697, MSE=0.491 (0.913) Synch=-21.319±0.034 [-21.420,-21.238]
\r
310 Mon Feb 02 11:14:00 2009 Calib: MSE=0.491 (0.913) AzOffset=-0.004±0.001973 ElOffset=0.018±0.005194 DP=0.051±0.078
\r
311 Mon Feb 02 14:23:01 2009 VASE File c:\wvase32\dat\2009.02.02.silane1lu.dat Silane 1 - left - unetched
\r
312 Mon Feb 02 14:45:02 2009 Init User: mrg (v3.632, 6.256 DLL)
\r
313 Mon Feb 02 14:48:56 2009 Init User: mrg (v3.632, 6.256 DLL)
\r
314 Mon Feb 02 14:59:36 2009
\r
315 Mon Feb 02 14:59:36 2009 Calib: rvs=30, pts=60, span=60.0, aoi=70.000, t=1, d=1
\r
316 Mon Feb 02 15:05:53 2009 Calib: Wvl1=5000.0 Ps=-30.3777±0.0042 Attn=1.0131±0.0002 As=60.833±0.008 Psi=19.821±0.013 Del=114.899±0.026 <I>=3.695, MSE=0.459 (0.871) Synch=11.347±0.039 [11.281,11.407]
\r
317 Mon Feb 02 15:05:53 2009 Calib: MSE=0.459 (0.871) AzOffset=-0.003±0.002063 ElOffset=0.021±0.003476 DP=0.089±0.077
\r
318 Mon Feb 02 15:42:21 2009 Init User: (v3.632, 6.256 DLL)
\r
319 Mon Feb 02 15:42:32 2009
\r
320 Mon Feb 02 15:42:32 2009 Calib: rvs=30, pts=60, span=60.0, aoi=85.000, t=1, d=1
\r
321 Mon Feb 02 15:47:01 2009 Calib: Diagnose bd:79, 61, 32, 7, 2, 3, 0, 0, 0, 0, pxy85=5.3,-74.56,0.00,-2.80 (20, 22, 20, 17, 17, 10, 21, 12, 14, 31, wpxy8=0.0216,-52.24,0.00,0.00)
\r
322 Mon Feb 02 15:47:01 2009 The error bar on the Calibration Parameter Ps is too large (check the Log File for details). Repeat the Coarse and Fine Calibration procedures on a thin SiO2/Si standard sample.
\r
323 Mon Feb 02 15:47:13 2009 Calib: Wvl1=5000.0 Ps=-30.1023±0.5422 Attn=1.0171±0.0020 As=125.180±0.587 Psi=42.133±0.052 Del=-0.592±0.301 <I>=0.062, MSE=1.76 (7.23) Synch=127.035±0.191 [126.410,127.518]
\r
324 Mon Feb 02 15:47:14 2009 Calib: MSE=1.758 (7.227) AzOffset=0.025±0.018874 ElOffset=0.022±0.019194 DP=0.236±0.540
\r
325 Mon Feb 02 15:49:44 2009 Init User: (v3.632, 6.256 DLL)
\r
326 Mon Feb 02 15:57:53 2009
\r
327 Mon Feb 02 15:57:53 2009 Calib: rvs=30, pts=60, span=60.0, aoi=65.000, t=1, d=1
\r
328 Mon Feb 02 16:04:09 2009 Calib: Wvl1=5000.0 Ps=-30.3792±0.0058 Attn=1.0134±0.0002 As=88.521±0.009 Psi=23.201±0.009 Del=134.727±0.031 <I>=3.848, MSE=0.386 (0.724) Synch=-23.407±0.019 [-23.458,-23.362]
\r
329 Mon Feb 02 16:04:10 2009 Calib: MSE=0.386 (0.724) AzOffset=-0.002±0.001576 ElOffset=0.033±0.004174 DP=0.054±0.062
\r
330 Mon Feb 02 17:11:30 2009 RT File c:\wvase32\dat\2009.02.02.11b.dat
\r
331 Mon Feb 02 17:38:16 2009 VASE File c:\wvase32\dat\2009.02.02.11b.dat
\r
332 Tue Feb 03 08:44:34 2009 Init User: (v3.632, 6.256 DLL)
\r
333 Tue Feb 03 08:51:13 2009 Init User: (v3.632, 6.256 DLL)
\r
334 Tue Feb 03 09:06:00 2009 Init User: (v3.632, 6.256 DLL)
\r
335 Tue Feb 03 09:08:56 2009
\r
336 Tue Feb 03 09:08:56 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
337 Tue Feb 03 09:19:58 2009 Calib: Wvl1=5000.0 Ps=-30.3815±0.0024 Attn=1.0113±0.0003 As=128.281±0.008 Psi=18.577±0.018 Del=84.222±0.014 <I>=7.376, MSE=0.574 (1.11) Synch=166.248±0.039 [166.144,166.328]
\r
338 Tue Feb 03 09:19:58 2009 Calib: Wvl2=11770.0 Ps=-30.3815±0.0024 IrAttn=0.9737±0.0004 IrAs=126.047±0.009 IrPsi=7.387±0.003 IrDel=69.751±0.021 <I>=5.603 MSE=0.574 (1.11) Synch=164.000±0.039 [163.908,164.059]
\r
339 Tue Feb 03 09:19:58 2009 Calib: MSE=0.574 (1.113) AzOffset=-0.001±0.003326 ElOffset=0.017±0.002960 DP=0.142±0.097
\r
340 Tue Feb 03 10:08:45 2009 VASE File c:\wvase32\dat\2009.02.03.cw.dat
\r
341 Tue Feb 03 11:32:24 2009 RT File c:\wvase32\dat\2009.02.03.9b.rt.dat ni
\r
342 Tue Feb 03 12:13:10 2009 VASE File c:\wvase32\dat\2009.02.03.9b.dat ni
\r
343 Tue Feb 03 23:54:32 2009 VASE File c:\wvase32\dat\2009.02.03.9b.dat 9b
\r
344 Wed Feb 04 09:58:54 2009 Init User: rgb (v3.632, 6.256 DLL)
\r
345 Wed Feb 04 10:09:01 2009
\r
346 Wed Feb 04 10:09:01 2009 Calib: rvs=30, pts=60, span=60.0, aoi=70.000, t=1, d=3
\r
347 Wed Feb 04 10:20:03 2009 Calib: Wvl1=5000.0 Ps=-30.3751±0.0026 Attn=1.0109±0.0002 As=94.063±0.006 Psi=19.864±0.012 Del=114.679±0.024 <I>=6.295, MSE=0.442 (0.8) Synch=-121.813±0.066 [-122.018,-121.703]
\r
348 Wed Feb 04 10:20:04 2009 Calib: Wvl2=11770.0 Ps=-30.3751±0.0026 IrAttn=0.9731±0.0003 IrAs=91.836±0.008 IrPsi=9.843±0.002 IrDel=135.995±0.027 <I>=5.265 MSE=0.442 (0.8) Synch=-124.039±0.055 [-124.158,-123.941]
\r
349 Wed Feb 04 10:20:04 2009 Calib: MSE=0.442 (0.800) AzOffset=0.002±0.001943 ElOffset=0.029±0.003267 DP=0.066±0.073
\r
350 Wed Feb 04 11:11:45 2009 RT File c:\wvase32\dat\2009.02.04.15b.rt.dat ni
\r
351 Wed Feb 04 12:02:00 2009
\r
352 Wed Feb 04 12:02:00 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
353 Wed Feb 04 12:13:03 2009 Calib: Wvl1=5000.0 Ps=-30.3762±0.0022 Attn=1.0122±0.0003 As=93.932±0.007 Psi=18.484±0.016 Del=84.501±0.013 <I>=7.384, MSE=0.523 (0.982) Synch=-121.939±0.024 [-121.978,-121.892]
\r
354 Wed Feb 04 12:13:03 2009 Calib: Wvl2=11770.0 Ps=-30.3762±0.0022 IrAttn=0.9735±0.0003 IrAs=91.757±0.008 IrPsi=7.331±0.003 IrDel=69.847±0.019 <I>=5.540 MSE=0.523 (0.982) Synch=-124.171±0.055 [-124.274,-124.065]
\r
355 Wed Feb 04 12:13:03 2009 Calib: MSE=0.523 (0.982) AzOffset=-0.002±0.003004 ElOffset=0.022±0.002695 DP=0.071±0.087
\r
356 Wed Feb 04 12:29:18 2009 Init User: (v3.632, 6.256 DLL)
\r
357 Wed Feb 04 12:32:00 2009
\r
358 Wed Feb 04 12:32:00 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
359 Wed Feb 04 12:43:02 2009 Calib: Wvl1=5000.0 Ps=-30.3806±0.0024 Attn=1.0122±0.0003 As=163.871±0.008 Psi=18.570±0.018 Del=84.265±0.015 <I>=7.312, MSE=0.586 (1.11) Synch=22.035±0.025 [21.989,22.084]
\r
360 Wed Feb 04 12:43:02 2009 Calib: Wvl2=11770.0 Ps=-30.3806±0.0024 IrAttn=0.9737±0.0004 IrAs=161.677±0.009 IrPsi=7.372±0.003 IrDel=69.804±0.021 <I>=5.680 MSE=0.586 (1.11) Synch=19.787±0.049 [19.699,19.874]
\r
361 Wed Feb 04 12:43:02 2009 Calib: MSE=0.586 (1.107) AzOffset=-0.005±0.003389 ElOffset=0.024±0.003013 DP=0.116±0.099
\r
362 Wed Feb 04 13:29:42 2009 Init User: (v3.632, 6.256 DLL)
\r
363 Wed Feb 04 13:32:53 2009
\r
364 Wed Feb 04 13:32:53 2009 Calib: rvs=30, pts=60, span=60.0, aoi=70.000, t=1, d=3
\r
365 Wed Feb 04 13:43:55 2009 Calib: Wvl1=5000.0 Ps=-30.3992±0.0027 Attn=1.0114±0.0002 As=136.976±0.007 Psi=19.798±0.013 Del=114.922±0.026 <I>=7.214, MSE=0.492 (0.871) Synch=-27.110±0.024 [-27.152,-27.067]
\r
366 Wed Feb 04 13:43:56 2009 Calib: Wvl2=11770.0 Ps=-30.3992±0.0027 IrAttn=0.9737±0.0003 IrAs=134.739±0.009 IrPsi=9.808±0.003 IrDel=136.294±0.029 <I>=5.938 MSE=0.492 (0.871) Synch=-30.055±0.044 [-30.152,-29.981]
\r
367 Wed Feb 04 13:43:56 2009 Calib: MSE=0.492 (0.871) AzOffset=-0.006±0.002107 ElOffset=0.027±0.003562 DP=0.093±0.078
\r
368 Wed Feb 04 15:04:41 2009 VASE File c:\wvase32\dat\2009.02.04.ps1.dat
\r
369 Wed Feb 04 15:16:14 2009 RT File c:\wvase32\dat\2009.02.04.ps1.rt.dat
\r
370 Wed Feb 04 15:38:31 2009 RT File c:\wvase32\dat\2009.02.04.baseline.3-17.dat
\r
371 Wed Feb 04 16:34:52 2009 RT File c:\wvase32\dat\2009.02.04.ps1.rt.dat
\r
372 Wed Feb 04 17:07:39 2009 RT File c:\wvase32\dat\2009.02.04.ps1.rt2.dat
\r
373 Wed Feb 04 19:43:03 2009 VASE File c:\wvase32\dat\2009.02.04.ps1.2.dat
\r
374 Thu Feb 05 07:53:23 2009 VASE File c:\wvase32\dat\2009.02.04.ps1scan.dat
\r
375 Thu Feb 05 08:14:55 2009 Initializing Error: Could not establish communication with the DK monochromator.
\r
376 Thu Feb 05 08:15:14 2009 Initializing Error: MonoInitWait() DK
\r
377 Thu Feb 05 08:15:19 2009 SendMonoCmd Error: Monochromator Command Return Failed 31. DK
\r
378 Thu Feb 05 08:15:55 2009 GetMonoStatus Error: Mono Return Failed 27. rtn=1. DK
\r
379 Thu Feb 05 08:15:55 2009 d=01 cmd=255 00 00 00 00 00 00 00 00 00 00
\r
380 Thu Feb 05 08:15:55 2009 MonoCheck Error: Monochromator Communication Failed. DK
\r
381 Thu Feb 05 08:15:55 2009 Could Not Adjust Slit Width. DK
\r
383 Thu Feb 05 08:19:15 2009 Init User: (v3.698, 6.256 DLL)
\r
386 Thu Feb 05 08:23:30 2009 Init User: (v3.698, 6.256 DLL)
\r
388 Thu Feb 05 08:26:07 2009
\r
389 Thu Feb 05 08:26:07 2009 Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=3
\r
390 Thu Feb 05 08:30:37 2009 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
391 Thu Feb 05 08:30:39 2009 Coarse Calib: Wvl1=5000.0 Ps=-0.0003±0.0045 Attn=1.0110±0.0002 As=78.057±0.004 Psi=18.650±0.015 Del=84.089±0.013 <I>=12.456, MSE=1.16 (0.864)
\r
392 Thu Feb 05 08:30:40 2009 Coarse Calib: MSE=1.162 (0.864) AzOffset=0.010±0.002717 ElOffset=0.026±0.002434
\r
393 Thu Feb 05 08:36:14 2009
\r
394 Thu Feb 05 08:36:14 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
395 Thu Feb 05 08:45:33 2009 Calib: Wvl1=5000.0 Ps=-0.0032±0.0025 Attn=1.0113±0.0003 As=78.030±0.007 Psi=18.665±0.016 Del=84.099±0.014 <I>=7.233, MSE=1.72 (1.04) Synch=-121.970±0.022 [-122.027,-121.927] M1=0.013±0.0042 [0.0058,0.019]
\r
396 Thu Feb 05 08:45:34 2009 Calib: Wvl2=11770.0 Ps=-0.0032±0.0025 IrAttn=0.9734±0.0004 IrAs=75.819±0.009 IrPsi=7.392±0.003 IrDel=69.728±0.021 <I>=5.610 MSE=1.72 (1.04) Synch=-124.066±0.044 [-124.138,-124.005] M1=0.019±0.0045 [0.0074,0.024]
\r
397 Thu Feb 05 08:45:34 2009 Calib: MSE=1.716 (1.040) AzOffset=0.000±0.003049 ElOffset=-0.004±0.002730 DP=0.055±0.090
\r
398 Thu Feb 05 08:49:40 2009
\r
399 Thu Feb 05 08:49:40 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
400 Thu Feb 05 09:00:27 2009 Calib: Wvl1=5000.0 Ps=-0.0031±0.0025 Attn=1.0114±0.0003 As=77.996±0.007 Psi=18.661±0.016 Del=84.095±0.014 <I>=7.151, MSE=1.65 (1.03) Synch=-122.268±0.024 [-122.309,-122.232] M1=0.012±0.0043 [0.0054,0.019]
\r
401 Thu Feb 05 09:00:27 2009 Calib: Wvl2=11770.0 Ps=-0.0031±0.0025 IrAttn=0.9736±0.0003 IrAs=75.800±0.009 IrPsi=7.391±0.003 IrDel=69.721±0.021 <I>=5.638 MSE=1.65 (1.03) Synch=-124.379±0.043 [-124.461,-124.312] M1=0.018±0.0044 [0.0082,0.023]
\r
402 Thu Feb 05 09:00:27 2009 Calib: MSE=1.653 (1.028) AzOffset=-0.000±0.002938 ElOffset=-0.004±0.002630 DP=0.072±0.086
\r
403 Thu Feb 05 09:00:43 2009
\r
404 Thu Feb 05 09:00:43 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
405 Thu Feb 05 09:11:29 2009 Calib: Wvl1=5000.0 Ps=-0.0017±0.0024 Attn=1.0115±0.0002 As=77.989±0.007 Psi=18.659±0.016 Del=84.096±0.013 <I>=7.374, MSE=1.61 (0.967) Synch=-122.282±0.024 [-122.329,-122.241] M1=0.012±0.0043 [0.0049,0.019]
\r
406 Thu Feb 05 09:11:29 2009 Calib: Wvl2=11770.0 Ps=-0.0017±0.0024 IrAttn=0.9734±0.0003 IrAs=75.792±0.008 IrPsi=7.392±0.003 IrDel=69.719±0.020 <I>=5.755 MSE=1.61 (0.967) Synch=-124.407±0.049 [-124.489,-124.334] M1=0.018±0.0043 [0.0074,0.024]
\r
407 Thu Feb 05 09:11:30 2009 Calib: MSE=1.613 (0.967) AzOffset=-0.001±0.002866 ElOffset=0.014±0.002567 DP=0.083±0.084
\r
409 Thu Feb 05 09:45:20 2009 Init User: (v3.698, 6.256 DLL)
\r
411 Thu Feb 05 09:53:37 2009
\r
412 Thu Feb 05 09:53:37 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
413 Thu Feb 05 10:04:45 2009 Calib: Wvl1=5000.0 Ps=-0.0018±0.0028 Attn=1.0112±0.0003 As=93.572±0.008 Psi=18.454±0.018 Del=84.502±0.016 <I>=7.586, MSE=1.89 (1.12) Synch=-99.381±0.021 [-99.418,-99.348] M1=0.014±0.0032 [0.0095,0.02]
\r
414 Thu Feb 05 10:04:45 2009 Calib: Wvl2=11770.0 Ps=-0.0018±0.0028 IrAttn=0.9731±0.0004 IrAs=91.345±0.010 IrPsi=7.313±0.004 IrDel=69.777±0.024 <I>=5.794 MSE=1.89 (1.12) Synch=-102.213±0.079 [-102.417,-102.096] M1=0.022±0.0047 [0.011,0.034]
\r
415 Thu Feb 05 10:04:45 2009 Calib: MSE=1.890 (1.122) AzOffset=-0.007±0.003373 ElOffset=0.012±0.003043 DP=0.066±0.098
\r
416 Thu Feb 05 10:52:37 2009 RT File c:\wvase32\dat\2009.02.05.9b.rt.dat ni
\r
417 Thu Feb 05 11:36:31 2009 RT File c:\wvase32\dat\2009.02.05.9b.rt2.dat ni
\r
418 Thu Feb 05 13:49:02 2009 VASE File c:\wvase32\dat\2009.02.05.silane1e.dat
\r
419 Thu Feb 05 15:59:37 2009 RT File c:\wvase32\dat\2009.02.05.silane1e.rt.dat
\r
420 Thu Feb 05 17:25:36 2009 RT File c:\wvase32\dat\2009.02.05.11b.rt.dat
\r
421 Fri Feb 06 07:37:58 2009 VASE File c:\wvase32\dat\2009.02.05.ps+s+g-etched.dat
\r
423 Fri Feb 06 08:07:34 2009 Init User: (v3.698, 6.256 DLL)
\r
425 Fri Feb 06 08:11:31 2009
\r
426 Fri Feb 06 08:11:31 2009 Calib: rvs=30, pts=60, span=60.0, aoi=70.000, t=1, d=3
\r
427 Fri Feb 06 08:22:39 2009 Calib: Wvl1=5000.0 Ps=0.0010±0.0024 Attn=1.0105±0.0002 As=129.748±0.006 Psi=19.762±0.011 Del=115.018±0.022 <I>=6.676, MSE=1.31 (0.754) Synch=-27.352±0.044 [-27.437,-27.279] M1=0.014±0.003 [0.0085,0.019]
\r
428 Fri Feb 06 08:22:39 2009 Calib: Wvl2=11770.0 Ps=0.0010±0.0024 IrAttn=0.9734±0.0003 IrAs=127.515±0.008 IrPsi=9.770±0.002 IrDel=136.458±0.026 <I>=5.748 MSE=1.31 (0.754) Synch=-30.316±0.063 [-30.438,-30.209] M1=0.019±0.0045 [0.0097,0.026]
\r
429 Fri Feb 06 08:22:39 2009 Calib: MSE=1.306 (0.754) AzOffset=-0.001±0.001815 ElOffset=0.010±0.002976 DP=0.046±0.066
\r
430 Fri Feb 06 08:54:55 2009 VASE File c:\wvase32\dat\2009.02.06.cw.dat
\r
432 Fri Feb 06 09:04:51 2009 Init User: (v3.698, 6.256 DLL)
\r
435 Fri Feb 06 09:15:33 2009 Init User: (v3.698, 6.256 DLL)
\r
437 Fri Feb 06 09:23:04 2009
\r
438 Fri Feb 06 09:23:04 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
439 Fri Feb 06 09:34:11 2009 Calib: Wvl1=5000.0 Ps=-0.0017±0.0021 Attn=1.0114±0.0002 As=8.430±0.006 Psi=18.487±0.014 Del=84.430±0.012 <I>=7.006, MSE=1.46 (0.886) Synch=44.656±0.028 [44.602,44.699] M1=0.014±0.0047 [0.0065,0.022]
\r
440 Fri Feb 06 09:34:11 2009 Calib: Wvl2=11770.0 Ps=-0.0017±0.0021 IrAttn=0.9734±0.0003 IrAs=6.240±0.007 IrPsi=7.322±0.003 IrDel=69.769±0.018 <I>=5.810 MSE=1.46 (0.886) Synch=41.630±0.039 [41.542,41.702] M1=0.024±0.0058 [0.0095,0.031]
\r
441 Fri Feb 06 09:34:12 2009 Calib: MSE=1.456 (0.886) AzOffset=0.001±0.002599 ElOffset=0.006±0.002342 DP=0.091±0.075
\r
442 Fri Feb 06 10:05:17 2009 RT File c:\wvase32\dat\2009.02.06.baseline.dat baseline
\r
443 Fri Feb 06 11:06:35 2009 RT File c:\wvase32\dat\2009.02.06.silane.r.dat silane reflection
\r
444 Fri Feb 06 11:54:38 2009 VASE File c:\wvase32\dat\2009.02.06.silane.dat silane
\r
445 Fri Feb 06 20:23:57 2009 VASE File c:\wvase32\dat\2009.02.06.silane.dat silane
\r
447 Sat Feb 07 17:43:39 2009 Init User: mrg (v3.698, 6.256 DLL)
\r
450 Mon Feb 09 10:45:42 2009 Init User: (v3.698, 6.256 DLL)
\r
452 Mon Feb 09 11:00:17 2009
\r
453 Mon Feb 09 11:00:17 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
454 Mon Feb 09 11:11:23 2009 Calib: Wvl1=5000.0 Ps=0.0066±0.0025 Attn=1.0102±0.0003 As=37.204±0.007 Psi=18.889±0.016 Del=83.636±0.014 <I>=6.775, MSE=1.67 (0.993) Synch=165.955±0.036 [165.902,166.032] M1=0.012±0.0048 [0.0041,0.019]
\r
455 Mon Feb 09 11:11:24 2009 Calib: Wvl2=11770.0 Ps=0.0066±0.0025 IrAttn=0.9730±0.0003 IrAs=34.919±0.009 IrPsi=7.560±0.003 IrDel=69.885±0.021 <I>=5.495 MSE=1.67 (0.993) Synch=164.095±0.060 [163.897,164.173] M1=0.019±0.0038 [0.011,0.024]
\r
456 Mon Feb 09 11:11:24 2009 Calib: MSE=1.670 (0.993) AzOffset=0.000±0.002950 ElOffset=-0.006±0.002618 DP=0.120±0.088
\r
457 Tue Feb 10 15:44:34 2009 VASE File c:\wvase32\dat\2009.02.09.ps1.dat PS1
\r
459 Wed Feb 11 13:41:11 2009 Init User: mrg (v3.698, 6.256 DLL)
\r
462 Wed Feb 11 14:01:00 2009 Init User: mrg (v3.698, 6.256 DLL)
\r
465 Wed Feb 11 14:06:23 2009 Init User: mrg (v3.698, 6.256 DLL)
\r
468 Wed Feb 11 14:14:33 2009 Init User: mrg (v3.698, 6.256 DLL)
\r
470 Wed Feb 11 14:24:22 2009
\r
471 Wed Feb 11 14:24:22 2009 Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=3
\r
472 Wed Feb 11 14:26:28 2009 Insufficient intensity at too many points to perform calibration. 5000.0Å, det=0 (4, 3) (0.0002, 0.01)
\r
474 Wed Feb 11 14:38:24 2009 Init User: mrg (v3.698, 6.256 DLL)
\r
476 Wed Feb 11 14:57:00 2009 RT File c:\wvase32\dat\2009.02.11baseline.dat
\r
478 Wed Feb 11 14:58:19 2009 Init User: mrg (v3.698, 6.256 DLL)
\r
480 Wed Feb 11 15:12:33 2009 Warm Init
\r
481 Wed Feb 11 15:12:43 2009 Warm Init
\r
483 Wed Feb 11 15:19:57 2009 Init User: mrg (v3.698, 6.256 DLL)
\r
485 Wed Feb 11 15:25:42 2009
\r
486 Wed Feb 11 15:25:42 2009 Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=3
\r
487 Wed Feb 11 15:30:40 2009 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
488 Wed Feb 11 15:30:45 2009 Coarse Calib: Wvl1=5000.0 Ps=0.0141±0.0053 Attn=1.0124±0.0002 As=152.540±0.005 Psi=18.659±0.018 Del=84.093±0.016 <I>=33.201, MSE=1.46 (1.03)
\r
489 Wed Feb 11 15:30:45 2009 Coarse Calib: MSE=1.456 (1.035) AzOffset=0.003±0.003386 ElOffset=0.006±0.003031
\r
490 Wed Feb 11 15:30:57 2009
\r
491 Wed Feb 11 15:30:57 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
492 Wed Feb 11 15:40:16 2009 Calib: Wvl1=5000.0 Ps=0.0103±0.0027 Attn=1.0127±0.0003 As=152.577±0.009 Psi=18.659±0.020 Del=84.105±0.017 <I>=22.847, MSE=2.09 (1.19) Synch=161.172±0.012 [161.133,161.203] M1=0.0018±0.00057 [0.00071,0.0032]
\r
493 Wed Feb 11 15:40:17 2009 Calib: Wvl2=11770.0 Ps=0.0103±0.0027 IrAttn=0.9745±0.0004 IrAs=150.425±0.010 IrPsi=7.477±0.003 IrDel=69.752±0.023 <I>=11.539 MSE=2.09 (1.19) Synch=158.140±0.037 [158.070,158.199] M1=0.035±0.0073 [0.018,0.043]
\r
494 Wed Feb 11 15:40:17 2009 Calib: MSE=2.094 (1.186) AzOffset=0.003±0.003720 ElOffset=0.001±0.003331 DP=0.185±0.109
\r
495 Wed Feb 11 17:19:22 2009 VASE File c:\wvase32\dat\2009.02.11cal.dat
\r
497 Thu Feb 12 12:22:43 2009 Init User: mrg (v3.698, 6.256 DLL)
\r
499 Thu Feb 12 12:28:11 2009
\r
500 Thu Feb 12 12:28:11 2009 Calib: rvs=30, pts=60, span=60.0, aoi=85.000, t=1, d=3
\r
501 Thu Feb 12 12:28:30 2009 Auto Retarder Did Not Home: status=#0x0, i=0
\r
503 Thu Feb 12 12:29:28 2009 Init User: mrg (v3.698, 6.256 DLL)
\r
505 Thu Feb 12 12:29:51 2009
\r
506 Thu Feb 12 12:29:51 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
507 Thu Feb 12 12:32:06 2009 Insufficient intensity at too many points to perform calibration. 5000.0Å, det=0 (4, 3) (0.0002, 0.01)
\r
509 Thu Feb 12 12:43:56 2009 Init User: mrg (v3.698, 6.256 DLL)
\r
512 Thu Feb 12 12:49:31 2009 Init User: mrg (v3.698, 6.256 DLL)
\r
514 Thu Feb 12 12:55:27 2009
\r
515 Thu Feb 12 12:55:27 2009 Calib: rvs=30, pts=60, span=60.0, aoi=65.000, t=1, d=3
\r
516 Thu Feb 12 13:06:33 2009 Calib: Wvl1=5000.0 Ps=0.0053±0.0037 Attn=1.0123±0.0002 As=27.838±0.006 Psi=23.235±0.008 Del=134.438±0.028 <I>=23.542, MSE=1.2 (0.651) Synch=-173.412±0.014 [-173.441,-173.382] M1=0.0071±0.0023 [0.0038,0.01]
\r
517 Thu Feb 12 13:06:33 2009 Calib: Wvl2=11770.0 Ps=0.0053±0.0037 IrAttn=0.9747±0.0002 IrAs=25.653±0.009 IrPsi=16.030±0.003 IrDel=156.914±0.041 <I>=13.918 MSE=1.2 (0.651) Synch=-175.727±0.028 [-175.778,-175.681] M1=0.027±0.0086 [0.012,0.04]
\r
518 Thu Feb 12 13:06:34 2009 Calib: MSE=1.201 (0.651) AzOffset=0.021±0.001494 ElOffset=0.004±0.003776 DP=0.057±0.056
\r
519 Thu Feb 12 14:43:44 2009 VASE File c:\wvase32\dat\2009.02.12.ps1newlight.dat ps1
\r
520 Thu Feb 12 15:27:39 2009 VASE File c:\wvase32\dat\2009.02.12silane.dat silane
\r
521 Thu Feb 12 15:37:56 2009 VASE File c:\wvase32\dat\2009.02.12silane.dat silane
\r
523 Fri Feb 13 12:16:06 2009 Init User: mrg (v3.698, 6.256 DLL)
\r
526 Mon Feb 16 14:46:14 2009 Init User: mrg (v3.698, 6.256 DLL)
\r
529 Mon Feb 16 15:06:26 2009 Init User: mrg (v3.698, 6.256 DLL)
\r
532 Mon Feb 16 15:24:45 2009 Init User: mrg (v3.698, 6.256 DLL)
\r
534 Mon Feb 16 15:42:53 2009
\r
535 Mon Feb 16 15:42:53 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
536 Mon Feb 16 15:53:59 2009 Calib: Wvl1=5000.0 Ps=0.0067±0.0026 Attn=1.0118±0.0003 As=128.883±0.008 Psi=18.594±0.019 Del=84.243±0.016 <I>=19.013, MSE=1.95 (1.1) Synch=42.243±0.015 [42.217,42.272] M1=0.0046±0.00085 [0.0035,0.0069]
\r
537 Mon Feb 16 15:54:00 2009 Calib: Wvl2=11770.0 Ps=0.0067±0.0026 IrAttn=0.9740±0.0004 IrAs=126.702±0.010 IrPsi=7.392±0.003 IrDel=69.855±0.022 <I>=10.202 MSE=1.95 (1.1) Synch=40.047±0.035 [39.985,40.120] M1=0.034±0.0078 [0.016,0.042]
\r
538 Mon Feb 16 15:54:00 2009 Calib: MSE=1.950 (1.103) AzOffset=-0.008±0.003461 ElOffset=-0.023±0.003111 DP=0.089±0.101
\r
539 Mon Feb 16 18:16:23 2009 VASE File c:\wvase32\dat\2009.02.16ckt.dat ckt
\r
541 Fri Feb 20 10:45:14 2009 Init User: mrg (v3.698, 6.256 DLL)
\r
544 Fri Feb 20 10:54:25 2009 Init User: mrg (v3.698, 6.256 DLL)
\r
546 Fri Feb 20 10:55:10 2009
\r
547 Fri Feb 20 10:55:10 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
548 Fri Feb 20 11:02:57 2009
\r
549 Fri Feb 20 11:02:57 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
550 Fri Feb 20 11:14:03 2009 Calib: Wvl1=5000.0 Ps=0.0083±0.0065 Attn=1.0106±0.0005 As=129.267±0.014 Psi=18.767±0.029 Del=83.951±0.027 <I>=2.186, MSE=2.92 (2.58) Synch=-28.666±0.085 [-28.772,-28.486] M1=0.0037±0.00071 [0.0016,0.0055]
\r
551 Fri Feb 20 11:14:04 2009 Calib: Wvl2=11770.0 Ps=0.0083±0.0065 IrAttn=0.9723±0.0009 IrAs=127.017±0.018 IrPsi=7.462±0.011 IrDel=70.044±0.058 <I>=1.653 MSE=2.92 (2.58) Synch=-30.740±0.217 [-31.046,-30.114] M1=0.043±0.0093 [0.019,0.055]
\r
552 Fri Feb 20 11:14:04 2009 Calib: MSE=2.921 (2.584) AzOffset=-0.000±0.005271 ElOffset=-0.028±0.004713 DP=0.095±0.159
\r
553 Fri Feb 20 13:44:23 2009 VASE File c:\wvase32\dat\2009.02.20amsi.dat asi
\r
555 Fri Feb 20 14:05:15 2009 Init User: mrg (v3.698, 6.256 DLL)
\r
558 Fri Feb 20 15:20:20 2009 Init User: mrg (v3.698, 6.256 DLL)
\r
560 Fri Feb 20 15:25:12 2009
\r
561 Fri Feb 20 15:25:12 2009 Calib: rvs=30, pts=60, span=60.0, aoi=65.000, t=1, d=3
\r
562 Fri Feb 20 15:36:18 2009 Calib: Wvl1=5000.0 Ps=0.0356±0.0070 Attn=1.0114±0.0003 As=60.001±0.012 Psi=23.218±0.013 Del=134.725±0.047 <I>=2.343, MSE=1.92 (1.27) Synch=-100.571±0.059 [-100.658,-100.275] M1=0.0056±0.0015 [0.0032,0.0078]
\r
563 Fri Feb 20 15:36:19 2009 Calib: Wvl2=11770.0 Ps=0.0356±0.0070 IrAttn=0.9726±0.0006 IrAs=57.739±0.016 IrPsi=16.046±0.005 IrDel=157.169±0.092 <I>=2.147 MSE=1.92 (1.27) Synch=-102.880±0.031 [-102.943,-102.801] M1=0.054±0.016 [0.026,0.077]
\r
564 Fri Feb 20 15:36:19 2009 Calib: MSE=1.920 (1.268) AzOffset=0.004±0.002446 ElOffset=-0.014±0.006236 DP=0.061±0.094
\r
565 Fri Feb 20 19:11:42 2009 VASE File c:\wvase32\dat\2009.02.20asi2nd.dat asi2
\r
567 Mon Feb 23 14:00:35 2009 Init User: mrg (v3.698, 6.256 DLL)
\r
569 Mon Feb 23 14:06:28 2009
\r
570 Mon Feb 23 14:06:28 2009 Calib: rvs=30, pts=60, span=60.0, aoi=85.000, t=1, d=3
\r
571 Mon Feb 23 14:17:42 2009 Calib: Wvl1=5000.0 Ps=-0.0998±0.0230 Attn=1.0108±0.0004 As=94.387±0.030 Psi=32.107±0.011 Del=21.664±0.061 <I>=4.129, MSE=2.45 (1.34) Synch=-28.321±0.062 [-28.461,-28.245] M1=0.0084±0.0014 [0.0059,0.011]
\r
572 Mon Feb 23 14:17:43 2009 Calib: Wvl2=11770.0 Ps=-0.0998±0.0230 IrAttn=0.9729±0.0005 IrAs=92.136±0.036 IrPsi=29.269±0.011 IrDel=9.066±0.246 <I>=6.411 MSE=2.45 (1.34) Synch=-30.781±0.027 [-30.822,-30.716] M1=0.047±0.014 [0.028,0.074]
\r
573 Mon Feb 23 14:17:43 2009 Calib: MSE=2.447 (1.345) AzOffset=0.017±0.006753 ElOffset=-0.024±0.002957 DP=0.054±0.103
\r
574 Mon Feb 23 16:17:47 2009 VASE File c:\wvase32\dat\asi2009.02.23.dat asi
\r
576 Wed Feb 25 11:50:07 2009 Init User: mrg (v3.698, 6.256 DLL)
\r
578 Wed Feb 25 11:55:06 2009
\r
579 Wed Feb 25 11:55:06 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
580 Wed Feb 25 12:06:13 2009 Calib: Wvl1=5000.0 Ps=0.1031±0.0054 Attn=1.0108±0.0004 As=129.869±0.011 Psi=18.769±0.024 Del=84.024±0.022 <I>=2.043, MSE=2.44 (2.22) Synch=-120.518±0.010 [-120.545,-120.494] M1=0.003±0.0016 [0.00025,0.0051]
\r
581 Wed Feb 25 12:06:13 2009 Calib: Wvl2=11770.0 Ps=0.1031±0.0054 IrAttn=0.9729±0.0007 IrAs=127.585±0.015 IrPsi=7.453±0.009 IrDel=70.216±0.047 <I>=1.686 MSE=2.44 (2.22) Synch=-123.305±0.058 [-123.383,-123.129] M1=0.054±0.014 [0.018,0.069]
\r
582 Wed Feb 25 12:06:13 2009 Calib: MSE=2.441 (2.217) AzOffset=0.003±0.004420 ElOffset=-0.019±0.003954 DP=0.060±0.133
\r
583 Wed Feb 25 14:09:02 2009 VASE File c:\wvase32\dat\evp-glass25.02.2009.dat evp-glass
\r
584 Wed Feb 25 14:31:36 2009 Could Not Load vasecm32.dll.
\r
585 Error#1114=<A dynamic link library (DLL) initialization routine failed.
\r\r
587 Wed Feb 25 14:39:02 2009 SendMonoCmd Error: Monochromator Command Return Failed 31. DK
\r
588 Wed Feb 25 14:39:23 2009 GetMonoStatus Error: Mono Return Failed 27. rtn=1. DK
\r
589 Wed Feb 25 14:39:23 2009 d=01 cmd=0 00 3A 00 00 07 D0 00 18 00 00
\r
590 Wed Feb 25 14:39:23 2009 MonoCheck Error: Monochromator Communication Failed. DK
\r
591 Wed Feb 25 14:39:23 2009 Could Not Adjust Slit Width. DK
\r
593 Sat Feb 28 13:53:34 2009 Init User: mrg (v3.698, 6.256 DLL)
\r
595 Sat Feb 28 13:59:55 2009
\r
596 Sat Feb 28 13:59:55 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
597 Sat Feb 28 14:11:02 2009 Calib: Wvl1=5000.0 Ps=0.1527±0.0044 Attn=1.0108±0.0005 As=9.003±0.014 Psi=18.587±0.032 Del=84.226±0.027 <I>=19.120, MSE=3.33 (1.88) Synch=-30.776±0.073 [-30.900,-30.690] M1=0.0072±0.0016 [0.005,0.01]
\r
598 Sat Feb 28 14:11:03 2009 Calib: Wvl2=11770.0 Ps=0.1527±0.0044 IrAttn=0.9735±0.0006 IrAs=6.757±0.016 IrPsi=7.382±0.005 IrDel=69.732±0.037 <I>=11.028 MSE=3.33 (1.88) Synch=-33.290±0.041 [-33.340,-33.206] M1=0.017±0.0047 [0.0068,0.023]
\r
599 Sat Feb 28 14:11:03 2009 Calib: MSE=3.327 (1.879) AzOffset=-0.011±0.005907 ElOffset=0.014±0.005301 DP=0.068±0.172
\r
600 Sat Feb 28 16:15:15 2009 VASE File c:\wvase32\dat\paulni.dat paul ni
\r
602 Mon Mar 02 10:16:53 2009 Init User: mrg (v3.698, 6.256 DLL)
\r
604 Mon Mar 02 10:24:29 2009
\r
605 Mon Mar 02 10:24:29 2009 Calib: rvs=30, pts=60, span=60.0, aoi=65.000, t=1, d=3
\r
606 Mon Mar 02 10:35:36 2009 Calib: Wvl1=5000.0 Ps=0.2126±0.0083 Attn=1.0111±0.0004 As=131.625±0.014 Psi=23.175±0.015 Del=134.832±0.054 <I>=1.914, MSE=2.18 (1.5) Synch=-46.223±0.101 [-46.397,-46.061] M1=0.0017±0.00076 [0.00023,0.0038]
\r
607 Mon Mar 02 10:35:36 2009 Calib: Wvl2=11770.0 Ps=0.2126±0.0083 IrAttn=0.9704±0.0007 IrAs=129.289±0.018 IrPsi=16.026±0.006 IrDel=156.875±0.109 <I>=2.025 MSE=2.18 (1.5) Synch=-49.156±0.072 [-49.277,-48.982] M1=0.032±0.01 [0.014,0.044]
\r
608 Mon Mar 02 10:35:36 2009 Calib: MSE=2.185 (1.501) AzOffset=-0.016±0.002818 ElOffset=0.021±0.007203 DP=0.093±0.108
\r
609 Mon Mar 02 13:46:16 2009 VASE File c:\wvase32\dat\2009.03.02.nickelonglass.dat nionglass
\r
611 Wed Mar 04 15:31:23 2009 Init User: mrg (v3.698, 6.256 DLL)
\r
614 Wed Mar 04 15:37:18 2009 Init User: mrg (v3.698, 6.256 DLL)
\r
616 Wed Mar 04 15:40:53 2009
\r
617 Wed Mar 04 15:40:53 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
618 Wed Mar 04 15:52:00 2009 Calib: Wvl1=5000.0 Ps=0.0963±0.0023 Attn=1.0104±0.0003 As=56.872±0.007 Psi=18.551±0.016 Del=84.401±0.014 <I>=14.714, MSE=1.68 (0.951) Synch=4.332±0.010 [4.307,4.354] M1=0.011±0.0023 [0.0073,0.016]
\r
619 Wed Mar 04 15:52:00 2009 Calib: Wvl2=11770.0 Ps=0.0963±0.0023 IrAttn=0.9714±0.0003 IrAs=54.580±0.008 IrPsi=7.337±0.003 IrDel=70.037±0.020 <I>=7.745 MSE=1.68 (0.951) Synch=2.220±0.054 [2.063,2.292] M1=0.046±0.01 [0.02,0.058]
\r
620 Wed Mar 04 15:52:00 2009 Calib: MSE=1.678 (0.951) AzOffset=0.082±0.002978 ElOffset=-0.016±0.002643 DP=0.070±0.087
\r
621 Wed Mar 04 18:30:59 2009 VASE File c:\wvase32\dat\2009.03.04psetched1fourth.dat psnew
\r
623 Thu Mar 05 13:03:07 2009 Init User: mrg (v3.698, 6.256 DLL)
\r
625 Thu Mar 05 13:09:37 2009
\r
626 Thu Mar 05 13:09:37 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
627 Thu Mar 05 13:20:44 2009 Calib: Wvl1=5000.0 Ps=0.0786±0.0075 Attn=1.0107±0.0006 As=153.446±0.015 Psi=18.545±0.031 Del=84.339±0.029 <I>=1.799, MSE=3.06 (3.43) Synch=-48.157±0.033 [-48.246,-48.084] M1=0.0017±0.001 [6.8e-005,0.0055]
\r
628 Thu Mar 05 13:20:44 2009 Calib: Wvl2=11770.0 Ps=0.0786±0.0075 IrAttn=0.9711±0.0010 IrAs=151.089±0.020 IrPsi=7.372±0.013 IrDel=69.558±0.070 <I>=1.376 MSE=3.06 (3.43) Synch=-50.790±0.085 [-50.962,-50.503] M1=0.031±0.011 [0.019,0.057]
\r
629 Thu Mar 05 13:20:44 2009 Calib: MSE=3.064 (3.430) AzOffset=0.059±0.005617 ElOffset=-0.032±0.005035 DP=0.037±0.168
\r
630 Thu Mar 05 14:54:14 2009 VASE File c:\wvase32\dat\2009.03.05ps134.dat ps134
\r
632 Thu Mar 05 15:00:01 2009 Init User: mrg (v3.698, 6.256 DLL)
\r
634 Thu Mar 05 15:06:10 2009
\r
635 Thu Mar 05 15:06:10 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
636 Thu Mar 05 15:17:18 2009 Calib: Wvl1=5000.0 Ps=0.0765±0.0033 Attn=1.0131±0.0003 As=38.865±0.009 Psi=18.584±0.022 Del=84.334±0.019 <I>=10.866, MSE=2.29 (1.39) Synch=90.117±0.035 [90.046,90.180] M1=0.0024±0.00044 [0.0016,0.0035]
\r
637 Thu Mar 05 15:17:18 2009 Calib: Wvl2=11770.0 Ps=0.0765±0.0033 IrAttn=0.9719±0.0005 IrAs=36.624±0.012 IrPsi=7.366±0.004 IrDel=69.680±0.028 <I>=6.651 MSE=2.29 (1.39) Synch=87.473±0.029 [87.415,87.533] M1=0.038±0.0081 [0.019,0.046]
\r
638 Thu Mar 05 15:17:18 2009 Calib: MSE=2.291 (1.387) AzOffset=0.051±0.004070 ElOffset=-0.023±0.003645 DP=0.032±0.119
\r
639 Thu Mar 05 18:46:55 2009 VASE File c:\wvase32\dat\2009.03.05newps134.dat newps134
\r
641 Mon Mar 16 15:43:54 2009 Init User: \ (v3.698, 6.256 DLL)
\r
643 Mon Mar 16 16:06:40 2009
\r
644 Mon Mar 16 16:06:40 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
645 Mon Mar 16 16:17:47 2009 Calib: Wvl1=5000.0 Ps=0.0562±0.0028 Attn=1.0133±0.0003 As=78.628±0.008 Psi=18.741±0.020 Del=83.975±0.017 <I>=15.480, MSE=2.04 (1.19) Synch=86.350±0.046 [86.305,86.498] M1=0.0059±0.0016 [0.0035,0.0088]
\r
646 Mon Mar 16 16:17:47 2009 Calib: Wvl2=11770.0 Ps=0.0562±0.0028 IrAttn=0.9719±0.0004 IrAs=76.341±0.010 IrPsi=7.434±0.003 IrDel=69.913±0.023 <I>=9.212 MSE=2.04 (1.19) Synch=83.908±0.033 [83.835,83.955] M1=0.036±0.0089 [0.015,0.045]
\r
647 Mon Mar 16 16:17:48 2009 Calib: MSE=2.043 (1.193) AzOffset=0.046±0.003608 ElOffset=-0.040±0.003223 DP=0.136±0.107
\r
648 Mon Mar 16 16:52:39 2009 VASE File c:\wvase32\dat\16.03.09 calibration wafer.dat
\r
649 Tue Mar 17 00:48:15 2009 VASE File c:\wvase32\dat\16.03.09 ps 513888-21.dat ps
\r
651 Tue Mar 17 13:35:56 2009 Init User: mrg (v3.698, 6.256 DLL)
\r
653 Tue Mar 17 14:24:48 2009
\r
654 Tue Mar 17 14:24:48 2009 Calib: rvs=30, pts=60, span=60.0, aoi=85.000, t=1, d=3
\r
655 Tue Mar 17 14:35:53 2009 Calib: Wvl1=5000.0 Ps=0.0553±0.0140 Attn=1.0127±0.0002 As=67.968±0.018 Psi=32.302±0.006 Del=21.361±0.036 <I>=2.442, MSE=1.41 (0.801) Synch=169.650±0.020 [169.595,169.718] M1=0.0025±0.00093 [0.00032,0.0049]
\r
656 Tue Mar 17 14:35:54 2009 Calib: Wvl2=11770.0 Ps=0.0553±0.0140 IrAttn=0.9703±0.0003 IrAs=65.724±0.022 IrPsi=29.535±0.007 IrDel=8.820±0.149 <I>=4.705 MSE=1.41 (0.801) Synch=166.685±0.044 [166.573,166.743] M1=0.027±0.0067 [0.018,0.04]
\r
657 Tue Mar 17 14:35:54 2009 Calib: MSE=1.406 (0.801) AzOffset=0.025±0.003925 ElOffset=-0.032±0.001735 DP=0.007±0.061
\r
658 Tue Mar 17 14:46:18 2009 Low-level data acquisition timed out. #2
\r
659 Try re-initializing hardware.
\r
660 If problem returns, contact J.A.Woollam Co. or a representative.
\r
661 Tue Mar 17 14:46:40 2009 VASE File c:\wvase32\dat\2009.03.17psinewsample-21.dat ps-21
\r
663 Tue Mar 17 15:10:42 2009 Init User: mrg (v3.698, 6.256 DLL)
\r
666 Tue Mar 17 15:19:58 2009 Init User: mrg (v3.698, 6.256 DLL)
\r
668 Tue Mar 17 15:23:22 2009
\r
669 Tue Mar 17 15:23:22 2009 Calib: rvs=30, pts=60, span=60.0, aoi=65.000, t=1, d=3
\r
670 Tue Mar 17 15:34:28 2009 Calib: Wvl1=5000.0 Ps=-0.0091±0.0078 Attn=1.0134±0.0004 As=60.699±0.013 Psi=23.202±0.014 Del=134.782±0.050 <I>=1.708, MSE=2.03 (1.44) Synch=97.723±0.041 [97.553,97.846] M1=0.002±0.0012 [0.00013,0.0083]
\r
671 Tue Mar 17 15:34:28 2009 Calib: Wvl2=11770.0 Ps=-0.0091±0.0078 IrAttn=0.9716±0.0006 IrAs=58.453±0.017 IrPsi=16.019±0.006 IrDel=157.098±0.103 <I>=1.964 MSE=2.03 (1.44) Synch=94.746±0.045 [94.655,94.840] M1=0.023±0.0084 [0.0092,0.035]
\r
672 Tue Mar 17 15:34:28 2009 Calib: MSE=2.027 (1.442) AzOffset=0.049±0.002639 ElOffset=-0.014±0.006703 DP=0.002±0.102
\r
673 Tue Mar 17 18:41:08 2009 VASE File c:\wvase32\dat\2009.03.17psinewsample-21.dat ps21
\r
675 Wed Mar 18 13:43:02 2009 Init User: mrg (v3.698, 6.256 DLL)
\r
677 Wed Mar 18 13:53:38 2009
\r
678 Wed Mar 18 13:53:38 2009 Calib: rvs=30, pts=60, span=60.0, aoi=65.000, t=1, d=3
\r
679 Wed Mar 18 14:04:44 2009 Calib: Wvl1=5000.0 Ps=-0.0043±0.0065 Attn=1.0108±0.0003 As=120.095±0.011 Psi=23.224±0.012 Del=134.531±0.041 <I>=1.633, MSE=1.67 (1.19) Synch=-30.847±0.060 [-30.976,-30.742] M1=0.0018±0.00071 [0.00048,0.0036]
\r
680 Wed Mar 18 14:04:44 2009 Calib: Wvl2=11770.0 Ps=-0.0043±0.0065 IrAttn=0.9708±0.0005 IrAs=117.758±0.014 IrPsi=16.029±0.005 IrDel=156.989±0.087 <I>=1.848 MSE=1.67 (1.19) Synch=-33.244±0.024 [-33.318,-33.164] M1=0.031±0.0099 [0.012,0.044]
\r
681 Wed Mar 18 14:04:45 2009 Calib: MSE=1.666 (1.191) AzOffset=0.046±0.002168 ElOffset=-0.023±0.005483 DP=0.020±0.085
\r
682 Wed Mar 18 15:59:31 2009 VASE File c:\wvase32\dat\2009.03.18pss13888-21.dat ps21
\r
684 Wed Mar 18 16:03:18 2009 Init User: mrg (v3.698, 6.256 DLL)
\r
686 Wed Mar 18 16:08:20 2009
\r
687 Wed Mar 18 16:08:20 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
688 Wed Mar 18 16:19:27 2009 Calib: Wvl1=5000.0 Ps=-0.0217±0.0095 Attn=1.0133±0.0006 As=126.444±0.014 Psi=18.539±0.026 Del=84.010±0.030 <I>=0.663, MSE=2.18 (4.29) Synch=99.244±0.072 [99.085,99.437] M1=0.0034±0.0014 [0.00094,0.0079]
\r
689 Wed Mar 18 16:19:27 2009 Calib: Wvl2=11770.0 Ps=-0.0217±0.0095 IrAttn=0.9704±0.0011 IrAs=124.148±0.021 IrPsi=7.401±0.019 IrDel=69.059±0.089 <I>=0.617 MSE=2.18 (4.29) Synch=96.477±0.176 [96.062,97.102] M1=0.017±0.0043 [0.0074,0.036]
\r
690 Wed Mar 18 16:19:28 2009 Calib: MSE=2.183 (4.290) AzOffset=0.004±0.004788 ElOffset=-0.022±0.004272 DP=0.197±0.151
\r
691 Wed Mar 18 16:33:14 2009 RT File c:\wvase32\dat\2009.03.18psr&t.dat r and T
\r
692 Wed Mar 18 16:58:00 2009 RT File c:\wvase32\dat\2009.03.18.psr&t.dat r and T
\r
694 Thu Mar 19 11:41:48 2009 Init User: mrg (v3.698, 6.256 DLL)
\r
696 Thu Mar 19 12:08:14 2009
\r
697 Thu Mar 19 12:08:14 2009 Calib: rvs=30, pts=60, span=60.0, aoi=65.000, t=1, d=3
\r
698 Thu Mar 19 12:19:21 2009 Calib: Wvl1=5000.0 Ps=-0.0064±0.0101 Attn=1.0112±0.0005 As=71.271±0.016 Psi=23.206±0.017 Del=134.815±0.062 <I>=1.554, MSE=2.45 (1.76) Synch=-102.751±0.201 [-102.928,-102.153] M1=0.013±0.0034 [0.0069,0.018]
\r
699 Thu Mar 19 12:19:21 2009 Calib: Wvl2=11770.0 Ps=-0.0064±0.0101 IrAttn=0.9709±0.0009 IrAs=68.958±0.022 IrPsi=16.045±0.008 IrDel=157.169±0.146 <I>=1.491 MSE=2.45 (1.76) Synch=-105.493±0.037 [-105.568,-105.425] M1=0.052±0.015 [0.024,0.072]
\r
700 Thu Mar 19 12:19:21 2009 Calib: MSE=2.451 (1.760) AzOffset=0.051±0.003216 ElOffset=-0.030±0.008169 DP=0.095±0.125
\r
701 Thu Mar 19 16:48:38 2009 RT File c:\wvase32\dat\2009.03.20randt.dat randT
\r
703 Fri Mar 20 12:07:11 2009 Init User: mrg (v3.698, 6.256 DLL)
\r
705 Fri Mar 20 12:25:11 2009
\r
706 Fri Mar 20 12:25:11 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
707 Fri Mar 20 12:36:18 2009 Calib: Wvl1=5000.0 Ps=-0.0223±0.0068 Attn=1.0114±0.0004 As=147.355±0.011 Psi=18.743±0.020 Del=84.088±0.022 <I>=0.838, MSE=1.82 (3.7) Synch=-102.669±0.040 [-102.781,-102.582] M1=0.0027±0.0011 [0.00013,0.0077]
\r
708 Fri Mar 20 12:36:18 2009 Calib: Wvl2=11770.0 Ps=-0.0223±0.0068 IrAttn=0.9711±0.0009 IrAs=145.080±0.017 IrPsi=7.453±0.015 IrDel=69.773±0.069 <I>=0.658 MSE=1.82 (3.7) Synch=-105.446±0.172 [-106.323,-105.143] M1=0.012±0.0042 [0.0052,0.026]
\r
709 Fri Mar 20 12:36:19 2009 Calib: MSE=1.821 (3.696) AzOffset=0.050±0.003694 ElOffset=-0.027±0.003297 DP=0.091±0.117
\r
710 Fri Mar 20 12:52:21 2009 VASE File c:\wvase32\dat\200309 calibration.dat
\r
711 Fri Mar 20 14:59:38 2009 VASE File c:\wvase32\dat\200309 ps 5b888-22 n2 align in.dat \
\r
713 Fri Mar 20 17:05:55 2009 Init User: mrg (v3.698, 6.256 DLL)
\r
715 Fri Mar 20 17:18:32 2009
\r
716 Fri Mar 20 17:18:32 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
717 Fri Mar 20 17:29:40 2009 Calib: Wvl1=5000.0 Ps=-0.0499±0.0038 Attn=1.0133±0.0004 As=111.439±0.011 Psi=18.746±0.026 Del=83.965±0.022 <I>=10.492, MSE=2.67 (1.65) Synch=61.377±16.143 [45.241,77.732] M1=0.0013±0.001 [0.00026,0.0083]
\r
718 Fri Mar 20 17:29:40 2009 Calib: Wvl2=11770.0 Ps=-0.0499±0.0038 IrAttn=0.9715±0.0005 IrAs=109.194±0.014 IrPsi=7.454±0.005 IrDel=69.896±0.032 <I>=7.174 MSE=2.67 (1.65) Synch=42.392±0.039 [42.326,42.523] M1=0.036±0.0081 [0.016,0.045]
\r
719 Fri Mar 20 17:29:40 2009 Calib: MSE=2.675 (1.647) AzOffset=-0.019±0.004657 ElOffset=-0.086±0.004239 DP=0.085±0.140
\r
720 Sat Mar 21 12:02:34 2009 VASE File c:\wvase32\dat\200309- ps 5b888-22 align in.dat
\r
722 Sat Mar 21 12:07:55 2009 Init User: mrg (v3.698, 6.256 DLL)
\r
724 Sat Mar 21 12:12:54 2009
\r
725 Sat Mar 21 12:12:54 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
726 Sat Mar 21 12:24:02 2009 Calib: Wvl1=5000.0 Ps=-0.0555±0.0033 Attn=1.0133±0.0003 As=126.276±0.009 Psi=18.758±0.022 Del=83.910±0.019 <I>=9.274, MSE=2.3 (1.52) Synch=-71.885±0.033 [-71.958,-71.821] M1=0.0012±0.0004 [0.00039,0.0021]
\r
727 Sat Mar 21 12:24:02 2009 Calib: Wvl2=11770.0 Ps=-0.0555±0.0033 IrAttn=0.9715±0.0005 IrAs=124.034±0.012 IrPsi=7.464±0.004 IrDel=69.791±0.028 <I>=6.648 MSE=2.3 (1.52) Synch=-74.726±0.036 [-74.816,-74.595] M1=0.037±0.0084 [0.017,0.045]
\r
728 Sat Mar 21 12:24:02 2009 Calib: MSE=2.301 (1.520) AzOffset=0.027±0.004083 ElOffset=-0.004±0.003638 DP=0.098±0.121
\r
729 Sat Mar 21 14:02:03 2009 VASE File c:\wvase32\dat\210309 ps 513888-21 n2 align in.dat
\r
730 Sat Mar 21 14:03:41 2009 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
731 Sun Mar 22 12:54:16 2009 VASE File c:\wvase32\dat\210309 ps 513888-21 n2 align in dynamic.dat
\r
732 Sun Mar 22 13:00:08 2009
\r
733 Sun Mar 22 13:00:08 2009 Calib: rvs=30, pts=60, span=60.0, aoi=65.000, t=1, d=3
\r
734 Sun Mar 22 13:11:12 2009 Warning: Possible loss of data-stream synchronization detected.
\r
735 first(last),id=0(59), det#0(#0) Was=-71.885(-71.885). Is=-88.143(-88.151). Wvl=5000.0(5000.0), Ang=65.00(65.00), DC=13.6668(13.9645), P=-30.06(29.95), X=0.00(0.00), Y=0.00(0.00)
\r
736 Sun Mar 22 13:11:15 2009 Calib: Wvl1=5000.0 Ps=-0.0487±0.0033 Attn=1.0134±0.0002 As=126.218±0.006 Psi=23.274±0.007 Del=134.161±0.025 <I>=13.304, MSE=1.07 (0.582) Synch=-88.155±0.010 [-88.175,-88.138] M1=0.004±0.00078 [0.003,0.0059]
\r
737 Sun Mar 22 13:11:15 2009 Calib: Wvl2=11770.0 Ps=-0.0487±0.0033 IrAttn=0.9718±0.0002 IrAs=124.001±0.008 IrPsi=16.042±0.002 IrDel=156.704±0.036 <I>=11.441 MSE=1.07 (0.582) Synch=-90.998±0.025 [-91.037,-90.950] M1=0.025±0.0084 [0.012,0.038]
\r
738 Sun Mar 22 13:11:15 2009 Calib: MSE=1.070 (0.582) AzOffset=0.022±0.001330 ElOffset=0.015±0.003339 DP=0.087±0.051
\r
739 Sun Mar 22 16:28:00 2009 VASE File c:\wvase32\dat\220309ps 513888-19 pg align in.dat
\r
741 Mon Mar 23 10:22:31 2009 Init User: mrg (v3.698, 6.256 DLL)
\r
743 Mon Mar 23 10:27:08 2009
\r
744 Mon Mar 23 10:27:08 2009 Calib: rvs=30, pts=60, span=60.0, aoi=85.000, t=1, d=3
\r
745 Mon Mar 23 10:38:14 2009 Calib: Wvl1=5000.0 Ps=-0.1042±0.0143 Attn=1.0112±0.0002 As=86.167±0.019 Psi=32.141±0.007 Del=21.567±0.038 <I>=2.895, MSE=1.5 (0.831) Synch=41.366±0.011 [41.340,41.394] M1=0.0018±0.00076 [0.00016,0.0029]
\r
746 Mon Mar 23 10:38:15 2009 Calib: Wvl2=11770.0 Ps=-0.1042±0.0143 IrAttn=0.9707±0.0003 IrAs=83.900±0.022 IrPsi=29.380±0.007 IrDel=8.836±0.155 <I>=6.143 MSE=1.5 (0.831) Synch=38.645±0.022 [38.601,38.695] M1=0.023±0.0049 [0.015,0.029]
\r
747 Mon Mar 23 10:38:15 2009 Calib: MSE=1.496 (0.831) AzOffset=0.034±0.004168 ElOffset=-0.011±0.001829 DP=0.022±0.064
\r
748 Mon Mar 23 11:48:49 2009 RT File c:\wvase32\dat\230309ps513888-22n2rtalignout.dat
\r
749 Mon Mar 23 14:43:51 2009 Could Not Load vasecm32.dll.
\r
750 Error#1114=<A dynamic link library (DLL) initialization routine failed.
\r\r
752 Mon Mar 23 14:44:02 2009 SendMonoCmd Error: Monochromator Command Return Failed 31. DK
\r
753 Mon Mar 23 14:44:22 2009 GetMonoStatus Error: Mono Return Failed 27. rtn=1. DK
\r
754 Mon Mar 23 14:44:22 2009 d=01 cmd=0 00 0A 00 00 07 D0 00 18 00 00
\r
755 Mon Mar 23 14:44:22 2009 MonoCheck Error: Monochromator Communication Failed. DK
\r
756 Mon Mar 23 14:44:22 2009 Could Not Adjust Slit Width. DK
\r
757 Mon Mar 23 14:50:48 2009 Initializing Error: Could not establish communication with the DK monochromator.
\r
758 Mon Mar 23 14:52:38 2009 Initializing Error: MonoInitWait() DK
\r
759 Mon Mar 23 14:52:43 2009 SendMonoCmd Error: Monochromator Command Return Failed 31. DK
\r
761 Mon Mar 23 14:56:45 2009 Init User: mrg (v3.698, 6.256 DLL)
\r
763 Mon Mar 23 15:09:04 2009
\r
764 Mon Mar 23 15:09:04 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
765 Mon Mar 23 15:20:12 2009 Calib: Wvl1=5000.0 Ps=-0.1171±0.0021 Attn=1.0131±0.0002 As=69.748±0.006 Psi=18.754±0.015 Del=83.918±0.013 <I>=15.325, MSE=1.53 (0.888) Synch=-30.561±0.045 [-30.635,-30.485] M1=0.011±0.0036 [0.0046,0.017]
\r
766 Mon Mar 23 15:20:12 2009 Calib: Wvl2=11770.0 Ps=-0.1171±0.0021 IrAttn=0.9727±0.0003 IrAs=67.517±0.008 IrPsi=7.468±0.003 IrDel=69.884±0.017 <I>=9.105 MSE=1.53 (0.888) Synch=-33.275±0.026 [-33.320,-33.218] M1=0.02±0.0034 [0.013,0.024]
\r
767 Mon Mar 23 15:20:12 2009 Calib: MSE=1.525 (0.888) AzOffset=0.032±0.002705 ElOffset=-0.000±0.002409 DP=0.146±0.080
\r
768 Mon Mar 23 15:48:37 2009 VASE File c:\wvase32\dat\2009.03.23.dat ni 20a 30min
\r
769 Mon Mar 23 16:49:06 2009 VASE File c:\wvase32\dat\2009.03.23 ni 20a 30 min.dat ni 20a 30min
\r
771 Tue Mar 24 10:05:27 2009 Init User: mrg (v3.698, 6.256 DLL)
\r
774 Tue Mar 24 10:15:05 2009 Init User: mrg (v3.698, 6.256 DLL)
\r
776 Tue Mar 24 10:28:49 2009
\r
777 Tue Mar 24 10:28:49 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
778 Tue Mar 24 10:39:56 2009 Calib: Wvl1=5000.0 Ps=-0.1249±0.0034 Attn=1.0109±0.0004 As=169.493±0.010 Psi=18.811±0.023 Del=83.810±0.020 <I>=11.243, MSE=2.44 (1.37) Synch=34.215±0.028 [34.172,34.325] M1=0.0036±0.0015 [0.00031,0.0062]
\r
779 Tue Mar 24 10:39:56 2009 Calib: Wvl2=11770.0 Ps=-0.1249±0.0034 IrAttn=0.9722±0.0005 IrAs=167.232±0.012 IrPsi=7.475±0.004 IrDel=69.855±0.028 <I>=7.941 MSE=2.44 (1.37) Synch=31.595±0.042 [31.521,31.662] M1=0.03±0.0068 [0.015,0.038]
\r
780 Tue Mar 24 10:39:57 2009 Calib: MSE=2.441 (1.366) AzOffset=0.028±0.004315 ElOffset=-0.002±0.003836 DP=0.129±0.128
\r
781 Tue Mar 24 13:37:23 2009 VASE File c:\wvase32\dat\2009.03.24 15 mins 20 na ni.dat
\r
782 Tue Mar 24 14:51:01 2009
\r
783 Tue Mar 24 14:51:01 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
784 Tue Mar 24 15:02:07 2009 Calib: Wvl1=5000.0 Ps=-0.1210±0.0083 Attn=1.0133±0.0005 As=169.243±0.012 Psi=18.800±0.024 Del=83.904±0.026 <I>=0.757, MSE=2.06 (4.79) Synch=34.401±0.050 [34.299,34.555] M1=0.0026±0.0014 [0.00021,0.0072]
\r
785 Tue Mar 24 15:02:08 2009 Calib: Wvl2=11770.0 Ps=-0.1210±0.0083 IrAttn=0.9717±0.0011 IrAs=167.058±0.020 IrPsi=7.476±0.017 IrDel=69.806±0.082 <I>=0.616 MSE=2.06 (4.79) Synch=31.514±0.123 [31.148,31.843] M1=0.012±0.0046 [0.00061,0.03]
\r
786 Tue Mar 24 15:02:08 2009 Calib: MSE=2.064 (4.791) AzOffset=0.023±0.004309 ElOffset=-0.007±0.003839 DP=0.146±0.137
\r
787 Tue Mar 24 17:50:44 2009 VASE File c:\wvase32\dat\2009.03.24 513888-21 n2 align in.dat
\r
788 Tue Mar 24 18:40:15 2009 RT File c:\wvase32\dat\2009.03.24 513888-21 n2 align in rt.dat
\r
789 Wed Mar 25 09:25:07 2009
\r
790 Wed Mar 25 09:25:07 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
791 Wed Mar 25 09:36:14 2009 Calib: Wvl1=5000.0 Ps=-0.1293±0.0022 Attn=1.0136±0.0002 As=169.264±0.007 Psi=18.795±0.015 Del=83.912±0.013 <I>=10.897, MSE=1.6 (0.945) Synch=34.308±0.023 [34.269,34.351] M1=0.0022±0.0007 [0.00086,0.0036]
\r
792 Wed Mar 25 09:36:14 2009 Calib: Wvl2=11770.0 Ps=-0.1293±0.0022 IrAttn=0.9721±0.0003 IrAs=167.051±0.008 IrPsi=7.469±0.003 IrDel=70.036±0.018 <I>=8.096 MSE=1.6 (0.945) Synch=31.456±0.035 [31.399,31.527] M1=0.034±0.0081 [0.015,0.043]
\r
793 Wed Mar 25 09:36:15 2009 Calib: MSE=1.600 (0.945) AzOffset=0.027±0.002835 ElOffset=0.002±0.002525 DP=0.155±0.084
\r
794 Wed Mar 25 12:15:38 2009 VASE File c:\wvase32\dat\250309 - 513888-22 n2 align in.dat
\r
795 Wed Mar 25 14:25:21 2009 RT File c:\wvase32\dat\250309 - 513888-22 n2 align in rt.dat
\r
796 Wed Mar 25 16:01:05 2009 RT File c:\wvase32\dat\250309 - 513888-22 n2 align in rt 2nd scan.dat
\r
798 Thu Mar 26 12:17:47 2009 Init User: mrg (v3.698, 6.256 DLL)
\r
800 Thu Mar 26 12:22:36 2009
\r
801 Thu Mar 26 12:22:36 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
802 Thu Mar 26 12:33:44 2009 Calib: Wvl1=5000.0 Ps=-0.2092±0.0024 Attn=1.0128±0.0003 As=69.266±0.007 Psi=18.776±0.016 Del=83.913±0.014 <I>=10.207, MSE=1.71 (0.999) Synch=97.303±0.025 [97.264,97.340] M1=0.0027±0.0013 [0.00067,0.0047]
\r
803 Thu Mar 26 12:33:45 2009 Calib: Wvl2=11770.0 Ps=-0.2092±0.0024 IrAttn=0.9729±0.0003 IrAs=67.060±0.009 IrPsi=7.454±0.003 IrDel=69.980±0.020 <I>=7.504 MSE=1.71 (0.999) Synch=94.644±0.043 [94.560,94.712] M1=0.04±0.01 [0.015,0.05]
\r
804 Thu Mar 26 12:33:45 2009 Calib: MSE=1.705 (0.999) AzOffset=0.032±0.003022 ElOffset=0.002±0.002691 DP=0.139±0.089
\r
805 Thu Mar 26 16:42:52 2009 VASE File c:\wvase32\dat\260309 513888-23 pg align in.dat
\r
807 Fri Mar 27 12:32:27 2009 Init User: mrg (v3.698, 6.256 DLL)
\r
809 Fri Mar 27 12:53:05 2009
\r
810 Fri Mar 27 12:53:05 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
811 Fri Mar 27 13:04:11 2009 Calib: Wvl1=5000.0 Ps=-0.2206±0.0028 Attn=1.0130±0.0003 As=111.001±0.008 Psi=18.765±0.019 Del=83.901±0.017 <I>=9.660, MSE=1.98 (1.22) Synch=-78.919±0.043 [-79.096,-78.875] M1=0.0015±0.00045 [0.0008,0.0025]
\r
812 Fri Mar 27 13:04:12 2009 Calib: Wvl2=11770.0 Ps=-0.2206±0.0028 IrAttn=0.9729±0.0004 IrAs=108.763±0.010 IrPsi=7.457±0.003 IrDel=69.846±0.023 <I>=7.395 MSE=1.98 (1.22) Synch=-81.592±0.033 [-81.650,-81.520] M1=0.034±0.0075 [0.018,0.042]
\r
813 Fri Mar 27 13:04:12 2009 Calib: MSE=1.983 (1.217) AzOffset=0.028±0.003518 ElOffset=0.001±0.003133 DP=0.162±0.104
\r
814 Fri Mar 27 15:14:17 2009 VASE File c:\wvase32\dat\270309 513888-24 pg align in.dat
\r
816 Mon Mar 30 12:51:30 2009 Init User: mrg (v3.698, 6.256 DLL)
\r
818 Mon Mar 30 12:56:28 2009
\r
819 Mon Mar 30 12:56:28 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
820 Mon Mar 30 13:07:35 2009 Calib: Wvl1=5000.0 Ps=-0.2293±0.0047 Attn=1.0111±0.0003 As=78.262±0.008 Psi=18.833±0.015 Del=83.699±0.016 <I>=0.958, MSE=1.44 (1.98) Synch=-102.471±0.051 [-102.560,-102.345] M1=0.0021±0.00076 [0.00032,0.0036]
\r
821 Mon Mar 30 13:07:35 2009 Calib: Wvl2=11770.0 Ps=-0.2293±0.0047 IrAttn=0.9720±0.0006 IrAs=75.976±0.011 IrPsi=7.509±0.008 IrDel=69.547±0.040 <I>=0.997 MSE=1.44 (1.98) Synch=-105.126±0.112 [-105.467,-104.763] M1=0.025±0.0046 [0.011,0.032]
\r
822 Mon Mar 30 13:07:35 2009 Calib: MSE=1.440 (1.975) AzOffset=0.004±0.002836 ElOffset=-0.016±0.002518 DP=0.151±0.089
\r
823 Mon Mar 30 16:06:36 2009 VASE File c:\wvase32\dat\300309 - 513888-19 n2 align in.dat
\r
824 Mon Mar 30 17:34:46 2009 RT File c:\wvase32\dat\300309 - 513888-19 n2 align in rt.dat
\r
826 Tue Mar 31 13:31:14 2009 Init User: mrg (v3.698, 6.256 DLL)
\r
828 Tue Mar 31 14:30:32 2009
\r
829 Tue Mar 31 14:30:32 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
830 Tue Mar 31 14:41:39 2009 Calib: Wvl1=5000.0 Ps=-0.2380±0.0056 Attn=1.0126±0.0004 As=138.706±0.011 Psi=18.835±0.021 Del=83.860±0.021 <I>=1.363, MSE=2.1 (2.38) Synch=-102.375±0.024 [-102.423,-102.293] M1=0.0014±0.00075 [0.00017,0.0044]
\r
831 Tue Mar 31 14:41:39 2009 Calib: Wvl2=11770.0 Ps=-0.2380±0.0056 IrAttn=0.9721±0.0007 IrAs=136.442±0.014 IrPsi=7.500±0.009 IrDel=69.869±0.047 <I>=1.360 MSE=2.1 (2.38) Synch=-105.078±0.083 [-105.299,-104.765] M1=0.02±0.0036 [0.015,0.038]
\r
832 Tue Mar 31 14:41:39 2009 Calib: MSE=2.095 (2.383) AzOffset=0.023±0.003917 ElOffset=-0.006±0.003487 DP=0.093±0.121
\r
833 Tue Mar 31 17:28:11 2009 VASE File c:\wvase32\dat\310309 green gold sample 1.dat
\r
834 Tue Mar 31 18:41:05 2009 RT File c:\wvase32\dat\310309 green gold sample 1 rt.dat
\r
836 Wed Apr 01 14:50:31 2009 Init User: mrg (v3.698, 6.256 DLL)
\r
838 Wed Apr 01 14:56:14 2009
\r
839 Wed Apr 01 14:56:14 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
840 Wed Apr 01 15:07:22 2009 Calib: Wvl1=5000.0 Ps=-0.2530±0.0026 Attn=1.0116±0.0003 As=60.711±0.008 Psi=18.811±0.018 Del=83.809±0.016 <I>=9.556, MSE=1.86 (1.1) Synch=25.251±0.024 [25.201,25.288] M1=0.0022±0.00044 [0.0011,0.0035]
\r
841 Wed Apr 01 15:07:22 2009 Calib: Wvl2=11770.0 Ps=-0.2530±0.0026 IrAttn=0.9722±0.0004 IrAs=58.424±0.009 IrPsi=7.475±0.003 IrDel=69.890±0.022 <I>=7.172 MSE=1.86 (1.1) Synch=22.665±0.037 [22.601,22.754] M1=0.042±0.0092 [0.021,0.052]
\r
842 Wed Apr 01 15:07:22 2009 Calib: MSE=1.857 (1.105) AzOffset=0.027±0.003286 ElOffset=-0.006±0.002922 DP=0.139±0.097
\r
843 Wed Apr 01 19:03:20 2009 VASE File c:\wvase32\dat\010309 porous gold sample 3.dat
\r
845 Thu Apr 02 11:17:49 2009 Init User: mrg (v3.698, 6.256 DLL)
\r
847 Thu Apr 02 11:22:36 2009
\r
848 Thu Apr 02 11:22:36 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
849 Thu Apr 02 11:33:44 2009 Calib: Wvl1=5000.0 Ps=-0.2658±0.0028 Attn=1.0107±0.0003 As=120.641±0.008 Psi=18.828±0.019 Del=83.697±0.017 <I>=9.738, MSE=1.98 (1.14) Synch=25.227±0.031 [25.155,25.282] M1=0.005±0.0006 [0.0038,0.0069]
\r
850 Thu Apr 02 11:33:44 2009 Calib: Wvl2=11770.0 Ps=-0.2658±0.0028 IrAttn=0.9713±0.0004 IrAs=118.306±0.010 IrPsi=7.481±0.004 IrDel=69.797±0.023 <I>=6.965 MSE=1.98 (1.14) Synch=22.661±0.037 [22.598,22.730] M1=0.048±0.011 [0.024,0.06]
\r
851 Thu Apr 02 11:33:44 2009 Calib: MSE=1.977 (1.141) AzOffset=0.048±0.003498 ElOffset=-0.005±0.003094 DP=0.187±0.104
\r
852 Thu Apr 02 22:46:13 2009 VASE File c:\wvase32\dat\020409 513888-25 pg.dat
\r
854 Fri Apr 03 11:31:01 2009 Init User: mrg (v3.698, 6.256 DLL)
\r
856 Fri Apr 03 11:51:56 2009
\r
857 Fri Apr 03 11:51:56 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
858 Fri Apr 03 12:03:03 2009 Calib: Wvl1=5000.0 Ps=-0.2750±0.0031 Attn=1.0111±0.0003 As=41.954±0.009 Psi=18.905±0.021 Del=83.663±0.018 <I>=8.841, MSE=2.18 (1.35) Synch=-102.539±0.032 [-102.594,-102.494] M1=0.0022±0.00047 [0.0015,0.0034]
\r
859 Fri Apr 03 12:03:03 2009 Calib: Wvl2=11770.0 Ps=-0.2750±0.0031 IrAttn=0.9717±0.0004 IrAs=39.693±0.011 IrPsi=7.520±0.004 IrDel=69.893±0.026 <I>=6.685 MSE=2.18 (1.35) Synch=-105.231±0.038 [-105.304,-105.174] M1=0.04±0.0088 [0.019,0.05]
\r
860 Fri Apr 03 12:03:03 2009 Calib: MSE=2.182 (1.346) AzOffset=0.058±0.003850 ElOffset=-0.001±0.003396 DP=0.141±0.115
\r
861 Fri Apr 03 16:06:29 2009 VASE File c:\wvase32\dat\040409 calibration.dat
\r
862 Fri Apr 03 16:57:31 2009 RT File c:\wvase32\dat\040409 calibration rt.dat
\r
863 Fri Apr 03 17:25:27 2009 RT File c:\wvase32\dat\040409 calibration rt-2.dat
\r
865 Sat Apr 04 13:17:06 2009 Init User: mrg (v3.698, 6.256 DLL)
\r
867 Sat Apr 04 13:41:29 2009
\r
868 Sat Apr 04 13:41:29 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
869 Sat Apr 04 13:52:35 2009 Calib: Wvl1=5000.0 Ps=-0.2857±0.0027 Attn=1.0115±0.0003 As=59.522±0.008 Psi=18.867±0.019 Del=83.687±0.016 <I>=9.790, MSE=1.94 (1.14) Synch=113.641±0.028 [113.578,113.699] M1=0.0045±0.0017 [0.002,0.0068]
\r
870 Sat Apr 04 13:52:36 2009 Calib: Wvl2=11770.0 Ps=-0.2857±0.0027 IrAttn=0.9718±0.0004 IrAs=57.260±0.010 IrPsi=7.487±0.003 IrDel=69.917±0.023 <I>=7.251 MSE=1.94 (1.14) Synch=110.883±0.045 [110.793,110.946] M1=0.045±0.012 [0.018,0.058]
\r
871 Sat Apr 04 13:52:36 2009 Calib: MSE=1.939 (1.136) AzOffset=0.053±0.003427 ElOffset=0.005±0.003027 DP=0.152±0.102
\r
872 Sat Apr 04 15:17:30 2009 VASE File c:\wvase32\dat\040409513888-23pg si edge align in.dat
\r
873 Sat Apr 04 16:19:55 2009 RT File c:\wvase32\dat\040409513888-23pg si edge align in rt.dat
\r
874 Sat Apr 04 19:35:36 2009 VASE File c:\wvase32\dat\040409 glass slide align in.dat
\r
876 Sun Apr 05 12:58:49 2009 Init User: mrg (v3.698, 6.256 DLL)
\r
878 Sun Apr 05 13:05:49 2009
\r
879 Sun Apr 05 13:05:49 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
880 Sun Apr 05 13:16:55 2009 Calib: Wvl1=5000.0 Ps=-0.2989±0.0030 Attn=1.0106±0.0003 As=150.756±0.009 Psi=19.040±0.020 Del=83.499±0.018 <I>=11.684, MSE=2.13 (1.24) Synch=9.039±0.042 [8.967,9.117] M1=0.015±0.0045 [0.0084,0.023]
\r
881 Sun Apr 05 13:16:56 2009 Calib: Wvl2=11770.0 Ps=-0.2989±0.0030 IrAttn=0.9719±0.0004 IrAs=148.412±0.011 IrPsi=7.556±0.004 IrDel=70.056±0.024 <I>=7.969 MSE=2.13 (1.24) Synch=6.457±0.050 [6.347,6.534] M1=0.029±0.007 [0.013,0.038]
\r
882 Sun Apr 05 13:16:56 2009 Calib: MSE=2.131 (1.239) AzOffset=0.067±0.003737 ElOffset=0.003±0.003280 DP=-0.025±0.113
\r
883 Sun Apr 05 15:15:29 2009 VASE File c:\wvase32\dat\050409 glass slide align out.dat
\r
884 Sun Apr 05 18:43:26 2009 RT File c:\wvase32\dat\050409 glass slide align out rt.dat
\r
886 Mon Apr 06 10:39:09 2009 Init User: mrg (v3.698, 6.256 DLL)
\r
888 Mon Apr 06 09:44:37 2009
\r
889 Mon Apr 06 09:44:37 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
890 Mon Apr 06 09:55:46 2009 Calib: Wvl1=5000.0 Ps=-0.3079±0.0029 Attn=1.0118±0.0003 As=0.873±0.009 Psi=19.039±0.020 Del=83.383±0.018 <I>=9.607, MSE=2.09 (1.23) Synch=-46.768±0.022 [-46.817,-46.724] M1=0.0049±0.001 [0.0035,0.0072]
\r
891 Mon Apr 06 09:55:46 2009 Calib: Wvl2=11770.0 Ps=-0.3079±0.0029 IrAttn=0.9715±0.0004 IrAs=178.578±0.011 IrPsi=7.583±0.004 IrDel=69.946±0.024 <I>=7.364 MSE=2.09 (1.23) Synch=-49.400±0.039 [-49.472,-49.313] M1=0.04±0.0097 [0.016,0.05]
\r
892 Mon Apr 06 09:55:46 2009 Calib: MSE=2.090 (1.234) AzOffset=0.062±0.003679 ElOffset=0.001±0.003226 DP=0.167±0.111
\r
893 Mon Apr 06 11:36:40 2009 VASE File c:\wvase32\dat\060409 glass slide roughened back align out.dat
\r
894 Mon Apr 06 13:30:44 2009 VASE File c:\wvase32\dat\060409 ni 21 na 15 mins align in.dat
\r
895 Mon Apr 06 15:04:13 2009 RT File c:\wvase32\dat\060409 ni 21 na 15 mins align in rt.dat
\r
896 Mon Apr 06 16:51:33 2009 VASE File c:\wvase32\dat\060409 ni 21 na 30 mins align in rt.dat
\r
897 Mon Apr 06 17:40:09 2009 RT File c:\wvase32\dat\060409 ni 21 na 30 mins align in rt.dat
\r
899 Tue Apr 07 09:43:07 2009 Init User: mrg (v3.698, 6.256 DLL)
\r
901 Tue Apr 07 10:14:35 2009
\r
902 Tue Apr 07 10:14:35 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
903 Tue Apr 07 10:25:43 2009 Calib: Wvl1=5000.0 Ps=-0.3186±0.0025 Attn=1.0118±0.0003 As=11.773±0.007 Psi=18.937±0.017 Del=83.613±0.015 <I>=10.835, MSE=1.78 (1.04) Synch=-46.708±0.025 [-46.740,-46.658] M1=0.0076±0.0026 [0.0033,0.012]
\r
904 Tue Apr 07 10:25:43 2009 Calib: Wvl2=11770.0 Ps=-0.3186±0.0025 IrAttn=0.9720±0.0003 IrAs=9.501±0.009 IrPsi=7.526±0.003 IrDel=70.050±0.020 <I>=7.793 MSE=1.78 (1.04) Synch=-49.339±0.028 [-49.388,-49.292] M1=0.042±0.011 [0.018,0.054]
\r
905 Tue Apr 07 10:25:43 2009 Calib: MSE=1.776 (1.043) AzOffset=0.068±0.003132 ElOffset=0.005±0.002753 DP=0.165±0.094
\r
906 Tue Apr 07 13:34:30 2009 VASE File c:\wvase32\dat\070409 gold samlpe 4 align out.dat
\r
907 Tue Apr 07 15:20:48 2009 RT File c:\wvase32\dat\070409 gold samlpe 4 align out rt.dat
\r
909 Wed Apr 08 08:58:26 2009 Init User: mrg (v3.698, 6.256 DLL)
\r
911 Wed Apr 08 09:36:40 2009
\r
912 Wed Apr 08 09:36:40 2009 Calib: rvs=30, pts=60, span=60.0, aoi=70.000, t=1, d=3
\r
913 Wed Apr 08 09:47:46 2009 Calib: Wvl1=5000.0 Ps=-0.2992±0.0083 Attn=1.0124±0.0005 As=48.434±0.014 Psi=20.102±0.024 Del=113.743±0.047 <I>=1.221, MSE=2.57 (2.6) Synch=-174.462±0.034 [-174.551,-174.378] M1=0.0032±0.0012 [0.00043,0.0063]
\r
914 Wed Apr 08 09:47:47 2009 Calib: Wvl2=11770.0 Ps=-0.2992±0.0083 IrAttn=0.9722±0.0010 IrAs=46.176±0.020 IrPsi=9.905±0.011 IrDel=135.337±0.104 <I>=1.134 MSE=2.57 (2.6) Synch=-177.254±0.084 [-177.421,-177.068] M1=0.013±0.0031 [0.0034,0.018]
\r
915 Wed Apr 08 09:47:47 2009 Calib: MSE=2.570 (2.604) AzOffset=0.070±0.003791 ElOffset=-0.002±0.006002 DP=0.105±0.149
\r
916 Wed Apr 08 13:29:39 2009 VASE File c:\wvase32\dat\080809 ag film align in.dat
\r
917 Wed Apr 08 14:23:08 2009 RT File c:\wvase32\dat\080809 ag film align in rt.dat
\r
919 Thu Apr 09 10:45:45 2009 Init User: mrg (v3.698, 6.256 DLL)
\r
921 Thu Apr 09 10:51:02 2009
\r
922 Thu Apr 09 10:51:02 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
923 Thu Apr 09 11:02:11 2009 Calib: Wvl1=5000.0 Ps=-0.3022±0.0027 Attn=1.0114±0.0003 As=120.736±0.008 Psi=19.034±0.018 Del=83.474±0.016 <I>=9.527, MSE=1.92 (1.1) Synch=169.260±0.024 [169.219,169.294] M1=0.0028±0.0005 [0.002,0.0042]
\r
924 Thu Apr 09 11:02:11 2009 Calib: Wvl2=11770.0 Ps=-0.3022±0.0027 IrAttn=0.9718±0.0004 IrAs=118.436±0.010 IrPsi=7.573±0.003 IrDel=70.149±0.022 <I>=7.616 MSE=1.92 (1.1) Synch=166.608±0.031 [166.554,166.660] M1=0.043±0.01 [0.02,0.054]
\r
925 Thu Apr 09 11:02:11 2009 Calib: MSE=1.925 (1.100) AzOffset=0.069±0.003383 ElOffset=0.008±0.002967 DP=0.136±0.102
\r
926 Thu Apr 09 13:21:20 2009 VASE File c:\wvase32\dat\090409 513888-23 pg align in.dat
\r
927 Thu Apr 09 13:59:30 2009 RT File c:\wvase32\dat\090409 513888-23 pg align in rt.dat
\r
928 Thu Apr 09 14:49:26 2009 RT File c:\wvase32\dat\090409 513888-23 pg align in rt.dat
\r
929 Thu Apr 09 16:17:26 2009 RT File c:\wvase32\dat\090409 513888-23 pg align in rt2.dat
\r
932 Fri Apr 10 09:46:26 2009 Init User: mrg (v3.698, 6.256 DLL)
\r
934 Fri Apr 10 09:57:25 2009
\r
935 Fri Apr 10 09:57:25 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
936 Fri Apr 10 10:08:30 2009 Calib: Wvl1=5000.0 Ps=-0.3012±0.0046 Attn=1.0126±0.0003 As=137.357±0.008 Psi=19.024±0.016 Del=83.483±0.017 <I>=1.114, MSE=1.57 (2.27) Synch=-10.497±0.021 [-10.551,-10.431] M1=0.0022±0.00076 [0.00049,0.0041]
\r
937 Fri Apr 10 10:08:30 2009 Calib: Wvl2=11770.0 Ps=-0.3012±0.0046 IrAttn=0.9715±0.0005 IrAs=135.141±0.011 IrPsi=7.585±0.007 IrDel=70.058±0.038 <I>=1.190 MSE=1.57 (2.27) Synch=-13.286±0.081 [-13.485,-13.055] M1=0.042±0.011 [0.011,0.055]
\r
938 Fri Apr 10 10:08:30 2009 Calib: MSE=1.569 (2.268) AzOffset=0.059±0.002999 ElOffset=-0.001±0.002644 DP=0.112±0.094
\r
939 Fri Apr 10 11:56:58 2009 VASE File c:\wvase32\dat\090409 513888-25 pg align in.dat
\r
940 Fri Apr 10 13:05:12 2009 RT File c:\wvase32\dat\090409 513888-25 pg align in rt.dat
\r
942 Sat Apr 11 10:03:45 2009 Init User: mrg (v3.698, 6.256 DLL)
\r
944 Sat Apr 11 10:19:29 2009
\r
945 Sat Apr 11 10:19:29 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
946 Sat Apr 11 10:30:36 2009 Calib: Wvl1=5000.0 Ps=-0.3012±0.0025 Attn=1.0117±0.0003 As=129.591±0.008 Psi=19.038±0.018 Del=83.442±0.016 <I>=11.223, MSE=1.86 (1.07) Synch=-118.763±0.025 [-118.788,-118.673] M1=0.0052±0.0007 [0.0043,0.007]
\r
947 Sat Apr 11 10:30:37 2009 Calib: Wvl2=11770.0 Ps=-0.3012±0.0025 IrAttn=0.9726±0.0004 IrAs=127.311±0.009 IrPsi=7.581±0.003 IrDel=70.163±0.021 <I>=8.586 MSE=1.86 (1.07) Synch=-121.322±0.029 [-121.380,-121.265] M1=0.028±0.0055 [0.015,0.035]
\r
948 Sat Apr 11 10:30:37 2009 Calib: MSE=1.856 (1.069) AzOffset=0.053±0.003264 ElOffset=0.009±0.002871 DP=0.226±0.098
\r
949 Sat Apr 11 12:30:08 2009 VASE File c:\wvase32\dat\100409 513888-24 pg align in.dat
\r
950 Sat Apr 11 13:38:39 2009 RT File c:\wvase32\dat\100409 513888-24 pg align in rt.dat
\r
952 Mon Apr 13 10:16:39 2009 Init User: mrg (v3.698, 6.256 DLL)
\r
955 Mon Apr 13 10:49:07 2009 Init User: mrg (v3.698, 6.256 DLL)
\r
958 Mon Apr 13 11:13:09 2009 Init User: mrg (v3.698, 6.256 DLL)
\r
960 Mon Apr 13 11:20:45 2009
\r
961 Mon Apr 13 11:20:45 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
962 Mon Apr 13 11:31:52 2009 Calib: Wvl1=5000.0 Ps=-0.3066±0.0059 Attn=1.0126±0.0004 As=37.382±0.010 Psi=18.991±0.019 Del=83.460±0.021 <I>=0.874, MSE=1.76 (3.4) Synch=-4.988±0.049 [-5.068,-4.899] M1=0.0032±0.0012 [0.00044,0.0051]
\r
963 Mon Apr 13 11:31:53 2009 Calib: Wvl2=11770.0 Ps=-0.3066±0.0059 IrAttn=0.9722±0.0007 IrAs=35.122±0.013 IrPsi=7.570±0.010 IrDel=69.975±0.047 <I>=1.005 MSE=1.76 (3.4) Synch=-7.821±0.114 [-7.973,-7.429] M1=0.031±0.0096 [0.0058,0.042]
\r
964 Mon Apr 13 11:31:53 2009 Calib: MSE=1.760 (3.401) AzOffset=0.057±0.003531 ElOffset=0.008±0.003115 DP=0.282±0.113
\r
965 Mon Apr 13 13:51:40 2009 VASE File c:\wvase32\dat\130409 513888-19 pg align in.dat
\r
966 Mon Apr 13 16:27:48 2009 RT File c:\wvase32\dat\130409 513888-19 pg align in rt.dat
\r
968 Tue Apr 14 09:55:48 2009 Init User: mrg (v3.698, 6.256 DLL)
\r
971 Tue Apr 14 10:10:44 2009 Init User: mrg (v3.698, 6.256 DLL)
\r
974 Tue Apr 14 10:15:30 2009 Init User: mrg (v3.698, 6.256 DLL)
\r
976 Tue Apr 14 10:18:46 2009
\r
977 Tue Apr 14 10:18:46 2009 Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=3
\r
978 Tue Apr 14 10:23:15 2009 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
979 Tue Apr 14 10:23:19 2009 Coarse Calib: Wvl1=5000.0 Ps=-0.2781±0.0129 Attn=1.0122±0.0003 As=24.819±0.008 Psi=19.078±0.027 Del=83.301±0.029 <I>=2.192, MSE=1.8 (2.42)
\r
980 Tue Apr 14 10:23:19 2009 Coarse Calib: MSE=1.801 (2.424) AzOffset=0.001±0.005083 ElOffset=0.031±0.004478
\r
981 Tue Apr 14 11:05:45 2009
\r
982 Tue Apr 14 11:05:45 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
983 Tue Apr 14 11:15:19 2009 Calib: Wvl1=5000.0 Ps=-0.2817±0.0070 Attn=1.0134±0.0005 As=24.721±0.014 Psi=19.058±0.027 Del=83.363±0.027 <I>=1.326, MSE=2.67 (3.2) Synch=-78.785±0.015 [-78.828,-78.753] M1=0.0013±0.00066 [0.00015,0.0036]
\r
984 Tue Apr 14 11:15:19 2009 Calib: Wvl2=11770.0 Ps=-0.2817±0.0070 IrAttn=0.9724±0.0009 IrAs=22.460±0.017 IrPsi=7.601±0.011 IrDel=70.023±0.057 <I>=1.452 MSE=2.67 (3.2) Synch=-81.625±0.061 [-81.782,-81.484] M1=0.014±0.0032 [0.0085,0.026]
\r
985 Tue Apr 14 11:15:19 2009 Calib: MSE=2.668 (3.201) AzOffset=0.003±0.004987 ElOffset=-0.006±0.004401 DP=0.180±0.156
\r
986 Tue Apr 14 13:53:09 2009 VASE File c:\wvase32\dat\140409 513888-22 align in.dat
\r
987 Tue Apr 14 15:05:04 2009 RT File c:\wvase32\dat\140409 513888-22 align in rt.dat
\r
989 Wed Apr 15 09:48:28 2009 Init User: mrg (v3.698, 6.256 DLL)
\r
991 Wed Apr 15 09:54:59 2009
\r
992 Wed Apr 15 09:54:59 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
993 Wed Apr 15 10:06:07 2009 Calib: Wvl1=5000.0 Ps=-0.2639±0.0031 Attn=1.0115±0.0003 As=0.821±0.009 Psi=19.462±0.021 Del=82.565±0.020 <I>=11.414, MSE=2.27 (1.29) Synch=25.290±0.011 [25.265,25.316] M1=0.004±0.00053 [0.0024,0.0053]
\r
994 Wed Apr 15 10:06:07 2009 Calib: Wvl2=11770.0 Ps=-0.2639±0.0031 IrAttn=0.9721±0.0004 IrAs=178.509±0.012 IrPsi=7.819±0.004 IrDel=70.088±0.025 <I>=9.206 MSE=2.27 (1.29) Synch=22.745±0.046 [22.664,22.812] M1=0.02±0.0039 [0.011,0.026]
\r
995 Wed Apr 15 10:06:07 2009 Calib: MSE=2.273 (1.294) AzOffset=0.010±0.003963 ElOffset=0.001±0.003447 DP=0.225±0.122
\r
996 Wed Apr 15 13:26:15 2009 VASE File c:\wvase32\dat\150409 513888-21 align in.dat
\r
997 Wed Apr 15 14:59:44 2009 RT File c:\wvase32\dat\150409 513888-21 align in rt.dat
\r
999 Thu Apr 16 10:24:19 2009 Init User: mrg (v3.698, 6.256 DLL)
\r
1001 Thu Apr 16 10:28:09 2009
\r
1002 Thu Apr 16 10:28:09 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
1003 Thu Apr 16 10:39:16 2009 Calib: Wvl1=5000.0 Ps=-0.2629±0.0037 Attn=1.0113±0.0004 As=59.619±0.011 Psi=19.482±0.024 Del=82.492±0.023 <I>=7.229, MSE=2.57 (1.57) Synch=-174.509±0.032 [-174.567,-174.461] M1=0.0011±0.00057 [7.5e-005,0.003]
\r
1004 Thu Apr 16 10:39:17 2009 Calib: Wvl2=11770.0 Ps=-0.2629±0.0037 IrAttn=0.9716±0.0005 IrAs=57.308±0.013 IrPsi=7.831±0.005 IrDel=69.952±0.030 <I>=6.744 MSE=2.57 (1.57) Synch=-177.288±0.035 [-177.355,-177.200] M1=0.027±0.006 [0.013,0.034]
\r
1005 Thu Apr 16 10:39:17 2009 Calib: MSE=2.569 (1.569) AzOffset=0.010±0.004484 ElOffset=-0.000±0.003895 DP=0.249±0.139
\r
1006 Thu Apr 16 13:38:23 2009 VASE File c:\wvase32\dat\150409 gold sample 4 align in.dat
\r
1007 Thu Apr 16 15:11:13 2009 RT File c:\wvase32\dat\150409 gold sample 4 align in rt.dat
\r
1009 Fri Apr 17 10:04:02 2009 Init User: mrg (v3.698, 6.256 DLL)
\r
1011 Fri Apr 17 10:20:23 2009
\r
1012 Fri Apr 17 10:20:23 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
1013 Fri Apr 17 10:31:31 2009 Calib: Wvl1=5000.0 Ps=-0.2414±0.0037 Attn=1.0117±0.0004 As=77.654±0.011 Psi=19.668±0.024 Del=82.236±0.023 <I>=7.688, MSE=2.56 (1.57) Synch=-174.505±0.022 [-174.547,-174.456] M1=0.0011±0.00078 [6e-006,0.003]
\r
1014 Fri Apr 17 10:31:31 2009 Calib: Wvl2=11770.0 Ps=-0.2414±0.0037 IrAttn=0.9723±0.0005 IrAs=75.384±0.013 IrPsi=7.907±0.005 IrDel=70.201±0.029 <I>=7.331 MSE=2.56 (1.57) Synch=-177.234±0.037 [-177.314,-177.164] M1=0.025±0.0057 [0.012,0.032]
\r
1015 Fri Apr 17 10:31:31 2009 Calib: MSE=2.560 (1.575) AzOffset=0.012±0.004443 ElOffset=0.013±0.003842 DP=0.184±0.139
\r
1016 Fri Apr 17 13:27:17 2009 VASE File c:\wvase32\dat\170409 gold 9 align in.dat
\r
1017 Fri Apr 17 14:24:16 2009 RT File c:\wvase32\dat\170409 gold 9 align in rt.dat
\r
1019 Mon Apr 20 10:39:48 2009 Init User: mrg (v3.698, 6.256 DLL)
\r
1021 Mon Apr 20 10:48:07 2009
\r
1022 Mon Apr 20 10:48:07 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
1023 Mon Apr 20 10:59:15 2009 Calib: Wvl1=5000.0 Ps=-0.2118±0.0034 Attn=1.0118±0.0004 As=120.248±0.010 Psi=20.215±0.022 Del=81.290±0.022 <I>=9.870, MSE=2.43 (1.41) Synch=-174.159±0.028 [-174.215,-174.113] M1=0.0015±0.00076 [5.6e-005,0.003]
\r
1024 Mon Apr 20 10:59:16 2009 Calib: Wvl2=11770.0 Ps=-0.2118±0.0034 IrAttn=0.9720±0.0005 IrAs=117.962±0.013 IrPsi=8.155±0.004 IrDel=70.389±0.026 <I>=9.072 MSE=2.43 (1.41) Synch=-176.919±0.047 [-177.006,-176.833] M1=0.026±0.006 [0.012,0.034]
\r
1025 Mon Apr 20 10:59:16 2009 Calib: MSE=2.432 (1.415) AzOffset=0.009±0.004170 ElOffset=0.008±0.003543 DP=0.201±0.135
\r
1026 Mon Apr 20 13:15:07 2009 VASE File c:\wvase32\dat\200409 evpslide align in.dat
\r
1027 Mon Apr 20 13:58:08 2009 RT File c:\wvase32\dat\200409 evpslide align in rt.dat
\r
1028 Mon Apr 20 17:18:06 2009 VASE File c:\wvase32\dat\200409 evpslide align in cleaned.dat
\r
1029 Mon Apr 20 17:30:32 2009 RT File c:\wvase32\dat\200409 evpslide align in cleaned rt.dat
\r
1031 Tue Apr 21 10:03:47 2009 Init User: mrg (v3.698, 6.256 DLL)
\r
1033 Tue Apr 21 10:36:09 2009
\r
1034 Tue Apr 21 10:36:09 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
1035 Tue Apr 21 10:47:16 2009 Calib: Wvl1=5000.0 Ps=-0.1790±0.0030 Attn=1.0120±0.0003 As=19.815±0.009 Psi=20.323±0.020 Del=81.116±0.019 <I>=10.268, MSE=2.14 (1.23) Synch=-46.807±0.006 [-46.821,-46.794] M1=0.002±0.00072 [0.0011,0.0035]
\r
1036 Tue Apr 21 10:47:17 2009 Calib: Wvl2=11770.0 Ps=-0.1790±0.0030 IrAttn=0.9717±0.0004 IrAs=17.523±0.011 IrPsi=8.192±0.004 IrDel=70.361±0.023 <I>=9.059 MSE=2.14 (1.23) Synch=-49.389±0.045 [-49.481,-49.327] M1=0.025±0.0054 [0.014,0.032]
\r
1037 Tue Apr 21 10:47:17 2009 Calib: MSE=2.144 (1.231) AzOffset=0.015±0.003667 ElOffset=0.003±0.003105 DP=0.156±0.120
\r
1038 Tue Apr 21 15:16:58 2009 VASE File c:\wvase32\dat\210409 ni 20na 30 mins 020309 align in.dat
\r
1039 Tue Apr 21 17:05:48 2009 RT File c:\wvase32\dat\210409 ni 20na 30 mins 020309 align in rt.dat
\r
1040 Wed Apr 22 10:38:06 2009 Initializing Error: Could not establish communication with the DK monochromator.
\r
1041 Wed Apr 22 10:48:19 2009 Initializing Error: MonoInitWait() DK
\r
1042 Wed Apr 22 10:48:22 2009 SendMonoCmd Error: Monochromator Command Return Failed 31. DK
\r
1043 Wed Apr 22 10:48:57 2009 GetMonoStatus Error: Mono Return Failed 27. rtn=1. DK
\r
1044 Wed Apr 22 10:48:57 2009 d=01 cmd=255 00 00 00 00 00 00 00 00 00 00
\r
1045 Wed Apr 22 10:48:57 2009 MonoCheck Error: Monochromator Communication Failed. DK
\r
1046 Wed Apr 22 10:48:57 2009 Could Not Adjust Slit Width. DK
\r
1048 Wed Apr 22 11:03:39 2009 Init User: mrg (v3.698, 6.256 DLL)
\r
1050 Wed Apr 22 11:17:00 2009
\r
1051 Wed Apr 22 11:17:00 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
1052 Wed Apr 22 11:28:08 2009 Calib: Wvl1=5000.0 Ps=-0.1785±0.0034 Attn=1.0116±0.0004 As=69.213±0.010 Psi=18.537±0.023 Del=84.262±0.020 <I>=8.173, MSE=2.43 (1.53) Synch=-46.809±0.017 [-46.850,-46.779] M1=0.0017±0.00043 [0.00076,0.0027]
\r
1053 Wed Apr 22 11:28:08 2009 Calib: Wvl2=11770.0 Ps=-0.1785±0.0034 IrAttn=0.9713±0.0005 IrAs=66.903±0.012 IrPsi=7.358±0.004 IrDel=69.837±0.029 <I>=7.063 MSE=2.43 (1.53) Synch=-49.345±0.038 [-49.422,-49.276] M1=0.042±0.0095 [0.017,0.052]
\r
1054 Wed Apr 22 11:28:08 2009 Calib: MSE=2.434 (1.526) AzOffset=0.063±0.004337 ElOffset=-0.020±0.003866 DP=0.110±0.126
\r
1055 Wed Apr 22 13:17:11 2009 VASE File c:\wvase32\dat\220409 calibration wafer.dat
\r
1056 Wed Apr 22 15:40:22 2009 VASE File c:\wvase32\dat\220409 ni 15 mins 21 na align in.dat
\r
1057 Wed Apr 22 16:50:26 2009 RT File c:\wvase32\dat\220409 ni 15 mins 21 na align in rt.dat
\r
1059 Thu Apr 23 09:22:48 2009 Init User: mrg (v3.698, 6.256 DLL)
\r
1061 Thu Apr 23 09:29:26 2009
\r
1062 Thu Apr 23 09:29:26 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
1063 Thu Apr 23 09:40:34 2009 Calib: Wvl1=5000.0 Ps=-0.1553±0.0060 Attn=1.0108±0.0005 As=1.376±0.012 Psi=18.872±0.023 Del=83.549±0.023 <I>=1.231, MSE=2.22 (2.6) Synch=113.465±0.033 [113.413,113.612] M1=0.0017±0.0008 [0.00036,0.0045]
\r
1064 Thu Apr 23 09:40:34 2009 Calib: Wvl2=11770.0 Ps=-0.1553±0.0060 IrAttn=0.9712±0.0007 IrAs=179.031±0.015 IrPsi=7.571±0.009 IrDel=69.684±0.048 <I>=1.410 MSE=2.22 (2.6) Synch=110.715±0.082 [110.529,110.969] M1=0.0095±0.0043 [0.0037,0.03]
\r
1065 Thu Apr 23 09:40:34 2009 Calib: MSE=2.220 (2.603) AzOffset=0.010±0.004204 ElOffset=-0.002±0.003722 DP=0.177±0.130
\r
1066 Thu Apr 23 13:54:06 2009 VASE File c:\wvase32\dat\ni 21na 63 mins align in.dat
\r
1067 Thu Apr 23 16:18:09 2009 RT File c:\wvase32\dat\ni 21na 63 mins align in rt.dat
\r
1069 Fri Apr 24 11:41:36 2009 Init User: mrg (v3.698, 6.256 DLL)
\r
1072 Fri Apr 24 11:49:57 2009 Init User: mrg (v3.698, 6.256 DLL)
\r
1074 Fri Apr 24 14:43:09 2009
\r
1075 Fri Apr 24 14:43:09 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
1076 Fri Apr 24 14:54:23 2009 Calib: Wvl1=5000.0 Ps=-0.1257±0.0029 Attn=1.0121±0.0003 As=8.361±0.009 Psi=18.509±0.021 Del=84.300±0.018 <I>=11.952, MSE=2.18 (1.28) Synch=-30.487±0.009 [-30.516,-30.463] M1=0.0033±0.00094 [0.0012,0.0051]
\r
1077 Fri Apr 24 14:54:24 2009 Calib: Wvl2=11770.0 Ps=-0.1257±0.0029 IrAttn=0.9714±0.0004 IrAs=6.090±0.011 IrPsi=7.359±0.004 IrDel=69.753±0.024 <I>=10.314 MSE=2.18 (1.28) Synch=-33.361±0.043 [-33.442,-33.300] M1=0.0056±0.00094 [0.0044,0.008]
\r
1078 Fri Apr 24 14:54:24 2009 Calib: MSE=2.178 (1.282) AzOffset=0.017±0.003882 ElOffset=0.024±0.003491 DP=0.133±0.113
\r
1079 Fri Apr 24 16:54:33 2009 VASE File c:\wvase32\dat\240409 21 na 63 mins ni align in.dat
\r
1080 Fri Apr 24 18:06:49 2009 RT File c:\wvase32\dat\240409 21 na 63 mins ni align in rt.dat
\r
1082 Wed Apr 29 10:07:17 2009 Init User: mrg (v3.698, 6.256 DLL)
\r
1084 Wed Apr 29 10:14:59 2009
\r
1085 Wed Apr 29 10:14:59 2009 Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=3
\r
1086 Wed Apr 29 10:19:28 2009 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
1087 Wed Apr 29 10:19:31 2009 Coarse Calib: Wvl1=5000.0 Ps=-0.0983±0.0125 Attn=1.0107±0.0003 As=137.503±0.007 Psi=18.593±0.025 Del=84.227±0.027 <I>=1.903, MSE=1.56 (2.01)
\r
1088 Wed Apr 29 10:19:31 2009 Coarse Calib: MSE=1.565 (2.013) AzOffset=-0.000±0.004707 ElOffset=0.001±0.004214
\r
1089 Wed Apr 29 11:25:54 2009
\r
1090 Wed Apr 29 11:25:54 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
1091 Wed Apr 29 11:35:27 2009 Calib: Wvl1=5000.0 Ps=-0.0899±0.0061 Attn=1.0125±0.0005 As=137.251±0.011 Psi=18.567±0.022 Del=84.244±0.023 <I>=1.127, MSE=2.12 (3.07) Synch=97.380±0.018 [97.327,97.410] M1=0.0016±0.0011 [6.2e-005,0.0048]
\r
1092 Wed Apr 29 11:35:27 2009 Calib: Wvl2=11770.0 Ps=-0.0899±0.0061 IrAttn=0.9704±0.0007 IrAs=134.956±0.014 IrPsi=7.372±0.009 IrDel=69.891±0.049 <I>=1.312 MSE=2.12 (3.07) Synch=94.661±0.062 [94.478,94.774] M1=0.027±0.0064 [0.0093,0.036]
\r
1093 Wed Apr 29 11:35:28 2009 Calib: MSE=2.125 (3.074) AzOffset=0.002±0.004101 ElOffset=-0.006±0.003679 DP=0.090±0.125
\r
1095 Fri May 01 09:57:58 2009 Init User: mrg (v3.698, 6.256 DLL)
\r
1097 Fri May 01 10:07:51 2009
\r
1098 Fri May 01 10:07:51 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
1099 Fri May 01 10:18:57 2009 Calib: Wvl1=5000.0 Ps=-0.0588±0.0048 Attn=1.0104±0.0005 As=68.755±0.014 Psi=19.058±0.033 Del=83.220±0.030 <I>=9.393, MSE=3.51 (2.03) Synch=41.527±0.044 [41.463,41.609] M1=0.0018±0.00065 [0.00076,0.0045]
\r
1100 Fri May 01 10:18:58 2009 Calib: Wvl2=11770.0 Ps=-0.0588±0.0048 IrAttn=0.9703±0.0007 IrAs=66.383±0.018 IrPsi=7.654±0.006 IrDel=69.963±0.040 <I>=8.571 MSE=3.51 (2.03) Synch=38.857±0.108 [38.753,39.113] M1=0.029±0.0069 [0.013,0.038]
\r
1101 Fri May 01 10:18:58 2009 Calib: MSE=3.508 (2.029) AzOffset=0.012±0.006174 ElOffset=0.003±0.005435 DP=0.184±0.186
\r
1102 Fri May 01 12:30:47 2009 VASE File c:\wvase32\dat\010509 jv98 align in.dat
\r
1103 Fri May 01 15:07:23 2009 RT File c:\wvase32\dat\010509 jv98 align in rt.dat
\r
1105 Tue May 12 09:22:11 2009 Init User: mrg (v3.698, 6.256 DLL)
\r
1108 Tue May 12 09:37:49 2009 Init User: mrg (v3.698, 6.256 DLL)
\r
1111 Tue May 12 11:17:48 2009 Init User: mrg (v3.698, 6.256 DLL)
\r
1114 Thu May 14 11:39:24 2009 Init User: mrg (v3.698, 6.256 DLL)
\r
1116 Thu May 14 11:47:40 2009
\r
1117 Thu May 14 11:47:40 2009 Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=3
\r
1118 Thu May 14 11:52:10 2009 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
1119 Thu May 14 11:52:13 2009 Coarse Calib: Wvl1=5000.0 Ps=-0.0267±0.0068 Attn=1.0111±0.0003 As=51.916±0.007 Psi=18.692±0.022 Del=83.950±0.020 <I>=15.467, MSE=1.78 (1.32)
\r
1120 Thu May 14 11:52:14 2009 Coarse Calib: MSE=1.776 (1.319) AzOffset=0.006±0.004141 ElOffset=0.010±0.003697
\r
1121 Thu May 14 12:01:55 2009
\r
1122 Thu May 14 12:01:55 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
1123 Thu May 14 12:11:15 2009 Calib: Wvl1=5000.0 Ps=-0.0307±0.0038 Attn=1.0118±0.0004 As=51.822±0.011 Psi=18.682±0.027 Del=83.996±0.023 <I>=9.104, MSE=2.77 (1.68) Synch=97.369±0.020 [97.332,97.403] M1=0.0016±0.00062 [0.00044,0.0029]
\r
1124 Thu May 14 12:11:16 2009 Calib: Wvl2=11770.0 Ps=-0.0307±0.0038 IrAttn=0.9707±0.0005 IrAs=49.455±0.014 IrPsi=7.431±0.005 IrDel=69.920±0.032 <I>=8.671 MSE=2.77 (1.68) Synch=94.757±0.041 [94.681,94.843] M1=0.029±0.0071 [0.012,0.038]
\r
1125 Thu May 14 12:11:16 2009 Calib: MSE=2.772 (1.681) AzOffset=0.008±0.004925 ElOffset=0.003±0.004400 DP=0.143±0.144
\r
1126 Thu May 14 15:38:14 2009 VASE File c:\wvase32\dat\140509thick gold sample 1 align in spot approx at centre of slide.dat
\r
1127 Thu May 14 16:54:58 2009 RT File c:\wvase32\dat\140509thick gold sample 1 align in spot approx at centre of slidert.dat
\r
1129 Fri May 15 09:25:31 2009 Init User: mrg (v3.698, 6.256 DLL)
\r
1131 Fri May 15 09:36:08 2009
\r
1132 Fri May 15 09:36:08 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
1133 Fri May 15 09:47:15 2009 Calib: Wvl1=5000.0 Ps=0.0033±0.0038 Attn=1.0106±0.0004 As=71.992±0.012 Psi=18.605±0.027 Del=84.123±0.023 <I>=9.282, MSE=2.84 (1.65) Synch=113.548±0.058 [113.464,113.651] M1=0.002±0.00047 [0.0011,0.003]
\r
1134 Fri May 15 09:47:15 2009 Calib: Wvl2=11770.0 Ps=0.0033±0.0038 IrAttn=0.9700±0.0005 IrAs=69.548±0.014 IrPsi=7.393±0.005 IrDel=69.785±0.032 <I>=8.934 MSE=2.84 (1.65) Synch=110.746±0.035 [110.673,110.821] M1=0.03±0.0079 [0.011,0.04]
\r
1135 Fri May 15 09:47:16 2009 Calib: MSE=2.837 (1.647) AzOffset=0.005±0.005045 ElOffset=0.004±0.004519 DP=0.089±0.147
\r
1136 Fri May 15 11:46:29 2009 VASE File c:\wvase32\dat\150509 thick gold 1 beam 5mm from bottom (thin side) centre align in.dat
\r
1137 Fri May 15 12:45:21 2009 RT File c:\wvase32\dat\150509 thick gold 1 beam 5mm from bottom (thin side) centre align in rt.dat
\r
1139 Mon Jun 29 13:42:37 2009 Init User: alex (v3.698, 6.256 DLL)
\r
1141 Mon Jun 29 14:02:25 2009
\r
1142 Mon Jun 29 14:02:25 2009 Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=3
\r
1143 Mon Jun 29 14:06:53 2009 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
1144 Mon Jun 29 14:06:57 2009 Coarse Calib: Wvl1=5000.0 Ps=0.0240±0.0105 Attn=1.0096±0.0004 As=9.875±0.010 Psi=18.420±0.035 Del=84.061±0.032 <I>=18.054, MSE=2.8 (2.01)
\r
1145 Mon Jun 29 14:06:58 2009 Coarse Calib: MSE=2.800 (2.014) AzOffset=-0.022±0.006587 ElOffset=-0.047±0.005914
\r
1146 Mon Jun 29 14:09:53 2009
\r
1147 Mon Jun 29 14:09:53 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
1148 Mon Jun 29 14:19:12 2009 Calib: Wvl1=5000.0 Ps=0.0365±0.0037 Attn=1.0103±0.0004 As=9.889±0.011 Psi=18.521±0.027 Del=84.126±0.023 <I>=10.474, MSE=2.78 (1.6) Synch=-102.300±0.023 [-102.331,-102.253] M1=0.008±0.001 [0.0061,0.012]
\r
1149 Mon Jun 29 14:19:12 2009 Calib: Wvl2=11770.0 Ps=0.0365±0.0037 IrAttn=0.9696±0.0005 IrAs=7.527±0.014 IrPsi=7.406±0.005 IrDel=69.734±0.032 <I>=9.196 MSE=2.78 (1.6) Synch=-105.293±0.056 [-105.404,-105.224] M1=0.013±0.0032 [0.0054,0.018]
\r
1150 Mon Jun 29 14:19:12 2009 Calib: MSE=2.776 (1.602) AzOffset=-0.003±0.004958 ElOffset=0.014±0.004443 DP=0.426±0.143
\r
1151 Mon Jun 29 15:30:07 2009 VASE File c:\wvase32\dat\290609 glass slide.dat
\r
1152 Mon Jun 29 16:17:34 2009 RT File c:\wvase32\dat\290609 glass slide rt.dat
\r
1154 Tue Jun 30 12:03:15 2009 Init User: alex (v3.698, 6.256 DLL)
\r
1156 Tue Jun 30 12:13:18 2009
\r
1157 Tue Jun 30 12:13:18 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
1158 Tue Jun 30 12:24:26 2009 Calib: Wvl1=5000.0 Ps=0.0414±0.0050 Attn=1.0096±0.0006 As=139.344±0.015 Psi=19.266±0.034 Del=82.877±0.031 <I>=9.988, MSE=3.65 (2.06) Synch=41.633±0.027 [41.574,41.681] M1=0.0054±0.0012 [0.0028,0.0081]
\r
1159 Tue Jun 30 12:24:26 2009 Calib: Wvl2=11770.0 Ps=0.0414±0.0050 IrAttn=0.9689±0.0007 IrAs=136.917±0.018 IrPsi=7.745±0.006 IrDel=70.066±0.041 <I>=9.011 MSE=3.65 (2.06) Synch=38.493±0.073 [38.372,38.606] M1=0.0087±0.0016 [0.005,0.013]
\r
1160 Tue Jun 30 12:24:26 2009 Calib: MSE=3.645 (2.060) AzOffset=0.002±0.006371 ElOffset=0.020±0.005580 DP=0.235±0.194
\r
1161 Tue Jun 30 13:42:29 2009 VASE File c:\wvase32\dat\300609 glass slide.dat
\r
1162 Tue Jun 30 14:26:03 2009 RT File c:\wvase32\dat\300609 glass slide rt.dat
\r
1163 Tue Jun 30 16:16:31 2009 VASE File c:\wvase32\dat\300609 glass slide 50-60.dat
\r
1165 Wed Jul 01 10:36:52 2009 Init User: alex (v3.698, 6.256 DLL)
\r
1167 Wed Jul 01 10:44:09 2009
\r
1168 Wed Jul 01 10:44:09 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
1169 Wed Jul 01 10:55:15 2009 Calib: Wvl1=5000.0 Ps=0.0764±0.0058 Attn=1.0092±0.0006 As=60.647±0.017 Psi=19.500±0.040 Del=82.431±0.037 <I>=9.614, MSE=4.23 (2.42) Synch=97.537±0.039 [97.465,97.638] M1=0.0063±0.0018 [0.0032,0.011]
\r
1170 Wed Jul 01 10:55:16 2009 Calib: Wvl2=11770.0 Ps=0.0764±0.0058 IrAttn=0.9690±0.0008 IrAs=58.235±0.022 IrPsi=7.906±0.007 IrDel=70.203±0.046 <I>=8.944 MSE=4.23 (2.42) Synch=94.647±0.023 [94.589,94.738] M1=0.0074±0.002 [0.0034,0.012]
\r
1171 Wed Jul 01 10:55:16 2009 Calib: MSE=4.226 (2.420) AzOffset=0.003±0.007341 ElOffset=0.027±0.006381 DP=0.240±0.227
\r
1172 Wed Jul 01 10:56:38 2009
\r
1173 Wed Jul 01 10:56:38 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
1174 Wed Jul 01 11:07:26 2009 Calib: Wvl1=5000.0 Ps=0.0778±0.0032 Attn=1.0099±0.0004 As=60.553±0.010 Psi=19.507±0.022 Del=82.481±0.020 <I>=10.242, MSE=2.34 (1.37) Synch=97.391±0.039 [97.300,97.447] M1=0.0056±0.002 [0.0025,0.0094]
\r
1175 Wed Jul 01 11:07:27 2009 Calib: Wvl2=11770.0 Ps=0.0778±0.0032 IrAttn=0.9690±0.0004 IrAs=58.242±0.012 IrPsi=7.902±0.004 IrDel=70.277±0.026 <I>=9.215 MSE=2.34 (1.37) Synch=94.871±0.044 [94.788,94.934] M1=0.0054±0.0013 [0.0026,0.0086]
\r
1176 Wed Jul 01 11:07:27 2009 Calib: MSE=2.343 (1.374) AzOffset=0.010±0.004066 ElOffset=0.029±0.003538 DP=0.183±0.126
\r
1177 Wed Jul 01 13:00:20 2009 VASE File c:\wvase32\dat\010709 glass slide.dat
\r
1178 Wed Jul 01 14:35:13 2009 RT File c:\wvase32\dat\010709 glass slide rt.dat
\r
1180 Thu Jul 02 11:56:52 2009 Init User: alex (v3.698, 6.256 DLL)
\r
1182 Thu Jul 02 12:11:12 2009
\r
1183 Thu Jul 02 12:11:12 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
1184 Thu Jul 02 12:22:20 2009 Calib: Wvl1=5000.0 Ps=0.1262±0.0034 Attn=1.0099±0.0004 As=88.082±0.010 Psi=19.590±0.023 Del=82.316±0.022 <I>=10.331, MSE=2.46 (1.43) Synch=97.276±0.087 [97.172,97.682] M1=0.0068±0.0015 [0.0039,0.0099]
\r
1185 Thu Jul 02 12:22:20 2009 Calib: Wvl2=11770.0 Ps=0.1262±0.0034 IrAttn=0.9687±0.0005 IrAs=85.690±0.013 IrPsi=7.950±0.004 IrDel=70.221±0.027 <I>=9.204 MSE=2.46 (1.43) Synch=94.736±0.040 [94.663,94.800] M1=0.0077±0.0031 [0.0019,0.013]
\r
1186 Thu Jul 02 12:22:20 2009 Calib: MSE=2.464 (1.426) AzOffset=0.022±0.004266 ElOffset=0.035±0.003702 DP=0.219±0.133
\r
1187 Thu Jul 02 14:42:07 2009
\r
1188 Thu Jul 02 14:42:07 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
1189 Thu Jul 02 14:53:16 2009 Calib: Wvl1=5000.0 Ps=0.1252±0.0028 Attn=1.0117±0.0003 As=87.892±0.008 Psi=19.581±0.019 Del=82.372±0.018 <I>=11.834, MSE=2.03 (1.17) Synch=97.173±0.013 [97.123,97.198] M1=0.0069±0.0014 [0.005,0.0097]
\r
1190 Thu Jul 02 14:53:16 2009 Calib: Wvl2=11770.0 Ps=0.1252±0.0028 IrAttn=0.9687±0.0004 IrAs=85.536±0.010 IrPsi=7.938±0.003 IrDel=70.276±0.022 <I>=10.114 MSE=2.03 (1.17) Synch=94.485±0.048 [94.396,94.542] M1=0.0083±0.003 [0.001,0.013]
\r
1191 Thu Jul 02 14:53:16 2009 Calib: MSE=2.035 (1.169) AzOffset=0.023±0.003523 ElOffset=0.040±0.003063 DP=0.181±0.110
\r
1192 Thu Jul 02 16:12:34 2009 VASE File c:\wvase32\dat\020709 glass slide 1.dat
\r
1193 Thu Jul 02 17:12:11 2009 VASE File c:\wvase32\dat\020709 glass slide 2.dat
\r
1195 Mon Jul 06 14:27:22 2009 Init User: alex (v3.698, 6.256 DLL)
\r
1198 Mon Jul 06 14:44:15 2009 Init User: alex (v3.698, 6.256 DLL)
\r
1200 Mon Jul 06 14:53:19 2009
\r
1201 Mon Jul 06 14:53:19 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
1202 Mon Jul 06 15:04:27 2009 Calib: Wvl1=5000.0 Ps=0.1629±0.0031 Attn=1.0103±0.0003 As=104.469±0.009 Psi=19.632±0.022 Del=82.227±0.020 <I>=11.024, MSE=2.3 (1.35) Synch=165.990±0.057 [165.877,166.057] M1=0.0048±0.0011 [0.0024,0.007]
\r
1203 Mon Jul 06 15:04:27 2009 Calib: Wvl2=11770.0 Ps=0.1629±0.0031 IrAttn=0.9691±0.0004 IrAs=102.086±0.012 IrPsi=7.974±0.004 IrDel=70.187±0.025 <I>=9.865 MSE=2.3 (1.35) Synch=163.001±0.048 [162.914,163.118] M1=0.0061±0.0014 [0.0038,0.0099]
\r
1204 Mon Jul 06 15:04:27 2009 Calib: MSE=2.302 (1.345) AzOffset=-0.003±0.003990 ElOffset=0.025±0.003454 DP=0.227±0.125
\r
1205 Mon Jul 06 15:18:07 2009
\r
1206 Mon Jul 06 15:18:07 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
1207 Mon Jul 06 15:26:25 2009
\r
1208 Mon Jul 06 15:26:25 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
1209 Mon Jul 06 15:37:13 2009 Calib: Wvl1=5000.0 Ps=0.1647±0.0027 Attn=1.0113±0.0003 As=104.337±0.008 Psi=19.637±0.018 Del=82.247±0.017 <I>=11.257, MSE=1.97 (1.13) Synch=165.852±0.024 [165.816,165.915] M1=0.0046±0.0012 [0.0018,0.0061]
\r
1210 Mon Jul 06 15:37:13 2009 Calib: Wvl2=11770.0 Ps=0.1647±0.0027 IrAttn=0.9694±0.0004 IrAs=102.006±0.010 IrPsi=7.972±0.003 IrDel=70.168±0.021 <I>=10.028 MSE=1.97 (1.13) Synch=162.907±0.039 [162.830,162.955] M1=0.0054±0.0014 [0.0033,0.0093]
\r
1211 Mon Jul 06 15:37:13 2009 Calib: MSE=1.970 (1.134) AzOffset=0.000±0.003415 ElOffset=0.026±0.002958 DP=0.169±0.107
\r
1212 Mon Jul 06 16:49:56 2009 VASE File c:\wvase32\dat\060709 si wafer.dat
\r
1213 Mon Jul 06 17:07:47 2009 RT File c:\wvase32\dat\060709 si wafer rt.dat
\r
1214 Mon Jul 06 17:37:37 2009 RT File c:\wvase32\dat\060709 si wafer rt.dat
\r
1216 Tue Jul 07 11:24:48 2009 Init User: alex (v3.698, 6.256 DLL)
\r
1218 Tue Jul 07 11:33:33 2009
\r
1219 Tue Jul 07 11:33:33 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
1220 Tue Jul 07 11:44:41 2009 Calib: Wvl1=5000.0 Ps=0.2008±0.0046 Attn=1.0098±0.0005 As=77.392±0.014 Psi=19.131±0.032 Del=83.080±0.029 <I>=9.974, MSE=3.43 (1.9) Synch=-118.417±0.028 [-118.491,-118.358] M1=0.0055±0.00083 [0.0035,0.0075]
\r
1221 Tue Jul 07 11:44:41 2009 Calib: Wvl2=11770.0 Ps=0.2008±0.0046 IrAttn=0.9684±0.0006 IrAs=74.976±0.017 IrPsi=7.680±0.006 IrDel=69.832±0.038 <I>=9.349 MSE=3.43 (1.9) Synch=-121.299±0.048 [-121.394,-121.220] M1=0.0078±0.0014 [0.0057,0.011]
\r
1222 Tue Jul 07 11:44:41 2009 Calib: MSE=3.432 (1.899) AzOffset=0.001±0.006016 ElOffset=0.026±0.005293 DP=0.139±0.182
\r
1223 Tue Jul 07 12:35:23 2009 VASE File c:\wvase32\dat\070709 calibration wafer.dat
\r
1224 Tue Jul 07 14:17:39 2009 RT File c:\wvase32\dat\070709 calibration wafer rt.dat
\r
1226 Wed Jul 08 15:12:21 2009 Init User: alex (v3.698, 6.256 DLL)
\r
1229 Wed Jul 08 15:30:34 2009 Init User: alex (v3.698, 6.256 DLL)
\r
1231 Wed Jul 08 16:00:12 2009
\r
1232 Wed Jul 08 16:00:12 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
1233 Wed Jul 08 16:11:19 2009 Calib: Wvl1=5000.0 Ps=0.2350±0.0028 Attn=1.0106±0.0003 As=30.479±0.009 Psi=19.083±0.020 Del=83.205±0.018 <I>=11.513, MSE=2.11 (1.23) Synch=-124.042±0.023 [-124.082,-124.000] M1=0.0067±0.00072 [0.0055,0.0089]
\r
1234 Wed Jul 08 16:11:19 2009 Calib: Wvl2=11770.0 Ps=0.2350±0.0028 IrAttn=0.9690±0.0004 IrAs=28.117±0.011 IrPsi=7.622±0.003 IrDel=69.863±0.023 <I>=9.923 MSE=2.11 (1.23) Synch=-126.983±0.037 [-127.050,-126.926] M1=0.01±0.0032 [0.0037,0.016]
\r
1235 Wed Jul 08 16:11:20 2009 Calib: MSE=2.109 (1.228) AzOffset=0.006±0.003701 ElOffset=0.029±0.003264 DP=0.160±0.112
\r
1236 Wed Jul 08 17:35:49 2009 VASE File c:\wvase32\dat\080709 2nd si wafer.dat
\r
1238 Wed Jul 15 12:44:42 2009 Init User: alex (v3.698, 6.256 DLL)
\r
1241 Thu Jul 16 12:18:34 2009 Init User: alex (v3.698, 6.256 DLL)
\r
1243 Thu Jul 16 12:35:57 2009
\r
1244 Thu Jul 16 12:35:57 2009 Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=3
\r
1245 Thu Jul 16 12:40:26 2009 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
1246 Thu Jul 16 12:40:28 2009 Coarse Calib: Wvl1=5000.0 Ps=0.2719±0.0071 Attn=1.0113±0.0003 As=59.750±0.007 Psi=19.048±0.023 Del=83.309±0.022 <I>=20.257, MSE=1.9 (1.37)
\r
1247 Thu Jul 16 12:40:28 2009 Coarse Calib: MSE=1.901 (1.367) AzOffset=0.035±0.004374 ElOffset=0.042±0.003864
\r
1248 Thu Jul 16 12:55:56 2009
\r
1249 Thu Jul 16 12:55:56 2009 Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=3
\r
1250 Thu Jul 16 12:58:37 2009 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
1251 Thu Jul 16 12:58:40 2009 Coarse Calib: Wvl1=5000.0 Ps=0.2772±0.0063 Attn=1.0119±0.0002 As=59.684±0.006 Psi=19.037±0.021 Del=83.338±0.019 <I>=20.790, MSE=1.68 (1.21)
\r
1252 Thu Jul 16 12:58:40 2009 Coarse Calib: MSE=1.679 (1.210) AzOffset=-0.004±0.003877 ElOffset=0.009±0.003422
\r
1253 Thu Jul 16 13:39:36 2009
\r
1254 Thu Jul 16 13:39:36 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
1255 Thu Jul 16 13:49:10 2009 Calib: Wvl1=5000.0 Ps=0.2761±0.0029 Attn=1.0132±0.0003 As=59.625±0.009 Psi=19.030±0.021 Del=83.372±0.018 <I>=12.207, MSE=2.17 (1.25) Synch=113.906±0.009 [113.879,113.932] M1=0.0067±0.0016 [0.0036,0.0097]
\r
1256 Thu Jul 16 13:49:10 2009 Calib: Wvl2=11770.0 Ps=0.2761±0.0029 IrAttn=0.9698±0.0004 IrAs=57.335±0.011 IrPsi=7.598±0.004 IrDel=69.958±0.024 <I>=10.588 MSE=2.17 (1.25) Synch=110.836±0.040 [110.759,110.895] M1=0.0085±0.0013 [0.0058,0.011]
\r
1257 Thu Jul 16 13:49:11 2009 Calib: MSE=2.174 (1.255) AzOffset=0.003±0.003832 ElOffset=-0.007±0.003385 DP=0.155±0.115
\r
1258 Thu Jul 16 15:08:37 2009 VASE File c:\wvase32\dat\160709 cal wafer.dat
\r
1260 Fri Jul 17 11:35:06 2009 Init User: alex (v3.698, 6.256 DLL)
\r
1262 Fri Jul 17 12:17:40 2009
\r
1263 Fri Jul 17 12:17:40 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
1264 Fri Jul 17 12:28:47 2009 Calib: Wvl1=5000.0 Ps=0.3189±0.0028 Attn=1.0114±0.0003 As=20.445±0.008 Psi=19.635±0.019 Del=81.972±0.018 <I>=11.441, MSE=2.04 (1.19) Synch=113.612±0.014 [113.584,113.644] M1=0.0069±0.0022 [0.0043,0.011]
\r
1265 Fri Jul 17 12:28:47 2009 Calib: Wvl2=11770.0 Ps=0.3189±0.0028 IrAttn=0.9696±0.0004 IrAs=18.126±0.010 IrPsi=7.882±0.003 IrDel=70.104±0.022 <I>=10.060 MSE=2.04 (1.19) Synch=110.652±0.043 [110.570,110.714] M1=0.0083±0.0023 [0.0025,0.012]
\r
1266 Fri Jul 17 12:28:47 2009 Calib: MSE=2.036 (1.189) AzOffset=0.005±0.003548 ElOffset=0.002±0.003052 DP=0.204±0.110
\r
1267 Fri Jul 17 13:35:04 2009 VASE File c:\wvase32\dat\170709 cal wafer.dat
\r
1268 Fri Jul 17 14:03:00 2009
\r
1269 Fri Jul 17 14:03:00 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
1270 Fri Jul 17 14:14:05 2009 Warning: Possible loss of data-stream synchronization detected.
\r
1271 first(last),id=0(59), det#0(#0) Was=113.612(113.612). Is=92.173(92.166). Wvl=5000.0(5000.0), Ang=75.00(75.00), DC=12.5062(12.3490), P=-29.68(30.32), X=0.00(0.00), Y=0.00(0.00)
\r
1272 Fri Jul 17 14:14:07 2009 Calib: Wvl1=5000.0 Ps=0.3175±0.0028 Attn=1.0125±0.0003 As=20.429±0.009 Psi=19.522±0.020 Del=82.429±0.018 <I>=11.906, MSE=2.08 (1.21) Synch=92.168±0.012 [92.140,92.204] M1=0.0076±0.0019 [0.0045,0.011]
\r
1273 Fri Jul 17 14:14:07 2009 Calib: Wvl2=11770.0 Ps=0.3175±0.0028 IrAttn=0.9700±0.0004 IrAs=18.122±0.010 IrPsi=7.810±0.003 IrDel=70.139±0.023 <I>=10.290 MSE=2.08 (1.21) Synch=89.143±0.042 [89.069,89.206] M1=0.011±0.0026 [0.0059,0.015]
\r
1274 Fri Jul 17 14:14:07 2009 Calib: MSE=2.082 (1.205) AzOffset=0.003±0.003627 ElOffset=0.009±0.003148 DP=0.152±0.112
\r
1275 Fri Jul 17 15:41:47 2009 VASE File c:\wvase32\dat\170709 au (10709) 2.34 a 20 mins.dat
\r
1276 Fri Jul 17 16:22:58 2009 RT File c:\wvase32\dat\170709 au (10709) 2.34 a 20 mins rt.dat
\r
1278 Mon Jul 20 12:27:27 2009 Init User: alex (v3.698, 6.256 DLL)
\r
1280 Mon Jul 20 12:34:05 2009
\r
1281 Mon Jul 20 12:34:05 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
1282 Mon Jul 20 12:45:13 2009 Calib: Wvl1=5000.0 Ps=0.3662±0.0062 Attn=1.0092±0.0007 As=158.758±0.019 Psi=19.792±0.042 Del=81.929±0.040 <I>=9.873, MSE=4.52 (2.54) Synch=41.637±0.025 [41.584,41.693] M1=0.0058±0.0018 [0.0014,0.0086]
\r
1283 Mon Jul 20 12:45:13 2009 Calib: Wvl2=11770.0 Ps=0.3662±0.0062 IrAttn=0.9690±0.0009 IrAs=156.331±0.023 IrPsi=8.051±0.008 IrDel=70.280±0.049 <I>=9.018 MSE=4.52 (2.54) Synch=38.904±0.036 [38.818,38.961] M1=0.0047±0.0018 [0.00073,0.0086]
\r
1284 Mon Jul 20 12:45:13 2009 Calib: MSE=4.521 (2.541) AzOffset=-0.009±0.007814 ElOffset=-0.011±0.006719 DP=0.299±0.246
\r
1285 Mon Jul 20 15:54:03 2009 VASE File c:\wvase32\dat\200709 au 170709 2.67 a 15 mins.dat
\r
1286 Mon Jul 20 16:34:38 2009 RT File c:\wvase32\dat\200709 au 170709 2.67 a 15 mins rt.dat
\r
1288 Wed Jul 22 11:50:53 2009 Init User: alex (v3.698, 6.256 DLL)
\r
1290 Wed Jul 22 12:01:11 2009
\r
1291 Wed Jul 22 12:01:11 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
1292 Wed Jul 22 12:12:18 2009 Calib: Wvl1=5000.0 Ps=0.4080±0.0061 Attn=1.0091±0.0007 As=78.996±0.019 Psi=18.789±0.043 Del=83.769±0.038 <I>=9.586, MSE=4.53 (2.53) Synch=113.705±0.026 [113.647,113.766] M1=0.0062±0.0015 [0.0024,0.0094]
\r
1293 Wed Jul 22 12:12:19 2009 Calib: Wvl2=11770.0 Ps=0.4080±0.0061 IrAttn=0.9692±0.0009 IrAs=76.585±0.023 IrPsi=7.469±0.007 IrDel=69.906±0.051 <I>=9.083 MSE=4.53 (2.53) Synch=110.718±0.208 [110.508,111.239] M1=0.004±0.0015 [0.0012,0.007]
\r
1294 Wed Jul 22 12:12:19 2009 Calib: MSE=4.534 (2.531) AzOffset=-0.003±0.008015 ElOffset=-0.005±0.007132 DP=0.134±0.237
\r
1295 Wed Jul 22 13:22:21 2009 VASE File c:\wvase32\dat\210709 calibration wafer.dat
\r
1297 Mon Jul 27 14:49:41 2009 Init User: alex (v3.698, 6.256 DLL)
\r
1299 Mon Jul 27 14:55:27 2009
\r
1300 Mon Jul 27 14:55:27 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
1301 Mon Jul 27 15:06:35 2009 Calib: Wvl1=5000.0 Ps=0.4504±0.0058 Attn=1.0092±0.0006 As=130.056±0.018 Psi=18.649±0.041 Del=84.026±0.036 <I>=10.457, MSE=4.31 (2.45) Synch=-174.277±0.027 [-174.337,-174.217] M1=0.006±0.0021 [0.00077,0.0097]
\r
1302 Mon Jul 27 15:06:35 2009 Calib: Wvl2=11770.0 Ps=0.4504±0.0058 IrAttn=0.9685±0.0008 IrAs=127.641±0.021 IrPsi=7.416±0.007 IrDel=69.861±0.049 <I>=9.493 MSE=4.31 (2.45) Synch=-177.247±0.195 [-177.486,-176.536] M1=0.0046±0.0014 [0.0018,0.0078]
\r
1303 Mon Jul 27 15:06:35 2009 Calib: MSE=4.313 (2.450) AzOffset=-0.007±0.007654 ElOffset=-0.004±0.006842 DP=0.201±0.224
\r
1304 Mon Jul 27 15:18:20 2009
\r
1305 Mon Jul 27 15:18:20 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
1306 Mon Jul 27 15:29:27 2009 Calib: Wvl1=5000.0 Ps=0.4533±0.0069 Attn=1.0104±0.0005 As=129.994±0.013 Psi=18.679±0.025 Del=83.983±0.026 <I>=1.102, MSE=2.42 (2.72) Synch=-174.156±0.070 [-174.253,-174.058] M1=0.0018±0.00075 [0.00059,0.0047]
\r
1307 Mon Jul 27 15:29:27 2009 Calib: Wvl2=11770.0 Ps=0.4533±0.0069 IrAttn=0.9679±0.0008 IrAs=127.596±0.016 IrPsi=7.429±0.011 IrDel=69.759±0.055 <I>=1.338 MSE=2.42 (2.72) Synch=-177.078±0.143 [-177.277,-176.667] M1=0.0095±0.0031 [0.0023,0.014]
\r
1308 Mon Jul 27 15:29:28 2009 Calib: MSE=2.422 (2.715) AzOffset=0.003±0.004669 ElOffset=-0.012±0.004169 DP=0.139±0.144
\r
1309 Mon Jul 27 17:26:54 2009 VASE File c:\wvase32\dat\270709 au on si of 240709 align in.dat
\r
1311 Mon Aug 10 11:28:02 2009 Init User: alex (v3.698, 6.256 DLL)
\r
1313 Mon Aug 10 11:45:23 2009
\r
1314 Mon Aug 10 11:45:23 2009 Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=3
\r
1315 Mon Aug 10 11:49:52 2009 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
1316 Mon Aug 10 11:49:55 2009 Coarse Calib: Wvl1=5000.0 Ps=0.5071±0.0056 Attn=1.0102±0.0002 As=42.627±0.006 Psi=18.761±0.018 Del=83.875±0.017 <I>=18.218, MSE=1.49 (1.08)
\r
1317 Mon Aug 10 11:49:56 2009 Coarse Calib: MSE=1.485 (1.080) AzOffset=-0.010±0.003449 ElOffset=-0.013±0.003075
\r
1318 Mon Aug 10 12:36:55 2009
\r
1319 Mon Aug 10 12:36:55 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
1320 Mon Aug 10 12:48:03 2009 Calib: Wvl1=5000.0 Ps=0.5019±0.0029 Attn=1.0117±0.0003 As=42.451±0.009 Psi=18.736±0.021 Del=83.933±0.018 <I>=10.550, MSE=2.2 (1.3) Synch=-174.260±0.027 [-174.305,-174.213] M1=0.0074±0.002 [0.0046,0.012]
\r
1321 Mon Aug 10 12:48:03 2009 Calib: Wvl2=11770.0 Ps=0.5019±0.0029 IrAttn=0.9686±0.0004 IrAs=40.102±0.011 IrPsi=7.453±0.004 IrDel=69.862±0.025 <I>=9.724 MSE=2.2 (1.3) Synch=-177.278±0.052 [-177.371,-177.170] M1=0.01±0.0029 [0.0037,0.015]
\r
1322 Mon Aug 10 12:48:03 2009 Calib: MSE=2.201 (1.298) AzOffset=-0.005±0.003902 ElOffset=0.007±0.003483 DP=0.164±0.115
\r
1323 Mon Aug 10 14:08:14 2009 VASE File c:\wvase32\dat\100809 new glass slide.dat
\r
1324 Mon Aug 10 15:31:03 2009 RT File c:\wvase32\dat\100809 new glass slide rt.dat
\r
1326 Tue Aug 11 11:42:18 2009 Init User: alex (v3.698, 6.256 DLL)
\r
1328 Tue Aug 11 11:55:11 2009
\r
1329 Tue Aug 11 11:55:11 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
1330 Tue Aug 11 12:06:17 2009 Calib: Wvl1=5000.0 Ps=0.5407±0.0031 Attn=1.0097±0.0003 As=87.168±0.009 Psi=18.729±0.022 Del=83.934±0.019 <I>=9.821, MSE=2.3 (1.37) Synch=-30.590±0.060 [-30.688,-30.471] M1=0.006±0.0022 [0.003,0.01]
\r
1331 Tue Aug 11 12:06:17 2009 Calib: Wvl2=11770.0 Ps=0.5407±0.0031 IrAttn=0.9685±0.0004 IrAs=84.761±0.011 IrPsi=7.446±0.004 IrDel=69.936±0.026 <I>=9.194 MSE=2.3 (1.37) Synch=-33.333±0.048 [-33.421,-33.254] M1=0.0057±0.0018 [0.0022,0.0097]
\r
1332 Tue Aug 11 12:06:17 2009 Calib: MSE=2.302 (1.368) AzOffset=0.000±0.004077 ElOffset=0.007±0.003639 DP=0.223±0.120
\r
1333 Tue Aug 11 13:27:54 2009 VASE File c:\wvase32\dat\110809 310709 au on si.dat
\r
1335 Mon Aug 17 12:51:10 2009 Init User: alex (v3.698, 6.256 DLL)
\r
1337 Mon Aug 17 13:27:51 2009
\r
1338 Mon Aug 17 13:27:51 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
1339 Mon Aug 17 13:38:59 2009 Calib: Wvl1=5000.0 Ps=0.5847±0.0038 Attn=1.0102±0.0004 As=11.546±0.012 Psi=18.720±0.027 Del=83.912±0.023 <I>=9.776, MSE=2.82 (1.63) Synch=41.635±0.056 [41.565,41.898] M1=0.0072±0.0025 [0.0038,0.012]
\r
1340 Mon Aug 17 13:38:59 2009 Calib: Wvl2=11770.0 Ps=0.5847±0.0038 IrAttn=0.9688±0.0005 IrAs=9.177±0.014 IrPsi=7.447±0.005 IrDel=69.740±0.032 <I>=9.222 MSE=2.82 (1.63) Synch=38.697±0.037 [38.621,38.789] M1=0.0089±0.002 [0.0041,0.013]
\r
1341 Mon Aug 17 13:38:59 2009 Calib: MSE=2.817 (1.631) AzOffset=0.005±0.004993 ElOffset=0.008±0.004455 DP=0.192±0.147
\r
1342 Mon Aug 17 15:36:01 2009 VASE File c:\wvase32\dat\170809 old type of glass slide.dat
\r
1343 Mon Aug 17 16:58:04 2009 VASE File c:\wvase32\dat\170809 old type of glass slide roughened.dat
\r
1345 Tue Aug 18 09:52:57 2009 Init User: alex (v3.698, 6.256 DLL)
\r
1347 Tue Aug 18 12:29:24 2009
\r
1348 Tue Aug 18 12:29:24 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
1349 Tue Aug 18 12:40:31 2009 Calib: Wvl1=5000.0 Ps=0.6207±0.0066 Attn=1.0108±0.0005 As=167.028±0.013 Psi=19.177±0.024 Del=83.159±0.026 <I>=1.011, MSE=2.27 (3) Synch=-102.315±0.043 [-102.491,-102.203] M1=0.0025±0.0013 [0.00028,0.0067]
\r
1350 Tue Aug 18 12:40:31 2009 Calib: Wvl2=11770.0 Ps=0.6207±0.0066 IrAttn=0.9686±0.0008 IrAs=164.652±0.016 IrPsi=7.792±0.010 IrDel=69.856±0.051 <I>=1.296 MSE=2.27 (3) Synch=-105.305±0.088 [-105.550,-105.088] M1=0.0097±0.0044 [0.0013,0.02]
\r
1351 Tue Aug 18 12:40:31 2009 Calib: MSE=2.274 (2.997) AzOffset=-0.011±0.004404 ElOffset=0.000±0.003869 DP=0.270±0.141
\r
1352 Tue Aug 18 13:59:09 2009 VASE File c:\wvase32\dat\170809 170709 au on glass 2.67 a 15 mins back roughened align in.dat
\r
1353 Tue Aug 18 16:54:50 2009
\r
1354 Tue Aug 18 16:54:50 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
1355 Tue Aug 18 17:05:57 2009 Calib: Wvl1=5000.0 Ps=0.6236±0.0078 Attn=1.0114±0.0006 As=166.965±0.015 Psi=18.994±0.029 Del=83.373±0.030 <I>=1.087, MSE=2.76 (3.73) Synch=-102.318±0.023 [-102.371,-102.273] M1=0.0019±0.00076 [0.00017,0.0035]
\r
1356 Tue Aug 18 17:05:58 2009 Calib: Wvl2=11770.0 Ps=0.6236±0.0078 IrAttn=0.9685±0.0009 IrAs=164.601±0.018 IrPsi=7.675±0.012 IrDel=69.776±0.061 <I>=1.363 MSE=2.76 (3.73) Synch=-105.398±0.047 [-105.561,-105.284] M1=0.0065±0.0026 [0.0012,0.017]
\r
1357 Tue Aug 18 17:05:58 2009 Calib: MSE=2.762 (3.728) AzOffset=-0.003±0.005311 ElOffset=0.007±0.004686 DP=0.259±0.167
\r
1358 Tue Aug 18 18:11:49 2009 VASE File c:\wvase32\dat\170809 170709 au on glass 2.634a 20 mins back roughened align in.dat
\r
1359 Thu Sep 03 10:51:41 2009 Initializing Error: User Canceled Initialization.
\r
1360 Thu Sep 03 10:51:49 2009 Initializing Error: MonoInitWait() DK
\r
1361 Thu Sep 03 10:51:51 2009 SendMonoCmd Error: Monochromator Command Return Failed 31. DK
\r
1362 Thu Sep 03 10:52:53 2009 GetMonoStatus Error: Mono Return Failed 27. rtn=1. DK
\r
1363 Thu Sep 03 10:52:53 2009 d=01 cmd=255 00 00 00 00 00 00 00 00 00 00
\r
1364 Thu Sep 03 10:52:53 2009 MonoCheck Error: Monochromator Communication Failed. DK
\r
1365 Thu Sep 03 10:52:53 2009 Could Not Adjust Slit Width. DK
\r
1366 Thu Sep 03 10:55:05 2009 Could not initialize ComPort for DK Monochromator.
\r
1367 Thu Sep 03 10:55:06 2009 SendMonoCmd Error: Monochromator Command Return Failed 31. DK
\r
1368 Thu Sep 03 10:55:44 2009 GetMonoStatus Error: Mono Return Failed 27. rtn=1. DK
\r
1369 Thu Sep 03 10:55:44 2009 d=01 cmd=27 00 00 00 00 00 00 00 00 00 00
\r
1370 Thu Sep 03 10:55:44 2009 MonoCheck Error: Monochromator Communication Failed. DK
\r
1371 Thu Sep 03 10:55:44 2009 Could Not Adjust Slit Width. DK
\r
1373 Thu Sep 03 11:02:58 2009 Init User: alex (v3.698, 6.256 DLL)
\r
1375 Thu Sep 03 11:30:00 2009
\r
1376 Thu Sep 03 11:30:00 2009 Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=3
\r
1377 Thu Sep 03 11:34:30 2009 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
1378 Thu Sep 03 11:34:33 2009 Coarse Calib: Wvl1=5000.0 Ps=0.6743±0.0091 Attn=1.0094±0.0003 As=179.971±0.009 Psi=19.147±0.029 Del=83.115±0.027 <I>=13.539, MSE=2.37 (1.77)
\r
1379 Thu Sep 03 11:34:33 2009 Coarse Calib: MSE=2.367 (1.773) AzOffset=-0.012±0.005463 ElOffset=0.002±0.004800
\r
1380 Thu Sep 03 11:47:55 2009
\r
1381 Thu Sep 03 11:47:55 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
1382 Thu Sep 03 11:57:14 2009 Calib: Wvl1=5000.0 Ps=0.6698±0.0044 Attn=1.0102±0.0005 As=0.001±0.013 Psi=19.141±0.030 Del=83.142±0.027 <I>=7.802, MSE=3.2 (1.91) Synch=97.264±0.015 [97.225,97.288] M1=0.0015±0.00084 [0.00014,0.0031]
\r
1383 Thu Sep 03 11:57:14 2009 Calib: Wvl2=11770.0 Ps=0.6698±0.0044 IrAttn=0.9679±0.0006 IrAs=177.556±0.016 IrPsi=7.697±0.005 IrDel=69.967±0.036 <I>=8.595 MSE=3.2 (1.91) Synch=94.894±0.178 [94.654,95.390] M1=0.028±0.0076 [0.011,0.037]
\r
1384 Thu Sep 03 11:57:15 2009 Calib: MSE=3.204 (1.907) AzOffset=0.008±0.005623 ElOffset=0.011±0.004946 DP=0.186±0.170
\r
1385 Thu Sep 03 13:46:45 2009 VASE File c:\wvase32\dat\030909 si-sergey ss.dat
\r
1386 Thu Sep 03 15:42:01 2009 VASE File c:\wvase32\dat\030909 si+multilayers-sergey ss.dat
\r
1388 Tue Sep 22 08:52:23 2009 Init User: alex (v3.698, 6.256 DLL)
\r
1390 Tue Sep 22 09:13:07 2009
\r
1391 Tue Sep 22 09:13:07 2009 Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=3
\r
1392 Tue Sep 22 09:17:36 2009 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
1393 Tue Sep 22 09:17:39 2009 Coarse Calib: Wvl1=5000.0 Ps=0.7109±0.0073 Attn=1.0096±0.0003 As=25.562±0.007 Psi=20.147±0.023 Del=81.368±0.023 <I>=14.646, MSE=1.89 (1.38)
\r
1394 Tue Sep 22 09:17:40 2009 Coarse Calib: MSE=1.891 (1.378) AzOffset=0.015±0.004258 ElOffset=0.010±0.003622
\r
1395 Tue Sep 22 10:08:10 2009
\r
1396 Tue Sep 22 10:08:10 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
1397 Tue Sep 22 10:17:45 2009 Calib: Wvl1=5000.0 Ps=0.7124±0.0037 Attn=1.0108±0.0004 As=25.496±0.011 Psi=20.073±0.024 Del=81.525±0.024 <I>=8.761, MSE=2.64 (1.57) Synch=-29.770±0.024 [-29.852,-29.736] M1=0.0016±0.00047 [0.00064,0.0026]
\r
1398 Tue Sep 22 10:17:46 2009 Calib: Wvl2=11770.0 Ps=0.7124±0.0037 IrAttn=0.9681±0.0005 IrAs=23.119±0.014 IrPsi=8.062±0.004 IrDel=70.417±0.029 <I>=9.163 MSE=2.64 (1.57) Synch=-32.853±0.032 [-32.915,-32.803] M1=0.019±0.0052 [0.0072,0.026]
\r
1399 Tue Sep 22 10:17:46 2009 Calib: MSE=2.644 (1.571) AzOffset=-0.004±0.004545 ElOffset=-0.001±0.003878 DP=0.164±0.146
\r
1400 Tue Sep 22 12:29:47 2009 VASE File c:\wvase32\dat\220909 500z30 ss.dat
\r
1401 Tue Sep 22 17:25:47 2009 RT File c:\wvase32\dat\220909 500z30 rt.dat
\r
1403 Tue Oct 27 09:53:48 2009 Init User: alex (v3.698, 6.256 DLL)
\r
1405 Tue Oct 27 10:40:40 2009
\r
1406 Tue Oct 27 10:40:40 2009 Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=3
\r
1407 Tue Oct 27 10:45:10 2009 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
1408 Tue Oct 27 10:45:12 2009 Coarse Calib: Wvl1=5000.0 Ps=0.7441±0.0105 Attn=1.0113±0.0004 As=128.222±0.010 Psi=19.411±0.032 Del=82.643±0.031 <I>=10.559, MSE=2.63 (1.98)
\r
1409 Tue Oct 27 10:45:13 2009 Coarse Calib: MSE=2.627 (1.977) AzOffset=-0.020±0.006065 ElOffset=-0.024±0.005286
\r
1410 Tue Oct 27 10:55:16 2009
\r
1411 Tue Oct 27 10:55:16 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
1412 Tue Oct 27 11:04:37 2009 Calib: Wvl1=5000.0 Ps=0.7498±0.0060 Attn=1.0119±0.0007 As=128.194±0.018 Psi=19.346±0.040 Del=82.563±0.037 <I>=6.208, MSE=4.22 (2.44) Synch=-47.005±0.019 [-47.070,-46.972] M1=0.0014±0.00068 [0.00022,0.0032]
\r
1413 Tue Oct 27 11:04:38 2009 Calib: Wvl2=11770.0 Ps=0.7498±0.0060 IrAttn=0.9685±0.0008 IrAs=125.864±0.022 IrPsi=7.818±0.007 IrDel=70.281±0.048 <I>=7.346 MSE=4.22 (2.44) Synch=-49.708±0.042 [-49.777,-49.648] M1=0.023±0.0056 [0.0073,0.029]
\r
1414 Tue Oct 27 11:04:38 2009 Calib: MSE=4.225 (2.437) AzOffset=0.007±0.007435 ElOffset=-0.020±0.006474 DP=0.838±0.226
\r
1415 Tue Oct 27 13:53:59 2009 VASE File c:\wvase32\dat\271009 500z30 ss.dat
\r
1416 Tue Oct 27 15:09:44 2009 RT File c:\wvase32\dat\271009 500z30 rt.dat
\r
1418 Wed Oct 28 10:31:15 2009 Init User: alex (v3.698, 6.256 DLL)
\r
1420 Wed Oct 28 10:43:46 2009
\r
1421 Wed Oct 28 10:43:46 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
1422 Wed Oct 28 10:54:54 2009 Calib: Wvl1=5000.0 Ps=0.7973±0.0040 Attn=1.0105±0.0004 As=111.491±0.012 Psi=19.886±0.026 Del=81.840±0.025 <I>=6.063, MSE=2.77 (1.67) Synch=96.795±0.046 [96.716,96.894] M1=0.0017±0.00048 [0.00082,0.0031]
\r
1423 Wed Oct 28 10:54:54 2009 Calib: Wvl2=11770.0 Ps=0.7973±0.0040 IrAttn=0.9683±0.0005 IrAs=109.054±0.014 IrPsi=7.992±0.005 IrDel=70.246±0.031 <I>=7.266 MSE=2.77 (1.67) Synch=94.164±0.043 [94.098,94.265] M1=0.027±0.0059 [0.014,0.035]
\r
1424 Wed Oct 28 10:54:54 2009 Calib: MSE=2.766 (1.670) AzOffset=0.014±0.004777 ElOffset=0.016±0.004101 DP=0.098±0.152
\r
1425 Wed Oct 28 11:41:01 2009 RT File c:\wvase32\dat\281009luka.dat
\r
1426 Wed Oct 28 11:42:29 2009 RT File c:\wvase32\dat\281009luka1.dat
\r
1427 Wed Oct 28 11:56:27 2009 RT File c:\wvase32\dat\281009luka1.dat
\r
1428 Wed Oct 28 13:48:54 2009 RT File c:\wvase32\dat\281009luka2pol.dat
\r
1429 Wed Oct 28 14:19:28 2009 RT File c:\wvase32\dat\281009luka3.dat
\r
1430 Wed Oct 28 14:24:06 2009 RT File c:\wvase32\dat\281009luka468filter.dat
\r
1431 Wed Oct 28 15:28:03 2009 RT File c:\wvase32\dat\281009luka468filter.dat
\r
1432 Wed Oct 28 15:42:05 2009 RT File c:\wvase32\dat\281009luka468filter2.dat
\r
1433 Wed Oct 28 15:46:57 2009 RT File c:\wvase32\dat\281009luka468filter3.dat
\r
1435 Thu Oct 29 09:17:01 2009 Init User: alex (v3.698, 6.256 DLL)
\r
1437 Thu Oct 29 09:26:39 2009
\r
1438 Thu Oct 29 09:26:39 2009 Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=3
\r
1439 Thu Oct 29 09:31:09 2009 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
1440 Thu Oct 29 09:31:12 2009 Coarse Calib: Wvl1=5000.0 Ps=0.8361±0.0073 Attn=1.0097±0.0003 As=129.198±0.007 Psi=19.889±0.022 Del=81.923±0.022 <I>=11.554, MSE=1.85 (1.38)
\r
1441 Thu Oct 29 09:31:12 2009 Coarse Calib: MSE=1.853 (1.375) AzOffset=0.006±0.004208 ElOffset=0.007±0.003617
\r
1442 Thu Oct 29 11:00:24 2009
\r
1443 Thu Oct 29 11:00:24 2009 Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=3
\r
1444 Thu Oct 29 11:04:55 2009 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
1445 Thu Oct 29 11:04:57 2009 Coarse Calib: Wvl1=5000.0 Ps=0.8331±0.0067 Attn=1.0116±0.0003 As=128.970±0.007 Psi=19.888±0.021 Del=81.967±0.020 <I>=12.730, MSE=1.71 (1.26)
\r
1446 Thu Oct 29 11:04:57 2009 Coarse Calib: MSE=1.709 (1.261) AzOffset=0.002±0.003878 ElOffset=0.010±0.003337
\r
1447 Thu Oct 29 11:18:08 2009
\r
1448 Thu Oct 29 11:18:08 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
1449 Thu Oct 29 11:27:29 2009 Calib: Wvl1=5000.0 Ps=0.8336±0.0034 Attn=1.0118±0.0004 As=128.985±0.010 Psi=19.878±0.023 Del=81.998±0.022 <I>=7.571, MSE=2.49 (1.46) Synch=-29.270±0.021 [-29.312,-29.235] M1=0.0018±0.00081 [0.00037,0.003]
\r
1450 Thu Oct 29 11:27:29 2009 Calib: Wvl2=11770.0 Ps=0.8336±0.0034 IrAttn=0.9689±0.0005 IrAs=126.640±0.013 IrPsi=7.979±0.004 IrDel=70.415±0.027 <I>=8.758 MSE=2.49 (1.46) Synch=-32.356±0.048 [-32.450,-32.294] M1=0.027±0.0075 [0.0083,0.035]
\r
1451 Thu Oct 29 11:27:29 2009 Calib: MSE=2.486 (1.455) AzOffset=-0.002±0.004291 ElOffset=0.001±0.003694 DP=0.191±0.136
\r
1452 Thu Oct 29 12:37:45 2009 RT File c:\wvase32\dat\291009 500z30 repeat.dat
\r
1453 Thu Oct 29 14:22:31 2009 VASE File c:\wvase32\dat\291009 500z30 repeat ss.dat
\r
1455 Fri Oct 30 09:23:01 2009 Init User: alex (v3.698, 6.256 DLL)
\r
1457 Fri Oct 30 09:30:24 2009
\r
1458 Fri Oct 30 09:30:24 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
1459 Fri Oct 30 09:41:31 2009 Calib: Wvl1=5000.0 Ps=0.8775±0.0053 Attn=1.0100±0.0006 As=100.866±0.016 Psi=20.053±0.035 Del=81.573±0.034 <I>=7.406, MSE=3.81 (2.17) Synch=-30.129±0.165 [-30.312,-29.684] M1=0.0015±0.00074 [0.00026,0.003]
\r
1460 Fri Oct 30 09:41:31 2009 Calib: Wvl2=11770.0 Ps=0.8775±0.0053 IrAttn=0.9681±0.0007 IrAs=98.439±0.020 IrPsi=8.070±0.006 IrDel=70.412±0.041 <I>=8.748 MSE=3.81 (2.17) Synch=-33.244±0.045 [-33.328,-33.166] M1=0.025±0.0065 [0.011,0.034]
\r
1461 Fri Oct 30 09:41:31 2009 Calib: MSE=3.815 (2.170) AzOffset=0.012±0.006561 ElOffset=0.006±0.005603 DP=0.313±0.210
\r
1462 Fri Oct 30 10:21:56 2009 RT File c:\wvase32\dat\301009 baseline500z30mg15.dat
\r
1463 Fri Oct 30 11:41:56 2009 RT File c:\wvase32\dat\301009 baseline500z30mg15.dat
\r
1464 Fri Oct 30 12:18:53 2009 RT File c:\wvase32\dat\301009 500z30mg15 rt.dat
\r
1465 Fri Oct 30 13:18:44 2009 VASE File c:\wvase32\dat\301009 500z30mg15 ss.dat
\r
1467 Thu Nov 05 14:41:36 2009 Init User: alex (v3.698, 6.256 DLL)
\r
1470 Mon Nov 09 10:47:42 2009 Init User: alex (v3.698, 6.256 DLL)
\r
1472 Mon Nov 09 10:55:38 2009
\r
1473 Mon Nov 09 10:55:38 2009 Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=3
\r
1474 Mon Nov 09 11:00:07 2009 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
1475 Mon Nov 09 11:00:11 2009 Coarse Calib: Wvl1=5000.0 Ps=0.9149±0.0070 Attn=1.0109±0.0003 As=99.555±0.007 Psi=20.454±0.021 Del=81.066±0.022 <I>=15.427, MSE=1.8 (1.32)
\r
1476 Mon Nov 09 11:00:11 2009 Coarse Calib: MSE=1.801 (1.315) AzOffset=0.012±0.004023 ElOffset=0.004±0.003404
\r
1477 Mon Nov 09 11:03:14 2009
\r
1478 Mon Nov 09 11:03:14 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
1479 Mon Nov 09 11:12:35 2009 Calib: Wvl1=5000.0 Ps=0.9191±0.0038 Attn=1.0113±0.0004 As=99.541±0.011 Psi=20.452±0.025 Del=81.078±0.025 <I>=9.206, MSE=2.76 (1.57) Synch=167.832±0.020 [167.797,167.866] M1=0.0043±0.00078 [0.0025,0.0056]
\r
1480 Mon Nov 09 11:12:35 2009 Calib: Wvl2=11770.0 Ps=0.9191±0.0038 IrAttn=0.9685±0.0005 IrAs=97.153±0.014 IrPsi=8.274±0.005 IrDel=70.634±0.029 <I>=9.703 MSE=2.76 (1.57) Synch=165.160±0.044 [165.082,165.236] M1=0.026±0.0053 [0.014,0.033]
\r
1481 Mon Nov 09 11:12:35 2009 Calib: MSE=2.763 (1.569) AzOffset=-0.002±0.004701 ElOffset=-0.000±0.003979 DP=0.186±0.155
\r
1482 Mon Nov 09 12:04:08 2009 RT File c:\wvase32\dat\071109 baseline.dat
\r
1483 Mon Nov 09 12:51:56 2009 RT File c:\wvase32\dat\071109 500z30mg16 trans.dat
\r
1484 Mon Nov 09 15:00:01 2009 VASE File c:\wvase32\dat\071109 500z30mg16 ss.dat
\r
1486 Fri Nov 13 10:11:37 2009 Init User: alex (v3.698, 6.256 DLL)
\r
1488 Fri Nov 13 10:21:55 2009
\r
1489 Fri Nov 13 10:21:55 2009 Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=3
\r
1490 Fri Nov 13 10:26:24 2009 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
1491 Fri Nov 13 10:26:27 2009 Coarse Calib: Wvl1=5000.0 Ps=0.9625±0.0072 Attn=1.0108±0.0003 As=138.278±0.007 Psi=21.400±0.021 Del=79.625±0.023 <I>=13.154, MSE=1.81 (1.33)
\r
1492 Fri Nov 13 10:26:27 2009 Coarse Calib: MSE=1.812 (1.328) AzOffset=-0.013±0.003975 ElOffset=-0.001±0.003274
\r
1493 Fri Nov 13 10:44:30 2009
\r
1494 Fri Nov 13 10:44:30 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
1495 Fri Nov 13 10:53:50 2009 Calib: Wvl1=5000.0 Ps=0.9618±0.0037 Attn=1.0121±0.0004 As=138.173±0.011 Psi=21.378±0.023 Del=79.645±0.025 <I>=8.355, MSE=2.59 (1.48) Synch=-30.096±0.023 [-30.137,-30.045] M1=0.0015±0.00043 [0.00064,0.0024]
\r
1496 Fri Nov 13 10:53:50 2009 Calib: Wvl2=11770.0 Ps=0.9618±0.0037 IrAttn=0.9688±0.0005 IrAs=135.814±0.014 IrPsi=8.711±0.004 IrDel=70.889±0.027 <I>=9.822 MSE=2.59 (1.48) Synch=-33.179±0.040 [-33.253,-33.116] M1=0.025±0.0061 [0.013,0.033]
\r
1497 Fri Nov 13 10:53:50 2009 Calib: MSE=2.590 (1.482) AzOffset=0.002±0.004328 ElOffset=-0.009±0.003568 DP=0.149±0.150
\r
1498 Fri Nov 13 16:41:57 2009 VASE File c:\wvase32\dat\131109 500z30 ss slightly anisotropic.dat
\r
1500 Fri Nov 20 12:18:43 2009 Init User: alex (v3.698, 6.256 DLL)
\r
1503 Tue Nov 24 09:46:28 2009 Init User: alex (v3.698, 6.256 DLL)
\r
1505 Tue Nov 24 09:52:02 2009
\r
1506 Tue Nov 24 09:52:02 2009 Calib: rvs=5, pts=100, span=180.0, aoi=80.000, t=0, d=3
\r
1507 Tue Nov 24 09:56:30 2009 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
1508 Tue Nov 24 09:56:34 2009 Coarse Calib: Wvl1=5000.0 Ps=1.0145±0.0157 Attn=1.0116±0.0004 As=0.591±0.013 Psi=25.314±0.019 Del=48.784±0.063 <I>=1.649, MSE=1.68 (1.99)
\r
1509 Tue Nov 24 09:56:34 2009 Coarse Calib: MSE=1.678 (1.991) AzOffset=0.023±0.008030 ElOffset=-0.010±0.003429
\r
1510 Tue Nov 24 11:12:54 2009
\r
1511 Tue Nov 24 11:12:54 2009 Calib: rvs=30, pts=60, span=60.0, aoi=80.000, t=1, d=3
\r
1512 Tue Nov 24 11:22:28 2009 Calib: Wvl1=5000.0 Ps=1.0087±0.0100 Attn=1.0126±0.0005 As=0.455±0.016 Psi=25.258±0.017 Del=48.663±0.055 <I>=1.178, MSE=2.35 (1.74) Synch=-173.958±0.022 [-174.004,-173.919] M1=0.0019±0.00088 [5.4e-005,0.0036]
\r
1513 Tue Nov 24 11:22:28 2009 Calib: Wvl2=11770.0 Ps=1.0087±0.0100 IrAttn=0.9690±0.0007 IrAs=178.148±0.022 IrPsi=16.699±0.006 IrDel=26.936±0.093 <I>=2.160 MSE=2.35 (1.74) Synch=-177.319±0.050 [-177.430,-177.243] M1=0.019±0.0073 [0.0094,0.031]
\r
1514 Tue Nov 24 11:22:28 2009 Calib: MSE=2.345 (1.745) AzOffset=-0.002±0.006935 ElOffset=0.015±0.002976 DP=0.235±0.142
\r
1515 Tue Nov 24 16:28:55 2009 VASE File c:\wvase32\dat\241109 ss 500z30 high anisotropy.dat
\r
1517 Mon Dec 14 14:43:56 2009 Init User: alex (v3.698, 6.256 DLL)
\r
1520 Mon Dec 14 14:55:46 2009 Init User: alex (v3.698, 6.256 DLL)
\r
1522 Mon Dec 14 15:04:29 2009
\r
1523 Mon Dec 14 15:04:29 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
1524 Mon Dec 14 15:15:37 2009 Calib: Wvl1=5000.0 Ps=1.0101±0.0041 Attn=1.0123±0.0005 As=26.962±0.012 Psi=19.195±0.028 Del=83.102±0.026 <I>=7.146, MSE=2.98 (1.72) Synch=-46.293±0.146 [-46.447,-45.826] M1=0.005±0.0012 [0.0031,0.0085]
\r
1525 Mon Dec 14 15:15:38 2009 Calib: Wvl2=11770.0 Ps=1.0101±0.0041 IrAttn=0.9699±0.0006 IrAs=24.653±0.015 IrPsi=7.697±0.005 IrDel=70.293±0.034 <I>=8.109 MSE=2.98 (1.72) Synch=-49.415±0.051 [-49.526,-49.353] M1=0.04±0.009 [0.021,0.052]
\r
1526 Mon Dec 14 15:15:38 2009 Calib: MSE=2.983 (1.724) AzOffset=-0.013±0.005239 ElOffset=0.008±0.004602 DP=0.162±0.159
\r
1527 Mon Dec 21 10:18:59 2009 Initializing Error: Could not establish communication with the DK monochromator.
\r
1528 Mon Dec 21 10:19:23 2009 Initializing Error: MonoInitWait() DK
\r
1529 Mon Dec 21 10:19:44 2009 SendMonoCmd Error: Monochromator Command Return Failed 31. DK
\r
1530 Mon Dec 21 10:20:20 2009 GetMonoStatus Error: Mono Return Failed 27. rtn=1. DK
\r
1531 Mon Dec 21 10:20:20 2009 d=01 cmd=255 00 00 00 00 00 00 00 00 00 00
\r
1532 Mon Dec 21 10:20:20 2009 MonoCheck Error: Monochromator Communication Failed. DK
\r
1533 Mon Dec 21 10:20:20 2009 Could Not Adjust Slit Width. DK
\r
1534 Mon Dec 21 10:20:54 2009 Could not initialize ComPort for DK Monochromator.
\r
1535 Mon Dec 21 10:20:55 2009 SendMonoCmd Error: Monochromator Command Return Failed 31. DK
\r
1536 Mon Dec 21 10:21:31 2009 GetMonoStatus Error: Mono Return Failed 27. rtn=1. DK
\r
1537 Mon Dec 21 10:21:31 2009 d=01 cmd=27 00 00 00 00 00 00 00 00 00 00
\r
1538 Mon Dec 21 10:21:31 2009 MonoCheck Error: Monochromator Communication Failed. DK
\r
1539 Mon Dec 21 10:21:31 2009 Could Not Adjust Slit Width. DK
\r
1540 Mon Dec 21 10:21:38 2009 Could not initialize ComPort for DK Monochromator.
\r
1541 Mon Dec 21 10:21:40 2009 SendMonoCmd Error: Monochromator Command Return Failed 31. DK
\r
1542 Mon Dec 21 10:22:15 2009 GetMonoStatus Error: Mono Return Failed 27. rtn=1. DK
\r
1543 Mon Dec 21 10:22:15 2009 d=01 cmd=27 00 00 00 00 00 00 00 00 00 00
\r
1544 Mon Dec 21 10:22:15 2009 MonoCheck Error: Monochromator Communication Failed. DK
\r
1545 Mon Dec 21 10:22:15 2009 Could Not Adjust Slit Width. DK
\r
1546 Mon Dec 21 10:22:37 2009 Could not initialize ComPort for DK Monochromator.
\r
1547 Mon Dec 21 10:22:39 2009 SendMonoCmd Error: Monochromator Command Return Failed 31. DK
\r
1548 Mon Dec 21 10:23:14 2009 GetMonoStatus Error: Mono Return Failed 27. rtn=1. DK
\r
1549 Mon Dec 21 10:23:14 2009 d=01 cmd=27 00 00 00 00 00 00 00 00 00 00
\r
1550 Mon Dec 21 10:23:14 2009 MonoCheck Error: Monochromator Communication Failed. DK
\r
1551 Mon Dec 21 10:23:14 2009 Could Not Adjust Slit Width. DK
\r
1553 Mon Dec 21 10:28:00 2009 Init User: alex (v3.698, 6.256 DLL)
\r
1555 Mon Dec 21 10:48:45 2009
\r
1556 Mon Dec 21 10:48:45 2009 Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=3
\r
1557 Mon Dec 21 10:53:15 2009 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
1558 Mon Dec 21 10:53:17 2009 Coarse Calib: Wvl1=5000.0 Ps=1.0766±0.0573 Attn=1.0109±0.0009 As=179.522±0.025 Psi=4.782±0.055 Del=151.070±1.180 <I>=10.715, MSE=7.03 (5.46)
\r
1559 Mon Dec 21 10:53:18 2009 Coarse Calib: MSE=7.025 (5.464) AzOffset=-0.028±0.055685 ElOffset=0.084±0.197437
\r
1560 Mon Dec 21 11:30:10 2009
\r
1561 Mon Dec 21 11:30:10 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
1562 Mon Dec 21 11:39:46 2009 Calib: Wvl1=5000.0 Ps=1.0668±0.0037 Attn=1.0120±0.0002 As=179.380±0.005 Psi=4.772±0.008 Del=151.579±0.188 <I>=5.217, MSE=1.48 (4.06) Synch=41.743±0.056 [41.671,41.958] M1=0.0024±0.00081 [0.00034,0.0061]
\r
1563 Mon Dec 21 11:39:47 2009 Calib: Wvl2=11770.0 Ps=1.0668±0.0037 IrAttn=0.9689±0.0002 IrAs=177.097±0.006 IrPsi=1.863±0.004 IrDel=22.989±0.291 <I>=7.298 MSE=1.48 (4.06) Synch=38.595±0.124 [38.116,39.046] M1=0.028±0.0031 [0.018,0.04]
\r
1564 Mon Dec 21 11:39:47 2009 Calib: MSE=1.479 (4.062) AzOffset=-0.039±0.008908 ElOffset=0.057±0.029388 DP=0.007±0.011
\r
1565 Mon Dec 21 14:12:54 2009 VASE File c:\wvase32\dat\211209 500z30 cu 0.05.dat
\r
1566 Mon Dec 21 15:40:06 2009 RT File c:\wvase32\dat\211209 500z30 cu 005 rt.dat
\r
1568 Tue Dec 22 09:21:19 2009 Init User: alex (v3.698, 6.256 DLL)
\r
1570 Tue Dec 22 09:28:23 2009
\r
1571 Tue Dec 22 09:28:23 2009 Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=3
\r
1572 Tue Dec 22 09:32:53 2009 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
1573 Tue Dec 22 09:32:56 2009 Coarse Calib: Wvl1=5000.0 Ps=1.1127±0.0104 Attn=1.0105±0.0002 As=119.933±0.005 Psi=4.725±0.010 Del=152.048±0.218 <I>=11.265, MSE=1.29 (1.98)
\r
1574 Tue Dec 22 09:32:56 2009 Coarse Calib: MSE=1.294 (1.976) AzOffset=0.001±0.010521 ElOffset=0.015±0.036642
\r
1575 Tue Dec 22 09:34:45 2009
\r
1576 Tue Dec 22 09:34:45 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
1577 Tue Dec 22 09:44:07 2009 Calib: Wvl1=5000.0 Ps=1.1248±0.0031 Attn=1.0105±0.0002 As=119.867±0.004 Psi=4.724±0.007 Del=152.180±0.158 <I>=5.210, MSE=1.23 (3.19) Synch=-102.403±0.065 [-102.522,-102.134] M1=0.0019±0.00097 [0.00073,0.007]
\r
1578 Tue Dec 22 09:44:07 2009 Calib: Wvl2=11770.0 Ps=1.1248±0.0031 IrAttn=0.9685±0.0002 IrAs=117.541±0.005 IrPsi=1.867±0.003 IrDel=22.344±0.256 <I>=7.048 MSE=1.23 (3.19) Synch=-105.430±0.103 [-105.546,-104.917] M1=0.032±0.0047 [0.009,0.036]
\r
1579 Tue Dec 22 09:44:08 2009 Calib: MSE=1.232 (3.191) AzOffset=-0.028±0.007543 ElOffset=0.049±0.025361 DP=0.005±0.009
\r
1580 Tue Dec 22 10:03:06 2009 RT File c:\wvase32\dat\221209 base 2000micron slit.dat
\r
1581 Tue Dec 22 10:20:48 2009 RT File c:\wvase32\dat\221209 base 200micron slit.dat
\r
1582 Tue Dec 22 14:33:47 2009
\r
1583 Tue Dec 22 14:33:48 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
1584 Tue Dec 22 14:45:05 2009 Calib: Wvl1=5000.0 Ps=1.1328±0.0390 Attn=1.0131±0.0005 As=119.599±0.013 Psi=4.727±0.015 Del=152.766±0.318 <I>=0.400, MSE=1.73 (44.4) Synch=-101.923±0.386 [-103.574,-99.746] M1=0.011±0.016 [0.0006,0.073]
\r
1585 Tue Dec 22 14:45:05 2009 Calib: Wvl2=11770.0 Ps=1.1328±0.0390 IrAttn=0.9696±0.0007 IrAs=117.340±0.017 IrPsi=1.803±0.040 IrDel=18.987±3.754 <I>=0.548 MSE=1.73 (44.4) Synch=-105.079±0.955 [-107.837,-100.177] M1=0.055±0.05 [0.024,0.28]
\r
1586 Tue Dec 22 14:45:06 2009 Calib: MSE=1.734 (44.381) AzOffset=-0.005±0.015200 ElOffset=-0.028±0.051917 DP=0.038±0.035
\r
1587 Tue Dec 22 16:41:08 2009 VASE File c:\wvase32\dat\221209 500z30cu2 ss.dat
\r
1589 Wed Dec 23 09:07:41 2009 Init User: alex (v3.698, 6.256 DLL)
\r
1592 Wed Dec 23 09:28:52 2009 Init User: alex (v3.698, 6.256 DLL)
\r
1594 Wed Dec 23 09:33:48 2009
\r
1595 Wed Dec 23 09:33:48 2009 Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=3
\r
1596 Wed Dec 23 09:40:23 2009 Calib: Diagnose bd:50, 36, 29, 22, 27, 20, 13, 9, 6, 52, pxy90=33.5,74.77,0.00,0.00 (23, 21, 29, 21, 25, 25, 15, 12, 14, 79, wpxy51=0.0645,3.86,0.00,0.00)
\r
1597 Wed Dec 23 09:40:23 2009 Coarse Calibration was not successful.
\r
1598 Wed Dec 23 09:41:27 2009 Coarse Calib: Wvl1=5000.0 Ps=1.1771±0.3290 Attn=1.0087±0.0015 As=151.811±0.054 Psi=4.722±0.092 Del=152.276±2.053 <I>=1.330, MSE=7.57 (10.5)
\r
1599 Wed Dec 23 09:41:28 2009 Coarse Calib: MSE=7.568 (10.513) AzOffset=-0.011±0.093034 ElOffset=0.168±0.322055
\r
1600 Wed Dec 23 09:42:00 2009
\r
1601 Wed Dec 23 09:42:00 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
1602 Wed Dec 23 09:50:51 2009 Calib: Wvl1=5000.0 Ps=1.1953±0.0046 Attn=1.0107±0.0003 As=151.733±0.006 Psi=4.750±0.009 Del=152.158±0.190 <I>=0.678, MSE=1.27 (4.82) Synch=113.910±0.207 [113.706,115.002] M1=0.0049±0.006 [0.00023,0.032]
\r
1603 Wed Dec 23 09:50:51 2009 Calib: Wvl2=11770.0 Ps=1.1953±0.0046 IrAttn=0.9686±0.0002 IrAs=149.442±0.005 IrPsi=1.837±0.003 IrDel=23.002±0.224 <I>=8.945 MSE=1.27 (4.82) Synch=110.556±0.073 [110.445,110.943] M1=0.02±0.0034 [0.0072,0.027]
\r
1604 Wed Dec 23 09:50:52 2009 Calib: MSE=1.273 (4.824) AzOffset=-0.017±0.009101 ElOffset=0.036±0.031569 DP=-0.004±0.017
\r
1605 Wed Dec 23 09:58:52 2009
\r
1606 Wed Dec 23 09:58:52 2009 Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=3
\r
1607 Wed Dec 23 10:03:36 2009 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
1608 Wed Dec 23 10:03:40 2009 Coarse Calib: Wvl1=5000.0 Ps=1.1508±0.0848 Attn=1.0114±0.0004 As=151.708±0.014 Psi=4.747±0.024 Del=152.291±0.515 <I>=1.387, MSE=2.06 (7.16)
\r
1609 Wed Dec 23 10:03:40 2009 Coarse Calib: MSE=2.059 (7.163) AzOffset=-0.048±0.024703 ElOffset=-0.013±0.085331
\r
1610 Wed Dec 23 10:04:50 2009
\r
1611 Wed Dec 23 10:04:50 2009 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
1612 Wed Dec 23 10:13:40 2009 Calib: Wvl1=5000.0 Ps=1.1864±0.0040 Attn=1.0116±0.0002 As=151.696±0.005 Psi=4.744±0.008 Del=152.312±0.170 <I>=0.692, MSE=1.14 (5.86) Synch=113.990±0.269 [113.770,115.495] M1=0.0051±0.0064 [0.00021,0.038]
\r
1613 Wed Dec 23 10:13:40 2009 Calib: Wvl2=11770.0 Ps=1.1864±0.0040 IrAttn=0.9691±0.0002 IrAs=149.404±0.005 IrPsi=1.830±0.003 IrDel=22.569±0.203 <I>=9.071 MSE=1.14 (5.86) Synch=110.590±0.083 [110.203,110.890] M1=0.02±0.0031 [0.011,0.031]
\r
1614 Wed Dec 23 10:13:41 2009 Calib: MSE=1.139 (5.860) AzOffset=0.045±0.008131 ElOffset=0.048±0.027931 DP=0.000±0.015
\r
1615 Wed Dec 23 10:20:41 2009 RT File c:\wvase32\dat\231209 baseline 2000 micron.dat
\r
1616 Wed Dec 23 10:24:24 2009 RT File c:\wvase32\dat\231209 baseline 200 micron.dat
\r
1617 Wed Dec 23 10:25:13 2009 RT File c:\wvase32\dat\231209 baseline 200 micron.dat
\r
1618 Wed Dec 23 10:30:46 2009 RT File c:\wvase32\dat\231209 baseline 200 micron test.dat
\r
1619 Wed Dec 23 15:30:30 2009 VASE File c:\wvase32\dat\231209 500z30.dat
\r
1621 Tue Jan 05 12:09:02 2010 Init User: alex (v3.698, 6.256 DLL)
\r
1623 Tue Jan 05 15:34:32 2010 Initializing Error: Could not establish communication with the DK monochromator.
\r
1624 Tue Jan 05 15:36:30 2010 Initializing Error: MonoInitWait() DK
\r
1625 Tue Jan 05 15:36:33 2010 SendMonoCmd Error: Monochromator Command Return Failed 31. DK
\r
1626 Tue Jan 05 15:37:10 2010 GetMonoStatus Error: Mono Return Failed 27. rtn=1. DK
\r
1627 Tue Jan 05 15:37:10 2010 d=01 cmd=255 00 00 00 00 00 00 00 00 00 00
\r
1628 Tue Jan 05 15:37:10 2010 MonoCheck Error: Monochromator Communication Failed. DK
\r
1629 Tue Jan 05 15:37:10 2010 Could Not Adjust Slit Width. DK
\r
1630 Tue Jan 05 15:37:17 2010 Could not initialize ComPort for DK Monochromator.
\r
1631 Tue Jan 05 15:37:19 2010 SendMonoCmd Error: Monochromator Command Return Failed 31. DK
\r
1632 Tue Jan 05 15:37:54 2010 GetMonoStatus Error: Mono Return Failed 27. rtn=1. DK
\r
1633 Tue Jan 05 15:37:54 2010 d=01 cmd=27 00 00 00 00 00 00 00 00 00 00
\r
1634 Tue Jan 05 15:37:54 2010 MonoCheck Error: Monochromator Communication Failed. DK
\r
1635 Tue Jan 05 15:37:54 2010 Could Not Adjust Slit Width. DK
\r
1636 Tue Jan 05 15:42:55 2010 Initializing Error: User Canceled Initialization.
\r
1637 Tue Jan 05 15:42:56 2010 Initializing Error: MonoInitWait() DK
\r
1638 Tue Jan 05 15:42:59 2010 SendMonoCmd Error: Monochromator Command Return Failed 31. DK
\r
1639 Tue Jan 05 15:43:34 2010 GetMonoStatus Error: Mono Return Failed 27. rtn=1. DK
\r
1640 Tue Jan 05 15:43:34 2010 d=01 cmd=255 00 00 00 00 00 00 00 00 00 00
\r
1641 Tue Jan 05 15:43:34 2010 MonoCheck Error: Monochromator Communication Failed. DK
\r
1642 Tue Jan 05 15:43:34 2010 Could Not Adjust Slit Width. DK
\r
1643 Tue Jan 05 15:51:08 2010 Initializing Error: Could not establish communication with the DK monochromator.
\r
1644 Tue Jan 05 15:51:55 2010 Initializing Error: MonoInitWait() DK
\r
1645 Tue Jan 05 15:52:12 2010 SendMonoCmd Error: Monochromator Command Return Failed 31. DK
\r
1646 Tue Jan 05 15:52:47 2010 GetMonoStatus Error: Mono Return Failed 27. rtn=1. DK
\r
1647 Tue Jan 05 15:52:47 2010 d=01 cmd=255 00 00 00 00 00 00 00 00 00 00
\r
1648 Tue Jan 05 15:52:47 2010 MonoCheck Error: Monochromator Communication Failed. DK
\r
1649 Tue Jan 05 15:52:47 2010 Could Not Adjust Slit Width. DK
\r
1650 Tue Jan 05 15:53:06 2010 Could not initialize ComPort for DK Monochromator.
\r
1651 Tue Jan 05 15:53:08 2010 SendMonoCmd Error: Monochromator Command Return Failed 31. DK
\r
1652 Tue Jan 05 15:53:43 2010 GetMonoStatus Error: Mono Return Failed 27. rtn=1. DK
\r
1653 Tue Jan 05 15:53:43 2010 d=01 cmd=27 00 00 00 00 00 00 00 00 00 00
\r
1654 Tue Jan 05 15:53:43 2010 MonoCheck Error: Monochromator Communication Failed. DK
\r
1655 Tue Jan 05 15:53:43 2010 Could Not Adjust Slit Width. DK
\r
1657 Tue Jan 05 16:05:00 2010 Init User: alex (v3.698, 6.256 DLL)
\r
1660 Wed Jan 06 10:04:34 2010 Init User: alex (v3.698, 6.256 DLL)
\r
1662 Wed Jan 06 10:29:33 2010
\r
1663 Wed Jan 06 10:29:33 2010 Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=3
\r
1664 Wed Jan 06 10:34:02 2010 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
1665 Wed Jan 06 10:34:06 2010 Coarse Calib: Wvl1=5000.0 Ps=1.1957±0.0061 Attn=1.0113±0.0001 As=52.572±0.003 Psi=4.897±0.007 Del=147.951±0.139 <I>=13.103, MSE=0.89 (1.66)
\r
1666 Wed Jan 06 10:34:06 2010 Coarse Calib: MSE=0.890 (1.663) AzOffset=0.032±0.006722 ElOffset=-0.029±0.024493
\r
1667 Wed Jan 06 10:34:29 2010
\r
1668 Wed Jan 06 10:34:29 2010 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
1669 Wed Jan 06 10:43:52 2010 Calib: Wvl1=5000.0 Ps=1.2094±0.0027 Attn=1.0116±0.0001 As=52.551±0.004 Psi=4.898±0.007 Del=147.981±0.134 <I>=6.143, MSE=1.13 (5.01) Synch=-172.977±0.055 [-173.039,-172.768] M1=0.011±0.0021 [0.0043,0.013]
\r
1670 Wed Jan 06 10:43:53 2010 Calib: Wvl2=11770.0 Ps=1.2094±0.0027 IrAttn=0.9689±0.0002 IrAs=50.251±0.005 IrPsi=1.921±0.004 IrDel=26.328±0.226 <I>=5.440 MSE=1.13 (5.01) Synch=-176.041±0.158 [-176.175,-175.281] M1=0.018±0.0034 [0.0098,0.031]
\r
1671 Wed Jan 06 10:43:53 2010 Calib: MSE=1.131 (5.012) AzOffset=-0.011±0.006488 ElOffset=0.018±0.023872 DP=0.035±0.009
\r
1672 Wed Jan 06 11:27:54 2010
\r
1673 Wed Jan 06 11:27:54 2010 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
1674 Wed Jan 06 11:39:00 2010 Calib: Wvl1=5000.0 Ps=1.2082±0.0024 Attn=1.0127±0.0001 As=52.457±0.004 Psi=4.895±0.006 Del=148.161±0.122 <I>=6.386, MSE=1.03 (2.95) Synch=-172.736±0.055 [-172.794,-172.548] M1=0.01±0.0022 [0.0021,0.013]
\r
1675 Wed Jan 06 11:39:01 2010 Calib: Wvl2=11770.0 Ps=1.2082±0.0024 IrAttn=0.9690±0.0002 IrAs=50.186±0.004 IrPsi=1.923±0.003 IrDel=26.655±0.200 <I>=5.577 MSE=1.03 (2.95) Synch=-175.919±0.098 [-176.008,-175.456] M1=0.017±0.0029 [0.0021,0.021]
\r
1676 Wed Jan 06 11:39:01 2010 Calib: MSE=1.030 (2.955) AzOffset=-0.014±0.005921 ElOffset=0.020±0.021635 DP=0.036±0.008
\r
1677 Wed Jan 06 13:35:47 2010 VASE File c:\wvase32\dat\060110 500z30 alignment out.dat
\r
1679 Thu Jan 07 10:14:42 2010 Init User: alex (v3.698, 6.256 DLL)
\r
1681 Thu Jan 07 10:27:33 2010
\r
1682 Thu Jan 07 10:27:33 2010 Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=3
\r
1683 Thu Jan 07 10:32:04 2010 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
1684 Thu Jan 07 10:32:06 2010 Coarse Calib: Wvl1=5000.0 Ps=1.2434±0.0070 Attn=1.0104±0.0001 As=52.071±0.004 Psi=5.150±0.010 Del=142.525±0.145 <I>=12.804, MSE=1.04 (1.29)
\r
1685 Thu Jan 07 10:32:07 2010 Coarse Calib: MSE=1.040 (1.291) AzOffset=-0.013±0.007196 ElOffset=-0.001±0.025567
\r
1686 Thu Jan 07 10:43:13 2010
\r
1687 Thu Jan 07 10:43:13 2010 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
1688 Thu Jan 07 10:52:39 2010 Calib: Wvl1=5000.0 Ps=1.2378±0.0032 Attn=1.0112±0.0002 As=51.973±0.005 Psi=5.157±0.010 Del=142.484±0.147 <I>=6.146, MSE=1.39 (4.32) Synch=24.578±0.035 [24.540,24.705] M1=0.0091±0.0016 [0.0032,0.012]
\r
1689 Thu Jan 07 10:52:39 2010 Calib: Wvl2=11770.0 Ps=1.2378±0.0032 IrAttn=0.9687±0.0002 IrAs=49.689±0.006 IrPsi=2.006±0.004 IrDel=30.070±0.221 <I>=5.476 MSE=1.39 (4.32) Synch=21.983±0.105 [21.344,22.194] M1=0.017±0.0024 [0.011,0.025]
\r
1690 Thu Jan 07 10:52:40 2010 Calib: MSE=1.390 (4.316) AzOffset=0.025±0.007148 ElOffset=-0.055±0.024541 DP=0.102±0.013
\r
1691 Thu Jan 07 11:42:16 2010
\r
1692 Thu Jan 07 11:42:16 2010 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
1693 Thu Jan 07 11:53:25 2010 Calib: Wvl1=5000.0 Ps=1.2346±0.0034 Attn=1.0124±0.0002 As=51.896±0.005 Psi=5.149±0.011 Del=142.776±0.157 <I>=6.135, MSE=1.48 (3.55) Synch=24.574±0.044 [24.505,24.723] M1=0.0086±0.0015 [0.0029,0.011]
\r
1694 Thu Jan 07 11:53:25 2010 Calib: Wvl2=11770.0 Ps=1.2346±0.0034 IrAttn=0.9694±0.0002 IrAs=49.616±0.006 IrPsi=1.992±0.005 IrDel=29.519±0.244 <I>=5.463 MSE=1.48 (3.55) Synch=21.853±0.120 [21.097,22.006] M1=0.016±0.0056 [0.0017,0.045]
\r
1695 Thu Jan 07 11:53:25 2010 Calib: MSE=1.479 (3.548) AzOffset=0.021±0.007729 ElOffset=-0.036±0.026793 DP=0.102±0.014
\r
1696 Thu Jan 07 13:39:37 2010 VASE File c:\wvase32\dat\070110 500z30mg2 align out.dat
\r
1697 Thu Jan 07 15:43:10 2010 VASE File c:\wvase32\dat\070110 500z30mg16 align out.dat
\r
1699 Fri Jan 08 09:19:15 2010 Init User: alex (v3.698, 6.256 DLL)
\r
1701 Fri Jan 08 10:00:43 2010
\r
1702 Fri Jan 08 10:00:43 2010 Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=3
\r
1703 Fri Jan 08 10:05:14 2010 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
1704 Fri Jan 08 10:05:17 2010 Coarse Calib: Wvl1=5000.0 Ps=1.2655±0.0144 Attn=1.0110±0.0002 As=178.949±0.006 Psi=5.098±0.016 Del=143.241±0.241 <I>=9.388, MSE=1.68 (2.01)
\r
1705 Fri Jan 08 10:05:17 2010 Coarse Calib: MSE=1.680 (2.006) AzOffset=0.017±0.011882 ElOffset=0.006±0.042749
\r
1706 Fri Jan 08 10:05:26 2010
\r
1707 Fri Jan 08 10:05:26 2010 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
1708 Fri Jan 08 10:14:49 2010 Calib: Wvl1=5000.0 Ps=1.2596±0.0032 Attn=1.0111±0.0002 As=178.957±0.004 Psi=5.098±0.008 Del=143.392±0.124 <I>=4.425, MSE=1.15 (3.49) Synch=-119.381±0.046 [-119.453,-119.185] M1=0.0057±0.0011 [0.0015,0.0071]
\r
1709 Fri Jan 08 10:14:50 2010 Calib: Wvl2=11770.0 Ps=1.2596±0.0032 IrAttn=0.9678±0.0002 IrAs=176.640±0.005 IrPsi=1.976±0.004 IrDel=29.185±0.213 <I>=4.760 MSE=1.15 (3.49) Synch=-121.976±0.101 [-122.080,-121.594] M1=0.049±0.0039 [0.031,0.056]
\r
1710 Fri Jan 08 10:14:50 2010 Calib: MSE=1.147 (3.488) AzOffset=-0.007±0.006137 ElOffset=0.012±0.022166 DP=0.103±0.011
\r
1711 Fri Jan 08 11:26:44 2010
\r
1712 Fri Jan 08 11:26:44 2010 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
1713 Fri Jan 08 11:37:49 2010 Calib: Wvl1=5000.0 Ps=1.2620±0.0031 Attn=1.0126±0.0002 As=178.870±0.004 Psi=5.098±0.008 Del=143.445±0.123 <I>=4.586, MSE=1.13 (5.19) Synch=-119.238±0.047 [-119.315,-119.087] M1=0.0056±0.00096 [0.0015,0.008]
\r
1714 Fri Jan 08 11:37:49 2010 Calib: Wvl2=11770.0 Ps=1.2620±0.0031 IrAttn=0.9686±0.0002 IrAs=176.583±0.005 IrPsi=1.965±0.004 IrDel=28.929±0.211 <I>=4.869 MSE=1.13 (5.19) Synch=-121.861±0.260 [-122.005,-120.346] M1=0.045±0.0077 [0.0098,0.05]
\r
1715 Fri Jan 08 11:37:50 2010 Calib: MSE=1.131 (5.189) AzOffset=-0.009±0.006053 ElOffset=0.016±0.021844 DP=0.105±0.011
\r
1716 Fri Jan 08 12:12:03 2010
\r
1717 Fri Jan 08 12:12:03 2010 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
1718 Fri Jan 08 12:23:09 2010 Calib: Wvl1=5000.0 Ps=1.2618±0.0034 Attn=1.0132±0.0002 As=178.836±0.004 Psi=5.102±0.009 Del=143.483±0.135 <I>=4.654, MSE=1.25 (4.13) Synch=-119.454±0.053 [-119.540,-119.263] M1=0.0055±0.0011 [0.00094,0.0073]
\r
1719 Fri Jan 08 12:23:09 2010 Calib: Wvl2=11770.0 Ps=1.2618±0.0034 IrAttn=0.9685±0.0002 IrAs=176.561±0.005 IrPsi=1.969±0.004 IrDel=29.238±0.228 <I>=4.906 MSE=1.25 (4.13) Synch=-122.069±0.077 [-122.290,-121.678] M1=0.045±0.0076 [0.012,0.05]
\r
1720 Fri Jan 08 12:23:09 2010 Calib: MSE=1.249 (4.132) AzOffset=0.010±0.006694 ElOffset=-0.004±0.024098 DP=0.095±0.012
\r
1721 Fri Jan 08 14:19:35 2010 VASE File c:\wvase32\dat\080110 500z30cu2.dat
\r
1722 Fri Jan 08 14:36:29 2010
\r
1723 Fri Jan 08 14:36:29 2010 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
1724 Fri Jan 08 14:47:39 2010 Calib: Wvl1=5000.0 Ps=1.2582±0.0032 Attn=1.0134±0.0002 As=178.806±0.005 Psi=5.259±0.011 Del=140.511±0.150 <I>=6.664, MSE=1.48 (2.88) Synch=-119.283±0.057 [-119.435,-119.096] M1=0.0093±0.002 [0.0018,0.012]
\r
1725 Fri Jan 08 14:47:40 2010 Calib: Wvl2=11770.0 Ps=1.2582±0.0032 IrAttn=0.9693±0.0002 IrAs=176.542±0.006 IrPsi=2.045±0.004 IrDel=31.680±0.204 <I>=5.897 MSE=1.48 (2.88) Synch=-122.079±0.104 [-122.552,-121.777] M1=0.015±0.0039 [0.01,0.036]
\r
1726 Fri Jan 08 14:47:40 2010 Calib: MSE=1.482 (2.884) AzOffset=-0.025±0.007369 ElOffset=0.057±0.024274 DP=0.159±0.015
\r
1727 Fri Jan 08 17:01:22 2010 VASE File c:\wvase32\dat\080110 500z30mg8 align out.dat
\r
1729 Mon Jan 11 10:52:36 2010 Init User: alex (v3.698, 6.256 DLL)
\r
1731 Mon Jan 11 10:57:44 2010
\r
1732 Mon Jan 11 10:57:44 2010 Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=3
\r
1733 Mon Jan 11 11:02:14 2010 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
1734 Mon Jan 11 11:02:18 2010 Coarse Calib: Wvl1=5000.0 Ps=1.2787±0.0062 Attn=1.0109±0.0001 As=129.806±0.003 Psi=5.642±0.011 Del=134.336±0.112 <I>=12.741, MSE=0.997 (1.17)
\r
1735 Mon Jan 11 11:02:18 2010 Coarse Calib: MSE=0.997 (1.173) AzOffset=0.011±0.006054 ElOffset=-0.009±0.017373
\r
1736 Mon Jan 11 11:38:47 2010
\r
1737 Mon Jan 11 11:38:47 2010 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
1738 Mon Jan 11 11:48:25 2010 Calib: Wvl1=5000.0 Ps=1.2828±0.0028 Attn=1.0117±0.0002 As=129.735±0.005 Psi=5.630±0.011 Del=134.607±0.112 <I>=6.133, MSE=1.3 (3.07) Synch=41.690±0.042 [41.618,41.813] M1=0.0081±0.0019 [0.0035,0.011]
\r
1739 Mon Jan 11 11:48:25 2010 Calib: Wvl2=11770.0 Ps=1.2828±0.0028 IrAttn=0.9690±0.0002 IrAs=127.452±0.005 IrPsi=2.198±0.004 IrDel=36.515±0.135 <I>=5.888 MSE=1.3 (3.07) Synch=38.592±0.092 [38.214,38.954] M1=0.012±0.0021 [0.0041,0.018]
\r
1740 Mon Jan 11 11:48:25 2010 Calib: MSE=1.305 (3.073) AzOffset=-0.021±0.005987 ElOffset=0.032±0.016905 DP=0.113±0.016
\r
1741 Mon Jan 11 13:43:06 2010 VASE File c:\wvase32\dat\110110 500z30cu0.05 align out.dat
\r
1742 Mon Jan 11 14:40:23 2010
\r
1743 Mon Jan 11 14:40:23 2010 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
1744 Mon Jan 11 14:51:35 2010 Calib: Wvl1=5000.0 Ps=1.2801±0.0027 Attn=1.0127±0.0002 As=129.649±0.005 Psi=5.698±0.011 Del=133.612±0.110 <I>=6.382, MSE=1.32 (3.29) Synch=41.832±0.053 [41.774,42.022] M1=0.0088±0.0018 [0.0034,0.012]
\r
1745 Mon Jan 11 14:51:35 2010 Calib: Wvl2=11770.0 Ps=1.2801±0.0027 IrAttn=0.9693±0.0002 IrAs=127.377±0.005 IrPsi=2.220±0.004 IrDel=37.166±0.132 <I>=5.885 MSE=1.32 (3.29) Synch=38.592±0.072 [38.329,38.913] M1=0.014±0.0046 [0.0091,0.044]
\r
1746 Mon Jan 11 14:51:35 2010 Calib: MSE=1.317 (3.288) AzOffset=-0.023±0.005850 ElOffset=0.054±0.016228 DP=0.113±0.016
\r
1747 Mon Jan 11 17:10:55 2010 VASE File c:\wvase32\dat\110110 500z30mg16 align out repeat.dat
\r
1749 Tue Jan 12 12:03:37 2010 Init User: alex (v3.698, 6.256 DLL)
\r
1751 Tue Jan 12 12:33:26 2010
\r
1752 Tue Jan 12 12:33:26 2010 Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=3
\r
1753 Tue Jan 12 12:37:56 2010 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
1754 Tue Jan 12 12:37:59 2010 Coarse Calib: Wvl1=5000.0 Ps=1.3040±0.0060 Attn=1.0116±0.0001 As=161.190±0.004 Psi=5.845±0.012 Del=132.093±0.108 <I>=13.531, MSE=1.03 (1.69)
\r
1755 Tue Jan 12 12:37:59 2010 Coarse Calib: MSE=1.030 (1.691) AzOffset=-0.004±0.005993 ElOffset=0.005±0.016095
\r
1756 Tue Jan 12 12:42:46 2010
\r
1757 Tue Jan 12 12:42:46 2010 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
1758 Tue Jan 12 12:52:11 2010 Calib: Wvl1=5000.0 Ps=1.3085±0.0029 Attn=1.0118±0.0002 As=161.177±0.005 Psi=5.838±0.012 Del=132.181±0.113 <I>=6.346, MSE=1.43 (4.13) Synch=25.115±0.041 [25.068,25.251] M1=0.0073±0.0019 [0.00032,0.01]
\r
1759 Tue Jan 12 12:52:12 2010 Calib: Wvl2=11770.0 Ps=1.3085±0.0029 IrAttn=0.9686±0.0002 IrAs=158.875±0.006 IrPsi=2.280±0.004 IrDel=39.589±0.131 <I>=5.605 MSE=1.43 (4.13) Synch=22.541±0.126 [22.446,23.246] M1=0.015±0.0031 [0.0051,0.03]
\r
1760 Tue Jan 12 12:52:12 2010 Calib: MSE=1.432 (4.132) AzOffset=0.007±0.006343 ElOffset=-0.006±0.017030 DP=0.142±0.018
\r
1761 Tue Jan 12 14:24:07 2010
\r
1762 Tue Jan 12 14:24:07 2010 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
1763 Tue Jan 12 14:35:15 2010 Calib: Wvl1=5000.0 Ps=1.3094±0.0032 Attn=1.0125±0.0002 As=161.138±0.006 Psi=5.837±0.014 Del=132.247±0.127 <I>=6.540, MSE=1.6 (4.59) Synch=24.988±0.050 [24.916,25.139] M1=0.0073±0.0017 [0.0024,0.011]
\r
1764 Tue Jan 12 14:35:16 2010 Calib: Wvl2=11770.0 Ps=1.3094±0.0032 IrAttn=0.9687±0.0003 IrAs=158.848±0.006 IrPsi=2.277±0.004 IrDel=39.652±0.144 <I>=5.766 MSE=1.6 (4.59) Synch=22.374±0.115 [22.105,22.889] M1=0.015±0.0026 [0.0083,0.026]
\r
1765 Tue Jan 12 14:35:16 2010 Calib: MSE=1.598 (4.586) AzOffset=0.005±0.007088 ElOffset=0.002±0.019094 DP=0.142±0.021
\r
1766 Tue Jan 12 15:45:24 2010 RT File c:\wvase32\dat\120110 500z30mg8 rt align out.dat
\r
1767 Tue Jan 12 16:45:47 2010 RT File c:\wvase32\dat\120110 500z30cu2 rt align out.dat
\r
1769 Wed Jan 13 10:23:24 2010 Init User: alex (v3.698, 6.256 DLL)
\r
1771 Wed Jan 13 12:27:27 2010
\r
1772 Wed Jan 13 12:27:27 2010 Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=3
\r
1773 Wed Jan 13 12:31:57 2010 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
1774 Wed Jan 13 12:32:00 2010 Coarse Calib: Wvl1=5000.0 Ps=1.3329±0.0048 Attn=1.0117±0.0001 As=111.420±0.003 Psi=6.184±0.010 Del=128.855±0.080 <I>=13.484, MSE=0.862 (1.41)
\r
1775 Wed Jan 13 12:32:01 2010 Coarse Calib: MSE=0.862 (1.405) AzOffset=-0.006±0.004704 ElOffset=0.007±0.011462
\r
1776 Wed Jan 13 12:44:34 2010
\r
1777 Wed Jan 13 12:44:34 2010 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
1778 Wed Jan 13 12:53:58 2010 Calib: Wvl1=5000.0 Ps=1.3369±0.0032 Attn=1.0122±0.0002 As=111.408±0.006 Psi=6.182±0.014 Del=128.912±0.112 <I>=6.431, MSE=1.59 (3.95) Synch=-120.085±0.078 [-120.277,-119.926] M1=0.0086±0.0016 [0.0048,0.012]
\r
1779 Wed Jan 13 12:53:58 2010 Calib: Wvl2=11770.0 Ps=1.3369±0.0032 IrAttn=0.9691±0.0003 IrAs=109.136±0.006 IrPsi=2.363±0.004 IrDel=41.863±0.127 <I>=5.665 MSE=1.59 (3.95) Synch=-122.630±0.148 [-122.727,-121.645] M1=0.016±0.0031 [0.0068,0.032]
\r
1780 Wed Jan 13 12:53:59 2010 Calib: MSE=1.590 (3.950) AzOffset=-0.005±0.006595 ElOffset=0.012±0.016103 DP=0.074±0.023
\r
1781 Wed Jan 13 14:08:27 2010 RT File c:\wvase32\dat\130110 500z30 rt align out.dat
\r
1782 Wed Jan 13 16:10:06 2010 VASE File c:\wvase32\dat\130110 500z30 align out.dat
\r
1784 Thu Jan 14 11:32:58 2010 Init User: alex (v3.698, 6.256 DLL)
\r
1786 Thu Jan 14 11:41:01 2010
\r
1787 Thu Jan 14 11:41:01 2010 Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=3
\r
1788 Thu Jan 14 11:45:30 2010 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
1789 Thu Jan 14 11:45:34 2010 Coarse Calib: Wvl1=5000.0 Ps=1.3588±0.0052 Attn=1.0105±0.0001 As=111.705±0.003 Psi=6.175±0.011 Del=129.164±0.087 <I>=13.571, MSE=0.93 (1.48)
\r
1790 Thu Jan 14 11:45:34 2010 Coarse Calib: MSE=0.930 (1.480) AzOffset=0.007±0.005081 ElOffset=-0.002±0.012491
\r
1791 Thu Jan 14 12:03:48 2010
\r
1792 Thu Jan 14 12:03:48 2010 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
1793 Thu Jan 14 12:13:12 2010 Calib: Wvl1=5000.0 Ps=1.3652±0.0030 Attn=1.0115±0.0002 As=111.589±0.005 Psi=6.171±0.014 Del=129.199±0.107 <I>=6.455, MSE=1.52 (3.52) Synch=37.289±0.036 [37.234,37.402] M1=0.0081±0.0013 [0.0032,0.01]
\r
1794 Thu Jan 14 12:13:12 2010 Calib: Wvl2=11770.0 Ps=1.3652±0.0030 IrAttn=0.9684±0.0003 IrAs=109.277±0.006 IrPsi=2.341±0.004 IrDel=41.746±0.125 <I>=5.578 MSE=1.52 (3.52) Synch=34.131±0.069 [33.799,34.295] M1=0.014±0.0043 [0.0014,0.037]
\r
1795 Thu Jan 14 12:13:13 2010 Calib: MSE=1.516 (3.518) AzOffset=-0.014±0.006278 ElOffset=0.020±0.015324 DP=0.076±0.022
\r
1796 Thu Jan 14 13:23:08 2010 RT File c:\wvase32\dat\140110 500z30mg16 rt align out.dat
\r
1797 Thu Jan 14 14:58:26 2010 RT File c:\wvase32\dat\140110 500z30mg2 rt align out.dat
\r
1798 Thu Jan 14 16:21:12 2010 RT File c:\wvase32\dat\140110 500z30cu0.05 rt align out.dat
\r
1800 Fri Jan 15 11:54:33 2010 Init User: alex (v3.698, 6.256 DLL)
\r
1802 Fri Jan 15 12:01:22 2010
\r
1803 Fri Jan 15 12:01:22 2010 Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=3
\r
1804 Fri Jan 15 12:05:52 2010 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
1805 Fri Jan 15 12:05:54 2010 Coarse Calib: Wvl1=5000.0 Ps=1.3968±0.0054 Attn=1.0106±0.0001 As=68.411±0.003 Psi=6.364±0.012 Del=127.310±0.087 <I>=13.538, MSE=0.994 (1.42)
\r
1806 Fri Jan 15 12:05:54 2010 Coarse Calib: MSE=0.994 (1.424) AzOffset=-0.002±0.005250 ElOffset=-0.005±0.012239
\r
1807 Fri Jan 15 12:21:54 2010
\r
1808 Fri Jan 15 12:21:54 2010 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
1809 Fri Jan 15 12:22:19 2010 Insufficient intensity at too many points to perform calibration. 5000.0Å, det=0 (4, 3) (0.0002, 0.01)
\r
1810 Fri Jan 15 12:29:50 2010
\r
1811 Fri Jan 15 12:29:50 2010 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
1812 Fri Jan 15 12:30:12 2010 Insufficient intensity at too many points to perform calibration. 5000.0Å, det=0 (4, 3) (0.0003, 0.01)
\r
1814 Fri Jan 15 14:23:23 2010 Init User: alex (v3.698, 6.256 DLL)
\r
1816 Fri Jan 15 14:26:57 2010
\r
1817 Fri Jan 15 14:26:57 2010 Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=3
\r
1818 Fri Jan 15 14:31:27 2010 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
1819 Fri Jan 15 14:31:31 2010 Coarse Calib: Wvl1=5000.0 Ps=1.4207±0.0068 Attn=1.0106±0.0002 As=120.042±0.004 Psi=6.341±0.015 Del=127.412±0.110 <I>=13.821, MSE=1.26 (1.51)
\r
1820 Fri Jan 15 14:31:31 2010 Coarse Calib: MSE=1.255 (1.514) AzOffset=-0.005±0.006650 ElOffset=0.016±0.015553
\r
1822 Mon Jan 18 09:37:03 2010 Init User: alex (v3.698, 6.256 DLL)
\r
1824 Mon Jan 18 11:48:11 2010
\r
1825 Mon Jan 18 11:48:11 2010 Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=3
\r
1826 Mon Jan 18 11:52:42 2010 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
1827 Mon Jan 18 11:52:44 2010 Coarse Calib: Wvl1=5000.0 Ps=1.4381±0.0094 Attn=1.0121±0.0003 As=137.649±0.007 Psi=7.896±0.028 Del=114.999±0.106 <I>=14.027, MSE=2.07 (1.77)
\r
1828 Mon Jan 18 11:52:44 2010 Coarse Calib: MSE=2.067 (1.773) AzOffset=0.021±0.008866 ElOffset=0.003±0.014879
\r
1829 Mon Jan 18 11:59:28 2010
\r
1830 Mon Jan 18 11:59:28 2010 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
1831 Mon Jan 18 12:08:50 2010 Calib: Wvl1=5000.0 Ps=1.4432±0.0029 Attn=1.0128±0.0002 As=137.625±0.006 Psi=7.904±0.018 Del=115.055±0.065 <I>=6.790, MSE=1.71 (2.13) Synch=-172.249±0.028 [-172.313,-172.148] M1=0.01±0.0031 [0.0018,0.014]
\r
1832 Mon Jan 18 12:08:51 2010 Calib: Wvl2=11770.0 Ps=1.4432±0.0029 IrAttn=0.9690±0.0003 IrAs=135.344±0.007 IrPsi=3.102±0.004 IrDel=54.150±0.064 <I>=5.916 MSE=1.71 (2.13) Synch=-175.388±0.085 [-175.474,-175.052] M1=0.017±0.0034 [0.0064,0.022]
\r
1833 Mon Jan 18 12:08:51 2010 Calib: MSE=1.707 (2.134) AzOffset=-0.013±0.005564 ElOffset=0.005±0.009338 DP=0.219±0.036
\r
1834 Mon Jan 18 14:00:09 2010 VASE File c:\wvase32\dat\180110 500z30cu2 align out with tape.dat
\r
1835 Mon Jan 18 14:33:04 2010
\r
1836 Mon Jan 18 14:33:04 2010 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
1837 Mon Jan 18 14:44:14 2010 Calib: Wvl1=5000.0 Ps=1.4370±0.0026 Attn=1.0141±0.0002 As=137.559±0.005 Psi=7.603±0.015 Del=117.079±0.064 <I>=6.993, MSE=1.51 (1.79) Synch=-172.132±0.031 [-172.183,-172.065] M1=0.0092±0.0029 [0.0014,0.013]
\r
1838 Mon Jan 18 14:44:14 2010 Calib: Wvl2=11770.0 Ps=1.4370±0.0026 IrAttn=0.9693±0.0003 IrAs=135.301±0.006 IrPsi=2.958±0.003 IrDel=52.684±0.061 <I>=6.061 MSE=1.51 (1.79) Synch=-175.390±0.073 [-175.562,-175.088] M1=0.017±0.002 [0.0096,0.022]
\r
1839 Mon Jan 18 14:44:14 2010 Calib: MSE=1.507 (1.791) AzOffset=-0.022±0.005070 ElOffset=0.019±0.008852 DP=0.224±0.030
\r
1840 Mon Jan 18 16:58:47 2010 VASE File c:\wvase32\dat\180110 500z30cu2 align out with tape repeat 55-70 degrees.dat
\r
1842 Tue Jan 19 11:53:20 2010 Init User: alex (v3.698, 6.256 DLL)
\r
1845 Wed Jan 20 11:37:35 2010 Init User: alex (v3.698, 6.256 DLL)
\r
1847 Wed Jan 20 11:43:49 2010
\r
1848 Wed Jan 20 11:43:49 2010 Calib: rvs=5, pts=100, span=180.0, aoi=70.000, t=0, d=3
\r
1849 Wed Jan 20 11:48:18 2010 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
1850 Wed Jan 20 11:48:22 2010 Coarse Calib: Wvl1=5000.0 Ps=1.4602±0.0040 Attn=1.0111±0.0001 As=0.229±0.004 Psi=14.252±0.007 Del=153.525±0.059 <I>=12.861, MSE=1 (0.758)
\r
1851 Wed Jan 20 11:48:22 2010 Coarse Calib: MSE=1.000 (0.758) AzOffset=-0.018±0.002833 ElOffset=0.003±0.008696
\r
1852 Wed Jan 20 12:05:41 2010
\r
1853 Wed Jan 20 12:05:41 2010 Calib: rvs=30, pts=60, span=60.0, aoi=70.000, t=1, d=3
\r
1854 Wed Jan 20 12:15:01 2010 Calib: Wvl1=5000.0 Ps=1.4598±0.0020 Attn=1.0125±0.0002 As=0.103±0.005 Psi=14.250±0.006 Del=153.567±0.054 <I>=6.817, MSE=1.21 (0.75) Synch=95.612±0.038 [95.539,95.676] M1=0.0097±0.0033 [0.0029,0.013]
\r
1855 Wed Jan 20 12:15:01 2010 Calib: Wvl2=11770.0 Ps=1.4598±0.0020 IrAttn=0.9697±0.0002 IrAs=177.805±0.006 IrPsi=8.038±0.002 IrDel=164.101±0.074 <I>=6.331 MSE=1.21 (0.75) Synch=92.933±0.042 [92.852,93.054] M1=0.015±0.0036 [0.0061,0.02]
\r
1856 Wed Jan 20 12:15:01 2010 Calib: MSE=1.210 (0.750) AzOffset=0.006±0.002609 ElOffset=-0.005±0.008012 DP=0.027±0.024
\r
1857 Wed Jan 20 14:18:30 2010 VASE File c:\wvase32\dat\200110 500z30mg16 align out with tape.dat
\r
1858 Wed Jan 20 14:46:11 2010
\r
1859 Wed Jan 20 14:46:11 2010 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
1860 Wed Jan 20 14:57:20 2010 Calib: Wvl1=5000.0 Ps=1.4577±0.0032 Attn=1.0146±0.0003 As=0.003±0.007 Psi=7.625±0.019 Del=117.475±0.081 <I>=6.933, MSE=1.9 (3.08) Synch=95.632±0.024 [95.548,95.699] M1=0.0082±0.0021 [0.00084,0.011]
\r
1861 Wed Jan 20 14:57:20 2010 Calib: Wvl2=11770.0 Ps=1.4577±0.0032 IrAttn=0.9705±0.0003 IrAs=177.774±0.008 IrPsi=2.883±0.004 IrDel=51.526±0.081 <I>=6.299 MSE=1.9 (3.08) Synch=92.941±0.053 [92.877,93.218] M1=0.013±0.0024 [0.0017,0.019]
\r
1862 Wed Jan 20 14:57:21 2010 Calib: MSE=1.902 (3.084) AzOffset=0.010±0.006399 ElOffset=-0.008±0.011423 DP=0.005±0.038
\r
1863 Wed Jan 20 16:59:34 2010 VASE File c:\wvase32\dat\200110 500z30mg8 align out with tape.dat
\r
1865 Thu Jan 21 12:06:55 2010 Init User: alex (v3.698, 6.256 DLL)
\r
1867 Thu Jan 21 12:17:25 2010
\r
1868 Thu Jan 21 12:17:25 2010 Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=3
\r
1869 Thu Jan 21 12:21:55 2010 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
1870 Thu Jan 21 12:21:58 2010 Coarse Calib: Wvl1=5000.0 Ps=1.4818±0.0047 Attn=1.0111±0.0001 As=50.793±0.003 Psi=7.531±0.013 Del=117.928±0.056 <I>=12.861, MSE=0.953 (1.21)
\r
1871 Thu Jan 21 12:21:58 2010 Coarse Calib: MSE=0.953 (1.213) AzOffset=0.015±0.004257 ElOffset=-0.018±0.007703
\r
1872 Thu Jan 21 12:37:57 2010
\r
1873 Thu Jan 21 12:37:57 2010 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
1874 Thu Jan 21 12:47:20 2010 Calib: Wvl1=5000.0 Ps=1.4838±0.0030 Attn=1.0119±0.0002 As=50.713±0.006 Psi=7.523±0.017 Del=117.996±0.072 <I>=6.157, MSE=1.65 (3.25) Synch=-174.410±0.030 [-174.463,-174.300] M1=0.011±0.0029 [0.0026,0.015]
\r
1875 Thu Jan 21 12:47:20 2010 Calib: Wvl2=11770.0 Ps=1.4838±0.0030 IrAttn=0.9696±0.0003 IrAs=48.427±0.007 IrPsi=2.870±0.004 IrDel=51.267±0.075 <I>=5.719 MSE=1.65 (3.25) Synch=-177.474±0.113 [-177.690,-177.028] M1=0.019±0.0022 [0.011,0.022]
\r
1876 Thu Jan 21 12:47:20 2010 Calib: MSE=1.646 (3.247) AzOffset=-0.014±0.005593 ElOffset=0.012±0.010084 DP=0.051±0.032
\r
1877 Thu Jan 21 14:42:56 2010 VASE File c:\wvase32\dat\210110 500z30 align out with tape.dat
\r
1878 Thu Jan 21 14:54:55 2010
\r
1879 Thu Jan 21 14:54:55 2010 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
1880 Thu Jan 21 15:06:05 2010 Calib: Wvl1=5000.0 Ps=1.4780±0.0033 Attn=1.0135±0.0003 As=50.604±0.007 Psi=6.978±0.018 Del=121.911±0.096 <I>=6.490, MSE=1.81 (2.5) Synch=-173.127±0.037 [-173.226,-172.981] M1=0.011±0.002 [0.0044,0.013]
\r
1881 Thu Jan 21 15:06:05 2010 Calib: Wvl2=11770.0 Ps=1.4780±0.0033 IrAttn=0.9696±0.0003 IrAs=48.361±0.007 IrPsi=2.673±0.004 IrDel=48.474±0.096 <I>=5.916 MSE=1.81 (2.5) Synch=-176.270±0.087 [-176.369,-175.949] M1=0.019±0.0029 [0.0049,0.028]
\r
1882 Thu Jan 21 15:06:06 2010 Calib: MSE=1.815 (2.495) AzOffset=-0.016±0.006621 ElOffset=0.018±0.013162 DP=0.092±0.032
\r
1883 Thu Jan 21 17:06:49 2010 VASE File c:\wvase32\dat\210110 500z30mg2 align out with tape.dat
\r
1885 Fri Jan 22 10:12:13 2010 Init User: alex (v3.698, 6.256 DLL)
\r
1887 Fri Jan 22 11:55:43 2010
\r
1888 Fri Jan 22 11:55:43 2010 Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=3
\r
1889 Fri Jan 22 12:00:14 2010 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
1890 Fri Jan 22 12:00:17 2010 Coarse Calib: Wvl1=5000.0 Ps=1.5062±0.0055 Attn=1.0116±0.0001 As=128.847±0.004 Psi=7.417±0.015 Del=118.798±0.068 <I>=13.184, MSE=1.11 (1.34)
\r
1891 Fri Jan 22 12:00:17 2010 Coarse Calib: MSE=1.109 (1.340) AzOffset=-0.008±0.005029 ElOffset=0.002±0.009305
\r
1892 Fri Jan 22 12:13:17 2010
\r
1893 Fri Jan 22 12:13:17 2010 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
1894 Fri Jan 22 12:22:39 2010 Calib: Wvl1=5000.0 Ps=1.5054±0.0027 Attn=1.0120±0.0002 As=128.836±0.005 Psi=7.407±0.015 Del=118.881±0.069 <I>=6.364, MSE=1.5 (2.28) Synch=168.196±0.026 [168.161,168.277] M1=0.01±0.0022 [0.0039,0.013]
\r
1895 Fri Jan 22 12:22:39 2010 Calib: Wvl2=11770.0 Ps=1.5054±0.0027 IrAttn=0.9695±0.0003 IrAs=126.577±0.006 IrPsi=2.799±0.003 IrDel=50.272±0.070 <I>=6.025 MSE=1.5 (2.28) Synch=165.618±0.091 [165.526,166.043] M1=0.018±0.0033 [0.0005,0.021]
\r
1896 Fri Jan 22 12:22:39 2010 Calib: MSE=1.500 (2.283) AzOffset=-0.002±0.005179 ElOffset=0.002±0.009609 DP=0.031±0.029
\r
1897 Fri Jan 22 14:22:31 2010 VASE File c:\wvase32\dat\220110 500z30cu0.05 align out with tape.dat
\r
1899 Mon Jan 25 12:09:52 2010 Init User: alex (v3.698, 6.256 DLL)
\r
1901 Mon Jan 25 12:16:10 2010
\r
1902 Mon Jan 25 12:16:10 2010 Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=3
\r
1903 Mon Jan 25 12:20:40 2010 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
1904 Mon Jan 25 12:20:42 2010 Coarse Calib: Wvl1=5000.0 Ps=1.5451±0.0083 Attn=1.0106±0.0002 As=96.366±0.005 Psi=7.371±0.021 Del=119.025±0.096 <I>=11.832, MSE=1.55 (1.66)
\r
1905 Mon Jan 25 12:20:42 2010 Coarse Calib: MSE=1.548 (1.664) AzOffset=-0.014±0.007064 ElOffset=-0.013±0.013136
\r
1906 Mon Jan 25 12:35:51 2010
\r
1907 Mon Jan 25 12:35:51 2010 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
1908 Mon Jan 25 12:45:13 2010 Calib: Wvl1=5000.0 Ps=1.5327±0.0031 Attn=1.0116±0.0002 As=96.176±0.006 Psi=7.358±0.017 Del=119.115±0.078 <I>=5.849, MSE=1.68 (3.1) Synch=25.168±0.038 [25.089,25.246] M1=0.0084±0.0019 [0.0036,0.012]
\r
1909 Mon Jan 25 12:45:13 2010 Calib: Wvl2=11770.0 Ps=1.5327±0.0031 IrAttn=0.9689±0.0003 IrAs=93.878±0.007 IrPsi=2.802±0.004 IrDel=50.274±0.081 <I>=5.642 MSE=1.68 (3.1) Synch=22.605±0.097 [22.461,23.190] M1=0.014±0.002 [0.006,0.017]
\r
1910 Mon Jan 25 12:45:13 2010 Calib: MSE=1.675 (3.104) AzOffset=-0.004±0.005821 ElOffset=-0.000±0.010858 DP=0.020±0.032
\r
1911 Mon Jan 25 14:51:20 2010 VASE File c:\wvase32\dat\250110 500z30 align out with tape repeat.dat
\r
1913 Thu Jan 28 12:11:06 2010 Init User: alex (v3.698, 6.256 DLL)
\r
1916 Thu Jan 28 12:23:07 2010 Init User: alex (v3.698, 6.256 DLL)
\r
1918 Thu Jan 28 12:26:52 2010
\r
1919 Thu Jan 28 12:26:52 2010 Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=3
\r
1920 Thu Jan 28 12:31:21 2010 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
1921 Thu Jan 28 12:31:25 2010 Coarse Calib: Wvl1=5000.0 Ps=1.5472±0.0080 Attn=1.0115±0.0002 As=179.609±0.005 Psi=7.259±0.021 Del=119.879±0.102 <I>=13.171, MSE=1.59 (2.33)
\r
1922 Thu Jan 28 12:31:25 2010 Coarse Calib: MSE=1.590 (2.330) AzOffset=0.009±0.007360 ElOffset=0.001±0.013994
\r
1923 Thu Jan 28 13:58:14 2010
\r
1924 Thu Jan 28 13:58:14 2010 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
1925 Thu Jan 28 14:07:50 2010 Calib: Wvl1=5000.0 Ps=1.5596±0.0031 Attn=1.0133±0.0002 As=179.326±0.006 Psi=7.251±0.017 Del=120.013±0.084 <I>=6.405, MSE=1.74 (2.54) Synch=115.603±0.028 [115.556,115.696] M1=0.01±0.0028 [0.002,0.014]
\r
1926 Thu Jan 28 14:07:51 2010 Calib: Wvl2=11770.0 Ps=1.5596±0.0031 IrAttn=0.9694±0.0003 IrAs=177.078±0.007 IrPsi=2.753±0.004 IrDel=49.766±0.084 <I>=6.039 MSE=1.74 (2.54) Synch=112.400±0.061 [112.272,112.653] M1=0.016±0.0028 [0.0013,0.02]
\r
1927 Thu Jan 28 14:07:51 2010 Calib: MSE=1.741 (2.536) AzOffset=-0.019±0.006106 ElOffset=0.022±0.011545 DP=0.039±0.032
\r
1929 Fri Jan 29 09:58:57 2010 Init User: alex (v3.698, 6.256 DLL)
\r
1931 Fri Jan 29 12:23:33 2010
\r
1932 Fri Jan 29 12:23:34 2010 Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=3
\r
1933 Fri Jan 29 12:28:04 2010 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
1934 Fri Jan 29 12:28:07 2010 Coarse Calib: Wvl1=5000.0 Ps=1.5990±0.0101 Attn=1.0120±0.0003 As=3.288±0.007 Psi=7.131±0.026 Del=120.876±0.136 <I>=13.587, MSE=2.03 (2.75)
\r
1935 Fri Jan 29 12:28:07 2010 Coarse Calib: MSE=2.030 (2.752) AzOffset=-0.011±0.009544 ElOffset=0.022±0.018636
\r
1936 Fri Jan 29 12:31:59 2010
\r
1937 Fri Jan 29 12:31:59 2010 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
1938 Fri Jan 29 12:41:22 2010 Calib: Wvl1=5000.0 Ps=1.5853±0.0033 Attn=1.0125±0.0003 As=3.274±0.007 Psi=7.148±0.018 Del=120.809±0.091 <I>=6.470, MSE=1.82 (2.6) Synch=-100.746±0.049 [-100.875,-100.615] M1=0.0099±0.0027 [0.0027,0.014]
\r
1939 Fri Jan 29 12:41:23 2010 Calib: Wvl2=11770.0 Ps=1.5853±0.0033 IrAttn=0.9688±0.0003 IrAs=0.981±0.007 IrPsi=2.706±0.004 IrDel=48.917±0.091 <I>=6.085 MSE=1.82 (2.6) Synch=-103.945±0.079 [-104.075,-103.634] M1=0.017±0.0024 [0.0094,0.024]
\r
1940 Fri Jan 29 12:41:23 2010 Calib: MSE=1.817 (2.603) AzOffset=0.018±0.006418 ElOffset=-0.031±0.012470 DP=0.037±0.033
\r
1941 Fri Jan 29 14:48:18 2010 VASE File c:\wvase32\dat\290110 our si calibration wafer align out.dat
\r
1942 Fri Jan 29 14:56:47 2010
\r
1943 Fri Jan 29 14:56:47 2010 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
1944 Fri Jan 29 15:07:56 2010 Calib: Wvl1=5000.0 Ps=1.5860±0.0034 Attn=1.0136±0.0003 As=3.210±0.007 Psi=7.136±0.020 Del=120.892±0.100 <I>=6.957, MSE=1.98 (3.41) Synch=-100.474±0.039 [-100.543,-100.301] M1=0.009±0.0023 [0.0019,0.013]
\r
1945 Fri Jan 29 15:07:56 2010 Calib: Wvl2=11770.0 Ps=1.5860±0.0034 IrAttn=0.9689±0.0003 IrAs=0.919±0.008 IrPsi=2.701±0.004 IrDel=48.715±0.097 <I>=6.422 MSE=1.98 (3.41) Synch=-103.733±0.078 [-104.123,-103.476] M1=0.015±0.0024 [0.0068,0.017]
\r
1946 Fri Jan 29 15:07:56 2010 Calib: MSE=1.982 (3.412) AzOffset=-0.008±0.007099 ElOffset=0.002±0.013829 DP=0.029±0.036
\r
1947 Fri Jan 29 15:47:01 2010 VASE File c:\wvase32\dat\290110 no sample align out.dat
\r
1949 Mon Feb 01 12:00:41 2010 Init User: alex (v3.698, 6.256 DLL)
\r
1951 Mon Feb 01 14:54:58 2010 Low-level data acquisition timed out. #1
\r
1952 Try re-initializing hardware.
\r
1953 If problem returns, contact J.A.Woollam Co. or a representative.
\r
1955 Tue Feb 02 12:53:44 2010 Init User: alex (v3.698, 6.256 DLL)
\r
1958 Tue Feb 02 14:05:02 2010 Init User: alex (v3.698, 6.256 DLL)
\r
1961 Tue Feb 02 14:28:41 2010 Init User: alex (v3.698, 6.256 DLL)
\r
1963 Tue Feb 02 14:32:41 2010
\r
1964 Tue Feb 02 14:32:41 2010 Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=3
\r
1965 Tue Feb 02 14:37:11 2010 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
1966 Tue Feb 02 14:37:14 2010 Coarse Calib: Wvl1=5000.0 Ps=1.5979±0.0054 Attn=1.0117±0.0001 As=129.522±0.004 Psi=7.055±0.014 Del=121.422±0.072 <I>=13.228, MSE=1.05 (1.15)
\r
1967 Tue Feb 02 14:37:15 2010 Coarse Calib: MSE=1.052 (1.153) AzOffset=-0.005±0.004998 ElOffset=-0.023±0.009916
\r
1968 Tue Feb 02 14:44:12 2010
\r
1969 Tue Feb 02 14:44:12 2010 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
1970 Tue Feb 02 14:53:34 2010 Calib: Wvl1=5000.0 Ps=1.5936±0.0036 Attn=1.0119±0.0003 As=129.457±0.007 Psi=7.063±0.019 Del=121.445±0.101 <I>=6.387, MSE=1.97 (2.87) Synch=-172.977±0.075 [-173.107,-172.767] M1=0.012±0.0024 [0.005,0.015]
\r
1971 Tue Feb 02 14:53:34 2010 Calib: Wvl2=11770.0 Ps=1.5936±0.0036 IrAttn=0.9686±0.0003 IrAs=127.126±0.008 IrPsi=2.669±0.005 IrDel=48.448±0.101 <I>=6.114 MSE=1.97 (2.87) Synch=-176.168±0.079 [-176.410,-175.883] M1=0.018±0.0025 [0.0089,0.023]
\r
1972 Tue Feb 02 14:53:34 2010 Calib: MSE=1.968 (2.874) AzOffset=0.007±0.007109 ElOffset=-0.007±0.014067 DP=0.027±0.035
\r
1973 Tue Feb 02 17:11:21 2010 VASE File c:\wvase32\dat\020210 500z30cu0.05 align out 55-70 degrees.dat
\r
1975 Wed Feb 03 11:46:27 2010 Init User: alex (v3.698, 6.256 DLL)
\r
1978 Wed Feb 03 14:20:02 2010 Init User: alex (v3.698, 6.256 DLL)
\r
1981 Thu Feb 04 13:01:38 2010 Init User: alex (v3.698, 6.256 DLL)
\r
1983 Thu Feb 04 13:12:04 2010
\r
1984 Thu Feb 04 13:12:04 2010 Calib: rvs=5, pts=100, span=180.0, aoi=70.000, t=0, d=3
\r
1985 Thu Feb 04 13:16:33 2010 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
1986 Thu Feb 04 13:16:36 2010 Coarse Calib: Wvl1=5000.0 Ps=1.6116±0.0042 Attn=1.0106±0.0001 As=50.544±0.004 Psi=14.067±0.007 Del=156.389±0.064 <I>=12.534, MSE=1.06 (0.814)
\r
1987 Thu Feb 04 13:16:37 2010 Coarse Calib: MSE=1.058 (0.814) AzOffset=0.018±0.003124 ElOffset=0.008±0.008779
\r
1988 Thu Feb 04 13:16:45 2010
\r
1989 Thu Feb 04 13:16:45 2010 Calib: rvs=30, pts=60, span=60.0, aoi=70.000, t=1, d=3
\r
1990 Thu Feb 04 13:26:04 2010 Calib: Wvl1=5000.0 Ps=1.6117±0.0017 Attn=1.0109±0.0002 As=50.503±0.004 Psi=14.065±0.005 Del=156.400±0.048 <I>=6.628, MSE=1.04 (0.652) Synch=-101.241±0.020 [-101.295,-101.202] M1=0.011±0.0022 [0.0058,0.014]
\r
1991 Thu Feb 04 13:26:04 2010 Calib: Wvl2=11770.0 Ps=1.6117±0.0017 IrAttn=0.9683±0.0002 IrAs=48.120±0.005 IrPsi=7.987±0.002 IrDel=165.907±0.072 <I>=6.319 MSE=1.04 (0.652) Synch=-104.267±0.042 [-104.346,-104.164] M1=0.016±0.0053 [0.0062,0.023]
\r
1992 Thu Feb 04 13:26:05 2010 Calib: MSE=1.038 (0.652) AzOffset=-0.005±0.002331 ElOffset=-0.011±0.006555 DP=0.025±0.019
\r
1993 Thu Feb 04 18:00:41 2010 VASE File c:\wvase32\dat\040210 500z30cu0.05 align out with tape zone on 1000 revs meas.dat
\r
1995 Fri Feb 05 14:10:49 2010 Init User: alex (v3.698, 6.256 DLL)
\r
1998 Fri Feb 05 14:28:06 2010 Init User: alex (v3.698, 6.256 DLL)
\r
2000 Fri Feb 05 14:30:37 2010
\r
2001 Fri Feb 05 14:30:37 2010 Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=3
\r
2002 Fri Feb 05 14:35:06 2010 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
2003 Fri Feb 05 14:35:09 2010 Coarse Calib: Wvl1=5000.0 Ps=1.6182±0.0068 Attn=1.0108±0.0002 As=19.421±0.005 Psi=6.885±0.017 Del=122.664±0.095 <I>=13.217, MSE=1.31 (1.44)
\r
2004 Fri Feb 05 14:35:10 2010 Coarse Calib: MSE=1.309 (1.442) AzOffset=0.004±0.006375 ElOffset=-0.010±0.013056
\r
2005 Fri Feb 05 14:36:38 2010
\r
2006 Fri Feb 05 14:36:38 2010 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
2007 Fri Feb 05 14:45:59 2010 Calib: Wvl1=5000.0 Ps=1.6197±0.0025 Attn=1.0111±0.0002 As=19.387±0.005 Psi=6.888±0.013 Del=122.638±0.075 <I>=6.335, MSE=1.37 (2.25) Synch=-172.875±0.022 [-172.913,-172.826] M1=0.012±0.0034 [0.0029,0.017]
\r
2008 Fri Feb 05 14:45:59 2010 Calib: Wvl2=11770.0 Ps=1.6197±0.0025 IrAttn=0.9686±0.0002 IrAs=17.058±0.006 IrPsi=2.613±0.003 IrDel=47.152±0.076 <I>=5.991 MSE=1.37 (2.25) Synch=-175.928±0.052 [-176.027,-175.661] M1=0.021±0.0036 [0.0064,0.024]
\r
2009 Fri Feb 05 14:46:00 2010 Calib: MSE=1.373 (2.247) AzOffset=-0.019±0.005041 ElOffset=0.026±0.010215 DP=0.025±0.023
\r
2010 Fri Feb 05 17:01:34 2010 VASE File c:\wvase32\dat\050210 500z30mg16 55-70 degrees align out with tape.dat
\r
2012 Mon Feb 08 12:26:30 2010 Init User: alex (v3.698, 6.256 DLL)
\r
2014 Mon Feb 08 12:36:07 2010
\r
2015 Mon Feb 08 12:36:07 2010 Calib: rvs=5, pts=100, span=180.0, aoi=70.000, t=0, d=3
\r
2016 Mon Feb 08 12:40:36 2010 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
2017 Mon Feb 08 12:40:39 2010 Coarse Calib: Wvl1=5000.0 Ps=1.6416±0.0040 Attn=1.0105±0.0001 As=43.000±0.004 Psi=14.048±0.006 Del=156.743±0.060 <I>=12.318, MSE=0.991 (0.755)
\r
2018 Mon Feb 08 12:40:39 2010 Coarse Calib: MSE=0.991 (0.755) AzOffset=-0.011±0.002941 ElOffset=-0.012±0.008168
\r
2019 Mon Feb 08 12:43:05 2010
\r
2020 Mon Feb 08 12:43:05 2010 Calib: rvs=30, pts=60, span=60.0, aoi=70.000, t=1, d=3
\r
2021 Mon Feb 08 12:52:25 2010 Calib: Wvl1=5000.0 Ps=1.6403±0.0016 Attn=1.0113±0.0001 As=42.925±0.004 Psi=14.056±0.005 Del=156.755±0.047 <I>=6.497, MSE=1.01 (0.613) Synch=-47.887±0.025 [-47.933,-47.842] M1=0.011±0.0022 [0.0055,0.014]
\r
2022 Mon Feb 08 12:52:25 2010 Calib: Wvl2=11770.0 Ps=1.6403±0.0016 IrAttn=0.9683±0.0002 IrAs=40.549±0.005 IrPsi=7.981±0.002 IrDel=166.195±0.072 <I>=6.347 MSE=1.01 (0.613) Synch=-50.491±0.026 [-50.540,-50.439] M1=0.017±0.0049 [0.0079,0.022]
\r
2023 Mon Feb 08 12:52:26 2010 Calib: MSE=1.013 (0.613) AzOffset=-0.013±0.002285 ElOffset=0.007±0.006335 DP=-0.005±0.018
\r
2024 Mon Feb 08 15:08:38 2010 VASE File c:\wvase32\dat\080210 500z30mg2 55-70 degrees align out with tape.dat
\r
2026 Tue Feb 09 12:50:44 2010 Init User: alex (v3.698, 6.256 DLL)
\r
2028 Tue Feb 09 13:18:47 2010
\r
2029 Tue Feb 09 13:18:47 2010 Calib: rvs=5, pts=100, span=180.0, aoi=70.000, t=0, d=3
\r
2030 Tue Feb 09 13:23:16 2010 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
2031 Tue Feb 09 13:23:19 2010 Coarse Calib: Wvl1=5000.0 Ps=1.6523±0.0047 Attn=1.0121±0.0002 As=9.729±0.005 Psi=14.021±0.007 Del=157.330±0.072 <I>=12.389, MSE=1.17 (0.886)
\r
2032 Tue Feb 09 13:23:20 2010 Coarse Calib: MSE=1.169 (0.886) AzOffset=-0.011±0.003505 ElOffset=0.014±0.009527
\r
2033 Tue Feb 09 13:57:09 2010
\r
2034 Tue Feb 09 13:57:09 2010 Calib: rvs=30, pts=60, span=60.0, aoi=70.000, t=1, d=3
\r
2035 Tue Feb 09 14:06:42 2010 Calib: Wvl1=5000.0 Ps=1.6544±0.0015 Attn=1.0130±0.0001 As=9.668±0.004 Psi=14.026±0.004 Del=157.328±0.044 <I>=6.527, MSE=0.94 (0.59) Synch=167.533±0.023 [167.494,167.575] M1=0.011±0.004 [0.0033,0.017]
\r
2036 Tue Feb 09 14:06:43 2010 Calib: Wvl2=11770.0 Ps=1.6544±0.0015 IrAttn=0.9691±0.0002 IrAs=7.363±0.005 IrPsi=7.976±0.002 IrDel=166.578±0.069 <I>=6.339 MSE=0.94 (0.59) Synch=164.838±0.023 [164.787,164.893] M1=0.017±0.0063 [0.006,0.025]
\r
2037 Tue Feb 09 14:06:43 2010 Calib: MSE=0.940 (0.590) AzOffset=0.004±0.002142 ElOffset=-0.008±0.005825 DP=0.018±0.017
\r
2038 Tue Feb 09 16:55:38 2010 VASE File c:\wvase32\dat\090210 500z30mg8 55-70 degrees align out with tape.dat
\r
2040 Wed Feb 10 10:27:39 2010 Init User: alex (v3.698, 6.256 DLL)
\r
2042 Wed Feb 10 11:48:51 2010
\r
2043 Wed Feb 10 11:48:51 2010 Calib: rvs=5, pts=100, span=180.0, aoi=70.000, t=0, d=3
\r
2044 Wed Feb 10 11:53:20 2010 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
2045 Wed Feb 10 11:53:22 2010 Coarse Calib: Wvl1=5000.0 Ps=1.7614±0.0044 Attn=1.0122±0.0001 As=69.427±0.005 Psi=14.020±0.007 Del=157.535±0.067 <I>=12.457, MSE=1.09 (0.839)
\r
2046 Wed Feb 10 11:53:23 2010 Coarse Calib: MSE=1.094 (0.839) AzOffset=0.008±0.003289 ElOffset=-0.006±0.008872
\r
2047 Wed Feb 10 12:02:54 2010
\r
2048 Wed Feb 10 12:02:54 2010 Calib: rvs=30, pts=60, span=60.0, aoi=70.000, t=1, d=3
\r
2049 Wed Feb 10 12:12:13 2010 Calib: Wvl1=5000.0 Ps=1.7626±0.0021 Attn=1.0123±0.0002 As=69.420±0.005 Psi=14.017±0.006 Del=157.495±0.062 <I>=6.621, MSE=1.32 (0.806) Synch=-29.096±0.033 [-29.186,-29.022] M1=0.0098±0.0023 [0.0044,0.013]
\r
2050 Wed Feb 10 12:12:14 2010 Calib: Wvl2=11770.0 Ps=1.7626±0.0021 IrAttn=0.9692±0.0003 IrAs=67.110±0.006 IrPsi=7.968±0.002 IrDel=166.718±0.096 <I>=6.684 MSE=1.32 (0.806) Synch=-32.382±0.037 [-32.464,-32.320] M1=0.018±0.005 [0.0082,0.024]
\r
2051 Wed Feb 10 12:12:14 2010 Calib: MSE=1.321 (0.806) AzOffset=0.008±0.003015 ElOffset=-0.006±0.008145 DP=0.022±0.023
\r
2052 Wed Feb 10 13:17:39 2010 RT File c:\wvase32\dat\100210 glass slide rt align out 100 revs meas.dat
\r
2053 Wed Feb 10 13:35:33 2010
\r
2054 Wed Feb 10 13:35:33 2010 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
2055 Wed Feb 10 13:46:40 2010 Calib: Wvl1=5000.0 Ps=1.7596±0.0026 Attn=1.0129±0.0002 As=69.373±0.005 Psi=6.894±0.014 Del=122.759±0.078 <I>=6.294, MSE=1.43 (2.8) Synch=-28.899±0.022 [-28.940,-28.856] M1=0.0096±0.002 [0.0015,0.013]
\r
2056 Wed Feb 10 13:46:41 2010 Calib: Wvl2=11770.0 Ps=1.7596±0.0026 IrAttn=0.9691±0.0002 IrAs=67.089±0.006 IrPsi=2.607±0.003 IrDel=47.216±0.079 <I>=6.173 MSE=1.43 (2.8) Synch=-32.113±0.119 [-32.350,-31.309] M1=0.017±0.0025 [0.0079,0.027]
\r
2057 Wed Feb 10 13:46:41 2010 Calib: MSE=1.431 (2.802) AzOffset=-0.010±0.005299 ElOffset=0.009±0.010831 DP=0.032±0.025
\r
2058 Wed Feb 10 18:48:05 2010 RT File c:\wvase32\dat\100210 glass slide rt align out 1000 revs meas dynamic averaging.dat
\r
2060 Thu Feb 11 13:02:34 2010 Init User: alex (v3.698, 6.256 DLL)
\r
2062 Thu Feb 11 13:19:53 2010
\r
2063 Thu Feb 11 13:19:53 2010 Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=3
\r
2064 Thu Feb 11 13:24:23 2010 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
2065 Thu Feb 11 13:24:27 2010 Coarse Calib: Wvl1=5000.0 Ps=1.7746±0.0071 Attn=1.0116±0.0002 As=129.606±0.005 Psi=6.877±0.018 Del=122.941±0.101 <I>=13.353, MSE=1.37 (1.82)
\r
2066 Thu Feb 11 13:24:27 2010 Coarse Calib: MSE=1.373 (1.819) AzOffset=0.009±0.006696 ElOffset=-0.003±0.013799
\r
2067 Thu Feb 11 13:25:21 2010
\r
2068 Thu Feb 11 13:25:21 2010 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
2069 Thu Feb 11 13:34:44 2010 Calib: Wvl1=5000.0 Ps=1.7693±0.0032 Attn=1.0118±0.0002 As=129.584±0.006 Psi=6.873±0.017 Del=122.981±0.095 <I>=6.371, MSE=1.72 (2.34) Synch=114.890±0.048 [114.759,115.026] M1=0.011±0.0032 [0.0017,0.016]
\r
2070 Thu Feb 11 13:34:44 2010 Calib: Wvl2=11770.0 Ps=1.7693±0.0032 IrAttn=0.9684±0.0003 IrAs=127.249±0.007 IrPsi=2.599±0.004 IrDel=47.128±0.095 <I>=6.157 MSE=1.72 (2.34) Synch=111.894±0.061 [111.816,112.138] M1=0.019±0.0027 [0.0058,0.022]
\r
2071 Thu Feb 11 13:34:44 2010 Calib: MSE=1.717 (2.337) AzOffset=-0.027±0.006256 ElOffset=0.041±0.012694 DP=0.025±0.029
\r
2072 Thu Feb 11 15:51:31 2010 VASE File c:\wvase32\dat\110210 500z30 align out with tape 55-70 degrees.dat
\r
2074 Fri Feb 12 16:08:40 2010 Init User: alex (v3.698, 6.256 DLL)
\r
2077 Mon Feb 15 16:51:56 2010 Init User: alex (v3.698, 6.256 DLL)
\r
2080 Tue Feb 16 14:03:17 2010 Init User: (v3.698, 6.256 DLL)
\r
2083 Tue Feb 16 14:19:39 2010 Init User: (v3.698, 6.256 DLL)
\r
2086 Tue Feb 16 14:33:02 2010 Init User: alex (v3.698, 6.256 DLL)
\r
2088 Tue Feb 16 14:40:55 2010
\r
2089 Tue Feb 16 14:40:55 2010 Calib: rvs=5, pts=100, span=180.0, aoi=70.000, t=0, d=3
\r
2090 Tue Feb 16 14:45:23 2010 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
2091 Tue Feb 16 14:45:27 2010 Coarse Calib: Wvl1=5000.0 Ps=1.7753±0.0066 Attn=1.0123±0.0002 As=170.580±0.007 Psi=14.007±0.010 Del=157.704±0.103 <I>=13.111, MSE=1.67 (1.26)
\r
2092 Tue Feb 16 14:45:27 2010 Coarse Calib: MSE=1.672 (1.258) AzOffset=-0.019±0.005037 ElOffset=0.015±0.013493
\r
2093 Tue Feb 16 14:48:27 2010
\r
2094 Tue Feb 16 14:48:27 2010 Calib: rvs=30, pts=60, span=60.0, aoi=70.000, t=1, d=3
\r
2095 Tue Feb 16 14:57:47 2010 Calib: Wvl1=5000.0 Ps=1.7846±0.0022 Attn=1.0125±0.0002 As=170.492±0.005 Psi=14.017±0.006 Del=157.674±0.065 <I>=6.873, MSE=1.38 (0.851) Synch=23.789±0.021 [23.722,23.852] M1=0.0095±0.0034 [0.0023,0.015]
\r
2096 Tue Feb 16 14:57:48 2010 Calib: Wvl2=11770.0 Ps=1.7846±0.0022 IrAttn=0.9687±0.0003 IrAs=168.133±0.007 IrPsi=7.966±0.002 IrDel=166.748±0.101 <I>=6.614 MSE=1.38 (0.851) Synch=21.170±0.024 [21.131,21.221] M1=0.016±0.0047 [0.0067,0.022]
\r
2097 Tue Feb 16 14:57:48 2010 Calib: MSE=1.378 (0.851) AzOffset=0.007±0.003152 ElOffset=-0.015±0.008461 DP=-0.016±0.024
\r
2098 Tue Feb 16 16:38:11 2010 VASE File c:\wvase32\dat\160210 500z30mg8 300-500nm, 1 nm spacing.dat
\r
2100 Fri Mar 05 16:35:55 2010 Init User: alex (v3.698, 6.256 DLL)
\r
2103 Fri Mar 12 11:25:14 2010 Init User: alex (v3.698, 6.256 DLL)
\r
2106 Fri Mar 12 11:59:26 2010 Init User: alex (v3.698, 6.256 DLL)
\r
2108 Fri Mar 12 12:06:36 2010
\r
2109 Fri Mar 12 12:06:36 2010 Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=3
\r
2110 Fri Mar 12 12:11:05 2010 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
2111 Fri Mar 12 12:11:09 2010 Coarse Calib: Wvl1=5000.0 Ps=1.7963±0.0082 Attn=1.0113±0.0001 As=111.980±0.004 Psi=5.183±0.012 Del=142.231±0.167 <I>=12.386, MSE=1.21 (1.69)
\r
2112 Fri Mar 12 12:11:09 2010 Coarse Calib: MSE=1.208 (1.690) AzOffset=0.014±0.008293 ElOffset=-0.022±0.029336
\r
2113 Fri Mar 12 12:11:19 2010
\r
2114 Fri Mar 12 12:11:19 2010 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
2115 Fri Mar 12 12:20:43 2010 Calib: Wvl1=5000.0 Ps=1.7973±0.0032 Attn=1.0115±0.0002 As=111.944±0.005 Psi=5.171±0.010 Del=142.428±0.145 <I>=5.838, MSE=1.37 (3.33) Synch=-172.521±0.055 [-172.664,-172.341] M1=0.01±0.003 [0.0012,0.014]
\r
2116 Fri Mar 12 12:20:43 2010 Calib: Wvl2=11770.0 Ps=1.7973±0.0032 IrAttn=0.9677±0.0002 IrAs=109.582±0.006 IrPsi=2.023±0.004 IrDel=31.215±0.193 <I>=5.767 MSE=1.37 (3.33) Synch=-175.682±0.096 [-175.793,-175.298] M1=0.018±0.003 [0.0059,0.028]
\r
2117 Fri Mar 12 12:20:43 2010 Calib: MSE=1.373 (3.334) AzOffset=-0.018±0.007145 ElOffset=0.031±0.024903 DP=0.055±0.013
\r
2118 Fri Mar 12 13:45:37 2010 RT File c:\wvase32\dat\120310 500z30mg8 rt align out 300-450 nm 1 nm spacing 100 revs per meas.dat
\r
2120 Thu Mar 25 10:51:18 2010 Init User: alex (v3.698, 6.256 DLL)
\r
2122 Thu Mar 25 10:58:29 2010
\r
2123 Thu Mar 25 10:58:29 2010 Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=3
\r
2124 Thu Mar 25 11:02:58 2010 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
2125 Thu Mar 25 11:03:01 2010 Coarse Calib: Wvl1=5000.0 Ps=1.8108±0.0086 Attn=1.0098±0.0001 As=120.783±0.004 Psi=5.458±0.012 Del=137.381±0.144 <I>=10.703, MSE=1.17 (1.54)
\r
2126 Thu Mar 25 11:03:02 2010 Coarse Calib: MSE=1.174 (1.542) AzOffset=-0.027±0.007472 ElOffset=-0.023±0.023247
\r
2127 Thu Mar 25 11:21:51 2010
\r
2128 Thu Mar 25 11:21:51 2010 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
2129 Thu Mar 25 11:31:13 2010 Calib: Wvl1=5000.0 Ps=1.8126±0.0036 Attn=1.0111±0.0002 As=120.572±0.005 Psi=5.443±0.012 Del=137.598±0.143 <I>=5.121, MSE=1.53 (4.8) Synch=96.288±0.050 [96.064,96.477] M1=0.016±0.0028 [0.0059,0.019]
\r
2130 Thu Mar 25 11:31:14 2010 Calib: Wvl2=11770.0 Ps=1.8126±0.0036 IrAttn=0.9672±0.0002 IrAs=118.222±0.006 IrPsi=2.137±0.004 IrDel=35.614±0.173 <I>=5.552 MSE=1.53 (4.8) Synch=93.631±0.080 [93.189,93.953] M1=0.021±0.0028 [0.013,0.036]
\r
2131 Thu Mar 25 11:31:14 2010 Calib: MSE=1.530 (4.802) AzOffset=0.003±0.007373 ElOffset=0.030±0.023472 DP=0.076±0.017
\r
2132 Thu Mar 25 12:30:55 2010 RT File c:\wvase32\dat\250310 500z30 rt 300-450nm 1 nm res 100 revs.dat
\r
2133 Thu Mar 25 13:15:48 2010
\r
2134 Thu Mar 25 13:15:48 2010 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
2135 Thu Mar 25 13:26:58 2010 Calib: Wvl1=5000.0 Ps=1.8093±0.0029 Attn=1.0125±0.0002 As=120.446±0.004 Psi=5.441±0.010 Del=137.735±0.115 <I>=5.054, MSE=1.23 (3.1) Synch=96.704±0.042 [96.639,96.837] M1=0.0057±0.001 [0.0026,0.0082]
\r
2136 Thu Mar 25 13:26:58 2010 Calib: Wvl2=11770.0 Ps=1.8093±0.0029 IrAttn=0.9670±0.0002 IrAs=118.119±0.005 IrPsi=2.125±0.003 IrDel=35.467±0.137 <I>=5.844 MSE=1.23 (3.1) Synch=94.089±0.108 [93.762,94.620] M1=0.031±0.0045 [0.0092,0.038]
\r
2137 Thu Mar 25 13:26:58 2010 Calib: MSE=1.230 (3.101) AzOffset=0.001±0.005960 ElOffset=0.023±0.019007 DP=0.069±0.014
\r
2138 Thu Mar 25 15:00:33 2010 RT File c:\wvase32\dat\250310 500z30cu2 rt 300-450nm 1 nm res 100 revs.dat
\r
2139 Thu Mar 25 15:35:04 2010 RT File c:\wvase32\dat\250310 500z30cu0.05 rt 300-450nm 1 nm res 100 revs.dat
\r
2140 Thu Mar 25 16:30:07 2010 RT File c:\wvase32\dat\250310 500z30mg2 rt 300-450nm 1 nm res 100 revs.dat
\r
2141 Thu Mar 25 17:00:30 2010 RT File c:\wvase32\dat\250310 500z30mg16 rt 300-450nm 1 nm res 100 revs.dat
\r
2142 Thu Mar 25 17:35:38 2010 RT File c:\wvase32\dat\250310 500z30mg8 rt 300-450nm 1 nm res 100 revs.dat
\r
2144 Mon Mar 29 13:13:24 2010 Init User: alex (v3.698, 6.256 DLL)
\r
2146 Mon Mar 29 13:19:05 2010
\r
2147 Mon Mar 29 13:19:05 2010 Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=3
\r
2148 Mon Mar 29 13:23:35 2010 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
2149 Mon Mar 29 13:23:38 2010 Coarse Calib: Wvl1=5000.0 Ps=1.7842±0.0710 Attn=1.0102±0.0003 As=50.473±0.011 Psi=5.407±0.027 Del=137.959±0.316 <I>=1.264, MSE=1.56 (9.17)
\r
2150 Mon Mar 29 13:23:38 2010 Coarse Calib: MSE=1.556 (9.174) AzOffset=-0.004±0.015984 ElOffset=0.066±0.051172
\r
2151 Mon Mar 29 13:43:45 2010
\r
2152 Mon Mar 29 13:43:45 2010 Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=3
\r
2153 Mon Mar 29 13:46:28 2010 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
2154 Mon Mar 29 13:46:31 2010 Coarse Calib: Wvl1=5000.0 Ps=1.8303±0.0073 Attn=1.0111±0.0001 As=50.301±0.004 Psi=5.353±0.010 Del=139.138±0.130 <I>=11.173, MSE=1.01 (1.41)
\r
2155 Mon Mar 29 13:46:32 2010 Coarse Calib: MSE=1.013 (1.411) AzOffset=0.011±0.006610 ElOffset=-0.046±0.021865
\r
2156 Mon Mar 29 13:54:18 2010
\r
2157 Mon Mar 29 13:54:18 2010 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
2158 Mon Mar 29 14:03:40 2010 Calib: Wvl1=5000.0 Ps=1.8222±0.0023 Attn=1.0115±0.0001 As=50.276±0.003 Psi=5.353±0.008 Del=139.277±0.096 <I>=5.375, MSE=0.985 (3.37) Synch=114.813±0.048 [114.744,114.990] M1=0.014±0.0018 [0.0064,0.016]
\r
2159 Mon Mar 29 14:03:41 2010 Calib: Wvl2=11770.0 Ps=1.8222±0.0023 IrAttn=0.9670±0.0002 IrAs=47.906±0.004 IrPsi=2.085±0.003 IrDel=34.147±0.120 <I>=5.673 MSE=0.985 (3.37) Synch=111.659±0.064 [111.592,111.983] M1=0.023±0.0022 [0.015,0.027]
\r
2160 Mon Mar 29 14:03:41 2010 Calib: MSE=0.985 (3.374) AzOffset=-0.009±0.004885 ElOffset=0.019±0.016138 DP=0.051±0.010
\r
2161 Mon Mar 29 14:59:25 2010
\r
2162 Mon Mar 29 14:59:25 2010 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
2163 Mon Mar 29 15:10:31 2010 Calib: Wvl1=5000.0 Ps=1.8227±0.0023 Attn=1.0122±0.0001 As=50.191±0.004 Psi=5.352±0.008 Del=139.306±0.097 <I>=5.504, MSE=0.998 (2) Synch=115.162±0.056 [115.087,115.352] M1=0.014±0.002 [0.0065,0.016]
\r
2164 Mon Mar 29 15:10:31 2010 Calib: Wvl2=11770.0 Ps=1.8227±0.0023 IrAttn=0.9672±0.0002 IrAs=47.851±0.004 IrPsi=2.076±0.003 IrDel=33.950±0.122 <I>=5.706 MSE=0.998 (2) Synch=111.853±0.062 [111.787,112.174] M1=0.022±0.0032 [0.0099,0.037]
\r
2165 Mon Mar 29 15:10:31 2010 Calib: MSE=0.998 (1.996) AzOffset=0.003±0.004961 ElOffset=0.014±0.016470 DP=0.044±0.011
\r
2166 Mon Mar 29 15:47:47 2010
\r
2167 Mon Mar 29 15:47:47 2010 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
2168 Mon Mar 29 15:58:51 2010 Calib: Wvl1=5000.0 Ps=1.8241±0.0030 Attn=1.0126±0.0002 As=50.169±0.005 Psi=5.344±0.010 Del=139.531±0.127 <I>=5.572, MSE=1.3 (3.77) Synch=115.324±0.049 [115.254,115.512] M1=0.014±0.0019 [0.0054,0.016]
\r
2169 Mon Mar 29 15:58:51 2010 Calib: Wvl2=11770.0 Ps=1.8241±0.0030 IrAttn=0.9675±0.0002 IrAs=47.844±0.005 IrPsi=2.077±0.004 IrDel=34.050±0.158 <I>=5.736 MSE=1.3 (3.77) Synch=112.077±0.139 [111.988,112.655] M1=0.023±0.0036 [0.01,0.043]
\r
2170 Mon Mar 29 15:58:52 2010 Calib: MSE=1.298 (3.766) AzOffset=-0.001±0.006391 ElOffset=0.043±0.021611 DP=0.055±0.014
\r
2171 Mon Mar 29 18:59:41 2010 VASE File c:\wvase32\dat\29.dat 310 nills
\r
2172 Tue Mar 30 10:57:50 2010
\r
2173 Tue Mar 30 10:57:50 2010 Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=3
\r
2174 Tue Mar 30 11:02:19 2010 Calib: Diagnose bd:102, 83, 35, 17, 13, 6, 8, 0, 0, 0, pxy125=6.9,-43.18,0.00,-2.80 (70, 67, 46, 20, 19, 10, 6, 6, 0, 20, wpxy48=0.0656,-0.91,0.00,0.00)
\r
2175 Tue Mar 30 11:02:19 2010 Coarse Calibration was not successful.
\r
2176 Tue Mar 30 11:31:43 2010 Coarse Calib: Wvl1=5000.0 Ps=1.8142±0.1100 Attn=1.0117±0.0004 As=50.175±0.017 Psi=4.673±0.027 Del=153.420±0.631 <I>=1.368, MSE=2.32 (9.17)
\r
2177 Tue Mar 30 11:31:43 2010 Coarse Calib: MSE=2.323 (9.171) AzOffset=0.006±0.029469 ElOffset=-0.128±0.098557
\r
2178 Tue Mar 30 11:31:51 2010
\r
2179 Tue Mar 30 11:31:51 2010 Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=3
\r
2180 Tue Mar 30 11:34:34 2010 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
2181 Tue Mar 30 11:34:37 2010 Coarse Calib: Wvl1=5000.0 Ps=1.7753±0.0781 Attn=1.0115±0.0003 As=50.155±0.012 Psi=4.674±0.019 Del=153.784±0.438 <I>=1.385, MSE=1.67 (9.97)
\r
2182 Tue Mar 30 11:34:37 2010 Coarse Calib: MSE=1.670 (9.967) AzOffset=-0.008±0.021091 ElOffset=0.010±0.069755
\r
2183 Tue Mar 30 11:59:42 2010
\r
2184 Tue Mar 30 11:59:42 2010 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
2185 Tue Mar 30 12:09:01 2010 Calib: Wvl1=5000.0 Ps=1.8294±0.0196 Attn=1.0121±0.0003 As=50.120±0.008 Psi=4.688±0.010 Del=153.483±0.219 <I>=0.655, MSE=1.43 (23.2) Synch=114.137±0.209 [113.725,115.050] M1=0.0059±0.0095 [0.00032,0.053]
\r
2186 Tue Mar 30 12:09:02 2010 Calib: Wvl2=11770.0 Ps=1.8294±0.0196 IrAttn=0.9669±0.0004 IrAs=47.784±0.010 IrPsi=1.818±0.018 IrDel=20.423±1.590 <I>=0.983 MSE=1.43 (23.2) Synch=110.943±0.829 [109.322,115.899] M1=0.048±0.031 [0.022,0.24]
\r
2187 Tue Mar 30 12:09:02 2010 Calib: MSE=1.430 (23.177) AzOffset=0.030±0.010543 ElOffset=-0.011±0.035157 DP=0.030±0.020
\r
2188 Tue Mar 30 12:50:56 2010 VASE File c:\wvase32\dat\300310 si.dat
\r
2189 Tue Mar 30 14:31:24 2010
\r
2190 Tue Mar 30 14:31:24 2010 Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=3
\r
2191 Tue Mar 30 14:35:53 2010 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
2192 Tue Mar 30 14:35:56 2010 Coarse Calib: Wvl1=5000.0 Ps=1.8138±0.0058 Attn=1.0125±0.0002 As=50.117±0.006 Psi=18.471±0.019 Del=84.394±0.017 <I>=11.852, MSE=1.49 (1.14)
\r
2193 Tue Mar 30 14:35:56 2010 Coarse Calib: MSE=1.486 (1.136) AzOffset=0.020±0.003503 ElOffset=0.013±0.003152
\r
2194 Tue Mar 30 14:48:26 2010
\r
2195 Tue Mar 30 14:48:26 2010 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
2196 Tue Mar 30 14:57:47 2010 Calib: Wvl1=5000.0 Ps=1.8108±0.0029 Attn=1.0124±0.0003 As=50.151±0.009 Psi=18.474±0.020 Del=84.413±0.017 <I>=6.713, MSE=2.05 (1.24) Synch=114.061±0.030 [114.009,114.107] M1=0.0042±0.00042 [0.003,0.0052]
\r
2197 Tue Mar 30 14:57:47 2010 Calib: Wvl2=11770.0 Ps=1.8108±0.0029 IrAttn=0.9674±0.0004 IrAs=47.782±0.010 IrPsi=7.344±0.004 IrDel=69.774±0.025 <I>=6.607 MSE=2.05 (1.24) Synch=110.758±0.042 [110.672,110.903] M1=0.03±0.0061 [0.015,0.037]
\r
2198 Tue Mar 30 14:57:47 2010 Calib: MSE=2.052 (1.241) AzOffset=0.006±0.003671 ElOffset=-0.009±0.003306 DP=0.128±0.106
\r
2199 Tue Mar 30 15:53:46 2010
\r
2200 Tue Mar 30 15:53:46 2010 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
2201 Tue Mar 30 16:04:52 2010 Calib: Wvl1=5000.0 Ps=1.8151±0.0087 Attn=1.0121±0.0006 As=50.141±0.016 Psi=18.571±0.030 Del=84.206±0.032 <I>=0.881, MSE=2.75 (3.76) Synch=114.160±0.052 [114.051,114.274] M1=0.0021±0.0012 [0.00011,0.0056]
\r
2202 Tue Mar 30 16:04:52 2010 Calib: Wvl2=11770.0 Ps=1.8151±0.0087 IrAttn=0.9674±0.0009 IrAs=47.753±0.019 IrPsi=7.390±0.013 IrDel=69.809±0.066 <I>=1.210 MSE=2.75 (3.76) Synch=110.851±0.111 [110.723,111.353] M1=0.025±0.0036 [0.018,0.035]
\r
2203 Tue Mar 30 16:04:53 2010 Calib: MSE=2.748 (3.757) AzOffset=0.010±0.005551 ElOffset=-0.012±0.004975 DP=0.166±0.172
\r
2204 Tue Mar 30 16:54:35 2010 VASE File c:\wvase32\dat\300310 500z30 dynamic.dat
\r
2205 Wed Mar 31 10:24:16 2010 VASE File c:\wvase32\dat\300310 500z30 dynamic.dat
\r
2207 Wed Apr 14 10:09:55 2010 Init User: alex (v3.698, 6.256 DLL)
\r
2210 Wed Dec 01 14:22:17 2010 Init User: Nick (v3.698, 6.256 DLL)
\r
2212 Wed Dec 01 14:30:51 2010
\r
2213 Wed Dec 01 14:30:51 2010 Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=3
\r
2214 Wed Dec 01 14:35:21 2010 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
2215 Wed Dec 01 14:35:24 2010 Coarse Calib: Wvl1=5000.0 Ps=1.8506±0.0250 Attn=1.0102±0.0003 As=9.805±0.008 Psi=4.864±0.017 Del=148.212±0.321 <I>=6.148, MSE=1.98 (3.07)
\r
2216 Wed Dec 01 14:35:25 2010 Coarse Calib: MSE=1.984 (3.067) AzOffset=0.000±0.015507 ElOffset=0.004±0.057551
\r
2217 Wed Dec 01 14:36:08 2010
\r
2218 Wed Dec 01 14:36:08 2010 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
2219 Wed Dec 01 14:45:29 2010 Calib: Wvl1=5000.0 Ps=1.8364±0.0050 Attn=1.0105±0.0002 As=9.670±0.005 Psi=4.867±0.009 Del=148.029±0.161 <I>=2.886, MSE=1.34 (5.97) Synch=114.406±0.123 [114.122,114.623] M1=0.002±0.0013 [0.00023,0.0077]
\r
2220 Wed Dec 01 14:45:29 2010 Calib: Wvl2=11770.0 Ps=1.8364±0.0050 IrAttn=0.9666±0.0002 IrAs=7.321±0.006 IrPsi=1.952±0.005 IrDel=26.952±0.298 <I>=4.146 MSE=1.34 (5.97) Synch=111.364±0.263 [111.210,112.696] M1=0.037±0.002 [0.029,0.043]
\r
2221 Wed Dec 01 14:45:29 2010 Calib: MSE=1.343 (5.967) AzOffset=0.007±0.007811 ElOffset=-0.021±0.029013 DP=0.024±0.011
\r
2222 Wed Dec 01 15:02:34 2010 VASE File c:\wvase32\dat\011210 nick si.dat
\r
2224 Thu Dec 02 11:44:54 2010 Init User: Nick (v3.698, 6.256 DLL)
\r
2226 Thu Dec 02 12:22:26 2010
\r
2227 Thu Dec 02 12:22:26 2010 Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=3
\r
2228 Thu Dec 02 12:26:56 2010 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
2229 Thu Dec 02 12:26:59 2010 Coarse Calib: Wvl1=5000.0 Ps=1.8502±0.0119 Attn=1.0122±0.0002 As=39.038±0.006 Psi=4.864±0.013 Del=148.561±0.244 <I>=11.245, MSE=1.54 (1.95)
\r
2230 Thu Dec 02 12:27:00 2010 Coarse Calib: MSE=1.536 (1.950) AzOffset=0.016±0.011794 ElOffset=-0.001±0.043463
\r
2231 Thu Dec 02 12:27:16 2010
\r
2232 Thu Dec 02 12:27:16 2010 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
2233 Thu Dec 02 12:36:39 2010 Calib: Wvl1=5000.0 Ps=1.8430±0.0027 Attn=1.0123±0.0001 As=39.054±0.004 Psi=4.861±0.007 Del=148.645±0.130 <I>=5.251, MSE=1.08 (4.32) Synch=43.650±0.055 [43.570,43.840] M1=0.0085±0.0012 [0.002,0.013]
\r
2234 Thu Dec 02 12:36:39 2010 Calib: Wvl2=11770.0 Ps=1.8430±0.0027 IrAttn=0.9676±0.0002 IrAs=36.733±0.004 IrPsi=1.928±0.003 IrDel=26.673±0.196 <I>=5.782 MSE=1.08 (4.32) Synch=40.432±0.103 [40.325,40.823] M1=0.025±0.0028 [0.012,0.028]
\r
2235 Thu Dec 02 12:36:39 2010 Calib: MSE=1.081 (4.323) AzOffset=-0.001±0.006301 ElOffset=0.003±0.023306 DP=0.017±0.009
\r
2236 Thu Dec 02 12:54:44 2010 VASE File c:\wvase32\dat\021210 nick si.dat Spectroscopic Scan - Test on Si
\r
2237 Thu Dec 02 14:10:31 2010 VASE File c:\wvase32\dat\021210 nick auonsi(240709).dat Spectroscopic Scan - Test on Au on Si(1)
\r
2238 Thu Dec 02 14:41:29 2010 RT File c:\wvase32\dat\021210 nick auonsi(1778-tr-p).dat Transmission p Scan - Test on Au 2.67A 17/7/8
\r
2240 Thu Dec 02 14:56:36 2010 Init User: Nick (v3.698, 6.256 DLL)
\r
2242 Thu Dec 02 15:02:25 2010
\r
2243 Thu Dec 02 15:02:25 2010 Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=3
\r
2244 Thu Dec 02 15:06:54 2010 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
2245 Thu Dec 02 15:06:58 2010 Coarse Calib: Wvl1=5000.0 Ps=1.8209±0.0138 Attn=1.0142±0.0002 As=95.817±0.006 Psi=4.878±0.014 Del=148.538±0.276 <I>=10.843, MSE=1.73 (3.31)
\r
2246 Thu Dec 02 15:06:58 2010 Coarse Calib: MSE=1.732 (3.311) AzOffset=0.008±0.013252 ElOffset=-0.050±0.049145
\r
2247 Thu Dec 02 15:07:09 2010
\r
2248 Thu Dec 02 15:07:09 2010 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
2249 Thu Dec 02 15:16:30 2010 Calib: Wvl1=5000.0 Ps=1.8391±0.0035 Attn=1.0140±0.0002 As=95.823±0.005 Psi=4.862±0.009 Del=148.677±0.168 <I>=5.040, MSE=1.38 (5.08) Synch=171.458±0.059 [171.372,171.670] M1=0.0026±0.0012 [0.00041,0.0073]
\r
2250 Thu Dec 02 15:16:30 2010 Calib: Wvl2=11770.0 Ps=1.8391±0.0035 IrAttn=0.9686±0.0002 IrAs=93.549±0.006 IrPsi=1.920±0.004 IrDel=26.326±0.243 <I>=6.217 MSE=1.38 (5.08) Synch=168.094±0.091 [167.571,168.359] M1=0.035±0.0034 [0.016,0.038]
\r
2251 Thu Dec 02 15:16:30 2010 Calib: MSE=1.381 (5.083) AzOffset=-0.014±0.007929 ElOffset=0.061±0.029424 DP=0.009±0.011
\r
2253 Fri Dec 03 14:15:35 2010 Init User: Nick (v3.698, 6.256 DLL)
\r
2255 Fri Dec 03 14:18:59 2010 RT File c:\wvase32\dat\031210 test.dat
\r
2256 Fri Dec 03 14:30:24 2010
\r
2257 Fri Dec 03 14:30:24 2010 Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=3
\r
2258 Fri Dec 03 14:34:53 2010 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
2259 Fri Dec 03 14:34:57 2010 Coarse Calib: Wvl1=5000.0 Ps=1.8440±0.0112 Attn=1.0109±0.0002 As=87.217±0.005 Psi=4.857±0.011 Del=148.312±0.218 <I>=10.606, MSE=1.37 (1.93)
\r
2260 Fri Dec 03 14:34:57 2010 Coarse Calib: MSE=1.368 (1.930) AzOffset=0.002±0.010460 ElOffset=0.054±0.038889
\r
2261 Fri Dec 03 14:35:04 2010
\r
2262 Fri Dec 03 14:35:04 2010 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
2263 Fri Dec 03 14:44:25 2010 Calib: Wvl1=5000.0 Ps=1.8491±0.0036 Attn=1.0112±0.0002 As=87.181±0.005 Psi=4.852±0.009 Del=148.344±0.167 <I>=4.943, MSE=1.39 (3.88) Synch=42.580±0.134 [42.339,43.110] M1=0.0038±0.00089 [0.00032,0.006]
\r
2264 Fri Dec 03 14:44:26 2010 Calib: Wvl2=11770.0 Ps=1.8491±0.0036 IrAttn=0.9674±0.0002 IrAs=84.819±0.006 IrPsi=1.941±0.004 IrDel=26.167±0.245 <I>=6.097 MSE=1.39 (3.88) Synch=39.669±0.142 [39.445,40.436] M1=0.039±0.0061 [0.013,0.043]
\r
2265 Fri Dec 03 14:44:26 2010 Calib: MSE=1.390 (3.883) AzOffset=-0.009±0.008093 ElOffset=0.007±0.029856 DP=0.007±0.011
\r
2266 Fri Dec 03 15:08:19 2010 RT File c:\wvase32\dat\031210 nick-rt1.dat R&T for Au 2.67A
\r
2267 Fri Dec 03 15:42:27 2010 RT File c:\wvase32\dat\031210 nick-rt-mesh.dat R&T for e-Mesh
\r
2268 Fri Dec 03 15:53:42 2010 RT File c:\wvase32\dat\031210 nick-rt-mesh-full.dat R&T for e-Mesh-full
\r
2269 Fri Dec 03 16:07:17 2010 RT File c:\wvase32\dat\031210 nick-rt-mesh-full2.dat R&T for e-Mesh-full-Film1-45deg
\r
2270 Fri Dec 03 16:19:11 2010 RT File c:\wvase32\dat\031210 nick-rt-mesh-full3.dat R&T for e-Mesh-full-Film1+Film2-0deg
\r
2271 Fri Dec 03 16:29:28 2010 RT File c:\wvase32\dat\031210 nick-rt-mesh-full4.dat R&T for e-Mesh-full-Film1+Film2-45deg
\r
2272 Fri Dec 03 16:41:43 2010 RT File c:\wvase32\dat\031210 nick-rt-mesh-full5.dat R&T for e-Mesh-full-Film2-0deg
\r
2273 Fri Dec 03 16:51:17 2010 RT File c:\wvase32\dat\031210 nick-rt-mesh-full6.dat R&T for e-Mesh-full-Film2-45deg
\r
2275 Wed Mar 23 12:53:30 2011 Init User: Nick (v3.698, 6.256 DLL)
\r
2277 Wed Mar 23 13:03:29 2011
\r
2278 Wed Mar 23 13:03:29 2011 Calib: rvs=30, pts=60, span=60.0, aoi=90.000, t=1, d=3
\r
2279 Wed Mar 23 13:14:19 2011
\r
2280 Wed Mar 23 13:14:19 2011 Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=3
\r
2281 Wed Mar 23 13:17:05 2011 Insufficient intensity at too many points to perform calibration. 5000.0Å, det=0 (25, 49) (0.0002, 0.01)
\r
2282 Wed Mar 23 13:20:58 2011
\r
2283 Wed Mar 23 13:20:58 2011 Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=3
\r
2284 Wed Mar 23 13:21:55 2011 Insufficient intensity at too many points to perform calibration. 5000.0Å, det=0 (24, 47) (0.0006, 0.01)
\r
2286 Wed Mar 23 13:31:26 2011 Init User: Nick (v3.698, 6.256 DLL)
\r
2288 Wed Mar 23 13:37:23 2011
\r
2289 Wed Mar 23 13:37:23 2011 Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=3
\r
2290 Wed Mar 23 13:41:52 2011 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
2291 Wed Mar 23 13:41:56 2011 Coarse Calib: Wvl1=5000.0 Ps=1.8003±0.0077 Attn=1.0120±0.0001 As=82.633±0.003 Psi=4.864±0.008 Del=148.520±0.150 <I>=10.477, MSE=0.947 (1.8)
\r
2292 Wed Mar 23 13:41:56 2011 Coarse Calib: MSE=0.947 (1.804) AzOffset=-0.020±0.007272 ElOffset=0.009±0.026760
\r
2293 Wed Mar 23 13:44:23 2011
\r
2294 Wed Mar 23 13:44:23 2011 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
2295 Wed Mar 23 13:53:44 2011 Calib: Wvl1=5000.0 Ps=1.8164±0.0037 Attn=1.0121±0.0002 As=82.603±0.005 Psi=4.863±0.009 Del=148.496±0.169 <I>=4.937, MSE=1.41 (5.58) Synch=55.058±0.076 [54.945,55.287] M1=0.0083±0.0019 [0.00088,0.01]
\r
2296 Wed Mar 23 13:53:45 2011 Calib: Wvl2=11770.0 Ps=1.8164±0.0037 IrAttn=0.9673±0.0002 IrAs=80.261±0.006 IrPsi=1.922±0.004 IrDel=26.952±0.246 <I>=5.958 MSE=1.41 (5.58) Synch=52.272±0.118 [52.168,52.948] M1=0.032±0.0034 [0.015,0.037]
\r
2297 Wed Mar 23 13:53:45 2011 Calib: MSE=1.408 (5.584) AzOffset=-0.006±0.008186 ElOffset=-0.016±0.030290 DP=0.007±0.011
\r
2298 Wed Jun 29 17:21:40 2011 Initializing Error: User Canceled Initialization.
\r
2299 Wed Jun 29 17:21:42 2011 Initializing Error: MonoInitWait() DK
\r
2301 Wed Jun 29 17:23:18 2011 Init User: Nick (v3.698, 6.256 DLL)
\r
2303 Wed Jun 29 17:33:37 2011
\r
2304 Wed Jun 29 17:33:37 2011 Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=3
\r
2305 Wed Jun 29 17:38:07 2011 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
2306 Wed Jun 29 17:38:10 2011 Coarse Calib: Wvl1=5000.0 Ps=1.8113±0.0638 Attn=1.0095±0.0007 As=137.708±0.022 Psi=4.851±0.049 Del=147.930±0.902 <I>=7.020, MSE=5.61 (5.6)
\r
2307 Wed Jun 29 17:38:10 2011 Coarse Calib: MSE=5.609 (5.601) AzOffset=-0.029±0.043475 ElOffset=0.032±0.160586
\r
2308 Wed Jun 29 17:38:58 2011
\r
2309 Wed Jun 29 17:38:58 2011 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
2310 Wed Jun 29 17:48:20 2011 Calib: Wvl1=5000.0 Ps=1.8215±0.0055 Attn=1.0092±0.0002 As=137.640±0.006 Psi=4.827±0.011 Del=148.296±0.203 <I>=3.369, MSE=1.68 (4.64) Synch=-47.116±0.057 [-47.188,-46.871] M1=0.0031±0.0013 [0.00068,0.011]
\r
2311 Wed Jun 29 17:48:20 2011 Calib: Wvl2=11770.0 Ps=1.8215±0.0055 IrAttn=0.9658±0.0003 IrAs=135.223±0.007 IrPsi=1.957±0.005 IrDel=26.241±0.331 <I>=5.022 MSE=1.68 (4.64) Synch=-49.496±0.124 [-49.640,-49.026] M1=0.046±0.005 [0.027,0.054]
\r
2312 Wed Jun 29 17:48:20 2011 Calib: MSE=1.680 (4.641) AzOffset=-0.023±0.009808 ElOffset=-0.038±0.035792 DP=0.027±0.014
\r
2313 Wed Jun 29 18:00:20 2011 VASE File c:\wvase32\dat\290611_nick_si.dat Si callibratrion wafer test
\r
2314 Wed Jun 29 18:18:33 2011
\r
2315 Wed Jun 29 18:18:33 2011 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
2316 Wed Jun 29 18:29:43 2011 Calib: Wvl1=5000.0 Ps=1.8107±0.0033 Attn=1.0107±0.0002 As=137.473±0.004 Psi=4.834±0.007 Del=148.383±0.140 <I>=4.086, MSE=1.16 (3.4) Synch=-46.988±0.060 [-47.050,-46.752] M1=0.0033±0.0011 [0.00069,0.0089]
\r
2317 Wed Jun 29 18:29:43 2011 Calib: Wvl2=11770.0 Ps=1.8107±0.0033 IrAttn=0.9664±0.0002 IrAs=135.107±0.005 IrPsi=1.954±0.003 IrDel=26.255±0.206 <I>=5.835 MSE=1.16 (3.4) Synch=-49.619±0.130 [-49.691,-49.056] M1=0.034±0.0029 [0.019,0.044]
\r
2318 Wed Jun 29 18:29:43 2011 Calib: MSE=1.159 (3.404) AzOffset=-0.030±0.006783 ElOffset=-0.009±0.024090 DP=0.029±0.009
\r
2319 Wed Jun 29 18:40:23 2011 VASE File c:\wvase32\dat\290611_nick_si.dat Si callibratrion wafer test
\r
2321 Thu Jun 30 12:18:43 2011 Init User: Nick (v3.698, 6.256 DLL)
\r
2323 Thu Jun 30 12:22:24 2011
\r
2324 Thu Jun 30 12:22:24 2011 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
2325 Thu Jun 30 12:33:34 2011 Calib: Wvl1=5000.0 Ps=1.8156±0.0044 Attn=1.0091±0.0002 As=102.478±0.006 Psi=4.861±0.011 Del=147.822±0.201 <I>=4.726, MSE=1.68 (3.83) Synch=97.052±0.082 [96.969,97.416] M1=0.016±0.0034 [0.0044,0.021]
\r
2326 Thu Jun 30 12:33:35 2011 Calib: Wvl2=11770.0 Ps=1.8156±0.0044 IrAttn=0.9661±0.0003 IrAs=99.968±0.007 IrPsi=1.958±0.005 IrDel=26.683±0.285 <I>=5.983 MSE=1.68 (3.83) Synch=94.594±0.100 [94.398,95.007] M1=0.024±0.0026 [0.014,0.028]
\r
2327 Thu Jun 30 12:33:35 2011 Calib: MSE=1.676 (3.831) AzOffset=-0.006±0.009460 ElOffset=-0.071±0.035917 DP=0.018±0.014
\r
2328 Thu Jun 30 12:45:02 2011 VASE File c:\wvase32\dat\300611_nick_si.dat Si-Sio2 test
\r
2329 Thu Jun 30 13:13:26 2011 VASE File c:\wvase32\dat\300611_nick_si.dat SiO2-Gold
\r
2330 Thu Jun 30 13:37:47 2011 VASE File c:\wvase32\dat\300611_nick_si.dat SiO2-sample1
\r
2331 Thu Jun 30 13:48:06 2011 RT File c:\wvase32\dat\300611_nick_si-r1.dat SiO2-sample1E
\r
2332 Thu Jun 30 13:50:08 2011 RT File c:\wvase32\dat\300611_nick_si-r1.dat SiO2-sample1E
\r
2333 Thu Jun 30 13:52:00 2011 RT File c:\wvase32\dat\300611_nick_si-r1-d.dat SiO2-sample1E
\r
2334 Thu Jun 30 14:07:10 2011 RT File c:\wvase32\dat\300611_nick_si-r1-d.dat SiO2-sample1E
\r
2335 Thu Jun 30 14:38:38 2011 RT File c:\wvase32\dat\300611_nick_si-r2-d.dat SiO2-sample1D
\r
2336 Thu Jun 30 15:04:46 2011 RT File c:\wvase32\dat\300611_nick_si-r3-d.dat SiO2-sample1D-F
\r
2337 Thu Jun 30 15:39:00 2011 RT File c:\wvase32\dat\300611_nick_si-r4-d.dat SiO2-sample1D-Full
\r
2338 Thu Jun 30 15:56:40 2011 Goniometer limit switch error. #1
\r
2339 Thu Jun 30 15:57:33 2011 Goniometer error: Axis #1 and/or Axis #2 has an activated limit, but configuration does not permit automatic backoff from limit.
\r
2340 Thu Jun 30 15:57:36 2011 RT File c:\wvase32\dat\300611_nick_si-1d-asweep15-20d.dat SiO2-sample1D-Angle sweep - 15-20 d +=1d
\r
2341 Thu Jun 30 15:58:06 2011 Goniometer error: Axis #1 and/or Axis #2 has an activated limit, but configuration does not permit automatic backoff from limit.
\r
2342 Thu Jun 30 16:00:05 2011 Goniometer error: Axis #1 and/or Axis #2 has an activated limit, but configuration does not permit automatic backoff from limit.
\r
2343 Thu Jun 30 16:00:09 2011 RT File c:\wvase32\dat\300611_nick_si-1d-asweep20-25d.dat SiO2-sample1D-Angle sweep - 20-25 d +=1d
\r
2344 Thu Jun 30 16:00:12 2011 Goniometer error: Axis #1 and/or Axis #2 has an activated limit, but configuration does not permit automatic backoff from limit.
\r
2345 Thu Jun 30 16:06:52 2011 Goniometer limit switch error. #2
\r
2346 Thu Jun 30 16:06:54 2011 Goniometer error: Axis #1 and/or Axis #2 has an activated limit, but configuration does not permit automatic backoff from limit.
\r
2347 Thu Jun 30 16:07:31 2011 Goniometer limit switch error. #2
\r
2348 Thu Jun 30 16:07:33 2011 Goniometer error: Axis #1 and/or Axis #2 has an activated limit, but configuration does not permit automatic backoff from limit.
\r
2349 Thu Jun 30 16:07:39 2011 Goniometer limit switch error. #2
\r
2350 Thu Jun 30 16:07:41 2011 Goniometer error: Axis #1 and/or Axis #2 has an activated limit, but configuration does not permit automatic backoff from limit.
\r
2351 Thu Jun 30 16:07:47 2011 Goniometer limit switch error. #2
\r
2352 Thu Jun 30 16:07:48 2011 Goniometer error: Axis #1 and/or Axis #2 has an activated limit, but configuration does not permit automatic backoff from limit.
\r
2353 Thu Jun 30 16:09:00 2011 Goniometer error: Axis #1 and/or Axis #2 has an activated limit, but configuration does not permit automatic backoff from limit.
\r
2355 Thu Jun 30 16:24:52 2011 Init User: Nick (v3.698, 6.256 DLL)
\r
2357 Thu Jun 30 16:29:43 2011
\r
2358 Thu Jun 30 16:29:43 2011 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
2359 Thu Jun 30 16:31:55 2011 Insufficient intensity at too many points to perform calibration. 5000.0Å, det=0 (4, 3) (0.0055, 0.01)
\r
2360 Thu Jun 30 16:36:37 2011
\r
2361 Thu Jun 30 16:36:37 2011 Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=3
\r
2362 Thu Jun 30 16:44:40 2011 Calib: Diagnose bd:77, 78, 45, 33, 19, 7, 4, 1, 0, 0, pxy96=7.2,84.55,0.00,0.00 (1, 2, 0, 0, 2, 1, 1, 0, 2, 255, wpxy53=11.1432,6.37,0.00,0.00)
\r
2363 Thu Jun 30 16:44:40 2011 Coarse Calibration was not successful.
\r
2364 Thu Jun 30 16:44:53 2011 Coarse Calib: Wvl1=5000.0 Ps=14.7637±1.6937 Attn=0.6000±0.0037 As=14.745±0.190 Psi=0.339±0.943 Del=73.970±58.489 <I>=0.036, MSE=2.57 (1.08e+003)
\r
2365 Thu Jun 30 16:44:53 2011 Coarse Calib: MSE=2.571 (1076.426) AzOffset=-0.383±5.463855 ElOffset=0.208±3.007870
\r
2367 Thu Jun 30 17:42:27 2011 Init User: Nick (v3.698, 6.256 DLL)
\r
2370 Thu Jun 30 17:49:00 2011 Init User: Nick (v3.698, 6.256 DLL)
\r
2373 Thu Jun 30 18:09:29 2011 Init User: Nick (v3.698, 6.256 DLL)
\r
2376 Thu Jun 30 18:17:26 2011 Init User: Nick (v3.698, 6.256 DLL)
\r
2378 Thu Jun 30 18:30:32 2011
\r
2379 Thu Jun 30 18:30:32 2011 Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=3
\r
2380 Thu Jun 30 18:35:01 2011 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
2381 Thu Jun 30 18:35:04 2011 Coarse Calib: Wvl1=5000.0 Ps=1.8224±0.0068 Attn=1.0113±0.0002 As=95.647±0.005 Psi=4.876±0.011 Del=148.085±0.212 <I>=19.530, MSE=1.36 (1.77)
\r
2382 Thu Jun 30 18:35:04 2011 Coarse Calib: MSE=1.356 (1.773) AzOffset=-0.012±0.010263 ElOffset=0.005±0.037894
\r
2383 Thu Jun 30 18:35:23 2011
\r
2384 Thu Jun 30 18:35:23 2011 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
2385 Thu Jun 30 18:44:48 2011 Calib: Wvl1=5000.0 Ps=1.8143±0.0026 Attn=1.0114±0.0002 As=95.662±0.005 Psi=4.878±0.009 Del=148.047±0.179 <I>=9.208, MSE=1.49 (4.03) Synch=25.302±0.030 [25.267,25.439] M1=0.0076±0.0014 [0.0039,0.0097]
\r
2386 Thu Jun 30 18:44:48 2011 Calib: Wvl2=11770.0 Ps=1.8143±0.0026 IrAttn=0.9667±0.0002 IrAs=93.304±0.006 IrPsi=1.932±0.003 IrDel=27.224±0.209 <I>=7.911 MSE=1.49 (4.03) Synch=22.198±0.116 [21.373,22.350] M1=0.035±0.0046 [0.0066,0.043]
\r
2387 Thu Jun 30 18:44:48 2011 Calib: MSE=1.488 (4.030) AzOffset=0.024±0.007833 ElOffset=-0.101±0.029633 DP=0.018±0.012
\r
2388 Thu Jun 30 18:49:45 2011 VASE File c:\wvase32\dat\011210 nick si.dat fi
\r
2390 Fri Jul 01 12:30:34 2011 Init User: Nick (v3.698, 6.256 DLL)
\r
2392 Fri Jul 01 12:36:50 2011
\r
2393 Fri Jul 01 12:36:50 2011 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
2394 Fri Jul 01 12:48:01 2011 Calib: Wvl1=5000.0 Ps=1.8283±0.0027 Attn=1.0099±0.0002 As=101.674±0.005 Psi=4.859±0.010 Del=148.372±0.190 <I>=9.576, MSE=1.57 (3.31) Synch=169.202±0.030 [169.120,169.309] M1=0.0068±0.0018 [0.00088,0.0091]
\r
2395 Fri Jul 01 12:48:01 2011 Calib: Wvl2=11770.0 Ps=1.8283±0.0027 IrAttn=0.9660±0.0002 IrAs=99.219±0.006 IrPsi=1.925±0.004 IrDel=26.909±0.221 <I>=8.086 MSE=1.57 (3.31) Synch=166.299±0.084 [166.171,166.585] M1=0.036±0.0054 [0.0066,0.04]
\r
2396 Fri Jul 01 12:48:01 2011 Calib: MSE=1.568 (3.313) AzOffset=0.019±0.008191 ElOffset=-0.104±0.032132 DP=0.030±0.012
\r
2397 Fri Jul 01 13:08:48 2011 RT File c:\wvase32\dat\010711-c3-r1.dat Nanodot sample C3 - Reflection 25-40d +=3d
\r
2398 Fri Jul 01 13:40:01 2011 RT File c:\wvase32\dat\010711-c3-r1-t.dat Nanodot sample C3 - Reflection 25-40d +=3d
\r
2399 Fri Jul 01 14:07:28 2011 RT File c:\wvase32\dat\010711-c3-r2-t.dat Nanodot sample C3 - Reflection 39-55d +=3d
\r
2400 Fri Jul 01 14:19:58 2011 RT File c:\wvase32\dat\010711-c3-r3-t.dat Nanodot sample C3 - Reflection 20-26d +=3d
\r
2401 Fri Jul 01 14:57:56 2011 RT File c:\wvase32\dat\010711-c3-r3-t-perp.dat Nanodot sample C3 - Reflection 20-46d +=2d-perp
\r
2402 Fri Jul 01 15:27:12 2011 RT File c:\wvase32\dat\010711-c1-r1-t.dat Nanodot sample C1 - Reflection 20-30d +=2d
\r
2403 Fri Jul 01 16:09:54 2011 RT File c:\wvase32\dat\010711-c1-r1-t-mag.dat Nanodot sample C1 - Reflection 20-30d +=2d-mag
\r
2405 Thu Jul 07 17:27:47 2011 Init User: Nick (v3.698, 6.256 DLL)
\r
2407 Thu Jul 07 17:35:58 2011
\r
2408 Thu Jul 07 17:35:58 2011 Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=3
\r
2409 Thu Jul 07 17:40:28 2011 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
2410 Thu Jul 07 17:40:32 2011 Coarse Calib: Wvl1=5000.0 Ps=1.8669±0.0462 Attn=1.0072±0.0010 As=84.037±0.028 Psi=4.814±0.067 Del=147.768±1.271 <I>=16.747, MSE=8.04 (6.12)
\r
2411 Thu Jul 07 17:40:32 2011 Coarse Calib: MSE=8.040 (6.121) AzOffset=0.003±0.061017 ElOffset=0.046±0.227937
\r
2412 Thu Jul 07 17:43:49 2011
\r
2413 Thu Jul 07 17:43:49 2011 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
2414 Thu Jul 07 17:53:14 2011 Calib: Wvl1=5000.0 Ps=1.8458±0.0037 Attn=1.0089±0.0002 As=83.897±0.006 Psi=4.829±0.012 Del=148.145±0.231 <I>=7.910, MSE=1.91 (3.06) Synch=25.224±0.077 [25.101,25.648] M1=0.0027±0.0013 [0.00023,0.0065]
\r
2415 Thu Jul 07 17:53:15 2011 Calib: Wvl2=11770.0 Ps=1.8458±0.0037 IrAttn=0.9661±0.0003 IrAs=81.481±0.007 IrPsi=1.957±0.004 IrDel=25.689±0.278 <I>=8.041 MSE=1.91 (3.06) Synch=22.345±0.086 [22.205,22.686] M1=0.037±0.0058 [0.0086,0.041]
\r
2416 Thu Jul 07 17:53:15 2011 Calib: MSE=1.909 (3.062) AzOffset=0.019±0.010624 ElOffset=-0.073±0.039613 DP=0.021±0.015
\r
2417 Thu Jul 07 18:15:59 2011 RT File c:\wvase32\dat\070711-mag-refl-back.dat Adekunle film C3 + magnetisation test
\r
2418 Thu Jul 07 19:03:47 2011 RT File c:\wvase32\dat\070711-mag-refl-back-test1.dat Adekunle film C3 + magnetisation test
\r
2419 Thu Jul 07 19:16:14 2011 RT File c:\wvase32\dat\070711-mag-refl-back-test2.dat Adekunle film C3 + magnetisation test
\r
2420 Thu Jul 07 19:28:24 2011 RT File c:\wvase32\dat\070711-mag-refl-back-test3.dat Adekunle film C3 + magnetisation test
\r
2421 Thu Jul 07 19:41:02 2011 RT File c:\wvase32\dat\070711-mag-refl-back-test4.dat Adekunle film C3 + magnetisation test
\r
2423 Fri Jul 08 12:06:38 2011 Init User: Nick (v3.698, 6.256 DLL)
\r
2425 Fri Jul 08 12:13:45 2011
\r
2426 Fri Jul 08 12:13:45 2011 Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=3
\r
2427 Fri Jul 08 12:18:16 2011 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
2428 Fri Jul 08 12:18:20 2011 Coarse Calib: Wvl1=5000.0 Ps=1.8464±0.0346 Attn=1.0073±0.0007 As=92.279±0.021 Psi=4.816±0.049 Del=148.532±0.957 <I>=16.402, MSE=6.03 (4.53)
\r
2429 Fri Jul 08 12:18:20 2011 Coarse Calib: MSE=6.025 (4.535) AzOffset=-0.038±0.046213 ElOffset=0.022±0.164269
\r
2430 Fri Jul 08 12:18:37 2011
\r
2431 Fri Jul 08 12:18:37 2011 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
2432 Fri Jul 08 12:27:58 2011 Calib: Wvl1=5000.0 Ps=1.8601±0.0090 Attn=1.0086±0.0006 As=92.230±0.015 Psi=4.824±0.028 Del=148.210±0.553 <I>=7.570, MSE=4.54 (3.94) Synch=41.677±0.038 [41.618,41.789] M1=0.0024±0.0013 [0.00012,0.0069]
\r
2433 Fri Jul 08 12:27:59 2011 Calib: Wvl2=11770.0 Ps=1.8601±0.0090 IrAttn=0.9661±0.0007 IrAs=89.759±0.018 IrPsi=1.953±0.011 IrDel=25.930±0.676 <I>=7.798 MSE=4.54 (3.94) Synch=38.907±0.203 [38.625,39.343] M1=0.035±0.0041 [0.019,0.039]
\r
2434 Fri Jul 08 12:27:59 2011 Calib: MSE=4.545 (3.941) AzOffset=0.027±0.024816 ElOffset=-0.096±0.091152 DP=0.019±0.035
\r
2435 Fri Jul 08 12:46:32 2011 RT File c:\wvase32\dat\080711-background-refl1.dat Baseline reflection scan
\r
2436 Fri Jul 08 13:27:57 2011 RT File c:\wvase32\dat\080711-refl1-nob.dat 1p reflection scan-noB
\r
2437 Fri Jul 08 13:59:26 2011 RT File c:\wvase32\dat\080711-refl1-1.85a.dat 1p reflection scan-1.85A
\r
2438 Fri Jul 08 14:31:25 2011 RT File c:\wvase32\dat\080711-refl2+1.dat 1p reflection scan+1.85A
\r
2439 Fri Jul 08 14:41:49 2011 VASE File c:\wvase32\dat\080711-spectr-nob.dat spectroscopic-noB
\r
2440 Fri Jul 08 14:50:12 2011 VASE File c:\wvase32\dat\080711-spectr_-1.85.dat spectroscopic_-1.85A
\r
2441 Fri Jul 08 14:58:55 2011 VASE File c:\wvase32\dat\080711-spectr_+1.dat spectroscopic_+1.85A
\r
2442 Fri Jul 08 15:08:03 2011 VASE File c:\wvase32\dat\080711-spectr_low0.dat spectroscopic_low-0
\r
2443 Fri Jul 08 15:14:37 2011 VASE File c:\wvase32\dat\080711-spectr_low_-1.85.dat spectroscopic_low-0
\r
2444 Fri Jul 08 15:18:56 2011 VASE File c:\wvase32\dat\080711-spectr_low2-0.dat spectroscopic2_low-0
\r
2445 Fri Jul 08 15:21:02 2011 VASE File c:\wvase32\dat\080711-spectr_low3-0.dat spectroscopic3_low-0
\r
2446 Fri Jul 08 15:25:17 2011 VASE File c:\wvase32\dat\080711-spectr_largefield-0.dat spectroscopic3_largeB-0
\r
2447 Fri Jul 08 15:28:43 2011 VASE File c:\wvase32\dat\080711-spectr_largefield+2.7a.dat spectroscopic3_largeB+2.7A
\r
2448 Fri Jul 08 15:35:24 2011 VASE File c:\wvase32\dat\080711-spectr_largefield2-0.dat spectroscopic3_largeB2-0
\r
2449 Fri Jul 08 15:38:21 2011 VASE File c:\wvase32\dat\080711-spectr_largefield2_-2.8.dat spectroscopic3_largeB2+2.8
\r
2450 Fri Jul 08 15:41:35 2011 VASE File c:\wvase32\dat\080711-spectr_largefield3_0.dat spectroscopic3_largeB2+2.8
\r
2451 Fri Jul 08 15:44:28 2011 VASE File c:\wvase32\dat\080711-spectr_largefield3_-2.8.dat spectroscopic3_largeB2+2.8
\r
2452 Fri Jul 08 15:48:53 2011 VASE File c:\wvase32\dat\080711-spectr_35d.dat spectroscopic-35d
\r
2453 Fri Jul 08 15:50:37 2011 VASE File c:\wvase32\dat\080711-spectr_35d.dat spectroscopic-35d
\r
2454 Fri Jul 08 15:55:01 2011 VASE File c:\wvase32\dat\080711-spectr_35d_-2.8a.dat spectroscopic-35d-2.8A
\r
2455 Fri Jul 08 15:58:43 2011 VASE File c:\wvase32\dat\080711-spectr_35d_+2.dat spectroscopic-35d+2.8A
\r
2456 Fri Jul 08 16:04:43 2011 RT File c:\wvase32\dat\080711-refl-35d-0.dat spectroscopic-35d+2.8A
\r
2457 Fri Jul 08 16:08:39 2011 RT File c:\wvase32\dat\080711-refl-35d_-2.8a.dat refl-35d-2.8A
\r
2458 Fri Jul 08 16:29:56 2011 RT File c:\wvase32\dat\080711-refl-back2.dat \
\r
2459 Fri Jul 08 16:40:49 2011 RT File c:\wvase32\dat\080711-refl-25d-0b.dat refl-25d-0b-perp
\r
2460 Fri Jul 08 16:44:37 2011 RT File c:\wvase32\dat\080711-refl-25d_-2.8a.dat refl-25d-2.8a-perp
\r
2461 Fri Jul 08 16:49:28 2011 RT File c:\wvase32\dat\080711-refl-25d_+2.dat refl-perp-+2.8A
\r
2462 Fri Jul 08 16:52:45 2011 VASE File c:\wvase32\dat\080711-spectr-perp-0b.dat refl-perp-+2.8A
\r
2463 Fri Jul 08 16:55:49 2011 VASE File c:\wvase32\dat\080711-spectr-perp_-2.8a.dat refl-perp-+2.8A
\r
2464 Fri Jul 08 16:59:38 2011 VASE File c:\wvase32\dat\080711-spectr-perp_+2.dat refl-perp-+2.8A
\r
2465 Fri Jul 08 17:02:24 2011 VASE File c:\wvase32\dat\080711-spectr-perp_vb.dat refl-perp-+2.8A
\r
2467 Mon Jul 11 12:04:34 2011 Init User: Nick (v3.698, 6.256 DLL)
\r
2469 Mon Jul 11 12:08:32 2011
\r
2470 Mon Jul 11 12:08:32 2011 Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=3
\r
2471 Mon Jul 11 12:13:03 2011 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
2472 Mon Jul 11 12:13:06 2011 Coarse Calib: Wvl1=5000.0 Ps=1.8846±0.0421 Attn=1.0084±0.0009 As=85.960±0.025 Psi=4.856±0.061 Del=147.663±1.142 <I>=16.237, MSE=7.25 (5.49)
\r
2473 Mon Jul 11 12:13:07 2011 Coarse Calib: MSE=7.255 (5.494) AzOffset=0.040±0.054233 ElOffset=-0.078±0.195033
\r
2474 Mon Jul 11 12:13:12 2011
\r
2475 Mon Jul 11 12:13:12 2011 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
2476 Mon Jul 11 12:22:32 2011 Calib: Wvl1=5000.0 Ps=1.8712±0.0067 Attn=1.0088±0.0004 As=85.919±0.012 Psi=4.858±0.022 Del=147.769±0.413 <I>=7.712, MSE=3.43 (3.44) Synch=-102.297±0.189 [-102.629,-101.923] M1=0.004±0.0017 [0.00098,0.0092]
\r
2477 Mon Jul 11 12:22:32 2011 Calib: Wvl2=11770.0 Ps=1.8712±0.0067 IrAttn=0.9665±0.0005 IrAs=83.473±0.013 IrPsi=1.952±0.008 IrDel=26.600±0.490 <I>=7.862 MSE=3.43 (3.44) Synch=-105.069±0.058 [-105.290,-104.854] M1=0.04±0.0051 [0.016,0.044]
\r
2478 Mon Jul 11 12:22:33 2011 Calib: MSE=3.428 (3.440) AzOffset=0.036±0.018224 ElOffset=-0.113±0.065101 DP=0.025±0.027
\r
2479 Mon Jul 11 12:32:25 2011 RT File c:\wvase32\dat\11-07-11-refl-baseline1.dat reflection baseline 1
\r
2480 Mon Jul 11 12:44:21 2011 RT File c:\wvase32\dat\11-07-11-refl-baseline1.dat reflection baseline 1
\r
2481 Mon Jul 11 12:57:08 2011 VASE File c:\wvase32\dat\11-07-11-spectr-muelller1.dat spectroscopic-mueller1
\r
2482 Mon Jul 11 13:04:07 2011 VASE File c:\wvase32\dat\11-07-11-spectr-muelller1.dat spectroscopic-mueller1
\r
2483 Mon Jul 11 13:12:39 2011 VASE File c:\wvase32\dat\11-07-11-spectr-muelller2.dat spectroscopic-mueller2
\r
2484 Mon Jul 11 13:15:29 2011 VASE File c:\wvase32\dat\11-07-11-spectr-muelller2.dat spectroscopic-mueller2
\r
2485 Mon Jul 11 13:21:39 2011 VASE File c:\wvase32\dat\11-07-11-spectr-muelller2.dat spectroscopic-mueller2
\r
2486 Mon Jul 11 13:30:22 2011 VASE File c:\wvase32\dat\11-07-11-spectr-muelller2.dat spectroscopic-mueller2
\r
2487 Mon Jul 11 13:39:04 2011 VASE File c:\wvase32\dat\11-07-11-spectr-muelller2.dat spectroscopic-mueller2
\r
2488 Mon Jul 11 13:51:39 2011 VASE File c:\wvase32\dat\11-07-11-spectr-iso-35d-nob.dat spectroscopic-iso-ar-35d-noB
\r
2489 Mon Jul 11 14:02:31 2011 VASE File c:\wvase32\dat\11-07-11-spectr-iso-35d-2a.dat spectroscopic-iso-ar-35d-2A
\r
2490 Mon Jul 11 14:15:11 2011 VASE File c:\wvase32\dat\11-07-11-spectr-iso-35d+2a.dat spectroscopic-iso-ar-35d+2A
\r
2491 Mon Jul 11 14:28:01 2011 VASE File c:\wvase32\dat\11-07-11-spectr-iso-35d-nob2.dat spectroscopic-iso-ar-35d-noB-2
\r
2492 Mon Jul 11 14:36:57 2011 VASE File c:\wvase32\dat\11-07-11-spectr-iso-35d-2a.dat spectroscopic-iso-ar-35d-2a-2
\r
2493 Mon Jul 11 14:46:34 2011 VASE File c:\wvase32\dat\11-07-11-spectr-iso-35d+2a.dat spectroscopic-iso-ar-35d+2a-2
\r
2494 Mon Jul 11 15:23:12 2011 VASE File c:\wvase32\dat\11-07-11-spectr-haniso-35d-nob.dat spectroscopic-iso-ar-35d+2a-2
\r
2495 Mon Jul 11 15:51:21 2011 VASE File c:\wvase32\dat\11-07-11-spectr-iso-35d-nob-c1.dat spectroscopic-iso-ar-35d-nob-c1
\r
2496 Mon Jul 11 16:00:36 2011 VASE File c:\wvase32\dat\11-07-11-spectr-iso-35d-2a-c1.dat spectroscopic-iso-ar-35d-2a-c1
\r
2497 Mon Jul 11 16:11:39 2011 VASE File c:\wvase32\dat\11-07-11-spectr-iso-35d+2a-c1.dat spectroscopic-iso-ar-35d+2a-c1
\r
2498 Mon Jul 11 16:26:01 2011 VASE File c:\wvase32\dat\11-07-11-spectr-iso-35d-nob-c1-t2.dat spectroscopic-iso-ar-35d+2a-c1
\r
2499 Mon Jul 11 16:36:18 2011 VASE File c:\wvase32\dat\11-07-11-spectr-iso-35d+2a-c1-t2.dat spectroscopic-iso-ar-35d+2a-c1
\r
2500 Mon Jul 11 16:46:12 2011 VASE File c:\wvase32\dat\11-07-11-spectr-iso-35d-2a-c1-t2.dat spectroscopic-iso-ar-35d-2a-c1
\r
2501 Mon Jul 11 16:58:02 2011 VASE File c:\wvase32\dat\11-07-11-spectr-iso-45d-nob-c1.dat spectroscopic-iso-ar-45d-nob-c1
\r
2502 Mon Jul 11 17:07:49 2011 VASE File c:\wvase32\dat\11-07-11-spectr-iso-45d-2a-c1.dat spectroscopic-iso-ar-45d-2a-c1
\r
2503 Mon Jul 11 17:17:10 2011 VASE File c:\wvase32\dat\11-07-11-spectr-iso-45d+2a-c1.dat spectroscopic-iso-ar-45d+2a-c1
\r
2504 Mon Jul 11 17:26:57 2011 VASE File c:\wvase32\dat\11-07-11-spectr-iso-45d-2a-c1-t2.dat spectroscopic-iso-ar-45d-2a-c1-t2
\r
2505 Mon Jul 11 17:36:29 2011 VASE File c:\wvase32\dat\11-07-11-spectr-iso-45d-nob-c1-t2.dat spectroscopic-iso-ar-45d-nob-c1-t2
\r
2506 Mon Jul 11 17:38:33 2011 VASE File c:\wvase32\dat\11-07-11-spectr-iso-45d-no-c1-t2.dat
\r
2507 Mon Jul 11 17:47:07 2011 VASE File c:\wvase32\dat\11-07-11-spectr-iso-45d-nob-c1-t2.dat spect-45d-ar-+2A-t2
\r
2509 Tue Jul 12 11:49:34 2011 Init User: Nick (v3.698, 6.256 DLL)
\r
2511 Tue Jul 12 11:55:07 2011
\r
2512 Tue Jul 12 11:55:07 2011 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
2513 Tue Jul 12 12:06:18 2011 Calib: Wvl1=5000.0 Ps=1.8802±0.0058 Attn=1.0091±0.0004 As=151.799±0.010 Psi=4.872±0.019 Del=147.520±0.358 <I>=7.796, MSE=3 (3.98) Synch=-102.271±0.223 [-102.575,-101.772] M1=0.0061±0.0017 [0.00088,0.0095]
\r
2514 Tue Jul 12 12:06:18 2011 Calib: Wvl2=11770.0 Ps=1.8802±0.0058 IrAttn=0.9666±0.0005 IrAs=149.381±0.012 IrPsi=1.962±0.007 IrDel=26.501±0.419 <I>=8.086 MSE=3 (3.98) Synch=-105.135±0.070 [-105.201,-104.900] M1=0.034±0.0047 [0.013,0.039]
\r
2515 Tue Jul 12 12:06:18 2011 Calib: MSE=2.998 (3.980) AzOffset=-0.024±0.016309 ElOffset=0.084±0.060222 DP=-0.014±0.024
\r
2516 Tue Jul 12 12:18:58 2011 RT File c:\wvase32\dat\12-07-11-baseline1.dat
\r
2517 Tue Jul 12 13:05:43 2011 VASE File c:\wvase32\dat\12-07-11-spectr-35d-nob.dat
\r
2518 Tue Jul 12 13:21:52 2011 VASE File c:\wvase32\dat\12-07-11-spectr-35d-1.5a.dat
\r
2519 Tue Jul 12 13:45:10 2011 VASE File c:\wvase32\dat\12-07-11-spectr-35d+1.dat
\r
2520 Tue Jul 12 14:00:31 2011 VASE File c:\wvase32\dat\12-07-11-spectr-35d-nob-t10.dat
\r
2521 Tue Jul 12 14:09:54 2011 VASE File c:\wvase32\dat\12-07-11-spectr-35d-nob-t10.dat
\r
2522 Tue Jul 12 14:12:53 2011 VASE File c:\wvase32\dat\12-07-11-spectr-35d-nob-t10.dat
\r
2523 Tue Jul 12 14:15:15 2011 VASE File c:\wvase32\dat\12-07-11-spectr-35d-nob-t10.dat
\r
2524 Tue Jul 12 14:17:09 2011 VASE File c:\wvase32\dat\12-07-11-spectr-35d-nob-t10.dat
\r
2525 Tue Jul 12 14:19:18 2011 VASE File c:\wvase32\dat\12-07-11-spectr-35d-nob-t10.dat
\r
2526 Tue Jul 12 14:22:12 2011 VASE File c:\wvase32\dat\12-07-11-spectr-35d-nob-t10.dat
\r
2527 Tue Jul 12 14:23:53 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
2528 Tue Jul 12 14:28:28 2011 VASE File c:\wvase32\dat\12-07-11-spectr-35d-nob-t10.dat
\r
2529 Tue Jul 12 14:29:00 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
2530 Tue Jul 12 14:31:00 2011 VASE File c:\wvase32\dat\12-07-11-spectr-35d-nob-t10.dat
\r
2531 Tue Jul 12 14:31:16 2011 Dynamic VASE scan started, the starting time label is 2.26 min.
\r
2532 Tue Jul 12 14:34:33 2011 VASE File c:\wvase32\dat\12-07-11-spectr-35d-nob-t10.dat
\r
2533 Tue Jul 12 14:37:12 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
2534 Tue Jul 12 14:50:32 2011 VASE File c:\wvase32\dat\12-07-11-spectr-35d-nob-t10.dat
\r
2535 Tue Jul 12 14:59:13 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
2536 Tue Jul 12 15:21:32 2011 VASE File c:\wvase32\dat\12-07-11-spectr-35d-nob-t10.dat
\r
2537 Tue Jul 12 15:23:24 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
2538 Tue Jul 12 15:35:54 2011 VASE File c:\wvase32\dat\12-07-11-spectr-35d-nob-t10.dat
\r
2539 Tue Jul 12 15:37:13 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
2540 Tue Jul 12 15:57:51 2011 VASE File c:\wvase32\dat\12-07-11-spectr-35d-dyn.dat
\r
2541 Tue Jul 12 15:58:25 2011 Dynamic VASE scan started, the starting time label is 21.20 min.
\r
2542 Tue Jul 12 15:59:39 2011 VASE File c:\wvase32\dat\12-07-11-spectr-35d-dyn.dat
\r
2543 Tue Jul 12 15:59:52 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
2544 Tue Jul 12 17:03:48 2011 VASE File c:\wvase32\dat\12-07-11-spectr-35d-dyn.dat
\r
2545 Tue Jul 12 17:14:03 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
2546 Tue Jul 12 18:10:41 2011 VASE File c:\wvase32\dat\12-07-11-spectr-35d-dyn2.dat
\r
2548 Wed Jul 13 12:57:13 2011 Init User: Nick (v3.698, 6.256 DLL)
\r
2550 Wed Jul 13 13:01:55 2011
\r
2551 Wed Jul 13 13:01:55 2011 Calib: rvs=30, pts=60, span=60.0, aoi=30.000, t=1, d=3
\r
2552 Wed Jul 13 13:13:06 2011 Calib: Diagnose bd:229, 53, 11, 3, 3, 1, 2, 2, 0, 0, pxy84=7.9,-43.12,0.00,-3.80 (281, 15, 4, 3, 1, 0, 0, 0, 0, 0)
\r
2553 Wed Jul 13 13:13:06 2011 The error bar on the Calibration Parameter Ps is too large (check the Log File for details). Repeat the Coarse and Fine Calibration procedures on a thin SiO2/Si standard sample.
\r
2554 Wed Jul 13 13:13:11 2011 Calib: Wvl1=5000.0 Ps=1.9369±0.0493 Attn=1.0105±0.0002 As=28.230±0.054 Psi=41.135±0.005 Del=179.298±0.032 <I>=13.341, MSE=1.36 (0.736) Synch=97.005±0.029 [96.928,97.064] M1=0.014±0.0045 [0.0076,0.021]
\r
2555 Wed Jul 13 13:13:11 2011 Calib: Wvl2=11770.0 Ps=1.9369±0.0493 IrAttn=0.9675±0.0002 IrAs=25.858±0.056 IrPsi=40.288±0.011 IrDel=180.002±483.193 <I>=25.291 MSE=1.36 (0.736) Synch=94.238±0.054 [94.139,94.287] M1=0.021±0.005 [0.015,0.032]
\r
2556 Wed Jul 13 13:13:11 2011 Calib: MSE=1.361 (0.736) AzOffset=0.035±0.002038 ElOffset=-0.023±0.002095 DP=-0.135±0.054
\r
2557 Wed Jul 13 15:09:13 2011
\r
2558 Wed Jul 13 15:09:13 2011 Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=3
\r
2559 Wed Jul 13 15:13:43 2011 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
2560 Wed Jul 13 15:13:47 2011 Coarse Calib: Wvl1=5000.0 Ps=1.8883±0.0048 Attn=1.0140±0.0001 As=27.983±0.003 Psi=4.898±0.006 Del=148.240±0.122 <I>=14.636, MSE=0.778 (1.08)
\r
2561 Wed Jul 13 15:13:47 2011 Coarse Calib: MSE=0.778 (1.082) AzOffset=0.036±0.005904 ElOffset=0.006±0.021191
\r
2562 Wed Jul 13 15:15:32 2011
\r
2563 Wed Jul 13 15:15:32 2011 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
2564 Wed Jul 13 15:24:53 2011 Calib: Wvl1=5000.0 Ps=1.8904±0.0022 Attn=1.0145±0.0001 As=27.976±0.004 Psi=4.902±0.006 Del=148.236±0.123 <I>=6.948, MSE=1.03 (2.52) Synch=97.330±0.040 [97.274,97.478] M1=0.011±0.002 [0.0015,0.016]
\r
2565 Wed Jul 13 15:24:53 2011 Calib: Wvl2=11770.0 Ps=1.8904±0.0022 IrAttn=0.9694±0.0002 IrAs=25.716±0.004 IrPsi=1.904±0.003 IrDel=26.954±0.166 <I>=6.881 MSE=1.03 (2.52) Synch=94.230±0.109 [94.168,94.881] M1=0.043±0.0049 [0.019,0.049]
\r
2566 Wed Jul 13 15:24:54 2011 Calib: MSE=1.034 (2.515) AzOffset=-0.008±0.005963 ElOffset=0.002±0.021978 DP=0.014±0.008
\r
2567 Wed Jul 13 16:41:33 2011 VASE File c:\wvase32\dat\13-7-11-spectr-s1.dat
\r
2568 Wed Jul 13 16:50:44 2011 VASE File c:\wvase32\dat\13-7-11-spectr-s1-2a.dat
\r
2569 Wed Jul 13 16:59:26 2011 VASE File c:\wvase32\dat\13-7-11-spectr-s1+2a.dat
\r
2570 Wed Jul 13 17:01:52 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
2571 Wed Jul 13 17:12:05 2011 VASE File c:\wvase32\dat\13-7-11-dyn1.dat
\r
2572 Wed Jul 13 17:14:17 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
2573 Wed Jul 13 17:23:07 2011 VASE File c:\wvase32\dat\13-7-11-dyn2.dat
\r
2574 Wed Jul 13 17:26:26 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
2575 Wed Jul 13 18:28:25 2011 VASE File c:\wvase32\dat\13-7-11-dyn3.dat
\r
2577 Thu Jul 14 13:49:01 2011 Init User: Nick (v3.698, 6.256 DLL)
\r
2580 Thu Jul 14 14:04:22 2011 Init User: Nick (v3.698, 6.256 DLL)
\r
2583 Thu Jul 14 14:24:17 2011 Init User: Nick (v3.698, 6.256 DLL)
\r
2585 Thu Jul 14 14:55:45 2011
\r
2586 Thu Jul 14 14:55:45 2011 Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=3
\r
2587 Thu Jul 14 15:00:15 2011 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
2588 Thu Jul 14 15:00:17 2011 Coarse Calib: Wvl1=5000.0 Ps=1.9075±0.0066 Attn=1.0133±0.0001 As=158.777±0.004 Psi=4.876±0.009 Del=148.343±0.169 <I>=15.077, MSE=1.07 (1.67)
\r
2589 Thu Jul 14 15:00:18 2011 Coarse Calib: MSE=1.075 (1.673) AzOffset=-0.004±0.008172 ElOffset=-0.031±0.030343
\r
2590 Thu Jul 14 15:00:24 2011
\r
2591 Thu Jul 14 15:00:24 2011 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
2592 Thu Jul 14 15:09:47 2011 Calib: Wvl1=5000.0 Ps=1.9037±0.0025 Attn=1.0137±0.0002 As=158.769±0.004 Psi=4.883±0.008 Del=148.224±0.147 <I>=7.088, MSE=1.22 (3.77) Synch=114.081±0.032 [114.024,114.217] M1=0.0038±0.0006 [0.0018,0.0049]
\r
2593 Thu Jul 14 15:09:47 2011 Calib: Wvl2=11770.0 Ps=1.9037±0.0025 IrAttn=0.9695±0.0002 IrAs=156.495±0.005 IrPsi=1.926±0.003 IrDel=26.804±0.185 <I>=7.384 MSE=1.22 (3.77) Synch=111.109±0.054 [110.848,111.211] M1=0.029±0.0045 [0.0022,0.032]
\r
2594 Thu Jul 14 15:09:48 2011 Calib: MSE=1.216 (3.770) AzOffset=-0.024±0.006793 ElOffset=0.072±0.024623 DP=0.015±0.010
\r
2595 Thu Jul 14 15:24:57 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
2596 Thu Jul 14 15:29:16 2011 VASE File c:\wvase32\dat\14-7-11-dyn1.dat
\r
2597 Thu Jul 14 15:29:45 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
2598 Thu Jul 14 15:31:11 2011 VASE File c:\wvase32\dat\14-7-11-dyn1.dat
\r
2599 Thu Jul 14 15:31:32 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
2600 Thu Jul 14 15:33:00 2011 VASE File c:\wvase32\dat\14-7-11-dyn1.dat
\r
2601 Thu Jul 14 15:33:24 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
2602 Thu Jul 14 15:34:23 2011 VASE File c:\wvase32\dat\14-7-11-dyn1.dat
\r
2603 Thu Jul 14 15:34:47 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
2604 Thu Jul 14 15:40:04 2011 VASE File c:\wvase32\dat\14-7-11-dyn1.dat
\r
2605 Thu Jul 14 15:40:49 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
2606 Thu Jul 14 15:49:47 2011 VASE File c:\wvase32\dat\14-7-11-dyn1.dat
\r
2607 Thu Jul 14 15:50:12 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
2608 Thu Jul 14 15:52:55 2011 VASE File c:\wvase32\dat\14-7-11-dyn1.dat
\r
2610 Fri Jul 15 14:17:14 2011 Init User: Nick (v3.698, 6.256 DLL)
\r
2612 Fri Jul 15 14:24:03 2011
\r
2613 Fri Jul 15 14:24:03 2011 Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=3
\r
2614 Fri Jul 15 14:28:33 2011 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
2615 Fri Jul 15 14:28:37 2011 Coarse Calib: Wvl1=5000.0 Ps=1.9061±0.0598 Attn=1.0105±0.0010 As=160.983±0.030 Psi=4.809±0.072 Del=148.118±1.423 <I>=12.952, MSE=8.52 (6.7)
\r
2616 Fri Jul 15 14:28:37 2011 Coarse Calib: MSE=8.522 (6.703) AzOffset=-0.009±0.063076 ElOffset=-0.167±0.241992
\r
2617 Fri Jul 15 14:29:13 2011
\r
2618 Fri Jul 15 14:29:13 2011 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
2619 Fri Jul 15 14:38:36 2011 Calib: Wvl1=5000.0 Ps=1.9248±0.0034 Attn=1.0103±0.0002 As=160.917±0.005 Psi=4.857±0.010 Del=147.653±0.180 <I>=6.204, MSE=1.51 (3.85) Synch=-102.312±0.043 [-102.440,-102.213] M1=0.0046±0.0014 [0.0017,0.0092]
\r
2620 Fri Jul 15 14:38:36 2011 Calib: Wvl2=11770.0 Ps=1.9248±0.0034 IrAttn=0.9677±0.0002 IrAs=158.529±0.006 IrPsi=1.946±0.004 IrDel=26.642±0.244 <I>=6.668 MSE=1.51 (3.85) Synch=-104.962±0.127 [-105.374,-104.444] M1=0.036±0.006 [0.0041,0.041]
\r
2621 Fri Jul 15 14:38:36 2011 Calib: MSE=1.511 (3.853) AzOffset=-0.024±0.008674 ElOffset=0.030±0.030826 DP=0.015±0.012
\r
2622 Fri Jul 15 17:02:17 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
2623 Fri Jul 15 17:13:25 2011 VASE File c:\wvase32\dat\15-7-11-dyn1.dat
\r
2624 Fri Jul 15 17:13:52 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
2625 Fri Jul 15 17:26:40 2011 VASE File c:\wvase32\dat\15-7-11-dyn1.dat
\r
2627 Mon Jul 18 12:17:20 2011 Init User: Nick (v3.698, 6.256 DLL)
\r
2629 Mon Jul 18 12:23:50 2011
\r
2630 Mon Jul 18 12:23:50 2011 Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=3
\r
2631 Mon Jul 18 12:28:19 2011 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
2632 Mon Jul 18 12:28:23 2011 Coarse Calib: Wvl1=5000.0 Ps=1.9434±0.0107 Attn=1.0111±0.0002 As=137.911±0.006 Psi=4.884±0.015 Del=147.666±0.270 <I>=15.160, MSE=1.74 (2.77)
\r
2633 Mon Jul 18 12:28:23 2011 Coarse Calib: MSE=1.737 (2.766) AzOffset=0.001±0.013109 ElOffset=0.010±0.048821
\r
2634 Mon Jul 18 12:28:32 2011
\r
2635 Mon Jul 18 12:28:32 2011 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
2636 Mon Jul 18 12:37:54 2011 Calib: Wvl1=5000.0 Ps=1.9444±0.0024 Attn=1.0115±0.0002 As=137.839±0.004 Psi=4.878±0.007 Del=147.906±0.138 <I>=7.135, MSE=1.16 (3.36) Synch=-46.730±0.067 [-46.828,-46.564] M1=0.012±0.0024 [0.0022,0.015]
\r
2637 Mon Jul 18 12:37:54 2011 Calib: Wvl2=11770.0 Ps=1.9444±0.0024 IrAttn=0.9684±0.0002 IrAs=135.464±0.005 IrPsi=1.927±0.003 IrDel=26.600±0.186 <I>=6.954 MSE=1.16 (3.36) Synch=-49.711±0.165 [-49.876,-48.817] M1=0.026±0.0026 [0.011,0.031]
\r
2638 Mon Jul 18 12:37:54 2011 Calib: MSE=1.161 (3.358) AzOffset=-0.000±0.006689 ElOffset=0.005±0.024881 DP=0.008±0.009
\r
2639 Mon Jul 18 12:57:12 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
2640 Mon Jul 18 12:59:05 2011 VASE File c:\wvase32\dat\18-7-11-dyn1-with_mod.dat
\r
2641 Mon Jul 18 13:06:57 2011 Dynamic VASE scan started, the starting time label is 9.74 min.
\r
2642 Mon Jul 18 13:08:46 2011 VASE File c:\wvase32\dat\18-7-11-dyn1-with_mod.dat
\r
2643 Mon Jul 18 13:09:26 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
2644 Mon Jul 18 13:30:08 2011 VASE File c:\wvase32\dat\18-7-11-dyn1-with_mod.dat
\r
2645 Mon Jul 18 13:46:30 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
2646 Mon Jul 18 14:09:32 2011 VASE File c:\wvase32\dat\18-7-11-dyn1-with_mod.dat
\r
2647 Mon Jul 18 14:10:21 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
2648 Mon Jul 18 14:31:43 2011 VASE File c:\wvase32\dat\18-7-11-dyn1-with_mod.dat
\r
2649 Mon Jul 18 14:33:05 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
2650 Mon Jul 18 15:15:42 2011 VASE File c:\wvase32\dat\18-7-11-dyn1-with_mod.dat
\r
2651 Mon Jul 18 15:26:37 2011 VASE File c:\wvase32\dat\18-7-11-dyn1-with_mod.dat
\r
2652 Mon Jul 18 15:36:18 2011 VASE File c:\wvase32\dat\18-7-11-dyn1-with_mod.dat
\r
2653 Mon Jul 18 15:51:31 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
2654 Mon Jul 18 16:36:31 2011 VASE File c:\wvase32\dat\18-7-11-transvb.dat
\r
2655 Mon Jul 18 16:38:36 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
2656 Mon Jul 18 16:43:52 2011 VASE File c:\wvase32\dat\18-7-11-transvb.dat
\r
2657 Mon Jul 18 16:44:58 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
2658 Mon Jul 18 16:47:07 2011 VASE File c:\wvase32\dat\18-7-11-transvb.dat
\r
2659 Mon Jul 18 16:47:25 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
2660 Mon Jul 18 16:52:12 2011 VASE File c:\wvase32\dat\18-7-11-transvb.dat
\r
2661 Mon Jul 18 17:06:41 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
2662 Mon Jul 18 17:12:55 2011 VASE File c:\wvase32\dat\18-7-11-transvb.dat
\r
2663 Mon Jul 18 17:21:10 2011 VASE File c:\wvase32\dat\18-7-11-transvb.dat
\r
2664 Mon Jul 18 17:30:29 2011 VASE File c:\wvase32\dat\18-7-11-transvb.dat
\r
2665 Mon Jul 18 17:34:16 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
2666 Mon Jul 18 17:42:50 2011 VASE File c:\wvase32\dat\18-7-11-transvb.dat
\r
2667 Mon Jul 18 17:44:12 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
2668 Mon Jul 18 17:46:35 2011 VASE File c:\wvase32\dat\18-7-11-transvb.dat
\r
2669 Mon Jul 18 17:47:07 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
2670 Mon Jul 18 17:53:39 2011 VASE File c:\wvase32\dat\18-7-11-transvb.dat
\r
2671 Mon Jul 18 17:54:21 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
2672 Mon Jul 18 17:55:45 2011 VASE File c:\wvase32\dat\18-7-11-transvb.dat
\r
2673 Mon Jul 18 17:56:26 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
2674 Mon Jul 18 17:58:02 2011 VASE File c:\wvase32\dat\18-7-11-transvb.dat
\r
2675 Mon Jul 18 17:58:42 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
2676 Mon Jul 18 18:02:38 2011 VASE File c:\wvase32\dat\18-7-11-transvb.dat
\r
2677 Mon Jul 18 18:03:13 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
2678 Mon Jul 18 18:04:37 2011 VASE File c:\wvase32\dat\18-7-11-transvb.dat
\r
2679 Mon Jul 18 18:05:30 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
2680 Mon Jul 18 18:11:46 2011 VASE File c:\wvase32\dat\18-7-11-transvb.dat
\r
2681 Mon Jul 18 18:13:26 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
2682 Mon Jul 18 18:17:07 2011 VASE File c:\wvase32\dat\18-7-11-transvb.dat
\r
2683 Mon Jul 18 18:18:33 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
2684 Mon Jul 18 18:49:35 2011 VASE File c:\wvase32\dat\18-7-11-transvb.dat
\r
2686 Tue Jul 19 11:46:11 2011 Init User: Nick (v3.698, 6.256 DLL)
\r
2688 Tue Jul 19 11:54:36 2011
\r
2689 Tue Jul 19 11:54:36 2011 Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=3
\r
2690 Tue Jul 19 11:59:06 2011 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
2691 Tue Jul 19 11:59:09 2011 Coarse Calib: Wvl1=5000.0 Ps=1.9437±0.0079 Attn=1.0116±0.0001 As=138.103±0.004 Psi=4.875±0.010 Del=147.756±0.178 <I>=13.080, MSE=1.14 (1.93)
\r
2692 Tue Jul 19 11:59:09 2011 Coarse Calib: MSE=1.140 (1.932) AzOffset=0.003±0.008642 ElOffset=0.010±0.032158
\r
2693 Tue Jul 19 11:59:15 2011
\r
2694 Tue Jul 19 11:59:15 2011 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
2695 Tue Jul 19 12:08:38 2011 Calib: Wvl1=5000.0 Ps=1.9629±0.0055 Attn=1.0121±0.0003 As=138.047±0.008 Psi=4.876±0.015 Del=147.779±0.287 <I>=6.177, MSE=2.42 (4.46) Synch=42.016±0.110 [41.844,42.261] M1=0.0035±0.0012 [0.0015,0.0058]
\r
2696 Tue Jul 19 12:08:38 2011 Calib: Wvl2=11770.0 Ps=1.9629±0.0055 IrAttn=0.9686±0.0004 IrAs=135.726±0.010 IrPsi=1.936±0.007 IrDel=27.065±0.399 <I>=6.472 MSE=2.42 (4.46) Synch=39.070±0.180 [38.880,39.542] M1=0.04±0.0049 [0.014,0.05]
\r
2697 Tue Jul 19 12:08:38 2011 Calib: MSE=2.418 (4.465) AzOffset=-0.012±0.013890 ElOffset=0.025±0.051167 DP=0.014±0.019
\r
2698 Tue Jul 19 12:47:38 2011 VASE File c:\wvase32\dat\19-7-11-c1-spectr.dat
\r
2699 Tue Jul 19 12:57:19 2011 VASE File c:\wvase32\dat\19-7-11-c1-spectr.dat
\r
2700 Tue Jul 19 13:02:21 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
2701 Tue Jul 19 13:05:19 2011 VASE File c:\wvase32\dat\19-7-11-c1-dyn1.dat
\r
2702 Tue Jul 19 13:05:53 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
2703 Tue Jul 19 13:06:53 2011 VASE File c:\wvase32\dat\19-7-11-c1-dyn1.dat
\r
2704 Tue Jul 19 13:07:21 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
2705 Tue Jul 19 13:13:21 2011 VASE File c:\wvase32\dat\19-7-11-c1-dyn1.dat
\r
2706 Tue Jul 19 13:13:48 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
2707 Tue Jul 19 13:20:25 2011 VASE File c:\wvase32\dat\19-7-11-c1-dyn1.dat
\r
2708 Tue Jul 19 13:29:11 2011 VASE File c:\wvase32\dat\19-7-11-c1-dyn1.dat
\r
2709 Tue Jul 19 13:38:26 2011 VASE File c:\wvase32\dat\19-7-11-c1-dyn1.dat
\r
2710 Tue Jul 19 13:44:27 2011 VASE File c:\wvase32\dat\19-7-11-c1-dyn1.dat
\r
2711 Tue Jul 19 13:47:53 2011 VASE File c:\wvase32\dat\19-7-11-c1-dyn1.dat
\r
2712 Tue Jul 19 13:53:56 2011 VASE File c:\wvase32\dat\19-7-11-c1-dyn1.dat
\r
2713 Tue Jul 19 13:57:03 2011 VASE File c:\wvase32\dat\19-7-11-c1-dyn1.dat
\r
2714 Tue Jul 19 14:01:07 2011 VASE File c:\wvase32\dat\19-7-11-c1-dyn1.dat
\r
2715 Tue Jul 19 14:05:43 2011 VASE File c:\wvase32\dat\19-7-11-c1-dyn1.dat
\r
2716 Tue Jul 19 14:08:23 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
2717 Tue Jul 19 14:10:46 2011 VASE File c:\wvase32\dat\19-7-11-c1-dyn1.dat
\r
2718 Tue Jul 19 14:12:21 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
2719 Tue Jul 19 14:18:39 2011 VASE File c:\wvase32\dat\19-7-11-c1-dyn1.dat
\r
2720 Tue Jul 19 14:19:32 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
2721 Tue Jul 19 14:23:51 2011 VASE File c:\wvase32\dat\19-7-11-c1-dyn1.dat
\r
2722 Tue Jul 19 14:26:10 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
2723 Tue Jul 19 14:28:58 2011 VASE File c:\wvase32\dat\19-7-11-c1-dyn1.dat
\r
2724 Tue Jul 19 14:29:21 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
2725 Tue Jul 19 14:35:17 2011 VASE File c:\wvase32\dat\19-7-11-c1-dyn1.dat
\r
2726 Tue Jul 19 15:15:44 2011 VASE File c:\wvase32\dat\19-7-11-c1-dyn1.dat
\r
2727 Tue Jul 19 15:24:31 2011 VASE File c:\wvase32\dat\19-7-11-c1-dyn1.dat
\r
2728 Tue Jul 19 15:33:53 2011 VASE File c:\wvase32\dat\19-7-11-c1-dyn1.dat
\r
2729 Tue Jul 19 15:40:02 2011 VASE File c:\wvase32\dat\19-7-11-c1-dyn1.dat
\r
2730 Tue Jul 19 15:43:18 2011 VASE File c:\wvase32\dat\19-7-11-c1-dyn1.dat
\r
2731 Tue Jul 19 15:53:57 2011 VASE File c:\wvase32\dat\19-7-11-c1-dyn1.dat
\r
2732 Tue Jul 19 16:02:22 2011 VASE File c:\wvase32\dat\19-7-11-c1-dyn1.dat
\r
2733 Tue Jul 19 16:11:29 2011 VASE File c:\wvase32\dat\19-7-11-c1-dyn1.dat
\r
2734 Tue Jul 19 16:15:38 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
2735 Tue Jul 19 16:17:54 2011 VASE File c:\wvase32\dat\19-7-11-c1-dyn1.dat
\r
2736 Tue Jul 19 16:18:08 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
2737 Tue Jul 19 16:20:46 2011 VASE File c:\wvase32\dat\19-7-11-c1-dyn1.dat
\r
2738 Tue Jul 19 16:22:37 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
2739 Tue Jul 19 16:45:07 2011 VASE File c:\wvase32\dat\19-7-11-c1-dyn1.dat
\r
2740 Tue Jul 19 16:47:27 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
2741 Tue Jul 19 16:48:05 2011 VASE File c:\wvase32\dat\19-7-11-c1-dyn1.dat
\r
2742 Tue Jul 19 16:48:59 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
2743 Tue Jul 19 16:52:41 2011 VASE File c:\wvase32\dat\19-7-11-c1-dyn1.dat
\r
2744 Tue Jul 19 16:56:46 2011 VASE File c:\wvase32\dat\19-7-11-c1-dyn1.dat
\r
2745 Tue Jul 19 16:57:20 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
2746 Tue Jul 19 17:44:18 2011 VASE File c:\wvase32\dat\19-7-11-c1-dyn1.dat
\r
2748 Fri Sep 02 12:15:45 2011 Init User: Nick (v3.698, 6.256 DLL)
\r
2750 Fri Sep 02 12:24:14 2011
\r
2751 Fri Sep 02 12:24:14 2011 Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=3
\r
2752 Fri Sep 02 12:28:44 2011 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
2753 Fri Sep 02 12:28:48 2011 Coarse Calib: Wvl1=5000.0 Ps=1.9598±0.0084 Attn=1.0113±0.0001 As=155.264±0.004 Psi=4.848±0.010 Del=147.752±0.186 <I>=12.641, MSE=1.18 (1.6)
\r
2754 Fri Sep 02 12:28:48 2011 Coarse Calib: MSE=1.182 (1.602) AzOffset=-0.014±0.009001 ElOffset=-0.028±0.033411
\r
2755 Fri Sep 02 12:50:49 2011
\r
2756 Fri Sep 02 12:50:49 2011 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
2757 Fri Sep 02 13:00:12 2011 Calib: Wvl1=5000.0 Ps=1.9760±0.0026 Attn=1.0134±0.0001 As=155.002±0.004 Psi=4.876±0.007 Del=147.470±0.133 <I>=6.030, MSE=1.12 (3.61) Synch=-101.987±0.046 [-102.061,-101.838] M1=0.01±0.0014 [0.0045,0.012]
\r
2758 Fri Sep 02 13:00:13 2011 Calib: Wvl2=11770.0 Ps=1.9760±0.0026 IrAttn=0.9675±0.0002 IrAs=152.620±0.004 IrPsi=1.946±0.003 IrDel=26.560±0.188 <I>=6.362 MSE=1.12 (3.61) Synch=-104.986±0.120 [-105.072,-104.461] M1=0.034±0.0043 [0.0096,0.042]
\r
2759 Fri Sep 02 13:00:13 2011 Calib: MSE=1.124 (3.613) AzOffset=-0.011±0.006447 ElOffset=0.025±0.023871 DP=-0.007±0.009
\r
2760 Fri Sep 02 13:24:08 2011 VASE File c:\wvase32\dat\020911-e1.dat
\r
2761 Fri Sep 02 14:14:57 2011 VASE File c:\wvase32\dat\020911-e1.dat
\r
2762 Fri Sep 02 14:43:04 2011 VASE File c:\wvase32\dat\020911-e1.dat
\r
2763 Fri Sep 02 15:26:00 2011 VASE File c:\wvase32\dat\020911-e1.dat
\r
2764 Fri Sep 02 18:06:35 2011 VASE File c:\wvase32\mat\metals\020911-e3.dat
\r
2765 Fri Sep 02 18:14:53 2011 VASE File c:\windows\desktop\2-9-11\crap\020911-e3.dat
\r
2766 Fri Sep 02 19:29:08 2011 VASE File c:\windows\desktop\2-9-11\crap\020911-e2.dat
\r
2767 Fri Sep 02 19:51:05 2011 VASE File c:\windows\desktop\2-9-11\crap\020911-e2-redo.dat
\r
2769 Mon Sep 05 10:44:49 2011 Init User: Nick (v3.698, 6.256 DLL)
\r
2771 Mon Sep 05 10:50:48 2011
\r
2772 Mon Sep 05 10:50:48 2011 Calib: rvs=5, pts=100, span=180.0, aoi=65.000, t=0, d=3
\r
2773 Mon Sep 05 10:55:17 2011 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
2774 Mon Sep 05 10:55:21 2011 Coarse Calib: Wvl1=5000.0 Ps=2.0235±0.0091 Attn=1.0109±0.0003 As=77.251±0.010 Psi=20.182±0.007 Del=173.754±0.090 <I>=12.002, MSE=1.88 (1.35)
\r
2775 Mon Sep 05 10:55:21 2011 Coarse Calib: MSE=1.881 (1.349) AzOffset=-0.017±0.005203 ElOffset=0.005±0.006815
\r
2776 Mon Sep 05 10:56:22 2011
\r
2777 Mon Sep 05 10:56:22 2011 Calib: rvs=30, pts=60, span=60.0, aoi=65.000, t=1, d=3
\r
2778 Mon Sep 05 11:05:41 2011 Calib: Wvl1=5000.0 Ps=2.0238±0.0029 Attn=1.0115±0.0002 As=77.143±0.005 Psi=20.200±0.004 Del=173.826±0.041 <I>=7.097, MSE=1.13 (0.621) Synch=41.968±0.059 [41.856,42.057] M1=0.0093±0.0036 [0.0022,0.014]
\r
2779 Mon Sep 05 11:05:41 2011 Calib: Wvl2=11770.0 Ps=2.0238±0.0029 IrAttn=0.9667±0.0002 IrAs=74.702±0.007 IrPsi=15.322±0.002 IrDel=176.982±0.309 <I>=8.654 MSE=1.13 (0.621) Synch=38.880±0.041 [38.810,38.952] M1=0.02±0.0061 [0.0093,0.03]
\r
2780 Mon Sep 05 11:05:41 2011 Calib: MSE=1.134 (0.621) AzOffset=0.021±0.002384 ElOffset=0.002±0.003113 DP=-0.005±0.020
\r
2781 Mon Sep 05 11:20:46 2011 RT File c:\windows\desktop\5-9-11\crap\baseline1.dat p-polar4isation
\r
2782 Mon Sep 05 11:23:32 2011 RT File c:\windows\desktop\5-9-11\crap\e3-baseline1.dat p-polar4isation
\r
2783 Mon Sep 05 11:25:42 2011 RT File c:\windows\desktop\5-9-11\crap\e3-baseline1.dat p-polar4isation
\r
2784 Mon Sep 05 12:35:47 2011 RT File c:\windows\desktop\5-9-11\crap\e3-p-reflection-1.dat p-polar4isation
\r
2785 Mon Sep 05 12:53:37 2011 VASE File c:\windows\desktop\5-9-11\crap\e3-spectr1.dat p-polar4isation
\r
2786 Mon Sep 05 13:39:31 2011 RT File c:\windows\desktop\5-9-11\crap\baseline2-a3.dat p-polar4isation
\r
2787 Mon Sep 05 13:54:56 2011 RT File c:\windows\desktop\5-9-11\crap\p-refl1-a3.dat p-polar4isation
\r
2788 Mon Sep 05 15:02:17 2011 RT File c:\windows\desktop\5-9-11\crap\p-refl1-a3.dat p-polar4isation
\r
2789 Mon Sep 05 15:08:13 2011 RT File c:\windows\desktop\5-9-11\crap\s-refl1-a3.dat s-polar4isation
\r
2790 Mon Sep 05 15:13:39 2011 RT File c:\windows\desktop\5-9-11\crap\s-refl1-a3.dat s-polar4isation
\r
2791 Mon Sep 05 15:25:41 2011 RT File c:\windows\desktop\5-9-11\crap\s-refl1-a3.dat s-polar4isation
\r
2792 Mon Sep 05 15:34:19 2011 VASE File c:\windows\desktop\5-9-11\crap\spectr-a3.dat
\r
2793 Mon Sep 05 15:37:01 2011 VASE File c:\windows\desktop\5-9-11\crap\spectr-a3.dat
\r
2794 Mon Sep 05 15:40:10 2011 VASE File c:\windows\desktop\5-9-11\crap\spectr-a3.dat
\r
2795 Mon Sep 05 15:42:17 2011 VASE File c:\windows\desktop\5-9-11\crap\spectr-a3.dat
\r
2796 Mon Sep 05 15:44:30 2011 VASE File c:\windows\desktop\5-9-11\crap\spectr-a3.dat
\r
2797 Mon Sep 05 16:10:00 2011 VASE File c:\windows\desktop\5-9-11\crap\spectr-a3.dat
\r
2798 Mon Sep 05 16:50:12 2011 VASE File c:\windows\desktop\5-9-11\crap\spectr-a3-vert.dat vertical stripes-spectr
\r
2799 Mon Sep 05 16:59:07 2011 RT File c:\windows\desktop\5-9-11\crap\background-a3-vert.dat vertical stripes-spectr
\r
2800 Mon Sep 05 17:07:25 2011 RT File c:\windows\desktop\5-9-11\crap\background-a3-vert.dat vertical stripes-spectr
\r
2801 Mon Sep 05 17:36:23 2011 RT File c:\windows\desktop\5-9-11\crap\s-refl-a3-vert.dat vertical stripes-refl
\r
2803 Tue Sep 06 10:46:47 2011 Init User: Nick (v3.698, 6.256 DLL)
\r
2805 Tue Sep 06 10:52:16 2011
\r
2806 Tue Sep 06 10:52:16 2011 Calib: rvs=30, pts=60, span=60.0, aoi=55.000, t=1, d=3
\r
2807 Tue Sep 06 11:03:21 2011 Calib: Wvl1=5000.0 Ps=2.0630±0.0073 Attn=1.0117±0.0002 As=42.557±0.010 Psi=29.502±0.004 Del=176.832±0.031 <I>=9.020, MSE=1.12 (0.608) Synch=113.712±0.012 [113.682,113.742] M1=0.012±0.0047 [0.0044,0.018]
\r
2808 Tue Sep 06 11:03:21 2011 Calib: Wvl2=11770.0 Ps=2.0630±0.0073 IrAttn=0.9663±0.0002 IrAs=40.102±0.012 IrPsi=26.183±0.004 IrDel=178.245±0.538 <I>=13.992 MSE=1.12 (0.608) Synch=111.046±0.063 [110.896,111.125] M1=0.014±0.0049 [0.008,0.024]
\r
2809 Tue Sep 06 11:03:21 2011 Calib: MSE=1.121 (0.608) AzOffset=0.027±0.001869 ElOffset=0.014±0.002127 DP=-0.128±0.033
\r
2810 Tue Sep 06 11:16:28 2011 RT File c:\windows\desktop\6-9-11\crap\baseline-3a.dat p-pol
\r
2811 Tue Sep 06 12:27:12 2011 RT File c:\windows\desktop\6-9-11\crap\p-pol-refl-3a.dat p-pol
\r
2812 Tue Sep 06 12:44:19 2011 RT File c:\windows\desktop\6-9-11\crap\baseline-3e-s-pol.dat s-polar4isation
\r
2813 Tue Sep 06 13:10:48 2011 RT File c:\windows\desktop\6-9-11\crap\3e-s-pol.dat s-polar4isation
\r
2814 Tue Sep 06 13:46:27 2011 RT File c:\windows\desktop\6-9-11\crap\1e-s-pol.dat s-polar4isation
\r
2815 Tue Sep 06 13:51:48 2011 RT File c:\windows\desktop\6-9-11\crap\1e-baseline-p-pol.dat p-polarisation
\r
2816 Tue Sep 06 14:00:36 2011 RT File c:\windows\desktop\6-9-11\crap\1e-baseline-p-pol.dat p-polarisation
\r
2817 Tue Sep 06 15:12:52 2011 RT File c:\windows\desktop\6-9-11\crap\1e-p-pol.dat p-polarisation
\r
2818 Tue Sep 06 15:49:22 2011 VASE File c:\windows\desktop\6-9-11\crap\1e-spectr-full.dat s-polar4isation
\r
2819 Tue Sep 06 16:26:21 2011 VASE File c:\windows\desktop\6-9-11\crap\3b-spectr-full.dat s-polar4isation
\r
2820 Tue Sep 06 17:10:35 2011 RT File c:\windows\desktop\6-9-11\crap\3b-p-pol-short-vert.dat p-polar4isation
\r
2822 Wed Sep 07 11:00:19 2011 Init User: Nick (v3.698, 6.256 DLL)
\r
2824 Wed Sep 07 11:04:45 2011
\r
2825 Wed Sep 07 11:04:45 2011 Calib: rvs=30, pts=60, span=60.0, aoi=65.000, t=1, d=3
\r
2826 Wed Sep 07 11:15:49 2011 Calib: Wvl1=5000.0 Ps=2.0777±0.0028 Attn=1.0112±0.0002 As=145.632±0.005 Psi=20.183±0.004 Del=173.788±0.040 <I>=7.446, MSE=1.09 (0.6) Synch=-174.188±0.025 [-174.237,-174.122] M1=0.01±0.002 [0.0056,0.012]
\r
2827 Wed Sep 07 11:15:50 2011 Calib: Wvl2=11770.0 Ps=2.0777±0.0028 IrAttn=0.9677±0.0002 IrAs=143.210±0.007 IrPsi=15.322±0.002 IrDel=177.211±0.322 <I>=8.934 MSE=1.09 (0.6) Synch=-176.928±0.041 [-177.146,-176.875] M1=0.015±0.007 [0.0052,0.023]
\r
2828 Wed Sep 07 11:15:50 2011 Calib: MSE=1.092 (0.600) AzOffset=0.025±0.002295 ElOffset=0.015±0.003001 DP=-0.032±0.019
\r
2829 Wed Sep 07 11:27:57 2011 RT File c:\windows\desktop\7-9-11\crap\3b-baseline-s-pol-vert.dat s-pol
\r
2830 Wed Sep 07 11:36:31 2011 RT File c:\windows\desktop\7-9-11\crap\3b-baseline-s-pol-vert.dat s-pol
\r
2831 Wed Sep 07 12:10:31 2011 RT File c:\windows\desktop\7-9-11\crap\3b-s-pol-vert.dat s-pol
\r
2832 Wed Sep 07 12:21:03 2011 RT File c:\windows\desktop\7-9-11\crap\3b-baseline-p-pol-vert.dat p-pol
\r
2833 Wed Sep 07 13:35:45 2011 RT File c:\windows\desktop\7-9-11\crap\3b-p-pol-vert.dat p-pol
\r
2834 Wed Sep 07 14:22:52 2011 RT File c:\windows\desktop\7-9-11\crap\3b-p-pol-horiz.dat p-pol
\r
2835 Wed Sep 07 14:33:02 2011 RT File c:\windows\desktop\7-9-11\crap\3b-s-pol-horiz.dat s-pol
\r
2836 Wed Sep 07 14:58:30 2011 RT File c:\windows\desktop\7-9-11\crap\3b-s-pol-horiz.dat s-pol
\r
2837 Wed Sep 07 15:01:21 2011 RT File c:\windows\desktop\7-9-11\crap\3b-s-pol-horiz-zoom.dat s-pol
\r
2838 Wed Sep 07 15:11:32 2011 RT File c:\windows\desktop\7-9-11\crap\3b-s-pol-horiz-zoom-baseline.dat s-pol
\r
2839 Wed Sep 07 15:52:48 2011 RT File c:\windows\desktop\7-9-11\crap\3b-s-pol-horiz-zoom.dat s-pol-zoom
\r
2840 Wed Sep 07 16:12:30 2011 VASE File c:\windows\desktop\7-9-11\crap\3b-spectr-horiz.dat spectr-horiz
\r
2841 Wed Sep 07 16:39:26 2011 VASE File c:\windows\desktop\7-9-11\crap\1a-spectr-vert.dat spectr-vert
\r
2842 Wed Sep 07 16:51:41 2011 RT File c:\windows\desktop\7-9-11\crap\1a-baseline-s-pol.dat s-pol
\r
2843 Wed Sep 07 17:18:08 2011 RT File c:\windows\desktop\7-9-11\crap\1a-s-pol-vert.dat s-pol
\r
2844 Wed Sep 07 17:37:41 2011 VASE File c:\windows\desktop\7-9-11\crap\1a-spectr-verrt-2.dat spectr-vert
\r
2846 Thu Sep 08 11:02:17 2011 Init User: Nick (v3.698, 6.256 DLL)
\r
2848 Thu Sep 08 11:07:07 2011
\r
2849 Thu Sep 08 11:07:07 2011 Calib: rvs=30, pts=60, span=60.0, aoi=65.000, t=1, d=3
\r
2850 Thu Sep 08 11:18:14 2011 Calib: Wvl1=5000.0 Ps=2.0881±0.0034 Attn=1.0117±0.0002 As=110.790±0.006 Psi=20.194±0.005 Del=173.889±0.047 <I>=7.537, MSE=1.3 (0.71) Synch=-30.257±0.062 [-30.356,-30.073] M1=0.012±0.0036 [0.006,0.018]
\r
2851 Thu Sep 08 11:18:14 2011 Calib: Wvl2=11770.0 Ps=2.0881±0.0034 IrAttn=0.9689±0.0003 IrAs=108.411±0.008 IrPsi=15.329±0.003 IrDel=177.231±0.388 <I>=8.640 MSE=1.3 (0.71) Synch=-33.000±0.091 [-33.075,-32.848] M1=0.015±0.0078 [0.0049,0.024]
\r
2852 Thu Sep 08 11:18:14 2011 Calib: MSE=1.302 (0.710) AzOffset=0.036±0.002741 ElOffset=0.006±0.003569 DP=-0.039±0.023
\r
2853 Thu Sep 08 11:31:14 2011 RT File c:\windows\desktop\8-9-11\crap\vert-p-pol-basedee.dat
\r
2854 Thu Sep 08 12:42:05 2011 RT File c:\windows\desktop\8-9-11\crap\vert-p-pol.dat p-pol
\r
2855 Thu Sep 08 13:26:49 2011 RT File c:\windows\desktop\8-9-11\crap\horiz-p-pol.dat p-pol
\r
2856 Thu Sep 08 13:45:32 2011 VASE File c:\windows\desktop\8-9-11\crap\horiz-spectr.dat spectr
\r
2857 Thu Sep 08 14:27:54 2011 RT File c:\windows\desktop\8-9-11\crap\horiz-s-pol-baseline.dat s-pol-base
\r
2858 Thu Sep 08 15:00:52 2011 RT File c:\windows\desktop\8-9-11\crap\horiz-s-pol.dat s-pol-horiz
\r
2859 Thu Sep 08 15:19:33 2011 RT File c:\windows\desktop\8-9-11\crap\wire2-s-pol-vert.dat s-pol-vert
\r
2860 Thu Sep 08 15:35:39 2011 VASE File c:\windows\desktop\8-9-11\crap\wire2-spectr-vert.dat -vert
\r
2861 Thu Sep 08 15:38:41 2011 RT File c:\windows\desktop\8-9-11\crap\wire2-baseline-p-pol.dat p-pol
\r
2862 Thu Sep 08 15:40:48 2011 RT File c:\windows\desktop\8-9-11\crap\wire2-baseline-p-pol.dat p-pol
\r
2863 Thu Sep 08 16:01:50 2011 RT File c:\windows\desktop\8-9-11\crap\wire2-p-pol.dat \
\r
2864 Thu Sep 08 16:22:14 2011 RT File c:\windows\desktop\8-9-11\crap\wire2-p-pol-horiz.dat p-pol-horiz
\r
2865 Thu Sep 08 16:31:45 2011 VASE File c:\windows\desktop\8-9-11\crap\wire2-spectr-horiz.dat spectr-horiz
\r
2866 Thu Sep 08 16:37:16 2011 RT File c:\windows\desktop\8-9-11\crap\horiz-s-pol-baseline-wire2.dat s-pol-base
\r
2867 Thu Sep 08 16:40:57 2011 Goniometer limit switch error. #1
\r
2868 Thu Sep 08 16:41:21 2011 Goniometer limit switch error. #1
\r
2869 Thu Sep 08 16:42:01 2011 Goniometer limit switch error. #1
\r
2870 Thu Sep 08 16:59:57 2011 RT File c:\windows\desktop\8-9-11\crap\horiz-s-pol-horiz-wire2.dat s-pol-horiz
\r
2871 Thu Sep 08 17:13:35 2011 VASE File c:\windows\desktop\8-9-11\crap\3d-spectr-vert.dat spectr-vert
\r
2872 Thu Sep 08 17:27:31 2011 VASE File c:\windows\desktop\8-9-11\crap\3a-spectr-vert-test.dat spectr-vert
\r
2874 Thu Sep 08 17:28:56 2011 Init User: Nick (v3.698, 6.256 DLL)
\r
2876 Thu Sep 08 17:32:37 2011
\r
2877 Thu Sep 08 17:32:37 2011 Calib: rvs=5, pts=100, span=180.0, aoi=35.000, t=0, d=3
\r
2878 Thu Sep 08 17:37:07 2011 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
2879 Thu Sep 08 17:37:09 2011 Coarse Calib: Wvl1=5000.0 Ps=2.0413±0.0363 Attn=1.0163±0.0003 As=67.419±0.037 Psi=39.622±0.006 Del=179.037±0.050 <I>=12.337, MSE=1.58 (1.13)
\r
2880 Thu Sep 08 17:37:09 2011 Coarse Calib: MSE=1.582 (1.128) AzOffset=0.029±0.003150 ElOffset=0.022±0.003270
\r
2881 Thu Sep 08 17:38:26 2011
\r
2882 Thu Sep 08 17:38:26 2011 Calib: rvs=30, pts=60, span=60.0, aoi=35.000, t=1, d=3
\r
2883 Thu Sep 08 17:47:44 2011 Calib: Diagnose bd:188, 69, 33, 8, 2, 2, 1, 1, 0, 0, pxy84=7.3,-42.99,0.00,-3.80 (248, 50, 3, 3, 0, 0, 0, 0, 0, 0)
\r
2884 Thu Sep 08 17:47:44 2011 The error bar on the Calibration Parameter Ps is too large (check the Log File for details). Repeat the Coarse and Fine Calibration procedures on a thin SiO2/Si standard sample.
\r
2885 Thu Sep 08 17:47:52 2011 Calib: Wvl1=5000.0 Ps=2.0432±0.0426 Attn=1.0161±0.0002 As=67.415±0.048 Psi=39.619±0.006 Del=179.013±0.036 <I>=11.230, MSE=1.5 (0.81) Synch=-2.812±0.042 [-2.937,-2.749] M1=0.016±0.0046 [0.0095,0.024]
\r
2886 Thu Sep 08 17:47:53 2011 Calib: Wvl2=11770.0 Ps=2.0432±0.0426 IrAttn=0.9723±0.0003 IrAs=65.294±0.051 IrPsi=38.404±0.011 IrDel=176.413±0.470 <I>=21.936 MSE=1.5 (0.81) Synch=-5.867±0.018 [-5.907,-5.830] M1=0.019±0.0046 [0.014,0.029]
\r
2887 Thu Sep 08 17:47:53 2011 Calib: MSE=1.496 (0.810) AzOffset=0.002±0.002262 ElOffset=0.004±0.002350 DP=-0.039±0.058
\r
2888 Thu Sep 08 17:52:52 2011
\r
2889 Thu Sep 08 17:52:52 2011 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
2890 Thu Sep 08 18:04:02 2011 Calib: Wvl1=5000.0 Ps=2.0784±0.0047 Attn=1.0166±0.0003 As=67.373±0.007 Psi=4.896±0.013 Del=147.773±0.242 <I>=6.118, MSE=2.04 (3.9) Synch=-2.782±0.057 [-2.878,-2.611] M1=0.019±0.0025 [0.0062,0.023]
\r
2891 Thu Sep 08 18:04:03 2011 Calib: Wvl2=11770.0 Ps=2.0784±0.0047 IrAttn=0.9725±0.0003 IrAs=65.232±0.008 IrPsi=1.940±0.006 IrDel=28.252±0.335 <I>=5.955 MSE=2.04 (3.9) Synch=-5.821±0.106 [-6.138,-5.265] M1=0.036±0.0033 [0.017,0.047]
\r
2892 Thu Sep 08 18:04:03 2011 Calib: MSE=2.038 (3.901) AzOffset=0.012±0.011755 ElOffset=0.005±0.043201 DP=0.020±0.016
\r
2893 Thu Sep 08 18:13:45 2011 VASE File c:\windows\desktop\8-9-11\crap\3a-spectr-vert-test.dat
\r
2895 Fri Sep 09 11:21:24 2011 Init User: Nick (v3.698, 6.256 DLL)
\r
2897 Fri Sep 09 11:25:33 2011
\r
2898 Fri Sep 09 11:25:33 2011 Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=3
\r
2899 Fri Sep 09 11:30:03 2011 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
2900 Fri Sep 09 11:30:07 2011 Coarse Calib: Wvl1=5000.0 Ps=2.1082±0.0127 Attn=1.0117±0.0002 As=50.654±0.006 Psi=4.880±0.015 Del=147.623±0.278 <I>=12.088, MSE=1.77 (2.67)
\r
2901 Fri Sep 09 11:30:07 2011 Coarse Calib: MSE=1.769 (2.668) AzOffset=0.037±0.013342 ElOffset=-0.061±0.048585
\r
2902 Fri Sep 09 11:31:59 2011
\r
2903 Fri Sep 09 11:31:59 2011 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
2904 Fri Sep 09 11:41:19 2011 Calib: Wvl1=5000.0 Ps=2.0906±0.0044 Attn=1.0120±0.0002 As=50.558±0.006 Psi=4.894±0.012 Del=147.316±0.216 <I>=5.738, MSE=1.81 (4.68) Synch=-30.142±0.122 [-30.337,-29.901] M1=0.022±0.0043 [0.0064,0.026]
\r
2905 Fri Sep 09 11:41:19 2011 Calib: Wvl2=11770.0 Ps=2.0906±0.0044 IrAttn=0.9695±0.0003 IrAs=48.244±0.007 IrPsi=1.950±0.005 IrDel=27.793±0.320 <I>=5.379 MSE=1.81 (4.68) Synch=-32.998±0.146 [-33.697,-32.643] M1=0.034±0.0031 [0.022,0.04]
\r
2906 Fri Sep 09 11:41:19 2011 Calib: MSE=1.810 (4.680) AzOffset=-0.026±0.009991 ElOffset=0.082±0.036646 DP=0.003±0.015
\r
2907 Fri Sep 09 11:56:28 2011 VASE File c:\windows\desktop\9-9-11\crap\wire2-spectr-vert.dat spectr-vert
\r
2908 Fri Sep 09 12:14:49 2011 RT File c:\windows\desktop\9-9-11\crap\wire2-p-pol-base-vert.dat p-pol-base-vert
\r
2909 Fri Sep 09 12:35:14 2011 Goniometer limit switch error. #1
\r
2910 Fri Sep 09 12:36:22 2011 Goniometer limit switch error. #1
\r
2911 Fri Sep 09 12:47:37 2011 VASE File c:\windows\desktop\9-9-11\crap\wire2-spectr-vert-test1.dat p-pol-base-vert
\r
2912 Fri Sep 09 13:06:30 2011 RT File c:\windows\desktop\9-9-11\crap\wire2-p-pol-vert.dat p-pol-vert
\r
2913 Fri Sep 09 13:21:09 2011 RT File c:\windows\desktop\9-9-11\crap\wire2-s-pol-baseline-vert.dat s-pol-base-vert
\r
2914 Fri Sep 09 13:42:18 2011 RT File c:\windows\desktop\9-9-11\crap\wire2-s-pol-vert.dat s-pol-vert
\r
2915 Fri Sep 09 14:02:26 2011 RT File c:\windows\desktop\9-9-11\crap\wire2-s-pol-horiz.dat s-pol-horiz
\r
2916 Fri Sep 09 14:11:52 2011 VASE File c:\windows\desktop\9-9-11\crap\wire2-spectrhoriz.dat spectr-horiz
\r
2917 Fri Sep 09 14:20:06 2011 RT File c:\windows\desktop\9-9-11\crap\wire2-p-pol-horiz-base.dat p-pol-base-hor
\r
2918 Fri Sep 09 14:39:06 2011 RT File c:\windows\desktop\9-9-11\crap\wire2-p-pol-horiz.dat p-pol-base
\r
2919 Fri Sep 09 15:14:28 2011 RT File c:\windows\desktop\9-9-11\crap\d3-p-pol-vert.dat p-pol-vert
\r
2920 Fri Sep 09 15:32:40 2011 VASE File c:\windows\desktop\9-9-11\crap\d3-spectrvert.dat spectr-vert
\r
2921 Fri Sep 09 15:49:37 2011 RT File c:\windows\desktop\9-9-11\crap\d3-s-pol-base-vert.dat s-pol-base-vert
\r
2922 Fri Sep 09 16:07:40 2011 RT File c:\windows\desktop\9-9-11\crap\d3-s-pol-vert.dat s-pol-vert
\r
2923 Fri Sep 09 16:29:50 2011 RT File c:\windows\desktop\9-9-11\crap\d3-s-pol-horiz.dat s-pol-horiz
\r
2924 Fri Sep 09 16:40:07 2011 VASE File c:\windows\desktop\9-9-11\crap\d3-spectr-horiz.dat spectr-horiz
\r
2925 Fri Sep 09 16:49:02 2011 RT File c:\windows\desktop\9-9-11\crap\d3-p-pol-baseline-horiz.dat p--pol-base
\r
2926 Fri Sep 09 17:06:53 2011 RT File c:\windows\desktop\9-9-11\crap\d3-p-pol-horiz.dat p--pol-hor
\r
2927 Fri Sep 09 17:15:10 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
2928 Fri Sep 09 17:18:07 2011 VASE File c:\windows\desktop\9-9-11\mag-meas\dyn-tes1.dat p--pol-hor
\r
2929 Fri Sep 09 17:18:34 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
2930 Fri Sep 09 17:21:16 2011 VASE File c:\windows\desktop\9-9-11\mag-meas\dyn-tes1.dat p--pol-hor
\r
2931 Fri Sep 09 17:22:03 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
2932 Fri Sep 09 17:27:08 2011 VASE File c:\windows\desktop\9-9-11\mag-meas\dyn-tes1.dat p--pol-hor
\r
2933 Fri Sep 09 17:30:03 2011 VASE File c:\windows\desktop\9-9-11\mag-meas\dyn-tes1.dat p--pol-hor
\r
2934 Fri Sep 09 18:48:23 2011 VASE File c:\windows\desktop\9-9-11\mag-meas\dyn-tes1.dat p--pol-hor
\r
2935 Fri Sep 09 18:54:29 2011 VASE File c:\windows\desktop\9-9-11\mag-meas\dyn-tes1.dat p--pol-hor
\r
2936 Fri Sep 09 18:57:30 2011 VASE File c:\windows\desktop\9-9-11\mag-meas\dyn-tes1.dat p--pol-hor
\r
2937 Fri Sep 09 19:00:24 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
2938 Fri Sep 09 19:03:59 2011 VASE File c:\windows\desktop\9-9-11\mag-meas\dyn-tes1.dat p--pol-hor
\r
2939 Fri Sep 09 19:04:33 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
2940 Fri Sep 09 19:07:26 2011 VASE File c:\windows\desktop\9-9-11\mag-meas\dyn-tes1.dat p--pol-hor
\r
2941 Fri Sep 09 19:07:44 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
2942 Fri Sep 09 19:10:00 2011 VASE File c:\windows\desktop\9-9-11\mag-meas\dyn-tes1.dat p--pol-hor
\r
2943 Fri Sep 09 19:13:59 2011
\r
2944 Fri Sep 09 19:13:59 2011 Calib: rvs=30, pts=60, span=60.0, aoi=65.000, t=1, d=3
\r
2945 Fri Sep 09 19:25:06 2011 Calib: Wvl1=5000.0 Ps=2.0812±0.0073 Attn=1.0170±0.0004 As=50.243±0.013 Psi=20.206±0.010 Del=173.723±0.103 <I>=7.373, MSE=2.8 (1.54) Synch=-29.625±0.053 [-29.761,-29.510] M1=0.014±0.0047 [0.0035,0.02]
\r
2946 Fri Sep 09 19:25:06 2011 Calib: Wvl2=11770.0 Ps=2.0812±0.0073 IrAttn=0.9740±0.0006 IrAs=48.111±0.018 IrPsi=15.334±0.006 IrDel=177.259±0.846 <I>=8.762 MSE=2.8 (1.54) Synch=-32.735±0.023 [-32.796,-32.684] M1=0.025±0.0071 [0.011,0.035]
\r
2947 Fri Sep 09 19:25:06 2011 Calib: MSE=2.802 (1.539) AzOffset=-0.040±0.005912 ElOffset=0.070±0.007757 DP=0.001±0.050
\r
2948 Fri Sep 09 19:52:33 2011 VASE File c:\windows\desktop\9-9-11\mag-meas\dyn-tes1.dat p--pol-hor
\r
2949 Fri Sep 09 19:53:04 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
2950 Fri Sep 09 19:55:41 2011 VASE File c:\windows\desktop\9-9-11\mag-meas\dyn-tes1.dat p--pol-hor
\r
2951 Fri Sep 09 19:56:20 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
2952 Fri Sep 09 20:01:32 2011 VASE File c:\windows\desktop\9-9-11\mag-meas\dyn-tes1.dat p--pol-hor
\r
2953 Fri Sep 09 20:02:16 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
2954 Fri Sep 09 20:05:52 2011 VASE File c:\windows\desktop\9-9-11\mag-meas\dyn-tes1.dat p--pol-hor
\r
2955 Fri Sep 09 20:06:18 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
2956 Fri Sep 09 20:12:04 2011 VASE File c:\windows\desktop\9-9-11\mag-meas\dyn-tes1.dat p--pol-hor
\r
2957 Fri Sep 09 20:12:35 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
2958 Fri Sep 09 20:14:51 2011 VASE File c:\windows\desktop\9-9-11\mag-meas\dyn-tes1.dat p--pol-hor
\r
2959 Fri Sep 09 20:16:31 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
2960 Fri Sep 09 20:18:01 2011 VASE File c:\windows\desktop\9-9-11\mag-meas\dyn-tes1.dat test1
\r
2962 Mon Sep 12 12:11:12 2011 Init User: Nick (v3.698, 6.256 DLL)
\r
2964 Mon Sep 12 12:15:49 2011
\r
2965 Mon Sep 12 12:15:49 2011 Calib: rvs=30, pts=60, span=60.0, aoi=65.000, t=1, d=3
\r
2966 Mon Sep 12 12:26:54 2011 Calib: Wvl1=5000.0 Ps=2.0929±0.0031 Attn=1.0119±0.0002 As=107.524±0.006 Psi=20.202±0.004 Del=173.779±0.043 <I>=6.636, MSE=1.18 (0.65) Synch=-30.110±0.041 [-30.180,-30.028] M1=0.019±0.0065 [0.0063,0.027]
\r
2967 Mon Sep 12 12:26:55 2011 Calib: Wvl2=11770.0 Ps=2.0929±0.0031 IrAttn=0.9711±0.0002 IrAs=105.204±0.007 IrPsi=15.337±0.002 IrDel=177.735±0.434 <I>=7.666 MSE=1.18 (0.65) Synch=-32.772±0.099 [-32.897,-32.624] M1=0.027±0.0078 [0.012,0.037]
\r
2968 Mon Sep 12 12:26:55 2011 Calib: MSE=1.179 (0.650) AzOffset=-0.020±0.002479 ElOffset=0.063±0.003245 DP=-0.032±0.021
\r
2969 Mon Sep 12 12:37:58 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
2970 Mon Sep 12 12:42:25 2011 VASE File c:\windows\desktop\12-9-011.dat magmeas1
\r
2971 Mon Sep 12 12:43:52 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
2972 Mon Sep 12 12:46:20 2011 VASE File c:\windows\desktop\12-9-11\mag-meas\nife-film-test1.dat magmeas1
\r
2973 Mon Sep 12 12:46:42 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
2974 Mon Sep 12 12:47:54 2011 VASE File c:\windows\desktop\12-9-11\mag-meas\nife-film-test1.dat magmeas1
\r
2975 Mon Sep 12 12:48:45 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
2976 Mon Sep 12 12:50:03 2011 VASE File c:\windows\desktop\12-9-11\mag-meas\nife-film-test1.dat magmeas1
\r
2977 Mon Sep 12 12:51:47 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
2978 Mon Sep 12 12:53:43 2011 VASE File c:\windows\desktop\12-9-11\mag-meas\nife-film-test1.dat magmeas1
\r
2979 Mon Sep 12 12:54:10 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
2980 Mon Sep 12 12:58:18 2011 VASE File c:\windows\desktop\12-9-11\mag-meas\nife-film-test1.dat magmeas1
\r
2981 Mon Sep 12 13:16:39 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
2982 Mon Sep 12 13:24:18 2011 VASE File c:\windows\desktop\12-9-11\mag-meas\nife-film-test1.dat magmeas1
\r
2983 Mon Sep 12 13:25:04 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
2984 Mon Sep 12 13:27:30 2011 VASE File c:\windows\desktop\12-9-11\mag-meas\nife-film-test1.dat magmeas1
\r
2985 Mon Sep 12 15:12:05 2011 Dynamic VASE scan started, the starting time label is 107.01 min.
\r
2986 Mon Sep 12 15:14:47 2011 VASE File c:\windows\desktop\12-9-11\mag-meas\nife-film-test1.dat magmeas1
\r
2987 Mon Sep 12 15:15:00 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
2988 Mon Sep 12 15:30:20 2011 VASE File c:\windows\desktop\12-9-11\mag-meas\nife-film-test1.dat magmeas1
\r
2989 Mon Sep 12 15:30:35 2011 Dynamic VASE scan started, the starting time label is 15.58 min.
\r
2990 Mon Sep 12 15:33:19 2011 VASE File c:\windows\desktop\12-9-11\mag-meas\nife-film-test1.dat magmeas1
\r
2991 Mon Sep 12 15:39:44 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
2992 Mon Sep 12 15:47:07 2011 VASE File c:\windows\desktop\12-9-11\mag-meas\nife-film-test1.dat magmeas1
\r
2993 Mon Sep 12 15:57:50 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
2994 Mon Sep 12 16:42:54 2011 VASE File c:\windows\desktop\12-9-11\mag-meas\nife-film-meas1\nife-40mins.dat magmeas1
\r
2995 Mon Sep 12 18:00:12 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
2996 Mon Sep 12 18:10:27 2011 VASE File c:\windows\desktop\12-9-11\mag-meas\nife-film-test1.dat magmeas1
\r
2997 Mon Sep 12 18:26:26 2011 VASE File c:\windows\desktop\12-9-11\mag-meas\spectr\nife-film-test1.dat magmeas1
\r
2998 Mon Sep 12 18:45:08 2011 VASE File c:\windows\desktop\12-9-11\mag-meas\spectr\nife-film-test2(+1.3a).dat magmeas2
\r
2999 Mon Sep 12 18:50:49 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
3000 Mon Sep 12 18:54:44 2011 VASE File c:\windows\desktop\12-9-11\mag-meas\nife-film-test2-3700a.dat magmeas2
\r
3001 Mon Sep 12 18:57:37 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
3002 Mon Sep 12 19:03:24 2011 VASE File c:\windows\desktop\12-9-11\mag-meas\nife-film-test2-3700a.dat magmeas2
\r
3003 Mon Sep 12 19:03:47 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
3004 Mon Sep 12 19:05:57 2011 VASE File c:\windows\desktop\12-9-11\mag-meas\nife-film-test2-3900a.dat magmeas2
\r
3005 Mon Sep 12 19:06:26 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
3006 Mon Sep 12 19:12:50 2011 VASE File c:\windows\desktop\12-9-11\mag-meas\nife-film-test2-3900a.dat magmeas2
\r
3008 Tue Sep 13 13:16:56 2011 Init User: Nick (v3.698, 6.256 DLL)
\r
3010 Tue Sep 13 13:20:27 2011 Goniometer limit switch error. #1
\r
3011 Tue Sep 13 13:23:06 2011
\r
3012 Tue Sep 13 13:23:06 2011 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
3013 Tue Sep 13 13:25:18 2011 Insufficient intensity at too many points to perform calibration. 5000.0Å, det=0 (4, 3) (0.0041, 0.01)
\r
3014 Tue Sep 13 13:29:55 2011
\r
3015 Tue Sep 13 13:29:55 2011 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
3016 Tue Sep 13 13:41:05 2011 Calib: Wvl1=5000.0 Ps=2.1117±0.0027 Attn=1.0114±0.0001 As=93.295±0.004 Psi=4.882±0.007 Del=147.068±0.132 <I>=5.631, MSE=1.11 (2.32) Synch=-119.017±0.067 [-119.195,-118.812] M1=0.0069±0.0013 [0.0031,0.0093]
\r
3017 Tue Sep 13 13:41:05 2011 Calib: Wvl2=11770.0 Ps=2.1117±0.0027 IrAttn=0.9712±0.0002 IrAs=90.991±0.004 IrPsi=1.980±0.003 IrDel=27.595±0.174 <I>=6.307 MSE=1.11 (2.32) Synch=-121.413±0.106 [-121.618,-120.775] M1=0.022±0.0037 [0.0065,0.038]
\r
3018 Tue Sep 13 13:41:05 2011 Calib: MSE=1.109 (2.324) AzOffset=-0.039±0.006145 ElOffset=0.085±0.021251 DP=0.020±0.009
\r
3019 Tue Sep 13 13:58:34 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
3020 Tue Sep 13 14:04:37 2011 VASE File c:\windows\desktop\13-9-11\mag-meas\dynamic\nife-dyntest1.dat
\r
3021 Tue Sep 13 14:08:39 2011 VASE File c:\windows\desktop\13-9-11\mag-meas\spectr\40deg-e1-aron--1.76a.dat -1.76a
\r
3022 Tue Sep 13 14:23:14 2011 VASE File c:\windows\desktop\13-9-11\mag-meas\spectr\40deg-e1-aron--1.76a.dat -1.76a
\r
3023 Tue Sep 13 14:41:20 2011 VASE File c:\windows\desktop\13-9-11\mag-meas\spectr\40deg-e1-aron-+1.76a.dat +1.76a
\r
3024 Tue Sep 13 15:00:13 2011 VASE File c:\windows\desktop\13-9-11\mag-meas\spectr\40deg-e1-aron--1.76a_2.dat -1.76a
\r
3025 Tue Sep 13 15:17:59 2011 VASE File c:\windows\desktop\13-9-11\mag-meas\spectr\40deg-e1-aron-+1.76a_2.dat +1.76a
\r
3026 Tue Sep 13 15:21:42 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
3027 Tue Sep 13 15:25:05 2011 VASE File c:\windows\desktop\13-9-11\mag-meas\dynamic\nife-dyntest2-3200a.dat 3200a
\r
3028 Tue Sep 13 15:25:29 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
3029 Tue Sep 13 15:26:47 2011 VASE File c:\windows\desktop\13-9-11\mag-meas\dynamic\nife-dyntest1.dat
\r
3030 Tue Sep 13 15:27:10 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
3031 Tue Sep 13 15:32:43 2011 VASE File c:\windows\desktop\13-9-11\mag-meas\dynamic\nife-dyntest2-3200a.dat
\r
3032 Tue Sep 13 15:33:07 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
3033 Tue Sep 13 15:35:21 2011 VASE File c:\windows\desktop\13-9-11\mag-meas\dynamic\nife-dyntest2-3200a.dat
\r
3034 Tue Sep 13 15:50:31 2011 VASE File c:\windows\desktop\13-9-11\mag-meas\spectr\40deg-e1-aron--1.76a_3.dat
\r
3035 Tue Sep 13 16:09:21 2011 VASE File c:\windows\desktop\13-9-11\mag-meas\spectr\40deg-e1-aron-+1.76a_3.dat
\r
3036 Tue Sep 13 16:25:39 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
3037 Tue Sep 13 16:28:15 2011 VASE File c:\windows\desktop\13-9-11\mag-meas\dynamic\a1-6000a-perp.dat
\r
3038 Tue Sep 13 16:36:44 2011 VASE File c:\windows\desktop\13-9-11\mag-meas\a1-6000a-perp-test.dat
\r
3039 Tue Sep 13 16:40:40 2011 VASE File c:\windows\desktop\13-9-11\mag-meas\a1-6000a-perp-test.dat
\r
3040 Tue Sep 13 16:51:46 2011 VASE File c:\windows\desktop\13-9-11\mag-meas\a1-6000a-perp-test.dat
\r
3041 Tue Sep 13 17:00:28 2011
\r
3042 Tue Sep 13 17:00:28 2011 Calib: rvs=30, pts=60, span=60.0, aoi=40.000, t=1, d=3
\r
3043 Tue Sep 13 17:11:38 2011 Calib: Wvl1=5000.0 Ps=2.0927±0.0207 Attn=1.0157±0.0002 As=93.018±0.024 Psi=37.768±0.004 Del=177.762±0.025 <I>=10.154, MSE=1.02 (0.552) Synch=-118.761±0.015 [-118.793,-118.728] M1=0.011±0.0035 [0.006,0.018]
\r
3044 Tue Sep 13 17:11:39 2011 Calib: Wvl2=11770.0 Ps=2.0927±0.0207 IrAttn=0.9752±0.0002 IrAs=90.895±0.027 IrPsi=36.141±0.007 IrDel=180.003±512.209 <I>=17.808 MSE=1.02 (0.552) Synch=-121.483±0.013 [-121.507,-121.452] M1=0.015±0.0032 [0.011,0.021]
\r
3045 Tue Sep 13 17:11:39 2011 Calib: MSE=1.019 (0.552) AzOffset=-0.032±0.001528 ElOffset=0.074±0.001669 DP=-0.085±0.038
\r
3046 Tue Sep 13 17:20:24 2011 VASE File c:\windows\desktop\13-9-11\mag-meas\a1-6000a-perp-test.dat
\r
3047 Tue Sep 13 17:38:44 2011 VASE File c:\windows\desktop\13-9-11\mag-meas\a1-6000a-perp-test.dat
\r
3048 Tue Sep 13 17:57:40 2011 VASE File c:\windows\desktop\13-9-11\mag-meas\spectr\1a\40deg-ea-aron-+1.76a.dat
\r
3049 Tue Sep 13 18:16:29 2011 VASE File c:\windows\desktop\13-9-11\mag-meas\spectr\1a\40deg-ea-aron-+1.76a.dat
\r
3050 Tue Sep 13 18:36:00 2011 VASE File c:\windows\desktop\13-9-11\mag-meas\spectr\1a\40deg-ea-aron--1.76a-2.dat
\r
3051 Tue Sep 13 18:54:26 2011 VASE File c:\windows\desktop\13-9-11\mag-meas\spectr\1a\40deg-ea-aron-+1.762.dat
\r
3052 Tue Sep 13 19:09:51 2011 VASE File c:\windows\desktop\13-9-11\mag-meas\spectr\1a\40deg-ea-aron--plasm-test1.dat
\r
3053 Tue Sep 13 19:15:28 2011 VASE File c:\windows\desktop\13-9-11\mag-meas\spectr\1a\40deg-ea-aron--plasm-test1.dat
\r
3055 Wed Sep 14 11:29:27 2011 Init User: Nick (v3.698, 6.256 DLL)
\r
3057 Wed Sep 14 11:37:42 2011
\r
3058 Wed Sep 14 11:37:42 2011 Calib: rvs=5, pts=100, span=180.0, aoi=40.000, t=0, d=3
\r
3059 Wed Sep 14 11:42:11 2011 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
3060 Wed Sep 14 11:42:14 2011 Coarse Calib: Wvl1=5000.0 Ps=2.0821±0.0256 Attn=1.0121±0.0002 As=25.216±0.026 Psi=37.634±0.006 Del=175.945±0.047 <I>=10.399, MSE=1.46 (1.04)
\r
3061 Wed Sep 14 11:42:14 2011 Coarse Calib: MSE=1.460 (1.044) AzOffset=-0.025±0.002787 ElOffset=0.059±0.003273
\r
3062 Wed Sep 14 11:45:52 2011
\r
3063 Wed Sep 14 11:45:52 2011 Calib: rvs=30, pts=60, span=60.0, aoi=40.000, t=1, d=3
\r
3064 Wed Sep 14 11:55:09 2011 Calib: Diagnose bd:195, 53, 21, 9, 11, 3, 7, 5, 0, 0, pxy41=7.8,13.78,0.00,0.00 (245, 31, 15, 11, 2, 0, 0, 0, 0, 0)
\r
3065 Wed Sep 14 11:55:09 2011 The error bar on the Calibration Parameter Ps is too large (check the Log File for details). Repeat the Coarse and Fine Calibration procedures on a thin SiO2/Si standard sample.
\r
3066 Wed Sep 14 11:56:55 2011 Calib: Wvl1=5000.0 Ps=2.0724±0.0422 Attn=1.0124±0.0003 As=25.105±0.049 Psi=37.648±0.008 Del=175.751±0.051 <I>=8.962, MSE=2.1 (1.14) Synch=-102.077±0.151 [-102.198,-101.687] M1=0.011±0.0041 [0.0045,0.017]
\r
3067 Wed Sep 14 11:56:55 2011 Calib: Wvl2=11770.0 Ps=2.0724±0.0422 IrAttn=0.9720±0.0004 IrAs=22.838±0.054 IrPsi=36.141±0.014 IrDel=177.888±1.045 <I>=18.538 MSE=2.1 (1.14) Synch=-104.885±0.030 [-104.932,-104.831] M1=0.0048±0.0007 [0.0036,0.0059]
\r
3068 Wed Sep 14 11:56:55 2011 Calib: MSE=2.102 (1.140) AzOffset=-0.004±0.003032 ElOffset=-0.006±0.003587 DP=0.000±0.080
\r
3069 Wed Sep 14 12:02:55 2011
\r
3070 Wed Sep 14 12:02:55 2011 Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=3
\r
3071 Wed Sep 14 12:07:26 2011 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
3072 Wed Sep 14 12:07:28 2011 Coarse Calib: Wvl1=5000.0 Ps=2.1063±0.0087 Attn=1.0135±0.0002 As=25.064±0.004 Psi=4.896±0.011 Del=147.158±0.190 <I>=12.495, MSE=1.22 (1.82)
\r
3073 Wed Sep 14 12:07:29 2011 Coarse Calib: MSE=1.225 (1.822) AzOffset=-0.009±0.009228 ElOffset=-0.014±0.034358
\r
3074 Wed Sep 14 12:07:49 2011
\r
3075 Wed Sep 14 12:07:49 2011 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
3076 Wed Sep 14 12:17:13 2011 Calib: Wvl1=5000.0 Ps=2.1094±0.0028 Attn=1.0137±0.0002 As=25.043±0.004 Psi=4.898±0.008 Del=147.153±0.140 <I>=5.887, MSE=1.19 (3.27) Synch=-101.997±0.043 [-102.066,-101.845] M1=0.01±0.0024 [0.0041,0.014]
\r
3077 Wed Sep 14 12:17:13 2011 Calib: Wvl2=11770.0 Ps=2.1094±0.0028 IrAttn=0.9734±0.0002 IrAs=22.861±0.005 IrPsi=1.967±0.003 IrDel=27.257±0.193 <I>=6.197 MSE=1.19 (3.27) Synch=-104.754±0.071 [-105.015,-104.530] M1=0.013±0.0044 [0.0028,0.031]
\r
3078 Wed Sep 14 12:17:13 2011 Calib: MSE=1.187 (3.275) AzOffset=0.001±0.006778 ElOffset=0.020±0.025330 DP=0.017±0.010
\r
3079 Wed Sep 14 12:41:58 2011 VASE File c:\windows\desktop\14-9-11\crap\s1-spectr.dat
\r
3080 Wed Sep 14 13:24:33 2011 RT File c:\windows\desktop\14-9-11\crap\s1-p-pol.-base.dat
\r
3081 Wed Sep 14 13:38:21 2011 RT File c:\windows\desktop\14-9-11\crap\s1-pol.dat
\r
3082 Wed Sep 14 14:15:26 2011 RT File c:\windows\desktop\14-9-11\crap\s1-p-pol.dat
\r
3083 Wed Sep 14 14:23:27 2011 RT File c:\windows\desktop\14-9-11\crap\s1-s-pol-base.dat
\r
3084 Wed Sep 14 14:51:21 2011 RT File c:\windows\desktop\14-9-11\crap\s1-s-pol.dat
\r
3085 Wed Sep 14 15:19:44 2011 VASE File c:\windows\desktop\14-9-11\crap\s2-spectr.dat
\r
3086 Wed Sep 14 16:41:08 2011 RT File c:\windows\desktop\14-9-11\crap\s2-refl-s-pol.dat
\r
3087 Wed Sep 14 16:52:02 2011 RT File c:\windows\desktop\14-9-11\crap\s2-refl-p-pol-base.dat
\r
3088 Wed Sep 14 17:34:28 2011 RT File c:\windows\desktop\14-9-11\crap\s2-refl-p-pol.dat
\r
3090 Thu Sep 15 12:35:32 2011 Init User: Nick (v3.698, 6.256 DLL)
\r
3092 Thu Sep 15 12:39:41 2011
\r
3093 Thu Sep 15 12:39:41 2011 Calib: rvs=30, pts=60, span=60.0, aoi=65.000, t=1, d=3
\r
3094 Thu Sep 15 12:50:47 2011 Calib: Wvl1=5000.0 Ps=2.1299±0.0032 Attn=1.0121±0.0002 As=59.364±0.006 Psi=20.195±0.004 Del=173.665±0.044 <I>=6.393, MSE=1.22 (0.671) Synch=41.952±0.080 [41.823,42.143] M1=0.0091±0.0025 [0.0043,0.014]
\r
3095 Thu Sep 15 12:50:47 2011 Calib: Wvl2=11770.0 Ps=2.1299±0.0032 IrAttn=0.9742±0.0003 IrAs=57.134±0.008 IrPsi=15.337±0.002 IrDel=177.180±0.360 <I>=8.095 MSE=1.22 (0.671) Synch=39.358±0.074 [39.229,39.553] M1=0.016±0.0079 [0.0058,0.027]
\r
3096 Thu Sep 15 12:50:47 2011 Calib: MSE=1.220 (0.671) AzOffset=0.002±0.002562 ElOffset=0.002±0.003368 DP=-0.019±0.022
\r
3097 Thu Sep 15 12:55:17 2011
\r
3098 Thu Sep 15 12:55:17 2011 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
3099 Thu Sep 15 13:06:26 2011 Calib: Wvl1=5000.0 Ps=2.1215±0.0031 Attn=1.0131±0.0002 As=59.218±0.004 Psi=4.897±0.008 Del=147.013±0.146 <I>=5.315, MSE=1.24 (3.4) Synch=41.993±0.045 [41.902,42.136] M1=0.0089±0.0021 [0.0014,0.012]
\r
3100 Thu Sep 15 13:06:26 2011 Calib: Wvl2=11770.0 Ps=2.1215±0.0031 IrAttn=0.9750±0.0002 IrAs=57.072±0.005 IrPsi=1.976±0.004 IrDel=27.765±0.208 <I>=5.690 MSE=1.24 (3.4) Synch=39.363±0.139 [38.952,40.221] M1=0.017±0.004 [0.0042,0.031]
\r
3101 Thu Sep 15 13:06:26 2011 Calib: MSE=1.237 (3.404) AzOffset=-0.011±0.007043 ElOffset=0.028±0.026106 DP=0.017±0.010
\r
3102 Thu Sep 15 13:30:20 2011 VASE File c:\windows\desktop\15-9-11\crap\spectr-s3.dat
\r
3103 Thu Sep 15 14:08:29 2011 RT File c:\windows\desktop\15-9-11\crap\s3-p-pol-base.dat
\r
3104 Thu Sep 15 14:51:19 2011 RT File c:\windows\desktop\15-9-11\crap\s3-p-pol.dat
\r
3105 Thu Sep 15 15:03:31 2011 RT File c:\windows\desktop\15-9-11\crap\s3-s-pol-base.dat
\r
3106 Thu Sep 15 15:47:44 2011 RT File c:\windows\desktop\15-9-11\crap\s3-s-pol.dat
\r
3107 Thu Sep 15 16:32:12 2011 RT File c:\windows\desktop\15-9-11\crap\s4-s-pol.dat
\r
3108 Thu Sep 15 16:52:54 2011 VASE File c:\windows\desktop\15-9-11\crap\s4-spectr.dat
\r
3109 Thu Sep 15 17:12:30 2011 RT File c:\windows\desktop\15-9-11\crap\s4-p-pol-base.dat
\r
3110 Thu Sep 15 17:58:09 2011 RT File c:\windows\desktop\15-9-11\crap\s4-p-pol.dat
\r
3112 Fri Sep 16 11:37:00 2011 Init User: Nick (v3.698, 6.256 DLL)
\r
3114 Fri Sep 16 11:37:10 2011
\r
3115 Fri Sep 16 11:37:10 2011 Calib: rvs=30, pts=60, span=60.0, aoi=65.000, t=1, d=3
\r
3117 Fri Sep 16 11:46:35 2011 Init User: Nick (v3.698, 6.256 DLL)
\r
3119 Fri Sep 16 11:48:47 2011
\r
3120 Fri Sep 16 11:48:47 2011 Calib: rvs=30, pts=60, span=60.0, aoi=65.000, t=1, d=3
\r
3121 Fri Sep 16 11:59:53 2011 Calib: Wvl1=5000.0 Ps=2.1471±0.0031 Attn=1.0110±0.0002 As=1.275±0.006 Psi=20.190±0.004 Del=173.667±0.043 <I>=5.490, MSE=1.18 (0.656) Synch=-18.189±0.023 [-18.241,-18.123] M1=0.0055±0.00064 [0.0036,0.0066]
\r
3122 Fri Sep 16 11:59:53 2011 Calib: Wvl2=11770.0 Ps=2.1471±0.0031 IrAttn=0.9735±0.0002 IrAs=178.996±0.008 IrPsi=15.320±0.002 IrDel=177.129±0.344 <I>=7.789 MSE=1.18 (0.656) Synch=-20.596±0.072 [-20.681,-20.477] M1=0.018±0.0074 [0.0077,0.027]
\r
3123 Fri Sep 16 11:59:53 2011 Calib: MSE=1.183 (0.656) AzOffset=-0.017±0.002484 ElOffset=-0.002±0.003266 DP=0.036±0.021
\r
3124 Fri Sep 16 12:12:44 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
3125 Fri Sep 16 12:19:08 2011 VASE File c:\windows\desktop\16-9-11\crap\mag-s3-test1.dat
\r
3126 Fri Sep 16 12:19:49 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
3127 Fri Sep 16 12:24:46 2011 VASE File c:\windows\desktop\16-9-11\crap\mag-s3-test1.dat
\r
3128 Fri Sep 16 12:40:45 2011 VASE File c:\windows\desktop\16-9-11\crap\mag-s3-test1-spectral.dat
\r
3129 Fri Sep 16 12:59:34 2011 VASE File c:\windows\desktop\16-9-11\crap\mag-s3-test2-spectral(-1.5a).dat
\r
3130 Fri Sep 16 13:01:57 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
3131 Fri Sep 16 13:07:25 2011 VASE File c:\windows\desktop\16-9-11\crap\mag-s3-test1.dat
\r
3132 Fri Sep 16 13:10:50 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
3133 Fri Sep 16 13:14:39 2011 VASE File c:\windows\desktop\16-9-11\crap\mag-s3-test1.dat
\r
3134 Fri Sep 16 13:17:39 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
3135 Fri Sep 16 13:21:27 2011 VASE File c:\windows\desktop\16-9-11\crap\mag-s3-test1.dat
\r
3136 Fri Sep 16 13:21:40 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
3137 Fri Sep 16 13:24:13 2011 VASE File c:\windows\desktop\16-9-11\crap\mag-s3-test1.dat
\r
3138 Fri Sep 16 13:35:08 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
3139 Fri Sep 16 13:40:27 2011 VASE File c:\windows\desktop\16-9-11\crap\mag-s3-test1.dat
\r
3140 Fri Sep 16 13:41:18 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
3141 Fri Sep 16 13:43:26 2011 VASE File c:\windows\desktop\16-9-11\crap\mag-s3-test1.dat
\r
3142 Fri Sep 16 13:43:44 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
3143 Fri Sep 16 13:44:33 2011 VASE File c:\windows\desktop\16-9-11\crap\mag-s3-test1.dat
\r
3144 Fri Sep 16 13:44:53 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
3145 Fri Sep 16 13:46:48 2011 VASE File c:\windows\desktop\16-9-11\crap\mag-s3-test1.dat
\r
3146 Fri Sep 16 13:47:38 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
3147 Fri Sep 16 13:49:38 2011 VASE File c:\windows\desktop\16-9-11\crap\mag-s3-test1.dat
\r
3148 Fri Sep 16 14:03:19 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
3149 Fri Sep 16 14:06:27 2011 VASE File c:\windows\desktop\16-9-11\crap\mag-s3-hyster-down-full.dat
\r
3150 Fri Sep 16 14:07:08 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
3151 Fri Sep 16 14:21:37 2011 VASE File c:\windows\desktop\16-9-11\crap\mag-s3-hyster-down-full.dat
\r
3152 Fri Sep 16 14:22:18 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
3153 Fri Sep 16 14:22:39 2011 VASE File c:\windows\desktop\16-9-11\crap\mag-s3-hyster-down-full.dat
\r
3154 Fri Sep 16 14:25:08 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
3155 Fri Sep 16 14:32:28 2011 VASE File c:\windows\desktop\16-9-11\crap\mag-s3-hyster-down-full.dat
\r
3156 Fri Sep 16 14:38:55 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
3157 Fri Sep 16 14:45:25 2011 VASE File c:\windows\desktop\16-9-11\crap\mag-s3-hyster-down-full.dat
\r
3158 Fri Sep 16 14:48:05 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
3159 Fri Sep 16 14:54:50 2011 VASE File c:\windows\desktop\16-9-11\crap\mag-s3-hyster-down-full.dat
\r
3160 Fri Sep 16 14:57:19 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
3161 Fri Sep 16 15:06:57 2011 VASE File c:\windows\desktop\16-9-11\crap\mag-s3-hyster-down-full.dat
\r
3162 Fri Sep 16 15:07:50 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
3163 Fri Sep 16 15:13:41 2011 VASE File c:\windows\desktop\16-9-11\crap\mag-s3-hyster-down-full-test-man.dat
\r
3164 Fri Sep 16 15:17:11 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
3165 Fri Sep 16 15:20:49 2011 VASE File c:\windows\desktop\16-9-11\crap\mag-s3-hyster-down-full-2.dat
\r
3166 Fri Sep 16 15:21:56 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
3167 Fri Sep 16 15:25:59 2011 VASE File c:\windows\desktop\16-9-11\crap\mag-s3-hyster-down-full-2.dat
\r
3168 Fri Sep 16 15:28:43 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
3169 Fri Sep 16 15:35:39 2011 VASE File c:\windows\desktop\16-9-11\crap\mag-s3-hyster-down-full-2.dat .
\r
3170 Fri Sep 16 16:47:53 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
3171 Fri Sep 16 16:52:53 2011 VASE File c:\windows\desktop\16-9-11\crap\mag-s3-hyster-up-full.dat
\r
3172 Fri Sep 16 16:55:35 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
3173 Fri Sep 16 17:01:43 2011 VASE File c:\windows\desktop\16-9-11\crap\mag-s3-hyster-up-full.dat
\r
3174 Fri Sep 16 17:03:26 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
3175 Fri Sep 16 17:14:20 2011 VASE File c:\windows\desktop\16-9-11\crap\mag-s3-hyster-up-full.dat
\r
3176 Fri Sep 16 17:17:06 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
3177 Fri Sep 16 17:18:24 2011 VASE File c:\windows\desktop\16-9-11\crap\mag-e1-hyster-ds-full.dat
\r
3178 Fri Sep 16 17:19:16 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
3179 Fri Sep 16 17:19:53 2011 VASE File c:\windows\desktop\16-9-11\crap\mag-e1-hyster-ds-full.dat
\r
3180 Fri Sep 16 17:29:27 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
3181 Fri Sep 16 17:45:11 2011 VASE File c:\windows\desktop\16-9-11\crap\mag-e1-hyster-ds-full.dat
\r
3182 Fri Sep 16 17:46:32 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
3183 Fri Sep 16 17:46:43 2011 VASE File c:\windows\desktop\16-9-11\crap\mag-e1-hyster-ds-full.dat
\r
3184 Fri Sep 16 17:48:01 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
3185 Fri Sep 16 18:04:15 2011 VASE File c:\windows\desktop\16-9-11\crap\mag-e1-hyster-ds-full.dat
\r
3187 Mon Sep 19 12:28:36 2011 Init User: Nick (v3.698, 6.256 DLL)
\r
3190 Mon Sep 19 12:36:04 2011 Init User: Nick (v3.698, 6.256 DLL)
\r
3192 Mon Sep 19 12:40:56 2011
\r
3193 Mon Sep 19 12:40:56 2011 Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=3
\r
3194 Mon Sep 19 12:45:26 2011 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
3195 Mon Sep 19 12:45:30 2011 Coarse Calib: Wvl1=5000.0 Ps=2.1632±0.0069 Attn=1.0124±0.0001 As=101.167±0.003 Psi=4.889±0.008 Del=147.454±0.145 <I>=11.626, MSE=0.931 (1.57)
\r
3196 Mon Sep 19 12:45:30 2011 Coarse Calib: MSE=0.931 (1.568) AzOffset=0.004±0.007041 ElOffset=-0.012±0.026229
\r
3197 Mon Sep 19 12:47:01 2011
\r
3198 Mon Sep 19 12:47:01 2011 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
3199 Mon Sep 19 12:56:23 2011 Calib: Wvl1=5000.0 Ps=2.1617±0.0061 Attn=1.0127±0.0003 As=101.129±0.009 Psi=4.895±0.016 Del=147.320±0.292 <I>=5.491, MSE=2.47 (4.35) Synch=97.063±0.161 [96.910,97.534] M1=0.0081±0.0012 [0.004,0.01]
\r
3200 Mon Sep 19 12:56:23 2011 Calib: Wvl2=11770.0 Ps=2.1617±0.0061 IrAttn=0.9761±0.0004 IrAs=98.969±0.010 IrPsi=1.952±0.007 IrDel=27.686±0.410 <I>=5.987 MSE=2.47 (4.35) Synch=94.514±0.079 [94.069,94.714] M1=0.023±0.0031 [0.014,0.04]
\r
3201 Mon Sep 19 12:56:23 2011 Calib: MSE=2.472 (4.351) AzOffset=-0.011±0.014026 ElOffset=0.042±0.052283 DP=0.016±0.020
\r
3202 Mon Sep 19 13:09:45 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
3203 Mon Sep 19 13:12:05 2011 VASE File c:\windows\desktop\19-9-11\crap\1e-mag-4500a.dat
\r
3204 Mon Sep 19 13:17:05 2011 Dynamic VASE scan started, the starting time label is 7.34 min.
\r
3205 Mon Sep 19 13:25:10 2011 VASE File c:\windows\desktop\19-9-11\crap\1e-mag-4500a.dat
\r
3206 Mon Sep 19 13:26:36 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
3207 Mon Sep 19 13:41:51 2011 VASE File c:\windows\desktop\19-9-11\crap\1e-mag-6250a.dat
\r
3208 Mon Sep 19 13:45:49 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
3209 Mon Sep 19 13:49:54 2011 VASE File c:\windows\desktop\19-9-11\crap\1e-mag-8000a.dat
\r
3210 Mon Sep 19 13:50:12 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
3211 Mon Sep 19 13:51:17 2011 VASE File c:\windows\desktop\19-9-11\crap\1e-mag-8000a.dat
\r
3212 Mon Sep 19 13:51:42 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
3213 Mon Sep 19 13:58:06 2011 VASE File c:\windows\desktop\19-9-11\crap\1e-mag-8000a.dat
\r
3214 Mon Sep 19 14:08:56 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
3215 Mon Sep 19 14:11:29 2011 VASE File c:\windows\desktop\19-9-11\crap\s3-mag-4500.dat
\r
3216 Mon Sep 19 14:12:08 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
3217 Mon Sep 19 14:23:08 2011 VASE File c:\windows\desktop\19-9-11\crap\s3-mag-4500.dat
\r
3218 Mon Sep 19 14:23:58 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
3219 Mon Sep 19 14:40:26 2011 VASE File c:\windows\desktop\19-9-11\crap\s3-mag-6250.dat
\r
3220 Mon Sep 19 17:01:19 2011 Dynamic VASE scan started, the starting time label is 157.36 min.
\r
3221 Mon Sep 19 17:06:04 2011 VASE File c:\windows\desktop\19-9-11\crap\1c-mag-4500.dat
\r
3222 Mon Sep 19 17:09:01 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
3223 Mon Sep 19 17:19:48 2011 VASE File c:\windows\desktop\19-9-11\crap\1c-mag-4500.dat
\r
3224 Mon Sep 19 17:20:49 2011 Dynamic VASE scan started, the starting time label is 11.80 min.
\r
3225 Mon Sep 19 17:32:42 2011 VASE File c:\windows\desktop\19-9-11\crap\1c-mag-6250.dat
\r
3226 Mon Sep 19 17:36:14 2011 VASE File c:\windows\desktop\19-9-11\crap\1c-mag-spectr-(-0.82a).dat
\r
3227 Mon Sep 19 17:40:00 2011 VASE File c:\windows\desktop\19-9-11\crap\1c-mag-spectr-(+0.82a).dat
\r
3228 Mon Sep 19 17:42:50 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
3229 Mon Sep 19 17:48:02 2011 VASE File c:\windows\desktop\19-9-11\crap\1c-mag-6500.dat
\r
3230 Mon Sep 19 17:48:44 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
3231 Mon Sep 19 17:50:58 2011 VASE File c:\windows\desktop\19-9-11\crap\1c-mag-4000.dat .
\r
3232 Mon Sep 19 17:51:30 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
3233 Mon Sep 19 17:54:46 2011 VASE File c:\windows\desktop\19-9-11\crap\1c-mag-8000.dat .
\r
3234 Mon Sep 19 17:57:32 2011 VASE File c:\windows\desktop\19-9-11\crap\1c-mag-5500-6000_+0.8a.dat .
\r
3235 Mon Sep 19 18:00:44 2011 VASE File c:\windows\desktop\19-9-11\crap\1c-mag-5500-6000_-0.82.dat .
\r
3236 Mon Sep 19 18:04:33 2011 VASE File c:\windows\desktop\19-9-11\crap\1c-mag-5500-6500_-0.dat .
\r
3237 Mon Sep 19 18:07:12 2011 VASE File c:\windows\desktop\19-9-11\crap\1c-mag-5500-6500_+0.8a.dat .
\r
3239 Tue Sep 20 11:46:42 2011 Init User: Nick (v3.698, 6.256 DLL)
\r
3241 Tue Sep 20 11:51:28 2011
\r
3242 Tue Sep 20 11:51:28 2011 Calib: rvs=30, pts=60, span=60.0, aoi=35.000, t=1, d=3
\r
3243 Tue Sep 20 12:02:34 2011 Calib: Diagnose bd:135, 30, 29, 21, 15, 14, 15, 20, 11, 14, pxy85=11.8,-42.89,0.00,-2.80 (163, 42, 34, 31, 22, 11, 1, 0, 0, 0)
\r
3244 Tue Sep 20 12:02:34 2011 The error bar on the Calibration Parameter Ps is too large (check the Log File for details). Repeat the Coarse and Fine Calibration procedures on a thin SiO2/Si standard sample.
\r
3245 Tue Sep 20 12:03:54 2011 Calib: Wvl1=5000.0 Ps=2.2500±0.1176 Attn=1.0110±0.0006 As=169.456±0.133 Psi=39.614±0.017 Del=179.037±0.101 <I>=8.974, MSE=4.18 (2.27) Synch=25.034±0.074 [24.726,25.160] M1=0.0096±0.0039 [0.003,0.016]
\r
3246 Tue Sep 20 12:03:54 2011 Calib: Wvl2=11770.0 Ps=2.2500±0.1176 IrAttn=0.9727±0.0007 IrAs=167.154±0.142 IrPsi=38.442±0.031 IrDel=178.791±3.899 <I>=19.382 MSE=4.18 (2.27) Synch=22.346±0.026 [22.308,22.393] M1=0.013±0.0051 [0.0077,0.023]
\r
3247 Tue Sep 20 12:03:54 2011 Calib: MSE=4.179 (2.267) AzOffset=0.006±0.006293 ElOffset=0.017±0.006533 DP=-0.224±0.163
\r
3248 Tue Sep 20 12:09:17 2011
\r
3249 Tue Sep 20 12:09:17 2011 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
3250 Tue Sep 20 12:20:27 2011 Calib: Wvl1=5000.0 Ps=2.1631±0.0066 Attn=1.0120±0.0004 As=169.374±0.009 Psi=4.874±0.017 Del=147.190±0.310 <I>=5.239, MSE=2.62 (3.79) Synch=25.067±0.117 [24.912,25.321] M1=0.011±0.0028 [0.0015,0.015]
\r
3251 Tue Sep 20 12:20:28 2011 Calib: Wvl2=11770.0 Ps=2.1631±0.0066 IrAttn=0.9739±0.0004 IrAs=167.123±0.011 IrPsi=1.975±0.008 IrDel=27.202±0.457 <I>=5.667 MSE=2.62 (3.79) Synch=22.576±0.217 [22.050,23.054] M1=0.02±0.0024 [0.0054,0.022]
\r
3252 Tue Sep 20 12:20:28 2011 Calib: MSE=2.616 (3.794) AzOffset=-0.008±0.014969 ElOffset=0.028±0.055791 DP=0.019±0.021
\r
3253 Tue Sep 20 12:50:26 2011 VASE File c:\windows\desktop\20-9-11\crap\s5_ni_ag_spectr_short.dat
\r
3254 Tue Sep 20 13:11:09 2011 VASE File c:\windows\desktop\20-9-11\crap\s5_ni_ag_spectr_short.dat
\r
3255 Tue Sep 20 14:38:39 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
3256 Tue Sep 20 14:40:25 2011 VASE File c:\windows\desktop\20-9-11\crap\s5_mag-dyn-test1.dat
\r
3257 Tue Sep 20 19:55:10 2011 Initializing Error: Could not establish communication with the DK monochromator.
\r
3258 Tue Sep 20 19:56:45 2011 Initializing Error: MonoInitWait() DK
\r
3259 Tue Sep 20 19:56:47 2011 SendMonoCmd Error: Monochromator Command Return Failed 31. DK
\r
3260 Tue Sep 20 19:57:23 2011 GetMonoStatus Error: Mono Return Failed 27. rtn=1. DK
\r
3261 Tue Sep 20 19:57:23 2011 d=01 cmd=255 00 00 00 00 00 00 00 00 00 00
\r
3262 Tue Sep 20 19:57:23 2011 MonoCheck Error: Monochromator Communication Failed. DK
\r
3263 Tue Sep 20 19:57:23 2011 Could Not Adjust Slit Width. DK
\r
3265 Tue Sep 20 19:59:20 2011 Init User: Nick (v3.698, 6.256 DLL)
\r
3268 Wed Sep 21 12:18:24 2011 Init User: Nick (v3.698, 6.256 DLL)
\r
3270 Wed Sep 21 12:22:36 2011
\r
3271 Wed Sep 21 12:22:36 2011 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
3272 Wed Sep 21 12:33:44 2011 Calib: Wvl1=5000.0 Ps=2.2085±0.0042 Attn=1.0119±0.0002 As=17.501±0.005 Psi=4.893±0.010 Del=146.744±0.178 <I>=4.609, MSE=1.52 (3.61) Synch=95.643±0.071 [95.549,95.867] M1=0.016±0.0031 [0.0035,0.02]
\r
3273 Wed Sep 21 12:33:44 2011 Calib: Wvl2=11770.0 Ps=2.2085±0.0042 IrAttn=0.9728±0.0003 IrAs=15.209±0.006 IrPsi=1.990±0.005 IrDel=28.617±0.269 <I>=4.941 MSE=1.52 (3.61) Synch=93.158±0.107 [92.637,93.465] M1=0.03±0.0039 [0.0053,0.036]
\r
3274 Wed Sep 21 12:33:44 2011 Calib: MSE=1.517 (3.614) AzOffset=0.008±0.008663 ElOffset=0.003±0.032165 DP=0.022±0.013
\r
3276 Wed Sep 21 13:34:40 2011 Init User: Nick (v3.698, 6.256 DLL)
\r
3278 Wed Sep 21 13:37:51 2011
\r
3279 Wed Sep 21 13:37:51 2011 Calib: rvs=30, pts=60, span=60.0, aoi=35.000, t=1, d=3
\r
3281 Wed Sep 21 13:54:19 2011 Init User: Nick (v3.698, 6.256 DLL)
\r
3283 Wed Sep 21 13:56:18 2011
\r
3284 Wed Sep 21 13:56:18 2011 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
3285 Wed Sep 21 14:07:27 2011 Calib: Wvl1=5000.0 Ps=2.2179±0.0039 Attn=1.0141±0.0002 As=116.828±0.005 Psi=4.905±0.010 Del=146.838±0.176 <I>=4.943, MSE=1.49 (4.39) Synch=115.097±0.053 [115.005,115.238] M1=0.01±0.0017 [0.0013,0.014]
\r
3286 Wed Sep 21 14:07:28 2011 Calib: Wvl2=11770.0 Ps=2.2179±0.0039 IrAttn=0.9742±0.0002 IrAs=114.610±0.006 IrPsi=1.976±0.005 IrDel=28.115±0.258 <I>=5.354 MSE=1.49 (4.39) Synch=112.195±0.085 [111.884,112.310] M1=0.019±0.0033 [0.0043,0.03]
\r
3287 Wed Sep 21 14:07:28 2011 Calib: MSE=1.493 (4.388) AzOffset=-0.011±0.008462 ElOffset=0.038±0.031495 DP=0.018±0.012
\r
3288 Wed Sep 21 14:24:27 2011 Warning possible overload loop detected (#1)
\r
3289 Wed Sep 21 14:24:29 2011 Warning possible overload loop detected (#1)
\r
3291 Wed Sep 21 18:04:12 2011 Init User: Nick (v3.698, 6.256 DLL)
\r
3293 Wed Sep 21 18:11:17 2011
\r
3294 Wed Sep 21 18:11:17 2011 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
3295 Wed Sep 21 18:22:28 2011 Calib: Wvl1=5000.0 Ps=2.2035±0.0039 Attn=1.0195±0.0002 As=153.671±0.006 Psi=4.905±0.010 Del=147.379±0.187 <I>=5.344, MSE=1.57 (4.36) Synch=-164.956±0.065 [-165.102,-164.746] M1=0.012±0.002 [0.0039,0.017]
\r
3296 Wed Sep 21 18:22:28 2011 Calib: Wvl2=11770.0 Ps=2.2035±0.0039 IrAttn=0.9799±0.0003 IrAs=151.732±0.006 IrPsi=1.947±0.005 IrDel=27.160±0.276 <I>=5.731 MSE=1.57 (4.36) Synch=-167.883±0.188 [-168.032,-167.158] M1=0.024±0.0038 [0.012,0.045]
\r
3297 Wed Sep 21 18:22:29 2011 Calib: MSE=1.570 (4.358) AzOffset=-0.012±0.008907 ElOffset=0.053±0.033316 DP=0.014±0.013
\r
3298 Wed Sep 21 18:41:06 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
3299 Thu Sep 22 12:10:10 2011 Initializing Error: Could not establish communication with the DK monochromator.
\r
3300 Thu Sep 22 12:10:22 2011 Initializing Error: MonoInitWait() DK
\r
3301 Thu Sep 22 12:10:24 2011 SendMonoCmd Error: Monochromator Command Return Failed 31. DK
\r
3302 Thu Sep 22 12:10:59 2011 GetMonoStatus Error: Mono Return Failed 27. rtn=1. DK
\r
3303 Thu Sep 22 12:10:59 2011 d=01 cmd=255 00 00 00 00 00 00 00 00 00 00
\r
3304 Thu Sep 22 12:10:59 2011 MonoCheck Error: Monochromator Communication Failed. DK
\r
3305 Thu Sep 22 12:10:59 2011 Could Not Adjust Slit Width. DK
\r
3306 Thu Sep 22 12:14:30 2011 Initializing Error: User Canceled Initialization.
\r
3307 Thu Sep 22 12:14:38 2011 Initializing Error: MonoInitWait() DK
\r
3308 Thu Sep 22 12:14:40 2011 SendMonoCmd Error: Monochromator Command Return Failed 31. DK
\r
3309 Thu Sep 22 12:15:17 2011 GetMonoStatus Error: Mono Return Failed 27. rtn=1. DK
\r
3310 Thu Sep 22 12:15:17 2011 d=01 cmd=255 00 00 00 00 00 00 00 00 00 00
\r
3311 Thu Sep 22 12:15:17 2011 MonoCheck Error: Monochromator Communication Failed. DK
\r
3312 Thu Sep 22 12:15:17 2011 Could Not Adjust Slit Width. DK
\r
3314 Thu Sep 22 12:19:06 2011 Init User: Nick (v3.698, 6.256 DLL)
\r
3316 Thu Sep 22 12:23:00 2011
\r
3317 Thu Sep 22 12:23:00 2011 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
3318 Thu Sep 22 12:34:10 2011 Calib: Wvl1=5000.0 Ps=2.2182±0.0036 Attn=1.0111±0.0002 As=25.910±0.005 Psi=4.877±0.009 Del=147.044±0.161 <I>=4.876, MSE=1.37 (3.35) Synch=23.243±0.054 [23.141,23.520] M1=0.011±0.0032 [0.0015,0.015]
\r
3319 Thu Sep 22 12:34:10 2011 Calib: Wvl2=11770.0 Ps=2.2182±0.0036 IrAttn=0.9734±0.0002 IrAs=23.613±0.006 IrPsi=1.978±0.004 IrDel=27.174±0.247 <I>=5.300 MSE=1.37 (3.35) Synch=21.140±0.150 [20.870,21.858] M1=0.021±0.0029 [0.0073,0.027]
\r
3320 Thu Sep 22 12:34:10 2011 Calib: MSE=1.369 (3.349) AzOffset=0.010±0.007837 ElOffset=0.019±0.029049 DP=0.020±0.011
\r
3321 Thu Sep 22 12:40:47 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
3322 Thu Sep 22 12:43:10 2011 VASE File c:\windows\desktop\test1.dat
\r
3323 Thu Sep 22 12:45:54 2011 VASE File c:\windows\desktop\test1.dat
\r
3324 Thu Sep 22 12:46:13 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
3325 Thu Sep 22 12:47:28 2011 VASE File c:\windows\desktop\test1.dat
\r
3326 Thu Sep 22 16:07:35 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
3327 Thu Sep 22 18:16:58 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
3328 Fri Sep 23 11:11:16 2011 Initializing Error: User Canceled Initialization.
\r
3329 Fri Sep 23 11:11:17 2011 Initializing Error: MonoInitWait() DK
\r
3330 Fri Sep 23 11:11:19 2011 SendMonoCmd Error: Monochromator Command Return Failed 31. DK
\r
3331 Fri Sep 23 11:12:16 2011 GetMonoStatus Error: Mono Return Failed 27. rtn=1. DK
\r
3332 Fri Sep 23 11:12:16 2011 d=01 cmd=255 00 00 00 00 00 00 00 00 00 00
\r
3333 Fri Sep 23 11:12:16 2011 MonoCheck Error: Monochromator Communication Failed. DK
\r
3334 Fri Sep 23 11:12:16 2011 Could Not Adjust Slit Width. DK
\r
3335 Fri Sep 23 11:14:05 2011 Initializing Error: User Canceled Initialization.
\r
3336 Fri Sep 23 11:14:22 2011 Initializing Error: MonoInitWait() DK
\r
3337 Fri Sep 23 11:14:25 2011 SendMonoCmd Error: Monochromator Command Return Failed 31. DK
\r
3338 Fri Sep 23 11:15:00 2011 GetMonoStatus Error: Mono Return Failed 27. rtn=1. DK
\r
3339 Fri Sep 23 11:15:00 2011 d=01 cmd=255 00 00 00 00 00 00 00 00 00 00
\r
3340 Fri Sep 23 11:15:00 2011 MonoCheck Error: Monochromator Communication Failed. DK
\r
3341 Fri Sep 23 11:15:00 2011 Could Not Adjust Slit Width. DK
\r
3342 Fri Sep 23 11:18:00 2011 Initializing Error: User Canceled Initialization.
\r
3343 Fri Sep 23 11:18:01 2011 Initializing Error: MonoInitWait() DK
\r
3344 Fri Sep 23 11:18:03 2011 SendMonoCmd Error: Monochromator Command Return Failed 31. DK
\r
3345 Fri Sep 23 11:18:38 2011 GetMonoStatus Error: Mono Return Failed 27. rtn=1. DK
\r
3346 Fri Sep 23 11:18:38 2011 d=01 cmd=255 00 00 00 00 00 00 00 00 00 00
\r
3347 Fri Sep 23 11:18:38 2011 MonoCheck Error: Monochromator Communication Failed. DK
\r
3348 Fri Sep 23 11:18:38 2011 Could Not Adjust Slit Width. DK
\r
3349 Fri Sep 23 11:22:06 2011 Initializing Error: User Canceled Initialization.
\r
3350 Fri Sep 23 11:22:07 2011 Initializing Error: MonoInitWait() DK
\r
3351 Fri Sep 23 11:22:09 2011 SendMonoCmd Error: Monochromator Command Return Failed 31. DK
\r
3352 Fri Sep 23 11:22:33 2011 Slit Width Error: Could Not Change Width. DK
\r
3354 Fri Sep 23 11:26:36 2011 Init User: Nick (v3.698, 6.256 DLL)
\r
3356 Fri Sep 23 11:32:48 2011
\r
3357 Fri Sep 23 11:32:48 2011 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
3358 Fri Sep 23 11:43:59 2011 Calib: Wvl1=5000.0 Ps=2.2216±0.0052 Attn=1.0122±0.0003 As=77.209±0.007 Psi=4.865±0.012 Del=147.526±0.228 <I>=4.776, MSE=1.92 (4.2) Synch=21.456±0.072 [21.353,21.635] M1=0.013±0.003 [0.0021,0.017]
\r
3359 Fri Sep 23 11:43:59 2011 Calib: Wvl2=11770.0 Ps=2.2216±0.0052 IrAttn=0.9732±0.0003 IrAs=74.928±0.008 IrPsi=1.975±0.006 IrDel=27.535±0.359 <I>=4.994 MSE=1.92 (4.2) Synch=19.025±0.119 [18.592,19.642] M1=0.022±0.003 [0.011,0.031]
\r
3360 Fri Sep 23 11:43:59 2011 Calib: MSE=1.917 (4.204) AzOffset=0.018±0.011048 ElOffset=0.022±0.040400 DP=0.040±0.016
\r
3362 Fri Sep 23 12:32:40 2011 Init User: Nick (v3.698, 6.256 DLL)
\r
3364 Fri Sep 23 12:32:52 2011 Goniometer limit switch error. #1
\r
3365 Fri Sep 23 12:33:36 2011 Current Goniometer setting is outside safe range. Cannot move stages. #1A
\r
3366 Fri Sep 23 12:34:18 2011 Current Goniometer setting is outside safe range. Cannot move stages. #1A
\r
3367 Fri Sep 23 12:35:04 2011 Current Goniometer setting is outside safe range. Cannot move stages. #1A
\r
3368 Fri Sep 23 12:37:21 2011 Current Goniometer setting is outside safe range. Cannot move stages. #1A
\r
3369 Fri Sep 23 12:38:26 2011 Current Goniometer setting is outside safe range. Cannot move stages. #1A
\r
3370 Fri Sep 23 12:38:41 2011 Goniometer limit switch error. #1
\r
3371 Fri Sep 23 12:39:52 2011 Goniometer limit switch error. #1
\r
3373 Fri Sep 23 12:46:03 2011 Init User: Nick (v3.698, 6.256 DLL)
\r
3376 Fri Sep 23 12:48:58 2011 Init User: Nick (v3.698, 6.256 DLL)
\r
3379 Fri Sep 23 12:55:24 2011 Init User: Nick (v3.698, 6.256 DLL)
\r
3381 Fri Sep 23 12:57:46 2011
\r
3382 Fri Sep 23 12:57:46 2011 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
3383 Fri Sep 23 13:08:54 2011 Calib: Wvl1=5000.0 Ps=2.2361±0.0030 Attn=1.0147±0.0002 As=104.216±0.004 Psi=4.927±0.008 Del=147.345±0.141 <I>=5.294, MSE=1.2 (3.45) Synch=112.285±0.064 [112.224,112.564] M1=0.011±0.0023 [0.0051,0.015]
\r
3384 Fri Sep 23 13:08:54 2011 Calib: Wvl2=11770.0 Ps=2.2361±0.0030 IrAttn=0.9747±0.0002 IrAs=102.045±0.005 IrPsi=1.944±0.004 IrDel=28.050±0.207 <I>=5.652 MSE=1.2 (3.45) Synch=109.398±0.176 [109.255,110.021] M1=0.023±0.0026 [0.012,0.034]
\r
3385 Fri Sep 23 13:08:55 2011 Calib: MSE=1.198 (3.453) AzOffset=-0.002±0.006776 ElOffset=0.041±0.025451 DP=0.016±0.010
\r
3386 Fri Sep 23 13:14:36 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
3387 Fri Sep 23 13:17:22 2011 VASE File c:\windows\desktop\23-9-11\pmoke-test1.dat
\r
3388 Fri Sep 23 13:28:24 2011 VASE File c:\windows\desktop\23-9-11\pmoke-test1.dat
\r
3389 Fri Sep 23 13:31:27 2011 VASE File c:\windows\desktop\23-9-11\pmoke-test2.dat
\r
3390 Fri Sep 23 13:46:56 2011 VASE File c:\windows\desktop\23-9-11\pmoke-test2.dat
\r
3391 Fri Sep 23 14:22:45 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
3392 Fri Sep 23 14:27:14 2011 VASE File c:\windows\desktop\23-9-11\tmoke-test1_a3.dat
\r
3393 Fri Sep 23 14:28:10 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
3394 Fri Sep 23 14:28:37 2011 VASE File c:\windows\desktop\23-9-11\tmoke-test1_a3.dat
\r
3395 Fri Sep 23 14:28:52 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
3396 Fri Sep 23 14:29:24 2011 VASE File c:\windows\desktop\23-9-11\tmoke-test1_a3.dat
\r
3397 Fri Sep 23 14:29:44 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
3398 Fri Sep 23 14:30:26 2011 VASE File c:\windows\desktop\23-9-11\tmoke-test1_a3.dat
\r
3399 Fri Sep 23 14:36:18 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
3400 Fri Sep 23 14:40:08 2011 VASE File c:\windows\desktop\23-9-11\tmoke_a3\6250a.dat
\r
3401 Fri Sep 23 14:40:31 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
3402 Fri Sep 23 14:45:14 2011 VASE File c:\windows\desktop\23-9-11\tmoke_a3\6200a.dat
\r
3403 Fri Sep 23 14:49:05 2011 VASE File c:\windows\desktop\23-9-11\tmoke_a3\spectr-check.dat
\r
3404 Fri Sep 23 17:09:40 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
3405 Fri Sep 23 19:23:44 2011 Current Goniometer setting is outside safe range. Cannot move stages. #1B
\r
3407 Mon Sep 26 11:53:08 2011 Init User: Nick (v3.698, 6.256 DLL)
\r
3409 Mon Sep 26 11:53:20 2011 Goniometer limit switch error. #1
\r
3410 Mon Sep 26 12:00:00 2011
\r
3411 Mon Sep 26 12:00:00 2011 Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=3
\r
3412 Mon Sep 26 12:04:30 2011 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
3413 Mon Sep 26 12:04:34 2011 Coarse Calib: Wvl1=5000.0 Ps=2.2475±0.0121 Attn=1.0117±0.0002 As=69.044±0.005 Psi=4.895±0.013 Del=146.915±0.227 <I>=10.238, MSE=1.46 (2.37)
\r
3414 Mon Sep 26 12:04:34 2011 Coarse Calib: MSE=1.455 (2.374) AzOffset=-0.008±0.010952 ElOffset=0.041±0.040853
\r
3415 Mon Sep 26 12:04:42 2011
\r
3416 Mon Sep 26 12:04:42 2011 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
3417 Mon Sep 26 12:14:03 2011 Calib: Wvl1=5000.0 Ps=2.2398±0.0049 Attn=1.0121±0.0002 As=69.000±0.006 Psi=4.898±0.012 Del=146.873±0.215 <I>=4.841, MSE=1.84 (3.71) Synch=-31.565±0.127 [-31.780,-31.322] M1=0.0059±0.0015 [0.002,0.0086]
\r
3418 Mon Sep 26 12:14:03 2011 Calib: Wvl2=11770.0 Ps=2.2398±0.0049 IrAttn=0.9727±0.0003 IrAs=66.736±0.008 IrPsi=1.975±0.005 IrDel=27.818±0.315 <I>=5.536 MSE=1.84 (3.71) Synch=-34.428±0.164 [-34.717,-33.919] M1=0.03±0.0041 [0.014,0.034]
\r
3419 Mon Sep 26 12:14:03 2011 Calib: MSE=1.835 (3.706) AzOffset=0.014±0.010447 ElOffset=-0.024±0.038569 DP=0.017±0.015
\r
3420 Mon Sep 26 12:25:56 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
3421 Mon Sep 26 12:28:53 2011 VASE File c:\windows\desktop\26-9-11\e3-tmoke-dyn-test-4500a.dat
\r
3422 Mon Sep 26 15:35:23 2011 VASE File c:\windows\desktop\26-9-11\nsau\d-psi-perp.dat
\r
3423 Mon Sep 26 15:50:01 2011 RT File c:\windows\desktop\26-9-11\nsau\p-pol-base-perp.dat
\r
3424 Mon Sep 26 17:02:57 2011 RT File c:\windows\desktop\26-9-11\nsau\p-pol-perp.dat
\r
3426 Tue Sep 27 12:08:42 2011 Init User: Nick (v3.698, 6.256 DLL)
\r
3428 Tue Sep 27 12:13:41 2011
\r
3429 Tue Sep 27 12:13:41 2011 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
3430 Tue Sep 27 12:24:51 2011 Calib: Wvl1=5000.0 Ps=2.2354±0.0058 Attn=1.0115±0.0003 As=11.001±0.008 Psi=4.885±0.014 Del=146.819±0.260 <I>=5.001, MSE=2.21 (4.74) Synch=-45.464±0.066 [-45.808,-45.271] M1=0.0084±0.0023 [0.0012,0.015]
\r
3431 Tue Sep 27 12:24:52 2011 Calib: Wvl2=11770.0 Ps=2.2354±0.0058 IrAttn=0.9719±0.0004 IrAs=8.667±0.009 IrPsi=1.987±0.007 IrDel=27.739±0.381 <I>=5.464 MSE=2.21 (4.74) Synch=-47.723±0.123 [-47.865,-47.231] M1=0.034±0.0051 [0.0084,0.039]
\r
3432 Tue Sep 27 12:24:52 2011 Calib: MSE=2.207 (4.739) AzOffset=0.020±0.012456 ElOffset=-0.052±0.045775 DP=0.015±0.018
\r
3433 Tue Sep 27 12:49:09 2011 RT File c:\windows\desktop\27-9-11\nsau\baseline-p-pol-vert.dat
\r
3434 Tue Sep 27 13:54:42 2011 RT File c:\windows\desktop\27-9-11\nsau\p-pol-vert.dat
\r
3435 Tue Sep 27 14:05:45 2011 RT File c:\windows\desktop\27-9-11\nsau\p-pol-vert-scatter.dat
\r
3436 Tue Sep 27 14:13:17 2011 RT File c:\windows\desktop\27-9-11\nsau\p-pol-vert-scatter-90.dat
\r
3437 Tue Sep 27 14:25:01 2011 RT File c:\windows\desktop\27-9-11\nsau\s-pol-vert.dat
\r
3438 Tue Sep 27 14:28:08 2011 RT File c:\windows\desktop\27-9-11\nsau\s-pol-vert.dat
\r
3439 Tue Sep 27 15:08:43 2011 RT File c:\windows\desktop\27-9-11\nsau\s-pol-vert.dat
\r
3440 Tue Sep 27 16:44:39 2011 RT File c:\windows\desktop\27-9-11\nsau\s-pol-horiz.dat
\r
3441 Tue Sep 27 17:30:03 2011 VASE File c:\windows\desktop\27-9-11\nsau\spectr-horiz.dat
\r
3442 Tue Sep 27 17:44:31 2011 RT File c:\windows\desktop\27-9-11\nsau\p-pol-base-horiz.dat
\r
3443 Tue Sep 27 17:48:22 2011 RT File c:\windows\desktop\27-9-11\nsau\p-pol-horiz.dat
\r
3444 Tue Sep 27 18:32:41 2011 RT File c:\windows\desktop\27-9-11\nsau\p-pol-horiz.dat
\r
3446 Wed Sep 28 11:38:32 2011 Init User: Nick (v3.698, 6.256 DLL)
\r
3448 Wed Sep 28 11:43:40 2011
\r
3449 Wed Sep 28 11:43:40 2011 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
3450 Wed Sep 28 11:54:48 2011 Calib: Wvl1=5000.0 Ps=2.2457±0.0034 Attn=1.0115±0.0002 As=52.641±0.005 Psi=4.898±0.008 Del=146.694±0.151 <I>=5.259, MSE=1.29 (3.94) Synch=-174.084±0.045 [-174.187,-173.940] M1=0.01±0.0022 [0.0027,0.014]
\r
3451 Wed Sep 28 11:54:48 2011 Calib: Wvl2=11770.0 Ps=2.2457±0.0034 IrAttn=0.9718±0.0002 IrAs=50.318±0.005 IrPsi=1.982±0.004 IrDel=27.868±0.242 <I>=5.086 MSE=1.29 (3.94) Synch=-176.670±0.133 [-176.841,-176.105] M1=0.026±0.0032 [0.0095,0.03]
\r
3452 Wed Sep 28 11:54:49 2011 Calib: MSE=1.290 (3.942) AzOffset=0.012±0.007315 ElOffset=-0.027±0.027074 DP=0.017±0.011
\r
3453 Wed Sep 28 12:16:28 2011 VASE File c:\windows\desktop\28-9-11\crap\au-film_spectr_full.dat
\r
3454 Wed Sep 28 12:32:24 2011 RT File c:\windows\desktop\28-9-11\crap\au-film_base-p-pol.dat
\r
3455 Wed Sep 28 12:59:04 2011 RT File c:\windows\desktop\28-9-11\crap\au-film_p-pol.dat
\r
3456 Wed Sep 28 13:11:07 2011 RT File c:\windows\desktop\28-9-11\crap\au-film_base_s-pol.dat
\r
3457 Wed Sep 28 13:39:35 2011 RT File c:\windows\desktop\28-9-11\crap\au-film_s-pol.dat
\r
3458 Wed Sep 28 14:02:09 2011 VASE File c:\windows\desktop\28-9-11\crap\s5(ag)_spectr.dat
\r
3459 Wed Sep 28 14:31:28 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
3460 Wed Sep 28 14:34:19 2011 VASE File c:\windows\desktop\28-9-11\crap\nsau_tmoke-dyn_test.dat ]
\r
3461 Wed Sep 28 14:36:08 2011 VASE File c:\windows\desktop\28-9-11\crap\nsau_tmoke-dyn_test.dat ]
\r
3463 Wed Sep 28 14:40:50 2011 Init User: Nick (v3.698, 6.256 DLL)
\r
3465 Wed Sep 28 14:46:31 2011
\r
3466 Wed Sep 28 14:46:31 2011 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
3467 Wed Sep 28 14:57:43 2011 Calib: Wvl1=5000.0 Ps=2.1965±0.0048 Attn=1.0158±0.0003 As=87.658±0.007 Psi=4.920±0.012 Del=147.237±0.223 <I>=5.463, MSE=1.89 (4.81) Synch=-46.680±0.062 [-46.853,-46.429] M1=0.011±0.0023 [0.0037,0.015]
\r
3468 Wed Sep 28 14:57:44 2011 Calib: Wvl2=11770.0 Ps=2.1965±0.0048 IrAttn=0.9750±0.0003 IrAs=85.515±0.008 IrPsi=1.948±0.006 IrDel=27.700±0.339 <I>=5.579 MSE=1.89 (4.81) Synch=-49.352±0.112 [-49.653,-48.646] M1=0.027±0.0034 [0.013,0.031]
\r
3469 Wed Sep 28 14:57:44 2011 Calib: MSE=1.894 (4.814) AzOffset=0.014±0.010753 ElOffset=-0.034±0.039725 DP=0.019±0.016
\r
3470 Wed Sep 28 15:15:15 2011 VASE File c:\windows\desktop\28-9-11\crap\nsau_tmoke-dyn_test.dat
\r
3471 Wed Sep 28 15:16:27 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
3472 Wed Sep 28 15:19:03 2011 VASE File c:\windows\desktop\28-9-11\crap\nsau_tmoke-dyn_test.dat
\r
3473 Wed Sep 28 15:19:22 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
3474 Wed Sep 28 15:20:50 2011 VASE File c:\windows\desktop\28-9-11\crap\nsau_tmoke-dyn_test.dat
\r
3475 Wed Sep 28 15:21:06 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
3476 Wed Sep 28 15:22:26 2011 VASE File c:\windows\desktop\28-9-11\crap\nsau_tmoke-dyn_test.dat
\r
3477 Wed Sep 28 16:20:27 2011 VASE File c:\windows\desktop\28-9-11\crap\ag-film-thick-spectr.dat
\r
3478 Wed Sep 28 16:39:42 2011 RT File c:\windows\desktop\28-9-11\crap\ag-film-thick-p-pol-base.dat
\r
3479 Wed Sep 28 17:07:57 2011 RT File c:\windows\desktop\28-9-11\crap\ag-film-thick-p-pol.dat
\r
3480 Wed Sep 28 17:17:35 2011 RT File c:\windows\desktop\28-9-11\crap\ag-film-thick-base-s-pol.dat
\r
3481 Wed Sep 28 17:45:57 2011 RT File c:\windows\desktop\28-9-11\crap\ag-film-thick-s-pol.dat
\r
3482 Wed Sep 28 17:55:49 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
3483 Wed Sep 28 18:00:42 2011 VASE File c:\windows\desktop\28-9-11\crap\ag-film-thick-dyn_tmoke.dat
\r
3484 Wed Sep 28 18:01:04 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
3485 Wed Sep 28 18:02:17 2011 VASE File c:\windows\desktop\28-9-11\crap\ag-film-thick-dyn_tmoke.dat
\r
3486 Wed Sep 28 18:03:36 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
3487 Wed Sep 28 18:04:45 2011 VASE File c:\windows\desktop\28-9-11\crap\ag-film-thick-dyn_tmoke.dat
\r
3488 Wed Sep 28 19:52:14 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
3489 Wed Sep 28 19:58:16 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
3490 Wed Sep 28 20:06:15 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
3491 Wed Sep 28 21:51:11 2011 RT File c:\windows\desktop\28-9-11\b1_tmoke\refl-p-pol.dat
\r
3493 Sat Oct 22 15:22:02 2011 Init User: Nick (v3.698, 6.256 DLL)
\r
3495 Sat Oct 22 15:26:30 2011
\r
3496 Sat Oct 22 15:26:30 2011 Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=3
\r
3497 Sat Oct 22 15:30:59 2011 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
3498 Sat Oct 22 15:31:02 2011 Coarse Calib: Wvl1=5000.0 Ps=2.2019±0.0161 Attn=1.0127±0.0003 As=156.533±0.008 Psi=4.883±0.018 Del=147.107±0.332 <I>=11.434, MSE=2.13 (2.58)
\r
3499 Sat Oct 22 15:31:03 2011 Coarse Calib: MSE=2.131 (2.576) AzOffset=0.021±0.016071 ElOffset=-0.042±0.059575
\r
3500 Sat Oct 22 15:31:09 2011
\r
3501 Sat Oct 22 15:31:09 2011 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
3502 Sat Oct 22 15:40:30 2011 Calib: Wvl1=5000.0 Ps=2.1907±0.0061 Attn=1.0123±0.0003 As=156.455±0.009 Psi=4.871±0.016 Del=146.986±0.291 <I>=5.405, MSE=2.46 (3.87) Synch=42.131±0.163 [41.970,42.640] M1=0.0083±0.0019 [0.0037,0.011]
\r
3503 Sat Oct 22 15:40:31 2011 Calib: Wvl2=11770.0 Ps=2.1907±0.0061 IrAttn=0.9714±0.0004 IrAs=154.158±0.010 IrPsi=1.983±0.007 IrDel=27.563±0.402 <I>=5.953 MSE=2.46 (3.87) Synch=39.179±0.098 [38.875,39.653] M1=0.032±0.0039 [0.014,0.045]
\r
3504 Sat Oct 22 15:40:31 2011 Calib: MSE=2.457 (3.870) AzOffset=-0.017±0.013968 ElOffset=0.043±0.051382 DP=0.035±0.020
\r
3505 Sat Oct 22 15:53:57 2011 VASE File c:\windows\desktop\22-10-11\si\crap\si-pure-spectr.dat
\r
3506 Sat Oct 22 16:05:38 2011 VASE File c:\windows\desktop\22-10-11\si\crap\s5-uthin-spectr.dat
\r
3507 Sat Oct 22 16:22:13 2011 VASE File c:\windows\desktop\22-10-11\si\crap\ag-s5-uthin-prec-spectr.dat
\r
3508 Sat Oct 22 16:26:23 2011 RT File c:\windows\desktop\22-10-11\si\crap\basepr.dat
\r
3509 Sat Oct 22 16:44:37 2011 RT File c:\windows\desktop\22-10-11\si\crap\pr-s5.dat
\r
3510 Sat Oct 22 17:06:19 2011 RT File c:\windows\desktop\22-10-11\si\crap\pr-ag-thick.dat
\r
3511 Sat Oct 22 17:14:30 2011 VASE File c:\windows\desktop\22-10-11\si\crap\pr-ag-thick-spectr.dat
\r
3513 Sun Oct 23 10:44:34 2011 Init User: Nick (v3.698, 6.256 DLL)
\r
3516 Sun Oct 23 10:55:46 2011 Init User: Nick (v3.698, 6.256 DLL)
\r
3518 Sun Oct 23 10:58:16 2011
\r
3519 Sun Oct 23 10:58:16 2011 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
3520 Sun Oct 23 11:09:25 2011 Calib: Wvl1=5000.0 Ps=2.1832±0.0034 Attn=1.0128±0.0002 As=65.143±0.004 Psi=4.894±0.008 Del=147.098±0.144 <I>=4.724, MSE=1.22 (4.51) Synch=-102.083±0.041 [-102.146,-101.984] M1=0.018±0.0034 [0.0048,0.022]
\r
3521 Sun Oct 23 11:09:25 2011 Calib: Wvl2=11770.0 Ps=2.1832±0.0034 IrAttn=0.9723±0.0002 IrAs=62.868±0.005 IrPsi=1.975±0.004 IrDel=27.942±0.242 <I>=4.467 MSE=1.22 (4.51) Synch=-104.892±0.065 [-105.061,-104.582] M1=0.02±0.0044 [0.0087,0.04]
\r
3522 Sun Oct 23 11:09:25 2011 Calib: MSE=1.222 (4.512) AzOffset=-0.016±0.006969 ElOffset=0.030±0.025661 DP=0.019±0.010
\r
3523 Sun Oct 23 11:15:47 2011 RT File c:\windows\desktop\23-10\crap\p-base.dat
\r
3524 Sun Oct 23 11:23:50 2011 RT File c:\windows\desktop\23-10\crap\pr.dat
\r
3525 Sun Oct 23 11:29:00 2011 RT File c:\windows\desktop\23-10\crap\tr.dat
\r
3526 Sun Oct 23 11:41:07 2011 RT File c:\windows\desktop\23-10\crap\tr-thcik-40-55.dat
\r
3527 Sun Oct 23 11:48:05 2011 RT File c:\windows\desktop\23-10\crap\pr-thin.dat
\r
3528 Sun Oct 23 11:57:34 2011 RT File c:\windows\desktop\23-10\crap\pr-thin.dat
\r
3529 Sun Oct 23 12:07:29 2011 RT File c:\windows\desktop\23-10\crap\tr-thin.dat
\r
3530 Sun Oct 23 12:20:22 2011 RT File c:\windows\desktop\23-10\crap\s-base.dat
\r
3531 Sun Oct 23 12:38:22 2011 RT File c:\windows\desktop\23-10\crap\s-pr-thick.dat
\r
3532 Sun Oct 23 12:40:51 2011 RT File c:\windows\desktop\23-10\crap\p-base-thick.dat
\r
3533 Sun Oct 23 12:50:26 2011 RT File c:\windows\desktop\23-10\crap\pr-thick.dat
\r
3535 Tue Dec 06 11:27:02 2011 Init User: Nick (v3.698, 6.256 DLL)
\r
3537 Tue Dec 06 11:36:18 2011
\r
3538 Tue Dec 06 11:36:18 2011 Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=3
\r
3539 Tue Dec 06 11:40:48 2011 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
3540 Tue Dec 06 11:40:53 2011 Coarse Calib: Wvl1=5000.0 Ps=2.1882±0.0114 Attn=1.0116±0.0002 As=126.891±0.005 Psi=4.899±0.012 Del=146.635±0.212 <I>=9.912, MSE=1.37 (1.87)
\r
3541 Tue Dec 06 11:40:53 2011 Coarse Calib: MSE=1.369 (1.873) AzOffset=-0.019±0.010288 ElOffset=0.031±0.038151
\r
3542 Tue Dec 06 11:42:32 2011
\r
3543 Tue Dec 06 11:42:32 2011 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
3544 Tue Dec 06 11:51:53 2011 Calib: Wvl1=5000.0 Ps=2.1843±0.0053 Attn=1.0122±0.0003 As=126.837±0.007 Psi=4.904±0.013 Del=146.598±0.229 <I>=4.760, MSE=1.95 (4.25) Synch=41.998±0.110 [41.824,42.225] M1=0.015±0.0031 [0.0032,0.018]
\r
3545 Tue Dec 06 11:51:53 2011 Calib: Wvl2=11770.0 Ps=2.1843±0.0053 IrAttn=0.9712±0.0003 IrAs=124.518±0.008 IrPsi=1.986±0.006 IrDel=28.087±0.363 <I>=4.797 MSE=1.95 (4.25) Synch=39.202±0.226 [38.797,40.069] M1=0.019±0.0042 [0.0082,0.045]
\r
3546 Tue Dec 06 11:51:53 2011 Calib: MSE=1.954 (4.255) AzOffset=0.019±0.011014 ElOffset=-0.044±0.040432 DP=0.013±0.016
\r
3547 Tue Dec 06 12:15:42 2011 VASE File c:\windows\desktop\6-12-11\spectr\ref-short.dat
\r
3548 Tue Dec 06 12:46:49 2011 VASE File c:\windows\desktop\6-12-11\spectr\ref-med.dat
\r
3549 Tue Dec 06 13:42:52 2011 VASE File c:\windows\desktop\6-12-11\spectr\n1_280_spectr_full.dat
\r
3550 Tue Dec 06 13:54:01 2011 RT File c:\windows\desktop\6-12-11\spectr\n280-base.dat
\r
3551 Tue Dec 06 14:26:51 2011 RT File c:\windows\desktop\6-12-11\spectr\n280-pr-vert.dat
\r
3553 Tue Dec 06 15:25:37 2011 Init User: Nick (v3.698, 6.256 DLL)
\r
3555 Tue Dec 06 15:30:11 2011
\r
3556 Tue Dec 06 15:30:11 2011 Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=3
\r
3557 Tue Dec 06 15:38:28 2011 Calib: Diagnose bd:5, 1, 5, 0, 1, 3, 1, 4, 4, 240, pxy95=129.5,84.91,0.00,0.00 (4, 3, 0, 6, 1, 6, 1, 1, 2, 240)
\r
3558 Tue Dec 06 15:38:28 2011 Coarse Calibration was not successful.
\r
3559 Tue Dec 06 15:38:39 2011 Coarse Calib: Wvl1=5000.0 Ps=1.9252±0.4350 Attn=1.0070±0.0088 As=102.465±0.252 Psi=4.810±0.630 Del=148.183±14.116 <I>=15.327, MSE=72.8 (54.1)
\r
3560 Tue Dec 06 15:38:40 2011 Coarse Calib: MSE=72.834 (54.126) AzOffset=0.076±0.455947 ElOffset=-0.411±1.829800
\r
3561 Tue Dec 06 15:46:36 2011
\r
3562 Tue Dec 06 15:46:36 2011 Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=3
\r
3563 Tue Dec 06 15:51:06 2011 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
3564 Tue Dec 06 15:51:09 2011 Coarse Calib: Wvl1=5000.0 Ps=1.9842±0.0108 Attn=1.0141±0.0002 As=102.232±0.006 Psi=4.903±0.016 Del=147.112±0.284 <I>=15.564, MSE=1.84 (1.73)
\r
3565 Tue Dec 06 15:51:09 2011 Coarse Calib: MSE=1.835 (1.725) AzOffset=-0.014±0.013769 ElOffset=0.018±0.051060
\r
3566 Tue Dec 06 15:51:19 2011
\r
3567 Tue Dec 06 15:51:19 2011 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
3568 Tue Dec 06 16:00:43 2011 Calib: Wvl1=5000.0 Ps=1.9834±0.0025 Attn=1.0144±0.0002 As=102.229±0.004 Psi=4.914±0.008 Del=146.855±0.140 <I>=7.334, MSE=1.19 (5.14) Synch=113.025±0.063 [112.889,113.188] M1=0.015±0.0024 [0.0064,0.018]
\r
3569 Tue Dec 06 16:00:43 2011 Calib: Wvl2=11770.0 Ps=1.9834±0.0025 IrAttn=0.9737±0.0002 IrAs=100.039±0.005 IrPsi=1.971±0.003 IrDel=28.236±0.194 <I>=5.800 MSE=1.19 (5.14) Synch=110.414±0.118 [110.247,110.977] M1=0.023±0.003 [0.015,0.037]
\r
3570 Tue Dec 06 16:00:44 2011 Calib: MSE=1.192 (5.137) AzOffset=0.020±0.006556 ElOffset=-0.065±0.024159 DP=0.015±0.010
\r
3571 Tue Dec 06 16:29:04 2011 VASE File c:\windows\desktop\6-12-11\spectr\n1_280_spectr_full.dat
\r
3572 Tue Dec 06 16:47:24 2011 VASE File c:\windows\desktop\6-12-11\spectr\tetst-old-a1.dat
\r
3574 Tue Dec 06 17:08:22 2011 Init User: Nick (v3.698, 6.256 DLL)
\r
3576 Tue Dec 06 17:18:09 2011
\r
3577 Tue Dec 06 17:18:09 2011 Calib: rvs=5, pts=100, span=180.0, aoi=55.000, t=0, d=3
\r
3578 Tue Dec 06 17:22:38 2011 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
3579 Tue Dec 06 17:22:40 2011 Coarse Calib: Wvl1=5000.0 Ps=1.9995±0.0127 Attn=1.0142±0.0002 As=24.310±0.013 Psi=29.501±0.006 Del=176.773±0.056 <I>=28.079, MSE=1.55 (1.1)
\r
3580 Tue Dec 06 17:22:40 2011 Coarse Calib: MSE=1.552 (1.100) AzOffset=0.007±0.003391 ElOffset=-0.030±0.003869
\r
3581 Tue Dec 06 17:22:59 2011
\r
3582 Tue Dec 06 17:22:59 2011 Calib: rvs=30, pts=60, span=60.0, aoi=55.000, t=1, d=3
\r
3583 Tue Dec 06 17:32:17 2011 Calib: Wvl1=5000.0 Ps=2.0137±0.0062 Attn=1.0148±0.0001 As=24.276±0.008 Psi=29.511±0.004 Del=176.806±0.026 <I>=20.024, MSE=0.947 (0.512) Synch=-102.813±0.008 [-102.831,-102.800] M1=0.0091±0.0034 [0.0047,0.015]
\r
3584 Tue Dec 06 17:32:17 2011 Calib: Wvl2=11770.0 Ps=2.0137±0.0062 IrAttn=0.9734±0.0002 IrAs=22.078±0.011 IrPsi=26.190±0.003 IrDel=178.573±0.560 <I>=20.602 MSE=0.947 (0.512) Synch=-105.642±0.018 [-105.686,-105.616] M1=0.013±0.0062 [0.0041,0.021]
\r
3585 Tue Dec 06 17:32:18 2011 Calib: MSE=0.947 (0.512) AzOffset=-0.002±0.001580 ElOffset=0.001±0.001800 DP=-0.069±0.028
\r
3586 Tue Dec 06 17:49:45 2011 VASE File c:\windows\desktop\6-12-11\spectr\tetst-old-a1.dat
\r
3588 Wed Dec 07 11:35:19 2011 Init User: . (v3.698, 6.256 DLL)
\r
3590 Wed Dec 07 11:39:31 2011
\r
3591 Wed Dec 07 11:39:31 2011 Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=3
\r
3592 Wed Dec 07 11:44:33 2011 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
3593 Wed Dec 07 11:44:37 2011 Coarse Calib: Wvl1=5000.0 Ps=2.0159±0.0073 Attn=1.0120±0.0002 As=163.454±0.006 Psi=4.902±0.017 Del=147.007±0.300 <I>=26.413, MSE=1.95 (1.79)
\r
3594 Wed Dec 07 11:44:37 2011 Coarse Calib: MSE=1.948 (1.789) AzOffset=0.000±0.014379 ElOffset=0.044±0.054118
\r
3595 Wed Dec 07 11:45:38 2011
\r
3596 Wed Dec 07 11:45:38 2011 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
3597 Wed Dec 07 11:55:02 2011 Calib: Wvl1=5000.0 Ps=2.0164±0.0029 Attn=1.0126±0.0002 As=163.413±0.007 Psi=4.908±0.013 Del=147.068±0.232 <I>=13.783, MSE=1.95 (3.4) Synch=-118.168±0.099 [-118.279,-117.816] M1=0.017±0.0032 [0.0062,0.02]
\r
3598 Wed Dec 07 11:55:03 2011 Calib: Wvl2=11770.0 Ps=2.0164±0.0029 IrAttn=0.9723±0.0003 IrAs=161.157±0.007 IrPsi=1.969±0.004 IrDel=27.957±0.247 <I>=8.599 MSE=1.95 (3.4) Synch=-120.830±0.054 [-120.946,-120.644] M1=0.022±0.003 [0.005,0.025]
\r
3599 Wed Dec 07 11:55:03 2011 Calib: MSE=1.954 (3.400) AzOffset=0.030±0.009459 ElOffset=-0.122±0.036250 DP=0.017±0.016
\r
3600 Wed Dec 07 12:49:47 2011 VASE File c:\windows\desktop\7-12-11\n1-280.dat
\r
3601 Wed Dec 07 13:05:28 2011 RT File c:\windows\desktop\7-12-11\n1-280\crap\n1-280-base-pr.dat
\r
3602 Wed Dec 07 14:44:53 2011 RT File c:\windows\desktop\7-12-11\n1-280\crap\n1-280-pr-full.dat
\r
3603 Wed Dec 07 16:05:56 2011 RT File c:\windows\desktop\7-12-11\n1-280\crap\n1-280-pr-full-horiz.dat
\r
3604 Wed Dec 07 16:40:35 2011 VASE File c:\windows\desktop\7-12-11\n1-280\crap\n1-280-spectr-full-horiz.dat
\r
3605 Wed Dec 07 17:03:50 2011 RT File c:\windows\desktop\7-12-11\n1-280\crap\n1-280-sr-horiz.dat
\r
3606 Wed Dec 07 17:33:48 2011 Low-level data acquisition timed out. #2
\r
3607 Try re-initializing hardware.
\r
3608 If problem returns, contact J.A.Woollam Co. or a representative.
\r
3609 Wed Dec 07 17:34:00 2011 RT File c:\windows\desktop\7-12-11\n1-280\crap\n1-280-sr-horiz.dat
\r
3611 Wed Dec 07 17:42:49 2011 Init User: . (v3.698, 6.256 DLL)
\r
3613 Wed Dec 07 17:49:15 2011
\r
3614 Wed Dec 07 17:49:15 2011 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
3615 Wed Dec 07 18:00:29 2011 Calib: Wvl1=5000.0 Ps=2.0086±0.0025 Attn=1.0154±0.0002 As=98.867±0.005 Psi=4.920±0.010 Del=146.772±0.186 <I>=12.235, MSE=1.57 (3.31) Synch=-81.058±0.034 [-81.112,-80.930] M1=0.014±0.0028 [0.0048,0.017]
\r
3616 Wed Dec 07 18:00:29 2011 Calib: Wvl2=11770.0 Ps=2.0086±0.0025 IrAttn=0.9735±0.0002 IrAs=96.701±0.006 IrPsi=1.968±0.003 IrDel=27.838±0.200 <I>=8.553 MSE=1.57 (3.31) Synch=-83.944±0.091 [-84.045,-83.609] M1=0.018±0.004 [0.004,0.041]
\r
3617 Wed Dec 07 18:00:29 2011 Calib: MSE=1.572 (3.307) AzOffset=0.031±0.007684 ElOffset=-0.123±0.029092 DP=0.011±0.013
\r
3619 Thu Dec 08 11:12:59 2011 Init User: Nick (v3.698, 6.256 DLL)
\r
3622 Thu Dec 08 11:20:56 2011 Init User: Nick (v3.698, 6.256 DLL)
\r
3625 Thu Dec 08 11:26:54 2011 Init User: Nick (v3.698, 6.256 DLL)
\r
3627 Thu Dec 08 11:31:31 2011
\r
3628 Thu Dec 08 11:31:31 2011 Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=3
\r
3629 Thu Dec 08 11:36:03 2011 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
3630 Thu Dec 08 11:36:06 2011 Coarse Calib: Wvl1=5000.0 Ps=2.0134±0.0048 Attn=1.0116±0.0001 As=151.990±0.004 Psi=4.895±0.009 Del=146.509±0.167 <I>=23.472, MSE=1.09 (1.21)
\r
3631 Thu Dec 08 11:36:06 2011 Coarse Calib: MSE=1.091 (1.208) AzOffset=-0.009±0.008038 ElOffset=-0.052±0.030126
\r
3632 Thu Dec 08 11:36:34 2011
\r
3633 Thu Dec 08 11:36:34 2011 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
3634 Thu Dec 08 11:45:57 2011 Calib: Wvl1=5000.0 Ps=2.0140±0.0039 Attn=1.0118±0.0003 As=151.945±0.008 Psi=4.901±0.016 Del=146.432±0.278 <I>=10.902, MSE=2.38 (4.84) Synch=-102.867±0.175 [-103.049,-102.360] M1=0.014±0.0026 [0.0055,0.018]
\r
3635 Thu Dec 08 11:45:57 2011 Calib: Wvl2=11770.0 Ps=2.0140±0.0039 IrAttn=0.9716±0.0004 IrAs=149.681±0.009 IrPsi=2.002±0.005 IrDel=28.466±0.302 <I>=7.945 MSE=2.38 (4.84) Synch=-105.677±0.092 [-105.782,-105.321] M1=0.018±0.0031 [0.0095,0.033]
\r
3636 Thu Dec 08 11:45:58 2011 Calib: MSE=2.383 (4.843) AzOffset=0.039±0.012841 ElOffset=-0.076±0.040381 DP=0.022±0.019
\r
3637 Thu Dec 08 12:14:21 2011 VASE File c:\windows\desktop\8-12-11\crap\test1.dat
\r
3639 Thu Dec 08 12:57:06 2011 Init User: Nick (v3.698, 6.256 DLL)
\r
3642 Thu Dec 08 13:31:39 2011 Init User: Nick (v3.698, 6.256 DLL)
\r
3644 Thu Dec 08 13:37:14 2011
\r
3645 Thu Dec 08 13:37:14 2011 Calib: rvs=5, pts=100, span=180.0, aoi=55.000, t=0, d=3
\r
3646 Thu Dec 08 13:41:57 2011 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
3647 Thu Dec 08 13:42:00 2011 Coarse Calib: Wvl1=5000.0 Ps=2.0354±0.0136 Attn=1.0117±0.0003 As=154.054±0.014 Psi=29.491±0.006 Del=176.712±0.060 <I>=34.815, MSE=1.67 (1.18)
\r
3648 Thu Dec 08 13:42:01 2011 Coarse Calib: MSE=1.671 (1.182) AzOffset=-0.003±0.003636 ElOffset=-0.008±0.004158
\r
3649 Thu Dec 08 13:42:34 2011
\r
3650 Thu Dec 08 13:42:34 2011 Calib: rvs=30, pts=60, span=60.0, aoi=55.000, t=1, d=3
\r
3651 Thu Dec 08 13:51:51 2011 Calib: Wvl1=5000.0 Ps=2.0484±0.0066 Attn=1.0126±0.0002 As=153.994±0.009 Psi=29.509±0.004 Del=176.798±0.028 <I>=25.724, MSE=1.01 (0.546) Synch=-117.612±0.012 [-117.637,-117.591] M1=0.012±0.0034 [0.0065,0.016]
\r
3652 Thu Dec 08 13:51:51 2011 Calib: Wvl2=11770.0 Ps=2.0484±0.0066 IrAttn=0.9710±0.0002 IrAs=151.702±0.011 IrPsi=26.190±0.004 IrDel=178.512±0.571 <I>=24.082 MSE=1.01 (0.546) Synch=-120.458±0.013 [-120.488,-120.435] M1=0.016±0.0057 [0.0081,0.023]
\r
3653 Thu Dec 08 13:51:52 2011 Calib: MSE=1.010 (0.546) AzOffset=0.017±0.001680 ElOffset=0.011±0.001915 DP=-0.077±0.029
\r
3654 Thu Dec 08 14:06:27 2011 VASE File c:\windows\desktop\8-12-11\crap\test1.dat
\r
3655 Thu Dec 08 14:10:52 2011 RT File c:\windows\desktop\8-12-11\crap\test2.dat
\r
3656 Thu Dec 08 14:14:55 2011 RT File c:\windows\desktop\8-12-11\crap\test3.dat
\r
3657 Thu Dec 08 14:28:34 2011 RT File c:\windows\desktop\8-12-11\crap\test3.dat
\r
3658 Thu Dec 08 14:52:05 2011 VASE File c:\windows\desktop\8-12-11\crap\n280-spectr-short.dat
\r
3659 Thu Dec 08 15:43:56 2011 VASE File c:\windows\desktop\8-12-11\crap\n85-spectr-full.dat
\r
3660 Thu Dec 08 16:15:36 2011 RT File c:\windows\desktop\8-12-11\crap\n85-refl-full.dat
\r
3661 Thu Dec 08 16:25:51 2011 RT File c:\windows\desktop\8-12-11\crap\n85-base-sr.dat
\r
3662 Thu Dec 08 18:08:16 2011 RT File c:\windows\desktop\8-12-11\crap\n85-refl-sr-full.dat
\r
3664 Mon Dec 19 12:51:11 2011 Init User: Nick (v3.698, 6.256 DLL)
\r
3666 Mon Dec 19 12:55:50 2011
\r
3667 Mon Dec 19 12:55:50 2011 Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=3
\r
3668 Mon Dec 19 13:00:51 2011 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
3669 Mon Dec 19 13:00:54 2011 Coarse Calib: Wvl1=5000.0 Ps=2.0031±0.0377 Attn=1.0096±0.0012 As=152.321±0.035 Psi=4.883±0.090 Del=147.046±1.740 <I>=27.899, MSE=10.4 (7.46)
\r
3670 Mon Dec 19 13:00:55 2011 Coarse Calib: MSE=10.410 (7.461) AzOffset=0.030±0.062168 ElOffset=-0.238±0.274183
\r
3671 Mon Dec 19 13:01:06 2011
\r
3672 Mon Dec 19 13:01:06 2011 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
3673 Mon Dec 19 13:10:32 2011 Calib: Wvl1=5000.0 Ps=2.0107±0.0026 Attn=1.0108±0.0002 As=152.245±0.006 Psi=4.910±0.012 Del=146.679±0.214 <I>=15.146, MSE=1.83 (3.45) Synch=-175.629±0.038 [-175.760,-175.489] M1=0.016±0.0028 [0.0033,0.02]
\r
3674 Mon Dec 19 13:10:32 2011 Calib: Wvl2=11770.0 Ps=2.0107±0.0026 IrAttn=0.9697±0.0003 IrAs=149.905±0.007 IrPsi=1.978±0.004 IrDel=28.176±0.208 <I>=9.784 MSE=1.83 (3.45) Synch=-178.000±0.099 [-178.209,-177.693] M1=0.023±0.0028 [0.0059,0.027]
\r
3675 Mon Dec 19 13:10:33 2011 Calib: MSE=1.825 (3.455) AzOffset=-0.041±0.009515 ElOffset=0.093±0.029194 DP=0.009±0.015
\r
3676 Mon Dec 19 13:58:56 2011 VASE File c:\windows\desktop\19-12-11\crap\vert-spectr-full.dat
\r
3677 Mon Dec 19 14:11:36 2011 RT File c:\windows\desktop\19-12-11\crap\pr-vert-base.dat
\r
3678 Mon Dec 19 15:55:56 2011 RT File c:\windows\desktop\19-12-11\crap\vert-pr-full.dat
\r
3679 Mon Dec 19 16:06:30 2011 RT File c:\windows\desktop\19-12-11\crap\vert-sr-full-base.dat
\r
3680 Mon Dec 19 17:48:44 2011 RT File c:\windows\desktop\19-12-11\crap\vert-sr-full.dat
\r
3682 Tue Dec 20 13:08:04 2011 Init User: Nick (v3.698, 6.256 DLL)
\r
3684 Tue Dec 20 13:12:32 2011
\r
3685 Tue Dec 20 13:12:32 2011 Calib: rvs=5, pts=100, span=180.0, aoi=65.000, t=0, d=3
\r
3686 Tue Dec 20 13:17:00 2011 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
3687 Tue Dec 20 13:17:03 2011 Coarse Calib: Wvl1=5000.0 Ps=2.0416±0.0383 Attn=1.0120±0.0012 As=161.952±0.043 Psi=20.098±0.033 Del=171.490±0.403 <I>=26.378, MSE=8.49 (6.03)
\r
3688 Tue Dec 20 13:17:04 2011 Coarse Calib: MSE=8.486 (6.026) AzOffset=-0.003±0.022468 ElOffset=-0.032±0.032490
\r
3689 Tue Dec 20 13:17:54 2011
\r
3690 Tue Dec 20 13:17:54 2011 Calib: rvs=30, pts=60, span=60.0, aoi=65.000, t=1, d=3
\r
3691 Tue Dec 20 13:27:11 2011 Calib: Wvl1=5000.0 Ps=2.0133±0.0054 Attn=1.0111±0.0003 As=161.954±0.010 Psi=20.071±0.008 Del=171.463±0.077 <I>=16.720, MSE=2.13 (1.15) Synch=98.323±0.072 [98.099,98.383] M1=0.016±0.0043 [0.0072,0.02]
\r
3692 Tue Dec 20 13:27:11 2011 Calib: Wvl2=11770.0 Ps=2.0133±0.0054 IrAttn=0.9692±0.0004 IrAs=159.578±0.013 IrPsi=15.329±0.004 IrDel=176.076±0.439 <I>=13.238 MSE=2.13 (1.15) Synch=95.561±0.014 [95.530,95.587] M1=0.02±0.0053 [0.0099,0.028]
\r
3693 Tue Dec 20 13:27:11 2011 Calib: MSE=2.132 (1.153) AzOffset=0.011±0.004310 ElOffset=-0.003±0.006238 DP=-0.036±0.039
\r
3694 Tue Dec 20 14:17:17 2011 VASE File c:\windows\desktop\20-12-11\crap\horiz-spectr-full.dat
\r
3695 Tue Dec 20 14:28:35 2011 RT File c:\windows\desktop\20-12-11\crap\horiz-base-pr.dat
\r
3696 Tue Dec 20 16:10:36 2011 RT File c:\windows\desktop\20-12-11\crap\horiz-pr-full.dat
\r
3697 Tue Dec 20 16:20:56 2011 RT File c:\windows\desktop\20-12-11\crap\horiz-base-sr.dat
\r
3698 Tue Dec 20 18:34:35 2011 RT File c:\windows\desktop\20-12-11\crap\horiz-sr-full.dat
\r
3700 Thu Dec 22 12:20:36 2011 Init User: Nick (v3.698, 6.256 DLL)
\r
3702 Thu Dec 22 12:25:08 2011
\r
3703 Thu Dec 22 12:25:08 2011 Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=3
\r
3704 Thu Dec 22 12:30:07 2011 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
3705 Thu Dec 22 12:30:11 2011 Coarse Calib: Wvl1=5000.0 Ps=2.0265±0.0201 Attn=1.0103±0.0006 As=163.149±0.017 Psi=5.110±0.051 Del=140.796±0.716 <I>=25.392, MSE=5.26 (3.81)
\r
3706 Thu Dec 22 12:30:11 2011 Coarse Calib: MSE=5.257 (3.807) AzOffset=0.010±0.035827 ElOffset=0.031±0.123206
\r
3707 Thu Dec 22 12:30:58 2011
\r
3708 Thu Dec 22 12:30:58 2011 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
3709 Thu Dec 22 12:40:24 2011 Calib: Wvl1=5000.0 Ps=2.0134±0.0023 Attn=1.0107±0.0002 As=163.094±0.005 Psi=5.089±0.012 Del=141.138±0.164 <I>=12.978, MSE=1.57 (3.08) Synch=111.548±0.023 [111.516,111.637] M1=0.015±0.0034 [0.0043,0.019]
\r
3710 Thu Dec 22 12:40:24 2011 Calib: Wvl2=11770.0 Ps=2.0134±0.0023 IrAttn=0.9687±0.0002 IrAs=160.685±0.006 IrPsi=2.054±0.003 IrDel=31.513±0.156 <I>=9.085 MSE=1.57 (3.08) Synch=109.168±0.114 [108.983,109.437] M1=0.019±0.0024 [0.0082,0.024]
\r
3711 Thu Dec 22 12:40:24 2011 Calib: MSE=1.570 (3.083) AzOffset=0.031±0.007936 ElOffset=-0.055±0.023796 DP=0.033±0.015
\r
3712 Thu Dec 22 12:57:28 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
3713 Thu Dec 22 13:00:39 2011 VASE File c:\windows\desktop\22-12-11\crap\n1-85-test-dyn1-6100a.dat
\r
3714 Thu Dec 22 13:35:50 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
3715 Thu Dec 22 13:38:32 2011 VASE File c:\windows\desktop\22-12-11\crap\n1-85-test-dyn1-6100a.dat
\r
3716 Thu Dec 22 13:38:53 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
3717 Thu Dec 22 13:40:13 2011 VASE File c:\windows\desktop\22-12-11\crap\n1-85-test-dyn1-4700a.dat
\r
3719 Fri Dec 23 11:44:44 2011 Init User: Nick (v3.698, 6.256 DLL)
\r
3721 Fri Dec 23 11:48:26 2011
\r
3722 Fri Dec 23 11:48:26 2011 Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=3
\r
3723 Fri Dec 23 11:53:24 2011 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
3724 Fri Dec 23 11:53:27 2011 Coarse Calib: Wvl1=5000.0 Ps=2.0086±0.0067 Attn=1.0117±0.0002 As=61.062±0.006 Psi=5.045±0.017 Del=142.154±0.252 <I>=25.939, MSE=1.79 (2.01)
\r
3725 Fri Dec 23 11:53:27 2011 Coarse Calib: MSE=1.791 (2.011) AzOffset=-0.010±0.012451 ElOffset=0.037±0.044125
\r
3726 Fri Dec 23 11:54:01 2011
\r
3727 Fri Dec 23 11:54:01 2011 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
3728 Fri Dec 23 12:03:26 2011 Calib: Wvl1=5000.0 Ps=2.0141±0.0032 Attn=1.0119±0.0003 As=61.026±0.007 Psi=5.077±0.016 Del=141.799±0.238 <I>=13.532, MSE=2.23 (3.03) Synch=40.234±0.123 [40.100,40.671] M1=0.014±0.0032 [0.0041,0.018]
\r
3729 Fri Dec 23 12:03:26 2011 Calib: Wvl2=11770.0 Ps=2.0141±0.0032 IrAttn=0.9694±0.0003 IrAs=58.671±0.008 IrPsi=2.035±0.004 IrDel=30.622±0.222 <I>=9.741 MSE=2.23 (3.03) Synch=37.439±0.078 [37.342,37.726] M1=0.02±0.0029 [0.0092,0.025]
\r
3730 Fri Dec 23 12:03:26 2011 Calib: MSE=2.229 (3.035) AzOffset=0.037±0.010331 ElOffset=-0.111±0.033987 DP=0.013±0.021
\r
3731 Fri Dec 23 12:41:07 2011 VASE File c:\windows\desktop\23-12-11\crap\nife-ref-spectr-full.dat
\r
3732 Fri Dec 23 12:55:10 2011 RT File c:\windows\desktop\23-12-11\crap\nife-ref-base-pr.dat
\r
3733 Fri Dec 23 13:51:02 2011 RT File c:\windows\desktop\23-12-11\crap\nife-ref-pr-full-10deg.dat
\r
3734 Fri Dec 23 14:00:56 2011 RT File c:\windows\desktop\23-12-11\crap\nife-ref-base-sr.dat
\r
3735 Fri Dec 23 15:05:46 2011 RT File c:\windows\desktop\23-12-11\crap\nife-ref-full-sr-10deg.dat
\r
3736 Fri Dec 23 15:17:33 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
3737 Fri Dec 23 15:19:23 2011 VASE File c:\windows\desktop\23-12-11\crap\nife-ref-tmoke-test1.dat
\r
3738 Fri Dec 23 15:22:35 2011 Dynamic VASE scan started, the starting time label is 0.00 min.
\r
3739 Fri Dec 23 15:25:59 2011 VASE File c:\windows\desktop\23-12-11\crap\nife-ref-tmoke-test1.dat
\r
3741 Fri Jan 06 16:15:09 2012 Init User: Sam (v3.698, 6.256 DLL)
\r
3744 Mon Jan 09 12:47:24 2012 Init User: Sam (v3.698, 6.256 DLL)
\r
3746 Mon Jan 09 13:01:42 2012
\r
3747 Mon Jan 09 13:01:42 2012 Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=3
\r
3748 Mon Jan 09 13:06:11 2012 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
3749 Mon Jan 09 13:06:15 2012 Coarse Calib: Wvl1=5000.0 Ps=2.0520±0.0053 Attn=1.0114±0.0002 As=162.386±0.004 Psi=5.132±0.013 Del=141.726±0.180 <I>=25.527, MSE=1.31 (1.4)
\r
3750 Mon Jan 09 13:06:15 2012 Coarse Calib: MSE=1.311 (1.397) AzOffset=0.019±0.008975 ElOffset=-0.029±0.030942
\r
3751 Mon Jan 09 13:06:36 2012
\r
3752 Mon Jan 09 13:06:36 2012 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
3753 Mon Jan 09 13:16:01 2012 Calib: Wvl1=5000.0 Ps=2.0461±0.0038 Attn=1.0118±0.0003 As=162.369±0.008 Psi=5.150±0.018 Del=141.545±0.256 <I>=12.120, MSE=2.45 (3.59) Synch=-33.044±0.146 [-33.180,-32.485] M1=0.012±0.0024 [0.0046,0.015]
\r
3754 Mon Jan 09 13:16:02 2012 Calib: Wvl2=11770.0 Ps=2.0461±0.0038 IrAttn=0.9678±0.0004 IrAs=159.999±0.009 IrPsi=2.012±0.005 IrDel=31.372±0.272 <I>=8.461 MSE=2.45 (3.59) Synch=-36.037±0.090 [-36.322,-35.808] M1=0.028±0.0039 [0.015,0.032]
\r
3755 Mon Jan 09 13:16:02 2012 Calib: MSE=2.452 (3.595) AzOffset=0.040±0.011662 ElOffset=-0.097±0.035710 DP=0.015±0.023
\r
3756 Mon Jan 09 13:35:35 2012 VASE File c:\windows\desktop\9-1-12\data_files\au_si_test1_spectr.dat
\r
3757 Mon Jan 09 13:43:32 2012 VASE File c:\windows\desktop\9-1-12\data_files\au_si_test1_spectr.dat
\r
3759 Tue Jan 10 14:26:10 2012 Init User: Sam (v3.698, 6.256 DLL)
\r
3761 Tue Jan 10 16:29:06 2012 User Comment
\r
3763 Using monochromator only, as the light source for a rough spectrometer setup
\r
3767 Wed Jan 11 09:08:03 2012 Init User: Sam (v3.698, 6.256 DLL)
\r
3769 Wed Jan 11 11:50:16 2012 User Comment
\r
3771 Only using monochromator again.
\r\r
3772 Wish the monochromator would stop automatically closing...
\r
3776 Thu Jan 12 10:49:56 2012 Init User: Sam (v3.698, 6.256 DLL)
\r
3778 Thu Jan 12 10:50:08 2012 User Comment
\r
3780 Using monochromator only
\r\r
3785 Thu Jan 12 14:31:55 2012 Init User: Sam (v3.698, 6.256 DLL)
\r
3787 Thu Jan 12 17:01:13 2012 User Comment
\r
3789 Using monochromator only
\r
3793 Fri Jan 13 09:32:40 2012 Init User: Sam (v3.698, 6.256 DLL)
\r
3795 Fri Jan 13 09:32:54 2012 User Comment
\r
3797 Using monochromator only
\r
3801 Mon Jan 16 09:32:25 2012 Init User: Sam (v3.698, 6.256 DLL)
\r
3804 Mon Jan 16 11:10:20 2012 Init User: Sam (v3.698, 6.256 DLL)
\r
3806 Mon Jan 16 17:04:37 2012 User Comment
\r
3808 Using monochromator only
\r
3812 Tue Jan 17 12:24:10 2012 Init User: Sam (v3.698, 6.256 DLL)
\r
3814 Tue Jan 17 12:24:21 2012 User Comment
\r
3816 Using monochromator only
\r
3820 Wed Jan 18 09:22:50 2012 Init User: Sam (v3.698, 6.256 DLL)
\r
3822 Wed Jan 18 15:00:15 2012 Low-level data acquisition timed out. #1
\r
3823 Try re-initializing hardware.
\r
3824 If problem returns, contact J.A.Woollam Co. or a representative.
\r
3825 Wed Jan 18 16:10:57 2012 User Comment
\r
3827 Using monochromator only
\r
3831 Thu Jan 19 09:30:18 2012 Init User: Sam (v3.698, 6.256 DLL)
\r
3834 Fri Jan 20 09:42:50 2012 Init User: Sam (v3.698, 6.256 DLL)
\r
3836 Fri Jan 20 10:09:27 2012
\r
3837 Fri Jan 20 10:09:27 2012 Calib: rvs=5, pts=100, span=180.0, aoi=65.000, t=0, d=3
\r
3838 Fri Jan 20 10:09:45 2012 Auto Retarder Did Not Home: status=#0x0, i=0
\r
3839 Fri Jan 20 10:10:01 2012
\r
3840 Fri Jan 20 10:10:01 2012 Calib: rvs=5, pts=100, span=180.0, aoi=65.000, t=0, d=3
\r
3841 Fri Jan 20 10:10:20 2012 Auto Retarder Did Not Home: status=#0x0, i=0
\r
3842 Fri Jan 20 10:12:56 2012
\r
3843 Fri Jan 20 10:12:56 2012 Calib: rvs=5, pts=100, span=180.0, aoi=65.000, t=0, d=3
\r
3844 Fri Jan 20 10:13:14 2012 Auto Retarder Did Not Home: status=#0x0, i=0
\r
3845 Fri Jan 20 10:18:55 2012
\r
3846 Fri Jan 20 10:18:55 2012 Calib: rvs=5, pts=100, span=180.0, aoi=65.000, t=0, d=3
\r
3847 Fri Jan 20 10:19:14 2012 Auto Retarder Did Not Home: status=#0x0, i=0
\r
3848 Fri Jan 20 10:24:02 2012
\r
3849 Fri Jan 20 10:24:02 2012 Calib: rvs=5, pts=100, span=180.0, aoi=65.000, t=0, d=3
\r
3850 Fri Jan 20 10:24:21 2012 Auto Retarder Did Not Home: status=#0x0, i=0
\r
3851 Fri Jan 20 10:28:05 2012
\r
3852 Fri Jan 20 10:28:05 2012 Calib: rvs=5, pts=100, span=180.0, aoi=65.000, t=0, d=3
\r
3853 Fri Jan 20 10:28:23 2012 Auto Retarder Did Not Home: status=#0x0, i=0
\r
3854 Fri Jan 20 10:36:14 2012
\r
3855 Fri Jan 20 10:36:14 2012 Calib: rvs=5, pts=100, span=180.0, aoi=65.000, t=0, d=3
\r
3856 Fri Jan 20 10:36:33 2012 Auto Retarder Did Not Home: status=#0x0, i=0
\r
3857 Fri Jan 20 10:37:37 2012
\r
3858 Fri Jan 20 10:37:37 2012 Calib: rvs=5, pts=100, span=180.0, aoi=65.000, t=0, d=3
\r
3859 Fri Jan 20 10:37:56 2012 Auto Retarder Did Not Home: status=#0x0, i=0
\r
3860 Fri Jan 20 11:02:59 2012
\r
3861 Fri Jan 20 11:02:59 2012 Calib: rvs=5, pts=100, span=180.0, aoi=65.000, t=0, d=3
\r
3862 Fri Jan 20 11:03:17 2012 Auto Retarder Did Not Home: status=#0x0, i=0
\r
3864 Fri Jan 20 11:23:52 2012 Init User: Sam (v3.698, 6.256 DLL)
\r
3866 Fri Jan 20 11:24:16 2012
\r
3867 Fri Jan 20 11:24:16 2012 Calib: rvs=5, pts=100, span=180.0, aoi=65.000, t=0, d=3
\r
3868 Fri Jan 20 11:24:33 2012 Auto Retarder Did Not Home: status=#0x0, i=0
\r
3869 Fri Jan 20 13:02:55 2012
\r
3870 Fri Jan 20 13:02:55 2012 Calib: rvs=5, pts=100, span=180.0, aoi=65.000, t=0, d=3
\r
3871 Fri Jan 20 13:03:14 2012 Auto Retarder Did Not Home: status=#0x0, i=0
\r
3872 Fri Jan 20 13:09:06 2012 Auto Retarder Did Not Home: status=#0x0, i=0
\r
3873 Fri Jan 20 13:18:03 2012
\r
3874 Fri Jan 20 13:18:03 2012 Calib: rvs=5, pts=100, span=180.0, aoi=65.000, t=0, d=3
\r
3875 Fri Jan 20 13:20:31 2012
\r
3876 Fri Jan 20 13:20:31 2012 Calib: rvs=5, pts=100, span=180.0, aoi=65.000, t=0, d=3
\r
3877 Fri Jan 20 13:21:09 2012 Insufficient intensity at too many points to perform calibration. 5000.0Å, det=0 (15, 29) (0.0061, 0.01)
\r
3878 Fri Jan 20 13:33:25 2012
\r
3879 Fri Jan 20 13:33:25 2012 Calib: rvs=5, pts=100, span=180.0, aoi=65.000, t=0, d=3
\r
3880 Fri Jan 20 13:36:11 2012 Insufficient intensity at too many points to perform calibration. 5000.0Å, det=0 (25, 49) (0.0026, 0.01)
\r
3881 Fri Jan 20 14:04:44 2012
\r
3882 Fri Jan 20 14:04:44 2012 Calib: rvs=5, pts=100, span=180.0, aoi=65.000, t=0, d=3
\r
3883 Fri Jan 20 14:07:42 2012 Insufficient intensity at too many points to perform calibration. 5000.0Å, det=0 (32, 63) (0.0069, 0.01)
\r
3885 Fri Jan 20 14:09:13 2012 Init User: Sam (v3.698, 6.256 DLL)
\r
3888 Fri Jan 20 14:28:46 2012 Init User: Sam (v3.698, 6.256 DLL)
\r
3891 Tue Jan 31 10:01:55 2012 Init User: Sam (v3.698, 6.256 DLL)
\r
3893 Tue Jan 31 10:02:08 2012 User Comment
\r
3895 Using monochromator only
\r
3898 Wed Feb 01 12:06:51 2012 Initializing Error: Could not establish communication with the DK monochromator.
\r
3899 Wed Feb 01 12:08:13 2012 Initializing Error: MonoInitWait() DK
\r
3900 Wed Feb 01 12:08:16 2012 SendMonoCmd Error: Monochromator Command Return Failed 31. DK
\r
3902 Wed Feb 01 12:36:39 2012 Init User: Sam (v3.698, 6.256 DLL)
\r
3904 Wed Feb 01 12:59:26 2012 User Comment
\r
3906 Monochromator only
\r
3909 Wed Feb 01 15:34:47 2012
\r
3910 Wed Feb 01 15:34:47 2012 Calib: rvs=5, pts=100, span=180.0, aoi=65.000, t=0, d=3
\r
3911 Wed Feb 01 15:43:14 2012 Calib: Diagnose bd:157, 87, 18, 2, 0, 0, 0, 0, 0, 0, pxy51=3.8,2.73,0.00,0.00 (4, 5, 8, 3, 5, 5, 3, 2, 2, 227)
\r
3912 Wed Feb 01 15:43:14 2012 Coarse Calibration was not successful.
\r
3913 Wed Feb 01 15:43:31 2012 Coarse Calib: Wvl1=5000.0 Ps=1.5856±0.7791 Attn=1.0062±0.0088 As=91.567±0.452 Psi=20.395±0.307 Del=172.686±3.447 <I>=0.026, MSE=1.18 (110)
\r
3914 Wed Feb 01 15:43:32 2012 Coarse Calib: MSE=1.180 (110.077) AzOffset=0.035±0.193587 ElOffset=-0.051±0.264982
\r
3915 Wed Feb 01 15:43:43 2012
\r
3916 Wed Feb 01 15:43:43 2012 Calib: rvs=5, pts=100, span=180.0, aoi=65.000, t=0, d=3
\r
3917 Wed Feb 01 15:50:08 2012 Calib: Diagnose bd:159, 77, 23, 5, 0, 0, 0, 0, 0, 0, pxy89=3.4,73.41,0.00,0.00 (5, 2, 2, 3, 4, 4, 6, 4, 3, 231, wpxy49=0.4915,0.68,0.00,0.00)
\r
3918 Wed Feb 01 15:50:08 2012 Coarse Calibration was not successful.
\r
3919 Wed Feb 01 15:50:14 2012 Coarse Calib: Wvl1=5000.0 Ps=1.2295±0.8066 Attn=1.0038±0.0091 As=91.988±0.462 Psi=20.262±0.353 Del=167.376±3.594 <I>=0.026, MSE=1.22 (93.8)
\r
3920 Wed Feb 01 15:50:14 2012 Coarse Calib: MSE=1.223 (93.848) AzOffset=0.133±0.187098 ElOffset=0.076±0.320537
\r
3921 Wed Feb 01 15:54:18 2012
\r
3922 Wed Feb 01 15:54:18 2012 Calib: rvs=5, pts=100, span=180.0, aoi=65.000, t=0, d=3
\r
3923 Wed Feb 01 16:02:31 2012 Calib: Diagnose bd:137, 84, 36, 7, 0, 0, 0, 0, 0, 0, pxy14=3.5,-63.31,0.00,0.00 (9, 11, 16, 14, 14, 7, 9, 10, 15, 159, wpxy50=0.1427,2.14,0.00,0.00)
\r
3924 Wed Feb 01 16:02:31 2012 Coarse Calibration was not successful.
\r
3925 Wed Feb 01 16:04:58 2012 Coarse Calib: Wvl1=5000.0 Ps=1.7209±0.2650 Attn=1.0179±0.0030 As=91.698±0.151 Psi=20.245±0.108 Del=169.911±1.150 <I>=0.091, MSE=1.4 (27.6)
\r
3926 Wed Feb 01 16:04:58 2012 Coarse Calib: MSE=1.397 (27.592) AzOffset=0.004±0.062119 ElOffset=-0.054±0.096945
\r
3928 Wed Feb 01 16:17:23 2012 Init User: Sam (v3.698, 6.256 DLL)
\r
3930 Wed Feb 01 16:32:45 2012
\r
3931 Wed Feb 01 16:32:45 2012 Calib: rvs=5, pts=100, span=180.0, aoi=65.000, t=0, d=3
\r
3932 Wed Feb 01 16:37:14 2012 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
3933 Wed Feb 01 16:37:18 2012 Coarse Calib: Wvl1=5000.0 Ps=1.9548±0.0051 Attn=1.0145±0.0002 As=66.195±0.006 Psi=20.254±0.004 Del=170.130±0.052 <I>=17.727, MSE=1.08 (0.778)
\r
3934 Wed Feb 01 16:37:18 2012 Coarse Calib: MSE=1.084 (0.778) AzOffset=0.036±0.002803 ElOffset=0.096±0.004302
\r
3935 Wed Feb 01 16:39:54 2012
\r
3936 Wed Feb 01 16:39:54 2012 Calib: rvs=5, pts=100, span=180.0, aoi=65.000, t=0, d=3
\r
3937 Wed Feb 01 16:42:35 2012 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
3938 Wed Feb 01 16:42:39 2012 Coarse Calib: Wvl1=5000.0 Ps=1.9605±0.0056 Attn=1.0146±0.0002 As=66.171±0.006 Psi=20.251±0.005 Del=170.120±0.056 <I>=17.681, MSE=1.19 (0.861)
\r
3939 Wed Feb 01 16:42:39 2012 Coarse Calib: MSE=1.187 (0.861) AzOffset=0.001±0.003070 ElOffset=-0.009±0.004707
\r
3940 Wed Feb 01 16:43:02 2012
\r
3941 Wed Feb 01 16:43:02 2012 Calib: rvs=30, pts=60, span=60.0, aoi=65.000, t=1, d=3
\r
3942 Wed Feb 01 16:52:20 2012 Calib: Wvl1=5000.0 Ps=1.9525±0.0026 Attn=1.0149±0.0002 As=66.172±0.005 Psi=20.253±0.004 Del=170.142±0.036 <I>=10.513, MSE=1.01 (0.551) Synch=-176.074±0.014 [-176.109,-176.028] M1=0.0056±0.0026 [0.0011,0.0093]
\r
3943 Wed Feb 01 16:52:20 2012 Calib: Wvl2=11770.0 Ps=1.9525±0.0026 IrAttn=0.9721±0.0002 IrAs=63.962±0.006 IrPsi=15.354±0.002 IrDel=175.547±0.186 <I>=10.719 MSE=1.01 (0.551) Synch=-179.117±0.012 [-179.149,-179.092] M1=0.023±0.0068 [0.011,0.033]
\r
3944 Wed Feb 01 16:52:20 2012 Calib: MSE=1.012 (0.551) AzOffset=-0.002±0.001994 ElOffset=0.001±0.003054 DP=0.018±0.019
\r
3946 Thu Feb 02 10:03:52 2012 Init User: Sam (v3.698, 6.256 DLL)
\r
3948 Thu Feb 02 10:06:03 2012
\r
3949 Thu Feb 02 10:06:03 2012 Calib: rvs=5, pts=100, span=180.0, aoi=65.000, t=0, d=3
\r
3950 Thu Feb 02 10:10:32 2012 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
3951 Thu Feb 02 10:10:35 2012 Coarse Calib: Wvl1=5000.0 Ps=1.9815±0.0066 Attn=1.0131±0.0002 As=155.136±0.007 Psi=20.257±0.006 Del=170.377±0.068 <I>=20.208, MSE=1.43 (1.02)
\r
3952 Thu Feb 02 10:10:36 2012 Coarse Calib: MSE=1.432 (1.021) AzOffset=-0.010±0.003710 ElOffset=-0.007±0.005625
\r
3953 Thu Feb 02 10:13:44 2012
\r
3954 Thu Feb 02 10:13:44 2012 Calib: rvs=5, pts=100, span=180.0, aoi=65.000, t=0, d=3
\r
3955 Thu Feb 02 10:16:26 2012 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
3956 Thu Feb 02 10:16:28 2012 Coarse Calib: Wvl1=5000.0 Ps=1.9876±0.0069 Attn=1.0134±0.0002 As=155.058±0.008 Psi=20.251±0.006 Del=170.392±0.071 <I>=20.053, MSE=1.49 (1.07)
\r
3957 Thu Feb 02 10:16:28 2012 Coarse Calib: MSE=1.494 (1.067) AzOffset=-0.007±0.003871 ElOffset=-0.013±0.005866
\r
3958 Thu Feb 02 10:17:33 2012
\r
3959 Thu Feb 02 10:17:33 2012 Calib: rvs=30, pts=60, span=60.0, aoi=65.000, t=1, d=3
\r
3960 Thu Feb 02 10:26:51 2012 Calib: Wvl1=5000.0 Ps=1.9842±0.0025 Attn=1.0139±0.0001 As=155.016±0.005 Psi=20.256±0.004 Del=170.422±0.035 <I>=11.828, MSE=0.985 (0.536) Synch=112.125±0.020 [112.071,112.165] M1=0.01±0.0021 [0.0057,0.013]
\r
3961 Thu Feb 02 10:26:51 2012 Calib: Wvl2=11770.0 Ps=1.9842±0.0025 IrAttn=0.9714±0.0002 IrAs=152.762±0.006 IrPsi=15.351±0.002 IrDel=175.657±0.184 <I>=11.590 MSE=0.985 (0.536) Synch=109.182±0.018 [109.146,109.229] M1=0.012±0.0057 [0.004,0.02]
\r
3962 Thu Feb 02 10:26:51 2012 Calib: MSE=0.985 (0.536) AzOffset=0.005±0.001947 ElOffset=0.006±0.002947 DP=0.001±0.019
\r
3963 Thu Feb 02 10:33:33 2012 VASE File c:\windows\desktop\2-2-12\data_files\si_test.dat Testing Ellipsometer with calibration wafer
\r
3964 Thu Feb 02 11:37:38 2012 VASE File c:\windows\desktop\2-2-12\data_files\ag_si.dat Ag on Si (1e-6 mbar, 3.2A, 1.5min)
\r
3965 Thu Feb 02 12:07:22 2012 VASE File c:\windows\desktop\2-2-12\data_files\black-ag_si.dat Ag-black on Si (0.18 mbar, 3.7A, 0.5min)
\r
3967 Thu Feb 02 14:18:05 2012 Init User: Sam (v3.698, 6.256 DLL)
\r
3970 Fri Feb 03 10:46:36 2012 Init User: Sam (v3.698, 6.256 DLL)
\r
3973 Fri Feb 03 11:06:03 2012 Init User: Sam (v3.698, 6.256 DLL)
\r
3975 Fri Feb 03 11:44:38 2012
\r
3976 Fri Feb 03 11:44:38 2012 Calib: rvs=5, pts=100, span=180.0, aoi=65.000, t=0, d=3
\r
3977 Fri Feb 03 11:49:08 2012 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
3978 Fri Feb 03 11:49:11 2012 Coarse Calib: Wvl1=5000.0 Ps=2.0197±0.0043 Attn=1.0152±0.0001 As=158.847±0.005 Psi=20.264±0.004 Del=170.689±0.044 <I>=17.687, MSE=0.926 (0.663)
\r
3979 Fri Feb 03 11:49:11 2012 Coarse Calib: MSE=0.926 (0.663) AzOffset=0.019±0.002419 ElOffset=-0.004±0.003617
\r
3980 Fri Feb 03 12:01:56 2012
\r
3981 Fri Feb 03 12:01:56 2012 Calib: rvs=30, pts=60, span=60.0, aoi=65.000, t=1, d=3
\r
3982 Fri Feb 03 12:11:13 2012 Calib: Wvl1=5000.0 Ps=2.0211±0.0023 Attn=1.0158±0.0001 As=158.828±0.004 Psi=20.275±0.003 Del=170.688±0.032 <I>=10.513, MSE=0.877 (0.478) Synch=29.286±0.012 [29.262,29.312] M1=0.0035±0.00077 [0.0022,0.0054]
\r
3983 Fri Feb 03 12:11:14 2012 Calib: Wvl2=11770.0 Ps=2.0211±0.0023 IrAttn=0.9724±0.0002 IrAs=156.614±0.006 IrPsi=15.350±0.002 IrDel=175.958±0.177 <I>=11.581 MSE=0.877 (0.478) Synch=26.465±0.042 [26.418,26.598] M1=0.022±0.0057 [0.011,0.03]
\r
3984 Fri Feb 03 12:11:14 2012 Calib: MSE=0.877 (0.478) AzOffset=-0.006±0.001745 ElOffset=0.003±0.002610 DP=-0.010±0.017
\r
3985 Fri Feb 03 14:33:46 2012 VASE File c:\windows\desktop\3-2-12\data_files\au_si.dat Au on Si (3.2A 1.5min 1e-6mbar) - Note: Couldn't align sample precisely
\r
3986 Fri Feb 03 14:57:48 2012 VASE File c:\windows\desktop\3-2-12\data_files\black-au_si.dat Black-Au on Si (3.7A 0.5min 0.18mbar) - Note: Low intensity
\r
3987 Fri Feb 03 15:35:35 2012 VASE File c:\windows\desktop\3-2-12\data_files\au_si_(thick).dat Gold on Si (Unknown preparation, thick yellow colour)
\r
3989 Mon Feb 06 09:32:26 2012 Init User: Sam (v3.698, 6.256 DLL)
\r
3991 Mon Feb 06 09:39:23 2012
\r
3992 Mon Feb 06 09:39:23 2012 Calib: rvs=5, pts=100, span=180.0, aoi=80.000, t=0, d=3
\r
3993 Mon Feb 06 09:43:52 2012 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
3994 Mon Feb 06 09:43:56 2012 Coarse Calib: Wvl1=5000.0 Ps=2.0221±0.0072 Attn=1.0126±0.0003 As=136.224±0.008 Psi=9.266±0.015 Del=24.328±0.200 <I>=22.106, MSE=2.24 (1.71)
\r
3995 Mon Feb 06 09:43:56 2012 Coarse Calib: MSE=2.236 (1.709) AzOffset=0.037±0.029202 ElOffset=-0.002±0.009671
\r
3996 Mon Feb 06 09:45:46 2012
\r
3997 Mon Feb 06 09:45:46 2012 Calib: rvs=30, pts=60, span=60.0, aoi=80.000, t=1, d=3
\r
3998 Mon Feb 06 09:55:05 2012 Calib: Wvl1=5000.0 Ps=2.0213±0.0020 Attn=1.0132±0.0002 As=136.163±0.005 Psi=9.266±0.007 Del=24.258±0.091 <I>=10.815, MSE=1.33 (0.756) Synch=-31.539±0.018 [-31.578,-31.494] M1=0.0026±0.0012 [0.00077,0.0047]
\r
3999 Mon Feb 06 09:55:05 2012 Calib: Wvl2=11770.0 Ps=2.0213±0.0020 IrAttn=0.9713±0.0003 IrAs=133.882±0.006 IrPsi=13.806±0.002 IrDel=4.815±0.222 <I>=16.576 MSE=1.33 (0.756) Synch=-34.425±0.015 [-34.462,-34.403] M1=0.03±0.0094 [0.015,0.044]
\r
4000 Mon Feb 06 09:55:05 2012 Calib: MSE=1.326 (0.756) AzOffset=-0.055±0.013130 ElOffset=0.013±0.004345 DP=-0.006±0.016
\r
4001 Mon Feb 06 10:38:30 2012 VASE File c:\windows\desktop\6-2-12\si.dat Si (control)
\r
4002 Mon Feb 06 10:53:37 2012
\r
4003 Mon Feb 06 10:53:37 2012 Calib: rvs=5, pts=100, span=180.0, aoi=80.000, t=0, d=3
\r
4004 Mon Feb 06 10:58:07 2012 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
4005 Mon Feb 06 10:58:09 2012 Coarse Calib: Wvl1=5000.0 Ps=2.0237±0.0047 Attn=1.0146±0.0002 As=136.022±0.005 Psi=9.298±0.010 Del=23.828±0.136 <I>=23.692, MSE=1.51 (1.19)
\r
4006 Mon Feb 06 10:58:09 2012 Coarse Calib: MSE=1.515 (1.191) AzOffset=-0.023±0.019400 ElOffset=0.019±0.006588
\r
4007 Mon Feb 06 10:59:57 2012
\r
4008 Mon Feb 06 10:59:57 2012 Calib: rvs=30, pts=60, span=60.0, aoi=80.000, t=1, d=3
\r
4009 Mon Feb 06 11:09:19 2012 Calib: Wvl1=5000.0 Ps=2.0195±0.0016 Attn=1.0151±0.0001 As=136.016±0.004 Psi=9.295±0.005 Del=23.785±0.074 <I>=11.735, MSE=1.08 (0.62) Synch=-31.086±0.024 [-31.122,-31.039] M1=0.0048±0.002 [0.0019,0.0079]
\r
4010 Mon Feb 06 11:09:19 2012 Calib: Wvl2=11770.0 Ps=2.0195±0.0016 IrAttn=0.9721±0.0002 IrAs=133.806±0.005 IrPsi=13.871±0.002 IrDel=5.613±0.155 <I>=17.441 MSE=1.08 (0.62) Synch=-34.039±0.045 [-34.152,-33.984] M1=0.014±0.0029 [0.0082,0.019]
\r
4011 Mon Feb 06 11:09:19 2012 Calib: MSE=1.078 (0.620) AzOffset=-0.014±0.010550 ElOffset=0.009±0.003583 DP=0.167±0.013
\r
4012 Mon Feb 06 12:00:07 2012 VASE File c:\windows\desktop\6-2-12\ag_si.dat Ag on Si (1e-6mbar 3.2A 1.5min)
\r
4013 Mon Feb 06 12:48:41 2012 VASE File c:\windows\desktop\6-2-12\black-ag_si.dat Black-Ag on Si (0.18mbar 3.7A 0.5min)
\r
4014 Mon Feb 06 15:04:31 2012
\r
4015 Mon Feb 06 15:04:31 2012 Calib: rvs=5, pts=100, span=180.0, aoi=80.000, t=0, d=3
\r
4016 Mon Feb 06 15:09:00 2012 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
4017 Mon Feb 06 15:09:03 2012 Coarse Calib: Wvl1=5000.0 Ps=2.0208±0.0073 Attn=1.0157±0.0003 As=135.942±0.008 Psi=9.286±0.015 Del=24.363±0.209 <I>=23.569, MSE=2.34 (1.74)
\r
4018 Mon Feb 06 15:09:04 2012 Coarse Calib: MSE=2.340 (1.737) AzOffset=0.013±0.030592 ElOffset=-0.005±0.010140
\r
4019 Mon Feb 06 15:17:01 2012
\r
4020 Mon Feb 06 15:17:01 2012 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
4021 Mon Feb 06 15:26:29 2012 Calib: Wvl1=5000.0 Ps=2.0308±0.0033 Attn=1.0163±0.0003 As=135.942±0.007 Psi=5.593±0.017 Del=135.800±0.185 <I>=10.096, MSE=2.08 (3.21) Synch=-30.797±0.031 [-30.841,-30.702] M1=0.0026±0.00095 [0.0011,0.0082]
\r
4022 Mon Feb 06 15:26:29 2012 Calib: Wvl2=11770.0 Ps=2.0308±0.0033 IrAttn=0.9731±0.0003 IrAs=133.760±0.008 IrPsi=2.158±0.004 IrDel=36.044±0.159 <I>=9.676 MSE=2.08 (3.21) Synch=-33.810±0.080 [-33.887,-33.459] M1=0.023±0.0039 [0.0015,0.026]
\r
4023 Mon Feb 06 15:26:29 2012 Calib: MSE=2.082 (3.206) AzOffset=-0.053±0.008960 ElOffset=0.101±0.022757 DP=0.004±0.024
\r
4024 Mon Feb 06 15:47:40 2012 VASE File c:\windows\desktop\6-2-12\calibration_si.dat Calibration Wafer
\r
4026 Wed Feb 08 12:13:13 2012 Init User: Sam (v3.698, 6.256 DLL)
\r
4028 Wed Feb 08 12:15:26 2012 Low-level data acquisition timed out. #2
\r
4029 Try re-initializing hardware.
\r
4030 If problem returns, contact J.A.Woollam Co. or a representative.
\r
4032 Wed Feb 08 12:21:55 2012 Init User: Sam (v3.698, 6.256 DLL)
\r
4035 Wed Feb 08 14:44:36 2012 Init User: Sam (v3.698, 6.256 DLL)
\r
4038 Thu Feb 09 11:09:36 2012 Init User: Sam (v3.698, 6.256 DLL)
\r
4040 Thu Feb 09 11:09:58 2012
\r
4041 Thu Feb 09 11:09:58 2012 Calib: rvs=5, pts=100, span=180.0, aoi=65.000, t=0, d=3
\r
4042 Thu Feb 09 11:22:17 2012
\r
4043 Thu Feb 09 11:22:17 2012 Calib: rvs=5, pts=100, span=180.0, aoi=65.000, t=0, d=3
\r
4044 Thu Feb 09 11:26:45 2012 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
4045 Thu Feb 09 11:26:48 2012 Coarse Calib: Wvl1=5000.0 Ps=2.0442±0.0113 Attn=1.0132±0.0002 As=177.532±0.009 Psi=20.263±0.006 Del=171.001±0.066 <I>=2.121, MSE=1.12 (1.22)
\r
4046 Thu Feb 09 11:26:48 2012 Coarse Calib: MSE=1.119 (1.224) AzOffset=-0.019±0.003632 ElOffset=0.005±0.005371
\r
4048 Mon Feb 13 15:09:44 2012 Init User: Sam (v3.698, 6.256 DLL)
\r
4050 Mon Feb 13 15:16:34 2012
\r
4051 Mon Feb 13 15:16:34 2012 Calib: rvs=5, pts=100, span=180.0, aoi=65.000, t=0, d=3
\r
4052 Mon Feb 13 15:21:02 2012 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
4053 Mon Feb 13 15:21:05 2012 Coarse Calib: Wvl1=5000.0 Ps=2.0825±0.0076 Attn=1.0128±0.0002 As=162.133±0.008 Psi=20.255±0.006 Del=171.189±0.077 <I>=19.164, MSE=1.63 (1.16)
\r
4054 Mon Feb 13 15:21:06 2012 Coarse Calib: MSE=1.626 (1.158) AzOffset=-0.011±0.004271 ElOffset=0.006±0.006250
\r
4055 Mon Feb 13 15:24:57 2012
\r
4056 Mon Feb 13 15:24:57 2012 Calib: rvs=30, pts=60, span=60.0, aoi=65.000, t=1, d=3
\r
4057 Mon Feb 13 15:34:15 2012 Calib: Wvl1=5000.0 Ps=2.0819±0.0025 Attn=1.0133±0.0001 As=162.079±0.005 Psi=20.259±0.003 Del=171.177±0.035 <I>=11.378, MSE=0.974 (0.529) Synch=-174.591±0.012 [-174.623,-174.554] M1=0.0081±0.0022 [0.004,0.012]
\r
4058 Mon Feb 13 15:34:15 2012 Calib: Wvl2=11770.0 Ps=2.0819±0.0025 IrAttn=0.9716±0.0002 IrAs=159.811±0.006 IrPsi=15.349±0.002 IrDel=175.940±0.195 <I>=12.546 MSE=0.974 (0.529) Synch=-177.434±0.017 [-177.476,-177.396] M1=0.013±0.0057 [0.0045,0.022]
\r
4059 Mon Feb 13 15:34:15 2012 Calib: MSE=0.974 (0.529) AzOffset=-0.001±0.001950 ElOffset=-0.007±0.002855 DP=0.010±0.018
\r
4060 Mon Feb 13 15:50:28 2012 RT File c:\windows\desktop\13-2-12\glass.dat Microscope slide glass. R&T Scan
\r
4061 Mon Feb 13 16:05:59 2012 RT File c:\windows\desktop\13-2-12\glass.dat Microscope slide glass. R&T Scan
\r
4062 Mon Feb 13 16:36:55 2012 VASE File c:\windows\desktop\13-2-12\glass-spectroscopic.dat Microscope slide glass. Spectroscopic Scan
\r
4064 Tue Feb 14 09:35:43 2012 Init User: Sam (v3.698, 6.256 DLL)
\r
4066 Tue Feb 14 09:41:38 2012
\r
4067 Tue Feb 14 09:41:38 2012 Calib: rvs=5, pts=100, span=180.0, aoi=65.000, t=0, d=3
\r
4068 Tue Feb 14 09:46:06 2012 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
4069 Tue Feb 14 09:46:08 2012 Coarse Calib: Wvl1=5000.0 Ps=2.1203±0.0069 Attn=1.0129±0.0002 As=50.471±0.008 Psi=20.256±0.006 Del=171.178±0.070 <I>=19.423, MSE=1.48 (1.06)
\r
4070 Tue Feb 14 09:46:08 2012 Coarse Calib: MSE=1.484 (1.059) AzOffset=-0.004±0.003895 ElOffset=-0.007±0.005705
\r
4071 Tue Feb 14 09:48:55 2012
\r
4072 Tue Feb 14 09:48:55 2012 Calib: rvs=30, pts=60, span=60.0, aoi=65.000, t=1, d=3
\r
4073 Tue Feb 14 09:58:14 2012 Calib: Wvl1=5000.0 Ps=2.1190±0.0022 Attn=1.0135±0.0001 As=50.396±0.004 Psi=20.261±0.003 Del=171.172±0.031 <I>=11.585, MSE=0.862 (0.468) Synch=-175.422±0.010 [-175.441,-175.398] M1=0.0073±0.0025 [0.0028,0.01]
\r
4074 Tue Feb 14 09:58:15 2012 Calib: Wvl2=11770.0 Ps=2.1190±0.0022 IrAttn=0.9714±0.0002 IrAs=48.123±0.005 IrPsi=15.346±0.002 IrDel=175.947±0.172 <I>=12.419 MSE=0.862 (0.468) Synch=-178.324±0.023 [-178.376,-178.289] M1=0.013±0.0033 [0.0069,0.018]
\r
4075 Tue Feb 14 09:58:15 2012 Calib: MSE=0.862 (0.468) AzOffset=0.003±0.001724 ElOffset=-0.010±0.002526 DP=-0.005±0.016
\r
4076 Tue Feb 14 10:44:11 2012 RT File c:\windows\desktop\14-2-12\au-glass-r&t.dat Au on Glass (1e-5 mbar, 3.2A, 9min) R&T
\r
4077 Tue Feb 14 11:19:24 2012 VASE File c:\windows\desktop\14-2-12\au-glass-spectro.dat Au on Glass (1e-5 mbar, 3.2A, 9min) Spectroscopic Scan
\r
4078 Tue Feb 14 11:48:29 2012 VASE File c:\windows\desktop\14-2-12\black-au_glass.dat Black-Au on Glass (0.18 mbar, 3.3A, 4min) Spectroscopic Scan
\r
4079 Tue Feb 14 11:51:25 2012 VASE File c:\windows\desktop\14-2-12\black-au_glass.dat Black-Au on Glass (0.18 mbar, 3.3A, 4min) Spectroscopic Scan
\r
4080 Tue Feb 14 12:20:55 2012 VASE File c:\windows\desktop\14-2-12\black-au_glass.dat Black-Au on Glass (0.18 mbar, 3.3A, 4min) Spectroscopic Scan
\r
4082 Tue Feb 14 14:51:21 2012 Init User: Sam (v3.698, 6.256 DLL)
\r
4085 Tue Feb 14 15:07:30 2012 Init User: Sam (v3.698, 6.256 DLL)
\r
4087 Tue Feb 14 15:09:32 2012
\r
4088 Tue Feb 14 15:09:32 2012 Calib: rvs=30, pts=60, span=60.0, aoi=65.000, t=1, d=3
\r
4089 Tue Feb 14 15:20:43 2012 Calib: Wvl1=5000.0 Ps=2.1521±0.0027 Attn=1.0151±0.0002 As=154.916±0.005 Psi=20.257±0.004 Del=171.113±0.038 <I>=10.622, MSE=1.05 (0.572) Synch=-117.299±0.028 [-117.353,-117.240] M1=0.0028±0.0018 [0.00026,0.0054]
\r
4090 Tue Feb 14 15:20:44 2012 Calib: Wvl2=11770.0 Ps=2.1521±0.0027 IrAttn=0.9723±0.0002 IrAs=152.680±0.007 IrPsi=15.343±0.002 IrDel=175.786±0.202 <I>=12.389 MSE=1.05 (0.572) Synch=-120.104±0.024 [-120.159,-120.041] M1=0.021±0.0055 [0.01,0.028]
\r
4091 Tue Feb 14 15:20:44 2012 Calib: MSE=1.050 (0.572) AzOffset=-0.007±0.002104 ElOffset=-0.004±0.003090 DP=0.012±0.020
\r
4092 Tue Feb 14 16:07:30 2012 VASE File c:\windows\desktop\14-2-12\black-au_si.dat Black-Au (3.2A 1min 0.18mbar He) Spectroscopic
\r
4094 Thu Feb 16 09:26:57 2012 Init User: Sam (v3.698, 6.256 DLL)
\r
4096 Thu Feb 16 09:33:05 2012
\r
4097 Thu Feb 16 09:33:05 2012 Calib: rvs=5, pts=100, span=180.0, aoi=65.000, t=0, d=3
\r
4098 Thu Feb 16 09:37:33 2012 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
4099 Thu Feb 16 09:37:37 2012 Coarse Calib: Wvl1=5000.0 Ps=2.1779±0.0067 Attn=1.0132±0.0002 As=108.171±0.007 Psi=20.259±0.006 Del=171.161±0.068 <I>=18.910, MSE=1.43 (1.02)
\r
4100 Thu Feb 16 09:37:37 2012 Coarse Calib: MSE=1.432 (1.023) AzOffset=-0.007±0.003759 ElOffset=-0.009±0.005509
\r
4101 Thu Feb 16 09:37:55 2012
\r
4102 Thu Feb 16 09:37:55 2012 Calib: rvs=30, pts=60, span=60.0, aoi=65.000, t=1, d=3
\r
4103 Thu Feb 16 09:47:14 2012 Calib: Wvl1=5000.0 Ps=2.1851±0.0025 Attn=1.0133±0.0001 As=108.140±0.005 Psi=20.255±0.003 Del=171.166±0.035 <I>=11.141, MSE=0.965 (0.524) Synch=-31.424±0.015 [-31.460,-31.385] M1=0.0089±0.0017 [0.0052,0.012]
\r
4104 Thu Feb 16 09:47:14 2012 Calib: Wvl2=11770.0 Ps=2.1851±0.0025 IrAttn=0.9715±0.0002 IrAs=105.881±0.006 IrPsi=15.341±0.002 IrDel=175.944±0.193 <I>=12.322 MSE=0.965 (0.524) Synch=-34.310±0.028 [-34.378,-34.264] M1=0.014±0.0049 [0.0065,0.022]
\r
4105 Thu Feb 16 09:47:14 2012 Calib: MSE=0.965 (0.524) AzOffset=0.003±0.001931 ElOffset=0.003±0.002830 DP=0.000±0.018
\r
4106 Thu Feb 16 10:04:30 2012 RT File c:\windows\desktop\16-2-12\calibration_test.dat Testing Reflection Measurements on Calibration Wafer
\r
4107 Thu Feb 16 10:57:56 2012 RT File c:\windows\desktop\16-2-12\calibration_test.dat Testing Reflection Measurements on Calibration Wafer
\r
4108 Thu Feb 16 15:20:42 2012 RT File c:\windows\desktop\16-2-12\black-au_si.dat Black-Au on Si (0.18mbar He, 3.2A, 1min)
\r
4110 Fri Feb 17 09:55:20 2012 Init User: Sam (v3.698, 6.256 DLL)
\r
4113 Fri Feb 17 10:33:18 2012 Init User: Sam (v3.698, 6.256 DLL)
\r
4115 Fri Feb 17 10:38:34 2012
\r
4116 Fri Feb 17 10:38:34 2012 Calib: rvs=5, pts=100, span=180.0, aoi=65.000, t=0, d=3
\r
4117 Fri Feb 17 10:43:03 2012 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
4118 Fri Feb 17 10:43:06 2012 Coarse Calib: Wvl1=5000.0 Ps=2.2090±0.0060 Attn=1.0142±0.0002 As=92.606±0.007 Psi=20.257±0.005 Del=171.375±0.061 <I>=17.366, MSE=1.29 (0.925)
\r
4119 Fri Feb 17 10:43:06 2012 Coarse Calib: MSE=1.289 (0.925) AzOffset=-0.000±0.003403 ElOffset=-0.001±0.004942
\r
4120 Fri Feb 17 10:43:17 2012
\r
4121 Fri Feb 17 10:43:17 2012 Calib: rvs=30, pts=60, span=60.0, aoi=65.000, t=1, d=3
\r
4122 Fri Feb 17 10:52:36 2012 Calib: Wvl1=5000.0 Ps=2.2224±0.0025 Attn=1.0143±0.0001 As=92.562±0.004 Psi=20.246±0.003 Del=171.333±0.035 <I>=10.265, MSE=0.96 (0.524) Synch=169.248±0.010 [169.225,169.278] M1=0.0044±0.0021 [0.00044,0.0072]
\r
4123 Fri Feb 17 10:52:36 2012 Calib: Wvl2=11770.0 Ps=2.2224±0.0025 IrAttn=0.9712±0.0002 IrAs=90.295±0.006 IrPsi=15.341±0.002 IrDel=175.778±0.185 <I>=11.974 MSE=0.96 (0.524) Synch=166.439±0.018 [166.414,166.474] M1=0.013±0.004 [0.006,0.019]
\r
4124 Fri Feb 17 10:52:36 2012 Calib: MSE=0.960 (0.524) AzOffset=0.003±0.001931 ElOffset=0.002±0.002809 DP=0.030±0.018
\r
4125 Fri Feb 17 11:28:50 2012 VASE File c:\windows\desktop\17-2-12\black-au_si.dat Black-Au on Si (3.2A 1min 0.18mbar He) NOTE: Surface has been scratched slightly after accidentally being dropped
\r
4126 Fri Feb 17 12:10:48 2012 VASE File c:\windows\desktop\17-2-12\black-ag_si.dat Black-Ag on Si (3.2A 0.5min 0.18mbar He)
\r
4127 Fri Feb 17 12:53:04 2012 VASE File c:\windows\desktop\17-2-12\black-au_si.dat Black-Au on Si (3.2A 1min 0.18mbar He)
\r
4129 Mon Feb 20 10:38:53 2012 Init User: Sam (v3.698, 6.256 DLL)
\r
4132 Mon Feb 20 11:31:00 2012 Init User: Sam (v3.698, 6.256 DLL)
\r
4134 Mon Feb 20 11:33:39 2012
\r
4135 Mon Feb 20 11:33:39 2012 Calib: rvs=5, pts=100, span=180.0, aoi=65.000, t=0, d=3
\r
4136 Mon Feb 20 11:38:13 2012 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
4137 Mon Feb 20 11:38:15 2012 Coarse Calib: Wvl1=5000.0 Ps=2.2607±0.0057 Attn=1.0125±0.0002 As=143.578±0.006 Psi=20.248±0.005 Del=171.035±0.058 <I>=17.298, MSE=1.22 (0.873)
\r
4138 Mon Feb 20 11:38:15 2012 Coarse Calib: MSE=1.224 (0.873) AzOffset=0.007±0.003207 ElOffset=-0.002±0.004726
\r
4139 Mon Feb 20 11:38:56 2012
\r
4140 Mon Feb 20 11:38:56 2012 Calib: rvs=30, pts=60, span=60.0, aoi=65.000, t=1, d=3
\r
4141 Mon Feb 20 11:48:13 2012 Calib: Wvl1=5000.0 Ps=2.2594±0.0023 Attn=1.0133±0.0001 As=143.511±0.004 Psi=20.251±0.003 Del=171.073±0.032 <I>=10.343, MSE=0.882 (0.479) Synch=47.971±0.006 [47.957,47.986] M1=0.0071±0.0018 [0.0036,0.0091]
\r
4142 Mon Feb 20 11:48:14 2012 Calib: Wvl2=11770.0 Ps=2.2594±0.0023 IrAttn=0.9707±0.0002 IrAs=141.213±0.006 IrPsi=15.341±0.002 IrDel=175.941±0.176 <I>=12.034 MSE=0.882 (0.479) Synch=45.257±0.012 [45.237,45.285] M1=0.012±0.004 [0.006,0.016]
\r
4143 Mon Feb 20 11:48:14 2012 Calib: MSE=0.882 (0.479) AzOffset=-0.004±0.001763 ElOffset=0.005±0.002594 DP=-0.011±0.016
\r
4144 Mon Feb 20 14:39:23 2012 RT File c:\windows\desktop\20-2-12\au_glass.dat Au on Glass (3.2A 1e-5mbar 6min)
\r
4145 Mon Feb 20 15:08:59 2012 VASE File c:\windows\desktop\20-2-12\au_glass_spectro.dat Au on Glass (3.2A 1e-5mbar 6min) Spectroscopic
\r
4147 Tue Mar 06 15:15:07 2012 Init User: Sam (v3.698, 6.256 DLL)
\r
4149 Tue Mar 06 15:19:34 2012
\r
4150 Tue Mar 06 15:19:34 2012 Calib: rvs=5, pts=100, span=180.0, aoi=75.000, t=0, d=3
\r
4151 Tue Mar 06 15:24:04 2012 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
4152 Tue Mar 06 15:24:07 2012 Coarse Calib: Wvl1=5000.0 Ps=2.2769±0.0064 Attn=1.0152±0.0002 As=144.408±0.005 Psi=5.439±0.014 Del=137.905±0.171 <I>=20.087, MSE=1.39 (1.73)
\r
4153 Tue Mar 06 15:24:08 2012 Coarse Calib: MSE=1.387 (1.727) AzOffset=0.002±0.008823 ElOffset=0.031±0.028284
\r
4154 Tue Mar 06 15:24:17 2012
\r
4155 Tue Mar 06 15:24:17 2012 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
\r
4156 Tue Mar 06 15:33:52 2012 Calib: Wvl1=5000.0 Ps=2.2807±0.0026 Attn=1.0155±0.0002 As=144.317±0.005 Psi=5.439±0.013 Del=137.835±0.150 <I>=9.378, MSE=1.6 (2.71) Synch=112.702±0.036 [112.624,112.792] M1=0.0058±0.00099 [0.002,0.0076]
\r
4157 Tue Mar 06 15:33:52 2012 Calib: Wvl2=11770.0 Ps=2.2807±0.0026 IrAttn=0.9721±0.0002 IrAs=142.103±0.006 IrPsi=2.130±0.003 IrDel=34.966±0.136 <I>=8.869 MSE=1.6 (2.71) Synch=109.633±0.064 [109.555,109.902] M1=0.018±0.0018 [0.01,0.024]
\r
4158 Tue Mar 06 15:33:52 2012 Calib: MSE=1.598 (2.707) AzOffset=0.020±0.007457 ElOffset=-0.056±0.023467 DP=0.016±0.017
\r
4159 Tue Mar 06 15:43:36 2012 VASE File c:\windows\desktop\6-3-12\data_files\calibration_scan.dat "Standard Scan" of Calibration Wafer
\r
4160 Tue Mar 06 15:44:14 2012 VASE File c:\windows\desktop\6-3-12\data_files\calibration_scan.dat uv scan Si)2 Wafer 250nm to 1000nm
\r
4161 Tue Mar 06 15:53:23 2012 VASE File c:\windows\desktop\6-3-12\data_files\calibration_scan.dat uv scan Si)2 Wafer 250nm to 1000nm
\r
4162 Tue Mar 06 16:16:58 2012 VASE File c:\windows\desktop\6-3-12\data_files\glass.dat Angular Scan of Microscope Slide Glass
\r
4163 Tue Mar 06 16:17:49 2012 VASE File c:\windows\desktop\6-3-12\data_files\glass.dat Angular Scan of Microscope Slide Glass
\r
4164 Tue Mar 06 16:39:47 2012 Goniometer limit switch error. #1
\r
4165 Tue Mar 06 16:43:31 2012 VASE File c:\windows\desktop\6-3-12\data_files\glass.dat Angular Scan of Microscope Slide Glass
\r
4166 Tue Mar 06 16:43:41 2012 Goniometer limit switch error. #1
\r
4167 Tue Mar 06 17:02:52 2012 Goniometer limit switch error. #1
\r
4168 Tue Mar 06 17:16:40 2012 VASE File c:\windows\desktop\6-3-12\data_files\si.dat Angular Scan of Si Calibration Wafer
\r
4169 Tue Mar 06 17:23:12 2012 Low-level data acquisition timed out. #2
\r
4170 Try re-initializing hardware.
\r
4171 If problem returns, contact J.A.Woollam Co. or a representative.
\r
4172 Tue Mar 06 17:23:22 2012 VASE File c:\windows\desktop\6-3-12\data_files\si.dat Angular Scan of Si Calibration Wafer
\r
4174 Tue Mar 06 17:27:04 2012 Init User: Sam (v3.698, 6.256 DLL)
\r
4177 Tue Mar 06 17:42:35 2012 Init User: Sam (v3.698, 6.256 DLL)
\r
4180 Tue Mar 06 17:44:06 2012 Init User: Sam (v3.698, 6.256 DLL)
\r
4183 Tue Mar 06 17:46:22 2012 Init User: Sam (v3.698, 6.256 DLL)
\r
4186 Wed Mar 07 09:38:13 2012 Init User: Sam (v3.698, 6.256 DLL)
\r
4188 Wed Mar 07 09:43:31 2012
\r
4189 Wed Mar 07 09:43:31 2012 Calib: rvs=5, pts=100, span=180.0, aoi=65.000, t=0, d=3
\r
4190 Wed Mar 07 09:48:00 2012 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
4191 Wed Mar 07 09:48:04 2012 Coarse Calib: Wvl1=5000.0 Ps=2.2352±0.0084 Attn=1.0134±0.0003 As=102.594±0.009 Psi=20.187±0.007 Del=171.632±0.085 <I>=16.500, MSE=1.79 (1.29)
\r
4192 Wed Mar 07 09:48:04 2012 Coarse Calib: MSE=1.785 (1.288) AzOffset=-0.000±0.004746 ElOffset=-0.018±0.006817
\r
4193 Wed Mar 07 09:57:13 2012
\r
4194 Wed Mar 07 09:57:13 2012 Calib: rvs=30, pts=60, span=60.0, aoi=65.000, t=1, d=3
\r
4195 Wed Mar 07 10:06:32 2012 Calib: Wvl1=5000.0 Ps=2.2332±0.0023 Attn=1.0138±0.0001 As=102.535±0.004 Psi=20.194±0.003 Del=171.808±0.032 <I>=9.613, MSE=0.88 (0.479) Synch=-45.365±0.020 [-45.387,-45.313] M1=0.0089±0.0026 [0.0044,0.012]
\r
4196 Wed Mar 07 10:06:32 2012 Calib: Wvl2=11770.0 Ps=2.2332±0.0023 IrAttn=0.9718±0.0002 IrAs=100.300±0.006 IrPsi=15.329±0.002 IrDel=175.914±0.176 <I>=11.013 MSE=0.88 (0.479) Synch=-48.038±0.014 [-48.059,-48.012] M1=0.014±0.0057 [0.0055,0.023]
\r
4197 Wed Mar 07 10:06:32 2012 Calib: MSE=0.880 (0.479) AzOffset=0.001±0.001787 ElOffset=0.004±0.002547 DP=-0.001±0.016
\r
4198 Wed Mar 07 10:27:56 2012 VASE File c:\windows\desktop\7-3-12\data_files\si.dat Angular scan of Si Calibration Wafer 20 -> 80 degrees
\r
4199 Wed Mar 07 11:03:50 2012 VASE File c:\windows\desktop\7-3-12\data_files\si.dat Angular scan of Si Calibration Wafer 20 -> 80 degrees
\r
4200 Wed Mar 07 14:19:00 2012
\r
4201 Wed Mar 07 14:19:00 2012 Calib: rvs=30, pts=60, span=60.0, aoi=80.000, t=1, d=3
\r
4202 Wed Mar 07 14:30:05 2012 Calib: Wvl1=5000.0 Ps=2.2330±0.0017 Attn=1.0147±0.0001 As=102.405±0.004 Psi=9.063±0.005 Del=20.992±0.078 <I>=9.054, MSE=1.09 (0.643) Synch=-45.348±0.027 [-45.382,-45.278] M1=0.0076±0.0013 [0.0046,0.0098]
\r
4203 Wed Mar 07 14:30:05 2012 Calib: Wvl2=11770.0 Ps=2.2330±0.0017 IrAttn=0.9725±0.0002 IrAs=100.228±0.005 IrPsi=13.851±0.002 IrDel=4.389±0.202 <I>=14.020 MSE=1.09 (0.643) Synch=-48.064±0.014 [-48.082,-48.031] M1=0.014±0.0045 [0.0062,0.02]
\r
4204 Wed Mar 07 14:30:06 2012 Calib: MSE=1.089 (0.643) AzOffset=-0.001±0.010101 ElOffset=0.005±0.003830 DP=0.036±0.011
\r
4205 Wed Mar 07 15:26:04 2012 VASE File c:\windows\desktop\7-3-12\data_files\au.dat Angular scan of Au on Glass 20 -> 80 degrees
\r
4207 Tue Mar 13 11:24:44 2012 Init User: Sam (v3.698, 6.256 DLL)
\r
4210 Tue Mar 13 11:34:42 2012 Init User: Sam (v3.698, 6.256 DLL)
\r
4213 Tue Mar 13 16:17:14 2012 Init User: Sam (v3.698, 6.256 DLL)
\r
4215 Tue Mar 13 16:26:59 2012
\r
4216 Tue Mar 13 16:26:59 2012 Calib: rvs=5, pts=100, span=180.0, aoi=65.000, t=0, d=3
\r
4217 Tue Mar 13 16:31:34 2012 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
4218 Tue Mar 13 16:31:37 2012 Coarse Calib: Wvl1=5000.0 Ps=2.2459±0.0070 Attn=1.0133±0.0002 As=53.437±0.008 Psi=20.229±0.006 Del=172.826±0.070 <I>=14.426, MSE=1.48 (1.06)
\r
4219 Tue Mar 13 16:31:38 2012 Coarse Calib: MSE=1.477 (1.064) AzOffset=-0.015±0.004007 ElOffset=-0.020±0.005464
\r
4220 Tue Mar 13 16:32:20 2012
\r
4221 Tue Mar 13 16:32:20 2012 Calib: rvs=30, pts=60, span=60.0, aoi=65.000, t=1, d=3
\r
4222 Tue Mar 13 16:41:38 2012 Calib: Wvl1=5000.0 Ps=2.2540±0.0024 Attn=1.0137±0.0001 As=53.410±0.004 Psi=20.237±0.003 Del=172.852±0.033 <I>=8.507, MSE=0.913 (0.498) Synch=-47.398±0.020 [-47.424,-47.349] M1=0.0047±0.0016 [0.0019,0.0071]
\r
4223 Tue Mar 13 16:41:38 2012 Calib: Wvl2=11770.0 Ps=2.2540±0.0024 IrAttn=0.9712±0.0002 IrAs=51.133±0.006 IrPsi=15.332±0.002 IrDel=176.551±0.217 <I>=9.571 MSE=0.913 (0.498) Synch=-50.023±0.030 [-50.068,-49.976] M1=0.027±0.0073 [0.014,0.037]
\r
4224 Tue Mar 13 16:41:39 2012 Calib: MSE=0.913 (0.498) AzOffset=0.001±0.001887 ElOffset=-0.012±0.002570 DP=-0.005±0.016
\r
4225 Tue Mar 13 17:06:59 2012 RT File c:\windows\desktop\13-03-12\baseline.dat Baseline for rP and rS scan of Black-Au on Glass
\r
4226 Tue Mar 13 18:30:55 2012 RT File c:\windows\desktop\13-03-12\black-au_glass.dat Black-Au on Glass (0.18mbar, 3.5A, 1min)
\r
4228 Thu Mar 15 10:57:59 2012 Init User: Sam (v3.698, 6.256 DLL)
\r
4230 Thu Mar 15 11:02:52 2012
\r
4231 Thu Mar 15 11:02:52 2012 Calib: rvs=5, pts=100, span=180.0, aoi=70.000, t=0, d=3
\r
4232 Thu Mar 15 11:07:21 2012 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
4233 Thu Mar 15 11:07:24 2012 Coarse Calib: Wvl1=5000.0 Ps=2.2123±0.0060 Attn=1.0123±0.0002 As=35.196±0.007 Psi=13.516±0.007 Del=168.154±0.108 <I>=14.457, MSE=1.6 (1.21)
\r
4234 Thu Mar 15 11:07:25 2012 Coarse Calib: MSE=1.603 (1.208) AzOffset=-0.002±0.005757 ElOffset=-0.020±0.009823
\r
4235 Thu Mar 15 11:07:31 2012
\r
4236 Thu Mar 15 11:07:31 2012 Calib: rvs=30, pts=60, span=60.0, aoi=70.000, t=1, d=3
\r
4237 Thu Mar 15 11:16:49 2012 Calib: Wvl1=5000.0 Ps=2.2175±0.0036 Attn=1.0122±0.0003 As=35.140±0.009 Psi=13.517±0.008 Del=168.074±0.119 <I>=7.393, MSE=2.33 (1.37) Synch=-47.125±0.154 [-47.269,-46.634] M1=0.0022±0.00078 [0.00036,0.0041]
\r
4238 Thu Mar 15 11:16:49 2012 Calib: Wvl2=11770.0 Ps=2.2175±0.0036 IrAttn=0.9714±0.0005 IrAs=32.842±0.011 IrPsi=7.807±0.004 IrDel=172.853±0.320 <I>=7.021 MSE=2.33 (1.37) Synch=-49.757±0.052 [-49.860,-49.676] M1=0.023±0.005 [0.0087,0.029]
\r
4239 Thu Mar 15 11:16:50 2012 Calib: MSE=2.335 (1.366) AzOffset=-0.006±0.006366 ElOffset=0.023±0.010903 DP=0.055±0.027
\r
4240 Thu Mar 15 11:29:55 2012 RT File c:\windows\desktop\15-03-12\data_files\baseline.dat Baseline data for Transmission scan of Black-Au on Glass
\r
4241 Thu Mar 15 12:22:50 2012 RT File c:\windows\desktop\15-03-12\data_files\black-au_glass.dat Black-Au on Glass (0.18mbar 3.5A 1min)
\r
4242 Thu Mar 15 15:10:01 2012 RT File c:\windows\desktop\15-03-12\data_files\baseline_glass.dat Basline scan for glass
\r
4243 Thu Mar 15 15:54:57 2012 RT File c:\windows\desktop\15-03-12\data_files\glass.dat Glass Transmission scan
\r
4245 Fri Mar 16 10:41:28 2012 Init User: Sam (v3.698, 6.256 DLL)
\r
4248 Fri Mar 16 11:43:01 2012 Init User: Sam (v3.698, 6.256 DLL)
\r
4250 Fri Mar 16 11:49:42 2012
\r
4251 Fri Mar 16 11:49:42 2012 Calib: rvs=5, pts=100, span=180.0, aoi=65.000, t=0, d=3
\r
4252 Fri Mar 16 11:54:10 2012 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
4253 Fri Mar 16 11:54:14 2012 Coarse Calib: Wvl1=5000.0 Ps=2.2240±0.0055 Attn=1.0124±0.0002 As=116.821±0.006 Psi=20.231±0.004 Del=172.762±0.055 <I>=14.912, MSE=1.16 (0.828)
\r
4254 Fri Mar 16 11:54:14 2012 Coarse Calib: MSE=1.157 (0.828) AzOffset=0.003±0.003132 ElOffset=0.009±0.004283
\r
4255 Fri Mar 16 11:57:13 2012
\r
4256 Fri Mar 16 11:57:13 2012 Calib: rvs=30, pts=60, span=60.0, aoi=65.000, t=1, d=3
\r
4257 Fri Mar 16 12:06:31 2012 Calib: Wvl1=5000.0 Ps=2.2299±0.0023 Attn=1.0126±0.0001 As=116.783±0.004 Psi=20.234±0.003 Del=172.714±0.033 <I>=8.727, MSE=0.905 (0.494) Synch=98.284±0.021 [98.255,98.335] M1=0.0078±0.0031 [0.0035,0.013]
\r
4258 Fri Mar 16 12:06:31 2012 Calib: Wvl2=11770.0 Ps=2.2299±0.0023 IrAttn=0.9712±0.0002 IrAs=114.523±0.006 IrPsi=15.324±0.002 IrDel=176.777±0.233 <I>=8.439 MSE=0.905 (0.494) Synch=95.797±0.023 [95.755,95.854] M1=0.013±0.0068 [0.0044,0.021]
\r
4259 Fri Mar 16 12:06:31 2012 Calib: MSE=0.905 (0.494) AzOffset=0.005±0.001862 ElOffset=0.019±0.002551 DP=-0.012±0.016
\r
4260 Fri Mar 16 13:33:30 2012 VASE File c:\windows\desktop\16-03-12\black-au_glass.dat Black-Au on glass Spectro Scan (0.18mbar, 3.5A, 1min)
\r
4262 Wed Sep 19 12:42:38 2012 Init User: Sam (v3.698, 6.256 DLL)
\r
4264 Wed Sep 19 12:48:15 2012
\r
4265 Wed Sep 19 12:48:15 2012 Calib: rvs=5, pts=100, span=180.0, aoi=80.000, t=0, d=3
\r
4266 Wed Sep 19 12:52:44 2012 Calib: Coarse Calibration was successful. A Fine Calibration must be performed before ellipsometric data acquisition.
\r
4267 Wed Sep 19 12:52:47 2012 Coarse Calib: Wvl1=5000.0 Ps=2.1894±0.0060 Attn=1.0112±0.0002 As=102.669±0.006 Psi=8.936±0.009 Del=19.874±0.157 <I>=17.121, MSE=1.64 (1.51)
\r
4268 Wed Sep 19 12:52:47 2012 Coarse Calib: MSE=1.644 (1.506) AzOffset=-0.031±0.019458 ElOffset=-0.028±0.007767
\r
4269 Wed Sep 19 12:58:23 2012
\r
4270 Wed Sep 19 12:58:23 2012 Calib: rvs=30, pts=60, span=60.0, aoi=80.000, t=1, d=3
\r
4271 Wed Sep 19 13:07:41 2012 Calib: Wvl1=5000.0 Ps=2.1948±0.0021 Attn=1.0118±0.0002 As=102.524±0.005 Psi=8.942±0.006 Del=20.022±0.097 <I>=8.155, MSE=1.34 (0.759) Synch=114.008±0.019 [113.973,114.048] M1=0.0055±0.0022 [0.00031,0.0089]
\r
4272 Wed Sep 19 13:07:41 2012 Calib: Wvl2=11770.0 Ps=2.1948±0.0021 IrAttn=0.9691±0.0003 IrAs=100.117±0.006 IrPsi=13.845±0.002 IrDel=4.566±0.239 <I>=11.603 MSE=1.34 (0.759) Synch=110.980±0.013 [110.958,111.022] M1=0.013±0.0033 [0.0066,0.017]
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4273 Wed Sep 19 13:07:42 2012 Calib: MSE=1.335 (0.759) AzOffset=0.025±0.012142 ElOffset=0.006±0.004793 DP=-0.025±0.013
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4274 Wed Sep 19 13:20:24 2012 RT File c:\windows\desktop\19-09-12\control.dat Si calibration wafer Rp and Rs scan
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4275 Wed Sep 19 13:31:16 2012
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4276 Wed Sep 19 13:31:16 2012 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
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4277 Wed Sep 19 13:42:24 2012 Calib: Wvl1=5000.0 Ps=2.2192±0.0019 Attn=1.0128±0.0002 As=102.288±0.004 Psi=6.689±0.011 Del=120.031±0.059 <I>=6.805, MSE=1.12 (2.02) Synch=114.116±0.025 [114.075,114.163] M1=0.004±0.0014 [0.00056,0.0061]
\r
4278 Wed Sep 19 13:42:25 2012 Calib: Wvl2=11770.0 Ps=2.2192±0.0019 IrAttn=0.9703±0.0002 IrAs=99.982±0.005 IrPsi=3.208±0.002 IrDel=52.666±0.041 <I>=6.183 MSE=1.12 (2.02) Synch=111.003±0.069 [110.905,111.386] M1=0.014±0.0027 [0.004,0.017]
\r
4279 Wed Sep 19 13:42:25 2012 Calib: MSE=1.121 (2.015) AzOffset=0.020±0.004272 ElOffset=0.025±0.008055 DP=1.421±0.019
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4280 Wed Sep 19 14:43:19 2012 RT File c:\windows\desktop\19-09-12\control.dat Si calibration wafer Rp and Rs scan
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4281 Wed Sep 19 16:36:31 2012 RT File c:\windows\desktop\19-09-12\au+black_au+au_si.dat Au (30min 4.0A e-6mbar) + BlackAu (30min 3.1A 0.2mbar) + Au (125min 3.5A e-8mbar) Rp and Rs scan
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4282 Wed Sep 19 16:54:38 2012 VASE File c:\windows\desktop\19-09-12\au+black_au+au_si_ellipso.dat Au (30min 4.0A e-6mbar) + BlackAu (30min 3.1A 0.2mbar) + Au (125min 3.5A e-8mbar) Ellipsometric scans
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4284 Thu Sep 20 09:55:31 2012 Init User: Sam (v3.698, 6.256 DLL)
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4286 Thu Sep 20 10:11:31 2012
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4287 Thu Sep 20 10:11:31 2012 Calib: rvs=30, pts=60, span=60.0, aoi=75.000, t=1, d=3
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4288 Thu Sep 20 10:22:40 2012 Calib: Wvl1=5000.0 Ps=2.2385±0.0029 Attn=1.0106±0.0002 As=52.651±0.004 Psi=5.114±0.009 Del=142.152±0.134 <I>=5.817, MSE=1.27 (3.41) Synch=113.959±0.049 [113.848,114.209] M1=0.0035±0.00083 [0.00064,0.005]
\r
4289 Thu Sep 20 10:22:40 2012 Calib: Wvl2=11770.0 Ps=2.2385±0.0029 IrAttn=0.9686±0.0002 IrAs=50.302±0.005 IrPsi=2.078±0.004 IrDel=31.462±0.170 <I>=5.961 MSE=1.27 (3.41) Synch=111.123±0.103 [110.915,111.683] M1=0.039±0.0057 [0.0081,0.043]
\r
4290 Thu Sep 20 10:22:41 2012 Calib: MSE=1.265 (3.406) AzOffset=0.012±0.006674 ElOffset=0.014±0.023358 DP=0.071±0.012
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4291 Thu Sep 20 11:15:29 2012 VASE File c:\windows\desktop\2012-09-20\au+blackau+au_si_ellipso.dat Au (30min 4A e-6mbar) + BlackAu (30min 3.2A 0.2mbar) + Au (125min 3.5A e-8mbar) on Si Ellipsometric scan
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4292 Thu Sep 20 12:43:09 2012 VASE File c:\windows\desktop\2012-09-20\jeremy.dat Jeremy's sample (Ta/Py/Ni/Ta/Si Fe20Ni80)
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4293 Thu Sep 20 15:18:20 2012 VASE File c:\windows\desktop\2012-09-20\au_glass_ellipso.dat Au on Glass (6min 3.2A e-5mbar)
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4294 Thu Sep 20 15:48:20 2012 VASE File c:\windows\desktop\2012-09-20\ni+au_si.dat Ni on Au/Si provided by Mikhail Kostylev
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4295 Thu Sep 20 16:10:52 2012 VASE File c:\windows\desktop\2012-09-20\whiteni+au_si.dat "White" Ni on Au/Si provided by Mikhail Kostylev
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4296 Thu Sep 20 16:31:15 2012 VASE File c:\windows\desktop\2012-09-20\ni+au_si(2).dat Ni on Au/Si provided by Mikhail Kostylev (this time I removed the alignment detector)
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4297 Thu Sep 20 16:38:52 2012 SendMonoCmd Error: Monochromator Command Return Failed 31. DK
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4298 Thu Sep 20 16:39:27 2012 GetMonoStatus Error: Mono Return Failed 27. rtn=1. DK
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4299 Thu Sep 20 16:39:27 2012 d=01 cmd=255 00 86 A2 00 18 00 00 18 00 00
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4300 Thu Sep 20 16:39:27 2012 MonoCheck Error: Monochromator Communication Failed. DK
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4301 Thu Sep 20 16:39:27 2012 Could Not Adjust Slit Width. DK
git.ucc.asn.au / matches / honours.git / blob
UCC git Repository :: git.ucc.asn.au