research/ellipsometry/WVASE32/DAT/290611_nick_si.dat

   1 Si callibratrion wafer test\r
   2 VASEmethod[EllipsometerType=0, Isotropic, AutoRetarder=0, TrackPol=1, Pol>=0, Revs=10, MaxRevs=10, I_Threshold=0.40, I_MinUsable=0.005, AutoSlit=2000, WVASE=3.698, HardVer=6.256, Wed Jun 29 18:40:16 2011]\r
   3 Original[290611_nick_si.dat]\r
   4 nm\r
   5 290.000000      65.000000       32.046005       152.68605       2.04569 9.8828\r
   6 300.000000      65.000000       31.502947       150.89607       0.907254        4.18573\r
   7 310.000000      65.000000       31.317411       152.24844       0.503207        2.43307\r
   8 320.000000      65.000000       30.373102       154.08992       0.307225        1.61078\r
   9 330.000000      65.000000       30.405107       152.37175       0.207693        1.02586\r
  10 340.000000      65.000000       30.116146       154.02287       0.140081        0.736708\r
  11 350.000000      65.000000       30.072403       154.53358       0.0974983       0.522787\r
  12 360.000000      65.000000       30.708654       157.74071       0.0703862       0.423106\r
  13 370.000000      65.000000       30.650436       163.66916       0.051632        0.418552\r
  14 380.000000      65.000000       28.921856       168.10014       0.0372266       0.426282\r
  15 390.000000      65.000000       27.132704       171.16084       0.0276004       0.442275\r
  16 400.000000      65.000000       25.791698       170.80878       0.021671        0.346112\r
  17 410.000000      65.000000       24.726686       172.2009        0.018641        0.361313\r
  18 420.000000      65.000000       23.888906       171.54384       0.0173083       0.317683\r
  19 430.000000      65.000000       23.250076       172.62019       0.0158954       0.340958\r
  20 440.000000      65.000000       22.585257       173.14079       0.0147187       0.347287\r
  21 450.000000      65.000000       22.08514        172.81633       0.0136907       0.314014\r
  22 460.000000      65.000000       21.611849       172.75539       0.0132176       0.305876\r
  23 470.000000      65.000000       21.19837        172.82118       0.0125235       0.297044\r
  24 480.000000      65.000000       20.828629       173.07587       0.0126881       0.316449\r
  25 490.000000      65.000000       20.464102       173.28914       0.0124349       0.324611\r
  26 500.000000      65.000000       20.17169        173.09158       0.0122145       0.313494\r
  27 510.000000      65.000000       19.887163       173.54128       0.0120088       0.333469\r
  28 520.000000      65.000000       19.611609       174.48628       0.0118211       0.388754\r
  29 530.000000      65.000000       19.376984       173.4968        0.0117096       0.330067\r
  30 540.000000      65.000000       19.157885       174.21858       0.0115829       0.370597\r
  31 550.000000      65.000000       18.937592       174.83971       0.0114604       0.414673\r
  32 560.000000      65.000000       18.734467       174.36249       0.011363        0.379947\r
  33 570.000000      65.000000       18.56299        173.91383       0.0112847       0.352384\r
  34 580.000000      65.000000       18.380749       174.57416       0.0112405       0.396879\r
  35 590.000000      65.000000       18.230419       174.13933       0.0111778       0.368091\r
  36 600.000000      65.000000       18.103258       174.44928       0.0112481       0.393368\r
  37 610.000000      65.000000       17.955786       174.38091       0.0111541       0.388082\r
  38 620.000000      65.000000       17.839153       174.80452       0.0110798       0.419162\r
  39 630.000000      65.000000       17.711496       174.8777        0.0110932       0.428306\r
  40 640.000000      65.000000       17.586954       175.13216       0.011178        0.456851\r
  41 650.000000      65.000000       17.488834       174.62877       0.011174        0.416059\r
  42 660.000000      65.000000       17.37265        174.23837       0.0114413       0.399583\r
  43 670.000000      65.000000       17.27944        174.26527       0.0113571       0.400378\r
  44 680.000000      65.000000       17.201418       175.37041       0.0113865       0.498815\r
  45 690.000000      65.000000       17.112494       175.491 0.011185        0.505341\r
  46 700.000000      65.000000       17.036961       175.45088       0.0116926       0.525671\r
  47 710.000000      65.000000       16.921902       174.49283       0.0117843       0.440546\r
  48 720.000000      65.000000       16.858557       174.40361       0.0117662       0.434318\r
  49 730.000000      65.000000       16.814362       174.75967       0.0119912       0.473672\r
  50 740.000000      65.000000       16.739025       175.29597       0.0122776       0.542217\r
  51 750.000000      65.000000       16.669476       175.91188       0.012592        0.641965\r
  52 760.000000      65.000000       16.600489       175.51724       0.0131505       0.613831\r
  53 770.000000      65.000000       16.538427       175.54579       0.0135796       0.64003\r
  54 780.000000      65.000000       16.498148       175.66962       0.0164107       0.797237\r
  55 790.000000      65.000000       16.430227       174.17456       0.0148162       0.537578\r
  56 800.000000      65.000000       16.38726        175.00211       0.0166697       0.70621\r
  57 810.000000      65.000000       16.357124       176.01639       0.0194113       1.03269\r
  58 820.000000      65.000000       16.281778       175.31871       0.0140314       0.638154\r
  59 830.000000      65.000000       16.245241       176.40028       0.0102704       0.608196\r
  60 840.000000      65.000000       16.186794       174.67641       0.0150464       0.605172\r
  61 850.000000      65.000000       16.137146       176.9828        0.0187675       1.33324\r
  62 860.000000      65.000000       16.107246       175.95383       0.0159802       0.848601\r
  63 870.000000      65.000000       16.067553       175.44437       0.011642        0.550501\r
  64 880.000000      65.000000       16.018183       175.60246       0.0095069       0.466933\r
  65 890.000000      65.000000       16.012045       176.64398       0.00954587      0.614093\r
  66 900.000000      65.000000       15.95464        175.53636       0.00945178      0.459\r
  67 910.000000      65.000000       15.937002       176.81216       0.00947483      0.644292\r
  68 920.000000      65.000000       15.893024       175.54568       0.00935575      0.456863\r
  69 930.000000      65.000000       15.851421       176.59624       0.00951479      0.608997\r
  70 940.000000      65.000000       15.834909       175.91754       0.00935916      0.500164\r
  71 950.000000      65.000000       15.784935       176.15981       0.00932444      0.531156\r
  72 960.000000      65.000000       15.780293       176.52916       0.009432        0.594452\r
  73 970.000000      65.000000       15.729781       175.65614       0.0093713       0.473584\r
  74 980.000000      65.000000       15.699099       177.30521       0.00925008      0.753864\r
  75 990.000000      65.000000       15.691611       176.13866       0.00926787      0.527851\r
  76 1000.000000     65.000000       15.655298       175.95235       0.00930233      0.506548\r
  77 290.000000      70.000000       35.775742       152.66623       2.36571 10.8176\r
  78 300.000000      70.000000       28.649239       141.52969       0.981054        3.7471\r
  79 310.000000      70.000000       28.145662       140.38881       0.5352  2.01704\r
  80 320.000000      70.000000       26.954367       139.28384       0.32769 1.24251\r
  81 330.000000      70.000000       26.189934       142.15161       0.222078        0.913602\r
  82 340.000000      70.000000       26.086143       142.83525       0.151341        0.634096\r
  83 350.000000      70.000000       26.246639       145.43422       0.105971        0.470772\r
  84 360.000000      70.000000       26.968899       149.39247       0.077392        0.376004\r
  85 370.000000      70.000000       26.616587       157.5809        0.0568428       0.372024\r
  86 380.000000      70.000000       24.126625       163.95076       0.0401539       0.388977\r
  87 390.000000      70.000000       21.922892       166.39073       0.0299374       0.367086\r
  88 400.000000      70.000000       20.280231       167.28995       0.0229883       0.32118\r
  89 410.000000      70.000000       19.017445       167.8614        0.0192098       0.296382\r
  90 420.000000      70.000000       18.005327       167.45616       0.0174697       0.273489\r
  91 430.000000      70.000000       17.105976       168.72224       0.015629        0.284127\r
  92 440.000000      70.000000       16.406286       168.65057       0.0135064       0.253144\r
  93 450.000000      70.000000       15.747756       169.30304       0.0121163       0.249766\r
  94 460.000000      70.000000       15.187457       168.842 0.0111909       0.228596\r
  95 470.000000      70.000000       14.686779       169.53761       0.0100494       0.225533\r
  96 480.000000      70.000000       14.22284        169.39316       0.0105486       0.240489\r
  97 490.000000      70.000000       13.837603       169.6178        0.0100793       0.240682\r
  98 500.000000      70.000000       13.468875       169.12917       0.00994999      0.232802\r
  99 510.000000      70.000000       13.126602       169.26181       0.00959558      0.232728\r
 100 520.000000      70.000000       12.831952       169.46402       0.00929264      0.234546\r
 101 530.000000      70.000000       12.509687       169.52837       0.00922585      0.239927\r
 102 540.000000      70.000000       12.267384       169.95329       0.00905608      0.249891\r
 103 550.000000      70.000000       12.046311       169.81276       0.00890439      0.246519\r
 104 560.000000      70.000000       11.804544       170.21407       0.00878232      0.257868\r
 105 570.000000      70.000000       11.592168       170.04483       0.00892009      0.261983\r
 106 580.000000      70.000000       11.387053       170.31686       0.00884147      0.271433\r
 107 590.000000      70.000000       11.212399       170.60031       0.00879839      0.282274\r
 108 600.000000      70.000000       11.054549       170.83821       0.00910233      0.303589\r
 109 610.000000      70.000000       10.881466       170.30991       0.00895775      0.28689\r
 110 620.000000      70.000000       10.728773       170.68658       0.00884092      0.298468\r
 111 630.000000      70.000000       10.57031        170.14427       0.0093977       0.304297\r
 112 640.000000      70.000000       10.451164       170.79259       0.00980923      0.343456\r
 113 650.000000      70.000000       10.325837       170.74872       0.00987878      0.348254\r
 114 660.000000      70.000000       10.224872       170.72949       0.0105  0.37288\r
 115 670.000000      70.000000       10.105412       171.07541       0.0103662       0.386587\r
 116 680.000000      70.000000       10.005626       171.34727       0.010511        0.408056\r
 117 690.000000      70.000000       9.8947544       171.79863       0.0100459       0.415706\r
 118 700.000000      70.000000       9.8144894       171.4614        0.011494        0.460565\r
 119 710.000000      70.000000       9.7188091       171.48418       0.0118571       0.480872\r
 120 720.000000      70.000000       9.6239252       172.39667       0.0118676       0.543723\r
 121 730.000000      70.000000       9.5179043       171.17155       0.0124274       0.496137\r
 122 740.000000      70.000000       9.4643059       171.88652       0.0132355       0.577723\r
 123 750.000000      70.000000       9.3968201       171.23491       0.0140665       0.572598\r
 124 760.000000      70.000000       9.331955        170.75508       0.0153802       0.59781\r
 125 770.000000      70.000000       9.1915531       172.23903       0.016315        0.765495\r
 126 780.000000      70.000000       9.1737461       172.17554       0.0221836       1.03438\r
 127 790.000000      70.000000       9.0857019       172.92474       0.0190536       0.991096\r
 128 800.000000      70.000000       9.0564785       171.79248       0.0215873       0.971866\r
 129 810.000000      70.000000       8.9633369       170.17284       0.0338826       1.28899\r
 130 820.000000      70.000000       8.9240627       171.84749       0.00826762      0.380139\r
 131 830.000000      70.000000       8.8748751       171.81473       0.00740846      0.341098\r
 132 840.000000      70.000000       8.8344536       172.2504        0.0113031       0.551892\r
 133 850.000000      70.000000       8.7934914       170.69238       0.0233391       0.954413\r
 134 860.000000      70.000000       8.7104883       172.08075       0.0188245       0.911942\r
 135 870.000000      70.000000       8.6643248       172.46146       0.0109729       0.561119\r
 136 880.000000      70.000000       8.6300154       172.15919       0.00565909      0.279371\r
 137 890.000000      70.000000       8.5908012       172.89787       0.00578976      0.316755\r
 138 900.000000      70.000000       8.5617676       172.4642        0.00555843      0.287637\r
 139 910.000000      70.000000       8.5164375       172.27467       0.00564334      0.286377\r
 140 920.000000      70.000000       8.4768829       172.84923       0.00529383      0.291404\r
 141 930.000000      70.000000       8.4418325       172.91759       0.00588737      0.328502\r
 142 940.000000      70.000000       8.4049435       172.51062       0.00537377      0.284846\r
 143 950.000000      70.000000       8.3683949       172.79749       0.00532248      0.294539\r
 144 960.000000      70.000000       8.3400421       173.07684       0.00567676      0.327829\r
 145 970.000000      70.000000       8.3004026       172.47905       0.00554218      0.296114\r
 146 980.000000      70.000000       8.2682276       172.95331       0.00516482      0.295529\r
 147 990.000000      70.000000       8.2302523       172.82959       0.00521676      0.294689\r
 148 1000.000000     70.000000       8.2144413       172.62538       0.00539624      0.296985\r
 149 290.000000      75.000000       33.940731       115.2794        2.19254 5.23358\r
 150 300.000000      75.000000       27.071531       123.97619       1.08442 3.22663\r
 151 310.000000      75.000000       24.565632       121.03437       0.555422        1.7074\r
 152 320.000000      75.000000       22.45895        120.26434       0.349622        1.1422\r
 153 330.000000      75.000000       22.278561       123.99647       0.253555        0.871694\r
 154 340.000000      75.000000       21.758316       125.33086       0.171377        0.609857\r
 155 350.000000      75.000000       21.419605       127.76673       0.119054        0.442574\r
 156 360.000000      75.000000       21.961887       134.50545       0.0905906       0.36611\r
 157 370.000000      75.000000       20.779236       145.09833       0.0665641       0.350623\r
 158 380.000000      75.000000       17.437267       153.76134       0.046953        0.369666\r
 159 390.000000      75.000000       14.617636       155.88144       0.0368917       0.368585\r
 160 400.000000      75.000000       12.653976       155.97958       0.0289791       0.332384\r
 161 410.000000      75.000000       11.107265       156.01967       0.0244269       0.317398\r
 162 420.000000      75.000000       9.8861437       155.80338       0.0229977       0.331266\r
 163 430.000000      75.000000       8.8887472       154.76689       0.0206705       0.317138\r
 164 440.000000      75.000000       8.0873604       154.28624       0.016488        0.271617\r
 165 450.000000      75.000000       7.3513665       154.53026       0.0129219       0.234722\r
 166 460.000000      75.000000       6.7340083       152.1463        0.0112227       0.20294\r
 167 470.000000      75.000000       6.1851687       151.33063       0.00847591      0.160989\r
 168 480.000000      75.000000       5.6714411       150.33647       0.0100753       0.200054\r
 169 490.000000      75.000000       5.2585521       148.84254       0.00942103      0.190555\r
 170 500.000000      75.000000       4.8701935       147.37477       0.00900855      0.186083\r
 171 510.000000      75.000000       4.5244741       146.27058       0.00865841      0.184261\r
 172 520.000000      75.000000       4.1824169       144.8172        0.0083592       0.182157\r
 173 530.000000      75.000000       3.9031804       142.75102       0.00826914      0.179865\r
 174 540.000000      75.000000       3.6157637       141.96919       0.00820454      0.186077\r
 175 550.000000      75.000000       3.3708749       139.26184       0.00829003      0.18463\r
 176 560.000000      75.000000       3.1507051       138.19539       0.00840704      0.192187\r
 177 570.000000      75.000000       2.9441755       135.98119       0.00862196      0.196002\r
 178 580.000000      75.000000       2.7838781       133.35469       0.00894826      0.198154\r
 179 590.000000      75.000000       2.6057038       131.53152       0.00929794      0.206626\r
 180 600.000000      75.000000       2.4663565       128.65346       0.0104783       0.224994\r
 181 610.000000      75.000000       2.3034024       127.21901       0.0106653       0.232283\r
 182 620.000000      75.000000       2.2344828       123.13329       0.0112851       0.225129\r
 183 630.000000      75.000000       2.0369868       121.83449       0.0122661       0.252749\r
 184 640.000000      75.000000       1.9043649       119.46942       0.0139312       0.281987\r
 185 650.000000      75.000000       1.883921        115.38365       0.0153914       0.279168\r
 186 660.000000      75.000000       1.7991301       113.05562       0.017946        0.313472\r
 187 670.000000      75.000000       1.7259065       109.3699        0.0195592       0.314238\r
 188 680.000000      75.000000       1.6801722       104.64394       0.0226584       0.321709\r
 189 690.000000      75.000000       1.5609517       103.40665       0.023018        0.325202\r
 190 700.000000      75.000000       1.4985896       99.780617       0.0308008       0.397919\r
 191 710.000000      75.000000       1.5476795       95.807716       0.0339449       0.397717\r
 192 720.000000      75.000000       1.4251146       93.733223       0.0377296       0.431535\r
 193 730.000000      75.000000       1.3793603       89.832542       0.0423255       0.471785\r
 194 740.000000      75.000000       1.4368627       87.008522       0.0431064       0.488076\r
 195 750.000000      75.000000       1.3304161       83.396347       0.046392        0.567086\r
 196 760.000000      75.000000       1.3703707       79.824097       0.0457868       0.615416\r
 197 770.000000      75.000000       1.3335459       76.550316       0.0451705       0.685318\r
 198 780.000000      75.000000       1.4014449       73.2117 0.0549391       0.913304\r
 199 790.000000      75.000000       1.4415561       71.006302       0.0436208       0.769453\r
 200 800.000000      75.000000       1.4376944       68.994072       0.0468424       0.886591\r
 201 810.000000      75.000000       1.3678758       64.994888       0.0638992       1.43781\r
 202 820.000000      75.000000       1.3750401       62.083847       0.0124954       0.309141\r
 203 830.000000      75.000000       1.3895907       61.013195       0.0104256       0.265069\r
 204 840.000000      75.000000       1.3743631       57.829262       0.0167352       0.477033\r
 205 850.000000      75.000000       1.2817296       53.213673       0.03351 1.1814\r
 206 860.000000      75.000000       1.3905541       53.282234       0.0266699       0.87218\r
 207 870.000000      75.000000       1.4985989       53.755367       0.014779        0.44578\r
 208 880.000000      75.000000       1.4761547       50.95145        0.00543646      0.181609\r
 209 890.000000      75.000000       1.4758823       49.180355       0.00557945      0.1972\r
 210 900.000000      75.000000       1.4852053       47.282475       0.00501237      0.187121\r
 211 910.000000      75.000000       1.5000799       45.898571       0.00509334      0.196938\r
 212 920.000000      75.000000       1.51442 44.139229       0.00437319      0.177372\r
 213 930.000000      75.000000       1.5355268       42.601734       0.00530889      0.223442\r
 214 940.000000      75.000000       1.5536515       41.308815       0.00440108      0.191136\r
 215 950.000000      75.000000       1.5685475       39.960682       0.0042699       0.192172\r
 216 960.000000      75.000000       1.5935202       39.278904       0.0048228       0.218776\r
 217 970.000000      75.000000       1.6195701       38.677101       0.00460793      0.210061\r
 218 980.000000      75.000000       1.6278176       36.862617       0.00393591      0.189946\r
 219 990.000000      75.000000       1.6571352       36.532291       0.0040342       0.193614\r
 220 1000.000000     75.000000       1.6740266       35.915588       0.004298        0.208717