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  16 \citation{woolam2000}
  17 \citation{oates2011}
  18 \citation{woolam1999}
  19 \citation{woolam1999}
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  21 \@writefile{toc}{\contentsline {subsection}{\numberline {3.2.1}Variable Angle Spectroscopic Ellipsometry}{8}{subsection.3.2.1}}
  22 \@writefile{lof}{\contentsline {figure}{\numberline {3.3}{\ignorespaces Block diagram of the VASE  (taken from \emph  {Overview of Variable Angle Spectroscopic Ellipsometry (VASE), Part I: Basic Theory and Typical Applications} \cite  {woolam1999})\relax }}{8}{figure.3.3}}
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  25 \@writefile{toc}{\contentsline {section}{\numberline {3.4}Scanning Electron Microscopy}{8}{section.3.4}}
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